CN106527053A - LDI automatic focusing control method and system - Google Patents
LDI automatic focusing control method and system Download PDFInfo
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- CN106527053A CN106527053A CN201611061209.4A CN201611061209A CN106527053A CN 106527053 A CN106527053 A CN 106527053A CN 201611061209 A CN201611061209 A CN 201611061209A CN 106527053 A CN106527053 A CN 106527053A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
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- Automatic Focus Adjustment (AREA)
Abstract
The invention provides an LDI automatic focusing control method and system, and relates to the technical field of lithography direct writing exposure machines and projection display. The LDI automatic focusing control method comprises the steps as follows: a lens cone is controlled to output imaging information to a focusing platform; the imaging information on the focusing platform is collected through a camera; whether a focusing surface of the lens cone is located on the focusing platform or not is judged according to the imaging information and prompting information that the focusing platform needs to move along a Z axis is given; and the focusing platform moves to an appointed position upwards or downwards along the Z axis according to the prompting information. The technical problems that the hardware cost is relatively high and maintenance and cleaning are cumbersome in the prior art are solved, the technical effect that the lens cone is focused on the focusing platform through adjusting the position of the focusing platform in a Z-axis direction is achieved, the structure is simple, and operation and maintenance are convenient.
Description
Technical field
The present invention relates to photoetching direct write exposure machine and projection display technique field, focus on automatically more particularly, to a kind of LDI
Control method and system.
Background technology
Photoetching technique is for technology of the printing with characteristic composition on the surface of the substrate.Such substrate can be used to manufacture
Semiconductor device, various integrated circuits, flat-panel screens (such as liquid crystal display), circuit board, biochip, micromechanics electronics
Chip, photoelectron circuit chip etc..
In the etching system of direct-write type lithography machine, feature pattern is produced by spatial light modulator micro mirror array, and this is slightly
Little minute surface can be modulated with producing spatial light intensity with the separately addressed individually controlled light beam with different incline direction reflected illuminations,
Feature pattern is projected to into printed circuit board (PCB) (Printed Circuit Board, abbreviation PCB by corresponding imaging optical path finally
Plate) on.
Due to LDI products in actual applications, during exposure, thickness of slab is different, and the focus point when graph exposure is imaged is different,
So needing the function of using focusing and focus on.The focusing platform of the LDI exposure sources of prior art can only be transported along X-axis and Y-axis
It is dynamic, it is therefore desirable to adjust the position of lens barrel focusing surface by way of focus prism and echelon prism, enable lens barrel focusing surface
Enough being located at is focused on platform, but, the hardware cost using the LDI equipment of this focusing surface regulative mode is higher, and uses
Safeguard in journey that cleaning is cumbersome.
The content of the invention
In view of this, it is an object of the invention to provide a kind of LDI autofocus control methods and system, existing to solve
Hardware cost present in technology is higher, safeguards the troublesome technical problem of cleaning.
In a first aspect, embodiments providing a kind of LDI autofocus control methods, comprise the following steps：
Control lens barrel exports image-forming information to platform is focused on；
The image-forming information focused on platform is located at by collected by camera；
Judge whether the focusing surface of lens barrel is located at according to image-forming information to focus on platform, and provide focusing platform to need along Z
The information of axle motion；
Focus on platform to be moved upwardly or downwardly to specified location along Z axis according to information.
The focussing plane of lens barrel parallel to focus on platform, and perpendicular to focus on platform Z axis；Mirror is judged according to image-forming information
Whether the focusing surface of cylinder is located at focuses on platform, and provides the information for focusing on that platform needs to move along Z axis；Focus on platform root
It is moved upwardly or downwardly to specified location along Z axis according to information, makes focusing surface overlap with platform is focused on, i.e., by adjusting focusing
Platform the position of Z-direction make lens barrel focus on focusing platform on, simple structure, operation, it is easy to maintenance.
With reference in a first aspect, embodiments provide the first possible embodiment of first aspect, wherein, gather
Burnt platform is moved upwardly or downwardly to specified location along Z axis according to information, specially：
Focus on platform and certain distance is moved downward or upward along Z axis according to information, wherein, information is when control
Device according to image-forming information judge the current focusing surface of lens barrel higher or lower than focus on platform when, be given focusing surface need decline or on
The displacement information for rising；
Repeat the above steps are until focussing plane needs are zero along the information of Z axis.
Focusing platform Step wise approximation focusing surface is made by repeatedly adjustment, is focused on platform so as to realize that focusing surface is located at.
With reference in a first aspect, embodiments provide second possible embodiment of first aspect, wherein, when
When focusing surface is with the distance between platform is focused on less than given threshold, then judge that focusing surface overlaps with platform is focused on.
According to the threshold values different from job demand setting are tested, if threshold range is more loose, can be by once moving
Lens barrel is made to focus on focusing platform, if threshold range is more strict, can be by repeatedly mobile Step wise approximation threshold value, by many
Secondary movement makes lens barrel focus on focusing platform.
With reference to first aspect and its possible embodiment, the third possibility of first aspect is embodiments provided
Embodiment, wherein, focus on the distance between platform and lens barrel and pass through range sensor real-time detection.
With reference to the 4th kind of possible embodiment of first aspect, embodiments provide first aspect the 4th kind can
The embodiment of energy, wherein, range sensor is CD33.
Second aspect, the embodiment of the present invention also provide a kind of LDI auto focus controls system, including：
Platform is focused on, focusing on platform can move along X-axis, Y-axis and Z axis；
Lens barrel, the output of lens barrel are rectified to focusing on platform；
Range sensor, range sensor are used for detection and focus on the distance between platform and lens barrel information, and will be apart from letter
Breath is sent to controller；
Camera, camera are used for gathering image-forming information of the lens barrel on platform is focused on, and image-forming information is sent to controller；
Controller connection focuses on platform, lens barrel, and it is flat to judge whether the focusing surface of lens barrel is located at focusing according to image-forming information
On platform, if focusing surface is not on platform is focused on, control focuses on platform and moves along Z axis, until focus on platform overlapping with focusing surface.
Focus on platform to move along X-axis, Y-axis and Z axis, judge whether the focusing surface of lens barrel is located at according to image-forming information and focus on
On platform, if focusing surface is not on platform is focused on, control focuses on platform and moves along Z axis, until focusing on platform and focusing surface weight
Close, Z axis are added in original X-axis, the platform of Y-axis both direction, define three axles that can be moved forward and backward up and down and put down
Platform, can make focusing platform overlap with aggregation face by adjusting focusing platform in the position of Z axis, so that lens barrel can be focused on
Focus on platform.
With reference to second aspect, the first possible embodiment of second aspect is embodiments provided, wherein, when
When controller judges the current focusing surface of lens barrel higher or lower than platform is focused on according to image-forming information, be then given under focusing surface needs
Drop or the information for rising, focus on platform and move certain distance according to information downward or upward along Z axis；
Controller controls lens barrel and camera repeats said process until focusing surface overlaps with platform is focused on.
With reference to second aspect, second possible embodiment of second aspect is embodiments provided, wherein, when
When focusing surface is with the distance between platform is focused on less than given threshold, controller judges that focusing surface overlaps with platform is focused on.
With reference to second aspect and its possible embodiment, the third possibility of second aspect is embodiments provided
Embodiment, wherein, range sensor real-time detection focuses on the distance between platform and lens barrel, and by distance signal send to
Controller.
The third possible embodiment with reference to second aspect, the third for embodiments providing second aspect can
The embodiment of energy, wherein, range sensor is CD33.
The embodiment of the present invention brings following beneficial effect：
LDI autofocus control methods provided in an embodiment of the present invention are imaged letter by controlling lens barrel to platform output is focused on
Breath, makes the focussing plane of lens barrel perpendicular to the Z axis for focusing on platform, is located at the image-forming information focused on platform by collected by camera；
Judge whether the focusing surface of lens barrel is located at according to image-forming information to focus on platform, and provide focusing platform to need what is moved along Z axis
Information；Focus on platform to be moved upwardly or downwardly to specified location along Z axis according to information, make focusing surface and focus on platform
Overlap, i.e., lens barrel is focused on focusing platform by adjusting focusing platform in the position of Z-direction, simple structure, operation, dimension
Repair conveniently.
Other features and advantages of the present invention will be illustrated in the following description, also, partly be become from description
Obtain it is clear that or being understood by implementing the present invention.The purpose of the present invention and other advantages are in description, claims
And in accompanying drawing specifically noted structure realizing and obtain.
For enabling the above objects, features and advantages of the present invention to become apparent, preferred embodiment cited below particularly, and coordinate
Appended accompanying drawing, is described in detail below.
Description of the drawings
In order to be illustrated more clearly that the specific embodiment of the invention or technical scheme of the prior art, below will be to concrete
Needed for embodiment or description of the prior art, accompanying drawing to be used is briefly described, it should be apparent that, in describing below
Accompanying drawing is some embodiments of the present invention, for those of ordinary skill in the art, before creative work is not paid
Put, can be with according to these other accompanying drawings of accompanying drawings acquisition.
Fig. 1 is the LDI autofocus control method flow charts that the embodiment of the present invention 1 is provided；
Fig. 2 is the focusing surface that the embodiment of the present invention 1 is provided and focuses on the schematic diagram that platform overlaps；
Fig. 3 is that the focusing platform that the embodiment of the present invention 1 is provided is located above focussing plane, and to the signal of focusing surface movement
Figure；
Fig. 4 is that the focusing platform that the embodiment of the present invention 1 is provided is located at below focussing plane, is first moved to below focusing surface,
The schematic diagram for moving backward again；
Fig. 5 is the process of the focusing platform by Step wise approximation focusing surface above focusing surface of the offer of the embodiment of the present invention 1；
Fig. 6 is the schematic diagram of the LDI auto focus control systems that the embodiment of the present invention 1 is provided.
Icon：1- focusing surfaces；2- focuses on platform；3- imaging beams；4- controllers；5- lens barrels；6- range sensors；7- phases
Machine.
Specific embodiment
For making purpose, technical scheme and the advantage of the embodiment of the present invention clearer, below in conjunction with accompanying drawing to the present invention
Technical scheme be clearly and completely described, it is clear that described embodiment is a part of embodiment of the invention, rather than
Whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art are not making creative work premise
Lower obtained every other embodiment, belongs to the scope of protection of the invention.
Current LDI is needed by way of focus prism and echelon prism come the position for adjusting lens barrel focusing surface, makes mirror
Cylinder focusing surface can be focused on focusing platform, based on this, a kind of LDI autofocus control methods provided in an embodiment of the present invention
And system, LDI lens barrel hardware costs can be reduced, and simplifies maintenance cleaning flow process.
For ease of understanding to the present embodiment, control is focused on automatically to a kind of LDI disclosed in the embodiment of the present invention first
Method processed describes in detail.
Embodiment 1：
As shown in figure 1, present embodiments providing a kind of LDI autofocus control methods, comprise the following steps：
S1. control lens barrel image-forming information is exported to platform is focused on.
The output of lens barrel is rectified to focusing on platform, and, to platform output image-forming information is focused on, focusing on platform can edge for control lens barrel
Its Z axis is lifted, and lens barrel focusing surface is parallel to platform end face is focused on, perpendicular to the Z axis for focusing on platform.
S2. the image-forming information focused on platform is located at by collected by camera.
Gathered by CCD camera and the image-forming information focused on platform is projected by lens barrel, image-forming information is probably focusing surface
Picture information, it is also possible to be not the picture information of focusing surface.
S3. judge whether the focusing surface of lens barrel is located at according to image-forming information to focus on platform, and provide focusing platform needs
Along the information that Z axis are moved.
Focus on platform, if image-forming information according to whether the definition judgment focusing surface of the image-forming information of CCD collections is located at
Critical parameter setting threshold range in, then be judged as focusing surface with focus on platform in same plane, now provide prompting
Information is 0；If the critical parameter of image-forming information is not in the range of given threshold, judge focusing surface and platform is focused on not same
Plane, now provides the information for focusing on that platform needs to move along Z axis.
S4. focus on platform to be moved upwardly or downwardly to specified location along Z axis according to information.
1. as shown in Fig. 2 the imaging beam 3 for carrying image-forming information is invested focusing platform 2 by lens barrel, when focusing surface and focusing
When platform 2 overlaps, the critical parameter of image-forming information is located in the threshold range selected, then focusing surface with focusing platform 2 same
Plane, it is zero to provide information, focuses on platform 2 without the need for moving again.
2. coarse adjustment, it is adaptable to the relatively low work of required precision or experimental situation.
Setting：When focusing on platform and being misaligned with actual focusing surface, focus on platform and first moved down according to information.
2.1 as shown in figure 3, when platform 2 is focused on positioned at 1 top of focusing surface, focus on platform 2 first downward according to information
Displacement a1, is projected the image-forming information focused on platform 2, and judges focusing surface 1 and put down with focusing on using collected by camera lens barrel
Whether platform 2 overlaps, if critical parameter is in the range of the first threshold of setting, then it is assumed that focusing surface 1 overlaps with platform 2 is focused on, then
Information provides zero, focuses on platform 2 without the need for moving again.
In 2.2 Fig. 4, when platform 2 being focused on positioned at 1 lower section of focusing surface, focus on platform 2 and is first moved down according to information
Apart from a1, the image-forming information focused on platform 2 is projected using collected by camera lens barrel, and judges that focusing surface 1 with platform 2 is focused on is
No coincidence, as 2 Range Focusing face 1 of focusing platform is farther, critical parameter phase strain differential now, controls to focus on the reversely shifting of platform 2
Dynamic 2a1, is then projected the image-forming information focused on platform 2, and judges focusing surface 1 and focus on platform using collected by camera lens barrel
Whether 2 overlap, if critical parameter is in the range of the first threshold of setting, then it is assumed that focusing surface 1 overlaps with platform 2 is focused on, then carry
Show that information provides zero, platform 2 is focused on without the need for moving again.
3. fine tuning, it is adaptable to the higher work of required precision or experimental situation.
Setting：When focusing on platform and being misaligned with actual focusing surface, focus on platform and first moved down according to information.
3.1 as shown in Figure 4 and Figure 5, when platform 2 is focused on positioned at 1 top of focusing surface, focuses on platform 2 first according to prompting letter
Breath is moved down apart from a1, projects the image-forming information focused on platform 2 using collected by camera lens barrel, and judge focusing surface 1 with
Focus on whether platform 2 overlaps, if critical parameter is directly in the range of Second Threshold, focusing surface 1 and focuses on platform 2 and overlap, focus on
Platform 2 is without the need for moving again；If critical parameter is in the range of first threshold with Second Threshold, then it is assumed that focusing surface 1 and focusing platform 2
It is misaligned, information a2 is given, whether control focuses on platform 2 and continues to think lower motion a2, and judge critical parameter in the second threshold
In the range of value, if, then it is assumed that focusing surface 1 overlaps with platform 2 is focused on, and focuses on platform 2 without the need for moving again, if not in Second Threshold
In the range of, then information a3 is given, control focuses on platform 2 and continues to move downward a3 according to information, and gathers imaging letter
Breath, then judges, by that analogy, until critical parameter is in the range of Second Threshold.
3.2 as shown in Figure 4 and Figure 5, when platform 2 is focused on positioned at 1 lower section of focusing surface, focuses on platform 2 first according to prompting letter
Breath is moved down apart from a1, projects the image-forming information focused on platform 2 using collected by camera lens barrel, and judge focusing surface 1 with
Focus on whether platform 2 overlaps, farther due to now focusing on 2 Range Focusing face 1 of platform, critical parameter phase strain differential, control are focused on
Platform 2 moves backward 2a1, then projects the image-forming information focused on platform 2 using collected by camera lens barrel, and judges focusing surface
Whether 1 overlapped with focusing platform 2, and concrete determination methods are with described in above-mentioned 3.1.
Preferably for fine tuning, the range information that information is given tapers off trend.
If it should be noted that focus on 2 moving process of platform in critical parameter be deteriorated, illustrate focusing platform 2 move away from
After a 2a should be moved backward, then gathers imaging more than before mobile and the distance between focusing surface 1 with the distance between focusing surface 1
Information, and subsequently judged.
Additionally, focusing on the distance between platform 2 and lens barrel in the present embodiment by range sensor real-time monitoring, this enforcement
Range sensor in example preferably adopts CD33.
Embodiment 2：
A kind of LDI auto focus controls system is embodiments provided, is passed including platform 2, lens barrel 5, distance is focused on
Sensor 6, camera 7 and controller 4, the connection of controller 4 focus on platform 2, lens barrel 5, range sensor 6 and camera 7, focus on platform 2
Can move along X-axis, Y-axis and Z axis；The output of lens barrel 5 is rectified to focusing on platform 2；Range sensor 6 is used for detecting focusing platform 2
With the distance between lens barrel 5 information, and range information is sent to controller 4；Camera 7 is used for gathering lens barrel 5 in focusing platform 2
On image-forming information, and image-forming information is sent to the controller 4；The connection focusing platform 2 of controller 4, lens barrel 5, and according to
Image-forming information judges whether the focusing surface of lens barrel 5 is located at and focuses on platform 2 that, if focusing surface is not on platform 2 is focused on, control is poly-
Burnt platform 2 is moved along Z axis, until focus on platform 2 overlapping with focusing surface.
Preferably, when controller 4 judges the current focusing surface of lens barrel 5 higher or lower than focusing platform 2 according to image-forming information
When, then providing focusing platform 2 needs down or up information, focus on platform 2 according to information along Z axis downwards or to
Upper motion certain distance；Controller 4 controls lens barrel 5 and camera 7 repeats said process until focusing surface overlaps with platform 2 is focused on.
Focus in the embodiment of the present invention in 2 moving process of platform, range sensor 6 is preferably focused on using CD33 real-time detections
The distance between platform 2 and lens barrel 5, and distance signal is sent to controller 4.When focusing surface 1 and focus on platform 2 between away from
During from less than given threshold, controller 4 judges that focusing surface overlaps with platform 2 is focused on.
It should be noted that in the embodiment of the present invention focus on platform 2 according to information be directly moved to focusing surface or
The method of Step wise approximation focusing surface is in the same manner as in Example 1, will not be described here.
LDI auto focus controls system provided in an embodiment of the present invention, the LDI provided with above-described embodiment focus on control automatically
Method processed has identical technical characteristic, so can also solve identical technical problem, reaches identical technique effect.
LDI autofocus control methods and the computer program of system that the embodiment of the present invention is provided, including depositing
The computer-readable recording medium of program code is stored up, the instruction that described program code includes can be used to perform previous methods enforcement
Method described in example, implements and can be found in embodiment of the method, will not be described here.
Those skilled in the art can be understood that, for convenience and simplicity of description, the system of foregoing description
With the specific work process of device, the corresponding process in preceding method embodiment is may be referred to, be will not be described here.
In addition, in the description of the embodiment of the present invention, unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " should be interpreted broadly, for example, it may be being fixedly connected, or being detachably connected, or be integrally connected；Can
Being to be mechanically connected, or electrically connect；Can be joined directly together, it is also possible to be indirectly connected to by intermediary, Ke Yishi
The connection of two element internals.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
If the function is realized using in the form of SFU software functional unit and as independent production marketing or when using, can be with
It is stored in a computer read/write memory medium.Based on such understanding, technical scheme is substantially in other words
The part contributed to prior art or the part of the technical scheme can be embodied in the form of software product, the meter
Calculation machine software product is stored in a storage medium, is used including some instructions so that a computer equipment (can be individual
People's computer, server, or network equipment etc.) perform all or part of step of each embodiment methods described of the invention.
And aforesaid storage medium includes：USB flash disk, portable hard drive, read only memory (ROM, Read-Only Memory), random access memory are deposited
Reservoir (RAM, Random Access Memory), magnetic disc or CD etc. are various can be with the medium of store program codes.
In describing the invention, it should be noted that term " " center ", " on ", D score, "left", "right", " vertical ",
The orientation of the instruction such as " level ", " interior ", " outward " or position relationship be based on orientation shown in the drawings or position relationship, merely to
Be easy to description the present invention and simplify description, rather than indicate or imply indication device or element must have specific orientation,
With specific azimuth configuration and operation, therefore it is not considered as limiting the invention.Additionally, term " first ", " second ",
" the 3rd " is only used for describing purpose, and it is not intended that indicating or implying relative importance.
Finally it should be noted that：Embodiment described above, specific embodiment only of the invention, to illustrate the present invention
Technical scheme, rather than a limitation, protection scope of the present invention is not limited thereto, although with reference to the foregoing embodiments to this
It is bright to be described in detail, it will be understood by those within the art that：Any those familiar with the art
The invention discloses technical scope in, which still can be modified to the technical scheme described in previous embodiment or can be light
Change is readily conceivable that, or equivalent is carried out to which part technical characteristic；And these modifications, change or replacement, do not make
The essence of appropriate technical solution departs from the spirit and scope of embodiment of the present invention technical scheme, should all cover the protection in the present invention
Within the scope of.Therefore, protection scope of the present invention described should be defined by scope of the claims.
Claims (10)
1. a kind of LDI autofocus control methods, it is characterised in that comprise the following steps：
Control lens barrel exports image-forming information to platform is focused on；
The image-forming information focused on platform is located at by collected by camera；
Judge whether the focusing surface of the lens barrel is located on the focusing platform according to the image-forming information, and provide the focusing
Platform needs the information moved along Z axis；
The focusing platform is moved upwardly or downwardly to specified location along Z axis according to the information.
2. LDI autofocus control methods according to claim 1, it is characterised in that the focusing platform is according to described
Information is moved upwardly or downwardly to specified location along Z axis, specially：
The focusing platform moves certain distance according to the information downward or upward along the Z axis, wherein, the prompting
Information is to judge that the current focusing surface of the lens barrel is higher or lower than the focusing platform when controller according to the image-forming information
When, providing the focusing surface needs down or up displacement information；
Repeat the above steps are until focussing plane needs are zero along the information of the Z axis.
3. LDI autofocus control methods according to claim 1, it is characterised in that when the focusing surface it is poly- with described
When the distance between burnt platform is less than given threshold, then judge that the focusing surface is overlapped with the focusing platform.
4. LDI autofocus control methods according to any one of claim 1-3, it is characterised in that the focusing platform
Pass through range sensor real-time detection with the distance between the lens barrel.
5. LDI autofocus control methods according to claim 4, it is characterised in that the range sensor is CD33.
6. a kind of LDI auto focus controls system, it is characterised in that include：
Platform is focused on, the focusing platform can be moved along X-axis, Y-axis and Z axis；
Lens barrel, the output of the lens barrel are rectified to the focusing platform；
Range sensor, the range sensor be used for detecting the distance between focusing platform and lens barrel information, and
The range information is sent to controller；
Camera, the camera are used for gathering the lens barrel in the image-forming information focused on platform, and by the image-forming information
Send to the controller；
The controller connection is described to focus on platform, the lens barrel, and judges the focusing of the lens barrel according to the image-forming information
Whether face is located on the focusing platform, if the focusing surface controls the focusing platform edge not on the focusing platform
The Z axis motion, until the focusing platform is overlapped with the focusing surface.
7. LDI auto focus controls system according to claim 6, it is characterised in that when the controller is according to described
When image-forming information judges the current focusing surface of the lens barrel higher or lower than the focusing platform, then the focusing surface needs are given
Down or up information, the focusing platform are moved necessarily along the Z axis downward or upward according to the information
Distance；
Controller controls the lens barrel and the camera repeats said process until the focusing surface is overlapped with the focusing platform.
8. LDI auto focus controls system according to claim 6, it is characterised in that when the focusing surface it is poly- with described
When the distance between burnt platform is less than given threshold, the controller judges that the focusing surface is overlapped with the focusing platform.
9. LDI auto focus control systems according to any one of claim 6-8, it is characterised in that the Distance-sensing
The distance between platform and described lens barrel is focused on described in device real-time detection, and distance signal is sent to the controller.
10. LDI auto focus controls system according to claim 9, it is characterised in that the range sensor is
CD33。
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| CN201611061209.4A CN106527053A (en) | 2016-11-25 | 2016-11-25 | LDI automatic focusing control method and system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106909029A (en) * | 2017-03-07 | 2017-06-30 | 无锡影速半导体科技有限公司 | Laser direct imaging exposure machine movement focusing structure and focus method |
| CN108036860A (en) * | 2017-12-02 | 2018-05-15 | 北京工业大学 | A kind of fast positioning focus control for infrared thermography thermometric |
| CN109407479A (en) * | 2017-08-18 | 2019-03-01 | 苏州苏大维格光电科技股份有限公司 | Laser direct-writing focusing mechanism and laser direct-writing focusing method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1790095A (en) * | 2004-12-17 | 2006-06-21 | 鸿富锦精密工业（深圳）有限公司 | Automatic image focusing system and method |
| CN1867851A (en) * | 2003-08-26 | 2006-11-22 | 索尼株式会社 | Autofocus control method, autofocus controller, and image processor |
| US20080273184A1 (en) * | 2007-03-30 | 2008-11-06 | Fujifilm Corporation | Apparatus and method for referential position measurement and pattern-forming apparatus |
| CN102430858A (en) * | 2011-10-10 | 2012-05-02 | 华中科技大学 | Automatic focusing adjustor for laser processing |
| US8194240B1 (en) * | 2008-03-04 | 2012-06-05 | Kla-Tencor Corporation | Enhanced focusing capability on a sample using a spot matrix |
| CN103744271A (en) * | 2014-01-28 | 2014-04-23 | 苏州苏大维格光电科技股份有限公司 | Laser direct-writing system and photolithography method |
| CN104950583A (en) * | 2014-03-24 | 2015-09-30 | 上海微电子装备有限公司 | Focusing and leveling system for lithographic equipment |
-
2016
- 2016-11-25 CN CN201611061209.4A patent/CN106527053A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1867851A (en) * | 2003-08-26 | 2006-11-22 | 索尼株式会社 | Autofocus control method, autofocus controller, and image processor |
| CN1790095A (en) * | 2004-12-17 | 2006-06-21 | 鸿富锦精密工业（深圳）有限公司 | Automatic image focusing system and method |
| US20080273184A1 (en) * | 2007-03-30 | 2008-11-06 | Fujifilm Corporation | Apparatus and method for referential position measurement and pattern-forming apparatus |
| US8194240B1 (en) * | 2008-03-04 | 2012-06-05 | Kla-Tencor Corporation | Enhanced focusing capability on a sample using a spot matrix |
| CN102430858A (en) * | 2011-10-10 | 2012-05-02 | 华中科技大学 | Automatic focusing adjustor for laser processing |
| CN103744271A (en) * | 2014-01-28 | 2014-04-23 | 苏州苏大维格光电科技股份有限公司 | Laser direct-writing system and photolithography method |
| CN104950583A (en) * | 2014-03-24 | 2015-09-30 | 上海微电子装备有限公司 | Focusing and leveling system for lithographic equipment |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106909029A (en) * | 2017-03-07 | 2017-06-30 | 无锡影速半导体科技有限公司 | Laser direct imaging exposure machine movement focusing structure and focus method |
| CN109407479A (en) * | 2017-08-18 | 2019-03-01 | 苏州苏大维格光电科技股份有限公司 | Laser direct-writing focusing mechanism and laser direct-writing focusing method |
| CN108036860A (en) * | 2017-12-02 | 2018-05-15 | 北京工业大学 | A kind of fast positioning focus control for infrared thermography thermometric |
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