The detection method of a kind of filter membrane thickness and detection device thereof
Technical field
The invention belongs to filter membrane Thickness sensitivity technical field, especially relate to particulate matter and gather the detection dress of filter membrane thickness
Put and detection method.
Background technology
The Main Function of filter membrane is to retain the particulate matter in aerosol or solution, plays the effect that material separates.Granule
Retaining of thing be directly affected by filter membrane thickness with through meeting, but at present at the shadow of filter membrane material, technological level and preparative capacibility
Under sound, there is larger difference between the various filter membrane of kind and producer, and China does not the most also have the filter membrane of complete set
Energy assessment technique specification, the method measuring filter membrane thickness conventional at present has micrometer caliper, scanning electron microscope, photometry.
The advantage of micrometer caliper be can directly measure relatively low with reading and price, but error is bigger.Utilization scanning electron shows
Micro mirror certainty of measurement is high, but the integrity of filter membrane to be destroyed and instrument price are expensive.Photometry be there is no so far to a kind of energy
Enough characterize the relation between data.On this basis by collecting substantial amounts of basic data, in conjunction with previous studies achievement, design
Research and develop this device.
Summary of the invention
In view of this, the present invention proposes detection method and the detection device thereof of a kind of filter membrane thickness, utilizes Photoelectric Detection former
Reason, can accurately detect the thickness of filter membrane, facilitate testing staff to carry out quality management and control, improves filter membrane product matter further
Amount.
For reaching above-mentioned purpose, the technical scheme is that and be achieved in that:
A kind of detection method of filter membrane thickness, including:
(1) use red, green, blue three primary colours light respectively as testing light source;
(2) under one of them testing light source of three primary colours, the initial exposure image without filter membrane of this testing light source is obtained,
And it is calculated the gray value of image;
(3) use standard acquisition filter membrane known to thickness, under this testing light source, obtain the light source exposure diagram through filter membrane
Picture, and it is calculated the gray value of image;
(4) light transmittance of described standard acquisition filter membrane can be obtained according to the ratio of two width image intensity value;
(5) if selecting the standard acquisition filter membrane that dry thickness is different, repeating step (3) and (4), obtaining each standard acquisition filter membrane
Light transmittance, obtain the relation between described standard acquisition filter membrane thickness and light transmittance under this testing light source further;
(6) it is respectively adopted the other dichromatism of three primary colours testing light source, repeats step (2)-(5), obtain under each testing light source
Relation between described standard acquisition filter membrane thickness and light transmittance;
(7) testing light source that Selection effect is optimal is as detection light source, detects the filter membrane of unknown thickness, obtains
Cross the light source exposure image of this filter membrane, and be calculated the gray value of image, thus obtain the light transmittance of this filter membrane, according to this light
Relation between standard acquisition filter membrane thickness and light transmittance under source, obtains this filter membrane thickness.
Further, the preparation method of step (1) described testing light source is: by adjustable stabilized voltage supply and LED controller
The color of regulation light emitting diode shows three kinds of colors of red, green, blue respectively.
Further, the concrete methods of realizing of step (2) is: make testing light source completely attach to ccd image sensor,
Ccd image sensor is exposed processing, and obtains the initial exposure image without filter membrane of this testing light source, and image information is defeated
Deliver to computer, by computer LabVIEW software, the image obtained is carried out gray proces, obtain the gray value of image.
Further, the concrete methods of realizing obtaining image intensity value in step (3) and step (7) is: make testing light source
Clamping described standard acquisition filter membrane with ccd image sensor, filter membrane surface is exposed processing by ccd image sensor, obtains
Through the initial exposure image of described filter membrane, and image information is delivered to computer, by computer LabVIEW software to obtaining
The image obtained carries out gray proces, obtains the gray value of image.
Further, step (5) method particularly includes: choose a number of filter membrane, uses micrometer caliper and scanning
Filter membrane thickness is measured by Electronic Speculum two kinds of methods respectively, obtains the thickness range of filter membrane;Keep the incidence of current testing light source
Light intensity is certain, measures the light transmittance that under light source, different filter membrane thickness are corresponding, with filter membrane thickness with filter membrane light transmittance for transverse and longitudinal coordinate
Matching obtains the relational expression between described standard acquisition filter membrane thickness and light transmittance.
Further, the system of selection of the testing light source of step (7) described best results is: according to obtained by step (5)
Each testing light source under standard acquisition filter membrane thickness and light transmittance between relation, filter membrane thickness range one timing, select
The testing light source that light transmittance span is the biggest, certainty of measurement is higher;I.e. in filter membrane thickness range, filter membrane thickness and light transmittance matching
The slope of curve changes the most greatly, and certainty of measurement is higher.
Another aspect of the present invention, the detection device of a kind of filter membrane thickness, including light-source control system, filter membrane Thickness sensitivity
System and data collecting system;
Described light-source control system includes adjustable stabilized voltage supply and LED controller, is used for regulating control light supply apparatus and produces
Red, green, blue three primary colours light is respectively as testing light source;
It is indoor that described filter membrane thickness detecting system is arranged on lucifuge, for obtaining the nothing of this testing light source under testing light source
The initial exposure image of filter membrane, light source through the light source exposure image of standard acquisition filter membrane, unknown thickness filter membrane to be measured expose
Image;Including light supply apparatus, ccd image sensor, filter membrane fixed support, stepping moving device, described filter membrane fixed support sets
Put in lucifuge ceiling portion, between light supply apparatus and ccd image sensor;Described light supply apparatus connects described light source control system
System;Described light supply apparatus and ccd image sensor are all arranged on stepping moving device, regulate position by stepping moving device
Put;
Described data collecting system includes that image pick-up card and computer, ccd image sensor and stepping moving device divide
Tong Guo not be connected with image pick-up card by data wire, image pick-up card is connected with computer.
Further, described filter membrane fixed support is arranged on lucifuge ceiling portion by horizontal stand, fixing of described filter membrane
Frame can be along horizontal stand vertical rotary.
Further, described stepping moving device includes motor a, motor b, motor guide rail, stepping electricity
Machine driver, controllor for step-by-step motor, described motor guide rail two ends are fixed on lucifuge chamber body, motor a and step
Entering motor b to coordinate at motor slide and carry out level respectively and move left and right, motor a and motor b is respectively
Being connected with stepper motor driver by wire, stepper motor driver is connected with controllor for step-by-step motor;Described light supply apparatus
Being arranged on motor a by light source fixed support, described ccd image sensor is fixed by ccd image sensor support
On motor b;Described controllor for step-by-step motor is connected with image pick-up card by RS232 interface.
Further, described light source fixed support and ccd image sensor support are designed with micrometric displacement regulation device,
Described micrometric displacement regulation device regulation light supply apparatus and ccd image sensor position in the horizontal direction and guarantee light supply apparatus with
Ccd image sensor is concentric co-axial on same level direction.
Relative to prior art, the detection method of a kind of filter membrane thickness of the present invention and detection device thereof, mainly have
Following advantage: this detection method and device utilize optical detection principle, can conveniently be accurately detected filter membrane thickness, facilitate quality inspection
Personnel carry out quality management and control, improve filter membrane product quality further.
Accompanying drawing explanation
Fig. 1 is the structure of the detecting device schematic diagram of the embodiment of the present invention;
Fig. 2 is filter membrane thickness and the light transmittance graph of a relation of the embodiment of the present invention.
Wherein:
1. adjustable stabilized voltage supply;2.LED controller;3.LED controller data output interface;
4.LED holding wire;5. horizontal stand;6. light supply apparatus;
7. hands the turn of the screw;8. filter membrane fixed support;9.CCD imageing sensor;
10. data wire;11. image acquisition card interfaces I;12. computers;
13. image pick-up cards;14. image acquisition card interfaces II;15.RS232 connecting line;
16. lucifuge room interfaces II;17. motor b;18.RS232 interface;
19. micrometric displacement regulation devices;20. light source fixed supports;21.CCD imageing sensor support;
22. stepper motor drivers;23. controllor for step-by-step motor;24. motor a;
25. motor guide rails;26. lucifuge rooms;27. lucifuge room interfaces I;
Detailed description of the invention
It should be noted that in the case of not conflicting, the embodiment in the present invention and the feature in embodiment can phases
Combination mutually.
The present invention is described in detail below in conjunction with embodiment and accompanying drawing.
As it is shown in figure 1, the present invention proposes the detection device of a kind of filter membrane thickness, including light-source control system, filter membrane thickness
Degree detecting system and data collecting system.
Light-source control system is made up of adjustable stabilized voltage supply 1 and LED controller 2, and the color of light emitting diode utilizes LED to control
Device 2 processed regulates.
Filter membrane thickness detecting system is passed by light supply apparatus 6, light source fixed support 20, micrometric displacement regulation device 19, ccd image
Sensor 9, ccd image sensor support 21, filter membrane fixed support 8, horizontal stand 5, motor a24, motor b17, step
Enter motor slide rails 25, stepper motor driver 22, controllor for step-by-step motor 23 form, and are all arranged in lucifuge room 26.
Lucifuge room 26 is provided with lucifuge room interface I 27 and lucifuge room interface II 16, and described lucifuge room interface II 16 is believed by LED
Number 4 LED controller data output interfaces 3 of line and light supply apparatus 4 couple together, and lucifuge room interface I 27 connects RS232 connecting line
15。
Light supply apparatus is by common cathode corner 5mm Tricolor LED, reflective sleeve and forms, and reflective sleeve employing thickness is
The reflecting piece of 0.4mm is made, diameter 6mm, a length of 10mm.Filter membrane fixed support 8 is by two pieces of a size of 20mm × 20mm × 2mm
Corrosion resistant plate composition, center has the hole of a diameter of 7mm, and filter membrane is fixedly clamped by two pieces of corrosion resistant plates.Filter membrane fixed support 8
On be welded with the stainless steel tube of diameter 10mm, wall thickness 0.5mm, a length of 15mm, perforate above stainless steel tube, bore dia is 2mm.
Horizontal stand 5 is made up of the solid stainless steel round bar of a diameter of 9mm, a length of 400mm, and middle place corresponding with stainless steel tube is opened
Hole, a diameter of 2mm, horizontal stand two ends are horizontally fixed on lucifuge chamber body by side dress flange.Whole filter membrane fixed support 8
Along solid stainless steel round bar vertical rotary, and can be fixed, in order to prevent filter membrane by the hands the turn of the screw 7 in perforate
Fixed support 8 horizontal movement, installs two set screws in the solid stainless steel round bar in stainless steel tube end.Light source fixed support
20, ccd image sensor support 21 is connected with motor a24 and motor b17 respectively, and motor guide rail 25 two ends lead to
Crossing side dress flange to be horizontally fixed on lucifuge chamber body, motor a24 and motor b17 is respectively at motor guide rail 25
Being slidably matched and carry out level and move left and right, motor a24 and motor b17 is respectively by wire and step motor drive
Device 22 connects, and stepper motor driver 22 is connected with controllor for step-by-step motor 23, and controllor for step-by-step motor 23 is by RS232 interface
18 are connected with image pick-up card 13.Micrometric displacement regulation device 19 is separately fixed at light source fixed support 20 and ccd image sensor
On support 21, micrometric displacement regulation device 19 regulates light source 6 and ccd image sensor 9 position in the horizontal direction and guarantees light source 6
With ccd image sensor 9 concentric co-axial on same level direction.
Data collecting system includes image pick-up card 13 and computer 12, the signal of ccd image sensor 9 output and filter membrane
The RS232 interface 18 of thickness detecting system is respectively by the image acquisition card port 11 and 14 of data wire 10 with data collecting system
Being connected, image pick-up card 13 is connected with computer 12, and computer 12 is provided with LabVIEW and controls software, utilizes LabVIEW to control soft
Part completes the collection of image information, processes and store, and to motor a24 and the control of motor b17.
The detection method of the present invention, step is as follows:
1) manually regulation LED controller 2 regulates the color of light emitting diode and shows three kinds of colors of red, green, blue respectively;
2) when the color of diode is red, manually regulation micrometric displacement regulation device 19 makes light supply apparatus 6 and ccd image
Sensor 9 is concentric co-axial on same level direction;
3) utilizing the computer LabVIEW accurate stepping of software-driven motor to move, motor a24 is along motor
Guide rail 25 is moved to the left left end initial position in the horizontal direction, and motor b17 is along motor guide rail 25 in the horizontal direction
Moving right to right-hand member initial position, the moving range of motor a24 horizontal direction is-50~0mm, motor b17 water
Square to moving range be 0~50mm, moving step length is 0.3~5 μm.
First measure filter membrane fixed support 8 and do not clamp the situation of filter membrane, start motor a24 along motor guide rail 25
Moving right in the horizontal direction, motor b17 is moved to the left in the horizontal direction along motor guide rail 25, until light supply apparatus
6 completely attach to just with ccd image sensor 9, and now ccd image sensor 9 is exposed processing and image information being passed through
Data wire exports the image pick-up card 13 to acquisition system, and image pick-up card 13 is connected with computer 12, and computer 12 is provided with
LabVIEW controls software, utilizes LabVIEW to control software and completes the collection of image information, processes and store.Motor afterwards
A24 is moved to the left in the horizontal direction along motor guide rail 25, motor b17 along motor guide rail 25 in the horizontal direction to
Move right, filter membrane known to thickness is clamped on filter membrane fixed support 8, the LabVIEW software-driven of recycling computer 12
The accurate stepping of motor is moved, and motor a24 moves right in the horizontal direction along motor guide rail 25, motor
B17 is moved to the left in the horizontal direction along motor guide rail 25, adopts until light supply apparatus 6 and ccd image sensor 9 clamp just
Collection filter membrane, now ccd image sensor 9 carries out again exposure-processed and image information is passed through data wire whole filter membrane surface
Exporting the image pick-up card 13 to acquisition system, image pick-up card 13 is connected with computer 12, and computer 12 is provided with LabVIEW control
Software processed, utilizes LabVIEW to control software and completes the collection of image information, processes and store.By computer LabVIEW software
The image obtained is carried out gray proces, obtains the gray value of image, analyze further and can obtain filter membrane thickness and light transmittance
Relation.
4) readjust light emitting diode color repeat 3) in step.
5) image information that computer LabVIEW software processes collects, the light emitting diode that Selection effect is optimal are utilized
Color, calculate the relation between filter membrane thickness and light transmittance, relation can judge the thickness of other unknown filter membrane according to this afterwards
Degree.
According to said method, the Teflon filter membrane 80 first choosing the production of certain company carries out electron-microscope scanning, scanning result
Display Teflon filter membrane thickness range be 22.19~33.00 μm, by filter membrane thickness range in 22.19~33.00 μm
Teflon filter membrane light transmittance is tested, and result display filter membrane light transmittance exists preferable non-linear relation, such as Fig. 2 institute with filter membrane thickness
Showing, fitting formula is: y=-0.0188x2+ 0.1426x+99.983, R2=0.9974.The Teflon filter membrane thickness range of 98%
Between 27.5 ± 2.5 μm, range of transmittance is between 89.52 ± 2.34%, when thickness or light transmittance are less than or exceed this
Individual scope then assert the in uneven thickness of this filter membrane.
Above screening conditions are obtained by LabVIEW programming, the Teflon filter membrane of a unknown thickness is utilized filter membrane
Thickness detection apparatus detects, and testing result shows, whole filter membrane range of transmittance is between 88.16~91.07%.Judge
This filter membrane thickness evenness is in allowed band.Corresponding light transmittance be 88.16% thickness gone out be 29.15 μm, other each points
The thickness of position can draw according to light transmittance size.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all essences in the present invention
Within god and principle, any modification, equivalent substitution and improvement etc. made, should be included within the scope of the present invention.