CN106521453B - A kind of inversion type election electric cylinders device - Google Patents
A kind of inversion type election electric cylinders device Download PDFInfo
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- CN106521453B CN106521453B CN201510583323.2A CN201510583323A CN106521453B CN 106521453 B CN106521453 B CN 106521453B CN 201510583323 A CN201510583323 A CN 201510583323A CN 106521453 B CN106521453 B CN 106521453B
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- electric cylinders
- cavity
- push rod
- cover plate
- upper cover
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Abstract
The present invention relates to a kind of inversion types to elect electric cylinders device, and applied to the structure auxiliary device of beginning to speak of semiconductor thin film deposition equipment, the stability of trigger signal when chamber lid is closed is improved by increasing certain idle stroke.Belong to semiconductive thin film deposition applications and manufacturing technology field.It is mounted on electric cylinders bar including electric cylinders, electric cylinders bar is hollow structure, interior to be equipped with push rod；Electric cylinders bar is fixed on upper cover plate；Push rod passes through upper cover plate, scalable in electric cylinders bar, and realization contacts with cavity or have between cavity idle stroke, in the end of push rod installation limit briquetting, matches and is limited at a distance from idle stroke with the limit switch on cavity.The present invention can be closed completely by increasing idle stroke, upper cover plate with chamber, and avoiding cannot be closed completely and cannot reach vacuum level requirements.
Description
Technical field
The present invention relates to a kind of structure auxiliary devices of beginning to speak applied to semiconductor thin film deposition equipment, are suitable for inversion type
The mode of beginning to speak for electing electric cylinders improves the stability of trigger signal when chamber lid is closed by increasing certain idle stroke.Belong to half
Conductor thin film deposition applications and manufacturing technology field.
Background technology
Semiconductor thin film deposition equipment needs to carry out under vacuum, this requires cavitys when carrying out deposition reaction
It is completely closed when equipment starts.If cavity cannot be closed completely, it is possible to it causes that operation pressure requirement cannot be reached in cavity,
Or process gas leakage generates dangerous consequences.The vertical lift mode of beginning to speak may be because that the reasons such as limit switch sensitivity generate
Upper cover plate cannot be closed completely with chamber, or be closed the problems such as rear limit switch cannot trigger completely.
It is closed not tight and generates in conclusion electing electric cylinders mode cavity that may be present of beginning to speak for existing inversion type
Risk, need rational structure to ensure that cavity can be closed completely, while triggering limit switch and providing accurate signal feedback.
Invention content
Technical problem to be solved by the present invention lies in a kind of inversion type election electric cylinders device is provided, mainly solve existing
The mode of beginning to speak may be because that the reasons such as limit switch sensitivity generate upper cover plate and cannot be closed completely with chamber, or be limited after being closed
The problems such as switch cannot trigger completely.Increase idle stroke structure, after making upper cover plate closing, electric cylinders can still move upwards certain row
Journey, to trigger limit switch.
The invention is realized in this way a kind of inversion type elects electric cylinders device, including electric cylinders are mounted on electric cylinders bar, electric cylinders
Bar is hollow structure, and interior to be equipped with push rod, push rod is retractable structure；Electric cylinders bar is fixed on the upper cover plate of installed depositing device
On；Push rod passes through upper cover plate, in the end of push rod installation limit briquetting, matches and is limiting with the limit switch on cavity
Certain idle stroke is limited between the cavity bottom surface for the depositing device that bit switch and upper cover plate are installed.
The present invention further limits, and electric cylinders bar is regular length.
Further, when beginning to speak, cavity supports upper cover plate and electric cylinders bar motionless to the present invention, and push rod, which first extends, moves downward sky
To cavity bottom surface, push rod continues to extend stroke length, is support with cavity bottom surface, electric cylinders bar and upper cover plate is driven to transport upwards together
Dynamic, cavity is opened；When closing cavity, push rod is shunk, and push rod is support with cavity bottom surface, is transported downwards with electric cylinders bar and upper cover plate
It is dynamic, until cavity is closed；After upper cover plate is contacted with cavity siding, push rod bounces back upwards, upper cover plate under gravity, completely
It is bonded cavity siding, cavity is closed the length that rear push-rod continues retraction idle stroke, and limit briquetting triggers limit switch, movement knot
Beam.
Compared with prior art, the present invention advantageous effect is：For the present invention by increasing idle stroke, upper cover plate can be with chamber
Room is closed completely, and avoids the risk that cannot be closed completely and cannot reach vacuum level requirements or process gas leakage.Cavity
Being closed rear limit switch can trigger completely, and equipment, which smoothly receives signal, can carry out the next item down action, avoid the time
Waste and safety and the reliability for improving equipment entirety.
Description of the drawings
Fig. 1 is the layout between inversion type election electric cylinders device and depositing device provided in an embodiment of the present invention；
Fig. 2 is that inversion type provided in an embodiment of the present invention elects upper cover plate closed state in electric cylinders device, and limit switch is complete
Each component locations figure when full triggering；
Fig. 3 is that inversion type provided in an embodiment of the present invention elects in electric cylinders device upper cover plate i.e. by each component position of open state
Set figure；
Fig. 4 is each component locations figure of upper cover plate open state；
Wherein, figure label：1, push rod；2, briquetting is limited；3, limit switch；4, upper cover plate；5, electric cylinders；6, electric cylinders bar；
7, idle stroke
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to embodiments, to the present invention
It is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, it is not used to
Limit the present invention.
Referring to Fig. 1, inversion type elects electric cylinders device, for the structure auxiliary of beginning to speak applied to semiconductor thin film deposition equipment
Device elects the mode of beginning to speak of electric cylinders suitable for inversion type, and referring to Fig. 2, inversion is arranged on the upper cover plate 4 of depositing device, wraps
Electric cylinders 5 and electric cylinders bar 6 are included, electric cylinders 5 are mounted on 6 upper end of electric cylinders bar, and electric cylinders bar 6 is vertical with upper cover plate 4, and electric cylinders bar 6 is arranged
For hollow structure, it is inside equipped with a push rod 1, push rod 1 is retractable structure；The other end of electric cylinders bar 6 is fixed on upper cover plate 4；
After being punched on upper cover plate 4, push rod 1 is passed through into upper cover plate 4, push rod 1 is scalable in electric cylinders bar 6, passes through flexible realization and cavity
Contact has certain idle stroke 7 between cavity, in the end of push rod 1 installation limit briquetting 2, and on cavity
Limit switch 3 matches the distance for limiting idle stroke 7.It is vertical with push rod 1 that is flat between upper cover plate to limit briquetting 2
Row, limit switch 3 is arranged in the side of cavity, and when push rod 1 is shunk, limit briquetting 2 stops fortune after being contacted with limit switch 3
Row, limit switch is connect with external control system, after control system receives the information of limit switch, carries out the dynamic of next step
Make.
Referring to Fig. 2, a distance, as idle stroke 7 are increased between 1 tightening state of push rod and cavity bottom surface.When beginning to speak, on
Cover board 4 and electric cylinders bar 6 are motionless, and push rod is that free end is hanging due to there is end, and extension moves downward idle stroke length to cavity bottom surface,
As shown in Figure 3.After push rod is contacted with cavity bottom surface, push rod is when continuing to extend downwardly, due to being supported by cavity bottom surface, from
Motionless by holding, to drive the electric cylinders bar being attached thereto that upper cover plate is driven to move upwardly together, cavity is opened, as shown in Figure 4.It closes
When closed chamber body, push rod retraction, to drive electric cylinders bar to be moved downwardly together with upper cover plate, until cavity is closed.Upper cover plate with
After the contact of cavity siding, push rod continues to bounce back, and upper cover plate under gravity, is bonded cavity siding, after cavity is closed completely
Push rod continues the length of retraction idle stroke, and limit briquetting 2 triggers limit switch 3, and movement terminates.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
All any modification, equivalent and improvement etc., should all be included in the protection scope of the present invention made by within refreshing and principle.
Claims (3)
1. a kind of inversion type elects electric cylinders device, which is characterized in that be mounted on electric cylinders bar including electric cylinders, electric cylinders bar is hollow knot
Structure, interior to be equipped with push rod, push rod is retractable structure；Electric cylinders bar is fixed on the upper cover plate of installed depositing device；Push rod is worn
Upper cover plate is crossed, in the end of push rod installation limit briquetting, limit briquetting is matched with the limit switch on cavity, limited
Certain idle stroke is limited between the cavity bottom surface for the depositing device that bit switch and upper cover plate are installed.
2. inversion type described in accordance with the claim 1 elects electric cylinders device, which is characterized in that electric cylinders bar is regular length.
3. inversion type described in accordance with the claim 1 elects electric cylinders device, which is characterized in that when beginning to speak, cavity supports upper cover plate
Motionless with electric cylinders bar, push rod, which first extends, moves downward idle stroke length to cavity bottom surface, and push rod continues to extend, and is with cavity bottom surface
Support drives electric cylinders bar and upper cover plate to move upwardly together, and cavity is opened；When closing cavity, push rod is shunk, and push rod is with cavity bottom
Face is support, is moved downward with electric cylinders bar and upper cover plate, until cavity is closed；After upper cover plate is contacted with cavity siding, push rod
Retraction upwards, upper cover plate under gravity, are bonded cavity siding completely, and cavity is closed rear push-rod and continues the idle stroke that bounces back
Length, limit briquetting trigger limit switch, and movement terminates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510583323.2A CN106521453B (en) | 2015-09-14 | 2015-09-14 | A kind of inversion type election electric cylinders device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510583323.2A CN106521453B (en) | 2015-09-14 | 2015-09-14 | A kind of inversion type election electric cylinders device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106521453A CN106521453A (en) | 2017-03-22 |
| CN106521453B true CN106521453B (en) | 2018-10-23 |
Family
ID=58348977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510583323.2A Active CN106521453B (en) | 2015-09-14 | 2015-09-14 | A kind of inversion type election electric cylinders device |
Country Status (1)
| Country | Link |
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| CN (1) | CN106521453B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4154538A (en) * | 1975-12-20 | 1979-05-15 | Firma Wilhelm Linnhoff Ohg | Loading and unloading station for the chemical and/or electro-chemical treatment of mass-produced parts contained in a rotatable drum |
| CN102297583A (en) * | 2011-07-26 | 2011-12-28 | 浙江省长兴精工电炉制造有限公司 | Steam oxidation well furnace |
-
2015
- 2015-09-14 CN CN201510583323.2A patent/CN106521453B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4154538A (en) * | 1975-12-20 | 1979-05-15 | Firma Wilhelm Linnhoff Ohg | Loading and unloading station for the chemical and/or electro-chemical treatment of mass-produced parts contained in a rotatable drum |
| CN102297583A (en) * | 2011-07-26 | 2011-12-28 | 浙江省长兴精工电炉制造有限公司 | Steam oxidation well furnace |
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| Publication number | Publication date |
|---|---|
| CN106521453A (en) | 2017-03-22 |
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Address after: No.900 Shuijia, Hunnan District, Shenyang City, Liaoning Province Patentee after: Tuojing Technology Co.,Ltd. Address before: 110179 3rd floor, No.1-1 Xinyuan street, Hunnan New District, Shenyang City, Liaoning Province Patentee before: PIOTECH Co.,Ltd. |