CN106544625B - Workpiece carbonitriding technology - Google Patents

Workpiece carbonitriding technology Download PDF

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Publication number
CN106544625B
CN106544625B CN201611056235.8A CN201611056235A CN106544625B CN 106544625 B CN106544625 B CN 106544625B CN 201611056235 A CN201611056235 A CN 201611056235A CN 106544625 B CN106544625 B CN 106544625B
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Prior art keywords
nitrogen
gaseous mixture
carbo
argon gas
nitriding
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CN201611056235.8A
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CN106544625A (en
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孙香兰
李恩鸿
李建辉
田绍洁
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DDA SHENGJIE VACUUM TECHNIQUES DEVELOP Co Ltd
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DDA SHENGJIE VACUUM TECHNIQUES DEVELOP Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)

Abstract

The present invention relates to a kind of workpiece carbonitriding technologies, belong to field of metal material surface treatment.The present invention carries out carbo-nitriding processing using surface of the plasma non-hydrogen carbonizing method to titanium alloy, this method is using the gaseous mixture of argon gas and nitrogen as carrier gas, control gaseous mixture operating pressure in 0.1Pa~30Pa, and with carbonitriding technology carry out be gradually reduced the operating pressure of gaseous mixture;The volume ratio of the argon gas and nitrogen be 3~4:6~7, and with carbonitriding technology carry out be gradually increased the ratio of nitrogen in gaseous mixture.This method is by controlling the content of carrier gas argon gas nitrogen in the partial pressure and mixed gas in vacuum drying oven, so that the rate of carburizing is controlled, the carburized layer intensity having the same at each thickness for being, and and then promote the intensity of entire carburized surface.

Description

Workpiece carbonitriding technology
Technical field
The present invention relates to a kind of workpiece carbonitriding technologies, belong to field of metal material surface treatment.
Background technique
The alloy that other alloying elements form is added by matrix of titanium and is referred to as titanium alloy.Titanium alloy is a kind of new structure material Material, it has excellent comprehensive performance, if density is small, specific strength and, fatigue strength and resistance to crack extension energy higher than fracture toughness Power is good, low-temperature good toughness, and etch resistant properties are excellent.Therefore, it is obtained increasingly in industrial departments such as Aeronautics and Astronautics, chemical industry, shipbuildings It is widely applied, development is swift and violent.Due to titanium and its excellent etch resistant properties of alloy, good mechanical property, and qualified group Compatibility is knitted, the biomaterials such as production prosthetic appliance are also particularly suitable.Meanwhile titanium alloy have density is low, specific strength is high, The advantages that corrosion resistance is good, processing performance is good is ideal aerospace engineering structural material.However, the technique of titanium alloy Performance is poor, and machining is difficult, in hot-working, is very easy to absorb the impurity such as hydrogen-oxygen nitrogen carbon.It is poor that there are also wear resistences, produces work Skill is complicated.
In order to improve the abrasion resistance of titanium alloy surface, carbo-nitriding technology can be used at present, the surface of titanium alloy is carried out Surface treatment, however current carbon nitrogen mainly uses the gases such as methane, ammonia as carbon source, and " hydrogen embrittlement " phenomenon easily occurs.
Summary of the invention
The object of the present invention is to provide a kind of workpiece carbonitriding technologies, to solve the problems, such as above-mentioned " hydrogen embrittlement ".
A kind of workpiece carbonitriding technology, the carbonitriding technology are the technique that carbo-nitriding is carried out on titanium alloy, The technique carries out in plasma carburising vacuum drying oven, specifically:
Using titanium alloy as workpiece pole, the voltage of workpiece pole is 400~500V, and the carbo-nitriding temperature of workpiece pole is 950 ~1100 DEG C;
Using graphite as source electrode, the voltage of source electrode is 850~1000V;
Using the gaseous mixture of argon gas and nitrogen as carrier gas, the operating pressure of gaseous mixture is controlled in 0.1Pa~30Pa, and with carbon The carrying out of nitrogen co-penetration technology is gradually reduced the operating pressure of gaseous mixture;The volume ratio of the argon gas and nitrogen is 3~4:6~7, And with carbonitriding technology carry out be gradually increased the ratio of nitrogen in gaseous mixture;
The carbo-nitriding time is at least 1h.
" plasma carburising vacuum drying oven " of the present invention is commercially available.
Further, using the gaseous mixture of argon gas and nitrogen as carrier gas, the operating pressure of gaseous mixture is controlled in 1Pa~30Pa, And with carbonitriding technology carry out be gradually reduced the operating pressure of gaseous mixture;The volume ratio of the argon gas and nitrogen is 3 ~4:6~7, and with carbonitriding technology carry out be gradually increased the ratio of nitrogen in gaseous mixture;
Yet other embodiments are as follows:
Using titanium alloy as workpiece pole, the voltage of workpiece pole is 400~500V, and the carbo-nitriding temperature of workpiece pole is 950 ~1100 DEG C;
Using graphite as source electrode, the voltage of source electrode is 850~1000V;
Using the gaseous mixture of argon gas and nitrogen as carrier gas, the initialization pressure for controlling gaseous mixture is 30Pa, carbo-nitriding work Gaseous mixture operating pressure is 1Pa at the end of skill, and the carbo-nitriding time is 6h, at the uniform velocity reduces gaseous mixture during carbo-nitriding Operating pressure;The volume ratio of the argon gas and nitrogen is initially 3:7, the body of the argon gas and nitrogen at the end of carbonitriding technology Product at the uniform velocity increases the ratio of nitrogen than being 4:6 during carbo-nitriding.
Presently preferred embodiment are as follows:
Using titanium alloy as workpiece pole, the voltage of workpiece pole is 400~500V, and the carbo-nitriding temperature of workpiece pole is 950 ~1100 DEG C;
Using graphite as source electrode, the voltage of source electrode is 850~1000V;
Using the gaseous mixture of argon gas and nitrogen as carrier gas, the initialization pressure for controlling gaseous mixture is 25Pa, carbo-nitriding work Gaseous mixture operating pressure is 1Pa at the end of skill, and the carbo-nitriding time is 4h, at the uniform velocity reduces gaseous mixture during carbo-nitriding Operating pressure;The volume ratio of the argon gas and nitrogen is initially 3:7, the body of the argon gas and nitrogen at the end of carbonitriding technology Product at the uniform velocity increases the ratio of nitrogen than being 3.5:6.5 during carbo-nitriding.
The preferably described titanium alloy of the present invention is TiAl alloy.
It is a further object of the present invention to provide utilize titanium alloy made from above-mentioned technique.
A kind of titanium alloy of surface carbo-nitriding, the titanium alloy surface carbonitrided case are 200~500 microns, carburizing The hardness of layer is 8100~9520MPa.
It is total to the invention has the benefit that the present invention carries out carbon nitrogen using surface of the plasma non-hydrogen carbonizing method to titanium alloy Infiltration processing, for this method using titanium alloy as workpiece pole, the voltage of workpiece pole is 350~400V, and the carburizing temperature of workpiece pole is 900 ~1000 DEG C;Using graphite as source electrode, the voltage of source electrode is 750~900V;Using the gaseous mixture of argon gas and nitrogen as carrier gas, control is mixed The operating pressure of gas is closed in 0.1Pa~30Pa, and as the operating pressure for make gaseous mixture of carbonitriding technology gradually subtracts It is small;The volume ratio of the argon gas and nitrogen be 3~4:6~7, and with carbonitriding technology carry out make nitrogen in gaseous mixture Ratio is gradually increased.This method passes through the content of control carrier gas argon gas nitrogen in the partial pressure and mixed gas in vacuum drying oven, from And the rate of carburizing is controlled, so that the carburized layer intensity having the same at each thickness, and then promote the strong of entire carburized surface Degree.
Specific embodiment
Following non-limiting embodiments can with a person of ordinary skill in the art will more fully understand the present invention, but not with Any mode limits the present invention.
Test method described in following embodiments is unless otherwise specified conventional method;The reagent and material, such as Without specified otherwise, commercially obtain.
Embodiment 1
Workpiece carbonitriding technology, the carbonitriding technology is the technique that carbo-nitriding is carried out on titanium alloy, described Technique carries out in plasma carburising vacuum drying oven, specifically:
Using TiAl alloy as workpiece pole, the voltage of workpiece pole is 400V, and the carbo-nitriding temperature of workpiece pole is 950 DEG C;
Using graphite as source electrode, the voltage of source electrode is 950V;
Using the gaseous mixture of argon gas and nitrogen as carrier gas, the initialization pressure for controlling gaseous mixture is 30Pa, carbo-nitriding work Gaseous mixture operating pressure is 1Pa at the end of skill, and the carbo-nitriding time is 6h, at the uniform velocity reduces gaseous mixture during carbo-nitriding Operating pressure;The volume ratio of the argon gas and nitrogen is initially 3:7, the body of the argon gas and nitrogen at the end of carbonitriding technology Product at the uniform velocity increases the ratio of nitrogen than being 4:6 during carbo-nitriding.
The titanium alloy surface carbonitrided case is 500 microns, and the hardness of carburized layer is 9520MPa.
Embodiment 2
Workpiece carbonitriding technology, the carbonitriding technology is the technique that carbo-nitriding is carried out on titanium alloy, described Technique carries out in plasma carburising vacuum drying oven, specifically:
Using TiAl alloy as workpiece pole, the voltage of workpiece pole is 450V, and the carbo-nitriding temperature of workpiece pole is 1000 DEG C;
Using graphite as source electrode, the voltage of source electrode is 1000V;
Using the gaseous mixture of argon gas and nitrogen as carrier gas, the initialization pressure for controlling gaseous mixture is 25Pa, carbo-nitriding work Gaseous mixture operating pressure is 1Pa at the end of skill, and the carbo-nitriding time is 4h, at the uniform velocity reduces gaseous mixture during carbo-nitriding Operating pressure;The volume ratio of the argon gas and nitrogen is initially 3:7, the body of the argon gas and nitrogen at the end of carbonitriding technology Product at the uniform velocity increases the ratio of nitrogen than being 3.5:6.5 during carbo-nitriding.
The titanium alloy surface carbonitrided case is 330 microns, and the hardness of carburized layer is 8510MPa.

Claims (6)

1. workpiece carbonitriding technology, it is characterised in that: the carbonitriding technology is the progress carbo-nitriding on titanium alloy Technique, the technique carry out in plasma carburising vacuum drying oven, specifically:
Using titanium alloy as workpiece pole, the voltage of workpiece pole is 400~500V, the carbo-nitriding temperature of workpiece pole is 950~ 1100℃;
Using graphite as source electrode, the voltage of source electrode is 850~1000V;
Using the gaseous mixture of argon gas and nitrogen as carrier gas, the operating pressure of gaseous mixture is controlled in 0.1Pa~30Pa, and as carbon nitrogen is total The carrying out of cementation process is gradually reduced the operating pressure of gaseous mixture;The volume ratio of the argon gas and nitrogen is 3~4:6~7, and with Carbonitriding technology carry out be gradually increased the ratio of nitrogen in gaseous mixture;
The carbo-nitriding time is at least 1h.
2. technique according to claim 1, it is characterised in that: using the gaseous mixture of argon gas and nitrogen as carrier gas, control mixing The operating pressure of gas in 1Pa~30Pa, and with carbonitriding technology carry out be gradually reduced the operating pressure of gaseous mixture;Institute The volume ratio for stating argon gas and nitrogen is 3~4:6~7, and with the ratio for make nitrogen in gaseous mixture of carbonitriding technology It is gradually increased;
The carbo-nitriding time is at least 3h.
3. technique according to claim 2, it is characterised in that: using the gaseous mixture of argon gas and nitrogen as carrier gas, control mixing The initialization pressure of gas is 30Pa, and gaseous mixture operating pressure is 1Pa at the end of carbonitriding technology, and the carbo-nitriding time is 6h at the uniform velocity reduces the operating pressure of gaseous mixture during carbo-nitriding;The volume ratio of the argon gas and nitrogen is initially 3:7, The volume ratio of the argon gas and nitrogen is 4:6 at the end of carbonitriding technology, at the uniform velocity increases nitrogen during carbo-nitriding Ratio.
4. technique according to claim 2, it is characterised in that: using the gaseous mixture of argon gas and nitrogen as carrier gas, control mixing The initialization pressure of gas is 25Pa, and gaseous mixture operating pressure is 1Pa at the end of carbonitriding technology, and the carbo-nitriding time is 4h at the uniform velocity reduces the operating pressure of gaseous mixture during carbo-nitriding;The volume ratio of the argon gas and nitrogen is initially 3:7, The volume ratio of the argon gas and nitrogen is 3.5:6.5 at the end of carbonitriding technology, at the uniform velocity increases nitrogen during carbo-nitriding The ratio of gas.
5. technique according to claim 1, it is characterised in that: the titanium alloy is TiAl alloy.
6. utilizing titanium alloy made from technique described in claim 1, it is characterised in that: the titanium alloy surface carbonitrided case is 200~500 microns, the hardness of carburized layer is 8100~9520MPa.
CN201611056235.8A 2016-11-25 2016-11-25 Workpiece carbonitriding technology Expired - Fee Related CN106544625B (en)

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CN112921160A (en) * 2021-01-14 2021-06-08 广东世创金属科技股份有限公司 Low-hydrogen or hydrogen-free controllable atmosphere for metal heat treatment and preparation method and application thereof

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CN1032376C (en) * 1991-03-19 1996-07-24 太原工业大学 Arc light ion carburizing and carbonitriding technology and its installation
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JP2003073796A (en) * 2001-09-03 2003-03-12 Fuji Oozx Inc Surface treatment method for titanium-based material
CN1174112C (en) * 2002-03-18 2004-11-03 太原理工大学 Dual-layer glow ion carbonizing apparatus and process
CN1202278C (en) * 2002-03-20 2005-05-18 太原理工大学 Non-hydrogen carbonizing equipment and technology by dual-glow diocharge
CN101187027A (en) * 2006-11-16 2008-05-28 刘文彬 Compound heat treating method
CN102086501A (en) * 2009-12-08 2011-06-08 上海汉鑫硬质合金有限公司 Ion nitrocarburizing treatment method for iron-based sintered material
CN101748242B (en) * 2010-01-14 2011-05-25 武昌船舶重工有限责任公司 Method for precisely controlling nitrogen content in extra low carbon stainless steel with nitrogen
CN103122446A (en) * 2013-02-02 2013-05-29 大连经济技术开发区圣洁真空技术开发有限公司 Quantitative titanium nitriding carbonitriding technique

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