CN106312207A - Method for machining array micro pits through porous metal tool cathode micro electrolysis - Google Patents

Method for machining array micro pits through porous metal tool cathode micro electrolysis Download PDF

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Publication number
CN106312207A
CN106312207A CN201610848443.5A CN201610848443A CN106312207A CN 106312207 A CN106312207 A CN 106312207A CN 201610848443 A CN201610848443 A CN 201610848443A CN 106312207 A CN106312207 A CN 106312207A
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CN
China
Prior art keywords
tool cathode
workpiece anode
mask plate
micro
porous metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610848443.5A
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Chinese (zh)
Inventor
曲宁松
张西方
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Nanjing University of Aeronautics and Astronautics
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Nanjing University of Aeronautics and Astronautics
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Application filed by Nanjing University of Aeronautics and Astronautics filed Critical Nanjing University of Aeronautics and Astronautics
Priority to CN201610848443.5A priority Critical patent/CN106312207A/en
Publication of CN106312207A publication Critical patent/CN106312207A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H3/00Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
    • B23H3/04Electrodes specially adapted therefor or their manufacture
    • B23H3/06Electrode material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H3/00Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H9/00Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H9/00Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
    • B23H9/008Surface roughening or texturing

Abstract

The invention provides a method for machining array micro pits through porous metal tool cathode micro electrolysis and belongs to the technical field of micro electrolytic machining. The method includes the steps that firstly, an insulating mask plate is tightly attached to the surface of a workpiece anode through a hot rolling coating technology; a pattern of a penetrating through hole is manufactured on the mask plate tightly attached to the workpiece anode; porous metal serves as the tool cathode and is tightly attached to the mask plate attached to the surface of the workpiece anode; an electrolyte reaches the surface of the workpiece anode through the penetrating through hole in the mask plate; the workpiece anode is connected with the positive electrode of a power source, and the porous metal tool cathode is connected with the negative electrode of the power source; and the power source is switched on for electrolytic machining. According to the method for machining the array micro pits through porous metal tool cathode micro electrolysis, the porous metal is adopted as the tool cathode so that bubbles and insoluble products generated in the closed electrolytic machining process formed in the manner that the tool cathode is tightly attached to the mask plate attached to the workpiece anode can escape, and it is ensured that the workpiece anode is continuously machined and dissolved.

Description

The method using porous metals tool cathode electrochemical micromachining array micro-pit
Technical field
The present invention proposes a kind of method using porous metals tool cathode electrochemical micromachining array micro-pit, belongs to fine Technical field of electrolysis processing.
Background technology
There is various forms of friction pair in common mechanical apparatus system, the contact surface of these friction pairs is in fortune relatively There is friction and wear behavior during Dong, not only affect service behaviour and the work efficiency of mechanical system, even cause it The principal element lost efficacy.According to statistics, 30% consumption of industrialized country's energy is lost at mechanical wear, the part of about 80% Effect causes due to various forms of fretting wears.Therefore, reduce useless frictional dissipation, control and reduce abrasion, improve Greasy property can reduce maintenance of equipment number of times and expense, can save the energy and improve the utilization rate of resource.Reduce abrasion, reduce Friction is also that engineering circles is devoted for years in one of important technical challenge needing solution.
As far back as mid-term in last century, it has been recognized that the surface finish texture of cylinder is to piston/cylinder tribological property Remarkable effect, research worker is to different surfaces machining tool shadows to surface finish texture such as diamond, pottery and rubber Ring and carried out careful research, find certain existence processing texture, it is possible to play preservation lubricating oil, prevent piston/cylinder body from producing Life is killed and abrasive effect.At present in the research of Tribological Properties, surface texture technology is improving mantle friction mill Damage aspect of performance and serve unevenness and the table of minute groove shape of positive effect, a size of a few micrometers to hundreds of microns Plane texture has been successfully applied at the friction surface such as mechanical part, magnetic storage, achieves and significantly improves bearing capacity, subtracts Little abrasion and avoid surface adhesion and the effect killed.In recent years, along with deepening continuously of research, research worker is formed Common recognition: the unevenness array of surface of friction pair has splendid antiwear and friction reduction property.
Effective unevenness array manufacturing technology is the important leverage of this engineering.In recent years, research worker Manufacture manufacture field at surface of friction pair unevenness array and poured into great research enthusiasm, it is proposed that multiple manufacture processing side Method, it is intended to solve this and manufacture a difficult problem.Surface of friction pair texture manufactures processing method at present mainly laser-textured surface texture Technology, abrasive air fluidics, spark erosion technique, electrochemical Machining Technology etc..Wherein, Electrolyzed Processing is a kind of utilization electrification Learn anodic solution principle and remove the special process method of material.Compare with other processing methods, there is the range of work wide, produce effect Rate is high, and surface quality is good, instrument is lossless outstanding advantages of Denging.High by electrolytic method processing unevenness efficiency, surface quality is good, Low cost.
The method of Electrolyzed Processing unevenness array is used mainly to have the most both at home and abroad: (1), photograph electrolysis.This technique is first First form pierced pattern through photoetching process at surface of the work, then form desirable pattern by electrochemical method at surface of the work. This processing method course of processing is loaded down with trivial details, and production efficiency ratio is relatively low, and manufacturing cost is high.(2), group act on sets Electrolyzed Processing.The method is Using row's electrode to divide machines or uses group act on sets to process at one time several times.This technique manufactures group and cheats the concordance of the degree of depth It is difficult to ensure that.(3), fixed negative pole processing.The method is with running through group pore structure, surface with the instrument of insulating barrier by one Negative electrode directly fits tightly with workpiece, and anode and cathode carries out Electrolyzed Processing after switching on power, and obtains group at surface of the work and cheats structure.Should Method working (machining) efficiency is high, with low cost.But when processing array unevenness, easily occur that unevenness dispersion corrosion is serious, Cause processing locality and lack of homogeneity.(4), electro-stream machining.Electro-stream machining belongs to single-point or single processing, working (machining) efficiency Ratio is relatively low.(5), collapsible form Electrolyzed Processing.The method utilizes the epoxy resins insulation plate of insulation to be extruded from conductive copper layer Copper-clad plate as template, in copper-clad plate, mill out required through pattern by CNC milling machine, will have the mould of array through-hole Plate passes through mechanical compaction, keeps fitting tightly with workpiece anode, under the washing away of electrolyte, carries out electrolysis and add after switching on power Work.The method template is reusable, and working (machining) efficiency is high, but cannot be processed number owing to limiting by milling cutter tool size The through pattern of ten microns, therefore, micro-hole size of processing is also restricted.(6), contact Electrolyzed Processing.The method is Flat instrument negative electrode contacts with the photoresist film on workpiece anode, the method for the processing array micro-pit that switches on power.This technique is permissible Improve the Electric Field Distribution of machining area so that the electric field intensity at around machining area and center reaches unanimity, but Electrolyzed Processing During the product that produces can affect the processing of surface of the work micro-hole depth direction.
Summary of the invention
The present invention proposes the method using porous metals tool cathode electrochemical micromachining array micro-pit, utilizes the present invention Can effectively remove continuing of the product in the closed electrolytic course of processing, beneficially workpiece anode surface micro-pit array depth direction Continuous processing is dissolved.
The present invention uses the method for porous metals tool cathode electrochemical micromachining array micro-pit, it is characterised in that following step Rapid:
(a), by heat rolling coating technique make the mask plate of insulation fit tightly with workpiece anode surface;
(b), on the mask plate fitted tightly with workpiece anode surface, produced the pattern running through through hole by photoetching process;
(c), make porous metals tool cathode and the mask plate being fitted on workpiece anode surface fits tightly;
(d), workpiece anode is connected with the both positive and negative polarity of power supply respectively with porous metals tool cathode;
E (), electrolyte arrive workpiece anode by the through hole run through on mask plate;
(f), switching on power carries out Electrolyzed Processing.
The beneficial features of the present invention is: tool cathode is porous metals, porous metals be exactly metal body be by small Spheroid (being commonly called as powder) forms through high temperature sintering, and metal inside all directions are all covered with atomic little pore, therefore named porous metals, Also ventilative steel or porous breathable steel it are.Just because of porous metals have, proportion is little, rigidity, specific strength are good, absorbing, sound absorption qualities Good, the features such as permeability, aeration are good, so being applied to the fields such as Aero-Space, architectural engineering, environmental engineering.? Research worker in Electrolyzed Processing field for obtain the micro-texture in high-quality surface have studied a variety of process go discharge Electrolyzed Processing product, such as improves and rushes liquid pattern etc., and achieve certain effect, but have the biggest challenge, and Electrolyzed Processing field does not also have research worker to utilize the through hole being randomly distributed on it to discharge closed as fluid passage The bubble produced in electrochemical machining process and insoluble product, and then ensure the continuation processing of surface of the work micro-hole depth direction Dissolve.
Accompanying drawing explanation
Fig. 1 present invention uses the method schematic diagram of porous metals tool cathode electrochemical micromachining array micro-pit;
Fig. 2 closed flat instrument negative electrode electrochemical micromachining array micro-pit schematic diagram;
Fig. 3 present invention uses porous metals tool cathode electrochemical micromachining array micro-pit schematic diagram.
Label title in figure: 1 porous metals tool cathode, 2 mask plates, 3 workpiece anodes,
4 power supplys, 5 electrolyte.
Detailed description of the invention
" porous metals tool cathode electrochemical micromachining array is micro-to illustrate the enforcement present invention below in conjunction with the accompanying drawings The method in hole ".
The present invention uses the method for porous metals tool cathode electrochemical micromachining array micro-pit, comprises the following steps:
(a), by heat rolling coating technique make the mask plate 2 of insulation fit tightly with workpiece anode 3 surface;
(b), on the mask plate 2 fitted tightly with workpiece anode 3 surface, produced the pattern running through through hole by photoetching process;
(c), make porous metals tool cathode 1 and the mask plate 2 being fitted on workpiece anode 3 surface fits tightly;
(d), by workpiece anode 3 with porous metals tool cathode 1 respectively both positive and negative polarity with power supply 4 be connected;
E (), electrolyte 5 arrives workpiece anode 1 by the through hole run through on mask plate 2;
(f), switching on power 4 carries out Electrolyzed Processing.
Bubble and insoluble product when above-mentioned porous metals tool cathode is conducive to closed electrolytic processing micro-pit array Discharge so that the continuation processing of workpiece anode surface micro-hole depth direction is dissolved.
The present invention can effectively discharge the product in closed electrochemical micromachining micro-pit array, but above description can not It is interpreted as the restriction to patent of the present invention.It is to be mentioned that, for others skilled in the art, without departing from this On the premise of inventive concept, it is also possible to make some improvement, these all should fall into the protection of patent of the present invention.

Claims (1)

1. the method using porous metals tool cathode electrochemical micromachining array micro-pit, it is characterised in that include following step Rapid:
(a), by heat rolling coating technique make the mask plate (2) of insulation fit tightly with workpiece anode (3) surface;
(b), produced on the mask plate (2) fitted tightly with workpiece anode (3) surface by photoetching process and run through through hole Pattern;
(c), make porous metals tool cathode (1) and the mask plate (2) being fitted on workpiece anode (3) surface fits tightly;
(d), by workpiece anode (3) with porous metals tool cathode (1) respectively both positive and negative polarity with power supply (4) be connected;
E (), electrolyte (5) arrive workpiece anode (1) by the through hole run through on mask plate (2);
F (), switch on power (4) carry out Electrolyzed Processing.
CN201610848443.5A 2016-09-26 2016-09-26 Method for machining array micro pits through porous metal tool cathode micro electrolysis Pending CN106312207A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610848443.5A CN106312207A (en) 2016-09-26 2016-09-26 Method for machining array micro pits through porous metal tool cathode micro electrolysis

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Application Number Priority Date Filing Date Title
CN201610848443.5A CN106312207A (en) 2016-09-26 2016-09-26 Method for machining array micro pits through porous metal tool cathode micro electrolysis

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CN106312207A true CN106312207A (en) 2017-01-11

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107971589A (en) * 2018-01-09 2018-05-01 河南理工大学 A kind of mask electrolytic machining device
CN107999908A (en) * 2018-01-09 2018-05-08 河南理工大学 A kind of production method of micro-pit array
CN110028037A (en) * 2019-05-07 2019-07-19 大连理工大学 A kind of duplication processing technology of super-hydrophobic hemispherical array
CN110052677A (en) * 2019-05-07 2019-07-26 大连理工大学 A kind of processing technology of the hemisphere micro-pit array of big aspect ratio

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US20160045967A1 (en) * 2013-07-01 2016-02-18 General Electric Company Methods and systems for electrochemical machining of an additively manufactured component
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US20160045967A1 (en) * 2013-07-01 2016-02-18 General Electric Company Methods and systems for electrochemical machining of an additively manufactured component
JP2015098064A (en) * 2013-11-18 2015-05-28 国立研究開発法人理化学研究所 Reconditioning method and device of minute tool, and processing device with reconditioning function
CN104001997A (en) * 2014-05-27 2014-08-27 南京航空航天大学 Contact type array tiny pit electrochemical machining method
CN204397104U (en) * 2015-02-02 2015-06-17 广东工业大学 Orifice electrode scan-type mask electrolytic machining device
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CN105702625A (en) * 2016-04-12 2016-06-22 武汉华星光电技术有限公司 Stripping method for flexible substrate

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107971589A (en) * 2018-01-09 2018-05-01 河南理工大学 A kind of mask electrolytic machining device
CN107999908A (en) * 2018-01-09 2018-05-08 河南理工大学 A kind of production method of micro-pit array
CN110028037A (en) * 2019-05-07 2019-07-19 大连理工大学 A kind of duplication processing technology of super-hydrophobic hemispherical array
CN110052677A (en) * 2019-05-07 2019-07-26 大连理工大学 A kind of processing technology of the hemisphere micro-pit array of big aspect ratio
CN110028037B (en) * 2019-05-07 2021-08-10 大连理工大学 Copying processing technology of super-hydrophobic hemisphere array

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