CN106321708A - Two-degree-of-freedom vibration isolating and precision positioning combined active vibration isolator - Google Patents

Two-degree-of-freedom vibration isolating and precision positioning combined active vibration isolator Download PDF

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Publication number
CN106321708A
CN106321708A CN201610914597.XA CN201610914597A CN106321708A CN 106321708 A CN106321708 A CN 106321708A CN 201610914597 A CN201610914597 A CN 201610914597A CN 106321708 A CN106321708 A CN 106321708A
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China
Prior art keywords
vibration isolation
precision positioning
spring
voice coil
platform
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Granted
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CN201610914597.XA
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Chinese (zh)
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CN106321708B (en
Inventor
陈学东
王敏
陶业英
李小清
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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Priority to CN201610914597.XA priority Critical patent/CN106321708B/en
Publication of CN106321708A publication Critical patent/CN106321708A/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
    • F16F9/02—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum
    • F16F9/04—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum in a chamber with a flexible wall
    • F16F9/05—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum in a chamber with a flexible wall the flexible wall being of the rolling diaphragm type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
    • F16F15/0275—Control of stiffness
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
    • F16F15/067—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only wound springs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F3/00—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic
    • F16F3/02—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic with springs made of steel or of other material having low internal friction
    • F16F3/04—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic with springs made of steel or of other material having low internal friction composed only of wound springs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
    • F16F2228/06—Stiffness
    • F16F2228/066—Variable stiffness

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Vibration Prevention Devices (AREA)

Abstract

The invention discloses a two-degree-of-freedom vibration isolating and precision positioning combined active vibration isolator. The vibration isolator comprises a basic platform (10) and a load-bearing platform (30), and is characterized in that the vibration isolator further comprises two vibration isolating units and a positioning unit; the vibration isolating units are arranged between the basic platform (10) and the load-bearing platform (30) and each comprise an air spring (2) and a first voice coil motor (25a) which are arranged in the first direction, and a stiffness-adjustable leaf spring and a second voice coil motor (25b) which are arranged in the second direction; and the positioning unit is arranged at the outer side of the vibration isolating units, comprises a proportional pressure valve (26) arranged in the first direction, and further comprises a second voice coil motor (25b) which is arranged in the second direction. According to the vibration isolator, through the two vibration isolating units and the precision positioning unit, precision vibration isolating and precision positioning are achieved, and the vibration isolator is suitable for ultraprecision machining and measuring equipment in microenvironments.

Description

A kind of two-freedom vibration isolation and the compound active vibration insulator of precision positioning
Technical field
The invention belongs to super vibration isolation and precision positioning field, be specifically related to answering of a kind of two-freedom vibration isolation and precision positioning Close active vibration insulator.
Background technology
Currently, in high-end IC chip manufacturing field and ultraprecise detection field, isolating technique micro-to environment and precision positioning Requirement more and more stricter.And general ultra-precise vibration absorber, the most only possess the effect of accurate vibration isolation, and some high-end fine motions Platform only possesses the effect of precision positioning.Due to the needs of vibration damping, the positioning precision of some micromotion platforms is greatly attenuated, because of This improves this present situation in the urgent need to some new techniques, new method.Hydraulic cylinder+metal spring, piezo-activator+spring diaphragm Some means such as sheet, voice coil motor+air spring can be greatly enhanced location and the damping capacity of this kind of precision damper.
The combination of hydraulic cylinder+metal spring reduces the natural frequency of system not only by metal spring, improve passively every Shake performance；Hydraulic cylinder is as active executive component, it is possible to the active realizing vibration isolation controls；Hydraulic cylinder also can be as the most fixed simultaneously Bit unit realizes a certain degree of positioning action.But owing to the operating frequency of hydraulic cylinder is relatively low, it is for the vibration damping of medium-high frequency It is not obvious；The combination of the most this frame for movement, causes motion to form gap relatively big, thus affect its work positioning precision and Locating speed.The combination of piezo-activator+spring diaphragm, it is possible to changed the passive vibration isolation ability of system by diaphragm spring, real The vibration suppression of existing medium-high frequency；And piezo-activator can realize the active damping of each frequency range as active actuating motor；With Time, piezo-activator also acts as positioning actuator, can realize nanoscale location, but its total movement stroke is only micron order, Limit it and use space.The combination of voice coil motor+air spring, can realize the passive vibration isolation energy of medium-high frequency by air spring Power, voice coil motor can realize the active vibration isolation ability of low-frequency range as actively controlling executor；Voice coil motor is again as essence simultaneously The active actuators of close location, it is possible to achieve micron order location and grade stroke, both can guarantee that vibroshock had big carrying While power, it is effectively isolated superlow frequency vibrating, precision positioning precision can be realized again.
Patent documentation CN103318839A discloses a kind of grand microfluidic platform of high-speed, high precision based on piezoelectric ceramics and switching Method, its vibration isolator support air spring vibration isolation platform using 3 or more than 3 static air spring structures and load thereof, Thus realize the precision vibration damping of structure.But the disclosed grand microfluidic platform of high-speed, high precision based on piezoelectric ceramics of this patent documentation, its Do not form closed loop location loop, it is impossible to realize the effect of precision positioning.
Summary of the invention
For disadvantages described above or the Improvement requirement of prior art, the invention provides a kind of two-freedom vibration isolation fixed with precision The compound active vibration insulator of position, this compound active vibration insulator compact conformation, by two single precision positionings and accurate vibration isolation Unit, coordinates different active control elements, realizes the accurate vibration isolation under fine motion environment and precision positioning.
To achieve these goals, the invention provides the compound active vibration isolation of a kind of two-freedom vibration isolation and precision positioning Device, this vibration isolator includes that basic platform and load platform, the lower end of described basic platform are connected with outside platform, and described load is put down The upper end of platform is connected with the equipment needing location and vibration isolation, it is characterised in that:
This vibration isolator also includes vibration isolation unit, and it is arranged between described basic platform and load platform, and one end is with described Basic platform connects, and the other end is connected with described load platform, and described vibration isolation unit includes the air bullet arranged in the first direction Spring and the first voice coil motor, described air spring is for realizing the passive vibration isolation of HFS, and described first voice coil motor is used for Realize medium and low frequency active vibration isolation, thus realize the active-passive composite full frequency band vibration isolation of first direction；Described vibration isolation unit also includes The adjustable rigidity flat spring arranged in a second direction and the second voice coil motor, described flat spring is by decoupling flexible hinge with described Air spring connects, for realizing the passive vibration isolation of HFS, described second voice coil motor be used for realizing medium and low frequency actively every Shake, thus realize the active-passive composite full frequency band vibration isolation of second direction；And
Positioning unit, it is arranged on the outside of described vibration isolation unit, and one end is connected with described basic platform, the other end and institute Stating load platform to connect, described positioning unit includes the proportional pressure valve arranged in the first direction, is used for controlling described air bullet Spring air inflow, thus realize the precision positioning of first direction；Described positioning unit also includes arranging to obtain the second sound in a second direction Circle motor, is used for realizing Bit andits control, thus realizes the precision positioning of second direction.
Further, described vibration isolation unit also includes First Speed sensor and the controller arranged in the first direction, institute Stating First Speed sensor and for the vibration velocity signal of described load platform and be transferred to described controller, controller is used for leading to Cross algorithm process disease and active control signal is passed to described first voice coil motor, thus realize medium and low frequency active vibration isolation.
Further, described vibration isolation unit also includes the second speed sensor arranged in a second direction, described second speed Degree sensor is transferred to described controller for the vibration velocity signal gathering described load platform, and controller is used for passing through algorithm Process and active control signal is passed to described second voice coil motor, it is achieved the medium and low frequency active vibration isolation of second direction.
Further, described positioning unit also includes the first displacement transducer arranged in the first direction, described first Displacement sensor is for gathering the displacement signal of described load platform and being transferred to described controller, and controller is at by algorithm Active control signal is also passed to described proportional pressure valve by reason, the system turnover tolerance of air spring described in proportional pressure valve control, Thus realize the precision positioning of first direction.
Further, described positioning unit also includes the second displacement sensor arranged in a second direction, described second Displacement sensor is for gathering the displacement signal of described load platform and being transferred to described controller, and controller is at by algorithm Active control signal is also passed to described second voice coil motor by reason, and described second voice coil motor carries out power Bit andits control, thus Realize the precision positioning of second direction.
Further, described air spring also includes pressure valve, for changing the atmospheric pressure value of input gas, passes through institute simultaneously State proportional pressure valve and change the height value of input gas, thus change the rigidity of described air spring first direction, to adapt to not Same load environment.
Further, described flat spring is two, respectively first spring and the second flat spring, described first spring With the second flat spring angle in 90 °, for the stiffness tuning mechanism of centre by regulating each flat spring, to change described Effective bending length of spring, thus change the second direction rigidity of described flat spring.
Further, described First Speed sensor and second speed sensor are the sensing that can measure absolute velocity Device.
Further, described first displacement transducer and the first displacement transducer are non-contact displacement transducer.
Further, described first direction is the central axial direction of described basic platform and load platform, described second Direction is and the direction of described central axis upright.
The compound active vibration insulator of two-freedom vibration isolation and precision positioning that the present invention provides be applied to Ultra-precision positioning with Precision isolation system field, overcomes the shortcoming that general vibration isolator or cannot be difficult to complex controll, it is adaptable to transport microenvironment Dynamic sensitive Ultra-precision Turning and the equipment of measurement.In general, by the contemplated above technical scheme of the present invention and existing skill Art is compared, it is possible to obtain following beneficial effect:
(1) the two-freedom vibration isolation of the present invention and the compound active vibration insulator of precision positioning, by two single precisions Location and accurate vibration isolation unit, coordinate different active control elements, realize precision positioning under fine motion environment and accurate every Shake；
(2) the two-freedom vibration isolation of the present invention and the compound active vibration insulator of precision positioning, by first direction and second The different active closed-loop of direction both direction control element, it is achieved the single accurate vibration isolation of two-freedom and precision positioning；
(3) the two-freedom vibration isolation of the present invention and the compound active vibration insulator of precision positioning, accurate vibration isolation uses main passive Combined type vibration isolation controls, and its active that can realize accurate vibration isolation controls, not only by passive device effective attenuation medium-high frequency Vibration, and the decay of formant vicinity can be realized by active member.
(4) the two-freedom vibration isolation of the present invention and the compound active vibration insulator of precision positioning, the air spring of first direction Rigidity adjustable, the atmospheric pressure value that can be inputted by control is different from housing depth, thus changes the vertical stiffness of air spring, Adapt to different vertical loads.
(5) the two-freedom vibration isolation of the present invention and the compound active vibration insulator of precision positioning, the flat spring of second direction Rigidity is adjustable, can effectively bend length by regulating the stiffness tuning mechanism of centre of each flat spring with change flat spring Degree, thus change the second direction rigidity of flat spring, to adapt to different load environment.
Accompanying drawing explanation
Fig. 1 is that a kind of two-freedom vibration isolation of the embodiment of the present invention is shown with the three-dimensional of the compound active vibration insulator of precision positioning It is intended to；
Fig. 2 is a kind of two-freedom vibration isolation local knot with the compound active vibration insulator of precision positioning of the embodiment of the present invention Structure schematic diagram；
Fig. 3 is that a kind of two-freedom vibration isolation of the embodiment of the present invention is quick-fried with the structure of the compound active vibration insulator of precision positioning Fried figure；
Fig. 4 is that a kind of two-freedom vibration isolation of the embodiment of the present invention is negative with what the compound active vibration insulator of precision positioning related to 3-D view after carrying platform；
Fig. 5 is facing of the compound active vibration insulator of a kind of two-freedom vibration isolation and the precision positioning of the embodiment of the present invention Figure；
Fig. 6 is a kind of two-freedom vibration isolation vertical view with the compound active vibration insulator of precision positioning of the embodiment of the present invention Figure；
Fig. 7 is the sky that a kind of two-freedom vibration isolation of the embodiment of the present invention relates to the compound active vibration insulator of precision positioning The structure simplified pinciple figure of air spring；
Fig. 8 is the sheet that a kind of two-freedom vibration isolation of the embodiment of the present invention relates to the compound active vibration insulator of precision positioning Spring three dimensional structure and orthogonal installation schematic diagram；
Fig. 9 be a kind of two-freedom vibration isolation of the embodiment of the present invention with the compound active vibration insulator of precision positioning relate to every Shake and precision positioning complex controll block diagram；
Figure 10 is that a kind of two-freedom vibration isolation of the embodiment of the present invention relates to the compound active vibration insulator of precision positioning Precise Positioning Control block diagram；
Figure 11 is that a kind of two-freedom vibration isolation of the embodiment of the present invention relates to the compound active vibration insulator of precision positioning Accurate active vibration isolation schematic diagram；
Figure 12 is that a kind of two-freedom vibration isolation of the embodiment of the present invention relates to the compound active vibration insulator of precision positioning Accurate active vibration isolation transport design sketch.
In Fig. 1～Fig. 6, identical reference is used for representing identical element or structure, wherein: 10-basic platform, 20-air spring, 211-first spring, 212-the second flat spring, 221-the first lock-screw structure, 222-the second locking screw Pin structure, 223-the 3rd lock-screw structure, 231-first decouples flexible hinge, 232-second decouples flexible hinge, 24a- One velocity sensor, 24b-second speed sensor, 25a-the first voice coil motor, 25b-the second voice coil motor, 26-ratio pressure Valve, 27a-the first displacement transducer, 27b-second displacement sensor, 30-load platform, 40-active controller.
Detailed description of the invention
In order to make the purpose of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, right The present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, not For limiting the present invention.As long as additionally, technical characteristic involved in each embodiment of invention described below that The conflict of not constituting between this just can be mutually combined.
Fig. 1～6 is the knot of a kind of two-freedom vibration isolation provided by the present invention and the compound active vibration insulator of precision positioning Structure schematic diagram.As shown in figs. 1 to 6, this vibration isolator include basic platform 10, load platform the 30, first voice coil motor 25a, first Velocity sensor 24a, the first displacement transducer 27a, two mutually orthogonal levels to adjustable rigidity first spring 211, Two flat springs 212, the second voice coil motor 25b, second speed sensor 24b, second displacement sensor 27b, air spring 20, ratio Example pressure valve 26, the first decoupling flexible hinge 231 of described first spring the 211, second flat spring 212 and air spring 20, Second decoupling flexible hinge 232 and the first lock-screw structure 221 that basic platform 10 and load platform 20 are coupled together, Second lock-screw structure 222 and the 3rd lock-screw structure 223.
In a preferred embodiment of the invention, the first voice coil motor 25a and the second voice coil motor 25b is Lorentz lorentz's motor.
In a preferred embodiment of the invention, First Speed sensor 24a and second speed sensor 24b is that Geophone is exhausted To velocity sensor.
In a preferred embodiment of the invention, the first displacement transducer 27a and second displacement sensor 27b is contactless electricity Eddy displacement sensor.
As shown in figures 1-4, the lower end of described air spring 20 is arranged on basic platform 10 by screw, the circle of upper end One end that heart position then decouples flexible hinge 232 by trip bolt and the first decoupling flexible hinge 231, second is connected, and first The other end of decoupling flexible hinge 231 and the second decoupling flexible hinge 232 is by screw and adjustable rigidity first spring 211 It is connected with the second flat spring 212.
First spring 211 and the second flat spring 212 are attached to basic platform 10, load platform 30 is connected support First lock-screw structure the 221, second lock-screw structure 222 and the 3rd lock-screw structure 223.Wherein, the first locking screw Pin structure the 221, second lock-screw structure 222 orthogonal installation of angle in 90 °, the 3rd lock-screw structure 223 is then at the first lock Install on the perpendicular bisector of tight bolt structure the 221, second lock-screw structure 222 and at the other end of air spring 20.Meanwhile, Proportional pressure valve 26 is also installed by screw and is attached on a side of the 3rd lock-screw structure 223, real by gas circuit Now control the turnover gas control system of air spring.3rd another lateral location of lock-screw structure 223, by a frame for movement By mounted thereon for second displacement sensor 27a.
As shown in figures 1-4, the first displacement transducer 27a, the first voice coil motor 25a are also arranged on basic flat accordingly Platform 10 is with on load platform 30, and wherein the stator of the first voice coil motor 25a is fixed on basic platform 10, the first voice coil motor The mover of 25a is then installed on load platform 30.First Speed sensor 24a is installed on load platform 30, its direction Parallel with the direction of the first displacement transducer 27a and the first voice coil motor 25a.
Second speed sensor 24b is installed on load platform 30, and its installation direction ensures and the first displacement transducer 27a and first is vertical to the direction of voice coil motor 25a.Second voice coil motor 25b is arranged close to First Speed sensing accordingly The place of device 24b.Wherein, the stator of the second voice coil motor 25b is also fixed on basic platform 10, the second voice coil motor The mover of 25b is then fixed on load platform 30.In the stator installation place of the second voice coil motor 25b, by a machinery knot First displacement transducer 27b is arranged on stator structure by structure.
First direction displacement signal and second direction displacement signal are passed by the first displacement transducer 27b and water the second displacement Sensor 27a gather after, output carry out positive location algorithm calculating to active controller 40, calculated control signal export to Proportional pressure valve 26 and the second voice coil motor 25b, carries out closed loop positive location control.
First direction rate signal and second direction rate signal are sensed by First Speed sensor 24b and second speed After device 24a gathers, output carries out active vibration isolation algorithm calculating to active controller 40, and calculated control signal exports to the One voice coil motor 25a and the second voice coil motor 25b, carries out closed loop active vibration isolation control.
Fig. 5 is facing of the compound active vibration insulator of a kind of two-freedom vibration isolation and the precision positioning of the embodiment of the present invention Figure.As it is shown in figure 5, be followed successively by the first voice coil motor 25a, the first displacement transducer 27a, First Speed sensor from left to right 24a, proportional pressure valve the 26, first lock-screw structure the 221, second lock-screw structure the 222, the 3rd lock-screw structure 223, Second displacement sensor 27b, second speed sensor 24b and the second voice coil motor 25b, wherein the first lock-screw structure 221, Second lock-screw structure 222 and the 3rd lock-screw structure 223 are arranged on basic platform 10, support load platform 30.
Fig. 6 is a kind of two-freedom vibration isolation vertical view with the compound active vibration insulator of precision positioning of the embodiment of the present invention Figure.As shown in Figure 6, the first lock-screw structure 221 becomes 90 degree of orthogonal installations of angle with the second lock-screw structure 222, simultaneously Its vertical line is defined as horizontal direction, and the 3rd lock-screw structure 223 is then arranged on the first lock-screw structure 221 and the second locking On the perpendicular bisector of bolt structure 222 and at the other end of air spring 20.
Fig. 7 is the sky that a kind of two-freedom vibration isolation of the embodiment of the present invention relates to the compound active vibration insulator of precision positioning The structure simplified pinciple figure of air spring.As it is shown in fig. 7, base plate 203 is fixed on basic platform 10, diaphragm seal 202 is for the end of by Plate 203 is connected with the outer metallic cavity 201 of air spring 20, to form air cavity 204.The rigidity formula of air cavity 204 is as follows:
K = κA 2 ( P a t m + m g A ) V 0 - - - ( 1 )
From formula (1) it can be seen that the stiffness K of single-chamber room air spring and load quality m, air chamber sectional area A, chamber volume V0And air pressure PatmRelevant, κ is adiabatic coefficent.Can be by the air pressure size of Air Valve Control insufflation gas and sky in the most actually used The volume size of air spring air cavity 204, regulates different rigidity to adapt to different loads and service condition.
Fig. 8 is the sheet that a kind of two-freedom vibration isolation of the embodiment of the present invention relates to the compound active vibration insulator of precision positioning Spring three dimensional structure and orthogonal installation schematic diagram.In Fig. 8 (a), metal clips 2111 and metal clips 2113 are installed in level In the shell fragment fixing device 2114 of adjustable rigidity first spring the 211, second flat spring 212, stiffness tuning mechanism 2112 leads to Cross and slide up and down the bending length that effectively works changing metal clips 2111,2113, thus change metal clips 2111,2113 The rigidity that effectively works, change further the rigidity of adjustable rigidity first spring the 211, second flat spring 212.Simultaneously in order to enable Enough decoupling linear regulation system levels are to rigidity, and two adjustable rigidity first spring the 211, second flat springs 212 become 90 degree of angles Orthogonal configuration, shown in its operation principle such as Fig. 8 (b), its Derivation of Mathematical Model process is as follows:
Adjustable rigidity first spring the 211, second flat spring 212 mechanism of two mutual layouts in 90 ° can be equivalent to Fig. 8 Shown in (b).In figure, A point is the application point of power, it is considered to general, when the unit force F having any direction (θ is arbitrary value) acts on A point, flat spring mechanism produces quiet deformation Δ x to B point in the direction of directed force F.Unit force F is at spring k1And k2On component produce Raw Static Correction is respectively
Assuming that active force is the least, the quiet deformation of generation is the least, and therefore ∠ CBD is still approximately right angle, the most total Deflection Δ x is:
Δ x = Δx 1 2 + Δx 2 2 - - - ( 3 )
Rigidity k1And k2Identical, be k, then mechanism's global stiffness on θ direction is represented by
When using two flat spring parallel connections when, its rigidity is the twice of a flat spring rigidity, i.e.
kAnd=2k (5)
In accurate vibration isolation system, vibration amplitude is generally at micron order, it is ensured that the correctness of above-mentioned hypothesis.It addition, by In the arbitrariness of θ, the rigidity that therefore this mechanism goes up in any direction all keeps consistent, for adjustable rigidity first spring 211 Rigidity k.
According to the knowledge of the mechanics of materials, one end fix the adjustable rigidity first spring 211 of free square-section, one end, The bending stiffness of two flat springs 212 is represented by:
ks=3EI/L (6)
Wherein, E is the elastic modelling quantity of flat spring material, and I is bending resistant section the moment of inertia, and L is the effective bending length of flat spring. From rigidity formula, rigidity size and effective bending length are inverse ratio, therefore by effective bending length of tab spring Its rigidity size can be changed, thus realize the regulation of second direction rigidity.
Fig. 9 be a kind of two-freedom vibration isolation of the embodiment of the present invention with the compound active vibration insulator of precision positioning relate to every Shake and precision positioning complex controll block diagram.As it is shown in figure 9, wherein control block diagram is divided into the position ring that can control precision positioning Be capable of the speed ring of accurate vibration isolation, final two loops merge into vibration isolation and precision positioning complex controll in parallel.
First set at the displacement that a shift value, i.e. precision positioning need to reach, then by the first displacement transducer Actual displacement value now is collected by 27a, second displacement sensor 27b, by a low pass filter by clutter noise After signal filters, comparing with setting value, the error in-position controller 40 of two signal institute outputs carries out proactive algorithm control Data after algorithm process are exported to corresponding position actuator by system, it is achieved closed loop positive location controls.
After First Speed sensor 24a, second speed sensor 24b gather the vibration velocity signal of load platform, signal After band-pass filter falls useless noise signal, pass to useful rate signal feed back vibration isolation controller 40, warp After crossing Algorithm of Active Control process, the data after algorithm process are exported to the first voice coil motor 25a, it is achieved closed loop active vibration isolation Control.
In being preferable to carry out of the present invention, use Sky-hook control algorithm.
Figure 10 is that a kind of two-freedom vibration isolation of the embodiment of the present invention relates to the compound active vibration insulator of precision positioning Precise Positioning Control block diagram.Figure 10 (a) is vertical position loop control block diagram, as shown in Figure 10 (a), first give one vertical Position setting value, at the displacement that i.e. precision positioning needs reach, then by the first displacement transducer 27a by actual bit now Shifting value collects, and after being filtered by clutter noise signal by a low pass filter, compares with setting value, two signal institutes The error in-position controller 40 of output carries out proactive algorithm control, exports the data after algorithm process to proportional pressure valve 26, carry out positive location and control vibrating isolation system, it is achieved the closed loop positive location of first direction controls.
In a preferred embodiment of the invention, the pid control algorithm of band second-order low-pass filter is used.
Figure 10 (b) is that level is to position loop control block diagram.As shown in Figure 10 (b), first give a level to position Setting value, at the displacement that i.e. precision positioning needs reach, then by second direction displacement transducer 27b by actual bit now Shifting value collects, and after being filtered by clutter noise signal by a low pass filter, compares with setting value, two signal institutes The error in-position controller 40 of output carries out proactive algorithm and controls the data after algorithm process to be exported to the second voice coil loudspeaker voice coil electricity Machine 25b, carries out positive location and controls vibrating isolation system, it is achieved the closed loop positive location of second direction controls.
In a preferred embodiment of the invention, the pid control algorithm of band second-order low-pass filter is used.
In a preferred embodiment of the invention, Lorentz motors is used.
On register control designs, this example uses control PID controller connected with second-order low-pass filter Structure.Position signalling is filtered eliminating the impact that position signalling high-frequency noises is brought by second-order low-pass filter.Series connection The PID controller transmission function of second-order low-pass filter is represented by:
C ( s ) = k p + k i s + k d s ( s 2 πf L P ) 2 + 2 ξ 2 πf L P s + 1 - - - ( 7 )
In formula, kp, ki and kd are respectively the proportionality coefficient of PID controller, integral coefficient and differential coefficient, flp and ξ is respectively For cut-off frequency and the damped coefficient of second-order low-pass filter, s=j ω is the complex variable of Laplace transformation, and ω is frequency coefficient, j It it is complex unit.
The air spring that hereinafter present invention used, flat spring passive vibration isolation mechanism control with skyhook damping active vibration isolation and The vibration isolation principle of tradition vibration isolating mechanism contrasts:
Figure 11 is that a kind of two-freedom vibration isolation of the embodiment of the present invention relates to the compound active vibration insulator of precision positioning Accurate active vibration isolation schematic diagram.As shown in Figure 11 (a), (b), the passive vibration isolation machine that tradition passive vibration isolation mechanism and the present invention use Structure, is all to consist of spring mass-damping unit, it is achieved simple passive vibration isolation, its transport curvilinear function:
G 0 = x 1 x 0 = C 0 s + K 0 Ms 2 + C 0 s + K 0 - - - ( 8 )
G = x 1 x 0 = C s + K Ms 2 + C s + K - - - ( 9 )
In formula, x1For the vibration displacement amount of load platform, x0It is the vibration displacement amount of basic platform, C0It is that tradition is by motivation The equivalent damping of structure, C is the equivalent damping that the present invention uses mechanism, K0It is between tradition driven member load platform and basic platform Equivalent stiffness, K is the equivalent stiffness that the present invention uses between mechanism load platform and basic platform, and M is the quality of load platform, S=j ω is the complex variable of Laplace transformation, and ω is frequency coefficient.
Compared with tradition driven member, passive vibration isolation element of the present invention is vertical for air spring, level to for Flat spring, its rigidity value is far below tradition driven member, it is possible to be substantially reduced the natural frequency of system.
As shown in Figure 11 (c), the present invention, on the basis of passive vibration isolation mechanism, adds an active-feedback control-loop, Active-feedback control-loop uses the mode operation that sensor feedback, controller calculate, actuator exports, constitutes main passive multiple Close vibration isolating mechanism,
With the vibration signal on load platform as reference, passive vibration isolation unit is carried out actively control and (the present embodiment is adopted Use skyhook damping feedback control algorithm), composition active-passive composite vibration isolation unit, wherein control power F:
F=λ x1s (10)
In above formula, λ is the gain coefficient of skyhook damping, and s=j ω is the complex variable of Laplace transformation, and ω is frequency coefficient.
The then transport curvilinear function G under active-passive composite vibration isolating mechanism closed-loop casec:
G c = x 1 x 0 = C s + K Ms 2 + ( C + λ ) s + K - - - ( 11 )
Figure 12 is that a kind of two-freedom vibration isolation of the embodiment of the present invention relates to the compound active vibration insulator of precision positioning Accurate active vibration isolation transport design sketch.When from figure, solid line can be seen that employing tradition driven member vibration isolation, its natural frequency Higher, the amplitude of formant is bigger.And after using this structure, dotted line from figure is it can be seen that its passive transport is total at low frequency Shaking has part to decay at peak, and natural frequency moves forward.Dotted line from figure is it can be seen that use the active vibration isolation of the present invention to control After, damping is promoted the skyhook damping compensation that the formant of simultaneity factor is also actively controlled the most further, from the biography of system Pass rate curve, find out the lifting that the invention enables vibration suppression ability to obtain further performance.
As it will be easily appreciated by one skilled in the art that and the foregoing is only presently preferred embodiments of the present invention, not in order to Limit the present invention, all any amendment, equivalent and improvement etc. made within the spirit and principles in the present invention, all should comprise Within protection scope of the present invention.

Claims (10)

1. two-freedom vibration isolation and a compound active vibration insulator for precision positioning, this vibration isolator includes basic platform (10) and bears Carrying platform (30), the lower end of described basic platform (10) is connected with outside platform, the upper end of described load platform (30) and needs The equipment of location and vibration isolation connects, it is characterised in that:
This vibration isolator also includes vibration isolation unit, and it is arranged between described basic platform (10) and load platform (30), one end with Described basic platform (10) connects, and the other end is connected with described load platform (30), and described vibration isolation unit includes in the first direction The air spring (20) arranged and the first voice coil motor (25a), described air spring is used for realizing the passive vibration isolation of HFS, Described first voice coil motor is used for realizing medium and low frequency active vibration isolation, thus realize the active-passive composite full frequency band of first direction every Shake；Described vibration isolation unit also includes adjustable rigidity flat spring and the second voice coil motor (25b) arranged in a second direction, described Spring is connected with described air spring by decoupling flexible hinge, for realizing the passive vibration isolation of HFS, described second sound Circle motor is used for realizing medium and low frequency active vibration isolation, thus realizes the active-passive composite full frequency band vibration isolation of second direction；And
Positioning unit, it is arranged on the outside of described vibration isolation unit, and one end is connected with described basic platform (10), the other end and institute Stating load platform (30) to connect, described positioning unit includes the proportional pressure valve (26) arranged in the first direction, is used for controlling institute State air spring (20) air inflow, thus realize the precision positioning of first direction；Described positioning unit also includes in a second direction Second voice coil motor (25b) is set to obtain, is used for realizing Bit andits control, thus realizes the precision positioning of second direction.
A kind of two-freedom vibration isolation the most according to claim 1 and the compound active vibration insulator of precision positioning, its feature exists First Speed sensor (24a) and the controller (40) arranged in the first direction is also included in: described vibration isolation unit, described first Velocity sensor is used for the vibration velocity signal of described load platform (30) and is transferred to described controller (40), controller (40) For active control signal being passed to described first voice coil motor (25a) by algorithm process is sick, thus realize medium and low frequency master Dynamic vibration isolation.
A kind of two-freedom vibration isolation the most according to claim 1 and 2 and the compound active vibration insulator of precision positioning, its feature It is: described vibration isolation unit also includes the second speed sensor (24b) arranged in a second direction, described second speed sensor Being transferred to described controller (40) for gathering the vibration velocity signal of described load platform (30), controller (40) is used for passing through Active control signal is also passed to described second voice coil motor (25b) by algorithm process, it is achieved the medium and low frequency of second direction is actively Vibration isolation.
4. according to the compound active vibration isolation of a kind of two-freedom vibration isolation according to any one of claim 1-3 Yu precision positioning Device, it is characterised in that: described positioning unit also includes the first displacement transducer (27a) arranged in the first direction, described first Displacement transducer is used for gathering the displacement signal of described load platform (30) and being transferred to described controller (40), controller (40) For by algorithm process and active control signal to be passed to described proportional pressure valve (26), air described in proportional pressure valve control The system turnover tolerance of spring (20), thus realize the precision positioning of first direction.
5. according to the compound active vibration isolation of a kind of two-freedom vibration isolation according to any one of claim 1-4 Yu precision positioning Device, it is characterised in that: described positioning unit also includes the second displacement sensor (27b) arranged in a second direction, described second Displacement transducer is used for gathering the displacement signal of described load platform (30) and being transferred to described controller (40), controller (40) For by algorithm process and active control signal to be passed to described second voice coil motor (25b), described second voice coil motor (25b) carry out power Bit andits control, thus realize the precision positioning of second direction.
6. according to the compound active vibration isolation of a kind of two-freedom vibration isolation according to any one of claim 1-5 Yu precision positioning Device, it is characterised in that: described air spring (20) also includes pressure valve, for changing the atmospheric pressure value of input gas, passes through simultaneously Described proportional pressure valve (26) changes the height value of input gas, thus changes the firm of described air spring (20) first direction Degree, to adapt to different load environment.
7. according to the compound active vibration isolation of a kind of two-freedom vibration isolation according to any one of claim 1-6 Yu precision positioning Device, it is characterised in that: described flat spring is two, respectively first spring (211) and the second flat spring (212), described One flat spring (211) and the second flat spring (212) angle in 90 °, the rigidity for the centre by regulating each flat spring is adjusted Joint mechanism, to change effective bending length of described flat spring, thus changes the second direction rigidity of described flat spring.
8. according to the compound active vibration isolation of a kind of two-freedom vibration isolation according to any one of claim 3-7 Yu precision positioning Device, it is characterised in that: described First Speed sensor (24a) and second speed sensor (24b) are for can measure absolute velocity Sensor.
9. according to the compound active vibration isolation of a kind of two-freedom vibration isolation according to any one of claim 5-8 Yu precision positioning Device, it is characterised in that: described first displacement transducer (27a) and the first displacement transducer (27b) they are contactless displacement sensing Device.
10. according to the compound active vibration isolation of a kind of two-freedom vibration isolation according to any one of claim 1-9 Yu precision positioning Device, it is characterised in that: described first direction is described basic platform (10) and the central axial direction of load platform (30), described Second direction is and the direction of described central axis upright.
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