CN106489026A - Membrane pump - Google Patents
Membrane pump Download PDFInfo
- Publication number
- CN106489026A CN106489026A CN201580035533.6A CN201580035533A CN106489026A CN 106489026 A CN106489026 A CN 106489026A CN 201580035533 A CN201580035533 A CN 201580035533A CN 106489026 A CN106489026 A CN 106489026A
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- CN
- China
- Prior art keywords
- pump
- barrier film
- cyclic space
- fluid
- support member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/0009—Special features
- F04B43/0018—Special features the periphery of the flexible member being not fixed to the pump-casing, but acting as a valve
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/0009—Special features
- F04B43/0054—Special features particularities of the flexible members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/021—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms the plate-like flexible member is pressed against a wall by a number of elements, each having an alternating movement in a direction perpendicular to the plane of the plate-like flexible member and each having its own driving mechanism
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
- F04B43/14—Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2210/00—Working fluid
- F05B2210/10—Kind or type
- F05B2210/11—Kind or type liquid, i.e. incompressible
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
- F05C2225/04—PTFE [PolyTetraFluorEthylene]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
Abstract
The present invention relates to a kind of pump, it includes：Limit the pump housing of the cyclic space, the described cyclic space is used for the output aperture that fluid is recycled to the cyclic space according to loop direction from the entrance aperture of the described cyclic space；Barrier film, described barrier film is roughly parallel to loop direction and is maintained in the described cyclic space；And actuation means, described actuation means are suitable to vibrate described barrier film on the direction be approximately perpendicular to loop direction, and wherein said barrier film includes material or the protective coating with polymeric organic host between 100MPa to 10GPa for the Young's moduluss.
Description
Technical field
The present invention relates to a kind of pump for moving fluid, and more particularly it relates to one kind is for such
The pump of application, fluid wherein to be moved is the fluid not being contaminated or damaging, such as biofluid or high purity fluid, or its
In fluid to be moved be aggressive fluids, for example be used for manufacturing the fluid of semiconductor device.
Background technology
In order to move solution or fluid suspension, it is known to use include the centrifugal pump of the impeller in the pump housing.Impeller allusion quotation
Type ground passes outwards through from the pump housing and is rotated by external motors by means of axle operation, described axle.The shortcoming of such centrifugal pump be
There are pollution or the risk of leakage at the bearing that the drive shaft of impeller passes through.Additionally, the rotation of impeller in operation is given birth in a fluid
Become shear stress, this is unfavorable in fragility fluid, particularly in the case of biofluid.
The further drawback of such centrifugal pump is the aggressive fluids that it is unsuitable for that destruction mechanical bearing is tended in movement.Invade
The example of corrosion fluid includes CMP (chemical-mechanical planarization) buffer in the surface plane being designed as making semiconductor device
Suspension used in skill.These suspensions can have the very thin granule tending to mechanical erosion bearing.
Industry continues need for improved pump.
Content of the invention
The present invention more particularly aims at provides effectively stream by disclosing a kind of fluid for small size and large volume
Eliminating these shortcomings, this pump makes it possible to obtain stabilized fluid flow velocity over time the pump of body displacement, is simultaneously provided in stream
The ability of regulated fluid flow velocity in the wide scope of speed, the structure of pump is further adapted for limiting and fluid to be moved is polluted or damages
Risk, and can be used together with aggressive fluids.
Pump according to one or more embodiments specifically described herein generally can include limiting the pump housing of the cyclic space,
The described cyclic space is used for fluid and is recycled to the described cyclic space according to loop direction from the aperture that enters of the described cyclic space
Output aperture.Pump can also include barrier film, and described barrier film is roughly parallel to loop direction and is maintained in the described cyclic space；And
Actuation means, described actuation means are suitable to vibrate described barrier film on the direction be approximately perpendicular to loop direction.In an embodiment,
Described barrier film can include by having Young's moduluss between 100MPa to 10GPa, for example in 200MPa to 2GPa
Between polymeric organic host the protective coating made of material.In the implication of the present invention, " protective coating "
It is intended to the outer portion of barrier film that contacts in the during the operation of pump with fluid it should be understood that barrier film in addition to protective coating
Remainder is configured to not contact with fluid.According to the present invention, fluid is transportable deformable medium, such as liquid, gas
Body, gel, paste, powder, suspension, dispersion, emulsion, or these mixture.In an embodiment, barrier film is by having Young
The material of polymeric organic host between 100MPa to 10GPa, for example between 200MPa to 2GPa for the modulus
Make.In this application, give the numerical value of the Young's moduluss of measurement at 23 DEG C.
In an embodiment, the protective coating of barrier film or barrier film can be by model between 100MPa to 10GPa for the Young's moduluss
In enclosing, such as the polymer organic materials between 200MPa to 2Gpa are integrally formed.In another embodiment,
The protective coating of barrier film or barrier film can be by including Young's moduluss between 100MPa to 10GPa, for example exist
Polymeric organic host between 200MPa to 2Gpa and reinforcement, the weaving particularly for example based on glass fibre
Or the composite of non-woven fibre reinforcement makes.
According to certain embodiments of the present invention, pump can be arranged in the container being designed to receive at least one fluid, its
Middle container is made up of flexible material.
The pump as above with vibration diaphragm can avoid in the pump housing using mechanical bearing, thus reduce pollution and
The risk of leakage.In addition, such membrane pump can generate little shear stress in the fluid of displacement, thus keep fluid components
Integrity, ensure high-caliber fluid displacement simultaneously.Such pump can regulated fluid flow velocity in a wide range, for example from
0.1L/min to 100L/min.For given fluid flow valve it is also possible to obtain the well steady of fluid flow over time
Qualitative.Another advantage of the pump with vibration diaphragm according to embodiments described herein is pump can be self-starting.?
That is, pump does not need to be initially filled with fluid with convenient to operate.On the contrary, in practice, pump can move a certain amount of air, because
This produces vacuum in circuit upstream, and this allows fluid to be flowed in the cyclic space.
In a particular embodiment, the protective coating of barrier film or barrier film can include having between 100MPa to 10GPa, example
Polymer organic materials as the relatively high Young's moduluss between in 200MPa to 2GPa.On the contrary, such as silicon
The elastomer of ketone or polyurethane elastomer has the Young's moduluss between 1MPa to 10MPa.The tribute of the present inventor
Offer is to find to be made up of the material with polymeric organic host between 100MPa to 10GPa for the Young's moduluss
Barrier film or the guarantor being made up of the material with polymeric organic host between 100MPa to 10GPa for the Young's moduluss
Shield coating can not only provide the function of fluid-propelled when being incorporated in the pump have vibration diaphragm, and can bear and move back
Change, particularly when pump is used for mechanically moving aggressive fluids (suspension for example used in CMP planarization technique).
In addition, the polymer organic materials with the Young's moduluss between 100MPa to 10GPa can also
More more stable in chemistry than silicone or polyurethane elastomer, and unlikely changed by contacting with the fluid of flowing in pump
Learn modified.
According to an aspect of the present invention, actuation means can be configured in entering near aperture positioned at the cyclic space
The end of barrier film alternately generates the exciting force being approximately perpendicular to loop direction.
According to another embodiment of the invention, barrier film may be disposed so that in response in the side being approximately perpendicular to barrier film
Upwards exciting force is alternately applied to an end of barrier film, when barrier film extends parallel to loop direction, barrier film is at least
One fluctuation occurs and is activated that the end of power is propagated towards the other end of barrier film along barrier film from it.
So, barrier film may be constructed and is activated that the end of power is displaced to the support member of its other end for ripple from it.
The displacement of these ripples can damp along with the pressure in fluid circulation space.Therefore can be with pressure between barrier film and fluid
The form of gradient and fluid stream sets up the transmission of mechanical energy.
According to specific embodiment, the excitation of barrier film can be in one of natural frequency of barrier film, particularly barrier film be first solid
Have and carry out under frequency.In an embodiment, in order to avoid the local pressure effect in fluid, the driving frequency of barrier film can have
Value between 20Hz to 300Hz, for example between 40Hz to 150Hz.
When static, barrier film can only be kept at its periphery.When activating, the surface area of barrier film is with the shape of ripple
Become and increase, due to the holding at the periphery of barrier film, the barrier film tensioning in leading to operate.The periphery of barrier film can be firm with periphery
Property support member engage.Support member can be in applying power at the periphery of barrier film to force barrier film to return in the extension plane of support member
Return.In the case of disc diaphragm geometry, support member can be ring, and it applies radiant force at the periphery of barrier film.
In one embodiment, the polymeric organic host of the protective coating of the polymeric organic host of barrier film or barrier film can
It is obtained by fluoropolymer.In the context of the present invention, term " fluoropolymer " refers to there is at least one such as in its chain
Any polymer of lower monomer：Described monomer is selected from containing the vinyl groups that can open with polymerization or increase polyreaction
Compound, and containing being attached directly at least one fluorine atom, fluoroalkyl group or the Fluoroalkyloxy of described vinyl groups
Group.The example of monomer includes fluorothene；Vinylidene (VF2)；Trifluoro-ethylene (VF3)；Chlorotrifluoroethylene (CTFE)；1,2- bis-
Fluorothene；Tetrafluoroethene (TFE)；Hexafluoropropene (HFP)；Perfluor (alkyl vinyl) ether, such as perfluor (methyl ethylene) ether
(PMVE), perfluor (ethyl vinyl) ether (PEVE) and perfluor (propyl ethylene base) ether (PPVE)；Perfluor (1,3- dioxane penta
Alkene)；Perfluor (2,2- dimethyl -1,3- dioxole) (PDD)；Formula CF2=CFOCF2CF(CF3)OCF2CF2(wherein X is X
SO2F、CO2H、CH2OH、CH2OCN or CH2OPO3H product)；Formula CF2=CFOCF2CF2SO2The product of F；Formula F (CF2)nCH2OCF=CF2The product of (n is 1,2,3,4 or 5)；Formula R1CH2OCF=CF2(wherein R1For hydrogen or F (CF2)z, and z is 1,2,3
Or 4) product；Formula R3OCF=CH2(wherein R3For F (CF2) z-, and z be 1,2,3 or 4) product；Perfluorobutyl ethylene
(PFBE)；3,3,3- trifluoro propenes；2- trifluoromethyl -3,3,3- tri- fluoro- 1- propylene.Fluoropolymer can be homopolymer or copolymerization
Thing, it may also comprise non-fluorinated monomer, such as ethylene.In an embodiment particularly, fluoropolymer is selected from：Ethylene fluoride
Propylene (FEP), ETFE (ETFE), politef perfluoropropyl vinyl ether (PFA), politef perfluor first
Base vinyl ethers (MFA), politef (PTFE), Kynoar (PVDF), ethylene chlorotrifluoroethylene (ECTFE), polychlorostyrene
Trifluoro-ethylene (PCTFE), or combinations thereof.
In one embodiment, the whole pump housing can be obtained by fluoropolymer, and described fluoropolymer is alternatively by fiber
Strengthen, particularly strengthened come fiber with glass fibre.In another embodiment, each sealing member of pump can be by fluoropolymer system
?.Fluoropolymer can be avoided that the probability of any pollution, and this can be conducive to high-purity applications.Fluoropolymer also can have
To chemicals, especially to being used in particular for the acid of semiconductor manufacturing (as sulphuric acid (H2SO4), Fluohydric acid. (HF) or phosphoric acid (H3PO4))
There is resistance.
According to an aspect of the present invention, pump may include support member, and described support member may be connected to the end of barrier film.Described
Support member can have enough intensity to bear exciting force, and at least ledge of described support member is in a sealing fashion towards the pump housing
Outside pass through, on the described ledge that described actuation means are configured to act on described support member, thus in described barrier film
End generate exciting force in an alternating manner.
According to an embodiment, described support member can be by the material from barrier film or different with the material of the protective coating of barrier film
Polymeric material be obtained.In a particular embodiment, described support member can be by selected from Merlon, polyphenylene sulfide (PPS)
Or polyacrylic material is obtained, described material may be by fiber, and especially glass fibre is strengthened.Described barrier film can subsequently be wrapped by
It is overmolded on support member, this can be time-consuming in pump group dress, and simultaneously improve the adhesion between barrier film and support member and couple.
According to an embodiment, described support member can be by the polymeric organic host or the protective coating with barrier film with barrier film
Polymeric organic host identical polymeric material be obtained.Described support member can be subsequently integral with barrier film, especially by
Molding and integral with barrier film.
According to an aspect of the present invention, whole pump may include one or more polymeric material or even substantially by one kind
Or multiple polymers material forms, described polymeric material is alternatively fibre-reinforced the portion with mechanical function for pump
Divide (as support member).Without limitation for example, the pump housing may include following or even substantially by forming as follows：Polyolefin,
Merlon or fluoropolymer (as PFA or PTFE).Described support member can by may with glass fibre strengthen Merlon,
Polyphenylene sulfide (PPS) or polypropylene are obtained.Described barrier film may include PFA or is even substantially made up of PFA, and described PFA has
Young's moduluss in the range of between 500MPa to 600MPa.Including one or more polymeric material or even substantially by one
Plant or this pump of multiple polymers material composition is possible to limit the weight of manufacturing cost and pump.Furthermore, it is possible to there is not use
The metal parts being contacted with one or more fluid with movement, this will tend to attacking aggressive fluids of metal material or easily
By can be particularly advantageous in the case of the fluid displacement of metallic pollution.
It should also be appreciated that some known geometry of barrier film and the present invention are compatible.
According to an embodiment, barrier film can be maintained in the cyclic space in the form of almost parallel hexahedron band, institute
State the cyclic space to be defined by two preferably rigid walls of the first type surface arrangement in the face of barrier film.Then can by be approximately perpendicular to every
The exciting force of the midplane of film is applied to the edge of the barrier film of the entrance aperture side positioned at the cyclic space so that deformation wave is permissible
Opposite edges towards the barrier film of the output aperture side positioned at the cyclic space are propagated.
According to another embodiment, barrier film can have a tubular form, and may remain in and have the tubulose of rigid walls and follow
In annular space.Then, the distribution of symmetrical radial direction exciting force can be applied to the tubulose of the entrance aperture side positioned at the cyclic space
One end of barrier film is so that deformation wave can pass towards the opposed end of the barrier film of the output aperture side positioned at the cyclic space
Broadcast.
According to another embodiment, barrier film can be in the form of a part for disk or disk, and is maintained at by the face of barrier film
In the cyclic space that two preferably rigid walls of first type surface arrangement define.Then, be approximately perpendicular to barrier film midplane swash
The power of encouraging can be applied to the first end of the barrier film of the entrance aperture side positioned at the cyclic space so that deformation wave can be towards position
The second end in the barrier film of the output aperture side of the cyclic space is propagated.There is this embodiment of plate-like geometry
It is the holding that can simplify barrier film in the cyclic space, reason is that barrier film is only kept at the height of its neighboring.
According to the first modification of the embodiment with plate-like geometry, apply exciting force positioned at entering aperture side
The first end of barrier film can be the center edge of barrier film, and be located at output aperture side barrier film the second end can be every
The neighboring of film.This arrangement form correspond to pump centrifugation configuration, wherein fluid from the center of barrier film towards peripheral circulation.
According to the second modification of the embodiment with plate-like geometry, apply exciting force positioned at entering aperture side
The first end of barrier film can be the neighboring of barrier film, and be located at output aperture side barrier film the second end can be every
The center edge of film.This arrangement form correspond to pump centripetal configuration, wherein fluid from the periphery of barrier film towards center loop.Should
Centripetal configuration can generate the effect concentrated from the periphery of the cyclic space towards the energy at center, hence in so that being obtained in that and work
Required compatible barometric gradient in industry application.This centripetal configuration is it is also possible that can be at the height of the neighboring of barrier film
With the work of less excitation amplitude, and therefore limit the infringement to fragility fluid.
In an embodiment, the pump housing can include relative to each other two rigid walls, limits the cyclic space between them.Every
Film can the substantially form of disk and being maintained in the cyclic space parallel to rigid walls.Then, described or each enter aperture
Preferably the cyclic space can be led in the periphery of barrier film, and described or each output aperture can be in the center of barrier film
The cyclic space is led to, this corresponds to centripetal configuration near domain.
Do not consider that the geometry of barrier film, barrier film and/or support member can advantageously comprise aperture so that fluid can be
The both sides of the barrier film in the cyclic space are passed through.Therefore, it is possible to transmit mixed tensor using the whole volume of the pump housing.Specifically, exist
Have in the embodiment of plate-like geometry, barrier film and/or support member can include at least one periphery aperture and at least one
Center port.
According to an embodiment, the pump housing may include the first flange and the second flange, forms relative to each other two preferably firm
Property wall, limit the cyclic space between them, the first flange includes the into and out aperture of the cyclic space.Second flange can
To include the delivery port of pump.
From the entrance aperture of the cyclic space towards the output aperture of the cyclic space, perpendicular to loop direction intercepting according to this
The lateral cross of the cyclic space of pump of invention can be generally constant, increase or reduction.Specifically, have
In the case of the barrier film of plate-like geometry, from the periphery of barrier film towards the central area of barrier film, the thickness of the cyclic space is permissible
Generally constant, increasing or reduction.The lateral cross of the wherein cyclic space is generally from entering aperture towards defeated
The configuration going out aperture increase can ensure that the notable fluid conveying at the height in output aperture.The horizontal stroke of the wherein cyclic space
The configuration generally reducing towards output aperture from entrance aperture to cross section can aid in the end from the power that is activated for the ripple
The other end towards barrier film is propagated.
According to an aspect of the present invention, actuation means can include at least one linear electromagnetic cause being supplied with alternating current
Dynamic device.As modification, actuation means can include at least one mechanical actuator, for example, pass through change-speed gearing motor vehicularized
Rod-crank actuator.
In an embodiment, pump can include at least one ferromagnetic element, and described ferromagnetic element can be contained in the pump housing simultaneously
And the moveable part of the actuation means for vibration diaphragm can be formed.Then winding can be provided around the pump housing, thus drawing
Play the displacement in pump body for the ferromagnetic element.This configuration can allow the completely enclosed pump housing.
According on one side, pump can include at least one flow sensor in the exit of pump, its with activate
Device feedback link, thus keep constant fluid flow.
In an embodiment, according to an embodiment of the invention membrane pump so that can by adjust strong by actuation means
Plus the amplitude every vibration of membrane and/or frequency to control rate of flow of fluid.
Only certain embodiments of the present invention relates to the fluid including high flow rate dispensing pump and membrane pump as above
Shift unit, wherein membrane pump are connected to the outlet of dispensing pump.There is provided some realities according to the present invention in the exit of dispensing pump
Apply the membrane pump of example so that being obtained in that the steady flow of fluid, or obtain the higher precision of the amount of fluid of conveying.?
So that can act as proportioning valve and reducing Fluid pressure.
Brief description
From the following description being only used as the pump according to the present invention that example and refer to the attached drawing provide, the feature of the present invention and
Advantage will be apparent from, wherein：
Fig. 1 includes the perspective view of the local excision of the pump according to embodiment；
Fig. 2 includes the lateral cross according to plane II-II in Fig. 1；
Fig. 3 includes the perspective view of the barrier film of the pump in Fig. 1 and 2.
Specific embodiment
The following description combined with figure is provided to help understand teaching disclosed herein.Discussion below will focus on tool
Body implementation and the embodiment of teaching.This focusing is provided to help description to instruct and should not be construed as limited to instruct
Scope or applicability.However, it is possible to other embodiments are used based on teaching such as disclosed herein.Scope is quoted
Term " inclusion ", "comprising", " having " or their any other modification are intended to non-exclusive inclusion.For example,
Those features need not be only limited only to including the method for the list of feature, product or device, but can include clearly not arranging
Go out or such method, product or the intrinsic further feature of device.Additionally, unless clearly stated on the contrary, "or" refers to can be simultaneous
Or rather than mutual exclusion or.For example, condition A or B are by any one following satisfaction：A be true (or presence) and B be false (or not
Exist), A is false (or not existing) and B is true (or presence), and A and B is true (or presence).
And, the use of " " is used for describing element specifically described herein and part.Do so is used for the purpose of convenient
With the general significance providing the scope of the present invention.This description be understood to include one, at least one or single, also include
Multiple, vice versa, unless its other implication of expression clear and definite.For example, when Individual Items are described herein, more than one thing
Product can replace Individual Items to be used.Similarly, in the case of more than one article are described herein, Individual Items are permissible
Substitute more than one article.
Unless otherwise defined, all technology used herein and scientific terminology have and common skill of the art
The identical implication that art personnel are generally understood that.That material, method and example are merely exemplary rather than be intended to limit.Herein
In middle extent not described, the many details with regard to concrete material and process action are conventional, and can pump in fluid
Find in textbook in field and other source.
Fig. 1 and Fig. 2 generally includes the pump 1 with the pump housing 3, and the described pump housing limits for fluid stream in its internal volume
The cyclic space 4.Deformable membrane 6 may be embodied in the cyclic space 4 for advancing fluid.The pump housing 3 is included at periphery
Two flanges, upper flange 5 and the lower flange 7 being connected to each other.In the assembling of the pump housing 3 configures, the rigid walls of upper flange 5 51 with
The rigid walls 71 of flange 7 relatively position so that limiting the cyclic space 4 between wall 51 and 71.As shown in fig. 1, the cyclic space 4
There is the plate-like similar with barrier film 6.
The wall 51 of upper flange 5 can include periphery aperture 52 and center port 54, and it forms the stream in the cyclic space 4 respectively
Body enters aperture and the fluid issuing aperture from the cyclic space 4.Fluid can be in the cyclic space 4 on the A of radial centripetal direction
Enter aperture 52 from periphery and be recycled to central outlet aperture 54.In practice, the pipe (not shown) for fluid supply can connect
It is connected to aperture 52 and 54.
According to embodiments of the invention, at least a portion of barrier film 6 is by having between 100MPa to 10Gpa
The polymeric material of Young's moduluss make.For example, in an embodiment, barrier film 6 can include PFA or is substantially made up of PFA.Convex
Edge 5 and 7 can also be made up of such as polyacrylic polymeric material.In an embodiment, barrier film 6 and flange 5 and 7 can pass through mould
Make, for example formed by injection-molded.
Barrier film 6 has midplane P and can keep tensioning parallel to direction A in the cyclic space 4.The periphery of barrier film 6
End 61 can be fixed to rigid strutting piece 8.Support member 8 can include annular section 80 and the circumference projecting from annular section 80
Multiple periphery legs 81 of distribution.Support member 8 can be made up of the polymeric material of such as Merlon.Support member 8 can lead to
Over-molded single-piece, for example obtained by injection-molded.In an embodiment, barrier film 6 can be by cladding molding and 8 groups of support member
Dress.
In an embodiment, barrier film 6 can have center port 64 and support member 8 can include multiple periphery apertures 82.
Therefore, fluid can circulate in the both sides of barrier film 6 in the cyclic space 4.That is, fluid can be defined in barrier film 6 He
Circulate in volume between upper flange 5 and in the volume being defined between barrier film 6 and lower flange 7.
As shown in figs. 1 and 2, the periphery leg 81 of support member 8 can by the hole 78 of lower flange 7 from the pump housing 3 to evagination
Go out.In an embodiment, support member 8 has six periphery legs 81 in six holes 78 through lower flange 7.Sealing member 2 can set
In each hole 78.In an embodiment, sealing member 2 can be made up of the fluoropolymer of such as PTFE, and by any conjunction
Suitable arrangement form (include by Overmolded, weld or be clasped) is connected to the leg 81 of support member 8.
The periphery leg 81 of support member 8 can be provided to be connected to actuation means 9, and described actuation means are in an embodiment
Including multiple electromagnetic linear actuator with moveable part 91, described moveable part is suitable to fix with periphery leg 81,
For example it is snapped in the inside of periphery leg 81.
When being encouraged by alternating current, each actuation means produces by occurring what Laplce's power caused in actuation means
The alternating translational displacement of moveable part 91.Then, the movable part 91 of actuation means can will be approximately perpendicular to barrier film 6
Translational motion on the direction B of midplane P gives support member 8.Therefore, actuation means 9 can be outer in barrier film 6 in an alternating manner
The exciting force F of the midplane P being approximately perpendicular to barrier film 6 is generated at peripheral end portion 61.
The material of support member 8 and size can be chosen such that support member 8 have enough rigidity with ensure to be applied to every
The exciting force F of the peripheral end 61 of film 6 is roughly the same on the whole periphery of barrier film, even if actuator discretely acts on leg
At 81.
In an embodiment, in order to ensure from the peripheral end 61 of the barrier film 6 by power F towards limit central opening 64 every
The good ripple of the end of film is propagated, and barrier film 6 has the thickness reducing from its peripheral end 61 to its center port 64e.
According to embodiments of the invention, above-mentioned pump 1 can include barrier film 6.Barrier film 6 can be made up of PFA, and PFA is tool
There is the fluoropolymer of Young's moduluss between 500MPa to 600MPa so that for small size and large volume all
It is obtained in that effective displacement of fluid, and can be used for mechanically moving and/or chemical corrosion fluid, for example, be used for manufacturing half
The fluid of conductor part.
By with including PFA or even substantially the barrier film be made up of silicone elastomer being replaced by the barrier film that PFA forms, with wrapping
Include PFA or the fluid flow even substantially being obtained and the barrier film acquisition with being made up of silicone elastomer by the barrier film that PFA forms
Fluid flow is roughly the same.Have observed that the same operation frequency for barrier film, have including PFA or even substantially by PFA group
The reduction of the fluid flow with respect to the pump with the barrier film being made up of silicone elastomer for the pump of the barrier film becoming is with silicone
In the range of the maximum 15% of rate of flow of fluid that the barrier film of body obtains.
These results can also be obtained when barrier film 6 has layer structure, layered structure for example includes by having poplar
Polymer organic between 100MPa to 10GPa, for example between 200MPa to 2GPa for family name's modulus
The protective coating that the material of substrate is made, such as PFA；And at least one internal layer, it is applied by protection in the assembling configuration of pump
To prevent fluid from flowing in the cyclic space 4, wherein internal layer can be by another kind of material different from the material of protective coating for layer protection
Material composition.
The internal layer of barrier film can be made up of the polymeric material of the Young's moduluss having far below 100MPa, for example silicone or
Polyurethane elastomer.
Advantageously, the pump according to certain embodiments of the present invention can reduce the shear stress generating in circulation of fluid,
This can be avoided the infringement to component.Pump according to certain embodiments of the present invention is therefore applied to mobile all types of streams
Body, including fluid that is fragility or carrying granule, particularly biofluid or medicinal fluid.According to certain embodiments of the present invention
Pump be also well suited for mixing its shearing by controlled non-Newtonian fluid, be for example used for mixing shear thinning or shearing be thick
Change fluid, or the fluid that irreversibly can solidify under shearing effect for mixing.In addition, using some according to the present invention
The pump of embodiment, due to the mechanical bearing not associated with rotating member, is therefore leaked and the risk of pollution is limited.According to this
The pump of some embodiments of invention also has the size of reduction, especially because barrier film is with respect to the reduced size of turbine, its
Flattened compared with centrifugal pump.
The invention is not restricted to the example described and illustrated in figure.
Especially, as described above, can be by having in addition to PFA according to the barrier film of the pump of certain embodiments of the present invention
Any material of polymeric organic host is made, and its Young's modulus between 100MPa to 10MPa, for example, exists
Between 200MPa to 2GPa, particularly FEP or PTFE.Can also according to the membrane pump of certain embodiments of the present invention
There is layer structure as above, layered structure is included by the model having Young's moduluss between 100MPa to 10GPa
Enclose the protective coating that interior, polymeric organic host for example between 200MPa to 2GPa material is made, and
The sandwich layer being formed by least one internal layer, described internal layer can be by another kind of material system different from the material constituting protective coating
Becoming, particularly there is the polymeric material of the Young's moduluss far below 100MPa, thus increasing the elasticity of barrier film.
The barrier film of pump can also have the geometry in addition to plate-like.Specifically, barrier film can have blade or pipe
Shape geometry.In addition, only the side of barrier film can be used for mobile fluid, for example, do not allowing fluid arbitrary in barrier film
In the case of central opening 64 that side is passed through and/or periphery hole 82, it is particularly the case for the above embodiments.Additionally, real above
Apply in example, pump can include the multiple entrance apertures 52 being circumferentially distributed around the periphery of the pump housing, and includes center delivery outlet
Mouth 54.Pump can also include the check-valves for example at outlet 54, thus ensureing the function of dosing pump.
According to another modification of preceding embodiment, the protective coating of support member 8 and barrier film 6 or barrier film 6 can be by having
The polymer of the modulus Young between 100MPa to 10GPa, for example between 200MPa and 2GPa has
The identical material of machine substrate is made.Support member can be integral with barrier film, and integral particular by moulding.No
Barrier film in Guan Yi part or two separate piece and the relative configuration of support member, can provide use on barrier film or on support member
In the hole making the both sides of barrier film in the cyclic space for the fluid pass through, this hole is labeled as 64 and 82 in the previous embodiment.
In an embodiment, the actuation means in addition to above-mentioned linear electromagnetic actuator can be in the context of the present invention
Middle use.Specifically, it may modify the structure of electromagnetic actuators makes to arrange coil around the pump housing thus drawing in pump body
Play the displacement of the moveable part of each actuator.This configuration allows the completely enclosed pump housing to wear without the outside towards the pump housing
Any part 81 crossed, this is particularly advantageous for sealing.Alternatively, as already mentioned, electromagnetic actuators
Can also be replaced by other types of actuator (as mechanical actuator).
Single pump can also include some barrier films, and these barrier films are arranged in parallel thus circulating in the presence of exciting force F
Fluctuate together in space and be arranged to force fluid from the entrance aperture of the cyclic space towards the exit aperture stream of the cyclic space
Move and pass through the cyclic space.
Many different aspects and embodiment are possible.Some in those aspects and embodiment are described below.Readding
After reader description, skilled artisans will appreciate that, those aspects and embodiment are only exemplary, and do not limit this
Bright scope.Embodiment can be according to any one or more in item listed below.
A kind of item 1. pumps, it includes limiting the pump housing of the cyclic space, and the described cyclic space is used for fluid according to loop direction
It is recycled to the output aperture of the described cyclic space from the entrance aperture of the described cyclic space, described pump includes：
Barrier film, described barrier film is roughly parallel to loop direction and is maintained in the described cyclic space,
Actuation means, described actuation means be suitable to especially on the direction be approximately perpendicular to loop direction to vibrate described every
Film,
Wherein said barrier film includes by having Young's moduluss between 100MPa to 10GPa, preferably in 200MPa to 2GPa
Between polymeric organic host the protective coating made of material, or described barrier film by have Young's moduluss 100MPa to
The material of the polymeric organic host between 10GPa, preferably between 200MPa to 2GPa is made.
2. pumps according to item 1, the polymer organic base of wherein said barrier film or described barrier film protective coating
Matter is made up of fluoropolymer.
Item 3. pumps according to any one of item 1 or 2, each sealing member of wherein said pump is by fluoropolymer system
Become.
Item 4. pumps according to any one of aforementioned item, wherein said pump includes support member, and described support member is connected to
The end of described barrier film, and at least ledge of described support member passes through towards the outside of the described pump housing in a sealing fashion,
On the described ledge that described actuation means are configured to act on described support member, thus in the end of described barrier film to hand over
Generate the exciting force being preferably approximately perpendicular to loop direction for mode.
Item 5. pumps according to item 4, wherein said support member is by the protective coating phase with described barrier film or described barrier film
Same polymeric material is made.
Item 6. pumps according to any one of aforementioned item, the polymeric material that wherein whole pump is strengthened by alternatively fiber
Make.
Item 7. pumps according to any one of aforementioned item, the wherein said pump housing includes relative to each other two rigid walls,
Described rigid walls limit the cyclic space, the form of described barrier film substantially disk between them, and are roughly parallel to described firm
Property wall is maintained in the described cyclic space.
Item 8. pumps according to item 7, wherein each entrance aperture lead to described circulation in the periphery of described barrier film
Space, and the described cyclic space is led in the near central regions of described barrier film in each output aperture.
Item 9. pumps according to any one of item 7 or 8, wherein said barrier film and/or the end being connected to described barrier film
Support member include at least one periphery aperture and at least one center port.
Item 10. pumps according to any one of aforementioned item, the wherein said pump housing (3) includes forming facing with each other two
First flange (5) of wall (51,71) and the second flange (7), described wall limits the described cyclic space (4) between them, described
First flange (5) has described entrance aperture (52) and described output aperture (54).
Item 11. pumps according to any one of aforementioned item, wherein said actuation means (9) include being powered by alternating current
At least one electromagnetic linear actuator.
Item 12. pumps according to any one of aforementioned item, it includes at least one ferromagnetic element, and described ferromagnetic element holds
It is contained in the described pump housing and is formed the moveable part of described actuation means.
Item 13. pumps according to any one of aforementioned item, it includes at least with described actuation means feedback link
Individual flow sensor.
A kind of 14. fluid displacement devices, it include high flow rate dispensing pump and according to any one of aforementioned item every
Membrane pump, wherein said membrane pump is connected to the outlet of described dispensing pump.
A kind of item 15. container blender, it includes：
It is suitable to the container of admitting fluid, wherein said container is made up of flexible material；And
The arrangement pump according to any one of aforementioned item in the above-described container.
A kind of item 16. pumps, it includes：
Limit the cyclic space the pump housing, the described cyclic space be used for fluid according to loop direction entering from the described cyclic space
Man-hole opening is recycled to the output aperture of the described cyclic space；
Barrier film, described barrier film is roughly parallel to loop direction and is maintained in the described cyclic space；And
Actuation means, described actuation means are suitable to vibrate described barrier film on the direction be approximately perpendicular to loop direction,
Wherein said barrier film includes thering is polymer organic base between 100MPa to 10GPa for the Young's moduluss
The material of matter or protective coating.
17. pumps according to item 16, the polymer organic of wherein said barrier film or described barrier film protective coating
Substrate includes fluoropolymer.
18. pumps according to item 16, wherein said pump also includes at least one sealing member, and wherein said at least
One sealing member includes fluoropolymer.
Item 19. pumps according to item 16, wherein said pump also includes：
It is connected to the support member of the end of described barrier film,
The ledge of wherein said support member passes through towards the outside of the described pump housing in a sealing fashion, and wherein said
To generate exciting force in the end of described barrier film on the ledge that actuation means are suitable to act on described support member.
Item 20. pumps according to item 19, wherein said support member includes polymeric material, and wherein said support member
Polymeric material identical with the polymeric material of the protective coating of described barrier film.
Item 21. pumps according to item 19, at least one of wherein said barrier film and described support member include at least one
Individual periphery aperture and at least one center port.
Item 22. pumps according to item 16, the wherein said pump housing includes polymer.
Item 23. pumps according to item 22, wherein said polymer is that fiber is strengthened.
Item 24. pumps according to item 16, the wherein said pump housing includes limiting toward each other and betwixt described circulation
First rigid walls in space and the second rigid walls.
Item 25. pumps according to item 24, wherein said barrier film includes disk, and wherein said barrier film is roughly parallel to institute
State the first rigid walls and described second rigid walls are maintained in the described cyclic space.
26. pumps according to item 16, wherein said entrance aperture lead in the periphery of described barrier film described in follow
Annular space, and the described cyclic space is led in the near central regions of described barrier film in wherein said output aperture.
27. pumps according to item 16, the wherein said pump housing also includes limiting the first flange of the first wall and limits the
Second flange of two walls, wherein said first wall and described second wall limit the described cyclic space between them, and wherein
Described first flange limits described entrance aperture and described output aperture.
Item 28. pumps according to item 16, wherein said actuation means include at least one electricity powered by alternating current
Magnetic linear actuator.
Item 29. pumps according to item 16, it also includes at least one ferromagnetic element being connected to described actuation means.
Item 30. pumps according to item 16, at least one fluid flow that it also includes being connected with described actuation means passes
Sensor.
Item 31. pumps according to item 16, wherein said material or protective coating have Young's moduluss and arrive in 200MPa
Polymeric organic host between 2GPa.
Item 32. pumps according to item 16, wherein said pump also includes being arranged in the check-valves at described output aperture.
Item 33. pumps according to item 16, wherein said barrier film has plate-like geometry.
A kind of item 34. fluid displacement devices, it includes high flow rate dispensing pump and the membrane pump according to item 16, wherein institute
State the outlet that membrane pump is connected to described dispensing pump.
A kind of item 35. container blender, it includes：
It is suitable to the container of admitting fluid, described container includes flexible material；And
The arrangement pump according to item 16 in the above-described container.
A kind of item 36. pumps, it includes：
Limit the cyclic space the pump housing, the described cyclic space be used for fluid according to loop direction entering from the described cyclic space
Man-hole opening is recycled to the output aperture of the described cyclic space；
Barrier film, described barrier film is roughly parallel to loop direction and is maintained in the described cyclic space；And
Actuation means, described actuation means are suitable to vibrate described barrier film on the direction be approximately perpendicular to loop direction,
Wherein said barrier film includes thering is polymer organic base between 100MPa to 10GPa for the Young's moduluss
The material of matter or protective coating.
37. pumps according to item 36, the polymer organic of wherein said barrier film or described barrier film protective coating
Substrate includes fluoropolymer.
Item 38. pumps according to any one of aforementioned item, wherein said pump also includes at least one sealing member, and its
Described at least one sealing member include fluoropolymer.
Item 39. pumps according to any one of aforementioned item, wherein said pump also includes：
It is connected to the support member of the end of described barrier film,
The ledge of wherein said support member passes through towards the outside of the described pump housing in a sealing fashion, and wherein said
To generate exciting force in the end of described barrier film on the ledge that actuation means are suitable to act on described support member.
Item 40. pumps according to item 39, wherein said support member includes polymeric material, and wherein said support member
Polymeric material identical with the polymeric material of the protective coating of described barrier film.
Item 41. pumps according to item 39, at least one of wherein said barrier film and described support member include at least one
Individual periphery aperture and at least one center port.
Item 42. pumps according to any one of aforementioned item, wherein said pump includes the polymer of fiber reinforcement.
Item 43. pumps according to any one of aforementioned item, the wherein said pump housing includes limiting toward each other and betwixt
First rigid walls of the fixed described cyclic space and the second rigid walls, wherein said barrier film includes disk, and wherein said barrier film is big
Cause to be maintained in the described cyclic space parallel to described first rigid walls and described second rigid walls.
44. pumps according to item 43, wherein said entrance aperture lead in the periphery of described barrier film described in follow
Annular space, and the described cyclic space is led in the near central regions of described barrier film in wherein said output aperture.
45. pumps according to any one of aforementioned item, it is first convex that the wherein said pump housing also includes limiting the first wall
It is empty that edge and the second flange limiting the second wall, wherein said first wall and described second wall limit described circulation between them
Between, and wherein said first flange limits described entrance aperture and described output aperture.
46. pumps according to any one of aforementioned item, wherein said actuation means include being powered by alternating current
At least one electromagnetic linear actuator.
Item 47. pumps according to any one of aforementioned item, it also includes being connected at least one of described actuation means
Ferromagnetic element.
Item 48. pumps according to any one of aforementioned item, it also includes at least one being connected with described actuation means
Flow sensor.
A kind of 49. fluid displacement devices, it include high flow rate dispensing pump and according to any one of aforementioned item every
Membrane pump, wherein said membrane pump is connected to the outlet of described dispensing pump.
A kind of item 50. container blender, it includes：
It is suitable to the container of admitting fluid, described container includes flexible material；And
The arrangement pump according to any one of aforementioned item in the above-described container.
It should be noted that not needing above-mentioned all features it may not be necessary to a part for specific features, and can carry
For one or more features in addition to those described.Further, the order of Expressive Features needs not to be mounting characteristic
Order.
In order to clearly herein under the background of individual embodiment, some features of description can also be in single embodiment
In be provided in combination.On the contrary, the various features in order to succinctly describe in the context of a single embodiment can also be independently
Or be provided with any sub-portfolio.
Describe the solution of benefit, further advantage and problem above for specific embodiment.However, benefit, advantage,
The solution of problem and any benefit, advantage or solution can be led to occur or become more significantly any (one or
Multiple) feature is understood not to the key, needing of any or all claim or necessary feature.
The general understanding illustrating and illustrating the structure aiming to provide various embodiments of embodiments described herein.
Illustrate and illustrate and be not intended to as using the device of structure specifically described herein or method and all elements of system and spy
The detailed and comprehensive description levied.Individual embodiment can also be provided in single embodiment in combination, and on the contrary, in order to
The succinct various features describing in the context of a single embodiment can also independently or with any sub-portfolio be provided.Additionally,
Quoting including each value in the range of this to the value being described with scope.Those of skill in the art only read this description it
Afterwards it will be evident that many other embodiments.Other embodiments can be used and be derived so that can carry out from the disclosure
Structure substitutes, logic substitutes or any change is without deviating from the scope of the present disclosure.Therefore, the disclosure be considered to be exemplary and
It is not restricted.
Claims (15)
1. a kind of pump, it includes：
Limit the pump housing of the cyclic space, the described cyclic space is used for fluid according to loop direction from the access aperture of the described cyclic space
Mouth is recycled to the output aperture of the described cyclic space；
Barrier film, described barrier film is roughly parallel to loop direction and is maintained in the described cyclic space；And
Actuation means, described actuation means are suitable to vibrate described barrier film on the direction be approximately perpendicular to loop direction,
Wherein said barrier film includes thering is polymeric organic host between 100MPa to 10GPa for the Young's moduluss
Material or protective coating.
2. pump according to claim 1, the polymer organic base of wherein said barrier film or described barrier film protective coating
Matter includes fluoropolymer.
3., according to pump in any one of the preceding claims wherein, wherein said pump also includes at least one sealing member, and its
Described at least one sealing member include fluoropolymer.
4., according to pump in any one of the preceding claims wherein, wherein said pump also includes：
It is connected to the support member of the end of described barrier film,
The ledge of wherein said support member passes through towards the outside of the described pump housing in a sealing fashion, and wherein said actuating
To generate exciting force in the end of described barrier film on the ledge that device is suitable to act on described support member.
5. pump according to claim 4, wherein said support member includes polymeric material, and wherein said support member
Polymeric material is identical with the polymeric material of the protective coating of described barrier film.
6. pump according to claim 4, at least one of wherein said barrier film and described support member include at least one
Periphery aperture and at least one center port.
7., according to pump in any one of the preceding claims wherein, wherein said pump includes the polymer of fiber reinforcement.
8. according to pump in any one of the preceding claims wherein, the wherein said pump housing include the first rigid walls relative to each other and
Limit the described cyclic space between second rigid walls, and described first rigid walls and described second rigid walls, wherein said every
Film includes disk, and wherein said barrier film be roughly parallel to described first rigid walls and described second rigid walls be maintained at described in follow
In annular space.
9. pump according to claim 8, described circulation is led in the periphery of described barrier film in wherein said entrance aperture
Space, and the described cyclic space is led in the near central regions of described barrier film in wherein said output aperture.
10., according to pump in any one of the preceding claims wherein, it is first convex that the wherein said pump housing also includes limiting the first wall
Edge and the second flange limiting the second wall, limit the described cyclic space between wherein said first wall and described second wall, and
Wherein said first flange limits described entrance aperture and described output aperture.
11. according to pump in any one of the preceding claims wherein, and wherein said actuation means include being powered by alternating current
At least one electromagnetic linear actuator.
12. according to pump in any one of the preceding claims wherein, and it also includes being connected at least one of described actuation means
Ferromagnetic element.
13. according to pump in any one of the preceding claims wherein, and it also includes at least one being connected with described actuation means
Flow sensor.
A kind of 14. fluid displacement devices, it include high flow rate dispensing pump and according in any one of the preceding claims wherein every
Membrane pump, wherein said membrane pump is connected to the outlet of described dispensing pump.
A kind of 15. container blender, including：
It is suitable to the container of admitting fluid, described container includes flexible material；And
Arrangement in the above-described container according to pump in any one of the preceding claims wherein.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1454290A FR3021074B1 (en) | 2014-05-14 | 2014-05-14 | MEMBRANE PUMP |
| FR1454290 | 2014-05-14 | ||
| PCT/EP2015/060542 WO2015173280A1 (en) | 2014-05-14 | 2015-05-13 | Membrane pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106489026A true CN106489026A (en) | 2017-03-08 |
Family
ID=51063707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201580035533.6A Pending CN106489026A (en) | 2014-05-14 | 2015-05-13 | Membrane pump |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US20150330383A1 (en) |
| EP (1) | EP3143283A1 (en) |
| JP (1) | JP2017516015A (en) |
| KR (1) | KR20160148647A (en) |
| CN (1) | CN106489026A (en) |
| FR (1) | FR3021074B1 (en) |
| IL (1) | IL248868A0 (en) |
| TW (1) | TWI579461B (en) |
| WO (1) | WO2015173280A1 (en) |
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| CN109991150A (en) * | 2017-12-11 | 2019-07-09 | 霍尼韦尔国际公司 | Miniature flow generator for minitype particle object sensor module |
| CN111102176A (en) * | 2018-10-29 | 2020-05-05 | 日本电产株式会社 | Diaphragm sheet for diaphragm pump and diaphragm pump |
| CN111433460A (en) * | 2017-11-10 | 2020-07-17 | 科瓦韦公司 | Fluctuating diaphragm type fluid circulator |
| CN112543844A (en) * | 2018-05-18 | 2021-03-23 | 弗劳恩霍夫应用研究促进协会 | Method and holding device for manufacturing micropump with mechanically preloaded diaphragm actuator |
| CN114127419A (en) * | 2019-07-12 | 2022-03-01 | 艾本德欧洲股份公司 | Control device and method for controlling a sensorless diaphragm pump |
| US11712554B2 (en) | 2016-04-11 | 2023-08-01 | CorWave SA | Implantable pump system having a coaxial ventricular cannula |
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| US11944946B2 (en) | 2013-06-28 | 2024-04-02 | Saint-Gobain Performance Plastics Corporation | Mixing assemblies including magnetic impellers |
| BR112015031637B1 (en) | 2013-06-28 | 2022-01-18 | Saint-Gobain Performance Plastics Corporation | MIXING ASSEMBLIES INCLUDING MAGNETIC IMPELLERS |
| US9968720B2 (en) | 2016-04-11 | 2018-05-15 | CorWave SA | Implantable pump system having an undulating membrane |
| FR3054861B1 (en) * | 2016-08-02 | 2019-08-23 | Zodiac Aerotechnics | METHOD OF CONTROLLING AN ONDULATING MEMBRANE PUMP, AND PILOT SYSTEM OF AN INJUSTING MEMBRANE PUMP |
| EP3600479A1 (en) | 2017-03-31 | 2020-02-05 | Corwave SA | Implantable pump system having a rectangular membrane |
| US10188779B1 (en) | 2017-11-29 | 2019-01-29 | CorWave SA | Implantable pump system having an undulating membrane with improved hydraulic performance |
| FR3074544B1 (en) | 2017-12-05 | 2021-10-22 | Ams R&D Sas | PILOT WAVING DIAPHRAGM CIRCULATOR |
| GB2577710B (en) | 2018-10-03 | 2022-12-14 | Lee Ventus Ltd | Methods and devices for driving a piezoelectric pump |
| GB2576796B (en) | 2018-12-07 | 2020-10-07 | Ttp Ventus Ltd | Improved valve |
| GB2583688B (en) * | 2019-01-23 | 2022-02-09 | Ttp Ventus Ltd | Improved valve |
| US11828374B2 (en) | 2018-12-07 | 2023-11-28 | Ttp Ventus Ltd. | Valve |
| AU2020243579A1 (en) | 2019-03-15 | 2021-10-07 | CorWave SA | Systems and methods for controlling an implantable blood pump |
| WO2021176423A1 (en) | 2020-03-06 | 2021-09-10 | CorWave SA | Implantable blood pumps comprising a linear bearing |
| GB2597942B (en) | 2020-08-10 | 2022-08-03 | Ttp Ventus Ltd | Pump for microfluidic device |
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2014
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-
2015
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- 2015-05-13 WO PCT/EP2015/060542 patent/WO2015173280A1/en active Application Filing
- 2015-05-13 EP EP15724200.9A patent/EP3143283A1/en not_active Withdrawn
- 2015-05-13 US US14/711,225 patent/US20150330383A1/en not_active Abandoned
- 2015-05-13 KR KR1020167033088A patent/KR20160148647A/en not_active Application Discontinuation
- 2015-05-13 CN CN201580035533.6A patent/CN106489026A/en active Pending
- 2015-05-13 JP JP2016567234A patent/JP2017516015A/en not_active Ceased
-
2016
- 2016-11-09 IL IL248868A patent/IL248868A0/en unknown
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| US11712554B2 (en) | 2016-04-11 | 2023-08-01 | CorWave SA | Implantable pump system having a coaxial ventricular cannula |
| US11512689B2 (en) | 2017-11-10 | 2022-11-29 | CorWave SA | Undulating-membrane fluid circulator |
| CN111433460A (en) * | 2017-11-10 | 2020-07-17 | 科瓦韦公司 | Fluctuating diaphragm type fluid circulator |
| CN111433460B (en) * | 2017-11-10 | 2022-10-04 | 科瓦韦公司 | Fluctuating diaphragm type fluid circulator |
| CN109991150B (en) * | 2017-12-11 | 2022-07-08 | 霍尼韦尔国际公司 | Miniature airflow generator for miniature particulate matter sensor module |
| CN109991150A (en) * | 2017-12-11 | 2019-07-09 | 霍尼韦尔国际公司 | Miniature flow generator for minitype particle object sensor module |
| US11808691B2 (en) | 2017-12-11 | 2023-11-07 | Honeywell International Inc. | Micro airflow generator for miniature particulate matter sensor module |
| CN108372669A (en) * | 2018-03-06 | 2018-08-07 | 南京道隆生物科技有限公司 | A kind of sanitation-grade diaphragm and its manufacturing process |
| CN112543844A (en) * | 2018-05-18 | 2021-03-23 | 弗劳恩霍夫应用研究促进协会 | Method and holding device for manufacturing micropump with mechanically preloaded diaphragm actuator |
| CN112543844B (en) * | 2018-05-18 | 2022-11-25 | 弗劳恩霍夫应用研究促进协会 | Method and holding device for manufacturing micropump with mechanically preloaded diaphragm actuator |
| CN111102176A (en) * | 2018-10-29 | 2020-05-05 | 日本电产株式会社 | Diaphragm sheet for diaphragm pump and diaphragm pump |
| CN114127419A (en) * | 2019-07-12 | 2022-03-01 | 艾本德欧洲股份公司 | Control device and method for controlling a sensorless diaphragm pump |
| CN114127419B (en) * | 2019-07-12 | 2024-04-26 | 艾本德欧洲股份公司 | Control device and method for controlling a sensorless diaphragm pump |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI579461B (en) | 2017-04-21 |
| EP3143283A1 (en) | 2017-03-22 |
| KR20160148647A (en) | 2016-12-26 |
| IL248868A0 (en) | 2017-01-31 |
| TW201544703A (en) | 2015-12-01 |
| FR3021074A1 (en) | 2015-11-20 |
| WO2015173280A1 (en) | 2015-11-19 |
| JP2017516015A (en) | 2017-06-15 |
| FR3021074B1 (en) | 2016-05-27 |
| US20150330383A1 (en) | 2015-11-19 |
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Application publication date: 20170308 |