CN106340476B - 一种全自动硅片装片机 - Google Patents
一种全自动硅片装片机 Download PDFInfo
- Publication number
- CN106340476B CN106340476B CN201610740521.XA CN201610740521A CN106340476B CN 106340476 B CN106340476 B CN 106340476B CN 201610740521 A CN201610740521 A CN 201610740521A CN 106340476 B CN106340476 B CN 106340476B
- Authority
- CN
- China
- Prior art keywords
- sucker
- basket
- baffle
- guiding device
- silicon wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 31
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 31
- 239000010703 silicon Substances 0.000 title claims abstract description 31
- 238000009434 installation Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract 1
- 230000000630 rising effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 3
- 241000252254 Catostomidae Species 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 235000008216 herbs Nutrition 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610740521.XA CN106340476B (zh) | 2016-08-26 | 2016-08-26 | 一种全自动硅片装片机 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610740521.XA CN106340476B (zh) | 2016-08-26 | 2016-08-26 | 一种全自动硅片装片机 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106340476A CN106340476A (zh) | 2017-01-18 |
CN106340476B true CN106340476B (zh) | 2018-11-30 |
Family
ID=57822344
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610740521.XA Active CN106340476B (zh) | 2016-08-26 | 2016-08-26 | 一种全自动硅片装片机 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN106340476B (zh) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201117644Y (zh) * | 2007-09-20 | 2008-09-17 | 中国电子科技集团公司第二研究所 | 全自动硅片上下料机 |
CN201559823U (zh) * | 2009-05-15 | 2010-08-25 | 东莞市启天自动化设备有限公司 | 一种全自动硅片装片机 |
CN201663151U (zh) * | 2009-03-06 | 2010-12-01 | 东莞市启天自动化设备有限公司 | 全自动硅片上下料机 |
CN201999522U (zh) * | 2010-12-21 | 2011-10-05 | 苏州阿特斯阳光电力科技有限公司 | 一种全自动硅片上下料机 |
CN203281548U (zh) * | 2013-05-31 | 2013-11-13 | 浙江金乐太阳能科技有限公司 | 一种太阳能硅片超声波清洗槽 |
CN204179097U (zh) * | 2014-09-03 | 2015-02-25 | 天津潮能科技发展有限公司 | 太阳能电池插片机 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5793826A (en) * | 1980-11-28 | 1982-06-11 | Mitsubishi Electric Corp | Basket automatic transporter |
-
2016
- 2016-08-26 CN CN201610740521.XA patent/CN106340476B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201117644Y (zh) * | 2007-09-20 | 2008-09-17 | 中国电子科技集团公司第二研究所 | 全自动硅片上下料机 |
CN201663151U (zh) * | 2009-03-06 | 2010-12-01 | 东莞市启天自动化设备有限公司 | 全自动硅片上下料机 |
CN201559823U (zh) * | 2009-05-15 | 2010-08-25 | 东莞市启天自动化设备有限公司 | 一种全自动硅片装片机 |
CN201999522U (zh) * | 2010-12-21 | 2011-10-05 | 苏州阿特斯阳光电力科技有限公司 | 一种全自动硅片上下料机 |
CN203281548U (zh) * | 2013-05-31 | 2013-11-13 | 浙江金乐太阳能科技有限公司 | 一种太阳能硅片超声波清洗槽 |
CN204179097U (zh) * | 2014-09-03 | 2015-02-25 | 天津潮能科技发展有限公司 | 太阳能电池插片机 |
Also Published As
Publication number | Publication date |
---|---|
CN106340476A (zh) | 2017-01-18 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20201230 Address after: 311800 unit 2, building 3, Anping community, Jiyang street, Zhuji City, Shaoxing City, Zhejiang Province Patentee after: Chen Ximei Address before: No. 1677, Binhai 1st Road, Wenzhou Economic and Technological Development Zone, Zhejiang 325000 Patentee before: WENZHOU SERAPHIM ENERGY Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20211216 Address after: 276000 Longhu Software Park, 279 shuangyueyuan Road, high tech Industrial Development Zone, Linyi City, Shandong Province Patentee after: Linyi Longruan Information Technology Co.,Ltd. Address before: 311800 unit 2, building 3, Anping community, Jiyang street, Zhuji City, Shaoxing City, Zhejiang Province Patentee before: Chen Ximei |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20220921 Address after: Longhu Software Park, No. 276, Shuangyueyuan Road, High-tech Industrial Development Zone, Linyi City, Shandong Province, 276000 Patentee after: Shandong Longfor Information Industry Group Co.,Ltd. Address before: 276000 Longhu Software Park, 279 shuangyueyuan Road, high tech Industrial Development Zone, Linyi City, Shandong Province Patentee before: Linyi Longruan Information Technology Co.,Ltd. |