CN106556803A - A kind of mode of resonance Magnetic Sensor - Google Patents
A kind of mode of resonance Magnetic Sensor Download PDFInfo
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- CN106556803A CN106556803A CN201510615695.9A CN201510615695A CN106556803A CN 106556803 A CN106556803 A CN 106556803A CN 201510615695 A CN201510615695 A CN 201510615695A CN 106556803 A CN106556803 A CN 106556803A
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Abstract
The present invention proposes a kind of mode of resonance Magnetic Sensor, including triple-beam structure resonant tuning fork, piezo-electric drive units, piezoelectric detection unit and phase-locked oscillation circuit；The triple-beam structure resonant tuning fork is made by magnetostriction materials, with the walking beam that three both-ends are fixed；Piezo-electric drive units and piezoelectric detection unit are compounded in the two ends of the intermediate beam of the triple-beam structure resonant tuning fork；Piezo-electric drive units and piezoelectric detection unit are connected with the input and outfan of phase-locked oscillation circuit by its electrode respectively；Phase-locked oscillation circuit is used to encourage and maintains triple-beam structure resonant tuning fork to vibrate under optimization mode of oscillation, and output represents the signal of telecommunication of three beam tuning fork resonance frequencies.As the elastic modelling quantity of magnetostriction materials changes with static magnetic field, the resonant frequency of triple-beam structure resonant tuning fork is also with changes of magnetic field, therefore the present invention can be used for the high sensitivity detection in static and quasistatic magnetic field, and small volume, low cost.
Description
Technical field
The present invention relates to a kind of mode of resonance Magnetic Sensor, constitutes three beam tuning fork resonators especially with magnetostriction materials
Coil Magnetic Sensor.
Background technology
Traditional Magnetic Sensor species mainly has superconductive quantum interference gaussmeter (SQUID), Hall element, magnetic flux door sensor
Sensor, magnetodiode Magnetic Sensor, magnetic sensitive transistor Magnetic Sensor, nuclear magnetic resonance, NMR Magnetic Sensor, light pump type magnetic are passed
Sensor, giant magnetic impedance sensor, induction Magnetic Sensor etc..SQUID is the low frequency Magnetic Sensor of full accuracy,
But which needs to work at low temperature, and volume is big, expensive；Fluxgate magnetic sensor, nuclear magnetic resonance, NMR Magnetic Sensor and
The complex structure of light pump type Magnetic Sensor, and heavy, expensive, power consumption is high；The sensitivity of giant magnetic impedance sensor is very
Height, however it is necessary that the bridge circuit of precision and active excitation work；The high precision of induction Magnetic Sensor, but volume
Greatly, it is not suitable for detecting slowly varying magnetic field.
Magnetostriction materials and piezoelectric, with the physic field coupling effect such as magnetic, electricity, power, can realize respectively magnetic-
Machine and Electricity and machine conversion and reverse transformation.Both material laminates are combined, can also be due to composite " product effect "
Produce new features --- magnetoelectric effect.At present, insider constitutes compound magnetic by magnetostriction materials and piezoelectric compound
Electric transducing unit, designs highly sensitive Magnetic Sensor, such as document using the magnetoelectric effect that its " product effect " is produced
The Magnetic Sensor based on compound magnetoelectric transducing unit of the reports such as Dong, its sensitivity is up to 10-11T(Shuxiang
Dong,Jie-Fang Li,and D.Viehland,Ultrahigh magnetic field sensitivity in laminates of
TERFENOL-D and Pb(Mg1/3Nb2/3O3–bUltO3crystals,Appl.Phys.Lett.,vol.83,no.11,2003)。
But due to the capacitance characteristic of piezoelectric material layer, the magnetoelectric effect that " product effect " is produced has obvious high pass characteristic, leads
Cause sensor low-frequency magnetic electroresponse poor-performing and be unable to direct detection static magnetic field (Shuxiang Dong, Junyi Zhai,
Zhengping Xing, Jie-Fang Li, and D.Viehland, Extremely low frequency response of
magnetoelectric multilayer composites,Appl.Phys.Lett.86,102901,2005).Some scholars are multiple
Close coiling outside magnetoelectricity transducing unit producing magnetic pumping magnetic field, under excitation field effect, to change using compound magnetoelectric
The magnetoelectricity of energy unit exports with the characteristic of changes of magnetic field to carry out static and quasistatic detection of magnetic field, so as to overcome compound magnetoelectric
The shortcoming of transducing unit low-frequency magnetic electroresponse poor-performing.But, the mode of this coil stimulating brings new problem again,
The problems such as example coil stimulating can produce electromagnetic interference, Joule heat, so as to cause, biosensor power consumption is big, stability is poor, also
It is possible to cause electromagnetic interference to other electronic equipments.Germany scientist (S.Marauska, R.Jahns, C.Kirchhof, M.
Claus,E.Quandt,R.B.Wagner,Highly sensitive wafer-level packaged MEMS
magnetic field sensor based on magnetoelectric composites,Sensors and Actuators A 189,
2013,321–327；R.Jahns,S.Zabel,S.Marauska,B.Gojdka,B.Wagner,R.R.
Adelung,and F.Faupel,Microelectromechanical magnetic field sensor based onΔE effect,
105,052414,2014) Applied Physics Letters devise the MEMS resonant magnetic of magnetostriction/Piezoelectric anisotropy and pass
Sensor, using the characteristic of magnetostriction materials elastic modulus change under the action of a magnetic field (i.e. Δ E effects), causes mangneto to stretch
The MEMS resonator output frequency of contracting/Piezoelectric anisotropy changes to detect static state or quasistatic magnetic field.This method need not make
With coil, circuit builds simply, but its sensor resonant unit adopts cantilever beam structure, and magnetostriction and piezo stack
The compound mode of layer reduces observable sensitivity.The reason for detectable sensitivity decrease, is as follows：In interlayer ideal coupling
Under the conditions of conjunction, the average elastic modulus of laminated composite structure are：E=nmEm+(1-nm)Ep, wherein nmIt is magnetostriction
The volume ratio of composite construction, E shared by layermAnd EpIt is the elastic modelling quantity of magnetostrictive layer combined pressure electric layer respectively, thus exists
Under the action of a magnetic field, the average elastic modulus variable quantity of laminated construction is Δ E=nmΔEm, therefore say the sensitivity quilt of frequency response
Reduce；On the other hand, as cantilever beam structure fixing end has a vibration coupling loss, the quality of cantilever beam resonator because
Number (Q-value) is not high enough, which has limited the detected with high accuracy of field frequency variable quantity.
The content of the invention
It is an object of the invention to propose a kind of mode of resonance Magnetic Sensor, can be used for the high sensitivity in static and quasistatic magnetic field
Detection, and small volume, low cost.
In order to solve above-mentioned technical problem, the present invention provides a kind of mode of resonance Magnetic Sensor, including triple-beam structure resonant tuning fork,
Piezo-electric drive units, piezoelectric detection unit and phase-locked oscillation circuit；The integrated lamellar of the triple-beam structure resonant tuning fork
The resonator of structure, is made by magnetostriction materials, with the walking beam that three both-ends are fixed；Piezo-electric drive units
The piezoelectric material film with Top electrode and bottom electrode, piezo-electric drive units and piezoelectric detection list are with piezoelectric detection unit
Unit is compounded in the two ends of the intermediate beam of the triple-beam structure resonant tuning fork respectively, and bottom electrode is grounded；Piezo-electric drive units
It is connected with the input and outfan of phase-locked oscillation circuit by its Top electrode with piezoelectric detection unit respectively；Pll oscillation electricity
Road is used to encourage and maintains triple-beam structure resonant tuning fork to vibrate under optimization mode of oscillation, and output represents three beam tuning fork resonance
The signal of telecommunication of frequency；When triple-beam structure resonant tuning fork is vibrated in the case where mode of oscillation is optimized, its middle vibration of beam direction and two
The direction of vibration of individual curb girder is contrary.As the elastic modelling quantity of magnetostriction materials changes with static magnetic field, triple-beam structure resonance
The resonant frequency of tuning fork is also with changes of magnetic field, therefore the present invention can be used for the high sensitivity detection in static and quasistatic magnetic field.
The bottom electrode of the piezo-electric drive units and piezoelectric detection unit is respectively connected with bottom electrode extraction electrode, and Top electrode connects
It is connected to Top electrode extraction electrode.
Used as a kind of preferred version, phase-locked oscillation circuit includes charge amplifier, phase shifter and second level amplifier, piezoelectricity
The vibration signal of the triple-beam structure resonant tuning fork for detecting is transferred to detector unit the input of charge amplifier, and electric charge is put
Secondary amplification is carried out by second level amplifier after the shifted device phase shift of amplification output signal of big device, the signal exported after amplification
Piezo-electric drive units are transferred to as drive signal, drive piezoelectric unit vibration, the vibration of piezoelectric unit further to drive three
Girder construction resonant tuning fork is vibrated under the optimization mode of oscillation；Phase shifter outfan draws signal all the way, senses as magnetic
The output signal of the magnetic-field measurement of device, detects magnetic field by the value of detection resonant frequency.
Compared with prior art, its remarkable advantage is that Magnetic Sensor of the present invention utilizes magnetostriction material to the present invention
The Δ E effects (i.e. magnetostriction materials elastic modelling quantity is with changes of magnetic field characteristic) of material cause magnetostriction triple-beam structure tuning fork
The Characteristics Detection magnetic field of resonant frequency change, need not when carrying out static and quasistatic detection of magnetic field using Magnetic Sensor of the present invention
Using coil stimulating and sensing, the shortcomings of overcoming that conventionally employed coil method power consumption is big, produce Joule heat and electromagnetic interference；
Triple-beam structure resonant tuning fork is higher than the quality factor of cantilever beam structure, is conducive to improving detectivity；Triple-beam structure is humorous
The tuning fork that shakes can adopt the method for Laser Micro-Machining to cut existing magnetostriction materials thin film and realize, it would however also be possible to employ physics
Prepared by the method for sputtering, can be realized in the way of MEMS (MEMS) so that magnetic sensing probe low cost,
Small volume.
Description of the drawings
Fig. 1 is a kind of embodiment schematic diagram of mode of resonance Magnetic Sensor of the present invention；
Fig. 2 is the optimization mode of oscillation schematic diagram of triple-beam structure resonant tuning fork in the present invention；
Fig. 3 is a kind of embodiment schematic diagram of phase-locked oscillation circuit in the present invention.
Specific embodiment
It is easy to understand, according to technical scheme, in the case where the connotation of the present invention is not changed, this area
Those skilled in the art can imagine the numerous embodiments of mode of resonance Magnetic Sensor of the present invention.Therefore, it is real in detail below
It is only the exemplary illustration to technical scheme to apply mode and accompanying drawing, and be not to be construed as the present invention whole or
It is considered as the restriction to technical solution of the present invention or restriction.
With reference to Fig. 1, mode of resonance Magnetic Sensor shown in the present embodiment, including triple-beam structure resonant tuning fork 1, Piezoelectric Driving list
First 2-1, piezoelectric detection unit 2-2 and phase-locked oscillation circuit 6 are constituted；
The resonator of 1 integrated laminated structure of triple-beam structure resonant tuning fork, is made by magnetostriction materials.Three beams
The walking beam that structure resonance tuning fork 1 is fixed with three both-ends, the intermediate beam 1-1 and two curb girder 1-2 in such as Fig. 1,
The width of intermediate beam 1-1 is approximately the twice of curb girder 1-2 width.According to analysis of finite element method, as shown in Figure 2
Under optimization mode of oscillation, the direction of vibration of the direction of vibration of intermediate beam 1-1 and two curb girder 1-2 is conversely, so as to intermediate beam
The moment of flexure of 1-1 and two curb girder 1-2 and shearing force are offset, and greatly reduce the walking beam of this three both-ends fixations solid
The coupled oscillationses loss of fixed end, improves the quality factor of resonator.
Piezo-electric drive units 2-1 and piezoelectric detection unit 2-2 are the piezoelectric material film with Top electrode and bottom electrode,
Piezo-electric drive units 2-1 and piezoelectric detection unit 2-2 are compounded in triple-beam structure resonant tuning fork by its bottom electrode laminating respectively
Two fixing ends of 1 intermediate beam 1-1, and bottom electrode is grounded；Piezo-electric drive units 2-1 and piezoelectric detection unit 2-2
It is connected with the input and outfan of phase-locked oscillation circuit by its electrode respectively.
Phase-locked oscillation circuit is used to encourage and maintains resonator to vibrate under optimization mode of oscillation, and export resonance frequency letter
Number.
Connect for the ease of lead, the bottom electrode of piezo-electric drive units 2-1 and piezoelectric detection unit 2-2 is respectively connected with lower electricity
Pole extraction electrode 3, Top electrode are respectively connected with Top electrode extraction electrode 4, wire ground or connect that extraction electrode is welded with which
Phase-locked oscillation circuit.The electrode of piezoelectric detection unit 2-2 and piezo-electric drive units 2-1 is connected to input by lead respectively
To phase-locked oscillation circuit input and outfan.
Fig. 3 is a kind of implementation method of phase-locked oscillation circuit 6, mainly by charge amplifier 7, phase shifter 8 and the second level
Amplifier 9 is constituted, and phase-locked oscillation circuit 6 collectively forms self-oscillation with triple-beam structure resonant tuning fork 1, produces frequency defeated
Go out.The vibration signal of the triple-beam structure resonant tuning fork 1 for detecting is transferred to electricity by Top electrode by piezoelectric detection unit 2-2
The input of lotus amplifier 7, is amplified by the second level after shifted 8 phase shift of device of amplification output signal of charge amplifier 7 again
Device 9 carries out secondary amplification, and the drive signal exported after amplification is transferred to piezo-electric drive units 2-1, drives piezoelectric unit 2-1
Vibration, the vibration of piezoelectric unit 2-1 further drive triple-beam structure resonant tuning fork 1 to vibrate under optimization mode of oscillation.This
The control mode of closed loop feedback is planted, triple-beam structure tuning fork resonator can be made to maintain selected mode of oscillation vibration.Simultaneously
Signal all the way is drawn in 8 outfan of phase shifter, you can as the frequency output signal of resonance Magnetic Sensor, by detection magnetic
Field frequencies range change can obtain the value in magnetic field, complete magnetic-field measurement.
The material for preparing triple-beam structure resonant tuning fork 1 is the magnetostriction materials with Δ E effects, such as rare earth TbDyFe,
The various amorphous alloys such as FeGa alloys and FeSiB and FeCoMo.Triple-beam structure resonant tuning fork 1 can be by market
Obtainable amorphous magnetostriction materials thin film, is processed by methods such as cut, corrosion, it is also possible to by
The magnetostriction target such as TbDyFe and FeGa, is prepared by the method for the physics product such as magnetron sputtering, pulsed laser deposition.
The material of piezo-electric drive units and piezoelectric detection unit can be piezoelectric ceramics PZT, AlN, piezoelectric monocrystal PMN-PT
Deng the material with piezoelectric effect.Piezo-electric drive units and piezoelectric detection unit can be sunk by magnetron sputtering, laser pulse
The methods such as product are deposited on triple-beam structure resonant tuning fork 1, it is also possible to which the method for sol-gal process or chemically grown is worked into three
On girder construction resonant tuning fork 1.
As triple-beam structure resonant tuning fork 1 is made up of magnetostriction telescopic material, the elastic modelling quantity of magnetostriction materials is with magnetic
Field change, therefore the natural frequency of resonator walking beam is with bias magnetic field change, under specific mode of oscillation, resonator
The moment of flexure and shearing force of intermediate beam and two curb girders is offset, and greatly reduces the coupled oscillationses loss of intermediate beam fixing end,
Improve the quality factor of resonator.
The Piezoelectric Driving and piezoelectric detection unit refer respectively to the two ends piezoelectricity for being placed in triple-beam structure resonant tuning fork intermediate beam
Ceramic membrane unit, they are used separately as vibratory stimulation and oscillator signal detection.Apply alternation electricity in piezo-electric drive units
During pressure signal, as inverse piezoelectric effect produces vibration, vibration signal encourages triple-beam structure resonant tuning fork after being coupled to resonance beam
Vibration, when the oscillator signal is delivered to piezoelectric detection unit, as piezoelectric effect is transformed into alternating voltage signal output again.
Due to the elastic modelling quantity of triple-beam structure resonant tuning fork it is relevant with external static or quasistatic magnetic field, frequency of oscillation in whole process
Change it is all relevant with magnetic field.Under weak magnetic field action, between frequency change and changes of magnetic field, there is good linear scale
Relation.
Claims (3)
1. a kind of mode of resonance Magnetic Sensor, it is characterised in that including triple-beam structure resonant tuning fork, piezo-electric drive units,
Piezoelectric detection unit and phase-locked oscillation circuit；
The resonator of the integrated laminated structure of the triple-beam structure resonant tuning fork, is made by magnetostriction materials, is had
The walking beam for having three both-ends to fix；
Piezo-electric drive units and piezoelectric detection unit are the piezoelectric material film with Top electrode and bottom electrode, Piezoelectric Driving
Unit and piezoelectric detection unit are compounded in the two ends of the intermediate beam of the triple-beam structure resonant tuning fork respectively, and bottom electrode connects
Ground；Piezo-electric drive units and piezoelectric detection unit input and outfan respectively by its electrode with phase-locked oscillation circuit connect
Connect；
Phase-locked oscillation circuit is used to encourage and maintains triple-beam structure resonant tuning fork to vibrate under the optimization mode of oscillation selected, and
Output represents the signal of telecommunication of three beam tuning fork resonance frequencies；
When triple-beam structure resonant tuning fork is vibrated under the optimization mode of oscillation, its middle vibration of beam direction and two curb girders
Direction of vibration it is contrary.
2. mode of resonance Magnetic Sensor as claimed in claim 1, it is characterised in that piezo-electric drive units and piezoelectric detection list
The bottom electrode of unit is respectively connected with bottom electrode extraction electrode, and Top electrode is respectively connected with Top electrode extraction electrode.
3. mode of resonance Magnetic Sensor as claimed in claim 1, it is characterised in that phase-locked oscillation circuit includes that electric charge amplifies
The vibration signal of the triple-beam structure resonant tuning fork for detecting is passed by device, phase shifter and second level amplifier, piezoelectric detection unit
The input of charge amplifier is defeated by, by second level amplifier after the shifted device phase shift of amplification output signal of charge amplifier
Secondary amplification is carried out, the signal exported after amplification is transferred to piezo-electric drive units as drive signal, drive piezoelectric unit to shake
Dynamic, the vibration of piezoelectric unit further drives triple-beam structure resonant tuning fork to vibrate under the optimization mode of oscillation；Phase shifter
Outfan draws signal all the way, used as the output signal of three beam tuning fork resonance frequencies.
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Cited By (16)
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| CN107621316A (en) * | 2017-11-01 | 2018-01-23 | 成都皆为科技有限公司 | A kind of quick unit of beam quartz tuning-fork resonance power of integral type three |
| CN108165928A (en) * | 2017-12-25 | 2018-06-15 | 电子科技大学 | A kind of AlN films of FeGa alloy substrates and preparation method thereof |
| CN109239436A (en) * | 2018-09-21 | 2019-01-18 | 南京理工大学 | A kind of super low-power consumption resonant voltage sensor |
| CN109342799A (en) * | 2018-11-20 | 2019-02-15 | 南京理工大学 | A kind of quartz resonance current sensor |
| CN109521377A (en) * | 2017-09-20 | 2019-03-26 | 南京理工大学 | The resonant mode Magnetic Sensor that magnetostriction/resonator is connected compound |
| CN110118947A (en) * | 2019-04-19 | 2019-08-13 | 华中科技大学 | A kind of magnetic sensing device |
| CN110118946A (en) * | 2019-04-19 | 2019-08-13 | 华中科技大学 | A kind of resonant mode Magnetic Sensor |
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| CN108165928A (en) * | 2017-12-25 | 2018-06-15 | 电子科技大学 | A kind of AlN films of FeGa alloy substrates and preparation method thereof |
| CN110389386A (en) * | 2018-04-16 | 2019-10-29 | 南京理工大学 | It can be used for the high q-factor magnetoelectricity metamaterial structure of geomagnetic field measuring |
| CN109239436A (en) * | 2018-09-21 | 2019-01-18 | 南京理工大学 | A kind of super low-power consumption resonant voltage sensor |
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| CN111488680B (en) * | 2020-04-08 | 2021-04-30 | 清华大学 | Method and device for detecting specific elastic modulus of soft tissue |
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| CN113008220A (en) * | 2021-02-26 | 2021-06-22 | 上海大学 | Piezoelectric type magnetic tuning disc gyroscope and preparation method and application thereof |
| CN113224509A (en) * | 2021-04-12 | 2021-08-06 | 华南理工大学 | Acoustic wave resonance electrically small antenna and preparation method thereof |
| CN113224509B (en) * | 2021-04-12 | 2022-06-14 | 华南理工大学 | Acoustic wave resonance electrically small antenna and preparation method thereof |
| WO2022218646A1 (en) * | 2021-04-14 | 2022-10-20 | Endress+Hauser SE+Co. KG | Magnetic field sensor and sensor assembly |
| CN114337370A (en) * | 2021-12-14 | 2022-04-12 | 华东师范大学 | Magnetoelectric transducer for dynamically adjusting frequency response characteristic |
| CN114337370B (en) * | 2021-12-14 | 2023-06-09 | 华东师范大学 | Magneto-electric transduction device capable of dynamically adjusting frequency response characteristic |
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| CN116341222B (en) * | 2023-03-09 | 2024-05-28 | 南京理工大学 | Method for designing acoustic black hole dynamic vibration absorber with tree-shaped structure |
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