CN106517083B - A kind of micro channel array and preparation method thereof - Google Patents
A kind of micro channel array and preparation method thereof Download PDFInfo
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- CN106517083B CN106517083B CN201610998732.3A CN201610998732A CN106517083B CN 106517083 B CN106517083 B CN 106517083B CN 201610998732 A CN201610998732 A CN 201610998732A CN 106517083 B CN106517083 B CN 106517083B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C3/00—Assembling of devices or systems from individually processed components
- B81C3/008—Aspects related to assembling from individually processed components, not covered by groups B81C3/001 - B81C3/002
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
- B81B1/002—Holes characterised by their shape, in either longitudinal or sectional plane
- B81B1/004—Through-holes, i.e. extending from one face to the other face of the wafer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00214—Processes for the simultaneaous manufacturing of a network or an array of similar microstructural devices
Abstract
The present invention is that preparation method includes on a kind of micro channel array and preparation method thereof：Wire drawing, once row's rod, secondary wire drawing, secondary row's rod, three wire drawings, shaping, according to the minification Z of three wire drawings1Calculate the bore dia of microchannel in micro channel array；According to the minification Z of third time wire drawing2, putting in order for the first multifilament and the second multifilament in the 3rd multifilament rod is calculated, the method for described calculating is that the minification of third time wire drawing is Z2, then in described micro channel array base substrate each regular hexagon opposite side distance Y3Equal to Y2/Z2, described pitch of holes d1For Y3X times, then two neighboring first multifilament in the 3rd described multifilament rod separated by 1 the second multifilament of X, described X is positive number, the natural number that described X 1 subtracts 1 for X integer part and obtained.Preparation method proposed by the present invention, prepares micro-pore diameter and the controllable micro channel array of pitch of holes, is more suitable for industrialized production.
Description
Technical field
The present invention relates to a kind of microchannel, more particularly to a kind of micro channel array and preparation method thereof.
Background technology
With the development of microfabrication and nanometer science and technology, with geomery, operational size it is small be characterized it is micro- logical
Road processing has turned into people and has recognized the world and a kind of new and high technology transformed the objective world in microscopic fields.
Shown in Aero-Space, electronics, instrument, atomic energy, chemical fibre, optical fiber and business automation equipment, image
The industrial circles such as device, medicine equipment, metering, the use using microchannel as the parts of key structure is more and more frequent, microchannel
Size is less and less, required precision more and more higher, or even microchannel reaches micron order, and pass precision reaches 0.1 micron.
As microflow control technique is in the application and development of the multiple fields such as biology, machinery, chemical industry, medicine, pass through microchannel
The technology that array is controlled and handled in microscopic dimensions to micro liquid or sample is by most attention both domestic and external.Utilize
Microchannel can not only prepare good monodispersity, particle diameter and the controllable bio-separation medium of form, sub-micron catalyst particles
Grain and bioenergy conversion immobilization carrier etc..
The processing of micron order microchannel is general using micro EDM, Electrolyzed Processing, Ultrasonic machining, Laser Processing, electricity
Beamlet processing etc..
In theory above-mentioned various methods can processing micron level micro channel array, but there is different application in distinct methods
There is benefit and limitation in field.
The general principle of micro EDM is based on the galvano-cautery between instrument and workpiece during pulse feature spark discharge
Phenomenon loses excess metal, to reach the processing request of size to part, shape.It is characterized in that machinable microchannel is straight
Footpath is small, and precision is high；Its limitation is that process velocity is slow and can only process conductive material.
Electrolyzed Processing is that the principle of electrochemical reaction for being produced anodic solution in the electrolytic solution using metal is entered to metal material
A kind of process of row processing and forming.Be characterized in can processed complex workpiece shapes, suitable for batch machining, crudy
It is good；Its limitation machining accuracy and stability are poor, can only process metal material.
Ultrasonic machining is that the transducer drive machining tool encouraged using supersonic generator makees ultrasonic vibration, impacts workpiece
Abrasive material on surface, abrasive material is squeezed into the surface of fragile material, material surface is produced micro-crack, then to form Crack Extension small
Chip and peel off so that reach remove material purpose.Its feature can process workpiece surface quality after various hard brittle materials, processing
It is good, without residual stress；Its limitation is not easy to process accurate high microchannel.
Laser Processing be the laser by the use of high-energy-density as thermal source, make machined material be processed point produce it is local
TRANSIENT HIGH TEMPERATURE, make melt material or gasification and be removed.It is characterized in that workpiece requirement is low, process velocity is fast；Its limitation adds
The microchannel precision that work goes out is low, easily forms loudspeaker or spindle, and equipment is expensive.
During electron beam process under vacuum, using the electron beam of focus energy very high density, rushed with high speed
Hit on the minimum area of workpiece surface, in very short time, its energy largely changes into heat energy, make the workpiece for being impacted part
Material reaches more than thousands of degrees Celsius of high temperature, so as to cause the local gasification of material, is taken away by vacuum system.Its feature can be with
Any metal and nonmetallic materials are processed, fine curved hole can be processed, but equipment is expensive.
It is micro- logical disclosed in CN01109003.2 (Lu Zuhong, He Nongyue, compound micro path array chip and preparation method)
Channel array chip and preparation method, are to mount to coat required specialization in advance in the micro-through-hole or capillary inner surface arranged
Study point, cause the short passage of two-dimensional directional to arrange by being cut longitudinally to form one piece of thin slice, it is characterised in that some micro-
Small through hole or capillary bonding bunchy, it is larger in manufacture difficulty, while microchannel size is more than 100 microns, it is difficult to make
Micro channel array less than 10 microns.
Microchannel disclosed in (200710093246.8 Jiang Jiahuan, Jia Yuefei et al. construction method of micro point array in microchannel)
Interior microdot array is by the key step such as arranging, pouring by the microfilament array solidification of cloth cross-contact in the polymer, Ran Houtong
Cross the demoulding, except microdot or array in the integrally-formed microchannel of the steps such as silk.It is only capable of making 1 millimeter, 50 millimeters of left sides of spacing
Right micro channel array.
Above-mentioned micro channel array preparation method in dimensional accuracy, or channels uniformity, or be not easily accomplished scale making,
Or small lot cost of manufacture it is high the problems such as limit, there is certain limitation.
Microchannel plate is, using glass flake as base, microchannels up to a million, microchannel plate diameter to be formed on glass flake
Typically at a few micrometers to tens microns, pitch of holes is more bigger than micro-pore diameter.
There is certain advantage, but pitch of holes and microchannel diameter in aperture size precision etc. in above-mentioned method for manufacturing micro-channel plate
It is related, it is impossible to carry out micro channel array design.
The content of the invention
It is a primary object of the present invention to there is provided a kind of micro channel array and preparation method thereof, technology to be solved is asked
Topic is according to the pitch of holes and microchannel for being actually needed control micro channel array, thus more suitable for practicality.
The object of the invention to solve the technical problems is realized using following technical scheme.
According to a kind of preparation method of micro channel array proposed by the present invention, including, prepare glass bar：By the first material system
Into the first glass bar, the second glass bar and glass tube is made in the second material, the first described material is acid-soluble materials, described
The second material be acid resistant material；Diameter big 0.1-0.5mm of the internal diameter of described glass tube than the first described glass bar；
Wire drawing：The first described glass bar is added in described glass tube, wire drawing obtains the first monofilament, by the second described glass
Glass rod wire drawing, obtains the second monofilament, and the first described monofilament is identical with the diameter of the second monofilament, is Y1；Once arrange rod：Will be above-mentioned
Monofilament lines up regular hexagon, obtains the first multifilament rod and the second multifilament rod, the first described multifilament rod and the side of the second multifilament rod are by M
Root monofilament is constituted, and opposite side distance is (1.732 × (M-1)+1) * Y1, by 3M2- 3M+1 roots monofilament is constituted；The first described multifilament rod
Center be first monofilament, other are the second monofilament；The second described multifilament rod is constituted by the second monofilament；It is secondary to draw
Silk：By the first described multifilament rod and the second multifilament rod wire drawing, the first multifilament and the second multifilament are respectively obtained, described first is multiple
Silk and the second multifilament are that opposite side distance is Y2Regular hexagon；Secondary row's rod：The first described multifilament and the second multifilament are arranged
In the mould of regular hexagon, the 3rd multifilament rod is obtained；Three wire drawings：By the 3rd described multifilament rod wire drawing, microchannel is made
Array base substrate；Described micro channel array base substrate is cut, polishing, acid are molten, and required micro channel array is made.
It is preferred that, according to a kind of preparation method of foregoing micro channel array, wherein described pitch of holes is d1It is micro- logical
The preparation method of channel array is：According to the minification Z of third time wire drawing2, calculate the first multifilament and second in the 3rd multifilament rod
Multifilament puts in order, and the method for described calculating is that the minification of third time wire drawing is Z2, then described micro channel array
The opposite side distance Y of each regular hexagon in base substrate3Equal to Y2/Z2, described pitch of holes d1For Y3X times, then the 3rd described multifilament
Two neighboring first multifilament in rod is separated by X-1 the second multifilament, and described X is positive number, including integer part and fractional part
Point, the natural number that described X-1 subtracts 1 for X integer part and obtained.
It is preferred that, the preparation method of foregoing a kind of micro channel array, wherein the first described material and described second
The thermodynamic property of material matches.
The concrete meaning of the present invention that matches is：Because the present invention is simultaneously by acid resistant material and acid-soluble material
Material carries out wire drawing, and its two viscosity in drawing process approximately, should so be conducive to the stabilization of fibre diameter；Acid-soluble material
The linear expansion coefficient more slightly higher than acid resistant material 2~5 × 10 of material-71/ DEG C, the intensity and toughness of glass fibre is conducive to carry
Height, beneficial to the progress of drawing process.The softening point of acid-soluble glass material is higher than acid resistant material (about 30~100 DEG C), favorably
In the filling of micro channel array roundness and drawing process void.
It is preferred that, a kind of preparation method of foregoing micro channel array, the diameter of the first described glass bar of regulation and institute
The ratio for the glass tube pipe thickness stated, to cause described X close to positive integer.
When X of the present invention is positive integer, it can just meet design requirement, the present invention is by adjusting the straight of the first glass bar
Footpath and the ratio of described glass tube pipe thickness, to cause described X close to positive integer.
It is preferred that, the preparation method of foregoing a kind of micro channel array, wherein a diameter of 20- of the second described glass bar
30mm。
It is preferred that, the preparation method of foregoing a kind of micro channel array, wherein the first described multifilament rod or the second multifilament
A diameter of 20-50mm of rod.
It is preferred that, the preparation method of foregoing a kind of micro channel array, wherein a diameter of 20- of the 3rd described multifilament rod
70mm。
The object of the invention to solve the technical problems is also realized using following technical scheme.
According to a kind of micro channel array proposed by the present invention, it is prepared from by the above method.
By above-mentioned technical proposal, a kind of micro channel array of the invention and preparation method thereof at least has following advantages：
1st, the invention provides a kind of preparation method of the adjustable micro channel array of pitch of holes.
According to the preparation method of micro channel array proposed by the present invention, while prepare micropore and pitch of holes, using wire drawing and
Arrangement, controls the opposite side distance of multifilament rod, while by different arrangement regulations, controlling the distance of adjacent two micropore.Therefore, this hair
It is bright can be as needed, prepare the micro channel array of different pitchs of holes, also, the preparation side of micro channel array of the present invention
Method, suitable for industrial-scale production, is more worth with actual production.
Described above is only the general introduction of technical solution of the present invention, in order to better understand the technological means of the present invention,
And can be practiced according to the content of specification, below with presently preferred embodiments of the present invention and coordinate accompanying drawing describe in detail as after.
Brief description of the drawings
Fig. 1 is 1 two row's rod schematic diagrames of embodiment.
Fig. 2 is 2 two row's rod schematic diagrames of embodiment.
Fig. 3 is 3 two row's rod schematic diagrames of embodiment.
Embodiment
Further to illustrate the present invention to reach the technological means and effect that predetermined goal of the invention is taken, below in conjunction with
Accompanying drawing and preferred embodiment, to according to a kind of micro channel array proposed by the present invention and preparation method thereof its embodiment,
Structure, feature and its effect, are described in detail as after.In the following description, different " embodiment " or " embodiment " refers to not
It must be same embodiment.In addition, the special characteristic, structure or feature in one or more embodiments can be by any suitable form groups
Close.
Embodiment 1
The present embodiment proposes diameter 5mm, thickness 1mm, 500 μm of (d of pitch of holes1), 5 μm of micropore numbers of bore dia for 19 it is micro-
The preparation method of channel array, manufacturing step is specific as follows：
1st, using two kinds of glass materials, one of which acid resistance is fabricated to wall thickness 3.1mm, internal diameter 27.7mm glass tube；
Diameter 30mm glass bars are made using identical material.Second glass material is with good sour molten speed glass bar, outside rod
Footpath 27.3mm.
2nd, a wire drawing：Two kinds of monofilament are drawn respectively, and wherein the first monofilament (monofilament A) use there will be good sour molten speed
Rate glass bar is put into glass tube, then this assembly clamping is drawn on wire drawing machine, is drawn into diameter Y1=0.6mm list
Silk (monofilament A)；Second of monofilament (monofilament B), diameter draws acid resistance glass bar clamping on wire drawing machine, is drawn into 0.6mm
Monofilament B.
3rd, rod is once arranged：With every side M1=24 are arranged in monofilament in the mould of orthohexagonal cross section, except bosom
Monofilament is used beyond monofilament A (diameter 0.6mm), and remaining whole is discharged into monofilament B.Then it is tied up with certain spacing with cotton thread
Get up, two ends are tied up with the copper cash of not easy burn-out, be arranged in multifilament rod C of orthohexagonal；Separately with 24 monofilament B
(0.6mm) is arranged in a multifilament rod D.
4th, secondary wire drawing：Drawn in high-precision wire drawing machine, orthohexagonal multifilament rod a C and D are drawn into Y respectively2=
Y in 0.95mm multifilament an E and F, this technique2=Z2×d1/X。
5th, secondary row's rod：With every side M2=15 are carried out a multifilament by Fig. 1 to be arranged in the mould of orthohexagonal cross section
In tool, then it is stopped up with certain spacing with cotton thread, two ends are tied up with the copper cash of not easy burn-out, be arranged in positive six
1.732 × (m-1/3) × Y in a square multifilament rod, this technique2=d2×Z2。
6th, wire-drawing shape：Drawn on high-precision wire drawing machine, secondary rod is drawn into d2(diameter group is 5mm to=6.35mm
The bigger positive six side contrast of inscribed circle size) base substrate, then round as a ball to cut into a diameter of 5mm, thickness is 1mm semi-finished product, polishing
Handled afterwards in dilute nitric acid solution, obtain diameter 5mm, thickness 1mm, 500 μm of pitch of holes, 5 μm of micro channel arrays of bore dia.
Embodiment 2
The present embodiment proposes diameter 5mm, thickness 1mm, 750 μm of pitch of holes, 5 μm of micro channel arrays of bore dia, micropore number
For the preparation method in 37 holes, compared with Example 1, the preparation method of the present embodiment is arranged except that will arrange secondary rod by Fig. 2
Outside the difference of embodiment 1, other step operation modes are identical.
Embodiment 3
The present embodiment proposes diameter 5mm, thickness 1mm, 400 μm of pitch of holes, 3.4 μm of micro channel arrays of bore dia, micropore
Number is the preparation method in 7 holes, and compared with Example 1, the monofilament radical of rod of row is changed to 28 by 24；Arrange the root of secondary rod
Number is changed to 19 by 15, and is arranged according to Fig. 3；Secondary rod is drawn into outside 6.45mm base substrate difference, other steps
Rapid mode of operation is identical.
The above described is only a preferred embodiment of the present invention, any formal limitation not is made to the present invention, according to
Any simple modification, equivalent variations and the modification made according to the technical spirit of the present invention to above example, still fall within this hair
In the range of bright technical scheme.
Claims (9)
1. a kind of preparation method of micro channel array, it is characterised in that：Including,
Prepare glass bar：The first glass bar is made in first material, the second glass bar and glass tube is made in the second material, it is described
The first material be acid-soluble materials, described the second material is acid resistant material；The internal diameter of described glass tube is than described
The big 0.1-0.5mm of diameter of first glass bar；
Wire drawing：Described the first glass bar is added in described glass tube, wire drawing obtains the first monofilament, by described the
Two glass bar wire drawings, obtain the second monofilament, and the first described monofilament is identical with the diameter of the second monofilament, is Y1；
Once arrange rod：Above-mentioned monofilament is lined up into regular hexagon, the first multifilament rod and the second multifilament rod, the first described multifilament rod is obtained
It is made up of with the side of the second multifilament rod M root monofilament, opposite side distance is (1.732 × (M-1)+1) * Y1, by 3M2- 3M+1 root monofilament groups
Into；The center of the first described multifilament rod is first monofilament, and other are the second monofilament；The second described multifilament rod is by
Two monofilament are constituted；
Secondary wire drawing：By the first described multifilament rod and the second multifilament rod wire drawing, the first multifilament and the second multifilament, institute are respectively obtained
The first multifilament and the second multifilament stated are that opposite side distance is Y2Regular hexagon；
Secondary row's rod：Described the first multifilament and the second multifilament are arranged in the mould of regular hexagon, the 3rd multifilament rod is obtained；
Three wire drawings：By the 3rd described multifilament rod wire drawing, micro channel array base substrate is made；
Described micro channel array base substrate is cut, polishing, acid are molten, and required micro channel array is made.
2. a kind of preparation method of micro channel array according to claim 1, it is characterised in that
Pitch of holes is d1The preparation method of micro channel array be：
According to the minification Z of third time wire drawing2, calculate putting in order for the first multifilament and the second multifilament in the 3rd multifilament rod, institute
The method for the calculating stated is that the minification of third time wire drawing is Z2, then each positive six side in described micro channel array base substrate
The opposite side distance Y of shape3Equal to Y2/Z2, described pitch of holes d1For Y3X times, then two neighboring in the 3rd described multifilament rod
One multifilament is separated by X-1 the second multifilament, and described X is positive number, including integer part and fractional part, and described X-1 is X's
The natural number that integer part subtracts 1 and obtained.
3. a kind of preparation method of micro channel array according to claim 1, it is characterised in that：
The thermodynamic property of the first described material and the second described material matches.
4. a kind of preparation method of micro channel array according to claim 2, it is characterised in that：
The diameter and the ratio of described glass tube pipe thickness of the first described glass bar of regulation, to cause described X to approach
Positive integer.
5. a kind of preparation method of micro channel array according to claim 1, it is characterised in that：
A diameter of 20-30mm of the second described glass bar.
6. a kind of preparation method of micro channel array according to claim 1, it is characterised in that：
The diameter of the first described glass bar and the ratio of described glass tube pipe thickness are 8-10：1.
7. a kind of preparation method of micro channel array according to claim 1, it is characterised in that：
The first described multifilament rod or a diameter of 20-50mm of the second multifilament rod.
8. a kind of preparation method of micro channel array according to claim 1, it is characterised in that：
A diameter of 20-70mm of the 3rd described multifilament rod.
9. a kind of micro channel array, it is characterised in that：
Described micro channel array is prepared from by any one of claim 1-8.
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| CN108453567B (en) * | 2018-04-18 | 2019-12-27 | 中国建筑材料科学研究总院有限公司 | Centering machining method for hexagonal microchannel plate |
| CN108821565A (en) * | 2018-05-24 | 2018-11-16 | 中国科学院西安光学精密机械研究所 | The preparation method of microchannel plate substrate for microarray |
| CN109437092B (en) * | 2018-10-23 | 2020-10-23 | 中国工程物理研究院激光聚变研究中心 | Composite material with coding array structure and preparation method thereof |
| CN110967729A (en) * | 2019-12-13 | 2020-04-07 | 山西长城微光器材股份有限公司 | Method for manufacturing micro-channel plate hollow array substrate by adopting hollow filament hot melting method |
| CN114591001B (en) * | 2022-03-15 | 2023-09-26 | 中国建筑材料科学研究总院有限公司 | Microporous glass plate and preparation method and application thereof |
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| US5510194A (en) * | 1989-07-05 | 1996-04-23 | Alabama Cryogenic Engineering, Inc. | Perforated plate filter media and related products |
| RU2233445C1 (en) * | 2003-04-30 | 2004-07-27 | Общество с ограниченной ответственностью "Институт рентгеновской оптики" | Polycapillary chromatographic column and method of manufacture of such column |
| CN1758405B (en) * | 2005-09-20 | 2010-09-29 | 北方夜视技术股份有限公司 | Method for manufacturing micro-channel plate with solid edge |
| US20100104869A1 (en) * | 2007-02-28 | 2010-04-29 | Corning Incorporated | Photonic Crystal Fibers and Methods for Manufacturing the Same |
| US8135253B2 (en) * | 2009-01-22 | 2012-03-13 | Exelis, Inc. | Microchannel plate (MCP) having an asymmetric packing pattern for higher open area ratio (OAR) |
| CN201413810Y (en) * | 2009-06-15 | 2010-02-24 | 杭州千盟光电科技有限公司 | Micro-channel plate with miniature channels |
| CN103524031A (en) * | 2013-09-13 | 2014-01-22 | 中国建筑材料科学研究总院 | Preparation method of glass micropipette array |
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