CN106403921A - Metal structure multi-ring vibrating disk micro gyroscope and preparation method thereof - Google Patents
Metal structure multi-ring vibrating disk micro gyroscope and preparation method thereof Download PDFInfo
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- CN106403921A CN106403921A CN201610712165.0A CN201610712165A CN106403921A CN 106403921 A CN106403921 A CN 106403921A CN 201610712165 A CN201610712165 A CN 201610712165A CN 106403921 A CN106403921 A CN 106403921A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
- G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
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Abstract
The invention discloses a metal structure multi-ring vibrating disk micro gyroscope and a preparation method thereof, wherein the micro gyroscope from top to bottom includes a package cover, a metal multi-ring vibrator, a metal electrode and a substrate, the metal multi-ring vibrator is a vibration inertial mass, and is an object to be detected, the metal multi-ring vibrator is arranged in a vacuum closed space formed between the package cover and the substrate, the metal structure multi-ring vibrating disk micro gyroscope adopts the metal multi-ring vibrator, the metal planar structure is easy to process and implement, and is low in processing cost; the metal structure is high in density, the inertial force of the structure can be improved, device performances can be improved, and the metal multi-ring structure increases the driving force and detection sensitivity of a micro gyroscope device. The metal structure multi-ring vibrating disk micro gyroscope can realize the purpose of higher device precision and quality with lower cost and condition requirements.
Description
Technical field
A kind of a kind of the present invention relates to microsensor of measurement angular movement, in particular it relates to the many ring vibrations of metal structure
Disk microthrust test and preparation method thereof.
Background technology
Extensive gyro is currently used to be mainly hemispherical reso nance gyroscope and light gyroscope etc..Wherein hemispherical reso nance gyroscope institute
The oscillator using is three-dimensional hemisphere shell structure, and difficulty of processing is big, takes up room more it is more difficult to obtain high quality factor,
And fibre optic gyroscope is with high costs.The structure of polycyclic vibrating disk microthrust test is mainly made up of four parts, substrate, electrode, oscillator
And packaging system, there is processing simply, take up room little characteristic, can reach more stable effect.After oscillator is actuated to
Under certain mode vibrate, when there is an angular movement in the external world, this mode changes, by this change of electrode detection and
Output, after demodulated calculating, obtains the moment of momentum of reality.Using silicon the polycyclic vibrating disk microthrust test being used at present more
Or vitreous silica is as vibrator material, the other parts of device also with silicon as main material, processed complex degree and processing cost phase
To higher.
Through retrieval, the Chinese invention application of Publication No. 105466407A, it discloses a kind of polycyclic outer twin beams of disk lonely
Vertical annulus resonant gyroscope, including：One substrate；The polycyclic outer twin beams of one disk isolates annulus resonator, comprises outermost one circle circle
Ring, multiple twin beams isolate annulus, multiple donut and multiple spoke, wherein：Outermost one circle annulus is connected with substrate, Duo Getong
Between heart annulus all by multiple spokes be connected, multiple twin beams isolate annulus two ends respectively with outermost one circle annulus inside and
It is connected outside maximum annulus in multiple donuts；One group is distributed in the polycyclic outer twin beams of disk and isolates annulus resonator inner side edge
The electrode of edge, and each electrode is connected with substrate respectively.
Above-mentioned patent：1. adopt silicon materials and deep silicon etching, structure bonding technology to make；2. fixed using outer ring, inner ring
Excitation and detection.Silicon materials and deep silicon etching, structure bonding technology involve great expense.
Content of the invention
For the deficiencies in the prior art, the present invention provides a kind of metal structure polycyclic vibrating disk microthrust test and its preparation side
Method, increased driving force and the detection sensitivity of microthrust test device, enables to require to reach with lower cost and condition
Higher device precision and the purpose of quality.
According to the first aspect of the invention, a kind of metal structure polycyclic vibrating disk microthrust test is provided, includes from top to bottom sealing
The polycyclic oscillator of capping, metal and substrate, wherein：
Form the space of a vacuum sealing, the polycyclic oscillator of described metal is encapsulated in this between described cap and described substrate
In the space of vacuum sealing；
The polycyclic oscillator of described metal includes metal oscillator structure and support column, and described support column is located at that described metal is polycyclic to shake
Subcenter, described metal oscillator structure is made up of multiple concentric metal annulus, and two adjacent metal rings are by circumferencial direction
Upper equally distributed spoke connection, innermost circle metal ring forms connection by spoke, and adjacent metal ring and spoke are in gold
Belong to local in polycyclic oscillator and surround groove, multiple grooves of formation are uniformly distributed on metal oscillator structure；
There is gap between described metal oscillator structure and substrate, form hanging structure, support column is arranged on substrate upper table
Face, and substrate formation fixed connection, metal oscillator structure passes through the spoke of innermost circle and support column connects；
The polycyclic oscillator of described metal, be provided with the groove of its inner ring several to driving electrodes, be provided with number in the groove of its outer ring
To detecting electrode, driving electrodes and detecting electrode are respectively used to the detection with reference to the excitation vibrated and vibration for the gyro.
Preferably, described cap includes a top, and is located at the bonding metal layer below top and vacuum suction
Device.
Preferably, described substrate is provided with the bonded layer of cap, and described bonded layer and described bonding metal layer enter line unit
Close the space forming a vacuum sealing.
Preferably, described substrate is provided with interconnection layer, and described interconnection layer is by the electric signal on detecting electrode and driving electrodes
Draw and introduce, described interconnection layer is provided with insulating barrier, insulating barrier is located at the bottom of detecting electrode and driving electrodes, formed and week
Electric insulation between closed structure.
Preferably, described driving electrodes and detecting electrode are produced on substrate upper surface, and substrate forms fixed connection.
Preferably, when the polycyclic oscillator of described metal remains static, apply swashing of an alternation by driving electrodes
Encourage signal, it is the first mode of oscillation that the polycyclic oscillator of metal can occur with reference to vibration, and the vibration shape converts and circle between oval, this
When, the external world inputs a counterclockwise angular velocity to the polycyclic oscillator of the metal vibrating, in the plane if on the polycyclic oscillator of metal
Certain point forward metal polycyclic oscillator central motion, according to coriolis effect, this point is affected to offset up by coriolis force, due to rotating
Amount conservation, gyro produces precession, and precession angle is θ, and therefore, the mode of oscillation of the polycyclic oscillator of metal there occurs skew counterclockwise
Phenomenon, it is the second mode of oscillation that mode of oscillation deflects an angle.
The polycyclic vibrating disk microthrust test of metal structure of the present invention adopts metal material and electroplating technology to make, and cost is lower, with
When metal structure there is bigger density, be conducive to improve coriolis force, improve gyro sensitivity.The present invention adopts inner ring solid
Fixed, inner ring encourages, outer ring detection structure, because outer ring can obtain bigger reference vibration and induction vibration, can improve detection spirit
Sensitivity.Detecting electrode and driving electrodes are dexterously embedded into the inside of metal polycyclic vibrating disk oscillator by the present invention simultaneously, this increasing
The strong compactedness of structure.
According to the second aspect of the invention, a kind of preparation method of metal structure polycyclic vibrating disk microthrust test is provided, including
Following steps：
In deposition on substrate layer of metal film, and it is patterned by photolithography thin film, define the arrangement of wire, as
Interconnection layer；
Depositing insulating layer on interconnection layer, and be patterned by photoetching, open the polycyclic oscillator of follow-up plated metal, electricity
Window needed for pole and solder joint；
Sputter one layer of Seed Layer on the insulating layer, be that subsequent electroplating process is prepared；
First electroplate thin film on the seed layer, according to the structure needs of the polycyclic oscillator of metal, light needle drawing is carried out to film
Shape, finally carries out polishing technique, as the sacrifice layer of subsequent electroplating process；
Spin coating photoresist on sacrifice layer, and it is patterned；
Pass through electroplating technology after the completion of graphical, be processed and formed at one time metal oscillator structure and the support of the polycyclic oscillator of metal
The bonded layer of post, detecting electrode, driving electrodes and cap, then carry out polishing technique it is ensured that metal oscillator surface smooth
And symmetry；
After completing metal oscillator and the electroplating technology of electrode, remove sacrifice layer；Then, remove unnecessary Seed Layer；
Plating encapsulation bonding metal layer on the top of cap；It is built into vacuum breathing apparatus in cap, in bonding
Vibration for oscillator provides the environment of vacuum, closing afterwards；
By bonding metal layer, bonded layer, polycyclic for metal oscillator is encapsulated, obtains the micro- top of the polycyclic disk vibration of metal
Spiral shell.
Compared with prior art, the invention has the advantages that：
The polycyclic oscillator of metal of the present invention employs flat annular structure, be readily available higher geometrical symmetry and quality because
Son, required process costs are relatively low.
Oscillator of the present invention employs metal structure, and for silicon, density is bigger, and to be added using electroplating technology
, it is easier to realize micro-structural processing, difficulty is lower with relative cost for work.
The multiring structure that the present invention adopts is obtained in that bigger amplitude, thus reaching bigger driving force and more excellent inspection
Survey sensitivity.
Brief description
The detailed description with reference to the following drawings, non-limiting example made by reading, the further feature of the present invention,
Objects and advantages will become more apparent upon：
Fig. 1 is the profile after metal structure polycyclic vibrating disk microthrust test encapsulation in one embodiment of the invention；
Fig. 2 is the polycyclic oscillator of metal and electrode top view in one embodiment of the invention；
Fig. 3 is metal polycyclic oscillator vibration modal graph in one embodiment of the invention；
Fig. 4 is preparation method flow chart in one embodiment of the invention；
In figure：The polycyclic oscillator of metal 100, top 200；
Support column 101, driving electrodes 102,103, detecting electrode 104,105, spoke 106, metal ring 107, groove 108；
Metal oscillator structure 201, insulating barrier 202,203, interconnection layer 204, window 205, vacuum breathing apparatus 206, bonding
Metal level 207, bonded layer 208.
Specific embodiment
With reference to specific embodiment, the present invention is described in detail.Following examples will be helpful to the technology of this area
Personnel further understand the present invention, but the invention is not limited in any way.It should be pointed out that the ordinary skill to this area
For personnel, without departing from the inventive concept of the premise, some deformation can also be made and improve.These broadly fall into the present invention
Protection domain.
As shown in figure 1, the profile after a kind of polycyclic vibrating disk microthrust test encapsulation of metal structure, described metal structure is polycyclic
Vibrating disk microthrust test includes cap, the polycyclic oscillator of metal 100 and substrate from top to bottom.
Described cap provides a vacuum, closing environment for the polycyclic oscillator of metal 100, improves the detection essence of gyro
Degree.
The polycyclic oscillator of described metal as principal vibration structure, detected object, be built in described cap and substrate
Between formed vacuum, closing environment in；
While substrate is as supporting, the work of the interface such as responsible leadout electrode.
Specifically, described cap includes a top 200, and bonding metal layer 207 He being located at top 200 lower section
Vacuum breathing apparatus 206；Vacuum breathing apparatus 206 pass through chemical reaction, will remain or reveal the gas entered in enclosed environment
Consume, persistently to keep condition of high vacuum degree.
Described substrate is provided with the bonded layer 208 of cap and interconnection layer draws solder joint 205, and substrate is same as support
When, the work of responsible leadout electrode interface；Described bonded layer 208 carries out bonding together to form formation one with described bonding metal layer 207
The space of vacuum sealing, the polycyclic oscillator 100 of described metal is encapsulated in the space of this vacuum sealing；Improve the detection essence of gyro
Degree.
As shown in Fig. 2 being the polycyclic oscillator of metal 100 top view, the polycyclic oscillator of described metal includes metal oscillator structure 201
With support column 101, described support column 101 is located at the polycyclic oscillator of described metal 100 center, outer by wire extraction encapsulation.Described
Metal oscillator structure 201 is made up of multiple concentric metal annulus 107, and two adjacent metal rings 107 are by a circumferential direction
Equally distributed spoke 106 connects, and innermost circle metal ring 107 passes through spoke 106 and forms connection, adjacent metal ring 107
In the polycyclic oscillator of metal 100, local surrounds groove 108 with spoke 106, and multiple grooves 108 of formation are on metal oscillator structure 201
It is uniformly distributed；
There is gap between described metal oscillator structure 201 and substrate, form hanging structure, support column 101 is arranged on base
Piece upper surface, and substrate formation fixed connection, metal oscillator structure 201 passes through spoke 106 and the support column 101 of innermost circle
Knot；
The polycyclic oscillator of described metal, be provided with the groove 108 of its inner ring several to driving electrodes 102,103, the groove of its outer ring
Be provided with 108 several to detecting electrode 104,105, driving electrodes 102,103 and detecting electrode 104,105 are drawn by wire, point
Yong Yu not the excitation of gyro reference vibration and the detection of vibration.
Described detecting electrode 104,105 and driving electrodes 102,103 all can adopt metal electrode.
As shown in figure 3, being metal polycyclic oscillator vibration modal graph, concrete operating principle：When the polycyclic oscillator of metal 100 is in
During inactive state (no extraneous turning rate input), apply the pumping signal of an alternation, oscillator meeting by driving electrodes 102,103
There is wine glass-shaped vibration (the first mode of oscillation), the vibration shape converts and circle between oval, and in figure transverse axis is vibrating shaft, for shaking
Width maximum.Now, the external world inputs a counterclockwise angular velocity (external rotating angle in the plane to the gyrotron vibrating
Degree), take and a little perform an analysis on transverse axis, if the motion of this point forward disc centre, according to section's formula effect, this point is affected by coriolis force
Offset up.Due to amount of spin conservation in this phenomenon, gyro produces precession (precession angle), and angle is θ, therefore, the shaking of oscillator
Dynamic model state there occurs shift phenomenon counterclockwise, mode of oscillation deflection certain angle (the second mode of oscillation).
As shown in figure 4, being the preparation flow figure of above-mentioned microthrust test, specifically include following operating procedure：
A:In deposition on substrate layer of metal film, and it is patterned by photolithography thin film, define the arrangement of wire, that is,
For interconnection layer 204.
B:One layer insulating 202,203 is deposited on interconnection layer 204, and is patterned by photoetching, open follow-up electricity
Plating oscillator, electrode and the window 205 needed for solder joint.
C:Insulating barrier 202,203 sputters one layer of Seed Layer, is that subsequent electroplating process is prepared.
D:First electroplate thin film on the seed layer, according to the structure needs of oscillator, photolithography patterning is carried out to film,
After carry out polishing technique, as the sacrifice layer of subsequent electroplating process.
E:Spin coating photoresist on sacrifice layer, and it is patterned.After the completion of pass through electroplating technology, time processing become
The metal oscillator structure 201 of the polycyclic oscillator of type metal and support column 101, detecting electrode 104,105, driving electrodes 102,103 and
The bonded layer 208 of cap, then carries out polishing technique it is ensured that the smooth and symmetry on metal oscillator surface.
F:After completing the polycyclic oscillator of metal and the electroplating technology of electrode, remove sacrifice layer.
G:Then, remove unnecessary Seed Layer.
H:Plating encapsulation bonding metal layer 207 on the top 200 of cap.
I:It is built into vacuum breathing apparatus 206 in cap, the vibration for oscillator after bonding provides the ring of vacuum, closing
Border.
J:By bonding metal layer 207, bonded layer 208, polycyclic for metal oscillator 100 is encapsulated, obtains metal polycyclic
Disk vibration microthrust test.
The present invention and to MEMS technology application and MEMS micro fabrication.The present invention adopts flat annular structure, and processing is more
Easily realize, processing cost is lower, and can obtain higher quality factor, improve device performance；Metal material relative density is larger,
It is processed using electroplating technology, processing threshold is lower with cost, and be more easy to realize；Multiring structure increased microthrust test device
Driving force and detection sensitivity.For realizing this programme, mainly employ MEMS and be etching in processing technology, deposition and electroplate
Technique it is achieved that requiring to reach the purpose of higher device precision and quality with lower cost and condition.
Above the tool embodiment of the present invention is described.It is to be appreciated that the invention is not limited in above-mentioned spy
Determine embodiment, those skilled in the art can make various modifications or modification within the scope of the claims, and this has no effect on
The flesh and blood of the present invention.
Claims (7)
1. a kind of polycyclic vibrating disk microthrust test of metal structure it is characterised in that：Include cap, the polycyclic oscillator of metal from top to bottom
(100) and substrate, wherein：Form the space of a vacuum sealing, described metal is polycyclic to shake between described cap and described substrate
Sub (100) are encapsulated in the space of this vacuum sealing；
The polycyclic oscillator of described metal includes metal oscillator structure (201) and support column (101), and described support column (101) is located at institute
State metal polycyclic oscillator (100) center, described metal oscillator structure (201) is made up of multiple concentric metal annulus (107), adjacent
Two metal rings (107) by the connection of equally distributed spoke (106) in a circumferential direction, innermost circle metal ring (107)
Connection, adjacent metal ring (107) and spoke (106) local in the polycyclic oscillator of metal (100) are formed by spoke (106)
Surround groove (108), multiple grooves (108) of formation are uniformly distributed on metal oscillator structure (201)；
There is gap in described metal oscillator structure (201) and substrate between, form hanging structure, and support column (101) is arranged on base
Piece upper surface, and substrate forms fixed connection, metal oscillator structure (201) is by the spoke (106) of innermost circle and support column
(101) connect；
The polycyclic oscillator of described metal, be provided with the groove (108) of its inner ring several to driving electrodes (102,103), the groove of its outer ring
(108) be provided with several to detecting electrode (104,105), driving electrodes (102,103) and detecting electrode (104,105) are used respectively
In the excitation of gyro reference vibration and the detection of vibration.
2. the polycyclic vibrating disk microthrust test of metal structure according to claim 1 it is characterised in that：Described cap includes one
Individual top (200), and it is located at the bonding metal layer (207) below top (200) and vacuum breathing apparatus (206).
3. the polycyclic vibrating disk microthrust test of metal structure according to claim 2 it is characterised in that：Described substrate is provided with envelope
The bonded layer (208) of capping, described bonded layer (208) and described bonding metal layer (207) carry out bonding together to form formation one vacuum
The space of closing.
4. the polycyclic vibrating disk microthrust test of metal structure according to claim 1 it is characterised in that：Described substrate is provided with mutually
Connection layer (204), the electric signal on detecting electrode (104,105) and driving electrodes (102,103) is drawn by described interconnection layer (204)
And introducing, described interconnection layer (204) is provided with insulating barrier (202,203), insulating barrier (202,203) be located at detecting electrode (104,
105) and driving electrodes (102,103) bottom, formed and surrounding structure between electric insulation.
5. the polycyclic vibrating disk microthrust test of metal structure according to claim 1 it is characterised in that：Described driving electrodes
(102,103) and detecting electrode (104,105) are produced on substrate upper surface, and substrate forms fixed connection.
6. the polycyclic vibrating disk microthrust test of the metal structure according to any one of claim 1-5 it is characterised in that：When described gold
When belonging to polycyclic oscillator (100) and remaining static, apply the pumping signal of an alternation, gold by driving electrodes (102,103)
Belong to polycyclic oscillator and can occur with reference to vibration to be the first mode of oscillation, the vibration shape converts between oval and circle between, now, outer bound pair
The polycyclic oscillator of metal vibrating inputs a counterclockwise angular velocity in the plane, if certain point forward gold on the polycyclic oscillator of metal
Belong to polycyclic oscillator (100) central motion, according to section's formula effect, this point is affected to offset up by coriolis force, because amount of spin is kept
Perseverance, gyro produces precession, and precession angle is θ, and therefore, the mode of oscillation of the polycyclic oscillator of metal there occurs that skew counterclockwise is existing
As it is the second mode of oscillation that mode of oscillation deflects an angle.
7. the preparation method of the metal structure polycyclic vibrating disk microthrust test described in a kind of any one of claim 1-6, its feature exists
In：Comprise the steps：
In deposition on substrate layer of metal film, and it is patterned by photolithography thin film, define the arrangement of wire, as interconnect
Layer (204)；
In the upper depositing insulating layer (202,203) of interconnection layer (204), and it is patterned by photoetching, open follow-up plated metal
Polycyclic oscillator, electrode and the window (205) needed for solder joint；
In insulating barrier (202,203) one layer of Seed Layer of upper sputtering, it is that subsequent electroplating process is prepared；
First electroplate thin film on the seed layer, according to the structure needs of the polycyclic oscillator of metal, photolithography patterning carried out to film,
Finally carry out polishing technique, as the sacrifice layer of subsequent electroplating process；
Spin coating photoresist on sacrifice layer, and it is patterned；Pass through electroplating technology, time processing becomes after the completion of graphical
The metal oscillator structure (201) of the polycyclic oscillator of type metal and support column (101), detecting electrode (104,105), driving electrodes
The bonded layer (208) of (102,103) and cap, then carry out polishing technique it is ensured that metal oscillator surface smooth and symmetrical
Property；
After completing the polycyclic oscillator of metal and the electroplating technology of electrode, remove sacrifice layer；
Then, remove unnecessary Seed Layer；
In upper plating encapsulation bonding metal layer (207) in the top (200) of cap, it is built into vacuum suction in cap (200)
Device (206)；
By bonding metal layer (207), bonded layer (208), polycyclic for metal oscillator (100) is encapsulated, obtains metal polycyclic
Disk vibration microthrust test.
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Cited By (1)
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| CN109839104A (en) * | 2019-01-17 | 2019-06-04 | 苏州大学 | The MEMS gyroscope substantially symmetrical about its central axis of the more sensing units of single-chip |
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