CN106424060A - Dedusting system in integrated circuit production workshop - Google Patents
Dedusting system in integrated circuit production workshop Download PDFInfo
- Publication number
- CN106424060A CN106424060A CN201610867153.5A CN201610867153A CN106424060A CN 106424060 A CN106424060 A CN 106424060A CN 201610867153 A CN201610867153 A CN 201610867153A CN 106424060 A CN106424060 A CN 106424060A
- Authority
- CN
- China
- Prior art keywords
- dust
- workshop
- integrated circuit
- dedusting
- controller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The invention relates to a dedusting system in an integrated circuit production workshop. The system comprises a deduster, dust sensors and a controller which controls the deduster which are arranged in the workshop, wherein the input ends of the controller are connected with the output ends of the dust sensors; and multiple dust sensors are arranged and are separately arranged on a guide rail above each operation table. In the dedusting system, the multiple dust sensors are arranged above the operation tables; the amount of dust in the integrated circuit production workshop is fully detected, so that automatic dedusting is realized; energy consumption is reduced, and the workshop is dust-free; and the dedusting effect is good.
Description
Technical field
The present invention relates to the dust pelletizing system of the workshop of integrated circuit, more particularly, to workshop.
Background technology
One of mainstay of modern developed country economic development -- integrated circuit (hereinafter referred to as IC) industry development is very fast
Speed.IC design, IC manufacture, IC package and IC test have become in microelectronic industry separate and inter-related four and produced greatly
Industry.Microelectronics become the world today items sophisticated technology and new industry development leading and basic.There is microelectric technique
Develop in advance, just can more effectively promote the progress of other cutting edge technologies.Integrated level with IC and complexity are increasingly
Height, the development of Environmental capacity, environmental conservation and the more blind swollen sound of electrostatic defending technology or restriction microelectric technique.Meanwhile, with
The sustained, stable growth of Chinese national economy and the development of constantly bringing forth new ideas of production technology, the requirement to production environment for the production technology is got over
Come higher.Road each operation in front and back during extensive and ultra-large Ic produces proposes requirements at the higher level to production environment, not only
Keep certain epidemic disaster, cleanliness factor in addition it is also necessary to electrostatic defending is caused with enough attention.
At present, the dust pelletizing system adopting in integrated circuit workshop, degree of intelligence is not high, and dust removing effects have much room for improvement.
Content of the invention
The applicant is directed to the disadvantages mentioned above that existing integrated circuit workshop exists, and provides a kind of good dedusting effect, intelligence
The high integrated circuit workshop dust pelletizing system of energyization.
The technical solution adopted in the present invention is as follows：
A kind of integrated circuit workshop dust pelletizing system, this system includes cleaner unit, the dust sensing being installed in workshop
Device and the controller controlling described cleaner unit, the input of described controller is connected with the outfan of dust sensor；Described ash
Dust sensor is included on the guide rail of multiple, to be respectively arranged in each operating board tops.
Beneficial effects of the present invention are as follows：
In the present invention, multiple dust sensors are set above operating board, in complete detection integrated circuit workshop
Amount of dust, realizes automatic dust removing, can guarantee that the dustless of workshop, its good dedusting effect while saving energy consumption again.
Brief description
Fig. 1 is the operation principle block diagram of the present invention.
Fig. 2 is the scheme of installation of dust sensor in the present invention.
In figure：1st, workshop；2nd, cleaner unit；3rd, dust sensor；4th, controller；5th, operating board；6th, guide rail.
Specific embodiment
Below in conjunction with the accompanying drawings, the specific embodiment of the present invention is described.
As shown in Figure 1 and Figure 2, the integrated circuit workshop dust pelletizing system of the present embodiment, this system includes being installed on workshop
Cleaner unit 2 in 1, dust sensor 3 and the controller 4 controlling cleaner unit 2, the input of controller 4 and dust sensor 3
Outfan connects；Dust sensor 3 is included on the guide rail 6 of multiple, to be respectively arranged in each operating board 5 tops.
The dust sensor 3 of the present invention is used for detecting the amount of dust in workshop, and when amount of dust reaches certain value, dust passes
Sensor 3 starts cleaner unit 2 by controller 4, and cleaner unit 2 carries out dedusting, and dedusting continues for some time (as 5 minutes) and automatically stops afterwards
Only.
Above description is explanation of the invention, is not the restriction to invention, limited range of the present invention is referring to right
Require, in the case of the spirit without prejudice to the present invention, the present invention can make any type of modification.
Claims (1)
1. a kind of integrated circuit workshop dust pelletizing system it is characterised in that：This system includes the dedusting being installed in workshop (1)
Device (2), dust sensor (3) and the controller (4), the input of described controller (4) and the dust that control described cleaner unit (2)
The outfan of sensor (3) connects；Described dust sensor (3) inclusion is multiple, is respectively arranged in the top of each operating board (5)
Guide rail (6) on.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610867153.5A CN106424060A (en) | 2016-09-29 | 2016-09-29 | Dedusting system in integrated circuit production workshop |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610867153.5A CN106424060A (en) | 2016-09-29 | 2016-09-29 | Dedusting system in integrated circuit production workshop |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106424060A true CN106424060A (en) | 2017-02-22 |
Family
ID=58171795
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610867153.5A Withdrawn CN106424060A (en) | 2016-09-29 | 2016-09-29 | Dedusting system in integrated circuit production workshop |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106424060A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107597782A (en) * | 2017-09-23 | 2018-01-19 | 南京律智诚专利技术开发有限公司 | A kind of intelligence control system of dust-free workshop dust catcher |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07256441A (en) * | 1994-03-25 | 1995-10-09 | Mazda Motor Corp | Dust collecting equipment |
| CN204769800U (en) * | 2015-06-09 | 2015-11-18 | 天津元华友汇包装有限公司 | Corrugated container board is dust collector for workshop |
| CN105127170A (en) * | 2015-08-24 | 2015-12-09 | 苏州玄禾物联网科技有限公司 | Dust removal and purification system for surface mounting technology (SMT) production line |
| CN105527200A (en) * | 2014-09-30 | 2016-04-27 | 藤树莹 | System for detecting and processing metal dust in workshop |
| CN205586682U (en) * | 2016-03-14 | 2016-09-21 | 广州科玛生物科技有限公司 | Dust removal system for workshop |
| CN105964643A (en) * | 2016-05-30 | 2016-09-28 | 无锡昊瑜节能环保设备有限公司 | Cleaning system for printed circuit board production workshop |
-
2016
- 2016-09-29 CN CN201610867153.5A patent/CN106424060A/en not_active Withdrawn
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07256441A (en) * | 1994-03-25 | 1995-10-09 | Mazda Motor Corp | Dust collecting equipment |
| CN105527200A (en) * | 2014-09-30 | 2016-04-27 | 藤树莹 | System for detecting and processing metal dust in workshop |
| CN204769800U (en) * | 2015-06-09 | 2015-11-18 | 天津元华友汇包装有限公司 | Corrugated container board is dust collector for workshop |
| CN105127170A (en) * | 2015-08-24 | 2015-12-09 | 苏州玄禾物联网科技有限公司 | Dust removal and purification system for surface mounting technology (SMT) production line |
| CN205586682U (en) * | 2016-03-14 | 2016-09-21 | 广州科玛生物科技有限公司 | Dust removal system for workshop |
| CN105964643A (en) * | 2016-05-30 | 2016-09-28 | 无锡昊瑜节能环保设备有限公司 | Cleaning system for printed circuit board production workshop |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107597782A (en) * | 2017-09-23 | 2018-01-19 | 南京律智诚专利技术开发有限公司 | A kind of intelligence control system of dust-free workshop dust catcher |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20170222 |