CN106501339A - Gas permeable vertical sensor and gas sensing system comprising same - Google Patents
Gas permeable vertical sensor and gas sensing system comprising same Download PDFInfo
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- CN106501339A CN106501339A CN201610107848.3A CN201610107848A CN106501339A CN 106501339 A CN106501339 A CN 106501339A CN 201610107848 A CN201610107848 A CN 201610107848A CN 106501339 A CN106501339 A CN 106501339A
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- 239000000758 substrate Substances 0.000 claims abstract description 71
- 230000000149 penetrating effect Effects 0.000 claims abstract description 6
- 238000012360 testing method Methods 0.000 claims description 29
- 239000011148 porous material Substances 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 12
- FUGYGGDSWSUORM-UHFFFAOYSA-N 4-hydroxystyrene Chemical compound OC1=CC=C(C=C)C=C1 FUGYGGDSWSUORM-UHFFFAOYSA-N 0.000 claims description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 4
- -1 bis-hydroxy ethyl Chemical group 0.000 claims description 4
- 235000011266 Passiflora quadrangularis Nutrition 0.000 claims description 3
- 244000179684 Passiflora quadrangularis Species 0.000 claims description 3
- 239000002253 acid Substances 0.000 claims description 3
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 claims description 3
- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Polymers C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 229920005573 silicon-containing polymer Polymers 0.000 claims description 3
- 229920000914 Metallic fiber Polymers 0.000 claims description 2
- 229920001665 Poly-4-vinylphenol Polymers 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 239000011787 zinc oxide Substances 0.000 claims description 2
- 230000003647 oxidation Effects 0.000 claims 2
- 238000007254 oxidation reaction Methods 0.000 claims 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims 1
- 150000001336 alkenes Chemical class 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 239000004411 aluminium Substances 0.000 claims 1
- 239000000835 fiber Substances 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 claims 1
- 239000011701 zinc Substances 0.000 claims 1
- 229910052725 zinc Inorganic materials 0.000 claims 1
- 239000007789 gas Substances 0.000 description 125
- 239000008187 granular material Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 8
- 239000004793 Polystyrene Substances 0.000 description 6
- 229920002223 polystyrene Polymers 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005520 electrodynamics Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4075—Composition or fabrication of the electrodes and coatings thereon, e.g. catalysts
Abstract
A gas permeable vertical sensor for sensing a gas to be measured, comprising: a substrate including a gas permeable structure for gas to be measured to pass through; and a sensing assembly disposed on the upper surface of the substrate, the sensing assembly comprising: the gas can penetrate through the electrode and the sensing layer. The gas permeable electrode is arranged on the upper surface of the substrate and comprises a plurality of holes for the gas to be detected to penetrate through. The sensing layer is arranged between the upper surface of the substrate and the gas permeable electrode, wherein the gas to be detected is sensed after penetrating the sensing assembly and the substrate in a direction vertical to the upper surface of the substrate. A gas sensing system including the above-described gas permeable vertical sensor is also provided herein.
Description
【Technical field】
The invention relates to a kind of gas sensor, more particularly, the sensor that a kind of gas can be penetrated right through
And the gas sensing system comprising which.
【Background technology】
Traditional gas sensor 10 as shown in figure 1, comprising substrate 1 and stacking sensing component 2 thereon, when gas to be measured
When body F blows over the surface of whole gas sensor 10, the air-flow meeting lateral flow of under test gas F, while with the side for spreading
The sensed layer (not shown) that formula is entered in sensing component 2 is reacted.However, when under test gas are more micro or during relatively low concentration,
The gas molecule for entering sensor by diffusion can also be reduced, it is therefore possible to affecting the sensitivity of detection.Therefore, in need carry
For improving the gas measuring device of the improvement of disadvantages mentioned above.
【Content of the invention】
The present invention provides a kind of gas and can penetrate vertical sensor and the gas sensing system comprising which, wherein, to be measured
Gas can penetrate right through the gas of the present invention and can penetrate vertical sensor, can not only accelerate gas to flow into efficiency, more can be big
Width lifts the contact area of under test gas and sensor thus increases sensing sensitivity, can be used in low concentration or trace gas whereby
The sensing of body, there is provided wider range of application.
One embodiment of the invention provides a kind of gas and can penetrate vertical sensor, and in order to sense under test gas, which includes
One substrate and a sensing component.Substrate can penetrate structure for penetrating under test gas comprising gas.Sensing component is arranged
On the upper surface of substrate, its include a gas can through electrode, its be arranged at the upper surface of substrate and comprising multiple holes use
So that under test gas are penetrated；And one sensed layer be arranged at the upper surface of substrate and gas can be between through electrode, wherein, gas to be measured
Body be penetrated with the direction of the upper surface of vertical substrate sensed after sensing component and substrate.
Another embodiment of the present invention provides a kind of gas sensing system, and which includes gas and can penetrate vertical sensor, bag
Contain：One substrate, its include gas and can penetrate structure for penetrating under test gas；And a sensing component, which is arranged at base
On the upper surface of plate, sensing component includes：One gas can through electrode, on its upper surface being arranged at and include multiple holes
With penetrating under test gas；And a sensed layer, the upper surface and gas for being arranged at substrate can be between through electrode；One tubular cavity
Body, gas can penetrate vertical sensor and be disposed on tubular housing center；And a gas flow control device, which is arranged at
At least one of the two ends of the tubular housing, can penetrate rectilinear biography in order to order about a gas to be sensed with the vertical gas
The direction of sensor is penetrated.
Coordinate appended schema elaborate by specific embodiment below, when being easier to understand the purpose of the present invention, skill
Art content, feature and its effect that is reached.
【Description of the drawings】
Schematic diagrames of the Fig. 1 for traditional gas sensor.
Fig. 2 is the schematic diagram that can penetrate vertical sensor according to the gas of one embodiment of the invention.
Fig. 3 A to Fig. 3 G are the flow chart that can penetrate vertical sensor according to the manufacture gas of one embodiment of the invention.
Fig. 4 A to Fig. 4 I are the flow chart that can penetrate vertical sensor according to the manufacture gas of another embodiment of the present invention.
Fig. 5 A to Fig. 5 I are the flow chart that can penetrate vertical sensor according to the manufacture gas of further embodiment of this invention.
The schematic diagram of Fig. 6 gas sensing systems according to an embodiment of the invention.
【Symbol description】
10 gas sensors
100th, 500 gases can penetrate vertical sensor
1st, 101,201,301,401 substrate
102nd, 202,302 bottom electrode
103rd, 203,303,403 sensed layer
104th, 204,304,404 Top electrode
2nd, S sensing components
205th, 305,405 organic nanometer granule
306th, 406 flatness layer
510 tubular housings
520 gas flow control devices
H holes
P gases can penetrate structure
F under test gas
【Specific embodiment】
Schema by following preferred embodiments and its cooperation is described in further detail by the present invention.Should be noted
, experimental data disclosed in following embodiment is that and be not used to limit which can be real for ease of explaining this case technical characteristic
The aspect that applies.
It will be appreciated that ought represent herein an element or layer be located at another element or layer " on " or " be set
In " another element or during layer, its be probably on another element or layer or be directly arranged at another element or
Layer, or also there may be intermediary element or layer.On the contrary, another element " it of an element " located immediately at " ought be represented herein
On " or when " being directly arranged at " another element or layer, be then not in any intermediary element or layer.In in full, made
" and/or " any and all combination of the word comprising one or more in the plurality of related Listed Items.
For the sake of for convenience of description, herein may use spatially relative word, such as " beneath ", " under ", " under
Side ", " on ", " top " and similar word come a wherein element shown in explanatory diagram or feature relative to another element
Or other multiple elements of feature or Eigen Structure) relation.It will be appreciated that in addition to the orientation shown in figure, this is more
Individual spatially relative word also wish to cover in use or in operation device different azimuth.For example, if flipchart
In device if, then, be described as positioned at other elements or feature " under " or the element of " beneath " will be oriented at
Other elements the plurality of or feature " on ".Therefore, exemplary terms " under " just may cover under with two kinds of orientation.
In addition, the device may also have other orientations (being rotated by 90 ° or other orientations) and tool to be made with explained herein
Spatially relative descriptor.
One embodiment of the invention provides a kind of gas and can penetrate vertical sensor 100, as shown in Fig. 2 in order to sensing
Under test gas, its include：One substrate 101 and a sensing component S, wherein, substrate 101 comprising gas can penetrate structure for
Penetrate under test gas, and sensing component S is disposed on the upper surface of substrate 101 and can through electrode and sensing comprising gas
Layer 103, wherein, gas can through electrode be provided on the upper surface of substrate 101 and include multiple holes under test gas
Penetrate, and sensed layer 103 is provided in the upper surface of substrate 101 and gas can be between through electrode.Wherein, under test gas can be with
The direction that vertical sensor can be penetrated perpendicular to gas penetrates sensing component and substrate and sensed, and this will be in hereinafter detailed
It is described.In one embodiment, gas can through electrode can penetrate Top electrode 104 comprising gas and gas can penetrate bottom electrode
102, gas can penetrate bottom electrode 102 and can penetrate Top electrode 104 with gas and sequentially stack and be arranged on the upper surface of substrate 101,
And sensed layer 103 is arranged at that gas can penetrate bottom electrode 102 and gas can be penetrated between Top electrode 104, as shown in Figure 2.
Hereinafter, the method that the gas by the description manufacture present invention can be penetrated vertical sensor, more clearly to say
The bright gas can penetrate the structure of vertical sensor.Fig. 3 A to Fig. 3 G are please refer to, according to one embodiment of the invention, is formed
The gas of the present invention can penetrate the method for vertical sensor and include：One substrate 201, as shown in Figure 3A, wherein, substrate are provided
Material can include polymethylacrylic acid bis-hydroxy ethyl ester (polyhema), dimethyl silicone polymer
(Polydimethylsiloxane, PDMS) or 4-Vinyl phenol (poly (4-vinyl phenol), PVP), but not with this
For limiting.Then, using rotary coating mode by organic nanometer granule 205 coat on substrate 201, as shown in Figure 3 B, compared with
Goodly, organic nanometer granule 205 is including but not limited to polystyrene (polystyrene) ball.Then, Fig. 3 C and figure are referred to
3D, in a suitable manner, such as hot evaporation method is deposited with out a bottom electrode on the substrate 201 for being coated with organic nanometer granule 205
202, and the mode such as remove using tape-stripping behind surface, organic nanometer granule 205 is removed with the electrode above which, thus
Obtain the gas with multiple hole H and can penetrate bottom electrode 202.
Then, as shown in FIGURE 3 E, the substrate 201 not covered by bottom electrode 202 is removed using plasma etching method, so that
There is substrate 201 gas can penetrate structure P.Then, as shown in Fig. 3 F and Fig. 3 G, sensed layer 203 is coated with the structure of Fig. 3 E,
And then in sensed layer 203, produce gas using thermal evaporation deposition and can penetrate Top electrode 204, thus obtain the gas of the present invention
Vertical sensor can be penetrated.As described above, Top electrode 204 and bottom electrode 202 all have multiple hole H, under test gas are available for
Penetrate；And also there is substrate 201 gas can penetrate structure P, therefore under test gas can penetrate sense in vertical or approximately perpendicular mode
Survey component and substrate and sensed.In this, the direction flowed by under test gas is not limited to the biography of the fully vertical present invention
Sensor, for example, in the case of low concentration, using modes such as stream pressures, forces all gas around sensor
All directions are inhaled in sensor from all quarter.
According to another embodiment of the present invention, Fig. 4 A to Fig. 4 I refer to, and formation gas of the invention can penetrate rectilinear
The method of sensor includes：A substrate 301 is provided, as shown in Figure 4 A, wherein, the material of substrate includes electrically non-conductive porous material,
Such as aluminum oxide, zinc oxide or silicon, in this, will carry out following explanation by taking aluminum oxide as an example.Fig. 4 A are referred to, due to substrate
Material is electrically non-conductive porous material, and there is gas can penetrate structure P, close-up schematic views of Fig. 4 B for the part A of Fig. 4 A for which.
Then, bottom electrode 302 is deposited with out on substrate 301 in the way of hot evaporation, then, coating flat layer 306 on the bottom electrode 301
With sensed layer 303, as shown in Fig. 4 C and Fig. 4 D, in this, flatness layer 306 is disposed between sensed layer 303 and bottom electrode 302.
Then, refering to Fig. 4 E to Fig. 4 G, organic nanometer granule 305 is coated in sensed layer 303, preferably using the mode of rotary coating
Ground, organic nanometer granule 305 can be polystyrene (polystyrene) ball.Then, in the way of hot evaporation, in being coated with
A Top electrode 304 is deposited with out in the sensed layer 303 of machine nano particle 305, and the mode such as removes using tape-stripping behind surface,
Organic nanometer granule 305 is removed with the electrode above which, thus is obtained the gas with multiple hole H and can be penetrated Top electrode
304.
Then, as shown at figure 4h, using plasma etching method by the flatness layer 306, sensed layer not alignd with substrate 301
303 and Top electrode 304 remove, thus obtain the present invention gas can penetrate vertical sensor, as shown in fig. 41.As above institute
State, Top electrode 304 and bottom electrode 302 all have multiple hole H, are available under test gas to penetrate；And substrate 201 also can with gas
Structure P is penetrated, therefore the direction that under test gas can penetrate vertical sensor perpendicular to gas penetrates sensing component and substrate
And it is sensed.
According to still another embodiment of the invention, Fig. 5 A to Fig. 5 I refer to, and formation gas of the invention can penetrate rectilinear
The method of sensor includes：A substrate 401 is provided, as shown in Figure 5A, wherein, the material of substrate is led comprising conductive porous material
Electric porous material includes conductive grenadine or metallic fiber.In this, following explanation will be carried out by taking conductive grenadine as an example.Due to substrate
Material be conductive porous material, its not only have gas can penetrate structure P, more can be directly as bottom electrode because of its electric conductivity
Purposes, the processing procedure of bottom electrode can be omitted, and from the point of view of the part B of Fig. 5 A is amplified, as shown in Fig. 5 B.Then, in substrate 401
On coating flat layer 406 and sensed layer 403 in order, as shown in Fig. 5 C and Fig. 5 D, in this, flatness layer 406 is disposed on sensing
Between layer 403 and substrate 401.Then, refering to Fig. 5 E and Fig. 5 G, organic nanometer granule 405 is applied using the mode of rotary coating
It is distributed in sensed layer 403, it is preferred that organic nanometer granule 405 can be polystyrene (polystyrene) ball.Then, with heat steaming
The mode of plating, is deposited with out a Top electrode 404 in the sensed layer 403 for being coated with organic nanometer granule 405, and utilizes tape-stripping
The mode such as remove behind surface, organic nanometer granule 405 is removed with the electrode above which, thus obtain and there are multiple hole H
Gas can penetrate Top electrode 304.
Then, as illustrated in fig. 5h, using plasma etching method by the flatness layer 406, sensed layer not alignd with substrate 401
403 and Top electrode 404 remove, thus obtain the present invention gas can penetrate vertical sensor, as shown in fig. 5i.As above institute
State, Top electrode 404 there can be multiple hole H, penetrate under test gas；And the substrate 201 simultaneously as bottom electrode also has gas
Body can penetrate structure P, thus the under test gas direction that can penetrate vertical sensor perpendicular to gas penetrate sensing component and
Substrate and sensed.
It should be noted that being stated in embodiment on the invention, bottom electrode can be worn with the gas formed in sensed layer
Saturating hole is mutually aligned with the penetrated structure of substrate, and the penetrated knot then with substrate of the hole formed in Top electrode
Structure is interlaced, and so which is illustrated for exemplary for explanation, and the present invention is not limited to this.Substrate in one embodiment
Gas can penetrate structure and bottom electrode, sensed layer, the transparent hole of gas of Top electrode and can be mutually aligned；In another enforcement
In example, the gas of substrate can penetrate structure and bottom electrode, sensed layer, Top electrode the transparent hole of gas can not be right each other
Together.Additionally, the direction flowed by under test gas is not limited to fully vertical sensor of the invention, for example, low
In the case of concentration, using modes such as stream pressures, all gas around sensor all directions quilt from all quarter is forced
In suction sensor.
According to one more embodiment of the present invention, there is provided a kind of gas sensing system, as shown in fig. 6, which includes as mentioned above
Gas can penetrate vertical sensor 500, tubular housing 510 and gas flow control device 520.Wherein, gas can be worn
Vertically show that sensor 500 is contained with previous embodiment identical thoroughly, therefore description is omitted.Gas can penetrate vertical sensor
500 centers that may be disposed at tubular housing 510, and gas flow control device 520 may be disposed at the two ends of tubular housing extremely
One of few, penetrated with the direction that vertical gas can penetrate vertical sensor 500 in order to order about gas F to be sensed.
In the present embodiment, it is that gas flow control device 520 is schematically shown as fan to facilitate explanation, the right present invention to be not limited thereto
System, for example, gas flow control device 520 can include electrodynamic pump, manual withdrawal syringe or current limiting tube, control whereby to be measured
Gas flow can penetrate vertical sensor to be passed to gas.
Summary, gas of the invention can penetrate the substrate and sensing component of vertical sensor and all there is gas can wear
Structure or loose structure, can make under test gas directly penetrate gas of the invention and can penetrate vertical sensor thoroughly, and in which
In vertically flow, thus the contact area between gas molecule and sensor can be increased, so iodine and improve sensitive
Degree.Accordingly, gas of the invention can penetrate vertical sensor and can be effectively applied to low concentration or minimum gas, and then develop
Microminiaturization gas measurement system, expanded application category.Still further aspect, comprising the gas sense that gas can penetrate vertical sensor
Examining system can use the such as gas flow control device such as fan, pump, suction syringe, not only can control the flow direction of under test gas,
Make which penetrate right through gas and can penetrate vertical sensor, also can help to the volume for reducing measurement system, there is provided more polynary
Application.
Embodiment described above is only technological thought to illustrate the invention and feature, and its purpose makes to be familiar with this skill
The personage of skill will appreciate that the content of the present invention and implements according to this, when can not with the restriction present invention the scope of the claims, i.e., generally
The impartial change that is made according to disclosed spirit or modification, should cover in the scope of the claims of the present invention.
Claims (19)
1. a kind of gas can penetrate vertical sensor, in order to sense under test gas, it is characterised in which includes：
One substrate, its include a gas and can penetrate structure for penetrating for the under test gas；And
One sensing component, its are disposed on a upper surface of the substrate, comprising：
One gas can through electrode, its be arranged at the upper surface of the substrate and comprising multiple holes with so that the under test gas are worn
Thoroughly；And
One sensed layer, the upper surface and the gas for being arranged at the substrate can be between through electrode；
Wherein, the under test gas are to penetrate quilt after the sensing component and the substrate with the direction of the upper surface of the vertical substrate
Sensing.
2. gas as claimed in claim 1 can penetrate vertical sensor, it is characterised in that the material of the substrate includes poly- methyl-prop
Olefin(e) acid bis-hydroxy ethyl ester (polyhema), dimethyl silicone polymer (Polydimethylsiloxane, PDMS) or 4- ethene
Base phenol (poly (4-vinyl phenol), PVP).
3. gas as claimed in claim 1 can penetrate vertical sensor, it is characterised in that the material of the substrate is conductive porous material
Material.
4. gas as claimed in claim 3 can penetrate vertical sensor, it is characterised in that the conductive porous material includes conductive mesh
Yarn or metallic fiber.
5. gas as claimed in claim 4 can penetrate vertical sensor, it is characterised in that be arranged at the sensing comprising a flatness layer
Between layer and the substrate.
6. gas as claimed in claim 1 can penetrate vertical sensor, it is characterised in that the material of the substrate is electrically non-conductive porous
Material.
7. gas as claimed in claim 6 can penetrate vertical sensor, it is characterised in that the electrically non-conductive porous material includes oxidation
Aluminium, zinc oxide or silicon.
8. gas as claimed in claim 1 can penetrate vertical sensor, it is characterised in that the gas can through electrode include a gas
Body can penetrate Top electrode and a gas can penetrate bottom electrode；The gas can penetrate bottom electrode and can penetrate Top electrode sequentially with the gas
Stacking is arranged on the upper surface of the substrate, and the sensed layer is arranged at the gas and can penetrate bottom electrode and can be penetrated with the gas
Between Top electrode.
9. gas as claimed in claim 8 can penetrate vertical sensor, it is characterised in that further include a flatness layer and be arranged at the sense
Survey layer and the gas can be penetrated between bottom electrode.
10. a kind of gas sensing system, it is characterised in which includes：
One gas can penetrate vertical sensor, comprising：
One substrate, its include a gas and can penetrate structure for penetrating for the under test gas；And
One sensing component, its are disposed on a upper surface of the substrate, comprising：
One gas can through electrode, its be arranged on the upper surface of the substrate and comprising multiple holes with for the under test gas
Penetrate；And
One sensed layer, the upper surface and the gas for being arranged at the substrate can be between through electrode；
One tubular housing, the gas can penetrate vertical sensor and be disposed on the tubular housing center；And
One gas flow control device, which is arranged at least one of the two ends of the tubular housing, waits to feel in order to order about one
Survey gas to be penetrated with the direction that the vertical gas can penetrate vertical sensor.
11. as claim 10 gas sensing system, it is characterised in that the gas flow control device selected from fan, pump,
One of group that syringe and current limiting tube are constituted.
The gas sensing system of 12. such as claims 10, it is characterised in that the material of the substrate comprising polymethylacrylic acid two-
Hydroxy methacrylate (polyhema), dimethyl silicone polymer (Polydimethylsiloxane, PDMS) or 4-Vinyl phenol
(poly(4-vinyl phenol),PVP).
13. as claim 10 gas sensing system, it is characterised in that the material of the substrate be conductive porous material.
The gas sensing system of 14. such as claims 13, it is characterised in that the conductive porous material includes conductive grenadine or gold
Category fiber.
The gas sensing system of 15. such as claims 14, it is characterised in that be arranged at the sensed layer and the base comprising a flatness layer
Between plate.
16. as claim 10 gas sensing system, it is characterised in that the material of the substrate be electrically non-conductive porous material.
17. as claim 16 gas sensing system, it is characterised in that the electrically non-conductive porous material include aluminum oxide, oxidation
Zinc or silicon.
18. as claim 10 gas sensing system, it is characterised in that the gas can through electrode can penetrate comprising a gas
Top electrode and a gas can penetrate bottom electrode；The gas can penetrate bottom electrode and the gas can penetrate Top electrode and sequentially stack setting
On the upper surface of the substrate, and the sensed layer be arranged at the gas can penetrate bottom electrode and the gas can penetrate Top electrode it
Between.
19. as claim 18 gas sensing system, it is characterised in that further include a flatness layer be arranged at the sensed layer with should
Gas can be penetrated between bottom electrode.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW104129585A TWI577991B (en) | 2015-09-08 | 2015-09-08 | Gas permeable vertical sensor and gas sensing system having the same |
| TW104129585 | 2015-09-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106501339A true CN106501339A (en) | 2017-03-15 |
Family
ID=58287172
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610107848.3A Pending CN106501339A (en) | 2015-09-08 | 2016-02-26 | Gas permeable vertical sensor and gas sensing system comprising same |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN106501339A (en) |
| TW (1) | TWI577991B (en) |
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| WO1998027411A1 (en) * | 1996-12-17 | 1998-06-25 | Laboratorium Für Physikalische Elektronik Institut Für Quantenelektronik | Method for applying a microsystem or a converter on a substrate, and device manufactured accordingly |
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| TW201215882A (en) * | 2010-10-11 | 2012-04-16 | Univ Nat Chiao Tung | Vertical type sensor |
| JP2012098234A (en) * | 2010-11-05 | 2012-05-24 | Figaro Eng Inc | Gas sensor |
| CN104515793A (en) * | 2013-10-01 | 2015-04-15 | Lg伊诺特有限公司 | Gas sensor package |
| CN104697969A (en) * | 2013-12-09 | 2015-06-10 | 财团法人交大思源基金会 | Sensor and method for manufacturing the same |
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| TW201710680A (en) | 2017-03-16 |
| TWI577991B (en) | 2017-04-11 |
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