CN106435511A - Metalized film vacuum coating device provided with novel film conveying mechanism - Google Patents
Metalized film vacuum coating device provided with novel film conveying mechanism Download PDFInfo
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- CN106435511A CN106435511A CN201610836698.XA CN201610836698A CN106435511A CN 106435511 A CN106435511 A CN 106435511A CN 201610836698 A CN201610836698 A CN 201610836698A CN 106435511 A CN106435511 A CN 106435511A
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- film feeding
- film
- chamber
- feeding mechanism
- evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention provides a metalized film vacuum coating device provided with a novel film conveying mechanism. The metalized film vacuum coating device comprises a vacuum coating chamber and an evaporation drum arranged in the vacuum coating chamber. A film conveying mechanism is fixedly installed on the left side of the evaporation drum. A coiling mechanism is fixedly installed on the right side of a cooling drum. Two evaporation crucibles are arranged below the cooling drum. The film conveying mechanism comprises a vertical base plate, a reel installation seat arranged on the base plate, a film conveying reel rotationally fixed to the reel installation seat, and a driving part driving the film conveying reel to rotate. Compared with the prior art, the metalized film vacuum coating device has the following beneficial effects that a metalized film can be replaced fast, an upper supporting seat can rotate up and down around a hinge pin at the left end of a lower supporting seat through tight screwing or loosening of a fixed device, up and down opening or closing of a film uncoiling roller supporting mechanism are achieved, and replacement of the film conveying reel is achieved fast.
Description
Technical field
The present invention relates to metallized film manufacturing technology field, a kind of specifically metal for being provided with new film feeding mechanism
Change film vacuum coating apparatus.
Background technology
The extensive work of development, particularly capacitor with packaging metallized film with modern membrane science technology
Industry is used, and huge film production and processing film industry are formed in the world.Household electrical appliance, electric apparatus, electronic product with
And packaging product demand increases sharply, so that the demand of metallized film is continuously increased, so as to produce to high efficiency, Gao Xing
Energy, multi-functional film vapor deposition device requirement are more and more urgent.
Film vapor deposition equipment integrates machinery, vacuum, plated film, the multidisciplinary technology such as freeze, automatically control, be in Gao Zhen
Under the conditions of Altitude, aluminum or zinc are evaporated on plastic film substrate by (4 × 10-2Pa) by high-temperature evaporation, so that plastics are thin
A kind of metallized high-tech sophisticated equipment of film base material.Can be widely used in the steaming of the plastic film substrates such as BOPP, OPP, PET, PC
Aluminizer and zinc-aluminium composite membrane.
Content of the invention
The invention aims to defect of the prior art is solved, a kind of metal for being provided with new film feeding mechanism is provided
Change film vacuum coating apparatus, can be suitable for different size width metal film, position adjustable and accurate.
To achieve these goals, technical scheme is as follows：
A kind of metallized film vacuum coater for being provided with new film feeding mechanism, including vacuum film coating chamber and located at vacuum coating
Indoor evaporation drum, the left side of the evaporation drum is installed with film feeding mechanism, and the right side of the cooler drum is installed with
Rolling-up mechanism, the lower section of the cooler drum is provided with two evaporation crucibles, and the film feeding mechanism includes the substrate that erects, is located at base
The drive that spool mounting seat, the film feeding spool being rotatably fixed in spool mounting seat on plate and driving film feeding spool are rotated
Moving part, is additionally provided with multiple fixing idler rollers and floating lever on the substrate, one end of the floating lever is articulated with substrate, separately
One end is movable end, and the floating lever is provided with movable idler roller, and the activity idler roller is located at two adjacent fixing tensionings
Below the midpoint of the axis line of roller, also supporting mechanism is included, the supporting mechanism includes lower bearing support, upper branching holder and consolidates
Determine device, on the upper branching holder, be provided with downward opening upper half-round slot, the diameter phase of the lower half circular groove and upper half-round slot
The left end of lower bearing support is connected to by bearing pin hinge with, the upper branching holder left end, the fixing device include bearing, pole and
Fixed handle, shown pole one end is fixed on bearing, and the pole other end is threaded with fixed handle, the fixing dress
The bearing that puts is hinged by bearing pin and is connected to the right-hand member of lower bearing support, and the upper branching holder right-hand member is provided with the notch for running through up and down.
When detection sensor detects film feeding floating lever and moves upwards, then control unit is notified, control unit controls phase
The film feeding motor film feeding that answers；When dynamic detection sensor detects film feeding floating lever and moves downward, then notify control unit, control
Unit controls corresponding film feeding motor to stop, and fixing device is tightened or unclamped and can achieve upper branching holder around lower bearing support left end
Bearing pin rotates up and down, realizes film decoiling roller supporting device and opens up and down or close, quickly realizes the replacing of film feeding spool.
Preferably, the actuator includes film feeding motor, by the synchronous pulley on film feeding spool spindle nose, is passed with Timing Belt
Flowing mode realizes the active film feeding of metallized film.
Preferably, the rolling-up mechanism includes to cut support and winding support, and the cutting support is provided with transmitting device
And cutter sweep, the winding support is provided with wind-up roll, and the transmitting device includes splicing rotating shaft, rolls straight rotating shaft and cutting turns
Axle, the cutter sweep includes cutter shaft fixed support, cutter shaft, tool rest and cutter, the Cutting tool installation manner on tool rest, the tool rest
It is sleeved on cutter shaft, the cutter shaft is on cutter shaft fixed mount, and the tool rest is formed by upper half annulus and the linking of lower half annulus,
The upper half annulus and lower half annulus one end are hinged, and the other end is by interface to setting, and the upper half annulus is provided with and is connected
The vertical screwed hole in face, the correspondence position of the lower half annulus is provided with through hole, and screw through the through hole and is fastened on the spiral shell
Two semicircular ring are connected by the hole, so that tool rest is fixed on cutter shaft.
Metallized film after plated film is transmitted to splicing rotating shaft, passes sequentially through the straight rotating shaft of rolling.Cutting rotating shaft, reaches
At wind-up roll, carry out smooth force feed to metallized film by arranging the straight rotating shaft of rolling, the planarization of cutting is improved, by tool rest control
Depth of cut of the cutter processed to material, thin-film material is divided into the strip of required width while winding, is easy to later process work
People takes, and improves production efficiency, tool rest can facilitate from cutter shaft dismantle, if unclamp soket head cap screw, upper half annulus with
Lower half annulus can be relatively rotated with bearing pin as axle, be separated from each other the interface of two semicircular ring, and whole tool rest can then facilitate
Ground is directly removed from cutter shaft, and need not more dismantle cutter shaft without the need for the removal of inserts from cutter shaft, so as to improving efficiency and reducing labor
Momentum.
Preferably, the cutter shaft is provided with graduation mark.
Cutter shaft is provided with graduation mark, is easy to adjust the position of tool rest, controls the width of the strip form film for processing, need not
Gage measuring is used when adjusting, reduce the time of the operation, a certain degree of improve production efficiency.
Preferably, the cutter head of the cutter is triangular in shape, and two at point of a knife side all has cutting edge.
Two sides at point of a knife all have cutting edge, and when being easy to bundling to start, blade is pierced into thin-film material.
Preferably, the upper half annulus internal ring top is provided with keyway.
There is keyway at the internal ring of upper half annulus, with corresponding with the key on cutter shaft, prevent tool rest from rotating with respect to cutter shaft.More
Even if importantly, after bolt is laid down, which is made to be stuck on key as the key above keyway and cutter shaft coordinates, in lower section lower half circle
Under ring action of gravity, upper half annulus also can hang on cutter shaft and not drop, and this dismounting to tool rest becomes advantageously, can
Improve work efficiency.
Preferably, the evaporation drum includes roller set, roll body, runner pipe, and the roller set concentric locking collar is located at outside roll body, the roller
Cooling chamber is formed between body and roller set, the cooling intracavity is filled with coolant, and the roll body outer shroud is cased with thermal insulation layer, the stream
Siphunculus is included positioned at the cooling tube of cooling chamber and positioned at heat-insulated in the layer return duct, described cooling tube one end and return line flow
Logical, the roller set is respectively arranged at two ends with first flange and second flange, and the first flange is provided with spindle nose component, described axle
The outlet pipe that head assembly includes water inlet pipe and is arranged concentrically in the water inlet pipe, described water inlet pipe one end is connected with cooling tube,
Described outlet pipe one end and return duct circulation, the second flange is connected with line shaft.
During plated film, thin film is sent on evaporation drum, and by evaporation source, coating raw material is evaporated postadhesion in film surface.
Coolant supply arrangement is connected with inlet, is passed through cooling water, and cooling water is entered in cooling tube, roller set inwall directly with cooling
Liquid is contacted, and the heat that roller is put quickly is transmitted in coolant, and cooling tube is immersed in coolant, by the heat in coolant
It is transmitted in cooling tube, heating after the cooling water coke slurry in cooling tube, the cooling water of heating is flowed out from return duct, flow back pipe outer wall
Wrapped up by thermal insulation layer so that the heat in return duct will not be diffused further in coolant, the water in return duct is from water outlet
Pipe flow goes out.
Preferably, in the roll body, expansion tube is provided with, one section of the expansion tube is connected with cooling chamber, and the expansion tube is another
End seal is closed, and is provided with piston in the middle part of the expansion tube.
Due to the coolant in cooling chamber can expanded by heating, coolant can produce expansion after being heated, due to expansion tube with
Coolant is connected, and coolant enters into compression piston movement in expansion tube, and when coolant returns to original volume, piston can bounce back
To original position, it is ensured that the intrinsic pressure balance of coolant.
Preferably, described evaporation crucible include for accommodate heated material accommodating chamber, be centered around outside the accommodating chamber
The heating chamber that encloses and the outer wall for surrounding the heating chamber, the heating intracavity is sequentially provided with from top to bottom for ensureing crucible
The temperature of evaporation mouth higher than evaporation material condensation point and the top heating unit of independent temperature control, is located under the independent temperature control in crucible periphery
Portion's heating unit, the heating top of chamber is provided with the runner for passing through for the heated material, and the top of the runner is arranged
Have an opening, the two ends of the runner with diameter greater than the diameter in the middle part of the runner, the runner be provided with the opening
The diameter of one end is less than the internal diameter of the accommodating chamber.
Double heating system designs, are easy to control the temperature at the temperature of crucible different piece, top to be slightly above material evaporation temperature
Degree, can avoid the condensation of material；By precise control evaporating temperature, it is achieved that the stablizing of material vaporization rate, runner be to
Outer expansion horn-like, be conducive to stablizing gaseous molecular stream.
Preferably, between the heating chamber and outer wall, thermal shield is provided with.
Thermal shield is provided with, to whole heating chamber heat-insulation and heat-preservation, prevents scattering and disappearing for heating chamber internal heat.
Preferably, the heater of the top heating unit and lower heating unit is to prolong around the heating chamber spiral
The resistance wire that stretches.
Resistance wire is around the uniform spiral extension of the heating chamber.Here uniform spiral extension is referred between adjacent turns
Distance equal, with ensure heat medium to material-to-be-heated uniform heating.
The present invention compared with prior art, has the advantages that：Fast changeable metallized film, fixing device is twisted
Tight or release can achieve upper branching holder and be rotated around the bearing pin of lower bearing support left end up and down, realize film decoiling roller supporting device upper and lower
Open or close, quickly realize the replacing of film feeding spool.
Description of the drawings
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the evaporation drum structural representation of the present invention.
Fig. 3 is the film feeding mechanism rearview of the present invention.
Fig. 4 is the film feeding spool structure schematic diagram of the film feeding mechanism of the present invention.
Fig. 5 is the cutter shaft structure schematic diagram of the rolling-up mechanism of the present invention.
Fig. 6 is the tool-apron structure schematic diagram of the rolling-up mechanism of the present invention.
Fig. 7 is the evaporation crucible structure schematic diagram of the present invention.
In figure：1st, roller set；2nd, roll body；3rd, runner pipe；31st, cooling tube；32nd, return duct；4th, cooling chamber；5th, coolant；6、
Thermal insulation layer；7th, first flange；8th, second flange；9th, water inlet pipe；10th, outlet pipe；11st, line shaft；12nd, expansion tube；13rd, piston；
14th, substrate；15th, spool mounting seat；16th, film feeding spool；17th, floating lever；18th, fixing idler roller；19th, movable idler roller； 20、
Film feeding motor；21st, Timing Belt；22nd, lower bearing support；23rd, upper branching holder；24th, bearing；25th, pole；27th, fixed handle；28th, divide
Cut support；29th, support is wound；30th, graduation mark；31st, splicing rotating shaft；32nd, straight rotating shaft is rolled；33rd, rotating shaft is cut；34th, wind-up roll；
35th, cutter shaft fixed support；36th, cutter shaft；37th, tool rest；38th, cutter；39th, upper half annulus；40th, lower half annulus；41st, screwed hole；42、
Through hole；43rd, screw；44th, keyway；45th, accommodating chamber；46th, heating chamber；47th, outer wall；48th, top heating unit；49th, bottom heating
Unit；50th, runner；51st, thermal shield；52nd, resistance wire；53rd, vacuum film coating chamber.
Specific embodiment
For making the architectural feature to the present invention and the effect that is reached have a better understanding and awareness, in order to preferably
Embodiment and accompanying drawing coordinate detailed description, are described as follows：
A kind of metallized film vacuum coater for being provided with new film feeding mechanism, including vacuum film coating chamber 53 and located at Vacuum Deposition
Evaporation drum in film room 53, the left side of the evaporation drum is installed with film feeding mechanism, and peace is fixed on the right side of the cooler drum
Equipped with rolling-up mechanism, the lower section of the cooler drum is provided with two evaporation crucibles, the film feeding mechanism include erect substrate 14,
Spool mounting seat 15, the film feeding spool 16 being rotatably fixed in spool mounting seat 15 and driving on substrate 14 is sent
The actuator that film roll axle 16 is rotated, is additionally provided with multiple fixing idler rollers 18 and floating lever 17, the floating on the substrate 14
One end of bar 17 is articulated with substrate 14, and the other end is that movable end, the floating lever 17 is provided with movable idler roller 19, the work
Dynamic idler roller 19 is located at below the midpoint of the axis line of two adjacent fixing idler rollers 18, also includes supporting mechanism, institute
Stating supporting mechanism includes lower bearing support 22, upper branching holder 23 and fixing device, is provided with opening down on the upper branching holder 23
Upper half-round slot, the lower half circular groove is identical with the diameter of upper half-round slot, and 23 left end of the upper branching holder is hinged by bearing pin
In the left end of lower bearing support 22, the fixing device includes bearing 24, pole 25 and fixed handle 27, and 25 one end of shown pole is solid
On bearing 24,25 other end of the pole is threaded with fixed handle 27, and the bearing 24 of the fixing device passes through pin
Axle is hinged and is connected to the right-hand member of lower bearing support 22, and 23 right-hand member of the upper branching holder is provided with the notch for running through up and down.
When detection sensor detects film feeding floating lever 17 and moves upwards, then control unit is notified, control unit controls
Corresponding 20 film feeding of film feeding motor；When dynamic detection sensor detects film feeding floating lever 17 and moves downward, then notify control single
Unit, control unit controls corresponding film feeding motor 20 to stop, and fixing device is tightened or unclamped and can achieve upper branching holder 23 around lower
The bearing pin of 22 left end of bearing rotates up and down, realizes film decoiling roller supporting device and opens up and down or close, and quickly realizes film feeding volume
The replacing of axle 16.
The actuator includes film feeding motor 20, is taken turns by the Timing Belt 21 on 16 spindle nose of film feeding spool, with Timing Belt 21
The kind of drive realizes the active film feeding of metallized film.
Including cutting support 28 and winding support 29, the cutting support 28 is provided with transmitting device and cutter sweep, institute
State winding support 29 and wind-up roll 34 be provided with, the transmitting device includes splicing rotating shaft 31, straight rotating shaft 32 and cutting rotating shaft 33 is rolled,
The cutter sweep includes 36 fixed support 35 of cutter shaft, cutter shaft 36, tool rest 37 and cutter 38, and the cutter 38 is arranged on tool rest 37
On, the tool rest 37 is sleeved on cutter shaft 36, and the cutter shaft 36 is on 36 fixed mount of cutter shaft, and the tool rest 37 is by upper semi-circle
Ring 39 and the linking of lower half annulus 40 are formed, and the upper half annulus 39 and 40 one end of lower half annulus are hinged, and the other end passes through interface
To setting, the upper half annulus 39 is provided with the screwed hole 41 vertical with interface, and the correspondence position of the lower half annulus 40 is provided with
Through hole 42, screw 43 passes through the through hole 42 and is fastened in the screw and connects two semicircular ring, so that knife
Seat 37 is fixed on cutter shaft 36.
Metallized film after plated film is transmitted to splicing rotating shaft 31, passes sequentially through the straight rotating shaft 32 of rolling.Cutting rotating shaft
33, reach at wind-up roll 34, carry out smooth force feed to metallized film by arranging the straight rotating shaft 32 of rolling, improve the smooth of cutting
Property, depth of cut of the cutter 38 to material is controlled by tool rest 37, thin-film material is divided into the bar of required width while winding
Shape, is easy to later process workman to take, and improves production efficiency, and tool rest 37 can facilitate to be dismantled from cutter shaft 36, if unclamped
Soket head cap screw 43, upper half annulus 39 can be relatively rotated with bearing pin as axle with lower half annulus 40, make the linking of two semicircular ring
Face is separated from each other, and whole tool rest 37 then easily directly can be removed from cutter shaft 36, and without the need for from removal of inserts cutter shaft 36 more
Cutter shaft 36 need not be dismantled, so as to improving efficiency and reducing the amount of labour.
The cutter shaft 36 is provided with graduation mark 30.
Cutter shaft 36 is provided with graduation mark 30, is easy to adjust the position of tool rest 37, controls the width of the strip form film for processing
Degree, without the need for using gage measuring when adjusting, reduces the time of the operation, a certain degree of improves production efficiency.
The cutter head of the cutter 38 is triangular in shape, and two at point of a knife side all has cutting edge.
Two sides at point of a knife all have cutting edge, and when being easy to bundling to start, blade is pierced into thin-film material.
39 internal ring top of the upper half annulus is provided with keyway 44.
There is keyway 44 at the internal ring of upper half annulus 39, with corresponding with the key on cutter shaft 36, tool rest 37 is prevented with respect to knife
Axle 36 is rotated.Even if importantly, after bolt is laid down, making which be stuck in key as keyway 44 is coordinated with the key of 36 top of cutter shaft
On, under 40 action of gravity of lower section lower half annulus, upper half annulus 39 also can hang on cutter shaft 36 and not drop, and this is to tool rest 37
Dismounting become advantageously, it is possible to increase work efficiency.
The evaporation drum includes roller set 1, roll body 2, runner pipe 3, and the roller covers 1 concentric locking collar outside roll body 2, the roll body
Cooling chamber 4 being formed between 2 and roller set 1, being filled with coolant 5 in the cooling chamber 4,2 outer shroud of the roll body is cased with thermal insulation layer 6,
The runner pipe 3 includes the return duct 32 positioned at the cooling tube 31 of cooling chamber 4 and in thermal insulation layer 6, the cooling tube 31
One end and return duct 32 circulate, and the roller set 1 is respectively arranged at two ends with first flange 7 and second flange 8, in the first flange 7
It is provided with spindle nose component, the outlet pipe 10 that described spindle nose component includes water inlet pipe 9 and is arranged concentrically in the water inlet pipe 9, institute
State 9 one end of water inlet pipe to connect with cooling tube 31,10 one end of the outlet pipe and return duct 32 circulate, and the second flange 8 connects
Dynamic axle 11.
During plated film, thin film is sent on evaporation drum, and by evaporation source, coating raw material is evaporated postadhesion in film surface.
5 supply arrangement of coolant is connected with inlet, is passed through cooling water, and cooling water is entered in cooling tube 31, roller cover 1 inwall directly with
Coolant 5 is contacted, and roller is covered the heat on 1 and is quickly transmitted in coolant 5, and cooling tube 31 is immersed in coolant 5, will cooling
Heat in liquid 5 is transmitted in cooling tube 31, heating after the cooling water coke slurry in cooling tube 31, and the cooling water of heating is from return duct
32 flow out, and 32 outer wall 47 of return duct is wrapped up by thermal insulation layer 6 so that the heat in return duct 32 will not diffuse further into cooling
In liquid 5, the water in return duct 32 is flowed out from outlet pipe 10.
Expansion tube 12 is provided with the roll body 2,12 1 sections of the expansion tube is connected with cooling chamber 4, and the expansion tube 12 is another
One end is closed, and 12 middle part of the expansion tube is provided with piston 13.
Due to the meeting expanded by heating of coolant 5 in cooling chamber 4, coolant 5 can produce expansion after being heated, due to expansion tube
12 are connected with coolant 5, and coolant 5 enters into compression piston 13 in expansion tube 12 and moves, when coolant 5 returns to original body
Product, piston 13 can retract to original position, it is ensured that the intrinsic pressure balance of coolant 5.
Described evaporation crucible include for accommodate heated material accommodating chamber 45, be centered around 45 periphery of the accommodating chamber
Heating chamber 46 and the outer wall 47 of the encirclement heating chamber 46, are sequentially provided with from top to bottom for ensureing in the heating chamber 46
The temperature of crucible evaporation mouth higher than evaporation material condensation point and the top heating unit 48 of independent temperature control, is located at that crucible periphery is independent to be controlled
The lower heating unit 49 of temperature, 46 top of the heating chamber is provided with the runner 50 for passing through for the heated material, the stream
The top in road 50 is provided with opening, the diameter with diameter greater than 50 middle part of the runner at the two ends of the runner 50, the runner
The diameter of 50 one end for being provided with the opening is less than the internal diameter of the accommodating chamber 45.
Double heating system designs, are easy to control the temperature at the temperature of crucible different piece, top to be slightly above material evaporation temperature
Degree, can avoid the condensation of material；By precise control evaporating temperature, it is achieved that the stablizing of material vaporization rate, runner 50 is
Expanded outwardly is horn-like, is conducive to stablizing gaseous molecular stream.
Thermal shield 51 is provided between the heating chamber 46 and outer wall 47.
Thermal shield 51 is provided with, to 46 heat-insulation and heat-preservation of whole heating chamber, prevents scattering and disappearing for 46 internal heat of heating chamber.
The heater of the top heating unit 48 and lower heating unit 49 is to prolong around 46 spiral of the heating chamber
The resistance wire 52 that stretches.
Resistance wire 52 surrounds the uniform spiral extension of the heating chamber 46.Here uniform spiral extension refers to adjacent spiral shell
Distance between circle is equal, to ensure to heat medium to material-to-be-heated uniform heating.
Ultimate principle, principal character and the advantages of the present invention of the present invention has been shown and described above.The technology of the industry
The simply present invention of the personnel it should be appreciated that the present invention is not restricted to the described embodiments, described in above-described embodiment and description
Principle, without departing from the spirit and scope of the present invention the present invention also have various changes and modifications, these change and
Improvement is both fallen within the range of claimed invention.The protection domain of application claims by appending claims and its
Equivalent is defined.
Claims (10)
1. a kind of metallized film vacuum coater for being provided with new film feeding mechanism, including vacuum film coating chamber（53）True with being located at
Empty coating chamber（53）Interior evaporation drum, the left side of the evaporation drum is installed with film feeding mechanism, the right side of the cooler drum
Rolling-up mechanism is installed with, the lower section of the cooler drum is provided with two evaporation crucibles, it is characterised in that：The film feeding mechanism
Including the substrate that erects（14）, be located at substrate（14）On spool mounting seat（15）, be rotatably fixed on spool mounting seat
（15）On film feeding spool（16）And drive film feeding spool（16）The actuator of rotation, the substrate（14）On be additionally provided with multiple
Fixing idler roller（18）And floating lever（17）, the floating lever（17）One end be articulated with substrate（14）On, the other end is for living
Moved end, the floating lever（17）It is provided with movable idler roller（19）, the activity idler roller（19）Positioned at two adjacent fixations
Idler roller（18）Axis line midpoint below, also include supporting mechanism, the supporting mechanism includes lower bearing support（22）、
Upper branching holder（23）And fixing device, the upper branching holder（23）On be provided with downward opening upper half-round slot, the lower half circle
Groove is identical with the diameter of upper half-round slot, the upper branching holder（23）Left end is hinged by bearing pin and is connected to lower bearing support（22）A left side
End, the fixing device includes bearing（24）, pole（25）And fixed handle（27）, shown pole（25）Bearing is fixed in one end
（24）On, the pole（25）The other end is threaded with fixed handle（27）, the bearing of the fixing device（24）By pin
Axle is hinged and is connected to lower bearing support（22）Right-hand member, the upper branching holder（23）Right-hand member is provided with the notch for running through up and down.
2. the metallized film vacuum coater for being provided with new film feeding mechanism according to claim 1, it is characterised in that：
The actuator includes film feeding motor（20）, by film feeding spool（16）Timing Belt on spindle nose（21）Wheel, uses Timing Belt（21）
The kind of drive realizes the active film feeding of metallized film.
3. the metallized film vacuum coater for being provided with new film feeding mechanism according to claim 1, it is characterised in that：
The rolling-up mechanism includes to cut support（28）With winding support（29）, the cutting support（28）It is provided with transmitting device and cuts
Device is cut, the winding support（29）It is provided with wind-up roll（34）, the transmitting device includes splicing rotating shaft（31）, roll straight rotating shaft
（32）With cutting rotating shaft（33）, the cutter sweep includes cutter shaft（36）Fixed support（35）, cutter shaft（36）, tool rest（37）And knife
Tool（38）, the cutter（38）Installed in tool rest（37）On, the tool rest（37）It is sleeved on cutter shaft（36）On, the cutter shaft（36）
Installed in cutter shaft（36）On fixed mount, the tool rest（37）By upper half annulus（39）With lower half annulus（40）Linking is formed, described
Upper half annulus（39）With lower half annulus（40）One end is hinged, and the other end passes through interface to setting, the upper half annulus（39）On set
There is the screwed hole vertical with interface（41）, the lower half annulus（40）Correspondence position be provided with through hole（42）, screw（43）Wear
Cross the through hole（42）And be fastened in the screw two semicircular ring are connected, so that tool rest（37）It is fixed on knife
Axle（36）On.
4. the metallized film vacuum coater for being provided with new film feeding mechanism according to claim 3, it is characterised in that：
The cutter shaft（36）It is provided with graduation mark（30）.
5. the metallized film vacuum coater for being provided with new film feeding mechanism according to claim 3, it is characterised in that：
The upper half annulus（39）Internal ring top is provided with keyway（44）.
6. the metallized film vacuum coater for being provided with new film feeding mechanism according to claim 1, it is characterised in that：
The evaporation drum includes roller set（1）, roll body（2）, runner pipe（3）, the roller set（1）Concentric locking collar is located at roll body（2）Outward, the roller
Body（2）With roller set（1）Between formed cooling chamber（4）, the cooling chamber（4）Coolant is inside filled with（5）, the roll body（2）Outward
Ring set has thermal insulation layer（6）, the runner pipe（3）Including positioned at cooling chamber（4）Cooling tube（31）And it is located at thermal insulation layer（6）Interior
Return duct（32）, the cooling tube（31）One end and return duct（32）Circulation, the roller set（1）It is respectively arranged at two ends with the first method
Blue（7）And second flange（8）, the first flange（7）Spindle nose component is provided with, described spindle nose component includes water inlet pipe（9）
And it is arranged concentrically on the water inlet pipe（9）Interior outlet pipe（10）, the water inlet pipe（9）One end and cooling tube（31）Connection, institute
State outlet pipe（10）One end and return duct（32）Circulation, the second flange（8）It is connected with line shaft（11）.
7. the metallized film vacuum coater for being provided with new film feeding mechanism according to claim 6, it is characterised in that：
The roll body（2）Expansion tube is inside provided with（12）, the expansion tube（12）One section and cooling chamber（4）Connection, the expansion tube（12）
The other end is closed, the expansion tube（12）Middle part is provided with piston（13）.
8. the metallized film vacuum coater for being provided with new film feeding mechanism according to claim 1, it is characterised in that：
The evaporation crucible includes the accommodating chamber for accommodating heated material（45）, be centered around the accommodating chamber（45）The heating of periphery
Chamber（46）, and surround the heating chamber（46）Outer wall（47）, the heating chamber（46）Inside be sequentially provided with from top to bottom for
Ensure the temperature of crucible evaporation mouth higher than the top heating unit for evaporating material condensation point independent temperature control（48）, be located at crucible periphery
The lower heating unit of independent temperature control（49）, the heating chamber（46）Top is provided with the runner for passing through for the heated material
（50）, the runner（50）Top be provided with opening, the runner（50）Two ends with diameter greater than the runner（50）In
The diameter in portion, the runner（50）The one end for being provided with the opening diameter be less than the accommodating chamber（45）Internal diameter.
9. the metallized film vacuum coater for being provided with new film feeding mechanism according to claim 8, it is characterised in that：
The heating chamber（46）And outer wall（47）Between be provided with thermal shield（51）.
10. the metallized film vacuum coater for being provided with new film feeding mechanism according to claim 9, its feature exists
In：The top heating unit（48）And lower heating unit（49）Heater be around the heating chamber（46）Spiral prolongs
The resistance wire that stretches（52）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610836698.XA CN106435511A (en) | 2016-09-21 | 2016-09-21 | Metalized film vacuum coating device provided with novel film conveying mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610836698.XA CN106435511A (en) | 2016-09-21 | 2016-09-21 | Metalized film vacuum coating device provided with novel film conveying mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106435511A true CN106435511A (en) | 2017-02-22 |
Family
ID=58167406
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610836698.XA Pending CN106435511A (en) | 2016-09-21 | 2016-09-21 | Metalized film vacuum coating device provided with novel film conveying mechanism |
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| Country | Link |
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| CN (1) | CN106435511A (en) |
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| CN110643969A (en) * | 2018-06-27 | 2020-01-03 | 北京铂阳顶荣光伏科技有限公司 | Vacuum evaporation equipment |
| WO2021190102A1 (en) * | 2020-03-25 | 2021-09-30 | 深圳市海瀚新能源技术有限公司 | Film coating assembly, film coating device and film coating method |
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Application publication date: 20170222 |