CN106315586B - polycrystalline silicon production system - Google Patents

polycrystalline silicon production system Download PDF

Info

Publication number
CN106315586B
CN106315586B CN201510324419.7A CN201510324419A CN106315586B CN 106315586 B CN106315586 B CN 106315586B CN 201510324419 A CN201510324419 A CN 201510324419A CN 106315586 B CN106315586 B CN 106315586B
Authority
CN
China
Prior art keywords
steam
electric power
power generator
polycrystalline silicon
silicon production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201510324419.7A
Other languages
Chinese (zh)
Other versions
CN106315586A (en
Inventor
齐林喜
吉佳佳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bayannur concentrated Silicon Industry Co., Ltd
Original Assignee
INNER MONGOLIA DUN'AN PHOTOVOLTAIC TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INNER MONGOLIA DUN'AN PHOTOVOLTAIC TECHNOLOGY Co Ltd filed Critical INNER MONGOLIA DUN'AN PHOTOVOLTAIC TECHNOLOGY Co Ltd
Priority to CN201510324419.7A priority Critical patent/CN106315586B/en
Publication of CN106315586A publication Critical patent/CN106315586A/en
Application granted granted Critical
Publication of CN106315586B publication Critical patent/CN106315586B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Silicon Compounds (AREA)

Abstract

A kind of polycrystalline silicon production system, including hydrogenation apparatus, reduction apparatus, purifying column and the vapour source that steam is supplied for hydrogenation apparatus.Polycrystalline silicon production system further includes the first steam electric power generator that air intake is connected with vapour source, which is connected with reduction apparatus or purifying column.The polycrystalline silicon production system of the present invention, decrease temperature and pressure after making steam pass through steam electric power generator using steam electric power generator in steam conveying, meet different processes with gas requirement, reduce the loss of the energy of steam, the electricity that steam electric power generator is sent out can save production cost with the power consumption of compensation system.

Description

Polycrystalline silicon production system
Technical field
The present invention relates to a kind of polycrystalline silicon production system more particularly to a kind of polycrystalline silicon production systems with vapour source.
Background technology
In current polycrystalline silicon production system, either hydrogenation process, reduction process, or purification and tail gas are required for A large amount of steam is used, it is that each process supplies steam to be typically provided with steam boiler as vapour source.
The steam pressure and temperature needed due to different processes is differed, but the steam of steam boiler supply is again Fixed standard.So the process (such as reduction and purification process) for needing slightly lower pressure and temperature, is generally used decompression Device is depressured for steam cooling, is then supplied to these processes.The process of this decrease temperature and pressure causes the relatively billow of energy Take, overall cost increases.
In view of this, it is necessary to provide a kind of lower polycrystalline silicon production systems of production cost.
Invention content
Prejudice and technical problem in view of the prior art, the present invention provides a kind of lower production of polysilicon of production cost System.
A kind of polycrystalline silicon production system, including hydrogenation apparatus, reduction apparatus, purifying column and be hydrogenation apparatus supply steam Vapour source.Polycrystalline silicon production system further includes the first steam electric power generator that air intake is connected with vapour source, first steam hair Electric installation gas outlet is connected with reduction apparatus or purifying column.
The polycrystalline silicon production system of the present invention makes steam pass through steam-electric power in steam conveying using steam electric power generator Decrease temperature and pressure after device, meet different processes with gas requirement, reduce the loss of the energy of steam, steam electric power generator is sent out Electricity can with the power consumption of compensation system, save production cost.
Description of the drawings
Fig. 1 is the schematic diagram of the polycrystalline silicon production system of embodiment one.
Fig. 2 is the schematic diagram of the polycrystalline silicon production system of embodiment two.
Fig. 3 is the schematic diagram of the polycrystalline silicon production system of embodiment three.
Specific implementation mode
The polycrystalline silicon production system of invention is described in further detail below in conjunction with attached drawing.
Fig. 1 is referred to, the polycrystalline silicon production system of embodiment of the present invention one includes hydrogenation apparatus 10, purifying column 11, goes back Original device 12, hydrogen-oxygen station 13, device for recovering tail gas 14, electric device 15, vapour source 16 and the first steam electric power generator 17.Its In, hydrogenation apparatus 10 is connected with purifying column 11, into hydrogenation apparatus 10 silica flour, silicon tetrachloride and hydrogen in hydrogenation apparatus 10 After carrying out hydrogenation, silicon tetrachloride, the dichloro-dihydro of silicon tetrachloride and trichlorosilane liquid with device for recovering tail gas 14 in interior Silicon and trichlorosilicane mixing liquid are passed through purifying column 11 together, and in purifying column 11 after purification, refined trichlorosilane is sent into also original-pack 12 are set, after carrying out reduction reaction with the hydrogen for being passed into reduction apparatus 12 from hydrogen-oxygen station 13, generates polysilicon product.After purification Silicon tetrachloride return is passed through the cycle of hydrogenation apparatus 10 and carries out hydrogenation.Tail gas after reduction apparatus 12 reacts enters tail gas recycle Device 14 is recycled, and silicon tetrachloride, trichlorosilane and the dichlorosilane of recycling return to after the interior purification of purifying column 11 again It utilizes.
In polycrystalline silicon production system, the vapor (steam) temperature and pressure used in hydrogenation process and tail gas recycle process are higher, and Vapor (steam) temperature and pressure used in reduction and purification process is slightly lower, and a steam boiler is used to supply steam as vapour source When, generally according to requiring the higher process of temperature and pressure (such as hydrogenation process) to set, also result in purification process and reduction Process cannot directly use the steam that vapour source is supplied.
The polycrystalline silicon production system of the present invention further includes the vapour source 16 for supplying saturated vapor and the steaming using vapour source 16 First steam electric power generator 17 of vapour power generation, 17 electricity of the first steam electric power generator can supply polycrystalline silicon production system 15 electricity consumption of electric device.Vapour source 16 is connected with the first steam electric power generator 17 and hydrogenation apparatus 10 simultaneously, can be hydrogenation Device 10 and the first steam electric power generator 17 supply steam.First steam electric power generator, 17 air intake is connected with vapour source 16, connects The steam for coming from vapour source 16 is received, is generated electricity, the gas outlet of the first steam electric power generator 17 is connected with reduction apparatus 12.It is full After being done work by the first steam electric power generator 17 with steam, temperature and pressure reduces, and meets the requirement that reduction process uses steam, It is directly passed through in the corresponding equipment of reduction process and is worked by gas outlet.Since device for recovering tail gas 14 can be directly using higher The steam of temperature, vapour source 16 separately have connection device for recovering tail gas 14 all the way, and steam is supplied for device for recovering tail gas 14.
In present embodiment, the first steam electric power generator 15 is steam screw expansion formula generator, can be set by parameter The temperature and pressure of fixed control discharge steam.The steam pressure that steam boiler as vapour source 16 exports is 1.2MPa, temperature It is 193 degree, a part direct supplies in hydrogenation apparatus 10, and a part direct supplies in device for recovering tail gas 14, and in addition one Part is first passed into acting power generation in steam electric power generator 14, becomes pressure 0.6MPa, the lower temperature that 164.9 degree of temperature later Steam, meet reduction apparatus 12 uses gas standard, is passed directly into work in reduction apparatus 12.First steam electric power generator 15 can To be connected nearby with electric device 15, power for electric device 15.In present embodiment, the saturated vapor of vapour source 16 is from 193 When degree drops to 164.9 degree, the first steam electric power generator 15 can be given to bring about 90 kilowatts of power output, be in electric device 15 Several equipment power supply.
It is appreciated that when an only steam electric power generator (the first steam electric power generator 17) in polycrystalline silicon production system When, 17 gas outlet of the first steam electric power generator can also lead to purifying column 11, and the saturated vapor requirement that purifying column 11 needs is 0.2MPa, 132.3 degree, reset the first steam electric power generator 17 parameter.The saturated vapor of vapour source 16 is from 193 degree When dropping to 132.3 degree, the first steam electric power generator 15 can be given to bring about 200 kilowatts of power output, supply more equipment Electricity consumption.
The polycrystalline silicon production system of the present invention makes steam pass through steam-electric power in steam conveying using steam electric power generator Decrease temperature and pressure after device, meet different processes with gas requirement, reduce the loss of the energy of steam, steam electric power generator is sent out Electricity can with the power consumption of compensation system, save production cost.
Embodiment two is similar to embodiment one, due to used in purifying column 11 vapor (steam) temperature and pressure requirements and reduction Vapor (steam) temperature and pressure requirements used in device 12 also have difference, steam needs used in purifying column 11 be 0.2MPa, 132.3 degree, Relative to used in reduction apparatus 12 steam needs 0.6MPa, 164.9 degree it is lower, so embodiment two compared with embodiment one increase If second steam electric power generator 18.Second steam electric power generator 18 is also steam screw expansion formula generator, is arranged first Between steam electric power generator 15 and purifying column 11, the air intake of the second steam electric power generator 18 and the first steam electric power generator 15 Gas outlet is connected, and the vapor portion of 15 gas outlet of the first steam electric power generator is passed through the second steam electric power generator 18, remainder Still it is passed through reduction apparatus 12.The gas outlet of second steam electric power generator 18 is connected with purifying column 12.Second steam electric power generator 18 receive the steam (0.6MPa, 164.9 degree) that the first steam electric power generators 17 are released, and steam is in the second steam electric power generator 18 Purifying column 11 is supplied to after acting.The parameter of the second steam electric power generator 18 is set, the first steam-electric power dress can will be come from Set 17 steam do work again power generation and decrease temperature and pressure to 0.2MPa, 132.3 degree, meet purifying column 11 use gas standard, directly It is passed through the work of purifying column 11.Wherein, the power of the second steam electric power generator 18 is about 45 kilowatts.
Embodiment two be additionally arranged with concatenated second steam electric power generator of the first steam electric power generator, can be by part The further decrease temperature and pressure of steam that one steam electric power generator is released, meet purification process uses gas standard.In this way, reduction process and The steam that purification process can directly be come out with the first, second steam electric power generator respectively, the portion that these pressure and temperatures reduce Divide energy to be converted into electric energy, further reduces energy loss, reduce cost.
Embodiment three is similar with embodiment two, but embodiment three is by the first steam electric power generator 17 and the second steam Power generator 18 is in parallel, and the air intake of the second steam electric power generator 18 is connected with vapour source 16, and gas outlet is connected with purifying column 11, Steam is supplied for purifying column 11.The parameter of the first steam electric power generator 17 and the second steam electric power generator 18 is set separately, makes The steam of one steam electric power generator 17 output directly supplies reduction apparatus 12, and the steam that the second steam-electric power fills 18 outputs directly supplies Answer purifying column 11.First steam unit 17 and the second steam unit 18 are connected with neighbouring electric device 15 and supply electricity The equipment electricity consumption of device of air 15.The parallel way of embodiment three can increase the safety of system, i.e., if the first power generation dress It sets 17 to break down, the work of the second power generator 18 will not be influenced.
It is appreciated that the first, second steam electric power generator in embodiment of above, is not limited to steam expansion power generation Machine, or other steam generating equipments, such as steam turbine.
The above not imposes any restrictions the present invention for the preferable case study on implementation of the present invention, every according to the present invention Technical spirit changes any simple modification, change and equivalent structure made by above example, still falls within skill of the present invention In the protection domain of art scheme.

Claims (7)

1. a kind of polycrystalline silicon production system, including hydrogenation apparatus, reduction apparatus, purifying column and the steaming for supplying steam for hydrogenation apparatus Vapour source, it is characterised in that:Further include the first steam electric power generator that air intake is connected with vapour source, first steam electric power generator Gas outlet is connected with reduction apparatus or purifying column.
2. polycrystalline silicon production system according to claim 1, which is characterized in that the first steam electric power generator gas outlet with Reduction apparatus is connected and is reduction apparatus supply steam.
3. polycrystalline silicon production system according to claim 2, which is characterized in that further include that gas outlet is connected with purifying column Second steam electric power generator, the air intake of second steam electric power generator is connected with the first steam electric power generator gas outlet and part Receive the steam of the first steam electric power generator gas outlet.
4. polycrystalline silicon production system according to claim 2, which is characterized in that further include that gas outlet is connected with purifying column The air intake of second steam electric power generator, second steam electric power generator is connected with vapour source.
5. according to claim 1-4 any one of them polycrystalline silicon production systems, which is characterized in that further include being sent out with the first steam The connected electric device of electric installation.
6. according to claim 3-4 any one of them polycrystalline silicon production systems, which is characterized in that further include being sent out with the first steam The electric device that electric installation and the second steam electric power generator are connected.
7. according to claim 1-4 any one of them polycrystalline silicon production systems, which is characterized in that further include recycling reduction apparatus Tail gas and the device for recovering tail gas for being sent into purifying column, the device for recovering tail gas are connected with vapour source.
CN201510324419.7A 2015-06-15 2015-06-15 polycrystalline silicon production system Active CN106315586B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510324419.7A CN106315586B (en) 2015-06-15 2015-06-15 polycrystalline silicon production system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510324419.7A CN106315586B (en) 2015-06-15 2015-06-15 polycrystalline silicon production system

Publications (2)

Publication Number Publication Date
CN106315586A CN106315586A (en) 2017-01-11
CN106315586B true CN106315586B (en) 2018-09-18

Family

ID=57732192

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510324419.7A Active CN106315586B (en) 2015-06-15 2015-06-15 polycrystalline silicon production system

Country Status (1)

Country Link
CN (1) CN106315586B (en)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101592332A (en) * 2009-05-22 2009-12-02 西安交通大学 A kind of waste heat boiler that is used to reclaim generated by incineration of wastes from polysilicon purification used heat
CN102020276A (en) * 2009-09-17 2011-04-20 重庆大全新能源有限公司 Method for utilizing waste heat in polycrystalline silicon production process
CN102268495A (en) * 2011-07-20 2011-12-07 北京中冶设备研究设计总院有限公司 Process technology and equipment for granulating blast-furnace slag and utilizing waste heat
CN102518489A (en) * 2012-01-06 2012-06-27 新奥科技发展有限公司 Power generation method, and device for gasified production of energy products and thermal power generation
CN103408017A (en) * 2013-07-08 2013-11-27 昆明冶研新材料股份有限公司 High-temperature water-circulation flash-evaporation integrated tank and system for producing polycrystalline silicon
CN103896280A (en) * 2014-03-27 2014-07-02 洛阳利尔中晶光伏材料有限公司 Operation method of polycrystalline silicon cold hydrogenation
CN104065208A (en) * 2014-06-06 2014-09-24 中国科学院广州能源研究所 Generator cooled by organic working medium
CN205045831U (en) * 2015-10-16 2016-02-24 武汉东立光伏电子有限公司 Prepare device of bar -shaped polycrystalline silicon

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101592332A (en) * 2009-05-22 2009-12-02 西安交通大学 A kind of waste heat boiler that is used to reclaim generated by incineration of wastes from polysilicon purification used heat
CN102020276A (en) * 2009-09-17 2011-04-20 重庆大全新能源有限公司 Method for utilizing waste heat in polycrystalline silicon production process
CN102268495A (en) * 2011-07-20 2011-12-07 北京中冶设备研究设计总院有限公司 Process technology and equipment for granulating blast-furnace slag and utilizing waste heat
CN102518489A (en) * 2012-01-06 2012-06-27 新奥科技发展有限公司 Power generation method, and device for gasified production of energy products and thermal power generation
CN103408017A (en) * 2013-07-08 2013-11-27 昆明冶研新材料股份有限公司 High-temperature water-circulation flash-evaporation integrated tank and system for producing polycrystalline silicon
CN103896280A (en) * 2014-03-27 2014-07-02 洛阳利尔中晶光伏材料有限公司 Operation method of polycrystalline silicon cold hydrogenation
CN104065208A (en) * 2014-06-06 2014-09-24 中国科学院广州能源研究所 Generator cooled by organic working medium
CN205045831U (en) * 2015-10-16 2016-02-24 武汉东立光伏电子有限公司 Prepare device of bar -shaped polycrystalline silicon

Also Published As

Publication number Publication date
CN106315586A (en) 2017-01-11

Similar Documents

Publication Publication Date Title
CA2953842C (en) Method for operating an electrolytic system and electrolytic system
RU2011127981A (en) HYDROGEN PRODUCTION SYSTEM
MY171598A (en) Externally heated microwave plasma gasifier and synthesis gas production method
CN105988551A (en) Reference voltage generation method and electronic device
CN106315586B (en) polycrystalline silicon production system
ES2533215T3 (en) Energy management system, industrial installation with an energy management system, as well as a procedure to operate an energy management system
Tailakov et al. Experience for coal mine methane utilization to generate thermal and electric power
CN102674368A (en) Method and system for preparing trichlorosilane
CN102020282A (en) Method for producing trichlorosilane by using silicon tetrachloride
KR101443027B1 (en) System and method for controlling distributed power source
WO2018037477A1 (en) Power conditioning system and power conditioning method
CN106315587B (en) polycrystalline silicon production system
CN202503358U (en) High-voltage auxiliary power system
CN204152632U (en) The triple production integrated electricity generating device of hydrogen energy source thermoelectricity gas
CN108554132A (en) The processing method and processing device of oxidized tail gas in anthraquinone Hydrogen Peroxide Production
CN104986770A (en) Device and method for producing silane by disproportionated reaction distillation of trichlorosilane
CN203173828U (en) Device for preparing trichlorosilane from silicon tetrachloride
CN210004374U (en) Thermal power plant deoxidization system
CN205099629U (en) Coal gas production facility
EP2637242A4 (en) Power generator and operating method for same
CN102849740B (en) Polycrystalline silicon production process
Schultz et al. The hydrogen reaction.
CN103382859A (en) Electrical power generating system for comprehensive energy steam turbine
JP6203947B2 (en) Power plant with gas turbine and hydrogen cooled generator
CN104987890A (en) Gas production method and device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20201116

Address after: 015543 southeast of the intersection of jingsan road and Weisi Road, Qingshan Industrial Park, wulatehouqi, Bayannur City, Inner Mongolia Autonomous Region

Patentee after: Bayannur concentrated Silicon Industry Co., Ltd

Address before: 015543 the Inner Mongolia Autonomous Region Bayannaoer wulatehouqi Qingshan Industrial Park

Patentee before: INNER MONGOLIA DUN'AN PHOTOVOLTAIC TECHNOLOGY Co.,Ltd.