CN106323260A - dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes and preparation method thereof - Google Patents
dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes and preparation method thereof Download PDFInfo
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- CN106323260A CN106323260A CN201610635065.2A CN201610635065A CN106323260A CN 106323260 A CN106323260 A CN 106323260A CN 201610635065 A CN201610635065 A CN 201610635065A CN 106323260 A CN106323260 A CN 106323260A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
- G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
Abstract
The invention provides a dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes and a preparation method thereof. One end of a center fixed support column is connected with a monocrystalline silicon substrate, the other end of the center fixed support column is connected with a micro harmonic oscillator; side electrodes are arranged on the surface of the monocrystalline silicon substrate or a glass substrate; adjacent electrodes are arranged on the surface of the monocrystalline silicon substrate or the glass substrate; the monocrystalline silicon substrate and the glass substrate are bonded. The preparation of the dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes is conducted by the combination of MEMS bulk silicon processing and surface silicon processing; the dual-electrode distribution type micro gyroscope with side separated electrodes and circular adjacent electrodes can provide different drive and detection modes and different work modes, can work in the system requiring a complex control; the adjacent electrode is used for driving and the side electrodes are used for detection, the parasitic capacitance between a driving electrode and a detecting electrode is reduced, and the detection accuracy is improved.
Description
Technical field
The present invention relates to the minisize gyroscopes of field of micro electromechanical technology, in particular it relates to a kind of side discrete adjacent surface annular
The distributed gyroscope of bipolar electrode and preparation method thereof.
Background technology
Gyroscope is a kind of inertia device that can detect carrier angle or angular velocity, at gesture stability and navigator fix etc.
There is very important effect in field.Along with science and techniques of defence and Aeronautics and Astronautics industrial expansion, inertial navigation system is for gyro
The requirement of instrument also to low cost, small size, in high precision, many shaft detection, high reliability, the direction that adapts to various adverse circumstances send out
Exhibition.Therefore, the importance of MEMS microthrust test is self-evident.Especially, micro hemispherical resonator gyro instrument is as MEMS microthrust test
One important research direction, has become as a study hotspot in this field.
For minisize gyroscopes, use full angle to control technology, there is stability height, strong shock resistance, precision
The advantageous characteristic such as height, error are little, before the fields such as Aero-Space, inertial navigation and civilian consumer electronics have a wide range of applications
Scape.The number of electrodes of the gyroscope of design is less at present, limits its application in complex control system；And general top
A set of electrode on spiral shell instrument only one of which face, drives, detects and controls to there is certain parasitic capacitance between electrode and signal is done
Disturb, limit its accuracy of detection.
Based on this, in the urgent need to proposing a kind of new gyroscope arrangement so that it is avoid or reduce above-mentioned influence factor, simultaneously
Extend its range of application.
Through retrieving, Publication No. CN104165623A, the Chinese invention patent application of Application No. 201410389616.2,
The invention provides Double-electrode type micro hemispherical resonator gyro instrument and preparation method thereof inside and outside one, including: monocrystal silicon substrate, in
The heart fixes support column, miniature hemisphere harmonic oscillator, external electrode, external electrode metal welding fishplate bar, substrate of glass, metal lead wire, circular weldering
Drum, external electrode metal connect electrode and Seed Layer in post.This invention may utilize inner and outer electrodes be driven respectively and
Detection, reduces the parasitic capacitance between drive electrode and detecting electrode, improves accuracy of detection；Provide for inner and outer electrodes
Metal lead wire and circular bonding wire dish, it is simple to signal applies and signal extraction.
But above-mentioned patent provide only the structure of the miniature hemisphere gyroscope of internal discrete electrodes and external discrete electrode
Scheme, it is impossible to provide different distribution of electrodes schemes for multiple minisize gyroscopes.
Summary of the invention
For defect of the prior art, the bipolar electrode that it is an object of the invention to provide a kind of side discrete adjacent surface annular divides
Cloth gyroscope and preparation method thereof, described gyroscope combines MEMS Bulk micro machining and surface silicon processing technique is carried out
Make, be the processing technique of a kind of novelty；Different driving, detection mode and different mode of operations can be provided, can be operated in
Need in the system of complex control.
According to an aspect of the present invention, it is provided that the distributed gyroscope of bipolar electrode of the discrete adjacent surface in a kind of side annular,
Including: monocrystal silicon substrate, center fix support column, miniature resonant, side electrode, adjacent electrode and substrate of glass；Wherein:
Described side electrode is multiple, and multiple side electrodes are evenly distributed on the one side of miniature resonant, constitutes uniformly
Distributed side electrode, the most described side electrode is arranged at the surface of described monocrystal silicon substrate or the surface of substrate of glass；
Described adjacent electrode, is distributed in an adjacent surface of miniature resonant, and this adjacent surface refers to adjacent with described side, and
Adjacent electrode on described adjacent surface shape ringwise, thus constitute an annular integral type adjacent electrode；The most described adjacent electrode
It is arranged at the surface of described monocrystal silicon substrate or the surface of substrate of glass；
Described center is fixed one end of support column and is connected with described monocrystal silicon substrate, and another of support column is fixed at described center
End is connected with described miniature resonant；Described monocrystal silicon substrate is bonded with described substrate of glass；
Described miniature resonant is used for gyroscope as the pendulum of gyroscope, described side electrode and adjacent electrode
Driving, detect and control.
When micro hemispherical resonator gyro instrument of the present invention is operated under angular speed pattern, apply alternating current drive signal,
Apply DC bias signal on described miniature resonant, described in be uniformly distributed formula side electrode and made by electrostatic force described miniature humorous
Oscillator is operated under required driven-mode, and the vibration amplitude of driven-mode and frequency keep constant；When being perpendicular to monocrystal silicon
When substrate direction exists additional angular velocity, the vibration amplitude of sensed-mode can change, and the size of this vibration amplitude is with outer
The size adding angular velocity is directly proportional, cause simultaneously described in be uniformly distributed the electric capacity between formula side electrode and described miniature resonant
Change；Sensed-mode vibration amplitude can be calculated by being uniformly distributed the signal intensity on formula side electrode described in collection
Size, and then calculate the size of additional angular velocity.
Further, the signal intensity that gyroscope of the present invention gathers on described annular integral type adjacent electrode calculates inspection
The size of survey modal vibration amplitude, and then calculate the size of additional angular velocity, thus reduce and be uniformly distributed between formula side electrode
Parasitic capacitance, improve accuracy of detection.
Further, gyroscope of the present invention is applying alternating current drive signal on annular integral type adjacent electrode, and
It is uniformly distributed acquisition testing signal on formula side electrode or described annular integral type adjacent electrode, it is provided that different driving, detection
And control mode.
Further, the present invention judges the work of described gyroscope by the signal intensity on annular integral type adjacent electrode
State, under abnormal operating state, applies control signal, scalable by control algolithm on annular integral type adjacent electrode
The duty of described micro hemispherical resonator gyro instrument, so that described micro hemispherical resonator gyro instrument normally works.
Further, gyroscope of the present invention also can be operated under dynamic balance pattern and full angle pattern, wherein: power is put down
Weighing apparatus pattern can directly detect the size of additional angular velocity, and full angle pattern can directly detect the size of the additional anglec of rotation.
Preferably, described annular integral type adjacent electrode is arranged on the upside of miniature resonant, downside, outside or interior
Side.
Preferably, multiple formula side electrodes that are uniformly distributed are evenly distributed in upside or the outside of miniature resonant.
Preferably, the material of described side electrode and described adjacent electrode is boron ion or phosphonium ion doped silicon or is gold
Belong to nickel；When side electrode or adjacent electrode are positioned in monocrystal silicon substrate, material is boron ion or phosphonium ion doped silicon；Work as side
When face electrode or adjacent electrode are positioned in substrate of glass, material is metallic nickel.
Preferably, described gyroscope be annular resonance gyroscope, hemispherical resonant gyro, hemisphere resonator gyroscope,
Multi-ring resonator gyroscope, cup-shaped resonator gyroscope, disk resonator gyroscope, bird-nest-shaped resonator gyroscope.
Preferably, the material of described monocrystal silicon substrate and substrate of glass is respectively the high resistant material of High Resistivity Si or silicon dioxide
Material, High Resistivity Si material is for reducing the signal disturbing between external electrode and interior electrode.
Preferably, the material of support column is fixed at described center is High Resistivity Si or for silicon dioxide.
Preferably, the material of described miniature resonant is doped diamond or DOPOS doped polycrystalline silicon, is described gyroscope
Principal vibration body.
In the present invention, described side electrode and adjacent electrode distribution can be used in the control system of complexity, it is achieved full angle
Control.
The present invention emphasizes to be uniformly distributed formula side electrode and the multiple minisize gyroscopes structure of annular integral type external electrode, electricity
There is greatest differences in pole distribution mode, can be suitably used for special drives and detection scheme (as be shown in the examples), miniature
Harmonic oscillator is not limited solely to micro hemispherical resonator gyro instrument, also can provide different distribution of electrodes for multiple minisize gyroscopes
Scheme.
The bipolar electrode distribution of side of the present invention discrete adjacent surface annular, distribution of electrodes is adjacent rather than upper and lower
Being distributed or inside and outside distribution, and adjacent surface is annular integral type, technique is the simplest compared with double separate structures.
According to another aspect of the present invention, it is provided that the distributed gyroscope of bipolar electrode of the discrete adjacent surface in a kind of side annular
Preparation method, comprise the steps:
The first step, monocrystal silicon substrate is carried out, gluing, photoetching, development, boron ion implanting, sputtering, degumming process,
Monocrystal silicon substrate obtains boron ion or the side electrode of phosphonium ion doped silicon material or adjacent electrode；
Second step, monocrystal silicon substrate carries out gluing, photoetching, development, the isotropic etching of silicon, remove photoresist, with at list
The groove that the sub-shape of miniature resonant is corresponding is obtained in crystal silicon substrate；
3rd step, in monocrystal silicon substrate, deposit silicon dioxide, for making miniature resonant and side electrode or adjacent electricity
Clearance between poles provides sacrifice layer；
4th step, in monocrystal silicon substrate, deposit doped diamond or DOPOS doped polycrystalline silicon, and chemically-mechanicapolish polish, with
Making miniature resonant；
5th step, on the basis of the 4th step, utilize BOE solution etches silicon dioxide sacrificial layer and control etch period, with
Release miniature resonant, and nubbin is fixed support column as center；
6th step, carry out gluing, photoetching, development, electronickelling on the glass substrate, remove photoresist, to make metallic nickel materials
Adjacent electrode or side electrode；
7th step, inversion substrate of glass, and be bonded with monocrystal silicon substrate, make core and the monocrystalline of substrate of glass
The center alignment of support column is fixed at the center of silicon base, it is achieved two substrates are fixed, thus obtains side discrete adjacent surface annular
The distributed gyroscope of bipolar electrode.
Compared with prior art, the present invention has a following beneficial effect:
(1) described gyroscope combines MEMS Bulk micro machining and surface silicon processing technique makes, and is one
Planting novel processing technique, technique is the simplest compared with double separate structures；
(2) described gyroscope can provide different driving, detection mode and different mode of operations, is not reducing electrode
In the case of area, add number of electrodes, described gyroscope can be made to be operated in the system needing complex control；
(3) described gyroscope may utilize adjacent electrode and side electrode is driven respectively and detects, and reduces and drives electricity
Parasitic capacitance between pole and detecting electrode, improves accuracy of detection；Can be used in the control system of complexity, it is achieved full angle control
System.
Accompanying drawing explanation
By the detailed description non-limiting example made with reference to the following drawings of reading, the further feature of the present invention,
Purpose and advantage will become more apparent upon:
Fig. 1 (a)-Fig. 1 (c) is the bipolar electrode distributed type minisize hemisphere of the side discrete adjacent surface annular of one embodiment of the invention
The structural representation of resonator gyroscope；
Fig. 2 (a)-Fig. 2 (c) is the bipolar electrode distributed type minisize annular of the side discrete adjacent surface annular of one embodiment of the invention
The structural representation of resonator gyroscope；
Fig. 3 (a)-Fig. 3 (c) is the bipolar electrode distributed type minisize disk of the side discrete adjacent surface annular of one embodiment of the invention
The structural representation of resonator gyroscope；
Fig. 4 (a)-Fig. 4 (c) is the bipolar electrode distributed type minisize hemisphere of the side discrete adjacent surface annular of one embodiment of the invention
The structural representation of body resonator gyroscope；
Fig. 5 (a)-Fig. 5 (c) is that the bipolar electrode distributed type minisize of the side discrete adjacent surface annular of one embodiment of the invention is multi-ring
The structural representation of resonator gyroscope；
Fig. 6 (a)-Fig. 6 (c) is that the bipolar electrode distributed type minisize of the side discrete adjacent surface annular of one embodiment of the invention is cup-shaped
The structural representation of resonator gyroscope；
Fig. 7 (a)-Fig. 7 (c) is the bipolar electrode distributed type minisize that the present invention expands the side discrete adjacent surface annular of embodiment 1
The structural representation of hemisphere resonator gyroscope；
Fig. 8 (a)-Fig. 8 (c) is the bipolar electrode distributed type minisize that the present invention expands the side discrete adjacent surface annular of embodiment 2
The structural representation of annular resonance gyroscope；
Fig. 9 (a)-Fig. 9 (c) is the bipolar electrode distributed type minisize that the present invention expands the side discrete adjacent surface annular of embodiment 3
The structural representation of disk resonator gyroscope；
Figure 10 (a)-Figure 10 (c) is that the bipolar electrode distribution of the side discrete adjacent surface annular that the present invention expands embodiment 4 declines
The structural representation of type hemisphere resonator gyroscope；
Figure 11 (a)-Figure 11 (c) is that the bipolar electrode distribution of the side discrete adjacent surface annular that the present invention expands embodiment 5 declines
The structural representation of the multi-ring resonator gyroscope of type；
Figure 12 (a)-Figure 12 (c) is that the bipolar electrode distribution of the side discrete adjacent surface annular that the present invention expands embodiment 6 declines
The structural representation of the cup-shaped resonator gyroscope of type；
Figure 13 (a)-Figure 13 (g) is the bipolar electrode distributed type minisize half of the side discrete adjacent surface annular of one embodiment of the invention
The preparation method flow chart of ball resonator gyroscope；
In figure: 1 is miniature resonant, and 2 for being uniformly distributed formula side electrode, 3 is annular integral type adjacent electrode, and 4 is single
Crystal silicon substrate, 5 is substrate of glass, fixes support column centered by 6.
Detailed description of the invention
Below in conjunction with specific embodiment, the present invention is described in detail.Following example will assist in the technology of this area
Personnel are further appreciated by the present invention, but limit the present invention the most in any form.It should be pointed out that, the ordinary skill to this area
For personnel, without departing from the inventive concept of the premise, it is also possible to make some deformation and improvement.These broadly fall into the present invention
Protection domain.
Embodiment 1
As shown in Fig. 1 (a)-Fig. 1 (c), the present embodiment provides the bipolar electrode distribution of a kind of side discrete adjacent surface annular to decline
Type hemispherical resonant gyro, including: hemispheric miniature resonant 1；16 are uniformly distributed formula side electrode 2；One
Annular integral type adjacent electrode 3；One monocrystal silicon substrate 4；One substrate of glass 5；Support column 6 is fixed at one center；Wherein:
Described center is fixed one end of support column 6 and is connected with described monocrystal silicon substrate 4, and support column 6 is fixed at described center
The other end is connected (as shown in Fig. 1 (a)) with described miniature resonant 1；It is uniformly distributed formula side electrode 2 described in 16 to be arranged at
The surface (as shown in Fig. 1 (b)) of described monocrystal silicon substrate 4, and it is evenly distributed in the upside of described miniature resonant 1 (such as Fig. 1
Shown in (c))；One described annular integral type adjacent electrode 3 is arranged at the surface of described substrate of glass 5, and is distributed in described micro-
The outside (as shown in Fig. 1 (a)) of type harmonic oscillator 1.Described monocrystal silicon substrate 4 is bonded with described substrate of glass 5.
In the present embodiment, the material of described miniature resonant 1 is doped diamond or DOPOS doped polycrystalline silicon, is described miniature half
The principal vibration body of ball resonator gyroscope.
In the present embodiment, described in be uniformly distributed the material of formula side electrode 2 be boron ion doping silicon, it is also possible to be phosphonium ion
Doped silicon, for described micro hemispherical resonator gyro instrument driving, detect and control.
In the present embodiment, the material boron ion of described annular integral type adjacent electrode 3 or phosphonium ion doped silicon, for described
The driving of micro hemispherical resonator gyro instrument, detect and control.
In the present embodiment, the material of described monocrystal silicon substrate 4 and substrate of glass 5 is respectively High Resistivity Si and silicon dioxide so
Highly resistant material, highly resistant material can reduce 16 be uniformly distributed formula side electrode 2 and annular integral type adjacent electrode 3 between
Signal disturbing.
In the present embodiment, it is silicon dioxide that the material of support column 6 is fixed at described center, it is also possible to be High Resistivity Si.
In the present embodiment, described micro hemispherical resonator gyro instrument can be operated under angular speed pattern, applies exchange and drives letter
Number, described miniature resonant 1 applies DC bias signal, described in be uniformly distributed formula side electrode 2 and make institute by electrostatic force
State miniature resonant 1 to be operated under required driven-mode, and the vibration amplitude of driven-mode and frequency keep constant；When vertically
When monocrystal silicon substrate 4 direction exists additional angular velocity, the vibration amplitude of sensed-mode can change, and this vibration amplitude
Size is directly proportional to the size of additional angular velocity, cause simultaneously described in be uniformly distributed formula side electrode 2 and described miniature resonant 1
Between electric capacity change；Detection mould can be calculated by being uniformly distributed the signal intensity on formula side electrode 2 described in collection
The size of state vibration amplitude, and then calculate the size of additional angular velocity.
In the present embodiment, described micro hemispherical resonator gyro instrument can also gather on described annular integral type adjacent electrode 3
Signal intensity calculate the size of sensed-mode vibration amplitude, and then calculate the size of additional angular velocity, thus reduce described all
Parasitic capacitance between even distributed side electrode 2, improves accuracy of detection.
In the present embodiment, described micro hemispherical resonator gyro instrument can apply on described annular integral type adjacent electrode 3
Alternating current drive signal, and it is uniformly distributed acquisition testing letter on formula side electrode 2 or described annular integral type adjacent electrode 3 described
Number, it is provided that different driving, detection and control modes.
In the present embodiment, described micro hemispherical resonator gyro instrument can be by described annular integral type adjacent electrode 3
Signal intensity judges the duty of described micro hemispherical resonator gyro instrument, under abnormal operating state, passes through control algolithm
Described annular integral type adjacent electrode 3 applies control signal, the work shape of micro hemispherical resonator gyro instrument described in scalable
State, so that described micro hemispherical resonator gyro instrument normally works.
In the present embodiment, described micro hemispherical resonator gyro instrument also can be operated under dynamic balance pattern and full angle pattern,
Wherein: dynamic balance pattern can directly detect the size of additional angular velocity, full angle pattern can directly detect the additional anglec of rotation
Size.
Embodiment 2
As shown in Fig. 2 (a)-Fig. 2 (c), the present embodiment provides the bipolar electrode distribution of a kind of side discrete adjacent surface annular to decline
Type annular resonance gyroscope, including: annular miniature resonant 1；16 are uniformly distributed formula side electrode 2；One ring
Shape integral type adjacent electrode 3；One monocrystal silicon substrate 4；One substrate of glass 5；Support column 6 is fixed at one center；Wherein:
Described center is fixed one end of support column 6 and is connected with described monocrystal silicon substrate 4, and support column 6 is fixed at described center
The other end is connected (as shown in Fig. 2 (a)) with described miniature resonant 1；It is uniformly distributed formula side electrode 2 described in 16 to be arranged at
The surface of described monocrystal silicon substrate 4, and it is evenly distributed in the outside (as shown in Fig. 2 (a)) of described miniature resonant 1；One
Described annular integral type adjacent electrode 3 is arranged at the surface (as shown in Fig. 2 (b)) of described substrate of glass 5, and is distributed in described micro-
The upside (as shown in Fig. 2 (c)) of type harmonic oscillator 1；Described monocrystal silicon substrate 4 is bonded with described substrate of glass 5.
In the present embodiment, the material of described miniature resonant 1 is doped diamond or DOPOS doped polycrystalline silicon, is described Micro-ring
The principal vibration body of shape resonator gyroscope.
In the present embodiment, described in be uniformly distributed the material of formula side electrode 2 be boron ion doping silicon, it is also possible to be phosphonium ion
Doped silicon, for described micro hemispherical resonator gyro instrument driving, detect and control.
In the present embodiment, the material boron ion of described annular integral type adjacent electrode 3 or phosphonium ion doped silicon, for described
The driving of micro hemispherical resonator gyro instrument, detect and control.
In the present embodiment, the material of described monocrystal silicon substrate 4 and substrate of glass 5 is respectively High Resistivity Si and silicon dioxide so
Highly resistant material, highly resistant material can reduce 16 be uniformly distributed formula side electrode 2 and annular integral type adjacent electrode 3 between
Signal disturbing.
In the present embodiment, it is silicon dioxide that the material of support column 6 is fixed at described center, it is also possible to be High Resistivity Si.
In the present embodiment, described micro loop resonator gyroscope can be operated under dynamic balance pattern and full angle pattern, its
In: dynamic balance pattern can directly detect the size of additional angular velocity, and full angle pattern can directly detect the big of the additional anglec of rotation
Little.
Embodiment 3
As shown in Fig. 3 (a)-Fig. 3 (c), the present embodiment provides the bipolar electrode distribution of a kind of side discrete adjacent surface annular to decline
Type disk resonator gyroscope, including: discoidal miniature resonant 1；16 are uniformly distributed formula side electrode 2；One
Annular integral type adjacent electrode 3；One monocrystal silicon substrate 4；One substrate of glass 5；Support column 6 is fixed at one center；Wherein:
Described center is fixed one end of support column 6 and is connected with described monocrystal silicon substrate 4, and support column 6 is fixed at described center
The other end is connected (as shown in Fig. 3 (a)) with described miniature resonant 1；It is uniformly distributed formula side electrode 2 described in 16 to be arranged at
The surface of described monocrystal silicon substrate 4, and it is evenly distributed in the outside (as shown in Fig. 3 (a)) of described miniature resonant 1；One
Described annular integral type adjacent electrode 3 is arranged at the surface (as shown in Fig. 3 (b)) of described substrate of glass 5, and is evenly distributed in
The upside (as shown in Fig. 3 (c)) of described miniature resonant 1；Described monocrystal silicon substrate 4 is bonded with described substrate of glass 5.
In the present embodiment, the material of described miniature resonant 1 is doped diamond or DOPOS doped polycrystalline silicon, is described miniature circular
The principal vibration body of dish resonator gyroscope.
In the present embodiment, described miniature disk resonator gyroscope can be operated under dynamic balance pattern and full angle pattern, its
In: dynamic balance pattern can directly detect the size of additional angular velocity, and full angle pattern can directly detect the big of the additional anglec of rotation
Little.
Embodiment 4
As shown in Fig. 4 (a)-Fig. 4 (c), the present embodiment provides the bipolar electrode distribution of a kind of side discrete adjacent surface annular to decline
Type hemisphere resonator gyroscope, including: hemispheroidal miniature resonant 1；16 are uniformly distributed formula side electrode 2；One
Individual annular integral type adjacent electrode 3；One monocrystal silicon substrate 4；One substrate of glass 5；Support column 6 is fixed at one center；
Described center is fixed one end of support column 6 and is connected with described monocrystal silicon substrate 4, and support column 6 is fixed at described center
The other end is connected (as shown in Fig. 4 (a)) with described miniature resonant 1；The described formula side electrode 2 that is uniformly distributed is arranged at described list
The surface (as shown in Fig. 4 (a)) of crystal silicon substrate 4, and it is evenly distributed in the outside of described miniature resonant 1 (such as Fig. 4 (a) institute
Show)；Described annular integral type adjacent electrode 3 is arranged at the surface (as shown in Fig. 4 (b), Fig. 4 (c)) of described substrate of glass 5, and
It is evenly distributed in the upside (as shown in Fig. 4 (c)) of described miniature resonant 1；Described monocrystal silicon substrate 4 and described substrate of glass
5 bondings.
In the present embodiment, the material of described miniature resonant 1 is doped diamond or DOPOS doped polycrystalline silicon, is described miniature half
The principal vibration body of spheroid resonator gyroscope.
In the present embodiment, described in be uniformly distributed the material of formula side electrode 2 be boron ion doping silicon, it is also possible to be phosphonium ion
Doped silicon, for described micro hemispherical resonator gyro instrument driving, detect and control.
In the present embodiment, the material boron ion of described annular integral type adjacent electrode 3 or phosphonium ion doped silicon, for described
The driving of micro hemispherical resonator gyro instrument, detect and control.
In the present embodiment, the material of described monocrystal silicon substrate 4 and substrate of glass 5 is respectively High Resistivity Si and silicon dioxide so
Highly resistant material, highly resistant material can reduce 16 be uniformly distributed formula side electrode 2 and annular integral type adjacent electrode 3 between
Signal disturbing.
In the present embodiment, it is silicon dioxide that the material of support column 6 is fixed at described center, it is also possible to be High Resistivity Si.
Embodiment 5
As shown in Fig. 5 (a)-Fig. 5 (c), the present embodiment provides the bipolar electrode distribution of a kind of side discrete adjacent surface annular to decline
The multi-ring resonator gyroscope of type, including: miniature resonant 1 of annular more than；16 are uniformly distributed formula side electrode 2；One
Annular integral type adjacent electrode 3；One monocrystal silicon substrate 4；One substrate of glass 5；Support column 6 is fixed at one center；Wherein:
Described center is fixed one end of support column 6 and is connected with described monocrystal silicon substrate 4, and support column 6 is fixed at described center
The other end is connected (as shown in Fig. 5 (a)) with described miniature resonant 1；It is uniformly distributed formula side electrode 2 described in 16 to be arranged at
The surface of described monocrystal silicon substrate 4, and it is evenly distributed in the outside (as shown in Fig. 5 (a)) of described miniature resonant 1；One
Described annular integral type adjacent electrode 3 is arranged at the surface (as shown in Fig. 5 (b), Fig. 5 (c)) of described substrate of glass 5, and uniformly
Be distributed in the upside (as shown in Fig. 5 (c)) of described miniature resonant 1；Described monocrystal silicon substrate 4 and described substrate of glass 5 key
Close.
In the present embodiment, the material of described miniature resonant 1 is doped diamond or DOPOS doped polycrystalline silicon, is described miniature many
The principal vibration body of ring resonator gyroscope.
In the present embodiment, described in be uniformly distributed the material of formula side electrode 2 be boron ion doping silicon, it is also possible to be phosphonium ion
Doped silicon, for described micro hemispherical resonator gyro instrument driving, detect and control.
In the present embodiment, the material boron ion of described annular integral type adjacent electrode 3 or phosphonium ion doped silicon, for described
The driving of micro hemispherical resonator gyro instrument, detect and control.
In the present embodiment, the material of described monocrystal silicon substrate 4 and substrate of glass 5 is respectively High Resistivity Si and silicon dioxide so
Highly resistant material, highly resistant material can reduce 16 be uniformly distributed formula side electrode 2 and annular integral type adjacent electrode 3 between
Signal disturbing.
In the present embodiment, it is silicon dioxide that the material of support column 6 is fixed at described center, it is also possible to be High Resistivity Si.
Embodiment 6
As shown in Fig. 6 (a)-Fig. 6 (c), the present embodiment provides the bipolar electrode distribution of a kind of side discrete adjacent surface annular to decline
The cup-shaped resonator gyroscope of type, including: cup-shaped miniature resonant 1；16 are uniformly distributed formula side electrode 2；One ring
Shape integral type adjacent electrode 3；One monocrystal silicon substrate 4；One substrate of glass 5；Support column 6 is fixed at one center；Wherein:
Described center is fixed one end of support column 6 and is connected with described monocrystal silicon substrate 4, and support column 6 is fixed at described center
The other end is connected (as shown in Fig. 6 (a)) with described miniature resonant 1；It is uniformly distributed formula side electrode 2 described in 16 to be arranged at
The surface of described monocrystal silicon substrate 4, and it is evenly distributed in the outside (as shown in Fig. 6 (a)) of described miniature resonant 1；One
Described annular integral type adjacent electrode 3 is arranged at the surface (as shown in Fig. 6 (b)) of described substrate of glass 5, and is evenly distributed in
The upside (as shown in Fig. 6 (c)) of described miniature resonant 1；Described monocrystal silicon substrate 4 is bonded with described substrate of glass 5.
In the present embodiment, the material of described miniature resonant 1 is doped diamond or DOPOS doped polycrystalline silicon, is described miniature cup
The principal vibration body of shape resonator gyroscope.
In the present embodiment, described in be uniformly distributed the material of formula side electrode 2 be boron ion doping silicon, it is also possible to be phosphonium ion
Doped silicon, for described micro hemispherical resonator gyro instrument driving, detect and control.
In the present embodiment, the material boron ion of described annular integral type adjacent electrode 3 or phosphonium ion doped silicon, for described
The driving of micro hemispherical resonator gyro instrument, detect and control.
In the present embodiment, the material of described monocrystal silicon substrate 4 and substrate of glass 5 is respectively High Resistivity Si and silicon dioxide so
Highly resistant material, highly resistant material can reduce 16 be uniformly distributed formula side electrode 2 and annular integral type adjacent electrode 3 between
Signal disturbing.
In the present embodiment, it is silicon dioxide that the material of support column 6 is fixed at described center, it is also possible to be High Resistivity Si.
Embodiment 7
As shown in Fig. 7 (a)-Fig. 7 (c), the present embodiment provides the bipolar electrode distribution of a kind of side discrete adjacent surface annular to decline
Type hemispherical resonant gyro, including: hemispheric miniature resonant 1；16 are uniformly distributed formula side electrode 2；One
Annular integral type adjacent electrode 3；One monocrystal silicon substrate 4；One substrate of glass 5；Support column 6 is fixed at one center；Wherein:
Described center is fixed one end of support column 6 and is connected with described monocrystal silicon substrate 4, and support column 6 is fixed at described center
The other end is connected (as shown in Fig. 7 (a)) with described miniature resonant 1；It is uniformly distributed formula side electrode 2 described in 16 to be arranged at
The surface (as shown in Fig. 7 (b)) of described substrate of glass 5, and it is evenly distributed in the upside of described miniature resonant 1 (such as Fig. 7
Shown in (c))；One described annular integral type adjacent electrode 3 is arranged at the surface of described monocrystal silicon substrate 4, and is evenly distributed
Outside (as shown in Fig. 7 (a)) at described miniature resonant 1；Described monocrystal silicon substrate 4 is bonded with described substrate of glass 5.
In the present embodiment, the material of described miniature resonant 1 is doped diamond or DOPOS doped polycrystalline silicon, is described miniature half
The principal vibration body of ball resonator gyroscope.
In the present embodiment, described in be uniformly distributed the material of formula side electrode 2 be boron ion doping silicon, it is also possible to be phosphonium ion
Doped silicon, for described micro hemispherical resonator gyro instrument driving, detect and control.
In the present embodiment, the material boron ion of described annular integral type adjacent electrode 3 or phosphonium ion doped silicon, for described
The driving of micro hemispherical resonator gyro instrument, detect and control.
In the present embodiment, the material of described monocrystal silicon substrate 4 and substrate of glass 5 is respectively High Resistivity Si and silicon dioxide so
Highly resistant material, highly resistant material can reduce 16 be uniformly distributed formula side electrode 2 and annular integral type adjacent electrode 3 between
Signal disturbing.
In the present embodiment, it is silicon dioxide that the material of support column 6 is fixed at described center, it is also possible to be High Resistivity Si.
In the present embodiment, described micro hemispherical resonator gyro instrument can be operated under angular speed pattern, applies exchange and drives letter
Number, described miniature resonant 1 applies DC bias signal, described in be uniformly distributed formula side electrode 2 and make institute by electrostatic force
Stating miniature resonant 1 to be operated under required driven-mode, the vibration amplitude of driven-mode and frequency keep constant；When being perpendicular to
When substrate of glass 5 direction exists additional angular velocity, the vibration amplitude of sensed-mode can change, the size of this vibration amplitude with
The size of additional angular velocity is directly proportional, and causes between the distributed side electrode in described Jinyun 2 and described miniature resonant 1 simultaneously
Electric capacity changes；Sensed-mode vibration can be calculated by being uniformly distributed the signal intensity on formula side electrode 2 described in collection
The size of amplitude, and then calculate the size of additional angular velocity.
In the present embodiment, described micro hemispherical resonator gyro instrument can also gather on described annular integral type adjacent electrode 3
Signal intensity calculate the size of sensed-mode vibration amplitude, and then calculate the size of additional angular velocity, thus reduce described all
Parasitic capacitance between even distributed side electrode 2, improves accuracy of detection.
In the present embodiment, described micro hemispherical resonator gyro instrument can apply on described annular integral type adjacent electrode 3
Alternating current drive signal, and it is uniformly distributed acquisition testing letter on formula side electrode 2 or described annular integral type adjacent electrode 3 described
Number, it is provided that different driving, detection and control modes.
In the present embodiment, described micro hemispherical resonator gyro instrument can be by described equal annular integral type adjacent electrode 3
Signal intensity judge the duty of described micro hemispherical resonator gyro instrument, under abnormal operating state, calculated by control
Method applies control signal on part described annular integral type adjacent electrode 3, micro hemispherical resonator gyro instrument described in scalable
Duty, so that described micro hemispherical resonator gyro instrument normally works.
In the present embodiment, described micro hemispherical resonator gyro instrument also can be operated under dynamic balance pattern and full angle pattern,
Dynamic balance pattern can directly detect the size of additional angular velocity, and full angle pattern can directly detect the size of the additional anglec of rotation.
Embodiment 8
As shown in Fig. 8 (a)-Fig. 8 (c), the present embodiment provides the bipolar electrode distribution of a kind of side discrete adjacent surface annular to decline
Type annular resonance gyroscope arrangement, including: annular miniature resonant 1；16 are uniformly distributed formula side electrode 2；One
Individual annular integral type adjacent electrode 3；One monocrystal silicon substrate 4；One substrate of glass 5；Support column 6 is fixed at one center；
Described center is fixed one end of support column 6 and is connected with described monocrystal silicon substrate 4, and support column 6 is fixed at described center
The other end is connected (as shown in Fig. 8 (a)) with described miniature resonant 1；Formula one described annular one it is uniformly distributed described in 16
Body formula side electrode 2 is arranged at the surface (as shown in Fig. 8 (b)) of described substrate of glass 5, and is distributed in described miniature resonant 1
Upside (as shown in Fig. 8 (c))；One described annular integral type adjacent electrode 3 is arranged at the surface of described monocrystal silicon substrate 4,
And it is evenly distributed in the outside (as shown in Fig. 8 (a), Fig. 8 (c)) of described miniature resonant 1；Described monocrystal silicon substrate 4 and institute
State substrate of glass 5 to be bonded.
In the present embodiment, the material of described miniature resonant 1 is doped diamond or DOPOS doped polycrystalline silicon, is described Micro-ring
The principal vibration body of shape resonator gyroscope.
In the present embodiment, described in be uniformly distributed the material of formula side electrode 2 be boron ion doping silicon, it is also possible to be phosphonium ion
Doped silicon, for described micro loop resonator gyroscope driving, detect and control.
In the present embodiment, the material boron ion of described annular integral type adjacent electrode 3 or phosphonium ion doped silicon, for described
The driving of micro loop resonator gyroscope, detect and control.
In the present embodiment, the material of described monocrystal silicon substrate 4 and substrate of glass 5 is respectively High Resistivity Si and silicon dioxide so
Highly resistant material, highly resistant material can reduce 16 be uniformly distributed formula side electrode 2 and annular integral type adjacent electrode 3 between
Signal disturbing.
In the present embodiment, it is silicon dioxide that the material of support column 6 is fixed at described center, it is also possible to be High Resistivity Si.
In the present embodiment, described micro loop resonator gyroscope also can be operated under dynamic balance pattern and full angle pattern,
Dynamic balance pattern can directly detect the size of additional angular velocity, and full angle pattern can directly detect the size of the additional anglec of rotation.
Embodiment 9
As shown in Fig. 9 (a)-Fig. 9 (c), the present embodiment provides the bipolar electrode distribution of a kind of side discrete adjacent surface annular to decline
Type disk resonator gyroscope, including: discoidal miniature resonant 1；16 are uniformly distributed formula side electrode 2；One
Annular integral type adjacent electrode 3；One monocrystal silicon substrate 4；One substrate of glass 5；Support column 6 is fixed at one center；
Described center is fixed one end of support column 6 and is connected with described monocrystal silicon substrate 4, and support column 6 is fixed at described center
The other end is connected (as shown in Fig. 9 (a)) with described miniature resonant 1；It is uniformly distributed formula side electrode 2 described in 16 to be arranged at
The surface (as shown in Fig. 9 (b)) of described substrate of glass 5, and it is evenly distributed in the upside of described miniature resonant 1 (such as Fig. 9
Shown in (c))；One described annular integral type adjacent electrode 3 is arranged at the surface of described monocrystal silicon substrate 4, and is evenly distributed
Outside (as shown in Fig. 9 (a), Fig. 9 (c)) at described miniature resonant 1；Described monocrystal silicon substrate 4 and described substrate of glass 5 key
Close.
In the present embodiment, the material of described miniature resonant 1 is doped diamond or DOPOS doped polycrystalline silicon, is described miniature circular
The principal vibration body of dish resonator gyroscope.
In the present embodiment, described in be uniformly distributed the material of formula side electrode 2 be boron ion doping silicon, it is also possible to be phosphonium ion
Doped silicon, for described miniature disk resonator gyroscope driving, detect and control.
In the present embodiment, the material boron ion of described annular integral type adjacent electrode 3 or phosphonium ion doped silicon, for described
The driving of miniature disk resonator gyroscope, detect and control.
In the present embodiment, the material of described monocrystal silicon substrate 4 and substrate of glass 5 is respectively High Resistivity Si and silicon dioxide so
Highly resistant material, highly resistant material can reduce 16 be uniformly distributed formula side electrode 2 and annular integral type adjacent electrode 3 between
Signal disturbing.
It is silicon dioxide that the material of support column 6 is fixed at described center, it is also possible to be High Resistivity Si.
In the present embodiment, described miniature disk resonator gyroscope also can be operated under dynamic balance pattern and full angle pattern,
Dynamic balance pattern can directly detect the size of additional angular velocity, and full angle pattern can directly detect the size of the additional anglec of rotation.
Embodiment 10
As shown in Figure 10 (a)-Figure 10 (c), the bipolar electrode that the present embodiment provides the discrete adjacent surface in a kind of side annular is distributed
Miniature hemisphere body resonator gyroscope, including: hemispheroidal miniature resonant 1；16 are uniformly distributed formula side electrode 2；
One annular integral type adjacent electrode 3；One monocrystal silicon substrate 4；One substrate of glass 5；Support column 6 is fixed at one center；
Described center is fixed one end of support column 6 and is connected with described monocrystal silicon substrate 4, and support column 6 is fixed at described center
The other end is connected (as shown in Figure 10 (a)) with described miniature resonant 1；Described 16 are uniformly distributed formula side electrode 2 and arrange
In the surface (as shown in Figure 10 (b)) of described substrate of glass 5, and it is evenly distributed in the upside of described miniature resonant 1 (such as figure
Shown in 10 (c))；One described annular integral type adjacent electrode 3 is arranged at the surface of described monocrystal silicon substrate 4, and divides equably
Cloth is in the outside (as shown in Figure 10 (a)) of described miniature resonant 1；Described monocrystal silicon substrate 4 is bonded with described substrate of glass 5.
In the present embodiment, the material of described miniature resonant 1 is doped diamond or DOPOS doped polycrystalline silicon, is described miniature half
The principal vibration body of spheroid resonator gyroscope.
In the present embodiment, described in be uniformly distributed the material of formula side electrode 2 be boron ion doping silicon, it is also possible to be phosphonium ion
Doped silicon, for described miniature hemisphere body resonator gyroscope driving, detect and control.
In the present embodiment, the material boron ion of described annular integral type adjacent electrode 3 or phosphonium ion doped silicon, for miniature
The driving of described hemisphere resonator gyroscope, detect and control.
In the present embodiment, the material of described monocrystal silicon substrate 4 and substrate of glass 5 is respectively High Resistivity Si and silicon dioxide so
Highly resistant material, highly resistant material can reduce 16 be uniformly distributed formula side electrode 2 and annular integral type adjacent electrode 3 between
Signal disturbing.
In the present embodiment, it is silicon dioxide that the material of support column 6 is fixed at described center, it is also possible to be High Resistivity Si.
Embodiment 11
As shown in Figure 11 (a)-Figure 11 (c), the bipolar electrode that the present embodiment provides the discrete adjacent surface in a kind of side annular is distributed
Miniature multi-ring resonator gyroscope, including: miniature resonant 1 of annular more than；16 are uniformly distributed formula side electrode 2；One
Individual annular integral type adjacent electrode 3；One monocrystal silicon substrate 4；One substrate of glass 5；Support column 6 is fixed at one center；
Described center is fixed one end of support column 6 and is connected with described monocrystal silicon substrate 4, and support column 6 is fixed at described center
The other end is connected (as shown in Figure 11 (a)) with described miniature resonant 1；It is uniformly distributed formula side electrode 2 described in 16 to arrange
In the surface (as shown in Figure 11 (b)) of described substrate of glass 5, and it is evenly distributed in the upside of described miniature resonant 1 (such as figure
Shown in 11 (c))；One described annular integral type adjacent electrode 3 is arranged at the surface of described monocrystal silicon substrate 4, and divides equably
Cloth is in the outside (as shown in Figure 11 (a)) of described miniature resonant 1；Described monocrystal silicon substrate 4 is bonded with described substrate of glass 5.
In the present embodiment, the material of described miniature resonant 1 is doped diamond or DOPOS doped polycrystalline silicon, is described miniature many
The principal vibration body of ring resonator gyroscope.
In the present embodiment, described in be uniformly distributed the material of formula side electrode 2 be boron ion doping silicon, it is also possible to be phosphonium ion
Doped silicon, for described miniature multi-ring resonator gyroscope driving, detect and control.
In the present embodiment, the material boron ion of described annular integral type adjacent electrode 3 or phosphonium ion doped silicon, for described
The driving of miniature multi-ring resonator gyroscope, detect and control.
In the present embodiment, the material of described monocrystal silicon substrate 4 and substrate of glass 5 is respectively High Resistivity Si and silicon dioxide so
Highly resistant material, highly resistant material can reduce 16 be uniformly distributed formula side electrode 2 and annular integral type adjacent electrode 3 between
Signal disturbing.
In the present embodiment, it is silicon dioxide that the material of support column 6 is fixed at described center, it is also possible to be High Resistivity Si.
Embodiment 12
As shown in Figure 12 (a)-Figure 12 (c), the bipolar electrode that the present embodiment provides the discrete adjacent surface in a kind of side annular is distributed
Miniature cup-shaped resonator gyroscope, including: cup-shaped miniature resonant 1；16 are uniformly distributed formula side electrode 2；One
Annular integral type adjacent electrode 3；One monocrystal silicon substrate 4；One substrate of glass 5；Support column 6 is fixed at one center；Wherein: institute
The center of stating is fixed one end of support column 6 and is connected with described monocrystal silicon substrate 4, and the other end and the institute of support column 6 is fixed at described center
State miniature resonant 1 and connect (as shown in Figure 12 (a))；Described 16 are uniformly distributed formula side electrode 2 and are arranged at described glass
The surface (as shown in Figure 12 (b)) of substrate 5, and it is evenly distributed in the upside of described miniature resonant 1 (such as Figure 12 (c) institute
Show)；One described annular integral type adjacent electrode 3 is arranged at the surface of described monocrystal silicon substrate 4, and is evenly distributed in described
The outside (as shown in Figure 12 (a), Figure 12 (c)) of miniature resonant 1；Described monocrystal silicon substrate 4 is bonded with described substrate of glass 5.
In the present embodiment, the material of described miniature resonant 1 is doped diamond or DOPOS doped polycrystalline silicon, is described miniature cup
The principal vibration body of shape resonator gyroscope.
In the present embodiment, described in be uniformly distributed the material of formula side electrode 2 be boron ion doping silicon, it is also possible to be phosphonium ion
Doped silicon, for described miniature cup-shaped resonator gyroscope driving, detect and control.
Further, can be that adjacent electrode and side electrode provide metal lead wire, metal lead wire one end and side electrode,
Adjacent electrode connects, and the other end is external interface, it is simple to signal applies and signal extraction.
In the present embodiment, the material boron ion of described annular integral type adjacent electrode 3 or phosphonium ion doped silicon, for described
The driving of miniature cup-shaped resonator gyroscope, detect and control.
In the present embodiment, the material of described monocrystal silicon substrate 4 and substrate of glass 5 is respectively High Resistivity Si and silicon dioxide so
Highly resistant material, highly resistant material can reduce 16 be uniformly distributed formula side electrode 2 and annular integral type adjacent electrode 3 between
Signal disturbing.
In the present embodiment, it is silicon dioxide that the material of support column 6 is fixed at described center, it is also possible to be High Resistivity Si.
Present invention incorporates MEMS Bulk micro machining and surface silicon processing technique makes, be the processing of a kind of novelty
Technique；Gyroscope in the present invention can provide different driving, detection mode and different mode of operations, can be operated in needs
In the system of complex control；Gyroscope in the present invention may utilize adjacent electrode and side electrode is driven respectively and examines
Survey, reduce the parasitic capacitance between drive electrode and detecting electrode, improve accuracy of detection；The adjacent electricity of gyroscope in the present invention
Pole and side electrode provide metal lead wire, it is simple to signal applies and signal extraction.
Embodiment 13
As shown in Figure 13 (a)-Figure 13 (g), the bipolar electrode that the present embodiment provides the discrete adjacent surface in a kind of side annular is distributed
The preparation method of micro hemispherical resonator gyro instrument, comprises the steps:
The first step, as shown in Figure 13 (a), monocrystal silicon substrate 4 is carried out, gluing, photoetching, development, boron ion implanting,
Sputtering, degumming process, to obtain the side electricity of the boron ion doping silicon materials that thickness is 10 μm-50 μm in monocrystal silicon substrate 4
Pole 2；
Second step, as shown in Figure 13 (b), monocrystal silicon substrate is carried out gluing, photoetching, development, silicon isotropism carve
Lose, remove photoresist, to obtain the hemispherical groove that radius is 300 μm-700 μm in monocrystal silicon substrate 4；
3rd step, as shown in Figure 13 (c), in monocrystal silicon substrate, deposit thickness is the silicon dioxide of 1 μm-5 μm, for make
Miniature hemisphere harmonic oscillator 1 and side electrode gap provide sacrifice layer；
4th step, as shown in Figure 13 (d), on the basis of the 3rd step, deposit doped diamond or DOPOS doped polycrystalline silicon, go forward side by side
Row chemically mechanical polishing, to make the miniature hemisphere harmonic oscillator 1 that thickness is 1 μm-5 μm；
5th step, as shown in Figure 13 (e), on the basis of the 4th step, utilize BOE solution etches silicon dioxide sacrificial layer also
Control etch period, to discharge miniature hemisphere harmonic oscillator 1, prop up fixing as the center that radius is 15 μm-35 μm for nubbin
Dagger 6；
6th step, as shown in Figure 13 (f), gluing, photoetching, development, electronickelling in substrate of glass 5, remove photoresist, to make height
Degree is the adjacent electrode 3 of the metallic nickel materials of 20 μm-70 μm；
7th step, as shown in Figure 13 (g), be inverted substrate of glass 5, and be bonded with monocrystal silicon substrate 4, make substrate of glass
The center that the core of 5 fixes support column with the center of monocrystal silicon substrate 4 is directed at, it is achieved two substrates are fixed, thus obtain
The distributed gyroscope of bipolar electrode of side discrete adjacent surface annular.
Above the specific embodiment of the present invention is described.It is to be appreciated that the invention is not limited in above-mentioned
Particular implementation, those skilled in the art can make various deformation or amendment within the scope of the claims, this not shadow
Ring the flesh and blood of the present invention.
Claims (10)
1. the distributed gyroscope of bipolar electrode of a side discrete adjacent surface annular, it is characterised in that including: monocrystal silicon substrate,
Support column, miniature resonant, side electrode, adjacent electrode and substrate of glass are fixed in center；Wherein:
Described side electrode is multiple, and multiple side electrodes are evenly distributed on the one side of miniature resonant, and composition is uniformly distributed
Formula side electrode, the most described side electrode is arranged at the surface of described monocrystal silicon substrate or the surface of substrate of glass；
Described adjacent electrode, is distributed in an adjacent surface of miniature resonant, and this adjacent surface refers to adjacent with described side, and described
Adjacent electrode on adjacent surface shape ringwise, thus constitute an annular integral type adjacent electrode；The most described adjacent electrode is arranged
In the surface of described monocrystal silicon substrate or the surface of substrate of glass；
Described center is fixed one end of support column and is connected with described monocrystal silicon substrate, described center fix the other end of support column with
Described miniature resonant connects；Described monocrystal silicon substrate is bonded with described substrate of glass；
Described miniature resonant is as the pendulum of gyroscope, described side electrode and adjacent electrode driving for gyroscope
Move, detect and control.
The distributed gyroscope of bipolar electrode of a kind of side the most according to claim 1 discrete adjacent surface annular, its feature exists
In, when described micro hemispherical resonator gyro instrument is operated under angular speed pattern, apply alternating current drive signal, at described miniature resonant
Apply DC bias signal on son, described in be uniformly distributed formula side electrode and make described miniature resonant be operated in institute by electrostatic force
Under the driven-mode needed, and the vibration amplitude of driven-mode and frequency keep constant；Exist when being perpendicular to monocrystal silicon substrate direction
During additional angular velocity, the vibration amplitude of sensed-mode can change, and the size of this vibration amplitude and additional angular velocity is big
Little be directly proportional, cause simultaneously described in be uniformly distributed between formula side electrode and described miniature resonant electric capacity change；Logical
Cross and be uniformly distributed the signal intensity on formula side electrode and can calculate the size of sensed-mode vibration amplitude, Jin Erji described in collection
Calculate the size of additional angular velocity.
The distributed gyroscope of bipolar electrode of a kind of side the most according to claim 2 discrete adjacent surface annular, its feature exists
In, the signal intensity that described gyroscope gathers on described annular integral type adjacent electrode calculates the big of sensed-mode vibration amplitude
Little, and then calculate the size of additional angular velocity, thus reduce and be uniformly distributed the parasitic capacitance between formula side electrode, improve detection
Precision.
The distributed gyroscope of bipolar electrode of a kind of side the most according to claim 2 discrete adjacent surface annular, its feature exists
On annular integral type adjacent electrode, apply alternating current drive signal in, described gyroscope, and be uniformly distributed formula side electrode or
Acquisition testing signal on described annular integral type adjacent electrode, it is provided that different driving, detection and control modes.
The distributed gyroscope of bipolar electrode of a kind of side the most according to claim 2 discrete adjacent surface annular, its feature exists
In, judged the duty of described gyroscope by the signal intensity on annular integral type adjacent electrode, at non-normal working shape
Under state, on annular integral type adjacent electrode, apply control signal by control algolithm, miniature hemisphere resonance top described in scalable
The duty of spiral shell instrument, so that described micro hemispherical resonator gyro instrument normally works.
The distributed gyroscope of bipolar electrode of a kind of side the most according to claim 2 discrete adjacent surface annular, its feature exists
In, described gyroscope also can be operated under dynamic balance pattern and full angle pattern, wherein: dynamic balance pattern can directly detect additional
The size of angular velocity, full angle pattern can directly detect the size of the additional anglec of rotation.
7. according to the distributed gyroscope of bipolar electrode of a kind of side discrete adjacent surface annular described in any one of claim 1-6,
It is characterized in that, the material of described side electrode and described adjacent electrode is boron ion or phosphonium ion doped silicon or is metal
Nickel；When side electrode or adjacent electrode are positioned in monocrystal silicon substrate, material is boron ion or phosphonium ion doped silicon；Work as side
When electrode or adjacent electrode are positioned in substrate of glass, material is metallic nickel.
8. according to the distributed gyroscope of bipolar electrode of a kind of side discrete adjacent surface annular described in any one of claim 1-6,
It is characterized in that, the material of described monocrystal silicon substrate and substrate of glass is respectively the highly resistant material of High Resistivity Si or silicon dioxide,
High Resistivity Si material is for reducing the signal disturbing between external electrode and interior electrode.
9. according to the distributed gyroscope of bipolar electrode of a kind of side discrete adjacent surface annular described in any one of claim 1-6,
It is characterized in that, described center is fixed the material of support column and is High Resistivity Si or is silicon dioxide；
The material of described miniature resonant is doped diamond or DOPOS doped polycrystalline silicon.
10. the distributed gyroscope of bipolar electrode according to the side discrete adjacent surface annular described in any one of claim 1-9
Preparation method, it is characterised in that comprise the steps:
The first step, monocrystal silicon substrate is carried out, gluing, photoetching, development, boron ion implanting, sputtering, degumming process, at list
Boron ion or the side electrode of phosphonium ion doped silicon material or adjacent electrode is obtained in crystal silicon substrate；
Second step, monocrystal silicon substrate carries out gluing, photoetching, development, the isotropic etching of silicon, remove photoresist, with at monocrystal silicon
The groove that the sub-shape of miniature resonant is corresponding is obtained in substrate；
3rd step, in monocrystal silicon substrate, deposit silicon dioxide, for making between miniature resonant and side electrode or adjacent electrode
Gap provides sacrifice layer；
4th step, in monocrystal silicon substrate, deposit doped diamond or DOPOS doped polycrystalline silicon, and chemically-mechanicapolish polish, to make
Miniature resonant；
5th step, on the basis of the 4th step, utilize BOE solution etches silicon dioxide sacrificial layer and control etch period, with release
Miniature resonant, and nubbin is fixed support column as center；
6th step, carry out gluing, photoetching, development, electronickelling on the glass substrate, remove photoresist, to make the adjacent of metallic nickel materials
Electrode or side electrode；
7th step, inversion substrate of glass, and be bonded with monocrystal silicon substrate, the core making substrate of glass is silica-based with monocrystalline
The center alignment of support column is fixed at the center at the end, it is achieved two substrates are fixed, thus obtains double electricity of side discrete adjacent surface annular
The most distributed gyroscope.
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