CN106441154A - Surface form detection apparatus and detection method for aspheric-surface element - Google Patents
Surface form detection apparatus and detection method for aspheric-surface element Download PDFInfo
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- CN106441154A CN106441154A CN201610991721.2A CN201610991721A CN106441154A CN 106441154 A CN106441154 A CN 106441154A CN 201610991721 A CN201610991721 A CN 201610991721A CN 106441154 A CN106441154 A CN 106441154A
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- spherical element
- interferometer
- detection apparatus
- optical flat
- shape detection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The invention provides a surface form detection apparatus for an aspheric-surface element. The detection apparatus comprises an interferometer, an annular optical flat unit, a levelling gasket, a zero compensator and a to-be-detected mirror surface mounting seat. An optical axis direction of the interferometer is parallel to an optical axis direction of the zero compensator. In addition, the invention also provides a surface form detection method for an aspheric-surface element. With the apparatus and the method, the surface form detection error of the aspheric-surface element is reduced effectively; and the precision of aspheric surface detection by using a zero compensation method is improved.
Description
Technical field
The present invention relates to optical element detection technique field, more particularly, to a kind of non-spherical element surface shape detection apparatus and inspection
Survey method.
Background technology
Modern lithographic technologies require plane in lithographic objective system, sphere, the face shape error of the optical element such as aspherical
Root mean square reaches sub- nanometer scale.The optical manufacturing in current forward position and detection technique can easily support spherical mirror and plane
Sub- nanometer scale surface figure accuracy realized by mirror.However, the high-precision surface shape processing of aspherical mirror and detection technique are still relatively difficult
Complexity, generally adopts different detection methods and detection means for different aspherical mirrors, and null compensator testing be realize non-
The most frequently used technology of the high precision test of spherical mirror face shape error.During using null compensator testing detection aspherical mirror face shape error,
The X/Y/Z translation position of zero compensation system and pitching/beat attitude must accurately determine, to realize zero compensation system aspheric
Face glistening light of waves axle and interferometer optical axis coincidence, otherwise will produce larger coma in non-spherical element surface testing result, reduce
Measuring accuracy.
Content of the invention
Present invention seek to address that the problem that in prior art, non-spherical element surface testing coma is big, measuring accuracy is poor.
The present invention provides a kind of non-spherical element surface shape detection apparatus, includes successively：Interferometer, annular optical flat, leveling pad
The optical axis direction of circle, zero compensation machine and minute surface mounting seat to be measured, the optical axis direction of described interferometer and described zero compensation machine
Parallel.Reduce non-spherical element surface testing error, improve null compensator testing and detect aspheric measuring accuracy.
In certain embodiments, described interferometer is fizeau interferometer.
In certain embodiments, when the hollow region of described annular optical flat is used for interferometric method measurement non-spherical element face shape
When, effective clear aperture of the internal diameter >=described zero compensation machine of described annular optical flat.
In certain embodiments, described leveling packing ring is the annular spacer ring of metal material aluminum, it is further preferred that institute
State the annular spacer ring that leveling packing ring is aluminum, described leveling packing ring is placed in incident light end face and the institute of described zero compensation machine
State between the lower surface of annular optical flat.
In certain embodiments, described annular optical flat is annular, preferably ring-shaped glass, it is further preferred that described
Annular optical flat is the parallel plate glass of the ring-type of hollow.The upper and lower surface of described annular optical flat is parallel to each other.
In certain embodiments, the ring belt area of the upper surface of described annular optical flat is interference fringe surveillance zone.
In certain embodiments, the inside of the ring belt area reflected light of upper surface of described annular optical flat and described interferometer
The interference fringe that reference light is formed is zero striation.
In certain embodiments, the surface normal of described annular optical flat is parallel with the optical axis of described zero compensation machine.
In certain embodiments, described non-spherical element surface shape detection apparatus also include interferometer pose adjustment assembly, benefit
Repay device pose adjustment assembly and mirror plane pose to be measured adjustment assembly, described interferometer is arranged on interferometer pose adjustment assembly,
Described minute surface mounting seat to be measured is arranged on described mirror plane pose adjustment assembly to be measured, and described zero compensation machine is arranged on described dry
Between interferometer and described minute surface mounting seat to be measured and be arranged on described compensator pose adjustment assembly.
Present invention also offers a kind of non-spherical element surface testing method, this detection method is：Will be to be detected aspherical
Element is arranged on and is detected in the minute surface mounting seat to be measured in the non-spherical element surface shape detection apparatus of present invention offer.
The present invention is felt relieved integration techno logy by laser, grinds leveling packing ring so that the optical surface method up and down of annular optical flat
Line is parallel with the optical axis of zero compensation machine.Before carrying out non-spherical element surface testing, adjust zero compensation machine and annular flat
Brilliant overall attitude is so that what the ring belt area reflected light of upper surface of annular optical flat and Feisuo interferometer internal reference light were formed
Interference fringe is zero striation, that is, ensure that zero compensation systematic optical axis test the parallel of optical axis with Feisuo interferometer, reduce
Due to zero compensation machine and the interferometer optical axis not parallel measure error causing during Aspherical-surface testing.
Technical scheme compared with prior art, has the beneficial effects that：Reduce non-spherical element surface testing
During due to zero compensation machine and the not parallel measure error causing of interferometer optical axis.
Brief description
Fig. 1 is the structural representation of non-spherical element surface shape detection apparatus.
In figure, 10, interferometer, 20, annular optical flat, 30, leveling packing ring, 40, zero compensation machine, 50, minute surface to be measured installs
Seat.
Specific embodiment
Below in conjunction with the accompanying drawings the specific embodiment of the present invention is described further, the example of described embodiment is in accompanying drawing
Shown in, wherein same or similar label represents same or similar element or has same or like function from start to finish
Element.Embodiment below with reference to Description of Drawings is exemplary, is only used for explaining the present invention, and can not be construed to this
The restriction of invention.
Following disclosure provides many different embodiments or example for realizing the different structure of the present invention.For letter
Change disclosure of the invention, hereinafter the part and setting of specific examples is described.Certainly, they are only merely illustrative, and
Purpose does not lie in the restriction present invention.Additionally, the present invention can in different examples repeat reference numerals and/or letter.This heavy
It is for purposes of simplicity and clarity again, itself do not indicate the relation between discussed various embodiment and/or setting.This
Outward, the invention provides various specific technique and material example, but those of ordinary skill in the art can be appreciated that
The applicable property of other techniques and/or the use of other materials.In addition, fisrt feature described below second feature it
" on " structure can include the first and second features and be formed as the embodiment of directly contact it is also possible to include other feature shape
Become the embodiment between the first and second features, such first and second features may not be directly contact.
In describing the invention, it should be noted that unless otherwise prescribed and limit, term " installation ", " being connected ",
" connection " should be interpreted broadly, for example, it may be the connection of mechanical connection or electrical connection or two element internals, can
To be to be joined directly together it is also possible to be indirectly connected to by intermediary, for the ordinary skill in the art, can basis
Concrete condition understands the concrete meaning of above-mentioned term.
With reference to explained below and accompanying drawing it will be clear that these and other aspects of embodiments of the invention.In these descriptions
In accompanying drawing, specifically disclose some particular implementation in embodiments of the invention, to represent the enforcement implementing the present invention
Some modes of the principle of example are but it is to be understood that the scope of embodiments of the invention is not limited.On the contrary, the present invention
Embodiment includes falling into all changes in the range of the spirit of attached claims and intension, modification and equivalent.
Referring to Fig. 1, to the embodiment of the present invention, the non-spherical element surface shape detection apparatus proposing and method are retouched in detail
State.
As shown in figure 1, the non-spherical element surface shape detection apparatus 100 proposing for the embodiment of the present invention include successively：Interfere
Instrument 10, annular optical flat 20, leveling packing ring 30, zero compensation machine 40 and minute surface mounting seat 50 to be measured, the optical axis of described interferometer 10
Direction is parallel with the optical axis direction of described zero compensation machine 40.The present invention detects aspherical optical element face by null compensator testing
During shape, make optical axis direction and the interferometer optical axis direction keeping parallelism of zero compensation machine, to reduce non-spherical element surface testing
Error, improve the accuracy of detection that null compensator testing detects non-spherical element face shape.
Wherein, described annular optical flat and the non-spherical element surface shape detection apparatus that provide for the present invention of described leveling packing ring
Core component.Felt relieved integration techno logy by laser, grind leveling packing ring so that the normal of optical surface up and down and zero of annular optical flat
The optical axis of position compensator is parallel.Before carrying out non-spherical element surface testing, adjustment zero compensation machine is whole with annular optical flat
Body attitude is so that the interference fringe that the ring belt area reflected light of upper surface of annular optical flat is formed with interferometer internal reference light is
Zero striation, thus ensure that the optical axis of zero compensation machine tests the parallel of optical axis with interferometer, reduces non-spherical element
Due to zero compensation machine and the not parallel measure error causing of interferometer optical axis during surface testing.
In a particular embodiment, described interferometer 10 is fizeau interferometer.
In a particular embodiment, described annular optical flat 20 is annular, and the hollow region of annulus is non-for interferometric method measurement
The thang-kng during shape of aspherical elements face, the ring belt area of annular optical flat 20 upper surface is interference fringe surveillance zone.
In a particular embodiment, effective clear aperture of the internal diameter >=described zero compensation machine 40 of described annular optical flat 20.
In a particular embodiment, described leveling packing ring 30 is the annular spacer ring of aluminum, and described leveling packing ring 30 is placed in
Between the lower surface of the incident light end face of described zero compensation machine 40 and described annular optical flat 20.Debug skill using laser centering
Art, the optical axis of zero position of testing compensator 40, grinds leveling packing ring 30 accordingly and makes annular optical flat 20 surface normal and zero compensation
The optical axis of device 40 is parallel.Observe the interference fringe of annular optical flat 20, adjustment zero compensation machine 40 and ring by Feisuo interferometer 10
The overall attitude of shape optical flat 20 so as to be zero striation, that is, ensure that zero compensation machine 40 optical axis and Feisuo interferometer 10 are surveyed
Try the parallel of optical axis.
In a particular embodiment, the upper and lower surface of described annular optical flat 20 is parallel to each other.
In a particular embodiment, the ring belt area of the upper surface of described annular optical flat 20 is interference fringe surveillance zone.
In a particular embodiment, the ring belt area reflected light of upper surface of described annular optical flat 20 and described interferometer 10
The interference fringe that internal reference light is formed is zero striation.
In a particular embodiment, the surface normal of described annular optical flat 20 is parallel with the optical axis of described zero compensation machine 40.
In a particular embodiment, described non-spherical element surface shape detection apparatus 100 also include interferometer pose adjustment assembly
(in figure is not shown for (not shown), compensator pose adjustment assembly (not shown) and mirror plane pose to be measured adjustment assembly
Go out), described interferometer 10 is arranged in interferometer pose adjustment assembly (not shown), and described minute surface mounting seat 50 to be measured is pacified
It is contained in described mirror plane pose adjustment assembly (not shown) to be measured, described zero compensation machine 40 is arranged on described interferometer 10
And described minute surface mounting seat 50 to be measured between and be arranged in described compensator pose adjustment assembly (not shown).
Present invention also offers a kind of non-spherical element surface testing method, this detection method is：Will be to be detected aspherical
Element is arranged on and is detected in the minute surface mounting seat to be measured in the non-spherical element surface shape detection apparatus of present invention offer.
Technical scheme has and has the beneficial effects that：Reduce during non-spherical element surface testing due to zero
Position compensator and the not parallel measure error causing of interferometer optical axis.
Those skilled in the art are appreciated that to realize all or part step that above-described embodiment method carries
Suddenly the program that can be by completes come the hardware to instruct correlation, and described program can be stored in a kind of computer-readable storage medium
In matter, this program upon execution, including one or a combination set of the step of embodiment of the method.
Additionally, can be integrated in a processing module in each functional unit in each embodiment of the present invention it is also possible to
It is that unit is individually physically present it is also possible to two or more units are integrated in a module.Above-mentioned integrated mould
Block both can be to be realized in the form of hardware, it would however also be possible to employ the form of software function module is realized.Described integrated module is such as
Fruit using in the form of software function module realize and as independent production marketing or use when it is also possible to be stored in a computer
In read/write memory medium.
Storage medium mentioned above can be read-only storage, disk or CD etc..
In the description of this specification, reference term " embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means specific features, structure, material or the spy describing with reference to this embodiment or example
Point is contained at least one embodiment or the example of the present invention.In this manual, to the schematic representation of above-mentioned term not
Necessarily refer to identical embodiment or example.And, the specific features of description, structure, material or feature can be any
One or more embodiments or example in combine in an appropriate manner.
Although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, permissible
Understand and can carry out multiple changes, modification, replacement to these embodiments without departing from the principles and spirit of the present invention
And modification, the scope of the present invention by claims and its equivalent limits.
Claims (10)
1. a kind of non-spherical element surface shape detection apparatus are it is characterised in that include successively：Interferometer, annular optical flat, leveling pad
The optical axis direction of circle, zero compensation machine and minute surface mounting seat to be measured, the optical axis direction of described interferometer and described zero compensation machine
Parallel.
2. Aspherical-surface testing device according to claim 1 is it is characterised in that described interferometer is fizeau interferometer.
3. Aspherical-surface testing device according to claim 1 it is characterised in that described annular optical flat internal diameter >=described zero
Effective clear aperture of position compensator.
4. non-spherical element surface shape detection apparatus according to claim 1 are it is characterised in that described leveling packing ring is metal
The annular spacer ring of material, described leveling packing ring is placed under the incident light end face and described annular optical flat of described zero compensation machine
Between surface.
5. non-spherical element surface shape detection apparatus according to claim 1 are it is characterised in that described annular optical flat is ring-type
Glass, the upper and lower surface of described annular optical flat is parallel to each other.
6. non-spherical element surface shape detection apparatus according to claim 1 it is characterised in that described annular optical flat upper table
The ring belt area in face is interference fringe surveillance zone.
7. non-spherical element surface shape detection apparatus according to claim 6 it is characterised in that described annular optical flat upper table
The ring belt area reflected light in face is zero striation with the interference fringe of the internal reference light formation of described interferometer.
8. non-spherical element surface shape detection apparatus according to claim 1 it is characterised in that described annular optical flat surface
Normal is parallel with the optical axis of described zero compensation machine.
9. non-spherical element surface shape detection apparatus according to claim 1 are adjusted it is characterised in that also including compensator pose
Whole group part and mirror plane pose to be measured adjustment assembly, described minute surface mounting seat to be measured is arranged on described mirror plane pose to be measured and adjusts assembly
On, described zero compensation machine is arranged between described interferometer and described minute surface mounting seat to be measured and is arranged on described compensator position
On appearance adjustment assembly.
10. a kind of non-spherical element surface testing method is wanted it is characterised in that non-spherical element to be detected is arranged on right such as
Ask and detected in the minute surface mounting seat to be measured in the non-spherical element surface shape detection apparatus in any one of 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610991721.2A CN106441154A (en) | 2016-11-10 | 2016-11-10 | Surface form detection apparatus and detection method for aspheric-surface element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610991721.2A CN106441154A (en) | 2016-11-10 | 2016-11-10 | Surface form detection apparatus and detection method for aspheric-surface element |
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| CN106441154A true CN106441154A (en) | 2017-02-22 |
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| CN201610991721.2A Pending CN106441154A (en) | 2016-11-10 | 2016-11-10 | Surface form detection apparatus and detection method for aspheric-surface element |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108195309A (en) * | 2017-12-28 | 2018-06-22 | 中国科学院长春光学精密机械与物理研究所 | A kind of measuring method of the face shape error of off-axis aspheric surface element |
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| CN108195309A (en) * | 2017-12-28 | 2018-06-22 | 中国科学院长春光学精密机械与物理研究所 | A kind of measuring method of the face shape error of off-axis aspheric surface element |
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Application publication date: 20170222 |