CN106346127A - Method for micro-melting and polishing carbon steel by scanning electron beams - Google Patents

Method for micro-melting and polishing carbon steel by scanning electron beams Download PDF

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Publication number
CN106346127A
CN106346127A CN201610938250.9A CN201610938250A CN106346127A CN 106346127 A CN106346127 A CN 106346127A CN 201610938250 A CN201610938250 A CN 201610938250A CN 106346127 A CN106346127 A CN 106346127A
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electron beam
polishing
carbon steel
micro
vacuum
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Chinese (zh)
Inventor
魏德强
李新凯
高�浩
卢健
王荣
钟盛
韦凤兰
王晓冰
王优
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Guilin University of Electronic Technology
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Guilin University of Electronic Technology
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Priority to CN201610938250.9A priority Critical patent/CN106346127A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00Electron-beam welding or cutting
    • B23K15/08Removing material, e.g. by cutting, by hole drilling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00Electron-beam welding or cutting
    • B23K15/0033Preliminary treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/02Iron or ferrous alloys
    • B23K2103/04Steel or steel alloys

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

The invention discloses a method for micro-melting and polishing carbon steel by scanning electron beams, and relates to the technical field of carbon steel surface modification. The method mainly comprises the following steps: removing an oxide layer outside a substrate; mechanically polishing the substrate; washing the surface of the substrate; vacuumizing vacuum electron beam processing equipment; setting parameters; and performing scanning electron beam micro-melting and polishing on the substrate. By treating the surface of the substrate and then performing scanning electron beam micro-melting and polishing on the substrate by using the vacuum electron beam processing equipment, a sample with low surface roughness and high performance is obtained. The method has simple and convenient steps and reasonable parameter settings, is used for carrying out polishing treatment in a vacuum chamber, and has the advantages of no oxidation, simplicity, simple operation, high efficiency and the like, and the hardness, abrasion resistance, corrosion resistance and the like of a polished layer can be improved.

Description

The method of the micro- molten polishing carbon steel of scanning beam
Technical field
The present invention relates to carbon steel process for modifying surface field, the micro- molten polishing carbon steel of specifically a kind of scanning beam Method.
Background technology
Mainly there is following several method at present to the polishing of carbon steel surface: mechanical polishing, electrobrightening, chemical machinery are thrown Light, chemical polishing, laser polishing etc..Mechanical polishing is the processing method being most widely used in current commercial production, will be very Play mastery reaction in long a period of time, but its speed is relatively low, high cost, mechanically polishes the heat of generation in addition and vibration can be led Cause processing hardening and the internal stress of workpiece.Electrobrightening can increase surface of the work corrosion resistance and with low cost, main application In the relatively low metallic article of initial surface roughness, such as reflecting mirror, stainless steel tableware, ornament etc..But electrobrightening quality with The specification of electrolyte and current/voltage is relevant, needs to obtain through many experiments, so being difficult to extensively apply.Chemically mechanical polishing The impact causing and vibration can make workpiece impaired.Laser polishing relatively costly it is difficult in a large number put into actual production.Electron beam polishing Technology is the new material process for treating surface having occurred since 21 century, and it is to pass through to focus on the close electronics of high energy to form electronics Bundle bombardment material surface so as to top layer fusing or evaporation are thus obtain that roughness is relatively low, the process technology of better mechanical property.Pass System polishing is carried out mainly for the plane of simple shape, and electron beam polishing can apply in the polishing in curved surface, bearing or even hole. It is a kind of very promising new material Surface-micromachining process.
Content of the invention
It is an object of the invention to the method disclosing a kind of micro- molten polishing carbon steel of scanning beam, it requires technique letter List, efficiency high, polishing performance are good, hardness is high and wearability is good.
For reaching above-mentioned purpose, the present invention adopts the following technical scheme that
A kind of method of the micro- molten polishing carbon steel of scanning beam, comprises the steps:
Step one, carbon steel matrix is carried out with Milling Process to remove the outer oxide layer of described carbon steel matrix;
Step 2, using metallographical polishing machine, the described carbon steel matrix machining away outer oxide layer is mechanically polished, machinery After polishing, the roughness of described carbon steel matrix is 1.4 ~ 1.8 μm;
Step 3, with dehydrated alcohol, described carbon steel matrix is carried out, to remove described carbon steel matrix after mechanical polishing Upper accompanying impurity and granule;
Step 4, the described carbon steel matrix after cleaning is positioned in the vacuum chamber of vacuum electron beam process equipment, and to institute The vacuum chamber stating vacuum electron beam process equipment carries out evacuation process, and after evacuation process, the vacuum of described vacuum chamber is 10-3~10-1pa;
Step 5, technological parameter setting is carried out to described vacuum electron beam process equipment, the technique of the micro- molten polishing of scanning beam Parameter is: beam voltage 50 ~ 70kv, electron beam line 5 ~ 8ma, moving speed of table 1 ~ 5mm/min, Electron Beam Spot diameter 1 ~ 10mm;Technological parameter is carried out to described carbon steel matrix using described vacuum electron beam process equipment after being provided with Polishing.
Further, the vacuum of the described vacuum chamber of vacuum electron beam process equipment described in step 4 is 10-2pa.
Further, the beam voltage 60kv of vacuum electron beam process equipment described in step 5.
Further, the electron beam line of vacuum electron beam process equipment described in step 5 is 6.5ma.
Further, the movable workbench speed of vacuum electron beam process equipment described in step 5 is 3mm/min.
Further, the lectron beam spot diameter of vacuum electron beam process equipment described in step 5 is 4mm.
Compared with prior art, the invention has the beneficial effects as follows: electron beam process equipment in a vacuum chamber be scanned plus Heat, by controlling the parameters such as scanning voltage, sweep current, line frequency and workpiece translational speed, obtains the electricity close to the light velocity Son.When high-power electron beam striking work surface, electronics and metal surface collide and lose kinetic energy, the kinetic energy conversion of electronics For the heat energy of fusing material, within very short process time, material near-surface region accumulates substantial amounts of heat energy, material surface temperature It is rapidly increased to workpiece fusing point, in skin-material, the impurity of low melting point even gasifies and is directly removed, thus playing the work of purification With, and the temperature of matrix substantially remains in room temperature.Due to the mobility of liquid metal, motlten metal can be to the relatively low direction of curvature Flowing, up to top layer liquid metal, curvature reaches unanimity everywhere, can fill during it machining marks of skin-material with Pit, thus reach the effect from polishing.Because motlten metal is quick and matrix carries out heat exchange, melting zone quickly cools down generation The effect of " from quenching ", can produce tiny crystal grains and solid solution, thus improving material surface physical and chemical performance.Step of the present invention Easy, parameter setting rationally, is processed by shot blasting in a vacuum chamber, has that non-oxidation, method be simple, simple to operate, efficiency high The advantages of, after polishing, polishing layer strong hardness, wearability and decay resistance etc. all increase.
Brief description
In order to be illustrated more clearly that technical scheme, the accompanying drawing of required use in embodiment being described below It is briefly described.
Fig. 1 is the process chart of embodiment 1;
Fig. 2 is the ultramicroscope aspect graph of the matrix sample that embodiment 1 obtains;
Fig. 3 is the 3 d surface topography figure of the matrix sample that embodiment 2 obtains;
Fig. 4 is tissue topography's figure of the matrix sample that embodiment 3 obtains.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete Site preparation describes.Obviously, described embodiment is only a part of embodiment of the present invention, rather than whole embodiments.It is based on Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of not making creative work Embodiment, broadly falls into the scope of protection of the invention.
Embodiment 1
Refer to Fig. 1, a kind of method of the micro- molten polishing carbon steel of scanning beam, comprise the steps:
Step one, using No. 65 annealed steels as carbon steel matrix, Milling Process is carried out to remove No. 65 to No. 65 annealing steel matrix The outer oxide layer of annealing steel matrix.
Step 2, mechanically polished to machining away No. 65 of outer oxide layer annealing steel matrix using metallographical polishing machine, The roughness mechanically polishing rear No. 65 annealing steel matrix is 1.470 μm.
Step 3, steel matrix of No. 65 being annealed with dehydrated alcohol are carried out, and then air-dry, to remove 65 after mechanical polishing Number annealing steel matrix on accompanying impurity and granule.
Step 4, steel matrix that No. 65 after cleaning are annealed are positioned in the vacuum chamber of vacuum electron beam process equipment, and Evacuation process is carried out to the vacuum chamber of vacuum electron beam process equipment, after evacuation process, the vacuum of vacuum chamber is 10-2pa.
Step 5, technological parameter setting is carried out to vacuum electron beam process equipment, the technique of the micro- molten polishing of scanning beam Parameter is: beam voltage 60kv, electron beam line 5ma, moving speed of table 3mm/min, lectron beam spot diameter 4mm;Technological parameter is carried out at electron beam polishing to No. 65 annealing steel matrix using vacuum electron beam process equipment after being provided with Reason, obtains the micro- molten polishing sample of No. 65 steel.
Fig. 2 gives the micro- molten polishing sample of No. 65 steel matrix of the method preparation according to embodiment 1 in ultramicroscope Under aspect graph, ultramicroscope amplification is 60 times, and wherein diagram left side (a circle shown in) is the micro- molten polishing of scanning beam Layer, right side (shown in b circle) is primary morphology.Fig. 2 result shows No. 65 steel curved beam of the micro- molten polishing of electron beam, surface machinery Cut eliminates, no obvious crackle pore, has obtained good smooth surface morphology.Former No. 65 steel matrix are organized as pearlite+ferrum Ferritic, forms surface martensite strengthening layer through rapidly solidification.Analytical proof after tested, after being scanned through the micro- molten polishing of electron beam, Sample roughness is reduced to 0.624 μm by 1.470 μm of original sample, and surface hardness rises to 780 ~ 800hv0.2, is that matrix is hard 2.6 ~ 2.8 times of degree, surface abrasion resistance is 3 times of parent metal.
Embodiment 2
A kind of method of the micro- molten polishing carbon steel of scanning beam, comprises the steps:
Step one, using No. 65 annealed steels as carbon steel matrix, Milling Process is carried out to remove No. 65 to No. 65 annealing steel matrix The outer oxide layer of annealing steel matrix.
Step 2, mechanically polished to machining away No. 65 of outer oxide layer annealing steel matrix using metallographical polishing machine, The roughness mechanically polishing rear No. 65 annealing steel matrix is 1.470 μm.
Step 3, steel matrix of No. 65 being annealed with dehydrated alcohol are carried out, and then air-dry, to remove 65 after mechanical polishing Number annealing steel matrix on accompanying impurity and granule.
Step 4, steel matrix that No. 65 after cleaning are annealed are positioned in the vacuum chamber of vacuum electron beam process equipment, and Evacuation process is carried out to the vacuum chamber of vacuum electron beam process equipment, after evacuation process, the vacuum of vacuum chamber is 10-2pa.
Step 5, technological parameter setting is carried out to vacuum electron beam process equipment, the technique of the micro- molten polishing of scanning beam Parameter is: beam voltage 60kv, electron beam line 6.5ma, moving speed of table 3mm/min, electron beam spot are straight Footpath 4mm;Technological parameter carries out electron beam polishing using vacuum electron beam process equipment to No. 65 annealing steel matrix after being provided with Process, obtain the micro- molten polishing sample of No. 65 steel.
Fig. 3 gives the three-dimensional surface shape of the micro- molten polishing sample of No. 65 steel matrix of the method preparation according to embodiment 2 Looks figure, wherein Fig. 3 (a) are initial surface pattern, and Fig. 3 (b) is the surface shape of the sample after the micro- molten polishing of scanning beam Looks.According to Fig. 3, analytical proof after tested, after being scanned through the micro- molten polishing of electron beam, sample roughness is by original sample 1.470 μm are reduced to 0.867 μm, and surface hardness rises to 800 ~ 820hv0.2, are 2.8 ~ 3.2 times of matrix hardness, surface abrasion resistance Property is 4 ~ 5 times of parent metal.
Embodiment 3
A kind of method of the micro- molten polishing carbon steel of scanning beam, comprises the steps:
Step one, using No. 65 annealed steels as carbon steel matrix, Milling Process is carried out to remove No. 65 to No. 65 annealing steel matrix The outer oxide layer of annealing steel matrix.
Step 2, mechanically polished to machining away No. 65 of outer oxide layer annealing steel matrix using metallographical polishing machine, The roughness mechanically polishing rear No. 65 annealing steel matrix is 1.470 μm.
Step 3, steel matrix of No. 65 being annealed with dehydrated alcohol are carried out, and then air-dry, to remove 65 after mechanical polishing Number annealing steel matrix on accompanying impurity and granule.
Step 4, steel matrix that No. 65 after cleaning are annealed are positioned in the vacuum chamber of vacuum electron beam process equipment, and Evacuation process is carried out to the vacuum chamber of vacuum electron beam process equipment, after evacuation process, the vacuum of vacuum chamber is 10-2pa.
Step 5, technological parameter setting is carried out to vacuum electron beam process equipment, the technique of the micro- molten polishing of scanning beam Parameter is: beam voltage 60kv, electron beam line 5ma, moving speed of table 1mm/min, lectron beam spot diameter 4mm;Technological parameter is carried out at electron beam polishing to No. 65 annealing steel matrix using vacuum electron beam process equipment after being provided with Reason, obtains the micro- molten polishing sample of No. 65 steel.
Fig. 4 gives tissue topography's figure of the micro- molten polishing sample of No. 65 steel matrix of the method preparation according to embodiment 3. Fig. 4 (a) is tissue topography's figure of whole matrix, and amplification is 500 times;Fig. 4 (b) is for hardening zone in Fig. 4 (a) in amplification For the tissue topography's figure under 800 times, be rapidly cooled into after being organized as in Fig. 4 (b) heating the mixing martensite of lath and needle-like+ Retained austenite;Fig. 4 (c) is that in Fig. 4 (a), transition region is the tissue topography's figure under 800 times in amplification, tissue in Fig. 4 (c) For mixing martensite+non-molten iron ferritic;Fig. 4 (d) is that in Fig. 4 (a), the matrix away from hardening zone is 800 times in amplification Under tissue topography figure, be organized as pearlite+ferrite in Fig. 4 (d).No. 65 base steels to the method preparation according to embodiment 3 Body micro- molten polishing sample tested, analytical proof after tested, be scanned through electron beam micro- molten polishing after, sample roughness by 1.470 μm of original sample are reduced to 0.702 μm, and surface hardness rises to 790 ~ 820hv0.2, are the 2.6 ~ 3.2 of matrix hardness Times, surface abrasion resistance is 6 ~ 7 times of parent metal.
Embodiment 4
A kind of method of the micro- molten polishing carbon steel of scanning beam, comprises the steps:
Step one, using No. 65 annealed steels as carbon steel matrix, Milling Process is carried out to remove No. 65 to No. 65 annealing steel matrix The outer oxide layer of annealing steel matrix.
Step 2, mechanically polished to machining away No. 65 of outer oxide layer annealing steel matrix using metallographical polishing machine, The roughness mechanically polishing rear No. 65 annealing steel matrix is 1.4 μm.
Step 3, steel matrix of No. 65 being annealed with dehydrated alcohol are carried out, and then air-dry, to remove 65 after mechanical polishing Number annealing steel matrix on accompanying impurity and granule.
Step 4, steel matrix that No. 65 after cleaning are annealed are positioned in the vacuum chamber of vacuum electron beam process equipment, and Evacuation process is carried out to the vacuum chamber of vacuum electron beam process equipment, after evacuation process, the vacuum of vacuum chamber is 10-2pa.
Step 5, technological parameter setting is carried out to vacuum electron beam process equipment, the technique of the micro- molten polishing of scanning beam Parameter is: beam voltage 60kv, electron beam line 8ma, moving speed of table 3mm/min, lectron beam spot diameter 1mm;Technological parameter is carried out at electron beam polishing to No. 65 annealing steel matrix using vacuum electron beam process equipment after being provided with Reason, obtains the micro- molten polishing sample of No. 65 steel.
No. 65 steel samples of molten polishing micro- to electron beam carry out test analysis to be proved, is scanned through the micro- molten throwing of electron beam After light, sample roughness is reduced to 1.033 μm by 1.4 μm of original sample, and surface hardness rises to 800 ~ 830hv0.2, is matrix 2.6 ~ 3.1 times of hardness, surface abrasion resistance is 5 ~ 6 times of parent metal.
Embodiment 5
A kind of method of the micro- molten polishing carbon steel of scanning beam, comprises the steps:
Step one, using No. 65 annealed steels as carbon steel matrix, Milling Process is carried out to remove No. 65 to No. 65 annealing steel matrix The outer oxide layer of annealing steel matrix.
Step 2, mechanically polished to machining away No. 65 of outer oxide layer annealing steel matrix using metallographical polishing machine, The roughness mechanically polishing rear No. 65 annealing steel matrix is 1. 8 μm.
Step 3, steel matrix of No. 65 being annealed with dehydrated alcohol are carried out, and then air-dry, to remove 65 after mechanical polishing Number annealing steel matrix on accompanying impurity and granule.
Step 4, steel matrix that No. 65 after cleaning are annealed are positioned in the vacuum chamber of vacuum electron beam process equipment, and Evacuation process is carried out to the vacuum chamber of vacuum electron beam process equipment, after evacuation process, the vacuum of vacuum chamber is 10-3pa.
Step 5, technological parameter setting is carried out to vacuum electron beam process equipment, the technique of the micro- molten polishing of scanning beam Parameter is: beam voltage 60kv, electron beam line 4ma, moving speed of table 5mm/min, lectron beam spot diameter 10mm;Technological parameter is carried out at electron beam polishing to No. 65 annealing steel matrix using vacuum electron beam process equipment after being provided with Reason, obtains the micro- molten polishing sample of No. 65 steel.
No. 65 steel samples of molten polishing micro- to electron beam carry out test analysis to be proved, is scanned through the micro- molten throwing of electron beam After light, sample roughness is reduced to 1.15 μm by 1.78 μm of original sample, and surface hardness rises to 770 ~ 790hv0.2, is matrix 2.5 ~ 2.8 times of hardness, surface abrasion resistance is 6 ~ 8 times of parent metal.
The above, the only specific embodiment of the present invention, but protection scope of the present invention is not limited thereto, and any Those familiar with the art the invention discloses technical scope in, the change or replacement that can readily occur in, all answer It is included within the scope of the present invention.Therefore, protection scope of the present invention with described scope of the claims should be Accurate.

Claims (6)

1. a kind of method of the micro- molten polishing carbon steel of scanning beam is it is characterised in that comprise the steps:
Step one, carbon steel matrix is carried out with Milling Process to remove the outer oxide layer of described carbon steel matrix;
Step 2, using metallographical polishing machine, the described carbon steel matrix machining away outer oxide layer is mechanically polished, machinery After polishing, the roughness of described carbon steel matrix is 1.4 ~ 1.8 μm;
Step 3, with dehydrated alcohol, described carbon steel matrix is carried out, to remove described carbon steel matrix after mechanical polishing Upper accompanying impurity and granule;
Step 4, the described carbon steel matrix after cleaning is positioned in the vacuum chamber of vacuum electron beam process equipment, and to institute The vacuum chamber stating vacuum electron beam process equipment carries out evacuation process, and after evacuation process, the vacuum of described vacuum chamber is 10-3~10-1pa;
Step 5, technological parameter setting is carried out to described vacuum electron beam process equipment, the technique of the micro- molten polishing of scanning beam Parameter is: beam voltage 50 ~ 70kv, electron beam line 5 ~ 8ma, moving speed of table 1 ~ 5mm/min, Electron Beam Spot diameter 1 ~ 10mm;Technological parameter is carried out to described carbon steel matrix using described vacuum electron beam process equipment after being provided with Polishing.
2. the micro- molten polishing carbon steel of scanning beam according to claim 1 method it is characterised in that: institute in step 4 The vacuum stating the described vacuum chamber of vacuum electron beam process equipment is 10-2pa.
3. the micro- molten polishing carbon steel of scanning beam according to claim 1 method it is characterised in that: institute in step 5 State the beam voltage 60kv of vacuum electron beam process equipment.
4. the micro- molten polishing carbon steel of scanning beam according to claim 1 method it is characterised in that: institute in step 5 The electron beam line stating vacuum electron beam process equipment is 6.5ma.
5. the micro- molten polishing carbon steel of scanning beam according to claim 1 method it is characterised in that: institute in step 5 The movable workbench speed stating vacuum electron beam process equipment is 3mm/min.
6. the micro- molten polishing carbon steel of scanning beam according to claim 1 method it is characterised in that: institute in step 5 The lectron beam spot diameter stating vacuum electron beam process equipment is 4mm.
CN201610938250.9A 2016-10-25 2016-10-25 Method for micro-melting and polishing carbon steel by scanning electron beams Pending CN106346127A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107619909A (en) * 2017-08-07 2018-01-23 桂林电子科技大学 A kind of method of Combined Processing 5CrMnMo hot die steels
CN115161649A (en) * 2022-05-07 2022-10-11 电子科技大学 Surface treatment method for metal part of molecular beam epitaxy equipment
CN115287416A (en) * 2022-10-08 2022-11-04 太原科技大学 Copper-containing stainless steel and surface modification method thereof

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107619909A (en) * 2017-08-07 2018-01-23 桂林电子科技大学 A kind of method of Combined Processing 5CrMnMo hot die steels
CN107619909B (en) * 2017-08-07 2019-04-02 桂林电子科技大学 A kind of method of combined processing 5CrMnMo hot die steel
CN115161649A (en) * 2022-05-07 2022-10-11 电子科技大学 Surface treatment method for metal part of molecular beam epitaxy equipment
CN115287416A (en) * 2022-10-08 2022-11-04 太原科技大学 Copper-containing stainless steel and surface modification method thereof
CN115287416B (en) * 2022-10-08 2022-12-20 太原科技大学 Copper-containing stainless steel and surface modification method thereof

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Application publication date: 20170125