CN106556718A - The manufacture method of acceleration correction data computing device and acceleration transducer - Google Patents
The manufacture method of acceleration correction data computing device and acceleration transducer Download PDFInfo
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- CN106556718A CN106556718A CN201610811494.0A CN201610811494A CN106556718A CN 106556718 A CN106556718 A CN 106556718A CN 201610811494 A CN201610811494 A CN 201610811494A CN 106556718 A CN106556718 A CN 106556718A
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- fixed electrode
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
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Abstract
The acceleration correction data computing device and the manufacture method of acceleration transducer of a kind of correction data that can be easily computed and be used for temperature correction in the acceleration transducer of capacitance-type are provided, the acceleration correction data computing device has：Electrode gap Measurement portion, which measures the electrode gap between the movable electrode and fixed electrode arranged in acceleration transducer under fiducial temperature；Deformation calculation portion, which calculates the deflection of movable electrode and fixed electrode in the case that temperature changes relative to fiducial temperature；Static capacity calculating part, its deflection calculated based on the electrode gap measured by electrode gap Measurement portion and by Deformation calculation portion calculate the static capacity between movable electrode and fixed electrode；And correction data calculating part, which calculates the correction data in the case that temperature changes relative to fiducial temperature based on the static capacity calculated by static capacity calculating part.
Description
Technical field
The present invention relates to the manufacture method of a kind of acceleration correction data computing device and acceleration transducer.
Background technology
A kind of electrostatic changed to measure acceleration of known static capacity based between movable electrode and fixed electrode
The acceleration transducer of capacity type.In the acceleration transducer of capacitance-type, there is situations below：Structure member is due to temperature
Degree is changed and is deformed in the way of expansion or shrinkage, and the static capacity between movable electrode and fixed electrode changes, so as to
Measurement result produces deviation.
It is thus known that a kind of following method：Under different multiple temperature environments measure acceleration transducer sensitivity/
Skew, is corrected (for example, referring to patent documentation using output of the correction data based on measured value to acceleration transducer
1)。
Patent documentation 1：Japanese Unexamined Patent Publication 6-331647 publication
The content of the invention
Problems to be solved by the invention
However, in order to the sensitivity/skew for measuring acceleration transducer under different multiple temperature environments is preparing school
Correction data must need substantial amounts of man-hour and very long time.Therefore, in order to be directed to each acceleration transducer different
Measurement sensitivity/skew under multiple temperature environments must need the great amount of labour preparing correction data, so as to cause manufacture
The rising of cost.
The present invention is completed in view of the above problems, be its object is to offer one kind and can be easily computed in electrostatic
It is used for the acceleration correction data computing device of the correction data of temperature correction in the acceleration transducer of capacity type.
For solution to problem
A mode of the invention, is a kind of acceleration correction data computing device, the acceleration correction data meter
Calculate device and calculate the correction data for being used for temperature correction in the acceleration transducer of capacitance-type, have：Electrode gap is surveyed
Amount portion, between the electrode between its movable electrode arranged during the acceleration transducer is measured under fiducial temperature and fixed electrode
Every；Deformation calculation portion, its calculate temperature change relative to the fiducial temperature in the case of the movable electrode and
The deflection of the fixed electrode；Static capacity calculating part, which is based between the electrode measured by the electrode gap Measurement portion
Every and the deflection that calculated by the Deformation calculation portion, calculate between the movable electrode and the fixed electrode
Static capacity；And correction data calculating part, which is calculated based on the static capacity calculated by the static capacity calculating part
Temperature change relative to the fiducial temperature in the case of correction data.
The effect of invention
According to the embodiment of the present invention, there is provided a kind of acceleration sensing that can be easily computed in capacitance-type
It is used for the acceleration correction data computing device of the correction data of temperature correction in device.
Description of the drawings
Fig. 1 is the figure of the structure of the acceleration transducer and correction data computing device in illustrated embodiment.
Fig. 2 is the figure of the structure of the sensor portion in illustrated embodiment.
Fig. 3 is the sectional view of the structure of the sensor portion in illustrated embodiment.
Fig. 4 is the figure of the circuit structure of the test section in illustrated embodiment.
Fig. 5 is the figure that the correction data in illustrated embodiment calculates the flow chart for processing.
Fig. 6 is the figure of the change for illustrating the electrode gap in embodiment.
Fig. 7 is the figure of the correction data of the acceleration transducer in illustrated embodiment.
Fig. 8 is the figure of the checking list in illustrated embodiment.
Description of reference numerals
100：Acceleration transducer；110：Sensor portion；111：Movable electrode；112a：First fixed electrode；112b：The
Two fixed electrodes；112c：3rd fixed electrode；112d：4th fixed electrode；200：Correction data computing device；210：Electrode
Interval measurement portion；220：Deformation calculation portion；230：Static capacity calculating part；240：Correction data calculating part.
Specific embodiment
Below, it is explained with reference to the mode for carrying out an invention.In the drawings, sometimes same structure part is marked
Same labelling is noted, so as to the repetitive description thereof will be omitted.
<The structure of acceleration transducer and correction data computing device>
Fig. 1 is the figure of the structure of the acceleration transducer 100 and correction data computing device 200 in illustrated embodiment.
Acceleration of the acceleration transducer 100 using the correction data calculated by correction data computing device 200 to detecting is carried out
Acceleration after correction output calibration.Correction data computing device 200 manufacture acceleration transducer 100 when etc. calculate correction
Data, make the checking list comprising the correction data for calculating store acceleration transducer 100.
(acceleration transducer)
Acceleration transducer 100 has sensor portion 110, test section 130, acceleration calculation unit 140, correction unit 150, school
Correction data storage part 160, temperature detecting part 170.
Sensor portion 110 has movable electrode and fixed electrode etc..Acceleration is produced when sensor portion 110 is applied in external force
When spending, the static capacity between movable electrode and fixed electrode changes, and acceleration is detected based on the change of the static capacity
Degree.
Fig. 2 is the figure of the structure of the sensor portion 110 in illustrated embodiment.In addition, Fig. 3 is the Section A-A figure of Fig. 2.
Additionally, eliminating the diagram of upper protection member 125 in fig. 2.X-direction and Y-direction shown in Fig. 2 and Fig. 3 is mutually orthogonal
Direction, it is parallel or orthogonal with each side of the movable electrode 111 of rectangle respectively.In addition, Z-direction is orthogonal with X-direction and Y-direction
, the short transverse of sensor portion 110.
As shown in Figures 2 and 3, there is sensor portion 110 movable electrode 111, the first fixed electrode 112a, second to fix electricity
Pole 112b, the 3rd fixed electrode 112c, the 4th fixed electrode 112d, top fixed electrode 113, supporting mass 116, beam 118,
Upper protection member 125, lower protection member 126.In the following description, sometimes the first fixed electrode 112a, second are consolidated
Fixed electrode 112b, the 3rd fixed electrode 112c and the 4th fixed electrode 112d are only called fixed electrode 112.
Movable electrode 111 has the shape of rectangular flat shape, is propped up by beam 118 in the way of it can be subjected to displacement
Hold.Movable electrode 111 is supported by the way of it can be subjected to displacement in X-direction, Y-direction and Z-direction, works as sensor portion
110 when being applied in external force, and the movable electrode 111 is subjected to displacement to the compound direction in some direction or these directions.
First fixed electrode 112a, the second fixed electrode 112b, the 3rd fixed electrode 112c and the 4th fixed electrode
112d has the shape of rectangular flat shape respectively, is respectively arranged to opposite with each side of movable electrode 111.
First fixed electrode 112a and the second fixed electrode 112b be configured to by movable electrode 111 be clipped in the middle in X
It is opposite on direction.In addition, during the 3rd fixed electrode 112c and the 4th fixed electrode 112d are configured to be clipped in movable electrode 111
Between it is opposite in the Y direction.First fixed electrode 112a, the second fixed electrode 112b, the 3rd fixed electrode 112c and the 4th
Fixed electrode 112d forms the interval of regulation respectively between movable electrode 111.
Additionally, each side of movable electrode 111 can also be formed as comb teeth-shaped.In this case, the first fixed electrode 112a,
Second fixed electrode 112b, the 3rd fixed electrode 112c and the 4th fixed electrode 112d are respective opposite with movable electrode 111
Side be formed as comb teeth-shaped, and be configured to the side of the comb teeth-shaped between movable electrode 111 and be meshed each other.
Top fixed electrode 113 is arranged at upper protection member in the way of opposite in z-direction with movable electrode 111
125 face opposite with movable electrode 111.Regulation is formed between the upper surface of top fixed electrode 113 and movable electrode 111
Interval.
Supporting mass 116 has the opening of rectangle, is arranged to surround around movable electrode 111.Supporting mass 116 is by beam
Component 118 supports movable electrode 111 in the way of movable electrode 111 is subjected to displacement.
Beam 118 has the shape of the spring-like that can be stretched, and one end is linked to supporting mass 116, and the other end is linked to
Movable electrode 111.In the present embodiment, 4 beams 118 are supported in the way of movable electrode 111 is subjected to displacement
Movable electrode 111.
Movable electrode 111, fixed electrode 112 and beam 118 are by SOI (Silicon On Insulator：Insulator
Upper silicon) substrate 120 formed.SOI substrate 120 has silicon supporting course 121, silicon oxide layer 122, active silicon layer 123.
The part opposite with movable electrode 111 of silicon supporting course 121 and silicon oxide layer 122 is removed by etching.Pass through
Anisotropic dry-etching is consequently formed movable electrode 111, fixed electrode 112 and beam locally removing active silicon layer 123
Component 118.
Upper protection member 125 is by TEMPAX glass (Japanese：テ Application パ ッ Network ス ガ ラ ス) formed, can galvanic electricity with covering
The mode of pole 111 is arranged at the upper surface of SOI substrate 120.Lower protection member 126 in the same manner as upper protection member 125 by
TEMPAX glass is formed, and is arranged under SOI substrate 120 in the way of covering the movable electrode 111 exposed from silicon supporting course 121
Surface.
Fig. 4 is the figure of the circuit structure of the test section 130 in illustrated embodiment.
As shown in figure 4, test section 130 has the X side of the acceleration for the X-direction produced in detection sensor portion 110
To detection circuit 131.X-direction detection circuit 131 has operational amplifier Q1, Q2, Q3, Q4, Q5, X-direction detection circuit 131 with
First fixed electrode 112a and the second fixed electrode 112b connections.From DC source 180 pairs and the first fixed electrode 112a and the
111 applied voltage V of movable electrode that two fixed electrode 112b are arranged opposite to each other.
The input terminal of the minus side of operational amplifier Q1 is connected with the first fixed electrode 112a, the positive side of operational amplifier Q1
Input terminal ground connection.In addition, resistance R1 and capacitor C1 are connected in parallel the input terminal of the minus side in operational amplifier Q1
And the lead-out terminal of operational amplifier Q1 between.Including operational amplifier Q1, resistance R1 and capacitor C1 circuit be electric charge/
The electric charge accumulated between the first fixed electrode 112a for being connected and movable electrode 111 is converted to voltage by voltage conversion circuit
Signal VX1After export.
The input terminal of the minus side of operational amplifier Q2 is connected with the second fixed electrode 112b, the positive side of operational amplifier Q2
Input terminal ground connection.In addition, resistance R2 and capacitor C2 are connected in parallel the input terminal of the minus side in operational amplifier Q2
And the lead-out terminal of operational amplifier Q2 between.Including operational amplifier Q2, resistance R2 and capacitor C2 circuit be electric charge/
The electric charge accumulated between the second fixed electrode 112b for being connected and movable electrode 111 is converted to voltage by voltage conversion circuit
Signal VX2After export.
The input terminal of the minus side of operational amplifier Q3 is connected with the lead-out terminal of operational amplifier Q1 via resistance R3,
The input terminal of the positive side of operational amplifier Q3 is connected with the lead-out terminal of operational amplifier Q2 via resistance R4.In addition,
Resistance R5 is connected between the lead-out terminal of the input terminal and operational amplifier Q3 of the minus side of operational amplifier Q3, computing is put
It is grounded via resistance R6 between the input terminal and resistance R4 of the positive side of big device Q3.Including operational amplifier Q3 and resistance R3,
The circuit of R4, R5, R6 is calculus of differences circuit, is exported as the voltage signal V exported from operational amplifier Q1X1With put from computing
The voltage signal V of big device Q2 outputsX2Difference voltage signal VX3。
The input terminal of the minus side of operational amplifier Q4 is connected with the lead-out terminal of operational amplifier Q5 via resistance R7,
The input terminal of the positive side of operational amplifier Q4 is connected with the lead-out terminal of operational amplifier Q3 via resistance R8.In addition,
Resistance R9, operation amplifier are connected between the lead-out terminal of the input terminal and operational amplifier Q4 of the minus side of operational amplifier Q4
It is grounded via resistance R10 between the input terminal and resistance R8 of the positive side of device Q4.Including operational amplifier Q4 and resistance R7,
The circuit of R8, R9, R10 is calculus of differences circuit, is exported as the voltage signal V exported from operational amplifier Q3X3With from computing
The voltage signal V of amplifier Q5 outputsX5Difference voltage signal VX4。
The input terminal of the positive side of operational amplifier Q5 is connected to the variable resistance being connected with positive supply V1 and negative supply V2
VR1, the input terminal of the minus side of operational amplifier Q5 are connected with the lead-out terminal of operational amplifier Q5.Including operational amplifier
The circuit of Q5, positive supply V1, negative supply V2 and variable resistance VR1 is zero adjustment circuit, and output is using variable resistance VR1's
Resistance value adjusts voltage signal V obtained from being adjustedX5。
For example when sensor portion 110 is applied in external force movable electrode 111 is subjected to displacement in X direction when, movable electrode 111
With between the electrode between the electrode gap and movable electrode 111 and the second fixed electrode 112b between the first fixed electrode 112a
Every changing.Static capacity between movable electrode 111 and each fixed electrode 112 changes according to electrode gap, by
This voltage signal VX1With voltage signal VX2Change, as voltage signal VX1With voltage signal VX2Difference voltage signal VX3
Change.Acceleration transducer 100 is based on as the electricity for being changed according to the displacement of the X-direction of movable electrode 111 like this
Pressure signal VX3With adjustment voltage signal VX5Difference voltage signal VX4, the X-direction for produce in detection sensor portion 110 plus
Speed aXAnd export acceleration aX。
Here, the X-direction detection circuit 131 of test section 130 is adjusted to：In fiducial temperature TsUnder (such as 20 DEG C),
In the state of sensor portion 110 is not applied to external force, from the voltage signal V of operational amplifier Q4 outputsX4Value be zero.In this reality
Apply in the X-direction detection circuit 131 in mode, the resistance value of variable resistance VR1 is adjusted so that from operational amplifier Q5 outputs
Adjustment voltage signal VX5With the voltage signal V exported from operational amplifier Q3X3It is equal, so that exporting from operational amplifier Q4
Voltage signal VX4Value vanishing.Will be like this in fiducial temperature TsUnder be adjusted in the state of external force is not applied to
The adjustment of the output valve vanishing from circuit output is made to be referred to as " zero adjustment ".
In addition, for X-direction detects circuit 131, capacity, voltage V of DC source 180 of capacitor C1, C2 etc. are set,
So that：In fiducial temperature TsUnder, external force is applied in sensor portion 110 and produce the reference acceleration a of X-directionXs(such as 1G
(=980Gal=9.8m/s2)) in the case of, from the voltage signal V of operational amplifier Q4 outputsX4For setting VXs。
The acceleration calculation unit 140 of acceleration transducer 100 is based on from the X for having carried out zero adjustment etc. as described above
The voltage signal V of the output of angle detecting circuit 131X4, the acceleration a of the X-direction produced in calculating sensor portion 110X.Specifically
Say that acceleration calculation unit 140 is using the reference acceleration a that X-direction is produced in the sensor portion 110 after zero adjustment in groundXs's
In the case of from test section 130 output setting VXs, acceleration a is calculated by following formula (1)X。
[formula 1]
Here, the X-direction detection circuit 131 of test section 130 is adjusted to as described above：In fiducial temperature TsUnder,
Carry out zero adjustment and be applied in reference acceleration a in X directionXsIn the case of, X-direction detects the output of circuit 131
VX4For setting VXs.But, when the temperature around the acceleration transducer 100 changes, there is situations below：According to
Static capacity between the movable electrode 111 changed due to thermal deformation and fixed electrode 112, the output of test section 130
VX4Change, even if in the case where identical acceleration is generated, the acceleration a for calculatingXValue also according to temperature
It is different.
Therefore, in acceleration transducer 100, correction unit 150 according to the environment temperature of acceleration transducer 100 to by plus
The acceleration a that speed calculation portion 140 calculatesXIt is corrected.Correction unit 150 is obtained from correction data storage part 160 and by temperature
The corresponding correction data of the degree environment temperature that detects of test section 170, correct it is being calculated by acceleration calculation unit 140 plus
Speed aX.Correction side of the correction data, correction unit 150 stored during correction data storage part 160 is described below to acceleration
Method.
Acceleration transducer 100 for example with CPU, ROM, RAM etc., is deposited by collaboratively being performed in ROM with RAM by CPU
The program of storage, realizes the function of acceleration calculation unit 140, correction unit 150 etc..
Temperature detecting part 170 for example includes critesistor (thermistor), detects the temperature around acceleration transducer 100
Degree.The temperature for detecting is sent to correction unit 150 by temperature detecting part 170.Correction data storage part 160 is, for example, that ROM etc. is deposited
Reservoir, be stored with the checking list comprising the correction data calculated by correction data computing device 200.
Additionally, there is test section 130 Y-direction to detect circuit, the Y-direction detects the structure of circuit and the X side illustrated in Fig. 4
Structure to detection circuit 131 is identical, and the Y-direction detects that circuit and the 3rd fixed electrode 112c and the 4th fixed electrode 112d connect
Connect, the voltage signal V that the displacement of output and the Y-direction of movable electrode 111 correspondingly changesY.In addition, test section 130 has Z side
To detection circuit, the Z-direction detection circuit is connected with top fixed electrode 113, the position of the Z-direction of output and movable electrode 111
The voltage signal V that shifting correspondingly changesZ。
Detect that to Y-direction circuit and Z-direction detection circuit have carried out zero adjustment so that in fiducial temperature TsUnder, not
In the state of being applied in external force, the voltage signal V exported by Y-direction detection circuit and Z-direction detection circuitY、VZValue be zero.
In addition, Y-direction detection circuit is configured to：In fiducial temperature TsUnder generating the reference acceleration a of Y-directionYsIn the case of Y
The voltage signal V exported by angle detecting circuitYFor setting VYs.Similarly, Z-direction detection circuit is configured to：In benchmark
Temperature TsUnder generating the reference acceleration a of Z-directionZsIn the case of the Z-direction detection voltage signal V that exported of circuitZFor
Setting VZs。
Acceleration calculation unit 140 is based on the voltage signal V that circuit output is detected from Y-directionY, with the acceleration for calculating X-direction
Degree aXWhen similarly calculate sensor portion 110 in the acceleration a of Y-direction that producesY.In addition, acceleration calculation unit 140 is based on from Z
The voltage signal V of angle detecting circuit outputZTo calculate the acceleration a of the Z-direction produced in sensor portion 110Z。
It is stored with correction data storage part 160 comprising for the acceleration a to X-directionXThe correction data being corrected
Checking list, and be stored with comprising the acceleration a for the Y-direction to being calculated by acceleration calculation unit 140YAnd Z-direction
Acceleration aZThe checking list of the correction data being corrected.Correction unit 150 is using the school stored in correction data storage part 160
Correction data is to the acceleration a that calculated by acceleration calculation unit 140Y、aZIt is corrected and the acceleration after output calibration.
Acceleration transducer 100 has above-mentioned structure, the X-direction to produce in detection sensor portion 110, Y-direction with
And the acceleration a of Z-directionX、aY、aZ, and export be corrected using correction data obtained from acceleration aX’、aY’、aZ’。
Additionally, the structure of sensor portion 110 in acceleration transducer 100, the material for each structural element, test section
130 circuit structure etc. is not limited to the structure illustrated in present embodiment.
(correction data computing device)
Then, illustrate correction data computing device 200.Correction data computing device 200 is for example in manufacture acceleration sensing
The correction data of the correction for being used for acceleration in acceleration transducer 100 is calculated during device 100 etc., and stores the correction data
To correction data storage part 160.
As shown in figure 1, correction data computing device 200 has electrode gap Measurement portion 210, Deformation calculation portion 220, quiet
Capacitance calculating part 230, correction data calculating part 240.Correction data computing device 200 for example has CPU, ROM, RAM, passes through
The program stored in ROM is collaboratively performed by CPU and RAM, the function in each portion is realized.
Electrode gap Measurement portion 210 has such as sensor such as displacement transducer, length measurement sensor, in fiducial temperature TsUnder
Electrode gap and movable electrode 111 and top fixed electrode 113 between measurement movable electrode 111 and fixed electrode 112 it
Between electrode gap.Electrode gap Measurement portion 210 can also measure the direct capacitance between movable electrode 111 and fixed electrode 112
Amount, be electrode area and movable electrode 111 and consolidate based on the area of movable electrode 111 and the opposite part of fixed electrode 112
The dielectric constant of fixed electrode 112 is obtaining electrode gap.In addition, electrode gap Measurement portion 210 can also be surveyed using microscope
Electrode gap between amount movable electrode 111 and fixed electrode 112.
Deformation calculation portion 220 calculates movable in the case where the environment temperature of acceleration transducer 100 changes
The deflection of electrode 111 and fixed electrode 112.
Static capacity calculating part 230 is based on the electrode gap measured by electrode gap Measurement portion 210 and by deflection
The deflection that calculating part 220 is calculated, calculate in the case where the environment temperature of acceleration transducer 100 changes can
Static capacity between moving electrode 111 and fixed electrode 112.
Correction data calculating part 240 is based on the movable electrode during temperature change calculated by static capacity calculating part 230
Static capacity between 111 and fixed electrode 112, calculates the correction of the acceleration detected in acceleration transducer 100
Data.
<Correction data calculating is processed>
Then, illustrate that the correction data calculating performed in correction data computing device 200 is processed.Fig. 5 is to illustrate to implement
Correction data in mode calculates the figure of the flow chart for processing.
(step S101)
First, in step S101, electrode gap Measurement portion 210 is in fiducial temperature TsLower measurement acceleration transducer 100
Sensor portion 110 in movable electrode 111 and fixed electrode 112 between electrode gap.Electrode gap Measurement portion 210 is for example
Movable electrode 111 and the first fixed electrode 112a electrode gap d in the X direction is measured as shown in (A) of Fig. 6x1, it is movable
Electrode 111 and the second fixed electrode 112b electrode gap d in the X directionx2。
In addition, measurement movable electrode 111 and the 3rd fixed electrode 112c electricity in the Y direction of electrode gap Measurement portion 210
Interpolar is every, movable electrode 111 and the 4th fixed electrode 112d electrode gap in the Y direction and movable electrode 111 and top
The electrode gap in z-direction of fixed electrode 113.
Electrode gap Measurement portion 210 both for example sensor-based can be exported to obtain each electrode gap, it is also possible to profit
It is spaced come measuring electrode with microscope etc..In addition, electrode gap Measurement portion 210 can also as described above, based on can galvanic electricity
The measured value of the static capacity between pole 111 and fixed electrode 112, movable electrode 111 and the opposite part of fixed electrode 112
Area is dielectric constant between electrode area and movable electrode 111 and fixed electrode 112 obtaining electrode gap.For example lead to
Cross following formula (2) to obtain electrode gap d.
[formula 2]
Here, ε is the dielectric constant between movable electrode 111 and fixed electrode 112, S is movable electrode 111 and fixed electricity
The area of the opposite part in pole 112, C are the measured values of the static capacity between movable electrode 111 and fixed electrode 112.Electrode
Obtain for example based on above formula (2) between movable electrode 111 and fixed electrode 112 in X-direction, Y-direction in interval measurement portion 210
Electrode gap d and movable electrode 111 and electrode gap d in z-direction of top fixed electrode 113.
(step S102)
Then, in step s 102, Deformation calculation portion 220 calculates relative in the environment temperature of acceleration transducer 100
In fiducial temperature TsThe deflection of movable electrode 111 and fixed electrode 112 in the case of changing.
Using the linear expansion coefficient (3.9 × 10 of monocrystal silicon-6/ DEG C), movable electrode 111 is obtained by following formula (3)
X-direction deflection Δ dx。
[formula 3]
ΔdX=dX× linear expansion coefficient × Δ t ... (3)
Here, dxIt is the width of the X-direction of movable electrode 111, Δ t is fiducial temperature TsTemperature between environment temperature
Difference.Deformation calculation portion 220 for example calculate temperature be -30 DEG C, the deflection Δ d in the case of 60 DEG Cx, with using side described later
Method calculates correction data.In addition, calculating movable electrode in the same manner as during deflection of the Deformation calculation portion 220 also with calculating X-direction
111 in the Y direction with Z-direction on deflection.
In addition, Deformation calculation portion 220 calculates the change of the X-direction of the first fixed electrode 112a and the second fixed electrode 112b
Shape amount.Here, the first fixed electrode 112a and the second fixed electrode 112b are formed by monocrystal silicon in the same manner as movable electrode 111,
And engage with the upper protection member 125 formed by TEMPAX glass.
The linear expansion coefficient (3.25 × 10 of TEMPAX glass-6/ DEG C) than the linear expansion coefficient (3.9 × 10 of monocrystal silicon-6/
DEG C) low, for identical temperature change, the deflection of TEMPAX glass is less than the deflection of monocrystal silicon.Therefore, by monocrystal silicon shape
Into the first fixed electrode 112a and the second fixed electrode 112b deflection formed by TEMPAX glass top protection structure
Part 125 is limited.
Thus, the linear expansion coefficient (3.25 × 10 of the TEMPAX glass of upper protection member 125 will be formed-6/ DEG C) substitute into
Above formula (3) is calculating the deflection of the first fixed electrode 112a and the second fixed electrode 112b.Similarly, structure is protected using top
The linear expansion coefficient of part 125 is calculating the deflection of the 3rd fixed electrode 112c and the 4th fixed electrode 112d.
Here, in the case where the deflection of fixed electrode 112 is calculated, it is preferred that consider the elasticity of fixed electrode 112
Difference between upper protection member 125 that modulus is engaged with same fixed electrode 112 and the elastic modelling quantity of lower protection member 126
To obtain the deflection of fixed electrode 112.Elastic modelling quantity represents material when applying identical power to the material of same volume
Deflection, elastic modelling quantity are bigger, then it represents that be the hard material for being more difficult to deform.
In the present embodiment, the elastic modelling quantity (elastic modelling quantity=130.2GPa of monocrystal silicon) of fixed electrode 112 is upper
Protect about 2 times of the elastic modelling quantity (elastic modelling quantity=64GPa of TEMPAX glass) of component 125 and lower protection member 126 in portion.
In acceleration transducer 100 in the present embodiment, the volume of fixed electrode 112 is that upper protection member 125 and bottom are protected
About half of the volume of shield component 126, therefore the thermal deformation caused by the difference of elastic modelling quantity is cancelled.
Thus, the elastic modelling quantity and upper protection member 125 of fixed electrode 112 in the present embodiment, can not be considered
And the deflection for differently obtaining fixed electrode 112 between the elastic modelling quantity of lower protection member 126.But, due to bullet
Property modulus is different and situation that the deflection of fixed electrode 112 is limited by upper protection member 125 and lower protection member 126
Under, preferably consider the difference of elastic modelling quantity calculating the deflection of each electrode.
(step S103)
In step s 103, static capacity calculating part 230 calculates environment temperature in acceleration transducer 100 relative to base
Quasi- temperature TsThe static capacity between movable electrode 111 and fixed electrode 112 in the case of changing.Static capacity is calculated
Portion 230 calculates static capacity C between movable electrode 111 and the first fixed electrode 112a by following formula (4)X1.In addition,
Static capacity calculating part 230 calculates the electrostatic between movable electrode 111 and the second fixed electrode 112b by following formula (5)
Capacity CX2。
[formula 4]
[formula 5]
Here, ε is dielectric constant, SX1Be the area of the part opposite with the first fixed electrode 112a of movable electrode 111 i.e.
Electrode area, dX11The electrode gap between movable electrode 111 and the first fixed electrode 112a when being temperature change.In addition, SX2
It is the area i.e. electrode area of the opposite part of movable electrode 111 and the second fixed electrode 112b, dX22When being temperature change can
Electrode gap between moving electrode 111 and the second fixed electrode 112b.
Electrode gap dX11It is based on fiducial temperature T measured by electrode gap Measurement portion 210sUnder electrode gap dX1
And calculated by Deformation calculation portion 220 temperature change when movable electrode 111 and the first fixed electrode 112a deformation
Measure and obtain.In addition, electrode gap dX22It is based on fiducial temperature T measured by electrode gap Measurement portion 210sUnder electricity
Interpolar is every dX2And calculated by Deformation calculation portion 220 temperature change when movable electrode 111 and the second fixed electrode
The deflection of 112b and obtain.
For example than fiducial temperature TsAt high temperature, such as shown in (B) of Fig. 6, movable electrode 111 and fixed electrode 112
Expand, electrode gap dX11、dX22Become than fiducial temperature T respectivelysUnder electrode gap dX1、dX2It is little.In addition, for example than
Fiducial temperature TsAt low temperature, such as shown in (C) of Fig. 6, movable electrode 111 and fixed electrode 112 shrink, electrode gap
dX11、dX22Become than fiducial temperature T respectivelysUnder electrode gap dX1、dX2Greatly.
Static capacity calculating part 230 is using the electrode gap d during temperature change for calculatingX11、dX22, by above formula (4),
(5) calculating static capacity C between the movable electrode 111 during temperature change and fixed electrode 112X1、CX2。
In addition, static capacity calculating part 230 calculate temperature change when movable electrode 111 and the 3rd fixed electrode 112c it
Between static capacity CY1, static capacity C between movable electrode 111 and the 4th fixed electrode 112dY2And movable electrode 111
With static capacity C between top fixed electrode 113Z。
(step S104)
In step S104, correction data calculating part 240 calculates the correction data of acceleration making checking list.
Correction data calculating part 240 is using the movable electrode during temperature change calculated by static capacity calculating part 230
Static capacity C between 111 and fixed electrode 112X1、CX2, calculate for the X to detecting in acceleration transducer 100
The correction data that the acceleration in direction is corrected.
Correction data calculating part 240 calculates the X-direction in temperature change from test section 130 by following formula (6)
The voltage signal V of the operational amplifier Q1 outputs of detection circuit 131X1’.In addition, correction data calculating part 240 is by following formula
(7) voltage to calculate in temperature change from the operational amplifier Q2 outputs of the X-direction detection circuit 131 of test section 130 is believed
Number VX2’。
[formula 6]
[formula 7]
Here, QX1It is the quantity of electric charge accumulated between movable electrode 111 and the first fixed electrode 112a, by by static capacity
Static capacity C that calculating part 230 is calculatedX1Represent with the voltage V of DC source 180.Similarly, QX2It is movable electrode 111
The quantity of electric charge accumulated between the second fixed electrode 112b, by static capacity C calculated by static capacity calculating part 230X2
Represent with the voltage V of DC source 180.In addition, C1Be X-direction detection circuit 131 in capacitor C1 static capacity, C2
Be X-direction detection circuit 131 in capacitor C2 static capacity.
Correction data calculating part 240 is according to the V obtained by above formula (6), (7)X1’、VX2' difference, calculate temperature become
The voltage signal V of the operational amplifier Q3 outputs of circuit 131 is detected during change from X-directionX3' (=VX1’-VX2’)。
Correction data calculating part 240 is using as the voltage signal V for calculatingX3' and from the adjustment of zero adjustment circuit output
Voltage signal VX5Difference voltage signal VX4' following formula (8) is updated to, calculate and fiducial temperature TsAt different temperature T
Correction data aXT。
[formula 8]
Here, aXsIt is the reference acceleration of X-direction, VXsIt is in the sensor portion 110 for having carried out zero adjustment to produce X
The reference acceleration a in directionXsIn the case of from test section 130 output setting.
Correction data a obtained by above formula (8)XTBe with fiducial temperature TsIn acceleration sensing at different temperature T
The acceleration a detected in device 100XTemperature variation.Correction data calculating part 240 for example obtains acceleration transducer 100
Environment temperature T be -30 DEG C, correction data a in the case of 60 DEG CX-30、aX60。
Here, in fiducial temperature TsInterval d between lower movable electrode 111 and the first fixed electrode 112aX1Together can galvanic electricity
Interval d between pole 111 and the second fixed electrode 112bX2In the case of equal, the deformation of each electrode caused by temperature change
Interval d afterwardsX11、dX22Also keep equal.Thus, in interval dX1、dX2In the case of equal, examine in acceleration transducer 100
The acceleration a for measuringXNot with temperature change, therefore correction data a in the whole temperature rangeXTValue be zero.
On the other hand, the interval d between movable electrode 111 and the first fixed electrode 112aX1Different from movable electrode 111
With the interval d between the second fixed electrode 112bX2In the case of, in temperature change, it is spaced dX11、dX22Between difference occur
Change.Thus, in interval dX1、dX2In the case of difference, the acceleration a detected in acceleration transducer 100XBecome with temperature
It is dynamic, therefore in fiducial temperature T except carrying out zero adjustmentsAt a temperature of in addition, correction data aXTIt is the value different from zero.
Fig. 7 is the figure of the correction data of the acceleration transducer in illustrated embodiment.Exemplified with by correction data in Fig. 7
Correction data a of acceleration transducer A～E that computing device 200 is obtainedXT。
Acceleration transducer A～E is with the structure same with above-mentioned acceleration transducer 100.In acceleration transducer A
Interval d between movable electrode 111 and the first fixed electrode 112aX1With between movable electrode 111 and the second fixed electrode 112b
Interval dX2It is equal.D is spaced in acceleration transducer BX1With interval dX2Between interval difference for 1%.In acceleration transducer C
Interval dX1With interval dX2Between interval difference for 2%.D is spaced in acceleration transducer DX1With interval dX2Between interval difference be
4%.D is spaced in acceleration transducer EX1With interval dX2Between interval difference for 8%.Additionally, interval dX1With interval dX2Between
Interval difference is the value obtained by following formula (9).
[formula 9]
As shown in fig. 7, interval bigger, then correction data a obtained by correction data computing device 200 of differenceXTValue it is bigger.
Additionally, acceleration transducer A～E is in fiducial temperature TsZero adjustment is performed at=20 DEG C, so as to all acceleration at 20 DEG C
Correction data a in degree sensors A～EXTValue be zero.
Correction data calculating part 240 is for the correction data at each such as -30 DEG C of acceleration transducer calculating, 60 DEG C
aX-30、aX60.Also, be directed between -30 DEG C and 60 DEG C, for example, correction data a is obtained with 10 DEG C as intervalX-20、aX-10、aX0、
aX10、aX30、aX40、aX50To make checking list.
Fig. 8 is the figure of the checking list in illustrated embodiment.
As shown in figure 8, correction data calculating part 240 is made by school corresponding with temperature T around acceleration transducer 100
Correction data aXTThe checking list of composition.Additionally, the temperature interval that correction data calculating part 240 calculates correction data is not limited to 10 DEG C,
For example correction data a can also be calculated with the temperature interval of 1 DEG C, 5 DEG C etc. regulationXTTo make checking list.
In addition, correction data calculating part 240 with make X-direction checking list when in the same manner as make for correction in acceleration
The acceleration a of the Y-direction detected in sensor 100YThe checking list of Y-direction, the acceleration a for correcting Z-directionZZ side
To checking list.
(step S105)
In step S105, correction data calculating part 240 makes the checking list produced store acceleration transducer 100
Correction data storage part 160.Correction data computing device 200 for example manufacture acceleration transducer 100 when etc. make checking list,
And the checking list storage for making to produce is to the correction data storage part 160 of acceleration transducer 100.
Acceleration of the correction unit 150 of acceleration transducer 100 in the X-direction to being calculated by acceleration calculation unit 140
aXIn the case of being corrected, obtain and the temperature T-phase pair detected by temperature detecting part 170 from correction data storage part 160
Correction data a answeredXT.There is no correction data a corresponding with detection temperature T-phaseXTIn the case of, such as according to checking list
Correction data correction data a corresponding with detection temperature T-phase is obtained by linear interpolationXT.In addition, correction unit 150 passes through
Following formula (10) is to acceleration axIt is corrected, and the acceleration a of X-direction obtained from output is correctedX’。
[formula 10]
aX'=aX-aXT…(10)
Correction unit 150 and the acceleration a in corrected X directionXWhen similarly using the school stored in correction data storage part 160
Correction data a of positive tableYT、aZTThe acceleration a of the Y-direction to being calculated by acceleration calculation unit 140YWith the acceleration of Z-direction
aZIt is corrected, and the acceleration a of Y-direction obtained from output is correctedY' and Z-direction acceleration aZ’。
As discussed above, the acceleration transducer 100 in present embodiment calculates dress using by correction data
Put 200 correction datas for calculating to be corrected the acceleration calculated by acceleration calculation unit 140, thus, it is possible to more high-precision
Degree ground detection acceleration.
In addition, the correction data computing device 200 in present embodiment obtained by calculating it is movable during temperature change
Electrode gap between electrode 111 and fixed electrode 112 etc., the change based on the static capacity caused by the change of electrode gap
Change, calculate correction data during temperature change.Thus, correction data computing device 200 is without the need for practically in different temperature
Measurement of acceleration transducer 100 etc. is carried out under environment, the acceleration transducer for capacitance-type can be readily calculated
The correction data of the temperature correction in 100.Correction data computing device 200 can calculate correction data at short notice, therefore
Can realize that the manufacturing cost of acceleration transducer 100 is reduced.
The manufacture of the acceleration correction data computing device and acceleration transducer that are explained above involved by embodiment
Method, but the present invention is not limited to above-mentioned embodiment, can carry out various modifications and improvement within the scope of the invention.
Claims (6)
1. a kind of acceleration correction data computing device, calculates in the acceleration transducer of capacitance-type for temperature correction
Correction data, the acceleration correction data computing device is characterised by having：
Electrode gap Measurement portion, the movable electrode which is arranged during the acceleration transducer is measured under fiducial temperature and fixed electricity
Electrode gap between pole；
Deformation calculation portion, its calculate temperature change relative to the fiducial temperature in the case of the movable electrode and
The deflection of the fixed electrode；
Static capacity calculating part, which is based on the electrode gap measured by the electrode gap Measurement portion and by the deflection
The deflection that calculating part is calculated, calculates the static capacity between the movable electrode and the fixed electrode；And
Correction data calculating part, which calculates temperature relative based on the static capacity calculated by the static capacity calculating part
Correction data in the case that the fiducial temperature changes.
2. acceleration correction data computing device according to claim 1, it is characterised in that
The Deformation calculation portion based on the temperature difference between the fiducial temperature and environment temperature and the movable electrode and
The linear expansion coefficient of the fixed electrode, calculates the deflection of the movable electrode and the fixed electrode.
3. acceleration correction data computing device according to claim 1 and 2, it is characterised in that
The Deformation calculation portion based on the movable electrode and the elastic modelling quantity of the fixed electrode, calculate it is described can galvanic electricity
Pole and the deflection of the fixed electrode.
4. a kind of manufacture method of acceleration transducer, for manufacturing the acceleration transducer of capacitance-type, the acceleration is passed
The manufacture method of sensor is characterised by, has steps of：
Electrode gap measuring process, the movable electrode arranged during the acceleration transducer is measured under fiducial temperature and fixed electricity
Electrode gap between pole；
Deformation calculation step, calculate temperature change relative to the fiducial temperature in the case of the movable electrode and
The deflection of the fixed electrode；
Static capacity calculation procedure, based on the electrode gap measured by the electrode gap measuring process and by described
The deflection that Deformation calculation step is calculated, calculates the static capacity between the movable electrode and the fixed electrode；
Correction data calculation procedure, based on the static capacity calculated by the static capacity calculation procedure, calculates temperature
Correction data in the case of changing relative to the fiducial temperature；And
Correction data storing step, makes to arrive the acceleration by the correction data storage that the correction data calculation procedure is calculated
The storage part of degree sensor.
5. the manufacture method of acceleration transducer according to claim 4, it is characterised in that
In the electrode gap measuring process, the electrode gap is obtained using sensor or microscope.
6. the manufacture method of acceleration transducer according to claim 4, it is characterised in that
In the electrode gap measuring process, the survey based on the static capacity between the movable electrode and the fixed electrode
The area of value, the movable electrode part opposite with the fixed electrode be electrode area and the movable electrode with
Dielectric constant between the fixed electrode, obtains the electrode gap.
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| JP2015-190301 | 2015-09-28 | ||
| JP2015190301A JP6661937B2 (en) | 2015-09-28 | 2015-09-28 | Acceleration correction data calculation device and method of manufacturing acceleration sensor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109374925A (en) * | 2018-09-27 | 2019-02-22 | 广州亚美信息科技有限公司 | A kind of vehicle weight acceleration directional reference value based on self study determines method and device |
| CN109489649A (en) * | 2018-12-27 | 2019-03-19 | 瑞声声学科技(深圳)有限公司 | MEMS gyroscope and electronic equipment comprising the gyroscope |
| WO2020133096A1 (en) * | 2018-12-27 | 2020-07-02 | 瑞声声学科技(深圳)有限公司 | Mems gyroscope and electronic device comprising same |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP7406340B2 (en) * | 2019-10-18 | 2023-12-27 | 株式会社小松製作所 | Acceleration detection device, work machine and acceleration detection method |
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| JP6661937B2 (en) | 2020-03-11 |
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