CN106315586B - polycrystalline silicon production system - Google Patents
polycrystalline silicon production system Download PDFInfo
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- CN106315586B CN106315586B CN201510324419.7A CN201510324419A CN106315586B CN 106315586 B CN106315586 B CN 106315586B CN 201510324419 A CN201510324419 A CN 201510324419A CN 106315586 B CN106315586 B CN 106315586B
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Abstract
A kind of polycrystalline silicon production system, including hydrogenation apparatus, reduction apparatus, purifying column and the vapour source that steam is supplied for hydrogenation apparatus.Polycrystalline silicon production system further includes the first steam electric power generator that air intake is connected with vapour source, which is connected with reduction apparatus or purifying column.The polycrystalline silicon production system of the present invention, decrease temperature and pressure after making steam pass through steam electric power generator using steam electric power generator in steam conveying, meet different processes with gas requirement, reduce the loss of the energy of steam, the electricity that steam electric power generator is sent out can save production cost with the power consumption of compensation system.
Description
Technical field
The present invention relates to a kind of polycrystalline silicon production system more particularly to a kind of polycrystalline silicon production systems with vapour source.
Background technology
In current polycrystalline silicon production system, either hydrogenation process, reduction process, or purification and tail gas are required for
A large amount of steam is used, it is that each process supplies steam to be typically provided with steam boiler as vapour source.
The steam pressure and temperature needed due to different processes is differed, but the steam of steam boiler supply is again
Fixed standard.So the process (such as reduction and purification process) for needing slightly lower pressure and temperature, is generally used decompression
Device is depressured for steam cooling, is then supplied to these processes.The process of this decrease temperature and pressure causes the relatively billow of energy
Take, overall cost increases.
In view of this, it is necessary to provide a kind of lower polycrystalline silicon production systems of production cost.
Invention content
Prejudice and technical problem in view of the prior art, the present invention provides a kind of lower production of polysilicon of production cost
System.
A kind of polycrystalline silicon production system, including hydrogenation apparatus, reduction apparatus, purifying column and be hydrogenation apparatus supply steam
Vapour source.Polycrystalline silicon production system further includes the first steam electric power generator that air intake is connected with vapour source, first steam hair
Electric installation gas outlet is connected with reduction apparatus or purifying column.
The polycrystalline silicon production system of the present invention makes steam pass through steam-electric power in steam conveying using steam electric power generator
Decrease temperature and pressure after device, meet different processes with gas requirement, reduce the loss of the energy of steam, steam electric power generator is sent out
Electricity can with the power consumption of compensation system, save production cost.
Description of the drawings
Fig. 1 is the schematic diagram of the polycrystalline silicon production system of embodiment one.
Fig. 2 is the schematic diagram of the polycrystalline silicon production system of embodiment two.
Fig. 3 is the schematic diagram of the polycrystalline silicon production system of embodiment three.
Specific implementation mode
The polycrystalline silicon production system of invention is described in further detail below in conjunction with attached drawing.
Fig. 1 is referred to, the polycrystalline silicon production system of embodiment of the present invention one includes hydrogenation apparatus 10, purifying column 11, goes back
Original device 12, hydrogen-oxygen station 13, device for recovering tail gas 14, electric device 15, vapour source 16 and the first steam electric power generator 17.Its
In, hydrogenation apparatus 10 is connected with purifying column 11, into hydrogenation apparatus 10 silica flour, silicon tetrachloride and hydrogen in hydrogenation apparatus 10
After carrying out hydrogenation, silicon tetrachloride, the dichloro-dihydro of silicon tetrachloride and trichlorosilane liquid with device for recovering tail gas 14 in interior
Silicon and trichlorosilicane mixing liquid are passed through purifying column 11 together, and in purifying column 11 after purification, refined trichlorosilane is sent into also original-pack
12 are set, after carrying out reduction reaction with the hydrogen for being passed into reduction apparatus 12 from hydrogen-oxygen station 13, generates polysilicon product.After purification
Silicon tetrachloride return is passed through the cycle of hydrogenation apparatus 10 and carries out hydrogenation.Tail gas after reduction apparatus 12 reacts enters tail gas recycle
Device 14 is recycled, and silicon tetrachloride, trichlorosilane and the dichlorosilane of recycling return to after the interior purification of purifying column 11 again
It utilizes.
In polycrystalline silicon production system, the vapor (steam) temperature and pressure used in hydrogenation process and tail gas recycle process are higher, and
Vapor (steam) temperature and pressure used in reduction and purification process is slightly lower, and a steam boiler is used to supply steam as vapour source
When, generally according to requiring the higher process of temperature and pressure (such as hydrogenation process) to set, also result in purification process and reduction
Process cannot directly use the steam that vapour source is supplied.
The polycrystalline silicon production system of the present invention further includes the vapour source 16 for supplying saturated vapor and the steaming using vapour source 16
First steam electric power generator 17 of vapour power generation, 17 electricity of the first steam electric power generator can supply polycrystalline silicon production system
15 electricity consumption of electric device.Vapour source 16 is connected with the first steam electric power generator 17 and hydrogenation apparatus 10 simultaneously, can be hydrogenation
Device 10 and the first steam electric power generator 17 supply steam.First steam electric power generator, 17 air intake is connected with vapour source 16, connects
The steam for coming from vapour source 16 is received, is generated electricity, the gas outlet of the first steam electric power generator 17 is connected with reduction apparatus 12.It is full
After being done work by the first steam electric power generator 17 with steam, temperature and pressure reduces, and meets the requirement that reduction process uses steam,
It is directly passed through in the corresponding equipment of reduction process and is worked by gas outlet.Since device for recovering tail gas 14 can be directly using higher
The steam of temperature, vapour source 16 separately have connection device for recovering tail gas 14 all the way, and steam is supplied for device for recovering tail gas 14.
In present embodiment, the first steam electric power generator 15 is steam screw expansion formula generator, can be set by parameter
The temperature and pressure of fixed control discharge steam.The steam pressure that steam boiler as vapour source 16 exports is 1.2MPa, temperature
It is 193 degree, a part direct supplies in hydrogenation apparatus 10, and a part direct supplies in device for recovering tail gas 14, and in addition one
Part is first passed into acting power generation in steam electric power generator 14, becomes pressure 0.6MPa, the lower temperature that 164.9 degree of temperature later
Steam, meet reduction apparatus 12 uses gas standard, is passed directly into work in reduction apparatus 12.First steam electric power generator 15 can
To be connected nearby with electric device 15, power for electric device 15.In present embodiment, the saturated vapor of vapour source 16 is from 193
When degree drops to 164.9 degree, the first steam electric power generator 15 can be given to bring about 90 kilowatts of power output, be in electric device 15
Several equipment power supply.
It is appreciated that when an only steam electric power generator (the first steam electric power generator 17) in polycrystalline silicon production system
When, 17 gas outlet of the first steam electric power generator can also lead to purifying column 11, and the saturated vapor requirement that purifying column 11 needs is
0.2MPa, 132.3 degree, reset the first steam electric power generator 17 parameter.The saturated vapor of vapour source 16 is from 193 degree
When dropping to 132.3 degree, the first steam electric power generator 15 can be given to bring about 200 kilowatts of power output, supply more equipment
Electricity consumption.
The polycrystalline silicon production system of the present invention makes steam pass through steam-electric power in steam conveying using steam electric power generator
Decrease temperature and pressure after device, meet different processes with gas requirement, reduce the loss of the energy of steam, steam electric power generator is sent out
Electricity can with the power consumption of compensation system, save production cost.
Embodiment two is similar to embodiment one, due to used in purifying column 11 vapor (steam) temperature and pressure requirements and reduction
Vapor (steam) temperature and pressure requirements used in device 12 also have difference, steam needs used in purifying column 11 be 0.2MPa, 132.3 degree,
Relative to used in reduction apparatus 12 steam needs 0.6MPa, 164.9 degree it is lower, so embodiment two compared with embodiment one increase
If second steam electric power generator 18.Second steam electric power generator 18 is also steam screw expansion formula generator, is arranged first
Between steam electric power generator 15 and purifying column 11, the air intake of the second steam electric power generator 18 and the first steam electric power generator 15
Gas outlet is connected, and the vapor portion of 15 gas outlet of the first steam electric power generator is passed through the second steam electric power generator 18, remainder
Still it is passed through reduction apparatus 12.The gas outlet of second steam electric power generator 18 is connected with purifying column 12.Second steam electric power generator
18 receive the steam (0.6MPa, 164.9 degree) that the first steam electric power generators 17 are released, and steam is in the second steam electric power generator 18
Purifying column 11 is supplied to after acting.The parameter of the second steam electric power generator 18 is set, the first steam-electric power dress can will be come from
Set 17 steam do work again power generation and decrease temperature and pressure to 0.2MPa, 132.3 degree, meet purifying column 11 use gas standard, directly
It is passed through the work of purifying column 11.Wherein, the power of the second steam electric power generator 18 is about 45 kilowatts.
Embodiment two be additionally arranged with concatenated second steam electric power generator of the first steam electric power generator, can be by part
The further decrease temperature and pressure of steam that one steam electric power generator is released, meet purification process uses gas standard.In this way, reduction process and
The steam that purification process can directly be come out with the first, second steam electric power generator respectively, the portion that these pressure and temperatures reduce
Divide energy to be converted into electric energy, further reduces energy loss, reduce cost.
Embodiment three is similar with embodiment two, but embodiment three is by the first steam electric power generator 17 and the second steam
Power generator 18 is in parallel, and the air intake of the second steam electric power generator 18 is connected with vapour source 16, and gas outlet is connected with purifying column 11,
Steam is supplied for purifying column 11.The parameter of the first steam electric power generator 17 and the second steam electric power generator 18 is set separately, makes
The steam of one steam electric power generator 17 output directly supplies reduction apparatus 12, and the steam that the second steam-electric power fills 18 outputs directly supplies
Answer purifying column 11.First steam unit 17 and the second steam unit 18 are connected with neighbouring electric device 15 and supply electricity
The equipment electricity consumption of device of air 15.The parallel way of embodiment three can increase the safety of system, i.e., if the first power generation dress
It sets 17 to break down, the work of the second power generator 18 will not be influenced.
It is appreciated that the first, second steam electric power generator in embodiment of above, is not limited to steam expansion power generation
Machine, or other steam generating equipments, such as steam turbine.
The above not imposes any restrictions the present invention for the preferable case study on implementation of the present invention, every according to the present invention
Technical spirit changes any simple modification, change and equivalent structure made by above example, still falls within skill of the present invention
In the protection domain of art scheme.
Claims (7)
1. a kind of polycrystalline silicon production system, including hydrogenation apparatus, reduction apparatus, purifying column and the steaming for supplying steam for hydrogenation apparatus
Vapour source, it is characterised in that:Further include the first steam electric power generator that air intake is connected with vapour source, first steam electric power generator
Gas outlet is connected with reduction apparatus or purifying column.
2. polycrystalline silicon production system according to claim 1, which is characterized in that the first steam electric power generator gas outlet with
Reduction apparatus is connected and is reduction apparatus supply steam.
3. polycrystalline silicon production system according to claim 2, which is characterized in that further include that gas outlet is connected with purifying column
Second steam electric power generator, the air intake of second steam electric power generator is connected with the first steam electric power generator gas outlet and part
Receive the steam of the first steam electric power generator gas outlet.
4. polycrystalline silicon production system according to claim 2, which is characterized in that further include that gas outlet is connected with purifying column
The air intake of second steam electric power generator, second steam electric power generator is connected with vapour source.
5. according to claim 1-4 any one of them polycrystalline silicon production systems, which is characterized in that further include being sent out with the first steam
The connected electric device of electric installation.
6. according to claim 3-4 any one of them polycrystalline silicon production systems, which is characterized in that further include being sent out with the first steam
The electric device that electric installation and the second steam electric power generator are connected.
7. according to claim 1-4 any one of them polycrystalline silicon production systems, which is characterized in that further include recycling reduction apparatus
Tail gas and the device for recovering tail gas for being sent into purifying column, the device for recovering tail gas are connected with vapour source.
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CN102268495A (en) * | 2011-07-20 | 2011-12-07 | 北京中冶设备研究设计总院有限公司 | Process technology and equipment for granulating blast-furnace slag and utilizing waste heat |
CN102518489A (en) * | 2012-01-06 | 2012-06-27 | 新奥科技发展有限公司 | Power generation method, and device for gasified production of energy products and thermal power generation |
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CN103896280A (en) * | 2014-03-27 | 2014-07-02 | 洛阳利尔中晶光伏材料有限公司 | Operation method of polycrystalline silicon cold hydrogenation |
CN104065208A (en) * | 2014-06-06 | 2014-09-24 | 中国科学院广州能源研究所 | Generator cooled by organic working medium |
CN205045831U (en) * | 2015-10-16 | 2016-02-24 | 武汉东立光伏电子有限公司 | Prepare device of bar -shaped polycrystalline silicon |
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Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101592332A (en) * | 2009-05-22 | 2009-12-02 | 西安交通大学 | A kind of waste heat boiler that is used to reclaim generated by incineration of wastes from polysilicon purification used heat |
CN102020276A (en) * | 2009-09-17 | 2011-04-20 | 重庆大全新能源有限公司 | Method for utilizing waste heat in polycrystalline silicon production process |
CN102268495A (en) * | 2011-07-20 | 2011-12-07 | 北京中冶设备研究设计总院有限公司 | Process technology and equipment for granulating blast-furnace slag and utilizing waste heat |
CN102518489A (en) * | 2012-01-06 | 2012-06-27 | 新奥科技发展有限公司 | Power generation method, and device for gasified production of energy products and thermal power generation |
CN103408017A (en) * | 2013-07-08 | 2013-11-27 | 昆明冶研新材料股份有限公司 | High-temperature water-circulation flash-evaporation integrated tank and system for producing polycrystalline silicon |
CN103896280A (en) * | 2014-03-27 | 2014-07-02 | 洛阳利尔中晶光伏材料有限公司 | Operation method of polycrystalline silicon cold hydrogenation |
CN104065208A (en) * | 2014-06-06 | 2014-09-24 | 中国科学院广州能源研究所 | Generator cooled by organic working medium |
CN205045831U (en) * | 2015-10-16 | 2016-02-24 | 武汉东立光伏电子有限公司 | Prepare device of bar -shaped polycrystalline silicon |
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Effective date of registration: 20201116 Address after: 015543 southeast of the intersection of jingsan road and Weisi Road, Qingshan Industrial Park, wulatehouqi, Bayannur City, Inner Mongolia Autonomous Region Patentee after: Bayannur concentrated Silicon Industry Co., Ltd Address before: 015543 the Inner Mongolia Autonomous Region Bayannaoer wulatehouqi Qingshan Industrial Park Patentee before: INNER MONGOLIA DUN'AN PHOTOVOLTAIC TECHNOLOGY Co.,Ltd. |