CN106513375A - Cleaning apparatus, method of cleaning workpiece to be cleaned, and cleaning liquid and method of cleaning IC substrate transfer roller - Google Patents
Cleaning apparatus, method of cleaning workpiece to be cleaned, and cleaning liquid and method of cleaning IC substrate transfer roller Download PDFInfo
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- CN106513375A CN106513375A CN201510681637.6A CN201510681637A CN106513375A CN 106513375 A CN106513375 A CN 106513375A CN 201510681637 A CN201510681637 A CN 201510681637A CN 106513375 A CN106513375 A CN 106513375A
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- cell body
- cleaning
- groove
- cleaned
- workpiece
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- 238000004140 cleaning Methods 0.000 title claims abstract description 137
- 239000000758 substrate Substances 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 title claims abstract description 20
- 239000007788 liquid Substances 0.000 title abstract description 5
- 239000007921 spray Substances 0.000 claims abstract description 15
- 210000005056 cell body Anatomy 0.000 claims description 133
- 230000009514 concussion Effects 0.000 claims description 64
- 239000012530 fluid Substances 0.000 claims description 47
- 230000002378 acidificating effect Effects 0.000 claims description 30
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 28
- 239000000463 material Substances 0.000 claims description 16
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 14
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 14
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 12
- 238000002386 leaching Methods 0.000 claims description 9
- 238000001816 cooling Methods 0.000 claims description 8
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims description 6
- 229960002163 hydrogen peroxide Drugs 0.000 claims description 6
- 229910017604 nitric acid Inorganic materials 0.000 claims description 6
- 238000002604 ultrasonography Methods 0.000 claims description 5
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 claims description 4
- 239000002253 acid Substances 0.000 claims description 4
- 239000004033 plastic Substances 0.000 claims description 4
- 229920003023 plastic Polymers 0.000 claims description 4
- 239000001117 sulphuric acid Substances 0.000 claims description 4
- 235000011149 sulphuric acid Nutrition 0.000 claims description 4
- 239000003513 alkali Substances 0.000 claims description 3
- 238000005260 corrosion Methods 0.000 claims description 3
- 230000007797 corrosion Effects 0.000 claims description 3
- 230000001458 anti-acid effect Effects 0.000 claims description 2
- 229910000831 Steel Inorganic materials 0.000 claims 2
- 239000010959 steel Substances 0.000 claims 2
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 12
- 239000004743 Polypropylene Substances 0.000 description 9
- 229910001220 stainless steel Inorganic materials 0.000 description 8
- 239000010935 stainless steel Substances 0.000 description 8
- 238000005406 washing Methods 0.000 description 8
- 229920001155 polypropylene Polymers 0.000 description 6
- -1 Polypropylene Polymers 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000003344 environmental pollutant Substances 0.000 description 5
- 231100000719 pollutant Toxicity 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 3
- 230000006378 damage Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000011086 high cleaning Methods 0.000 description 2
- 229920000344 molecularly imprinted polymer Polymers 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 238000012864 cross contamination Methods 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002516 radical scavenger Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/02—Inorganic compounds
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/02—Inorganic compounds
- C11D7/04—Water-soluble compounds
- C11D7/08—Acids
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention relates to a cleaning device, a method for cleaning a workpiece to be cleaned, and a cleaning liquid and a method for cleaning an IC substrate conveying roller. The cleaning device comprises a first tank, a second tank, a third tank and a fourth tank, wherein the first tank comprises a first tank body and at least one first ultrasonic oscillator, the second tank comprises a second tank body and at least one high-pressure spray cleaning device, the third tank comprises a third tank body and at least one third ultrasonic oscillator, and the fourth tank comprises a fourth tank body and at least one fourth ultrasonic oscillator.
Description
Technical field
The present invention is with regard to a kind of cleaning device, cleans the method for workpiece to be cleaned and clean IC substrate delivery rollers
Cleanout fluid and method.Particularly a kind of cleaning device with high cleaning efficiency and high cleaning quality, cleaning workpiece to be cleaned
Method and cleaning IC substrate delivery rollers cleanout fluid and method.
Background technology
With reference to Fig. 1, show the schematic perspective view for transmitting the roller delivery unit of the roller assembly of substrate.In substrate (example
Such as：IC substrates) manufacture process in, generally using roller assembly to transmit substrate, roller assembly includes multiple arrangements
Roller delivery unit 9, as shown in figure 1, each roller delivery unit 9 is by multiple rollers 91 and wears by described many
The roller shaft 92 of individual roller 91 is constituted.And during using roller assembly transmission substrate, some on substrate are high
Molecularly Imprinted Polymer and dyestuff are (for example：Also uncured welding resisting layer (Soler Mask) or dry film (Dry Film)) can often be attached on rolling
On the surface of wheel 91, the pollution of roller assembly is caused.
Conventional cleaning roller assembly method is to disassemble each roller delivery unit 9 from roller assembly, then with artificial
The pollutant being attached on the roller 91 of roller delivery unit 9 are removed by the mode of cleaning one by one；However, utilizing
Mode Jing of manual cleaning often cannot effectively dispose the pollutant being attached on 91 surface of roller, if roller unit 9
Still sticking on the surface of its roller 91 after cleaning has remaining pollutant, is so carrying out next transmission substrate
Action when, remaining pollutant may pass through contact of the roller 91 with substrate, and cross-contamination is passed to next
The substrate for sending, so can then cause the substrate for being transmitted to produce scratch or cause short circuit.Additionally, using the side of manual cleaning
Formula Chang Rongyi causes the damage on 91 surface of roller (because the material of roller 91 is usual because of artificial improper cleaning or wiping
For plastics, for example：Polypropylene (Polypropylene, PP)), can so cause the surface of roller 91 easily contaminated
Thing sticks, or causes roller delivery unit 9 damage of itself.
The content of the invention
An aspect of of the present present invention is with regard to a kind of cleaning device.In embodiment, the cleaning device comprising the first groove, the
Two grooves, the 3rd groove and the 4th groove, wherein described first groove include the first cell body and at least one first ultrasonic wave concussion devices,
Second groove includes the second cell body and at least one high-pressure spray wash equipment, and the 3rd groove includes the 3rd cell body and at least one
Individual 3rd ultrasonic wave concussion device, the 4th groove include the 4th cell body and at least one the 4th ultrasonic wave concussion devices.
This exposure another aspect of the present invention is the method with regard to a kind of cleaning workpiece to be cleaned.The cleaning method is included：
A) at least one workpiece leaching to be cleaned is placed in an alkaline cleaning fluid, and ultrasonic wave concussion is provided to the alkaline cleaning fluid；
B) water is rinsed into the workpiece to be cleaned in high-pressure jet mode；C) the workpiece leaching to be cleaned is placed in into an acidic cleaning solution
In, and ultrasonic wave concussion is provided to the acidic cleaning solution；And d) be placed in water the workpiece leaching to be cleaned, and to institute
State water and ultrasonic wave concussion is provided.
Another aspect of the present invention is with regard to a kind of cleanout fluid for cleaning IC substrate delivery rollers.The cleanout fluid bag
Contain：About 52.5wt% is to about 60wt% sulphuric acid and/or nitric acid；And about 6wt% to about 8.75wt% hydrogen peroxide.
Description of the drawings
Fig. 1 shows the schematic perspective view for transmitting the roller delivery unit of the roller assembly of substrate.
Fig. 2 shows the schematic diagram of an embodiment of the cleaning device of the present invention.
Fig. 3 shows the schematic perspective view of an embodiment of the pylon of the hanging equipment of the cleaning device of the present invention.
Fig. 4 shows the schematic diagram of the first groove of the cleaning device of the present invention.
Fig. 5 shows the schematic diagram of the second groove of the cleaning device of the present invention.
Fig. 6 shows the schematic diagram of the 3rd groove of the cleaning device of the present invention.
Fig. 7 shows the schematic diagram of the 4th groove of the cleaning device of the present invention.
Fig. 8 shows the schematic diagram of the 5th groove of the cleaning device of the present invention.
Specific embodiment
With reference to Fig. 2, show the schematic diagram of the embodiment of the cleaning device 100 of the present invention.Cleaning device 100 has first
Groove 1, the second groove 2, the 3rd groove 3, the 4th groove 4, the 5th groove 5 and hanging equipment 7.In the present embodiment, cleaning dress
It is the delivery roller 91 (Fig. 1) for cleaning IC substrate rollers delivery unit 9 to put 100；It is understood, however, that
Cleaning device 100 can also be to clean the workpiece to be cleaned of other species.
First groove 1 has at least one first cell bodies 11 and at least one first ultrasonic wave concussion devices 113, in this enforcement
In example, the first groove 1 has in three the first cell bodies 11, and each first cell body 11 and has three the first ultrasonic wave concussion
Device 113.In other embodiments, the first groove 1 can also have the first more than one, two or three cell body 11,
And can have one or two the first ultrasonic wave concussion device 113 in each first cell body 11.
Second groove 2 has at least one second cell bodies 21 and at least one high-pressure spray wash equipment 213, in the present embodiment,
Second groove 2 has in second cell body 21, and the second cell body 21 and has multiple high-pressure spray wash equipment 213.At other
In embodiment, the second groove 2 can also have in more than one second cell body 21, and each second cell body 21 and can have
There is not limited number high-pressure spray wash equipment 213.
3rd groove 3 has at least one the 3rd cell bodies 31 and at least one the 3rd ultrasonic wave concussion devices 313, in this enforcement
In example, the 3rd groove 3 has in three the 3rd cell bodies 31, and each the 3rd cell body 31 and has three the 3rd ultrasonic wave concussion
Device 313.In other embodiments, the 3rd groove 3 can also have the 3rd more than one, two or three cell body 31,
And can have one or two the 3rd ultrasonic wave concussion device 313 in each the 3rd cell body 31.
4th groove 4 has at least one the 4th cell bodies 41 and at least one the 4th ultrasonic wave concussion devices 413, in this enforcement
In example, the 4th groove 41 has in the 4th cell body 41, and the 4th cell body 41 and has three the 4th ultrasonic wave concussion devices
413.In other embodiments, the 4th groove 4 can also have more than one 4th cell body 41, and each the 4th cell body
There can be one or two the 4th ultrasonic wave concussion device 413 in 41.
5th groove 5 is to cut equipment 515 with least one the 5th cell bodies 51 and at least one wind.In the present embodiment,
5th groove 5 has in the 5th cell body 51, and the 5th cell body 51 cuts equipment 515 with multiple wind.In other enforcements
In example, the 5th groove 5 can also have in more than one 5th cell body 51, and each the 5th cell body 51 and can have not
Limited number wind cuts equipment 515.
The hanging equipment 7 be can across the first cell body 11, the second cell body 21, state the 3rd cell body 31, the 4th cell body 41 and
5th cell body 51.At least one workpiece to be cleaned hung up positioned at pylon 71 capable of hoisting of hanging equipment 7, and by scavenger
Part sequentially moves the first cell body 11, the second cell body 21, the 3rd cell body 31, the 4th cell body 41 and the 5th cell body 51.
In the present embodiment, workpiece to be cleaned is for roller delivery unit 9.
With reference to Fig. 3, the schematic perspective view of the pylon 71 of the hanging equipment 7 in displaying Fig. 2.Pylon 71 be for
Multiple roller delivery units 9 are disposed, so that hanging equipment 7 is capable of hoisting to hang up multiple roller delivery units 9, and will be many
Individual roller delivery unit 9 moves the first cell body 11, the second cell body 21, the 3rd cell body 31, the 4th cell body 41 and the 5th
Cell body 51.Pylon 71 has the retaining piece at horizontal body 75 and two two ends for installing neighbouring horizontal body 75 respectively
73.One end of each retaining piece 73 is to be fixed in horizontal body 75, and two retaining pieces 73 are parallel to each other.Two solid
Gripping member 73 has multiple corresponding fixing grooves 731 each other respectively, thus, the roller shaft of roller delivery unit 9
92 two ends can be slipped in the fixing groove 731, so that roller delivery unit 9 is held by the retaining piece 73.
According to configuration as shown in Figure 3, a pylon 71 can hang multiple roller delivery units 9 simultaneously, in the present embodiment
In, pylon 71 suspended, 12 roller delivery units 9.
With reference to Fig. 4, the schematic diagram of the first groove 1 in displaying Fig. 2.First cell body 11 is the groove substantially with upper shed
Body, which is for accommodating alkaline cleaning fluid 81.Because the first cell body 11 is required to accommodating alkaline cleaning fluid 81, the first cell body
11 is using made by alkali resistant corrosion material, as made by available stainless steel material, especially preferably using SUS316-3t
Stainless steel more than grade.There are at least one first ultrasonic wave concussion devices 113 in first cell body 11, and by Fig. 4
Shown embodiment, the first cell body be arranged at its side wall with two the first ultrasonic wave concussion devices 113 and one it is first ultrasonic
Ripple oscillator 113 is located at its bottom.First ultrasonic wave concussion device 113 is contained in the first cell body 11 for providing
81 ultrasonic wave concussion of alkaline cleaning fluid.In the present embodiment, the first groove 1 has more the first bogey 12, is adjacent to
First cell body 11, to carry pylon 71.In the present embodiment, the first bogey 12 is positioned at the first cell body 11
Upper shed near；In other embodiments, the first bogey 12 can also be located elsewhere.
Multiple roller delivery units 9 to be cleaned pylon 71 is put when the pylon 71 of hanging equipment 7 (Fig. 2) is sling
It is put on the first bogey 12, so that multiple roller delivery units 9 to be cleaned are soaked in alkaline cleaning fluid 81,
The first ultrasonic wave concussion device 113 in first cell body 11 can provide alkaline cleaning fluid 81 ultrasonic wave concussion, now, alkalescence
Cleanout fluid 81 can remove the high molecular polymer remained on the roller 91 of roller delivery unit 9.In the present embodiment,
The power bracket of the ultrasonic wave concussion provided by the first ultrasonic wave concussion device 113 is between 2000W to 3800W.
Additionally, the first groove 1 can have more heat exchanger (not shown), for lifting the alkalescence being contained in the first cell body 11
The temperature of cleanout fluid 81, so can strengthen alkaline cleaning fluid 81 with the roller 91 for remaining in roller delivery unit 9 on height
Active function between Molecularly Imprinted Polymer, removes the high molecular polymer on roller 91 further to lift alkaline cleaning fluid 81
Cleaning efficiency.In the present embodiment, the cleaning temperature scope of alkaline cleaning fluid 81 be about 50 DEG C to about 60 DEG C it
Between.Additionally, cause alkaline cleaning fluid 81 unstable for avoiding alkaline cleaning fluid 81 from producing too high temperature, the first groove
1 further has cooling system (not shown), and the effect that cooling system can be in good time was so that alkaline cleaning fluid 81 will not be produced
High temperature, or preferred cleaning temperature can be maintained.
With reference to Fig. 5, the schematic diagram of the second groove 2 in displaying Fig. 2.Second cell body 21 is the groove substantially with upper shed
Body, has at least one high-pressure spray wash equipment 213 in which, as shown in figure 5, installing on two medial walls of the second cell body 21
There are multiple high-pressure spray wash equipment 213.Second cell body 21 mainly accommodates the water sprayed by high-pressure spray wash equipment 213, therefore its
Can be using made by plastic material, for example, using made by polypropylene (Polypropylene, PP) material；Additionally, the
Two cell bodies 21 not only accommodate the water sprayed by high-pressure spray wash equipment 213, also comprising being rinsed by roller delivery unit 9
The a small amount of residual alkalinity cleanout fluid for getting off, therefore the second cell body 21 can be made using stainless steel material, can for example use
Stainless steel more than SUS316-3t grades.In the present embodiment, the second groove 2 has more the second bogey 22,
The second cell body 21 is adjacent to, to carry pylon 71.In the present embodiment, the second bogey 22 is positioned at second
Near the upper shed of cell body 21；In other embodiments, the second bogey 22 can also be located elsewhere.
When hanging equipment 7 (Fig. 2) pylon 71 by the roller delivery unit 9 cleaned by the first groove 1 from the first cell body
11 move on to (now pylon 71 is to be placed in the second bogey 22), the height in the second cell body 21 in the second cell body 21
Pressure spraying equipment 213 can provide high-pressure washing to rinse alkaline cleaning fluid remaining on roller delivery unit 9.In this reality
Apply in example, the pressure substantially 1kg/cm of the hydro-peening washing provided by high-pressure spray wash equipment 2132, and high-pressure spray wash equipment
213 can move up and down along the short transverse of the second cell body 21, so with offer more fully high-pressure washing.In other enforcements
In example, high pressure equipment 213 is not only may be disposed on the medial wall of the second cell body 21, can also be optionally disposed on the second groove
Bottom or top inside the other positions of the inside of body 21, such as the second cell body 21.
With reference to Fig. 6, the schematic diagram of the 3rd groove 3 in displaying Fig. 2.3rd cell body 31 is the groove substantially with upper shed
Body, which is for accommodating an acidic cleaning solution 82.Because the 3rd cell body 31 is required to accommodating acidic cleaning solution 82, the 3rd groove
Body 31 is using made by antiacid corrosion material, as made by available stainless steel material, especially preferably using SUS316-3t
Stainless steel more than grade.There are at least one the 3rd ultrasonic wave concussion devices 313 in 3rd cell body 31, and by Fig. 6
Shown embodiment, is arranged at its side wall and the with two the 3rd ultrasonic wave concussion devices 313 in the 3rd cell body 31
Three ultrasonic wave concussion devices 313 are located at its bottom.3rd ultrasonic wave concussion device 313 is to be contained in the 3rd cell body 31 for providing
In 82 ultrasonic wave concussion of acidic cleaning solution.In the present embodiment, the 3rd groove 3 has more the 3rd bogey 32, adjacent
Located at the 3rd cell body 31, to carry pylon 71.In the present embodiment, the 3rd bogey 32 is positioned at the 3rd groove
Near the upper shed of body 31；In other embodiments, the 3rd bogey 32 can also be located elsewhere.
When hanging equipment 7 (Fig. 2) pylon 71 by by the roller delivery unit 9 of 2 high-pressure washing of the second groove from second
Cell body 21 moves on to (now pylon 71 is to be placed in the 3rd bogey 32) in the 3rd cell body 31, so that multiple rollers
Delivery unit 9 is soaked in acidic cleaning solution 82, and the 3rd ultrasonic wave concussion device 313 in the 3rd cell body 31 can provide acid
Property 82 ultrasonic wave concussion of cleanout fluid, now, acidic cleaning solution 82 can remove and remain in the roller 91 of roller delivery unit 9
On stain.In the present embodiment, the power bracket of the ultrasonic wave concussion for being provided by the 3rd ultrasonic wave concussion device 313
It is between 2000W to 3800W.The power and first of the ultrasonic wave concussion provided by the 3rd ultrasonic wave concussion device 313
The power of the ultrasonic wave concussion provided by ultrasonic wave concussion device 113 may be the same or different.
Additionally, the 3rd groove 3 can have more heat exchanger (not shown), for lifting the acidity being contained in the 3rd cell body 31
The temperature of cleanout fluid 82, so can strengthen acidic cleaning solution 82 with the roller 91 for remaining in roller delivery unit 9 on
Active function between stain, further to lift the cleaning effect that acidic cleaning solution 82 removes the stain on roller 91
Rate.In the present embodiment, the cleaning temperature scope of acidic cleaning solution 82 is to be between about 50 DEG C to about 60 DEG C.Additionally,
Cause acidic cleaning solution 82 unstable for avoiding acidic cleaning solution 82 from producing too high temperature, the 3rd groove 3 further has
Have cooling system (not shown), the effect that cooling system can be in good time so that acidic cleaning solution 82 will not produce too high temperature,
Or preferred cleaning temperature can be maintained.
With reference to Fig. 7, the schematic diagram of the 4th groove 4 in displaying Fig. 2.4th cell body 41 is the groove substantially with upper shed
Body, which is for accommodating water 83.Because of 41 main receiving water 83 of the 4th cell body, therefore which can be used made by plastic material,
For example, using made by polypropylene (Polypropylene, PP) material；Additionally, because the 4th cell body 41 not only accommodates water
83, also comprising by the rinsed a small amount of remaining acid cleanout fluid for getting off of roller delivery unit 9, therefore stainless steel can be used
Material makes the second cell body 41, particularly preferably can be using stainless steel more than SUS316-3t grades.4th cell body 41
Inside there are at least one the 4th ultrasonic wave concussion devices 413, and embodiment as shown in Figure 7, the 4th cell body 41 has two
4th ultrasonic wave concussion device 413 is arranged at its side wall and a 4th ultrasonic wave concussion device 413 located at its bottom.Four surpasses
Sound wave vibrator 413 is for providing 83 ultrasonic wave concussion of water being contained in the 4th cell body 41.In the present embodiment,
4th groove 4 has more the 4th bogey 42, is adjacent to the 4th cell body 41, to carry pylon 71.In this enforcement
In example, the 4th bogey 42 is near the upper shed of the 4th cell body 41；In other embodiments, the 4th carry
Device 42 can also be located elsewhere.
When hanging equipment 7 (Fig. 2) pylon 71 by the roller delivery unit 9 cleaned by the 3rd groove 3 from the 3rd cell body
31 move on to (now pylon 71 is to be placed in the 4th bogey 42) in the 4th cell body 41, so that the transmission of multiple rollers is single
Unit 9 is soaked in water 83, and the 4th ultrasonic wave concussion device 413 in the 4th cell body 41 can provide water 83 ultrasonic wave concussion,
Now, water 83 can remove the acidic cleaning solution remained on the roller 91 of roller delivery unit 9.In the present embodiment,
The power bracket of the ultrasonic wave concussion provided by the 4th ultrasonic wave concussion device 413 is between 2000W to 3800W.
The power of the ultrasonic wave concussion provided by the 4th ultrasonic wave concussion device 413 is ultrasonic with the first ultrasonic wave concussion device 113 or the 3rd
The power of the ultrasonic wave concussion provided by ripple oscillator 313 may be the same or different.
With reference to Fig. 8, the schematic diagram of the 5th groove 5 in displaying Fig. 2.Generally, the roller delivery unit 9 to be cleaned is passed through
The continuous wash process of 1 to the 4th groove 4 of above-mentioned first groove is cleaned and is completed；However, cleaning device 100 also can be further
With the 5th groove 5, the 5th groove 5 is that for wind grooving, which there is the 5th cell body 51, multiple wind to cut equipment 515 and the 5th hold
Carry and put 52.5th cell body 51 substantially has the cell body of upper shed, and its material is not limited.As shown in figure 8, the 5th
Multiple wind are equiped with two medial walls of cell body 51 and cut equipment 515.When the pylon 71 of hanging equipment 7 (Fig. 2) will pass through
The roller delivery unit 9 of the cleaning of the 4th groove 4 moves on in the 5th cell body 51 from the 4th cell body 41 that (now pylon 71 is to put
It is put in the 5th bogey 52), it is can to provide wind air-flow to pass to air-dry roller that the wind in the 5th cell body 51 cuts equipment 515
Send water remaining on unit 9.
Referring again to Fig. 2, the embodiment of the cleaning method of the cleaning workpiece to be cleaned of the explanation present invention is the following is.In this enforcement
In example, workpiece to be cleaned is for roller delivery unit 9：But in other embodiments, workpiece to be cleaned can also be which
The workpiece of its species.In the embodiment shown in Figure 2, the roller delivery unit 9 that user can be cleaned at least one
It is hung on the pylon 71 of hanging equipment 7, pylon 71 can dispose 12 roller delivery units 9 simultaneously, and hang
Hang standby 7 and there is three pylons 71, the roller delivery unit to be cleaned therefore hanging equipment 7 can be sling 36 simultaneously
9。
First, at least one workpiece leaching to be cleaned is placed in alkaline cleaning fluid, and ultrasound wave shake is provided to alkaline cleaning fluid
Swing.In the present embodiment, user can utilize remote control or manual mode to pass multiple rollers that hanging equipment 7 is hung
Unit 9 is sent to be placed in the first cell body 11 of the first groove 1, so that the roller delivery unit 9 is soaked in alkaline cleaning
In liquid 81.In the present embodiment, workpiece to be cleaned is for the IC substrates delivery roller 92 on roller delivery unit 9, alkali
Property cleanout fluid 81 includes sodium hydroxide (NaOH), ethylene glycol monobutyl ether (Ethylene Glycol Monobutyl Ether) and water.
When the roller delivery unit 9 is soaked in alkaline cleaning fluid 81, the first ultrasound wave shake in the first cell body 11 can be opened
Device 113 is swung, ultrasonic wave concussion is provided to alkaline cleaning fluid 81, thus, attaching to the roller of roller delivery unit 9
High molecular polymer on 91 can be removed by the alkaline cleaning fluid 81 with ultrasonic wave concussion.Furthermore, user can profit
With the heat exchanger and cooling system in the first cell body 11 to heat and cool down alkaline cleaning fluid 81, and by alkaline cleaning fluid
81 cleaning temperature scope control is between about 50 DEG C to about 60 DEG C, to increase alkaline cleaning fluid 81 and remain in roller
The active function between high molecular polymer on the roller 91 of delivery unit 9, so can further lift alkaline cleaning
Liquid removes the cleaning efficiency of the high molecular polymer on roller 91.
Then, water is rinsed into workpiece to be cleaned in high-pressure jet mode.In the present embodiment, when the roller delivery unit
9 after the cleaning of the alkaline cleaning fluid 81 of the first groove 1, and user can utilize remote control or manual mode to set hanging
The standby 7 multiple roller delivery units 9 hung are moved to the second groove of the second groove 2 by the first cell body 11 of the first groove 1
In body 21.When the roller delivery unit 9 is moved to the high-pressure spray wash in the second cell body 21, in the second cell body 21
Equipment 213 is can to provide high-pressure washing to rinse alkaline cleaning fluid remaining on roller delivery unit 9, as described above,
The pressure substantially 1kg/cm of the preferred hydro-peening washing provided by high-pressure spray wash equipment 2132。
Then, workpiece to be cleaned leaching is placed in acidic cleaning solution, and ultrasonic wave concussion is provided to acidic cleaning solution.At this
In embodiment, after high-pressure washing of the roller delivery unit 9 through the second groove 2, user can utilize remote control or
Multiple roller delivery units 9 that hanging equipment 7 is hung by manual mode are moved by the second cell body 21 of the second groove 2
To in the 3rd cell body 31 of the 3rd groove 3, so that the roller delivery unit 9 is soaked in acidic cleaning solution 82.At this
In embodiment, acidic cleaning solution 82 includes about 52.5wt% to about 60wt% sulphuric acid (H2SO4) and/or nitric acid (HNO3), with
And about 6wt% to about 8.75wt% hydrogen peroxide (H2O2).In the present embodiment, acidic cleaning solution 82 is to be by concentration
The sulfuric acid solution and/or salpeter solution of 70wt% to 75wt%, and the hydrogenperoxide steam generator that concentration is 30wt% to 35wt%
Prepared, wherein sulfuric acid solution and/or salpeter solution account for the 75wt% to 80wt% of cleanout fluid 82, and hydrogenperoxide steam generator
Account for the 20wt% to 25wt% of cleanout fluid 82.
When the roller delivery unit 9 is soaked in acidic cleaning solution 82, can open the 3rd ultrasonic in the 3rd cell body 31
Ripple oscillator 313, to provide ultrasonic wave concussion to acidic cleaning solution 82, thus, attach to the rolling of roller delivery unit 9
Stain on wheel 91 can be removed by the acidic cleaning solution 82 with ultrasonic wave concussion.As described above, three surpassed by
The power bracket of the ultrasonic wave concussion provided by sound wave vibrator 313 is between 2000W to 3800W.Furthermore, make
User using the heat exchanger and cooling system in the 3rd cell body 31 to heat and cool down acidic cleaning solution 82, and by acid
Property cleanout fluid 82 cleaning temperature scope control be between about 50 DEG C to about 60 DEG C, with increase acidic cleaning solution 82 with
The active function between the stain on the roller 91 of roller delivery unit 9 is remained in, acidity so can be further lifted
Cleanout fluid 82 removes the cleaning efficiency of the stain on roller 91.
Then, workpiece to be cleaned leaching is placed in water, and ultrasonic wave concussion is provided to water.In the present embodiment, when described
After the cleaning of the acidic cleaning solution 82 of the 3rd groove 3, user can utilize remote control or manual to roller delivery unit 9
Mode multiple roller delivery units 9 that hanging equipment 7 is hung are moved to by the 3rd cell body 31 for opening the 3rd groove 3
In 4th cell body 41 of the 4th groove 4, so that the roller delivery unit 9 is soaked in water 83.When the roller is transmitted
Unit 9 is soaked in water 83, can open the 4th ultrasonic wave concussion device 413 in the 4th cell body 41, to provide to water 83
Ultrasonic wave concussion, thus, acidic cleaning solutions of the remnants on the roller 91 of roller delivery unit 9 can be by with ultrasound wave
The water 83 of concussion is removed.As described above, the work(of the ultrasonic wave concussion for being provided by the 4th ultrasonic wave concussion device 413
Rate scope is between 2000W to 3800W.
Finally, when the roller delivery unit 9 is after the cleaning of the water 83 of the 4th groove 4, user can utilize distant
Fourth cell body 41 of the multiple roller delivery units 9 that hanging equipment 7 is hung by control or manual mode by the 4th groove 4
Move in the 5th cell body 51 of the 5th groove 5.When the roller delivery unit 9 is moved in the 5th cell body 51, the
Wind in five cell bodies 51 is cut equipment 515 and can provide wind and cuts air-flow to air-dry water remaining on roller delivery unit 9.
In the present embodiment, cleaning device 100 and cleaning method can reach the effect of automatization's cleaning, thus can save people
Power, improves cleaning efficiency.Furthermore, cleaning device 100 and cleaning method can effectively be disposed and be sticked on the surface of the workpiece
Pollutant, and be not required to manual wipping, and cleaning quality can be improved.
Only above-described embodiment principle only to illustrate the invention and its effect, and be not used to limit the present invention.Therefore, practise in
The personage of this technology modifies to above-described embodiment and changes and still do not take off spirit of the invention.The interest field of the present invention should
Listed by claims as be described hereinafter.
Claims (14)
1. a kind of cleaning device, which includes：
First groove, which includes the first cell body and at least one first ultrasonic wave concussion devices；
Second groove, which includes the second cell body and at least one high-pressure spray wash equipment；
3rd groove, which includes the 3rd cell body and at least one the 3rd ultrasonic wave concussion devices；And
4th groove, which includes the 4th cell body and at least one the 4th ultrasonic wave concussion devices.
2. cleaning device according to claim 1, wherein described first cell body are to corrode material for alkali resistant.
3. cleaning device according to claim 1, wherein described 3rd cell body is for antiacid corrosion material.
4. cleaning device according to claim 1, wherein described first cell body be for accommodating alkaline cleaning fluid, it is described
Second cell body is to accommodate water, and the 3rd cell body is that, for accommodating acidic cleaning solution, the 4th cell body is to use
To accommodate water.
5. cleaning device according to claim 1, wherein described first groove further include heat exchanger and cooling system.
6. cleaning device according to claim 1, the material of wherein described first cell body is for rustless steel.
7. cleaning device according to claim 1, the high-pressure spray wash equipment of wherein described second groove can be along second groove
The short transverse of body is moved up and down.
8. cleaning device according to claim 1, the material of wherein described second cell body is for rustless steel or plastics.
9. cleaning device according to claim 1, wherein described 3rd groove further include heat exchanger and cooling system.
10. cleaning device according to claim 1, further comprising hanging equipment, across first cell body, described
Second cell body, the 3rd cell body and the 4th cell body, the hanging equipment is capable of hoisting, and to hang up at least one to be cleaned
Workpiece, and the cleaning workpiece is sequentially moved to first cell body, second cell body, the 3rd cell body
And the 4th cell body.
A kind of 11. methods for cleaning workpiece to be cleaned, which includes：
A) at least one workpiece leaching to be cleaned is placed in alkaline cleaning fluid, and ultrasound is provided to the alkaline cleaning fluid
Ripple shakes；
B) water is rinsed into the workpiece to be cleaned in high-pressure jet mode；
C) the workpiece leaching to be cleaned is placed in acidic cleaning solution, and ultrasound wave shake is provided to the acidic cleaning solution
Swing；And
D) the workpiece leaching to be cleaned is placed in water, and ultrasonic wave concussion is provided to the water.
12. methods according to claim 11, wherein in the step a), the workpiece to be cleaned is for IC substrates
Delivery roller, the alkaline cleaning fluid include sodium hydroxide (NaOH) and ethylene glycol monobutyl ether (Ethylene Glycol
Monobutyl Ether)；In the step c), the acidic cleaning solution includes sulphuric acid (H2SO4) or nitric acid (HNO3)
And hydrogen peroxide (H2O2)。
A kind of 13. cleanout fluid for cleaning IC substrate delivery rollers, which includes：
About 52.5wt% is to about 60wt% sulphuric acid and/or nitric acid；And
About 6wt% to about 8.75wt% hydrogen peroxide.
14. cleanout fluid according to claim 13, which is by the sulfuric acid solution and/or nitre that concentration is 70wt% to 75wt%
Acid solution, and concentration for 30wt% to 35wt% hydrogenperoxide steam generator prepared by, wherein described sulfuric acid solution and/
Or salpeter solution accounts for the 75wt% to 80wt% of the cleanout fluid, and the hydrogenperoxide steam generator accounts for the cleanout fluid
20wt% to 25wt%.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW104129815A TWI586444B (en) | 2015-09-09 | 2015-09-09 | Cleaning device and detergent solution for cleaning ic substrate conveyer roller |
| TW104129815 | 2015-09-09 |
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| Publication Number | Publication Date |
|---|---|
| CN106513375A true CN106513375A (en) | 2017-03-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510681637.6A Pending CN106513375A (en) | 2015-09-09 | 2015-10-20 | Cleaning apparatus, method of cleaning workpiece to be cleaned, and cleaning liquid and method of cleaning IC substrate transfer roller |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN106513375A (en) |
| TW (1) | TWI586444B (en) |
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Also Published As
| Publication number | Publication date |
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| TW201709990A (en) | 2017-03-16 |
| TWI586444B (en) | 2017-06-11 |
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Application publication date: 20170322 |