CN106399947A - Evaporation source - Google Patents
Evaporation source Download PDFInfo
- Publication number
- CN106399947A CN106399947A CN201611129547.7A CN201611129547A CN106399947A CN 106399947 A CN106399947 A CN 106399947A CN 201611129547 A CN201611129547 A CN 201611129547A CN 106399947 A CN106399947 A CN 106399947A
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- China
- Prior art keywords
- evaporation source
- crucible
- fixing end
- chamber
- appendix
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention provides an evaporation source, and belongs to the technical field of vacuum evaporation. The evaporation source can at least partially solve the problem that steam generated by an existing evaporation source is poor in uniformity. The evaporation source comprises a cavity and a plurality of crucibles. The cavity is divided into a plurality of areas, and each area is provided with at least one air outlet hole and at least one air pressure sensor. The crucibles are connected with the cavity, and each crucible is used for supplying steam to at least one area of the cavity.
Description
Technical field
The invention belongs to vacuum evaporation technology field is and in particular to a kind of evaporation source.
Background technology
During vacuum evaporation, needing, by evaporation source, deposition material is evaporated (or distillation) is steam, and steam is being treated
Evaporation body surface forms film layer after condensing.Therefore, whether the steam that evaporation source produces is uniform, the quality to the film layer being formed
It is highly important.Evaporation source is usually " line source " form, and it includes the chamber of strip, and chamber roof uniformly offers multiple
Venthole, bottom then connects crucible, and crucible is used for holding deposition material and being evaporated, after the steam of generation enters chamber and from
Venthole is discharged.
A kind of existing evaporation source is as shown in figure 1, the multiple diverse location in its chamber 1 bottom connects crucible 2 respectively.This steaming
The air pressure of chamber 1 diverse location rising is different, just high to air pressure at crucible 2, and the gas output of corresponding venthole 19 is also big, away from
The gas output of the venthole 19 of crucible 2 is then little, thus leads to the steam lack of homogeneity that evaporation source produces.
Another kind of existing evaporation source is as shown in Fig. 2 its chamber 1 bottom is connected with the big crucible 2 of a strip.But
It is because this crucible 2 is the larger strip of length, therefore to be added thereto to during deposition material be difficult to ensure that charging uniformly, and
It is difficult to ensure that the homogeneous heating of all positions of crucible 2, therefore such evaporation source equally exists asking of the steam lack of homogeneity of generation
Topic.
Content of the invention
The present invention at least partly solves the problems, such as the steam lack of homogeneity that existing evaporation source produces, and provides one kind can produce
The evaporation source of uniform steam.
Solve present invention problem and be employed technical scheme comprise that a kind of evaporation source, it includes：
Chamber, it is divided into multiple regions, is provided with least one venthole and at least one air pressure sensing in each region
Device；
The crucible that multiple and described chamber is connected, each described crucible is used for steaming at least one region supply of chamber
Gas.
Preferably, described chamber interior is divided into multiple mutually disconnected compartments by partition wall, and each described compartment is
One region.
Preferably, each described crucible is used for providing steam for multiple regions；Described crucible and corresponding each
Interregional connected by an appendix.
It may further be preferable that it is identical with the structure of a plurality of appendix that same crucible is connected.
It may further be preferable that each described crucible is used for providing steam for 2 to 3 regions.
It may further be preferable that described evaporation source also includes：For adjusting the regulation machine of gas flow in described appendix
Structure.
It may further be preferable that described governor motion is tubulose, it is connected between described chamber and appendix, it includes：
First fixing end and the second fixing end, one of the two is connected with chamber, and another is connected with appendix；Rotating part, connects
Between the first fixing end and the second fixing end, and can rotate relative to the first fixing end and the second fixing end；First catch, located at
With rotating part connecting place inside first fixing end, block a part for the first fixing end internal channel；Second catch, located at rotating part
Inner side and the first fixing end connecting place, block a part for rotating part internal channel.
Preferably, described evaporation source also includes：Control unit, is connected with each baroceptor and crucible, for basis
The testing result of each described baroceptor controls the heating-up temperature of each crucible.
Preferably, described evaporation source includes 2 to 3 crucibles.
Preferably, each described region is provided with 2 to 3 ventholes.
The evaporation source of the present invention includes multiple crucibles, and each crucible is mainly to portion (one or more areas of chamber
Domain) steam is provided, it is provided with the baroceptor for detected air pressure in each region, and air pressure embodies steam in respective regions
Flow, that is, the gas output embodying corresponding venthole.Thus, as long as according to the testing result of baroceptor to corresponding
The supply in region is adjusted (such as adjust the heating-up temperature of corresponding crucible, or adjust the gas flow etc. to region for the crucible), that is,
The uniformity of the steam that evaporation source overall (i.e. multiple zoness of different) produces can be improved.
Brief description
Fig. 1 is a kind of structural representation of existing evaporation source；
Fig. 2 is the structural representation of existing another kind evaporation source；
Fig. 3 is a kind of structural representation of evaporation source of embodiments of the invention；
Fig. 4 is the structural representation of governor motion in a kind of evaporation source of embodiments of the invention；
Fig. 5 be embodiments of the invention a kind of evaporation source in governor motion the signal in different overlapping conditions for the catch
Figure；
Wherein, reference is：1st, chamber；11st, region；19th, venthole；2nd, crucible；3rd, appendix；5th, air pressure sensing
Device；6th, governor motion；61st, the first fixing end；62nd, the second fixing end；63rd, rotating part；651st, the first catch；652nd, second gear
Piece.
Specific embodiment
For making those skilled in the art more fully understand technical scheme, below in conjunction with the accompanying drawings and specific embodiment party
Formula is described in further detail to the present invention.
Embodiment 1：
As shown in Figures 3 to 5, the present embodiment provides a kind of evaporation source, and this evaporation source is used for producing in vacuum evaporation system
The steam of raw evaporation.
Specifically, above evaporation source includes：
Chamber 1, it is divided into multiple regions 11, is provided with least one venthole 19 and at least one gas in each region 11
Pressure sensor 5；
Multiple crucibles 2 being connected with chamber 1, each crucible 2 is used for supplying steam at least one region 11 of chamber 1.
The evaporation source of the present embodiment includes multiple crucibles 2, each main portion (or many to chamber 1 of crucible 2
Individual region 11) steam is provided, it is provided with the baroceptor 5 for detected air pressure in each region 11, and air pressure embodies accordingly
The flow of steam in region 11, that is, embody the gas output of corresponding venthole 19.Thus, as long as according to baroceptor 5
Testing result the supply of respective regions 11 is adjusted (such as adjust the heating-up temperature of corresponding crucible 2, or adjust crucible 2 to
The gas flow in region 11 etc.), you can improve the uniformity of the steam that evaporation source overall (i.e. multiple zoness of different 11) produces.
Preferably, chamber 1 is strip；Arrange successively along the length direction of chamber 1 in multiple regions 11；Each venthole 19 edge
The length direction of chamber 1 is arranged successively.
That is, as shown in figure 3, the evaporation source of the present embodiment is preferably the form of " line source ", its generally strip,
And each venthole 19 is also arranged along its length.
Preferably, evaporation source includes 2 to 3 crucibles 2.
Although crucible 2 quantity is more many more is conducive to improving the uniformity of steam, if crucible 2 is too many, it is difficult to all
Crucible 2 is accurately controlled, and between crucible 2, distance is too near, easily influences each other, therefore a total of 2 to 3 crucibles 2 are that comparison is excellent
Choosing.
Preferably, each region 11 is provided with 2 to 3 ventholes 19.
Be adjusted according to the feedback of baroceptor 5, achievable 11 vapor volumes of zones of different uniform, but if one
Individual region 11 is excessive, and venthole therein 19 is excessive, then the gas output of these ventholes 19 also can exist uneven, therefore preferably every
Individual region 11 only corresponds to 2 to 3 ventholes 19, and the shape in each region 11 is too little completely the same.
Preferably, chamber 1 is internal is divided into multiple mutually disconnected compartments by partition wall, and each compartment is a region
11.
Obviously, if the zones of different 11 of chamber 1 is interconnected, although each crucible 2 is to supply for zones of different 11
Gas, but between zones of different 11, still can there is gas flowing, therefore the change of region 11 air pressure can produce shadow to other regions 11
Ring, therefore be difficult to accurately the air pressure in each region 11 is adjusted.It is therefore preferable that as shown in figure 3, each region 11 of chamber 1 is phase
The compartment being mutually not turned on, the air pressure in so each compartment (region 11) is separate, can achieve and more accurately adjusts.
Preferably, each crucible 2 is used for providing steam for multiple regions 11；Crucible 2 and each corresponding region 11
Between be connected by appendix 3.
Obviously, when the corresponding multiple region 11 of a crucible 2, each region 11 certainly exists one with the relative position of crucible 2
Fixed difference, therefore it is greatly, little away from vapor volume in the region 11 of crucible 2 to there will still likely be vapor volume in the region 11 of crucible 2
Problem.For this reason, can as shown in figure 3, allow each crucible 2 to be connected with multiple regions 11 (as compartment) by appendix 3 it is clear that
The steam producing in crucible 2 can compare and uniformly enters each bar appendix 3, thus, though the region 11 being connected from different appendixs 3
So differ larger with the distance of crucible 2, but the respective vapor volume obtaining is very close to can further improve the generation of evaporation source
Steam uniformity.
It is furthermore preferred that it is identical with the structure of a plurality of appendix 3 that same crucible 2 is connected.
That is, a plurality of appendix 3 being connected with same crucible 2 preferably has identical material, internal diameter, external diameter, length
Degree etc., thus ensureing that their structures are identical, is so more beneficial for ensureing that the vapor volume entering in every appendix 3 is identical.
It is furthermore preferred that each crucible 2 is used for providing steam for 2 to 3 regions 11.
As shown in Figure 3 although being that steam is transmitted by appendix 3, but due to each region 11 and crucible 2 relative position not
With, thus corresponding appendix 3 be also impossible to identical, if the appendix 3 that crucible 2 connects is excessive, different gas transmissions
The situation difference of pipe 3 is too big, and then makes the vapor volume difference in appendix 3 very big, is also unfavorable for improving the uniformity of steam, therefore
Corresponding 2 to 3 regions 11 of each crucible 2 are preferred.
Preferably, evaporation source also includes control unit, is connected with each baroceptor 5 and crucible 2, for according to each air pressure
The testing result of sensor 5 controls the heating-up temperature of each crucible 2.
That is, the heated condition (being such as passed through the electric current of heater strip) of each crucible 2 is that (in figure is not shown by control unit
Go out) control, and control unit then the testing result according to each baroceptor 5 controls the heating of crucible 2.Specifically, if sending out
Now correspond to the air pressure (as deviation more than 2%) all bigger than normal in multiple regions 11 of certain crucible 2, then reduce adding of corresponding crucible 2
Hot temperature, on the contrary then improve the heating-up temperature of corresponding crucible 2, thus realizing the automatically feedback control according to air pressure.
It is furthermore preferred that evaporation source also includes the governor motion 6 for adjusting gas flow in appendix 3.
Obviously, if a crucible 2 corresponds to multiple regions 11, the heating-up temperature adjusting crucible 2 is necessarily to its corresponding
All regions 11 all impact, and the air pressure that cannot eliminate between these regions 11 is uneven.For this reason, for each of the above crucible
2 examples being connected with multiple regions 11 (as compartment) by appendix 3, then can arrange governor motion 6 and adjust in each appendix 3
Gas flow, when air pressure different (as the deviation more than 2%) in multiple regions 11 corresponding from same crucible 2, then to phase
Gas flow in the appendix 3 answered is adjusted, thus realizing the air pressure to the multiple regions 11 being connected with same crucible 2
Independent regulation.
It is further preferred that governor motion 6 is tubulose, it is connected between chamber 1 and appendix 3, it includes：First is fixing
End 61 and the second fixing end 62, one of the two is connected with chamber 1, and another is connected with appendix 3；Rotating part 63, connects
Between the first fixing end 61 and the second fixing end 62, and can rotate relative to the first fixing end 61 and the second fixing end 62；First
Catch 651, located at the first fixing end 61 inner side and rotating part 63 connecting place, blocks a part for the first fixing end 61 internal channel；
Second catch 652, located at rotating part 63 inner side and the first fixing end 61 connecting place, blocks a part for rotating part 63 internal channel.
As shown in figure 4, governor motion 6 is attached to the pipe between chamber 1 and appendix 3 on the whole, governor motion 6
One fixing end connects chamber 1, another fixing end connecting gas transmission pipe 3, and and is provided with rotatable rotation between two fixing ends
Transfer part 63, there are the first catch 651, rotating part 63 inner side and the first fixing end 61 phase in the first fixing end 61 and rotating part 63 joint
There is the second catch 652 at the place of connecing.So, as shown in figure 5, when rotating part 63 rotates relative to the first fixing end 61, the first catch 651
Also change therewith with the overlapping area of the second catch 652, the sectional area change of the passage of gas in governor motion 6, can be passed through, from
And change the gas flow in appendix 3.
Wherein, crucible 2 and governor motion 6 can be respectively positioned on the vacuum intracavity of vacuum evaporation equipment, thus in vacuum evaporation
Cheng Zhongke detected air pressure, and rotate this rotating part 63 in the servicing operations after vacuum evaporation terminates again accordingly and adjusted
Section.Or it is also possible to by crucible 2 and governor motion 6 outside vacuum chamber, and only chamber 1 is located at vacuum intracavity, thus can be
Can be manually rotated this rotating part 63 during vacuum evaporation in real time to be adjusted.Or, may also set up driver (as motor etc.)
Drive rotating part 63 to rotate (such governor motion 6 can be located at vacuum intracavity, may be alternatively located at outside vacuum chamber), and driver is also controlled
Unit processed controls, thus automatic this rotating part 63 of real time rotation can be adjusted during vacuum evaporation.
Certainly, the concrete form of governor motion 6 is not limited to this.For example, if appendix 3 is made up of flexible material,
Then governor motion 6 is alternatively clipped in the clip on appendix 3, so that appendix 3 is produced by appendix 3 is applied with different chucking powers
The different deformation of life, also can change gas flow therein.
It is understood that the embodiment of above principle being intended to be merely illustrative of the present and the exemplary enforcement adopting
Mode, but the invention is not limited in this.For those skilled in the art, in the essence without departing from the present invention
In the case of god and essence, various modifications and improvement can be made, these modifications and improvement are also considered as protection scope of the present invention.
Claims (10)
1. a kind of evaporation source is it is characterised in that include：
Chamber, it is divided into multiple regions, is provided with least one venthole and at least one baroceptor in each region；
The crucible that multiple and described chamber is connected, each described crucible is used for supplying steam at least one region of chamber.
2. evaporation source according to claim 1 it is characterised in that
Described chamber interior is divided into multiple mutually disconnected compartments by partition wall, and each described compartment is a region.
3. evaporation source according to claim 1 it is characterised in that
Each described crucible is used for providing steam for multiple regions；
Described crucible is interregional with corresponding each to be connected by an appendix.
4. evaporation source according to claim 3 it is characterised in that
Identical with the structure of a plurality of appendix that same crucible is connected.
5. evaporation source according to claim 3 it is characterised in that
Each described crucible is used for providing steam for 2 to 3 regions.
6. evaporation source according to claim 3 is it is characterised in that also include：
For adjusting the governor motion of gas flow in described appendix.
7. evaporation source according to claim 6, it is characterised in that described governor motion is tubulose, is connected to described chamber
And appendix between, it includes：
First fixing end and the second fixing end, one of the two is connected with chamber, and another is connected with appendix；
Rotating part, is connected between the first fixing end and the second fixing end, and can the first fixing end relatively and the rotation of the second fixing end
Turn；
First catch, with rotating part connecting place inside the first fixing end, blocks a part for the first fixing end internal channel；
Second catch, with the first fixing end connecting place inside rotating part, blocks a part for rotating part internal channel.
8. evaporation source according to claim 1 is it is characterised in that also include：
Control unit, is connected with each baroceptor and crucible, controls for the testing result according to each described baroceptor
The heating-up temperature of each crucible.
9. evaporation source according to claim 1 it is characterised in that
Described evaporation source includes 2 to 3 crucibles.
10. evaporation source according to claim 1 it is characterised in that
Each described region is provided with 2 to 3 ventholes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611129547.7A CN106399947B (en) | 2016-12-09 | 2016-12-09 | Evaporation source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611129547.7A CN106399947B (en) | 2016-12-09 | 2016-12-09 | Evaporation source |
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| Publication Number | Publication Date |
|---|---|
| CN106399947A true CN106399947A (en) | 2017-02-15 |
| CN106399947B CN106399947B (en) | 2019-03-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201611129547.7A Active CN106399947B (en) | 2016-12-09 | 2016-12-09 | Evaporation source |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018137322A1 (en) * | 2017-01-24 | 2018-08-02 | 京东方科技集团股份有限公司 | Crucible |
| CN109402573A (en) * | 2018-11-29 | 2019-03-01 | 研创应用材料（赣州）股份有限公司 | A kind of large-size substrate evaporation coating device and the method for preparing CdTe solar film plating using the evaporation coating device |
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| CN109402573A (en) * | 2018-11-29 | 2019-03-01 | 研创应用材料（赣州）股份有限公司 | A kind of large-size substrate evaporation coating device and the method for preparing CdTe solar film plating using the evaporation coating device |
| CN109402573B (en) * | 2018-11-29 | 2020-11-03 | 研创应用材料（赣州）股份有限公司 | Large-size substrate evaporation device and method for preparing CdTe solar coating film by using same |
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| Publication number | Publication date |
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| CN106399947B (en) | 2019-03-15 |
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