CN106435742A - 退火设备及其退火工艺 - Google Patents
退火设备及其退火工艺 Download PDFInfo
- Publication number
- CN106435742A CN106435742A CN201610921638.8A CN201610921638A CN106435742A CN 106435742 A CN106435742 A CN 106435742A CN 201610921638 A CN201610921638 A CN 201610921638A CN 106435742 A CN106435742 A CN 106435742A
- Authority
- CN
- China
- Prior art keywords
- insulated cavity
- heat
- protective element
- heated protective
- annealing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000137 annealing Methods 0.000 title claims abstract description 65
- 238000000034 method Methods 0.000 title claims abstract description 26
- 238000010438 heat treatment Methods 0.000 claims abstract description 22
- 238000009413 insulation Methods 0.000 claims abstract description 12
- 238000001816 cooling Methods 0.000 claims abstract description 9
- 230000001681 protective effect Effects 0.000 claims description 35
- 239000010453 quartz Substances 0.000 claims description 23
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 23
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 9
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052736 halogen Inorganic materials 0.000 claims description 3
- 150000002367 halogens Chemical class 0.000 claims description 3
- 239000000498 cooling water Substances 0.000 claims description 2
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 claims description 2
- 229910052863 mullite Inorganic materials 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims 1
- 238000005265 energy consumption Methods 0.000 abstract description 6
- 239000013078 crystal Substances 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000011534 incubation Methods 0.000 description 3
- 238000013473 artificial intelligence Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000740 bleeding effect Effects 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 206010020852 Hypertonia Diseases 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000008642 heat stress Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011214 refractory ceramic Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/02—Heat treatment
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610921638.8A CN106435742B (zh) | 2016-10-21 | 2016-10-21 | 退火设备及其退火工艺 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610921638.8A CN106435742B (zh) | 2016-10-21 | 2016-10-21 | 退火设备及其退火工艺 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106435742A true CN106435742A (zh) | 2017-02-22 |
CN106435742B CN106435742B (zh) | 2019-06-28 |
Family
ID=58176792
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610921638.8A Active CN106435742B (zh) | 2016-10-21 | 2016-10-21 | 退火设备及其退火工艺 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN106435742B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111463154A (zh) * | 2020-05-18 | 2020-07-28 | 浙江大学 | 一种高温臭氧氧化退火装置 |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN200996030Y (zh) * | 2006-11-29 | 2007-12-26 | 中国第一重型机械集团公司 | 大型立式单侧开合热处理炉 |
CN201016120Y (zh) * | 2007-02-02 | 2008-02-06 | 厦门钨业股份有限公司 | 连续式三室气冷真空退火炉 |
CN201359446Y (zh) * | 2008-12-31 | 2009-12-09 | 北京七星华创电子股份有限公司 | 300mm立式氧化炉石英舟升降装置 |
CN101907397A (zh) * | 2010-09-21 | 2010-12-08 | 山东大学 | 可移动对开垂直管式气氛炉装置 |
CN201962403U (zh) * | 2011-01-11 | 2011-09-07 | 西安华恒新能科技有限公司 | 移动式出料多晶硅铸锭炉 |
CN103000496A (zh) * | 2013-01-08 | 2013-03-27 | 河南诺巴迪材料科技有限公司 | 快速升降温退火炉 |
CN103014257A (zh) * | 2012-12-12 | 2013-04-03 | 肇庆宏旺金属实业有限公司 | 连续式退火炉 |
CN203231642U (zh) * | 2013-04-25 | 2013-10-09 | 安徽贝意克设备技术有限公司 | 一种滑轨式快速升降温炉 |
CN103436682A (zh) * | 2013-09-09 | 2013-12-11 | 江苏华旺科技有限公司 | 一种多规格管式连续退火炉的智能控制***和方法 |
CN205313629U (zh) * | 2016-01-20 | 2016-06-15 | 郭金锋 | 一种用于金属表面热处理的连续退火炉 |
CN206204484U (zh) * | 2016-10-21 | 2017-05-31 | 珠海鼎泰芯源晶体有限公司 | 退火设备 |
-
2016
- 2016-10-21 CN CN201610921638.8A patent/CN106435742B/zh active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN200996030Y (zh) * | 2006-11-29 | 2007-12-26 | 中国第一重型机械集团公司 | 大型立式单侧开合热处理炉 |
CN201016120Y (zh) * | 2007-02-02 | 2008-02-06 | 厦门钨业股份有限公司 | 连续式三室气冷真空退火炉 |
CN201359446Y (zh) * | 2008-12-31 | 2009-12-09 | 北京七星华创电子股份有限公司 | 300mm立式氧化炉石英舟升降装置 |
CN101907397A (zh) * | 2010-09-21 | 2010-12-08 | 山东大学 | 可移动对开垂直管式气氛炉装置 |
CN201962403U (zh) * | 2011-01-11 | 2011-09-07 | 西安华恒新能科技有限公司 | 移动式出料多晶硅铸锭炉 |
CN103014257A (zh) * | 2012-12-12 | 2013-04-03 | 肇庆宏旺金属实业有限公司 | 连续式退火炉 |
CN103000496A (zh) * | 2013-01-08 | 2013-03-27 | 河南诺巴迪材料科技有限公司 | 快速升降温退火炉 |
CN203231642U (zh) * | 2013-04-25 | 2013-10-09 | 安徽贝意克设备技术有限公司 | 一种滑轨式快速升降温炉 |
CN103436682A (zh) * | 2013-09-09 | 2013-12-11 | 江苏华旺科技有限公司 | 一种多规格管式连续退火炉的智能控制***和方法 |
CN205313629U (zh) * | 2016-01-20 | 2016-06-15 | 郭金锋 | 一种用于金属表面热处理的连续退火炉 |
CN206204484U (zh) * | 2016-10-21 | 2017-05-31 | 珠海鼎泰芯源晶体有限公司 | 退火设备 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111463154A (zh) * | 2020-05-18 | 2020-07-28 | 浙江大学 | 一种高温臭氧氧化退火装置 |
CN111463154B (zh) * | 2020-05-18 | 2023-02-14 | 浙江大学 | 一种高温臭氧氧化退火装置 |
Also Published As
Publication number | Publication date |
---|---|
CN106435742B (zh) | 2019-06-28 |
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Legal Events
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C06 | Publication | ||
PB01 | Publication | ||
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SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20170407 Address after: 519085 Guangdong province Zhuhai city road two Jinding Industrial Area high-tech zone on the south side of A1 building, Rui Applicant after: ZHUHAI DINGTAI XINYUAN CRYSTAL CO.,LTD. Address before: 100080 Haidian District street, Haidian, building B, block 10, level 340, level 3, Applicant before: BEIJING DINGTAI XINYUAN TECHNOLOGY DEVELOPMENT Co.,Ltd. |
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TA01 | Transfer of patent application right |
Effective date of registration: 20170808 Address after: 100080 Haidian District street, Haidian, building B, block 10, level 340, level 3, Applicant after: BEIJING DINGTAI XINYUAN TECHNOLOGY DEVELOPMENT Co.,Ltd. Address before: 519085 Guangdong province Zhuhai city road two Jinding Industrial Area high-tech zone on the south side of A1 building, Rui Applicant before: ZHUHAI DINGTAI XINYUAN CRYSTAL CO.,LTD. |
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TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20170823 Address after: 519085 Guangdong province Zhuhai city road two Jinding Industrial Area high-tech zone on the south side of A1 building, Rui Applicant after: ZHUHAI DINGTAI XINYUAN CRYSTAL CO.,LTD. Address before: 100080 Haidian District street, Haidian, building B, block 10, level 340, level 3, Applicant before: BEIJING DINGTAI XINYUAN TECHNOLOGY DEVELOPMENT Co.,Ltd. |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Annealing equipment and its annealing process Granted publication date: 20190628 Pledgee: Hengqin Financial Investment International Finance Leasing Co.,Ltd. Pledgor: ZHUHAI DINGTAI XINYUAN CRYSTAL CO.,LTD. Registration number: Y2024980025500 |