CN106357151B - A kind of large deformation is than plate piezoelectric activation configuration - Google Patents
A kind of large deformation is than plate piezoelectric activation configuration Download PDFInfo
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- CN106357151B CN106357151B CN201610811696.5A CN201610811696A CN106357151B CN 106357151 B CN106357151 B CN 106357151B CN 201610811696 A CN201610811696 A CN 201610811696A CN 106357151 B CN106357151 B CN 106357151B
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- 230000004913 activation Effects 0.000 title claims abstract description 13
- 238000006073 displacement reaction Methods 0.000 claims abstract description 41
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 35
- 239000000919 ceramic Substances 0.000 claims abstract description 34
- 239000002184 metal Substances 0.000 claims abstract description 33
- 239000000463 material Substances 0.000 claims abstract description 14
- 230000010287 polarization Effects 0.000 claims description 4
- 239000012790 adhesive layer Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000012530 fluid Substances 0.000 description 7
- 239000010410 layer Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 5
- 238000007789 sealing Methods 0.000 description 4
- 239000012858 resilient material Substances 0.000 description 3
- 230000005684 electric field Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- NOESYZHRGYRDHS-UHFFFAOYSA-N insulin Chemical compound N1C(=O)C(NC(=O)C(CCC(N)=O)NC(=O)C(CCC(O)=O)NC(=O)C(C(C)C)NC(=O)C(NC(=O)CN)C(C)CC)CSSCC(C(NC(CO)C(=O)NC(CC(C)C)C(=O)NC(CC=2C=CC(O)=CC=2)C(=O)NC(CCC(N)=O)C(=O)NC(CC(C)C)C(=O)NC(CCC(O)=O)C(=O)NC(CC(N)=O)C(=O)NC(CC=2C=CC(O)=CC=2)C(=O)NC(CSSCC(NC(=O)C(C(C)C)NC(=O)C(CC(C)C)NC(=O)C(CC=2C=CC(O)=CC=2)NC(=O)C(CC(C)C)NC(=O)C(C)NC(=O)C(CCC(O)=O)NC(=O)C(C(C)C)NC(=O)C(CC(C)C)NC(=O)C(CC=2NC=NC=2)NC(=O)C(CO)NC(=O)CNC2=O)C(=O)NCC(=O)NC(CCC(O)=O)C(=O)NC(CCCNC(N)=N)C(=O)NCC(=O)NC(CC=3C=CC=CC=3)C(=O)NC(CC=3C=CC=CC=3)C(=O)NC(CC=3C=CC(O)=CC=3)C(=O)NC(C(C)O)C(=O)N3C(CCC3)C(=O)NC(CCCCN)C(=O)NC(C)C(O)=O)C(=O)NC(CC(N)=O)C(O)=O)=O)NC(=O)C(C(C)CC)NC(=O)C(CO)NC(=O)C(C(C)O)NC(=O)C1CSSCC2NC(=O)C(CC(C)C)NC(=O)C(NC(=O)C(CCC(N)=O)NC(=O)C(CC(N)=O)NC(=O)C(NC(=O)C(N)CC=1C=CC=CC=1)C(C)C)CC1=CN=CN1 NOESYZHRGYRDHS-UHFFFAOYSA-N 0.000 description 2
- 102000004877 Insulin Human genes 0.000 description 1
- 108090001061 Insulin Proteins 0.000 description 1
- 230000003444 anaesthetic effect Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229940125396 insulin Drugs 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
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Abstract
A kind of large deformation is than plate piezoelectric activation configuration, including inner liner wall (3), pressing plate (4), inner pressure ring (5), spring (6), outer press ring (7), housing (8), pedestal (9) and at least one plate piezoelectric driving unit, the plate piezoelectric driving unit includes the piezoelectric ceramic piece (1) being bonded together and sheet metal (2) again, and the displacement outbound course of plate piezoelectric driving unit is axial.By changing thickness, internal diameter, the outer diameter of piezoelectric ceramic piece (1), the material of sheet metal (2), thickness, internal diameter, outer diameter and plate piezoelectric driving unit number can adjust the output displacement of piezoelectric actuator.Present invention basis of formation driving unit by the way of chip-type piezoelectric potsherd combination elastic element, and realize by cascaded structure the superposition of multiple basic driving unit displacements, form large deformation ratio, compact plate piezoelectric driver.Number by increasing or decreasing plate piezoelectric driving unit can adjust the size of driver aperture.
Description
Technical field
The invention belongs to machinery field, be related to it is a kind of can precision positioning activation configuration, be suitable for low-power consumption, high-precision
The fluid control systems of degree, high-resolution, micrometeor.
Background technology
Piezoelectric actuator has displacement resolution height, High power output, low in energy consumption, loud as a kind of intellectual material actuator
The advantages that fast is answered, the preferred type of drive of the following high-precision flow control is had become, platform is being bulldozed without towing spacecraft, full electricity
On suffer from the foreground of being widely applied.However, the small problem of piezoelectric ceramic actuator output displacement, which has become, restricts what it was used
One critical bottleneck (generally 1/1000 deformation ratio).Although currently, passing through some displacement amplifying mechanism (such as flexible hinges
Deng) it can so that the output displacement of piezoelectric actuator amplifies 3~4 times, but which increases the volumes of entire drive mechanism.
Application No. is the Chinese patents of CN201410506958.8 to disclose a kind of Micro-displacement Driving based on piezoelectric stack
Device comprising displacement driven rod, it is in ladder circle column, displacement that displacement driven rod, which passes through the axially extending bore of end cap, displacement driven rod,
The cascaded surface of driven rod is contacted with the upper surface of end cap, and spring pocket is on displacement driven rod and is placed between end cap and locking nut
And it is in compressive state, end cap is flexibly connected with sleeve, and the lower face of piezoelectricity fold stack driver is placed in the groove of bottom in sleeve
In, the upper surface of piezoelectricity fold stack driver is contacted with the lower face of displacement driven rod.The shortcoming of this micro-displacement driver exists
In that cannot provide big deformation ratio, deformation ratio is 1/1000 or so, then needs to greatly increase product if necessary to increase stroke
Volume.
Application No. is the Chinese patents of CN201510603083.8 to disclose a kind of double cantilever beam oscillator Valveless piezoelectric pump, packet
It includes upper pump casing, lower pump body, upper piezoelectric vibrator, push electric tachometer indicator, holddown spring, tapered inlet, conical outlet, sealing ring.Upper pressure
Electric tachometer indicator and pushing electric tachometer indicator left end are bound up, and form " v " type；The right end of upper piezoelectric vibrator is fixed on upper pump casing,
The right end for pushing electric tachometer indicator is compressed by holddown spring；When piezoelectric pump is in off working state, electric tachometer indicator and lower pump body are pushed
Supporting plane completely attaches to.The piezoelectric pump is disadvantageous in that no pre-pressing force, and there are idle running phenomenons, and monolithic stroke is still
It is less than normal.
02 phase in 2010《Nanotechnology and precision engineering》On, article《The pump examination of circular piezoelectric single-chip drive-type aggressive valve
It tests》A kind of circular piezoelectric single-chip driver is described, can be used on active valve pump.It is shaken by upper valve body, lower valve body, piezoelectricity
Sub- driver, O-ring composition, valve are in normally open.When oscillator vibration, medium enters by entrance and flows to outlet.
The shortcoming of the valve pump configuration is still that stroke is on the low side, and stroke can be lost if using sealing structure, be can not achieve effectively
Opening and closing.
Invention content
Present invention solves the technical problem that being：Overcome the deficiencies of the prior art and provide a kind of large deformation ratio, without idle running,
Can topology plate piezoelectric driver.
Technical solution of the invention is：A kind of large deformation is than plate piezoelectric activation configuration, including inner liner wall, pressure
Plate, inner pressure ring, spring, outer press ring, housing, pedestal and at least one plate piezoelectric driving unit, the plate piezoelectric drive
Moving cell includes the piezoelectric ceramic piece and sheet metal being bonded together again；The center of sheet metal is equipped with through-hole, and sheet metal passes through institute
It states through-hole to connect together with inner liner wall, outer edge and the housing of sheet metal connect together；When the plate piezoelectric drives list
When the quantity of member is two or more, each plate piezoelectric driving unit is from top to bottom stacked successively by inner liner wall and housing；Bottom
Cavity is equipped in seat, the structure that plate piezoelectric driving unit, inner liner wall, housing are constituted is placed in the cavity of pedestal, most next
The sheet metal of grade overlaps with pedestal, and pressing plate is pressed on the sheet metal of most upper level；Spring is placed on pressing plate, spring
One end is compressed by inner pressure ring, is fixedly connected between pressing plate and inner pressure ring, and the other end of spring is pressed in by outer press ring on pedestal,
It is fixedly connected between outer press ring and pedestal, the precompression of spring is supplied to plate piezoelectric driving unit, piezoelectric ceramic piece by pressing plate
The aperture opened from base side wall of driving lead in draw.
The material of the piezoelectric ceramic piece is the ceramics with piezoelectricity function, inner liner wall, pressing plate, inner pressure ring, spring, external pressure
Ring, housing, pedestal material be metal.
The thickness of adhesive layer between the piezoelectric ceramic piece and sheet metal is 4 μm~5 μm.
The piezoelectric ceramic piece also passes through polarization process after completing to bond with sheet metal.
The displacement outbound course of the plate piezoelectric driving unit is axial.
The advantages of the present invention over the prior art are that：
(1) piezoelectric actuator of the present invention has under the conditions of identical length is several times as much as the conventional deformation for stacking piezoelectric material
Than.Such as due to the limitation of piezoelectric material inherent characteristic, under the premise of ensureing reliability, the output displacement of existing piezoelectric actuator
Ratio with length is 1/1000.And by its displacement of the piezoelectric actuator of 5 basic driver units up to 150 μm in the present invention,
Its longitudinal length is 20mm, deformation ratio 7.5/1000.The body of driver is greatly reduced in the case where identical displacement output requires
Product, to reduce the volume of product；
(2) present invention includes pressure pre-tightening apparatus, and pretightning force is provided for piezoelectric actuator.The invention eliminates piezoelectricity drives
The idle running of each plate piezoelectric driving unit inside dynamic device, to improve the output displacement of piezoelectric actuator.In addition, Piezoelectric Driving
Device is easy failure under alternation force effect, and the presence of pretightning force can make piezoelectric actuator avoid alternating force use environment,
Improve its service life；
(3) present invention is a kind of structure that can be topological, can be needed according to the output of actual displacement to increase plate piezoelectric
The number of driving unit, to meet larger displacement output requirement, solving monolithic plate piezoelectric driving unit stroke cannot still expire
The problem of sufficient displacement output requires.It, can be by suitably increasing chip especially in the fluid parts for having seal request
Piezo-electric drive units number increases output displacement, makes up since output displacement caused by sealing loses, wants to meet sealing
It asks.Output displacement can be adjusted by piezoelectric ceramic piece, sheet metal and driver number.By changing piezoelectric ceramic piece
Thickness, internal diameter, outer diameter, the material of sheet metal, thickness, internal diameter, outer diameter and piezo-electric drive units number can adjust
The output displacement of piezoelectric actuator, while three output displacement, service life, reliability indexs can also be taken into account；
(4) the configuration of the present invention is simple, it is compact, can topological it is strong.By Improvement, combined using chip-type piezoelectric potsherd
The mode basis of formation driving unit of elastic element, and the displacement superposed of multiple driving units is realized by cascaded structure, it is formed
Large deformation ratio, compact plate piezoelectric driver.Piezo-electric drive units topology is convenient, can be adapted for different opening requirement
Fluid controls parts.The high-precision flow control valve designed using this activation configuration.
The large deformation is suitable for low-power consumption, high-precision, high-resolution, micrometeor than novel slice type piezoelectric actuator structure
Fluid control systems.Microfluidic system usually require to meet simultaneously small size, high-precision, low-power consumption requirement.Such as navigate without towing
The high-precision ratio control of its device, the anesthetic of medical field, injection of insulin etc. all have one to volume and drive displacement output
Provisioning request.
Description of the drawings
Fig. 1 is plate piezoelectric activation configuration schematic diagram of the present invention；
Fig. 2 is plate piezoelectric structure of driving unit schematic diagram of the present invention；
Fig. 3 is spring prepressing structure schematic diagram of the present invention；
Fig. 4 is schematic diagram of base structure of the present invention.
Specific implementation mode
As shown in Figure 1, for large deformation of the present invention than the structural schematic diagram of novel slice type piezoelectric actuator structure, include mainly
Piezoelectric ceramic piece 1, sheet metal 2, inner liner wall 3, pressing plate 4, inner pressure ring 5, spring 6, outer press ring 7, housing 8 and pedestal 9.Wherein piezoelectricity
Potsherd 1 is piezoceramic material, remaining is metal material.
The present invention is the tandem activation configuration based on plate piezoelectric driving unit.As shown in Fig. 2, plate piezoelectric drives
Unit includes piezoelectric ceramic piece 1 and sheet metal 2, and the two is bonded by binder.Monolithic plate piezoelectric driving unit is powered
When generate upward displacement, can be according to the number of the plate piezoelectric driving unit needed for climb displacement.Each plate piezoelectric driving
Unit is joined end to end by inner liner wall 3, housing 8.It is provided to each plate piezoelectric driving unit by the spring 6 being pressed on pedestal 9
Thus pretightning force provides precompression and eliminating machine dead zone.When not powered, piezoelectric actuator mechanism is in original state；Power-up
Afterwards, piezoelectric ceramic piece 1 can make sheet metal 2 that upward buckling deformation occur, each plate piezoelectric driving unit to be deformed, and
The superposition of displacement in the axial direction is realized by activation configuration, and driving force and driving position are put forward for microfluidic control parts
It moves.The voltage for supplying piezoelectric ceramic piece 1 is different, and the warpage of different degrees of shape can occur for entire plate piezoelectric driving unit.
Since piezoelectric ceramics itself is hard and crisp, generated displacement very little, therefore it is general not using piezoelectric ceramics itself as
Piezoelectric vibrator directly uses, and typically piezoelectric ceramics and certain metallic resilient material are bonded together, and forms combo drive.
When external electrical field is applied on the electrode of combo drive, radial and axial deformation will occur for piezoelectric material layer.If applied
When direction of an electric field is parallel with the polarization direction of piezoelectric material reversed, piezoelectric material layer just will produce radial extent, and in polarization side
Axially upwardly shorten.Since the lower surface of piezoceramics layer and the upper surface of metallic resilient material film layer are closely combined one
Rise, when radial deformation occurs for piezoceramics layer, the lower surface of piezoceramics layer by metallic resilient material film layer resistance,
After stress reaches equilibrium state, entire combo drive shows as flexural deformation state.
Sheet metal 2 is connected together by its internal diameter and inner liner wall 3, and sheet metal 2 is socketed in one by its outer diameter and housing 8
It rises.In this way, plate piezoelectric driving unit is connected by inner liner wall 3,8 head and the tail of housing, in the lowermost chip driving unit
It is socketed with the bottom of pedestal 9, the plate piezoelectric driving unit and pressing plate 4 in the top connect.Pressing plate 4 is by the precompression of spring 6
It is supplied to plate piezoelectric driving unit.The internal diameter position of spring 6 is pressed between pressing plate 4 and inner pressure ring 5, the outer diameter position of spring 6
It is pressed between outer press ring 7 and pedestal 9.Pressing plate 4 has been fastened with after 5 holddown spring 6 of inner pressure ring by way of welding or being spirally connected
Come.Similarly, outer press ring 7 is tightened up with after 9 holddown spring 6 of pedestal also by the mode welded or be spirally connected, and is provided to be formed
The mechanism of pre-compressed spring power.
As shown in figure 3, for the schematic diagram of spring prepressing structure.Spring 6 is a kind of chip type spring, when spring 6 deforms
When, it just will produce spring force opposite to deformation direction, that size is proportional.It can be seen from the above, when spring 6 presses internal diameter position to be pressed in
Between pressing plate 4 and inner pressure ring 5, when the outer diameter position of spring 6 is pressed between outer press ring 7 and pedestal 9, by the way that pressing plate 4 and bottom is arranged
The relative dimensions of seat 9,6 inner-diameter portion of spring and outer radius portion will generate difference in height, that is, the amount of being deformed, required to obtain
Pretightning force.Spring prepressing structure acts on there are two mainly having：1) pretightning force is provided for each plate piezoelectric driving unit, spring is pre-
Pressure is supplied to plate piezoelectric driving unit, to eliminate idle running and improve the stress condition of piezoelectric ceramic actuator；2) it is
Entire large deformation is than the displacement of novel slice type piezoelectric actuator and the output end of driving force.Through-hole among pressing plate 4 can facilitate
The valve core valve stem in piezoelectric actuator mechanism and fluid parts in the present invention by and connect.
As shown in figure 4, the side of pedestal 9 is equipped with the lead outlet of piezoelectric ceramic piece 1, it is convenient for piezoelectric ceramic piece 1
Lead is driven to draw.Pedestal 9 is barrel-like structure, and cavity, piezoelectric ceramic piece 1, sheet metal 2, inner liner wall 3, pressure are equipped among pedestal 9
The structure that plate 4, inner pressure ring 5, spring 6, outer press ring 7, housing 8 are constituted is placed in the cavity of pedestal 9, the sheet metal of most next stage
2 overlap with pedestal 9.It is the material of sheet metal 2, thickness, interior by changing thickness, internal diameter, the outer diameter of piezoelectric ceramic piece 1
The number of diameter, outer diameter and plate piezoelectric driving unit can adjust the output displacement of piezoelectric actuator.
Also there is through-hole in the centre of plate piezoelectric driving unit, this is convenient for driving stem, spool when as driver, also can be
Fluid channel is given over to when as piezo electric valve.Pedestal 9 is equipped with external screw thread in bottom lower end, and parts are controlled convenient for convenient and fluid
Realize connection.
When installation, piezoelectric ceramic piece 1 is carried out respectively with sheet metal 2 first it is be bonded, bonding agent thickness be 4 μm~5 μm,
It completes to be glued after suppressing at high temperature.Piezoelectric ceramic piece 1 is polarised again after compacting.Then spring 6 is placed on
It on pressing plate 4, is compressed by inner pressure ring 5, by being welded to connect between pressing plate 4 and inner pressure ring 5.After the completion, large deformation is carried out than new
Monolithic plate piezoelectric driving unit, inner liner wall 3, housing 8 are put into inside pedestal 9 by the assembly of matrix formula piezoelectric actuator successively
Cavity in, the lead of piezoelectric ceramic piece 1 is drawn from the aperture that 9 side of pedestal is opened.After installing, spring 6 will be installed
And the pressing plate 4 of inner pressure ring 5 is placed on the sheet metal 2 of most upper level.One end of spring 6 is finally pressed in bottom using outer press ring 7
It uses and is welded to connect on seat 9, between outer press ring 7 and pedestal 9.Complete piezoelectric actuator is formed in this way.
The course of work of piezoelectric actuator of the present invention is as follows：
In the state that plate piezoelectric driving unit is not powered, spring 6 is in compressive state, at each plate piezoelectric driving unit
In Pre strained state.
After being powered to piezoelectric ceramic piece 1, will radial deformation occur for piezoelectric ceramic piece 1, and radial deformation will cause metal
The flexural deformation of piece 2.Since each plate piezoelectric driving unit is joined end to end by inner liner wall 3, housing 8, deformation is also led to
It crosses this mode to stack up, finally by displacement superposed to pressing plate 4.If by the spool of microfluidic control parts and pressing plate 4
Connection, then the piezoelectric actuator can then drive spool to be moved.Large deformation than novel slice type piezoelectric actuator deformation with
The proportional relationship of size of driving voltage.More big then its deformation of voltage is bigger, and smaller then its deformation of voltage is also corresponding smaller.Cause
This, can control the size of piezoelectric actuator output displacement by controlling the size of voltage.
When the supply voltage for reducing piezoelectric ceramic piece 1, you can control the output displacement of piezoelectric actuator.Equally,
The size of driving voltage and large deformation of the present invention relationship more proportional than the output displacement of novel slice type piezoelectric actuator.When driving electricity
To after 0, the output of piezoelectric actuator will also be returned to zero-bit for pressure drop.
The content that description in the present invention is not described in detail belongs to the known technology of those skilled in the art.
Claims (4)
1. a kind of large deformation is than plate piezoelectric activation configuration, it is characterised in that including：Inner liner wall (3), pressing plate (4), inner pressure ring
(5), spring (6), outer press ring (7), housing (8), pedestal (9) and at least one plate piezoelectric driving unit, the chip
Piezo-electric drive units include the piezoelectric ceramic piece (1) being bonded together and sheet metal (2) again；The center of sheet metal (2) is equipped with logical
Hole, sheet metal (2) are connected together by the through-hole and inner liner wall (3), and outer edge and the housing (8) of sheet metal (2) are socketed
Together；When the quantity of the plate piezoelectric driving unit is two or more, each plate piezoelectric driving unit passes through liner
Wall (3) and housing (8) from top to bottom stack successively；Be equipped with cavity in pedestal (9), plate piezoelectric driving unit, inner liner wall (3),
The structure that housing (8) is constituted is placed in the cavity of pedestal (9), and sheet metal (2) and the pedestal (9) of most next stage are overlapped on one
It rises, pressing plate (4) is pressed on the sheet metal (2) of most upper level；Spring (6) is placed on pressing plate (4), and one end of spring (6) passes through
Inner pressure ring (5) compresses, and is fixedly connected between pressing plate (4) and inner pressure ring (5), the other end of spring (6) is pressed in by outer press ring (7)
It on pedestal (9), is fixedly connected between outer press ring (7) and pedestal (9), the precompression of spring (6) is supplied to chip pressure by pressing plate (4)
The driving lead of electric drive unit, piezoelectric ceramic piece (1) is drawn from the aperture that pedestal (9) side wall is opened；The chip pressure
The displacement outbound course of electric drive unit is axial.
2. a kind of large deformation according to claim 1 is than plate piezoelectric activation configuration, it is characterised in that：The piezoelectricity pottery
The material of tile (1) is the ceramics with piezoelectricity function, inner liner wall (3), pressing plate (4), inner pressure ring (5), spring (6), outer press ring
(7), housing (8), pedestal (9) material be metal.
3. a kind of large deformation according to claim 1 or 2 is than plate piezoelectric activation configuration, it is characterised in that：Described
The thickness of adhesive layer between piezoelectric ceramic piece (1) and sheet metal (2) is 4 μm~5 μm.
4. a kind of large deformation according to claim 1 or 2 is than plate piezoelectric activation configuration, it is characterised in that：Described
Piezoelectric ceramic piece (1) also passes through polarization process after completing to bond with sheet metal (2).
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| CN111181440A (en) * | 2020-01-02 | 2020-05-19 | 温州大学 | Piezoelectric ceramic conversion device capable of controlling deformation of piezoelectric ceramic piece and manufacturing method thereof |
| CN111908896A (en) * | 2020-06-29 | 2020-11-10 | 华南理工大学 | Field-induced strain micro-displacement actuator and preparation method and application thereof |
| CN115143151B (en) * | 2022-08-16 | 2023-05-09 | 山东大学 | Friction-free zero-leakage hydraulic actuator and driving system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102969936A (en) * | 2012-11-30 | 2013-03-13 | 中国科学院宁波材料技术与工程研究所 | Single-drive bidirectional disk-shaped linear piezoelectric motor |
| CN103994059A (en) * | 2014-06-05 | 2014-08-20 | 吉林大学 | Resonance piezoelectric fan with cymbal-shaped cavity |
| CN105846713A (en) * | 2016-06-12 | 2016-08-10 | 吉林大学 | Tandem piezoelectric directional driver |
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| JP6539037B2 (en) * | 2014-11-25 | 2019-07-03 | キヤノン株式会社 | Drive unit |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102969936A (en) * | 2012-11-30 | 2013-03-13 | 中国科学院宁波材料技术与工程研究所 | Single-drive bidirectional disk-shaped linear piezoelectric motor |
| CN103994059A (en) * | 2014-06-05 | 2014-08-20 | 吉林大学 | Resonance piezoelectric fan with cymbal-shaped cavity |
| CN105846713A (en) * | 2016-06-12 | 2016-08-10 | 吉林大学 | Tandem piezoelectric directional driver |
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