CN106342212B - High reflection mirror laser back scattering measurement mechanism - Google Patents
High reflection mirror laser back scattering measurement mechanismInfo
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- CN106342212B CN106342212B CN200810075358.5A CN200810075358A CN106342212B CN 106342212 B CN106342212 B CN 106342212B CN 200810075358 A CN200810075358 A CN 200810075358A CN 106342212 B CN106342212 B CN 106342212B
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Abstract
A kind of high reflection mirror laser back scattering measurement mechanism, belongs to laser gyro field tests. Laser is carried out to light splitting, and the fluctuation information that reverberation is detected in real time to acquisition laser power send the differential end of lock-in amplifier so that the impact of deduction light source fluctuation on measured value; To transmitted light modulate, optical element adjust after, incide tested high reflection mirror surface with angle adjustable, reverberation is absorbed by light trap, back-scattering light taking incident light as optical axis is integrated ball by an aperture solid angle and collects, and be converted to the signal of telecommunication and give two of the differential end of lock-in amplifier, send computer through phase-locked amplification processing. The back scattering light intensity that sample completes difference with computer-controlled automatically controlled motion is measured, and obtains two-dimensional distribution. Solve the difficult problem of measuring of faint back scattering light intensity. Realize the accurate measurement of high reflection mirror laser back scattering and automatically measured, also can measure other purposes high reflection mirror or super-smooth surface backscattering. Can be widely used in laser gyro produces and scientific research.
Description
Technical field
The invention belongs to laser gyro technical field of measurement and test, relate to high reflection mirror that laser gyro resonator is usedBackscattering is measured, specifically high reflection mirror laser back scattering measurement mechanism.
Background technology
Typical laser gyro system has the optical resonator of a polygon (commonly square), heightSpeculum is the critical optical elements that forms resonator, and generally its reflectivity is up to more than 99.99%. At resonatorIn be not coupled mutually along the two-beam ripple of propagating counterclockwise advance, the rotation of laser system makes this two kinds of Shu Guangbo mouldsBetween formula, produce Doppler frequency differenceThis difference is proportional to velocity of rotation, utilizes this principle to carry out measured angular and turnsMoving speed is to obtain the accurate locus of object coordinate. But in velocity of rotation hour, measure sensitivity but byThe parameters such as the scattering of chamber mirror limit, and it is certain that the existence of these scattered lights can make the light wave of two-way backpropagation existCoupling. Particularly back-scattering light, due to consistent with the beam direction of backpropagation, is more easily coupled to oppositelyIn the light wave of propagating, cause the latch up effect of laser gyro, thereby cause the sensitivity of laser gyro. SwashThe backscattering of optical circulator high reflection mirror is the main cause that forms backscattering in chamber, measures the back of the body of high reflection mirrorTo scattering, contribute to improve the success rate of resonator assembling, can provide effective to research lock district problem simultaneouslyParameter. The backscattering light intensity of measuring exactly high reflection mirror has heavily improving Gyro Precision and workmanshipThe directive significance of wanting is the important process means that instruct laser gyro to produce.
Because laser gyro is widely used in the contour Environment Science of Aeronautics and Astronautics, also relate to national defence and military field,Also have some information in confidential state, from the documents and materials of consulting, at present both at home and abroad at high reflection mirror orThe visible a small amount of report in full integral scattering measurement aspect of super-smooth surface, back scattering only accounts in full integral scattering minimumPart, energy is less, yet there are no the report of measurement of correlation.
Project team of the present invention is to domestic and international patent documentation and the journal article retrieval published, not yet find withThe report that the present invention is closely related with the same or document.
Summary of the invention
The measurement that the object of the invention is to overcome insoluble faint back scattering light intensity in above-mentioned technical field is askedTopic, provides one to measure the back scattering of high reflection mirror laser, and measuring process can change and incides sampleThe size of incident angle of light, the high reflection mirror laser back scattering that can obtain the two-dimentional back scattering distribution map of sample is surveyedAmount device.
The present invention is described in detail below
Proper backscattering, its direction is identical with incident light direction, and it is directly measured is extremelyDifficulty. The present invention is the back-scattering light in a limited aperture solid angle of collecting centered by incident beamCome by force indirectly to characterize backscattered light strong.
Technology of the present invention solves principle:
According to scattering theory, near back scattering direction, scattered light intensity changes slowly, and therefore the present invention proposesUtilize the aperture solid angle inscattering luminous intensity in this region to characterize backscattering luminous intensity, adopt solid angle long-pendingSeparating method carries out the measurement of back scattering, is called solid angle integral scattering method (Solid-angle IntegratedScattering, SIS). Secondly utilization of the present invention compensates due to light merit the real-time testing result of laser output powerThereby rate fluctuates, the measure error causing has further improved certainty of measurement, and the high reflection mirror in the present invention is loose dorsadPenetrate measurement mechanism profit and realized in this way the measurement of back scattering light intensity. Utilize apparatus of the present invention, and one is knownThe standard sample of back scattering rate also can carry out the measurement of scattered power.
One of technical solution of the present invention is as follows:
A kind of high reflection mirror laser back scattering measurement mechanism, comprises an optical table and is fixed on optical tableBase plate, all fixtures, connector, base plate surfaces externally and internally all carry out Darkening process, on base plate, are provided withLASER Light Source, is characterized in that: measurement mechanism also comprises: send in the direction that light beam advances at LASER Light Source,Anti-mirror is installed successively, and folded light beam is injected photodetector and is carried out opto-electronic conversion and after straight processing, send phase-lockedOne end of the differential input terminal of amplifier is the reference signal of light source power fluctuation by way of compensation; Transmitted light beam is pressed cloth loudspeakerAcousto-optic modulator is injected at lattice angle, through polarizer, the first diaphragm, speculum group carry out 90 ° of turnover directive half-wave plates,Photoconductive tube, integrating sphere, the second diaphragm, the angle of setting with user through the light of integrating sphere incides and is placed inOn sample on accurate automatically controlled platform, the reverberation directive light trap of sample surfaces is absorbed, and sample surfaces dorsadScattered light is integrated ball and converges, and the backscattered light exit of integrating sphere is provided with the second diaphragm, by the second diaphragmThe subtended angle size of adjusting solid angle, is also provided with round hole on integrating sphere, round hole place is provided with photomultiplier transitPipe, the output of photomultiplier connects the other end of lock-in amplifier differential input terminal, and lock-in amplifier is by communicationBus is connected with computer, and lock-in amplifier will send computer processing, computer after differential signal amplification denoisingBe connected with signal generator by communication bus, signal generator output is divided into two-way, and a road drives acousto-optic modulationDevice, another road connects the reference signal end of lock-in amplifier; Photoconductive tube passes from the center of integrating sphere, guarantees integrationSolid angle symmetrically and evenly. Can ensure in the time that unexpected skew appears in light path large merit with photoconductive tube leaded light simultaneouslyThereby being unlikely to be strayed into, the incident light of rate avoids damaging photomultiplier in integrating sphere.
This programme is to change entering of the incident light that incides on sample by the rotation of automatically controlled of computer control preciseFiring angle, changes by the automatically controlled stage translation of computer control precise the position of inciding the incident light on sample, obtainsThe back scattering two-dimensional distribution of sample under a certain incidence angle.
Technical solution of the present invention two as follows:
A kind of high reflection mirror laser back scattering measurement mechanism, comprises an optical table and is fixed on optical tableBase plate, all fixtures, connector, base plate surfaces externally and internally all carry out Darkening process, are provided with sharp on base plateRadiant, is characterized in that: measurement mechanism also comprises: send in the direction that light beam advances at LASER Light Source, comply withInferior anti-mirror is installed, folded light beam is injected photodetector and is carried out opto-electronic conversion and after straight processing, send phase-locked puttingOne end of the differential input terminal of large device is the reference signal of light source power fluctuation by way of compensation; Transmitted light beam is pressed cloth loudspeaker latticeAcousto-optic modulator is injected at angle, and through polarizer, the first diaphragm, the first speculum, light beam carries out through the first speculumDirective the second speculum after 90 ° of turnovers, the second speculum, the 3rd speculum, the 4th speculum, half-wave plate,Photoconductive tube, integrating sphere, the second diaphragm are all fixedly mounted in a rotatable swivel mount, through integrating sphereLight with user set angle incide on the sample being placed on accurate automatically controlled platform, the reflection of sample surfacesLight directive light trap is absorbed, and the back-scattering light of sample surfaces is integrated ball and converges, the backscattered light of integrating sphereExit is provided with the second diaphragm, adjusts the subtended angle size of solid angle by the second diaphragm; On integrating sphere, be also provided withRound hole, round hole place is provided with photomultiplier, and it is differential that the output of photomultiplier connects lock-in amplifierThe other end of input, lock-in amplifier is connected with computer by communication bus, and computer passes through communication busBe connected with signal generator, signal generator output is divided into two-way, and a road drives acousto-optic modulator, and another road connectsThe reference signal end of lock-in amplifier; Photoconductive tube passes from the center of integrating sphere; By swivel mount, change incidentTo the incident direction of light on sample, incident light changes direction with the rotation of swivel mount, incides sample and changeIncidence angle on product, the back scattering two-dimensional distribution of acquisition sample. This programme is second anti-by speculum groupPenetrate mirror~four speculum and light path element afterwards and be installed in a rotatable swivel mount, incident lightBundle changes with the rotation of swivel mount the incidence angle inciding on sample.
Realization of the present invention is also: swivel mount cover plate for sealing, and can carry out revolving of 70 ° of scopes by winding degree dishTurn, the light beam penetrating from swivel mount can change the incident being mapped to sample with the setting of swivel mount angleAngle, the laser vertical that the surfaces of revolution of swivel mount and the first speculum reflect. The second speculum will be from the first reflectionThe laser reflection that mirror goes out enters in swivel mount, and carries out 90 ° of rear directive the 3rd speculums of light path turnover, the 3rdSpeculum and the 4th speculum make respectively light beam carry out 90 ° of light path turnovers, the emergent light of the second speculum and the 4thThe incident light of speculum and from the outgoing beam of swivel mount in same plane, and the emergent light of the second speculumParallel to each other with the emergent light of the 4th speculum, emergent light directive 1/2 wave plate of the 4th speculum. Swivel mountIncident angle can regulate by coarse adjustment screw and micrometer adjusting screw, and scale can be indicated the angle of the required adjusting of swivel mountDegree size, can locking rotating pivoted frame by lock-screw, stable equilibrium when balance weight can ensure swivel mount locking.
The present invention has designed two kinds of approach and has realized the change of the incidence angle of the incident light on directive sample. ItsThe one: incide incident direction of light on sample constant, the translation of computer control precise electronic control translation stage andRotation reaches the object that changes the incidence angle that incides the incident light on sample. Speculum group is by a speculum structureBecome, the light beam that enters speculum group by the first diaphragm carries out 90 ° of turnover directive half-wave plates, does not need to change incidentTo the direction of light on sample, realize and change incident by the automatically controlled stage translation of computer control precise and rotationTo the incidence angle of the incident light on sample. Without changing incident beam, as long as automatically controlled fortune of computer control preciseThe adjustment of the moving incidence angle that realizes required incident light. Simple in structure, cost is low. This by approach one realize intoThe change of firing angle. It two is: change the incident direction of light inciding on sample, accurate automatically controlled only changes into and doingThe translation of XY direction, part optical element is placed in swivel mount, and incident light changes with the rotation of swivel mount,Change the object of incident light to the incidence angle on sample thereby reach. Sample picks and places easily, easy to operate. ThisRealize the change of incidence angle by approach two.
High reflection mirror laser back scattering measurement mechanism of the present invention, the important step of determining measuring accuracy is the light of selectingThe characterisitic parameter of electricity multiplier tube, the experiment proved that apparatus of the present invention can be measured and is low to moderate 10-14The W order of magnitude littleFaint back scattering light intensity in the solid angle of hole. The ability of surveying faint optical signal along with photomultiplier strengthens, profitCan measure less back scattering light intensity by apparatus of the present invention. Apparatus of the present invention flexible design, both can change incidentArrive the size of the incident angle of light of sample, also can obtain the two-dimentional back scattering distribution map of sample.
Technical scheme one of the present invention and scheme two are all according near back scattering direction, and scattered light intensity changes slowSlow rule, utilizes the aperture solid angle inscattering luminous intensity in this region to characterize backscattering luminous intensity, adoptsCarry out the measurement of back scattering by solid angle integration method. The laser semi-permeable and semi-reflecting mirror that power stabilize laser instrument sendsLight splitting, the object of detection of reflected light is the minor fluctuations of detection laser power in real time, to deduct laser powerThe impact of fluctuation on measurement result, the object that transmitted light is modulated through acousto-optic modulator is in order to obtain certain frequencyAlternation light, so that the impact that utilizes lock-in amplifier to carry out the noise signals such as coherent detection amplification removal surround lighting is carriedHigh measurement accuracy. Optical element adjustment can require to select to obtain P light or S according to user's measurement on the one handLight, also can limit on the other hand veiling glare and enter photomultiplier. Inciding tested high reflection mirror surface angle canTune can meet the different measurement requirement of laser incidence angle of difform laser gyro annular chamber. Reverberation quiltLight trap absorbs, and the back-scattering light taking incident light as optical axis is integrated ball by a little solid angle and collects, thenThe backscattered light of collection is converted to the signal of telecommunication by the photomultiplier little with high sensitivity dark current, through phase-locked amplificationDevice denoising is sent computer after amplifying, and computer calculates the size of backscattered light automatically. Sample is placed in oneOn the two-dimension translational platform of calculation machine control, computer controlled automatic translation stage completes the back scattering light intensity of difference and surveysAmount, thus the two-dimensional distribution of the back scattering of sample can be obtained.
The present invention has realized the accurate measurement of high reflection mirror laser back scattering and has automatically measured, and can measure exactlyThe backscattering light intensity of high reflection mirror, also can measure the loose dorsad of other purposes high reflection mirror or super-smooth surfacePenetrate.
Brief description of the drawings:
Fig. 1 is composition schematic diagram of the present invention.
Fig. 2 is that schematic diagram is looked on the light path frame for movement left side of the embodiment of the present invention 3 laser incidence angles while being 0 °.
Fig. 3 is the light path frame for movement front elevational schematic of the embodiment of the present invention 3 laser incidence angles while being 30 °.
Detailed description of the invention:
Embodiment 1:
The present invention is a kind of high reflection mirror laser back scattering measurement mechanism, comprises an optical table 20 and is fixed onBase plate 19 on optical table, all fixtures, connector, base plate 19 surfaces externally and internallies all carry out Darkening process,LASER Light Source 1 is installed on base plate 19, and overall measurement device also comprises: send before light beam at LASER Light Source 1In the direction of entering, anti-mirror 2 is installed successively, folded light beam is injected photodetector 17 and is carried out opto-electronic conversionWith one end ginseng of light source power fluctuation by way of compensation of differential input terminal of sending lock-in amplifier 15 after straight processingExamine signal; Transmitted light beam is injected acousto-optic modulator 3 by Bragg angle, through polarizer 4, the first diaphragm 5, anti-Penetrate mirror group 6 transfer directive half-wave plate 7, photoconductive tube 8, integrating sphere 9, the second diaphragm 10, through integrationThe angle that the light of ball 9 is set with user incides on the sample 12 being placed on accurate automatically controlled 13, sampleThe reverberation directive light trap 11 on 12 surfaces is absorbed, and the back-scattering light on sample 12 surfaces is integrated ball 9Converge, enter the subtended angle that the backscattered light of integrating sphere 9 adjusts solid angle by second diaphragm 10 in exit largeLittle, integrating sphere 9 is provided with round hole, and round hole place is provided with photomultiplier 14, by photomultiplier transitThe pipe 14 faint backscattered lights that integrating sphere 9 is collected are converted to the corresponding signal of telecommunication and send lock-in amplifier differentialTwo of input, send computer 18 to process after the differential amplification of lock-in amplifier 15 and denoising, lock-in amplifier15 are connected with computer 18 by communication bus, and computer 18 connects by communication bus and signal generator 16Connect, signal generator 16 is exported the square-wave signal of fixed frequency, and this square-wave signal is divided into two-way, and a road drivesAcousto-optic modulator 3, another road is as the reference signal of lock-in amplifier 15, and photoconductive tube 8 is from integrating sphere 9Center is passed, and ensures that powerful incident light is unlikely to be strayed in integrating sphere in the time that unexpected skew appears in light pathThereby avoid damaging photomultiplier 14. When measurement, inside and outside one, all carry out entering in the casing cover of Darkening processOK, to eliminate the interference of veiling glare. Wherein speculum group 6 is made up of a speculum, by the first diaphragm 5The light beam that enters speculum group 6 carries out 90 ° of turnover directive half-wave plates 7, does not need to change and incides sample 12On direction of light, realize changing by automatically controlled 13 translations of computer control precise and rotation and incide sampleThe incidence angle of the incident light on 12, the back scattering two-dimensional distribution of acquisition sample 12.
Embodiment 2: another program of the present invention, on the whole with embodiment 1, referring to Fig. 2, increases in this schemeAdd a swivel mount 22. In addition, speculum group 6 is wherein by i.e. the first speculum 6-1, the of four speculumsTwo-mirror 6-2, the 3rd speculum 6-3, the 4th speculum 6-4 form, and incident ray is through the first speculum6-1 carries out after 90 ° of turnovers directive the second speculum 6-2, the 3rd speculum 6-3, the 4th speculum 6-4 successively,Through the light directive half-wave plate 7 of the 4th speculum 6-4 reflection; The second speculum 6-2, the 3rd speculum 6-3,The 4th speculum 6-4, half-wave plate 7, photoconductive tube 8, integrating sphere 9, the second diaphragm 10 are all fixedly mounted on oneIn individual rotatable swivel mount 22; Swivel mount 22 surfaces externally and internallies also carry out Darkening process, accurate automatically controlled13 only do the translation of XY direction, by swivel mount 22, change the incident direction of light inciding on sample, enterPenetrate light and change direction with the rotation of swivel mount 22, and change the incidence angle inciding on sample.
Embodiment 3: overall plan is with embodiment 2, referring to Fig. 2 and Fig. 3, swivel mount 22 use cover plate for sealing,And can carry out the rotation of 70 ° of scopes by winding degree dish 27, the light beam penetrating from swivel mount 22 can be with swivel mount angleDegree setting and change the incidence angle being mapped on sample 12, the surfaces of revolution of swivel mount 22 and the first speculumThe laser vertical that 6-1 reflects. The second speculum 6-2 enters the laser reflection penetrating from the first speculum 6-1Enter in swivel mount 22, and carry out directive the 3rd speculum 6-3 after the turnover of 90 ° of light paths, the 3rd speculum 6-3 andThe 4th speculum 6-4 makes respectively light beam carry out 90 ° of light path turnovers, the emergent light of the second speculum 6-2 and the 4thThe incident light of speculum 6-4 and from the outgoing beam of swivel mount 22 in same plane, and the second speculumThe emergent light of the emergent light of 6-2 and the 4th speculum 6-4 is parallel to each other, and the emergent light of the 4th speculum 6-4 is penetratedTo half-wave plate 7, laser, through photoconductive tube 8, passes from the center of integrating sphere 9, and photoconductive tube 8 is from integrating sphere 9Center penetrate, incide at a certain angle and be placed on accurate automatically controlled 13 through the light of integrating sphere 9On sample 12, reverberation directive light trap 11 is absorbed, and back-scattering light is integrated ball 9 and converges, and enters long-pendingThe backscattered light of bulb separation 9 is adjusted the subtended angle size of solid angle by second diaphragm 10 in exit. Integrating sphere 9Be fixed on swivel mount 22, can adjust laser beam with swivel mount 22 rotations and incide on sample 12Incidence angle, the incident angle of swivel mount 22 can regulate by coarse adjustment screw 24 and micrometer adjusting screw 26, degreeThe angular dimension that dish 23 can be indicated required adjusting, can locking rotating pivoted frame 22 by lock-screw 25, flatStable equilibrium when weighing apparatus piece 21 can ensure that swivel mount 22 is locked. Light trap 11 also can manually adjust ensure fromOn sample 12, the light beam of reflection is all absorbed.
Embodiment 4: referring to Fig. 1, enter the backscattered light of integrating sphere 9 by second diaphragm 10 in exitAdjust the subtended angle size of solid angle. Fixing subtended angle can be measured, and also can adjust subtended angle as requiredObtain more accurately and measure.
Embodiment 5: referring to Fig. 2, enter the backscattered light of integrating sphere 9 by second diaphragm 10 in exitAdjust the subtended angle size of solid angle. Fixing subtended angle can be measured, and also can adjust subtended angle as requiredObtain more accurately and measure.
In embodiment, LASER Light Source adopts the helium neon gas laser light source of power stabilize 1mw magnitude, optical maser wavelength632.8nm, beam diameter 0.54mm, beam divergence angle 1.5mrad, machined piece used, swivel mount 22,Base plate 19 surfaces externally and internallies all carry out Darkening process, automatically controlled instrument lock-in amplifier 15, signal source 16, computer18 are placed in the other instrument table of optical table 20, and it is flat that other light path element, mechanical fixed part are installed in opticsOn the base plate 19 of platform 20, when measurement, cover and eliminate veiling glare with the casing cover that has all carried out Darkening process inside and outsideDisturb.
The backscattered light of this measurement device high reflection mirror need carry out under ultra-clean and dark surrounds.
Claims (1)
1. a high reflection mirror laser back scattering measurement mechanism, comprises an optical table and is fixed on optical tableOn base plate, all fixtures, connector, base plate surfaces externally and internally all carry out Darkening process, on base plate, installThere is LASER Light Source, send in the direction that light beam advances anti-mirror (2) is installed at LASER Light Source (1), reflectionLight beam is injected photodetector (17) and is carried out opto-electronic conversion and after straight processing, send the poor of lock-in amplifier (15)One end of moving input is the reference signal of light source power fluctuation by way of compensation; Transmitted light beam is injected sound by Bragg angleOptical modulator (3), carries out 90 ° of turnovers through polarizer (4), the first diaphragm (5), speculum group (6) and penetratesTo half-wave plate (7), photoconductive tube (8), integrating sphere (9), the second diaphragm (10), through integrating sphere (9)It is upper that the angle that light is set with user incides the sample (12) being placed on accurate automatically controlled (13), sample(12) the reverberation directive light trap (11) on surface is absorbed, the back-scattering light quilt on sample (12) surfaceIntegrating sphere (9) converges, and the backscattered light exit of integrating sphere (9) is provided with the second diaphragm (10), integrationBall is also provided with round hole on (9), and round hole place is provided with photomultiplier (14), photomultiplier (14)Output connect the other end of lock-in amplifier (15) differential input terminal, lock-in amplifier (15) is total by communicationLine is connected with computer (18), and computer (18) is connected with signal generator (16) by communication bus,Signal generator (16) output is divided into two-way, and a road drives acousto-optic modulator (3), and another road connects phase-locked amplificationThe reference signal end of device (15); Photoconductive tube (8) passes from the center of integrating sphere (9); By computer controlledAccurate automatically controlled (13) of system, is characterized in that: speculum group (6) is carried out 90 ° of turnovers by incident light and injected peaceBe contained in the half-wave plate (7) in swivel mount (22), speculum group (6) is by the first speculum (6-1), secondSpeculum (6-2), the 3rd speculum (6-3) and the 4th speculum (6-4) form, and light beam is through the first reflectionMirror (6-1) carries out directive the second speculum (6-2) after 90 ° of turnovers, the second speculum (6-2), the 3rd reflectionMirror (6-3), the 4th speculum (6-4), half-wave plate (7), photoconductive tube (8), integrating sphere (9), the second lightDoor screen (10) is all fixedly mounted in a rotatable swivel mount (22), through the light of integrating sphere (9)The angle that line is set with user incides on the sample (12) being placed on accurate automatically controlled (13); Swivel mount(22) laser vertical that the surfaces of revolution and the first speculum (6-1) reflect, the second speculum (6-2) willThe laser reflection penetrating from the first speculum (6-1) enters in swivel mount (22), and carries out 90 ° of light path turnoversRear directive the 3rd speculum (6-3), the 3rd speculum (6-3) and the 4th speculum (6-4) make respectively light beamCarry out 90 ° of light path turnovers, the incident light of the emergent light of the second speculum (6-2) and the 4th speculum (6-4)And the outgoing beam penetrating from swivel mount (22) is in same plane, and the going out of the second speculum (6-2)The emergent light of penetrating light and the 4th speculum (6-4) is parallel to each other, the emergent light directive of the 4th speculum (6-4)Half-wave plate (7), by swivel mount (22), changes the incident direction of light inciding on sample (12), entersPenetrate light and change direction with the rotation of swivel mount (22), change the incidence angle inciding on sample (12), obtainObtain the back scattering two-dimensional distribution of sample (12), cover plate for sealing for swivel mount (22), and can winding degree dish (27)Carry out the rotation of 70 ° of scopes.
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CN200810075358.5A CN106342212B (en) | 2008-04-24 | 2008-04-24 | High reflection mirror laser back scattering measurement mechanism |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106442327A (en) * | 2016-12-08 | 2017-02-22 | 苏州德创测控科技有限公司 | Optical system for detecting side image information of object |
CN107389615A (en) * | 2016-12-20 | 2017-11-24 | 苏州赛德福科学仪器有限公司 | A kind of evaporation optical detection device and the evaporative light measuring method based on the device |
CN108535218A (en) * | 2018-04-13 | 2018-09-14 | 黄智强 | A kind of high dynamic range precision scattering properties measuring system |
CN109297987A (en) * | 2018-11-05 | 2019-02-01 | 西安工业大学 | High reflective mirror surface scattering multi-parameter distribution characterization measuring device and measuring method |
CN110141724A (en) * | 2019-06-04 | 2019-08-20 | 苏州慧尔生医疗科技有限公司 | A kind of drop slowdown monitoring device of infusion apparatus drop pot |
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2008
- 2008-04-24 CN CN200810075358.5A patent/CN106342212B/en not_active Expired - Fee Related
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106442327A (en) * | 2016-12-08 | 2017-02-22 | 苏州德创测控科技有限公司 | Optical system for detecting side image information of object |
CN106442327B (en) * | 2016-12-08 | 2024-02-20 | 苏州德创测控科技有限公司 | Optical system for detecting object side image information |
CN107389615A (en) * | 2016-12-20 | 2017-11-24 | 苏州赛德福科学仪器有限公司 | A kind of evaporation optical detection device and the evaporative light measuring method based on the device |
CN107389615B (en) * | 2016-12-20 | 2020-03-24 | 苏州赛德福科学仪器有限公司 | Evaporation light detection device and evaporation light measurement method based on same |
CN108535218A (en) * | 2018-04-13 | 2018-09-14 | 黄智强 | A kind of high dynamic range precision scattering properties measuring system |
CN109297987A (en) * | 2018-11-05 | 2019-02-01 | 西安工业大学 | High reflective mirror surface scattering multi-parameter distribution characterization measuring device and measuring method |
CN110141724A (en) * | 2019-06-04 | 2019-08-20 | 苏州慧尔生医疗科技有限公司 | A kind of drop slowdown monitoring device of infusion apparatus drop pot |
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