CN106298991B - 硅片及其制备方法及装置 - Google Patents
硅片及其制备方法及装置 Download PDFInfo
- Publication number
- CN106298991B CN106298991B CN201610652752.5A CN201610652752A CN106298991B CN 106298991 B CN106298991 B CN 106298991B CN 201610652752 A CN201610652752 A CN 201610652752A CN 106298991 B CN106298991 B CN 106298991B
- Authority
- CN
- China
- Prior art keywords
- silicon chip
- diamond
- wire
- wire cutting
- gully
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 77
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 77
- 239000010703 silicon Substances 0.000 title claims abstract description 77
- 238000002360 preparation method Methods 0.000 title claims abstract description 12
- 238000005520 cutting process Methods 0.000 claims abstract description 69
- 229910003460 diamond Inorganic materials 0.000 claims description 78
- 239000010432 diamond Substances 0.000 claims description 78
- 239000000428 dust Substances 0.000 claims description 46
- 239000002184 metal Substances 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000013078 crystal Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 abstract description 29
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 abstract description 25
- 239000002253 acid Substances 0.000 abstract description 25
- 230000008569 process Effects 0.000 abstract description 25
- 238000005530 etching Methods 0.000 abstract description 23
- 238000005516 engineering process Methods 0.000 abstract description 12
- 230000000694 effects Effects 0.000 abstract description 4
- 238000005452 bending Methods 0.000 abstract description 3
- 235000008216 herbs Nutrition 0.000 description 8
- 210000002268 wool Anatomy 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000006467 substitution reaction Methods 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000004570 mortar (masonry) Substances 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002224 dissection Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 241001481828 Glyptocephalus cynoglossus Species 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229910001651 emery Inorganic materials 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000009828 non-uniform distribution Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Photovoltaic Devices (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610652752.5A CN106298991B (zh) | 2016-08-10 | 2016-08-10 | 硅片及其制备方法及装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610652752.5A CN106298991B (zh) | 2016-08-10 | 2016-08-10 | 硅片及其制备方法及装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106298991A CN106298991A (zh) | 2017-01-04 |
CN106298991B true CN106298991B (zh) | 2018-02-13 |
Family
ID=57667821
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201610652752.5A Active CN106298991B (zh) | 2016-08-10 | 2016-08-10 | 硅片及其制备方法及装置 |
Country Status (1)
Country | Link |
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CN (1) | CN106298991B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107263750B (zh) * | 2017-08-07 | 2020-01-10 | 苏州赛万玉山智能科技有限公司 | 太阳能硅片的切割方法及三维结构太阳能硅片 |
CN110625835A (zh) * | 2019-09-12 | 2019-12-31 | 西安奕斯伟硅片技术有限公司 | 一种硅片成型加工方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101866971A (zh) * | 2010-05-18 | 2010-10-20 | 常州亿晶光电科技有限公司 | 具有选择性发射级太阳能电池片 |
CN103056974A (zh) * | 2011-10-22 | 2013-04-24 | 赵钧永 | 多线切割方法及专用设备 |
CN103538160A (zh) * | 2013-10-29 | 2014-01-29 | 苏州硅峰太阳能科技有限公司 | 一种硬脆材料多线切割方法及切割装置 |
CN105047764A (zh) * | 2015-09-01 | 2015-11-11 | 浙江晶科能源有限公司 | 一种硅片的制绒方法 |
CN105122463A (zh) * | 2013-02-12 | 2015-12-02 | 索莱克赛尔公司 | 使用体晶片的单片岛型背接触背结太阳能电池 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101138869A (zh) * | 2007-10-12 | 2008-03-12 | 南京航空航天大学 | 单晶硅高效复合切割方法及其切割*** |
JP5957835B2 (ja) * | 2011-09-28 | 2016-07-27 | 株式会社Sumco | 太陽電池用ウェーハの製造方法、太陽電池セルの製造方法、および太陽電池モジュールの製造方法 |
-
2016
- 2016-08-10 CN CN201610652752.5A patent/CN106298991B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101866971A (zh) * | 2010-05-18 | 2010-10-20 | 常州亿晶光电科技有限公司 | 具有选择性发射级太阳能电池片 |
CN103056974A (zh) * | 2011-10-22 | 2013-04-24 | 赵钧永 | 多线切割方法及专用设备 |
CN105122463A (zh) * | 2013-02-12 | 2015-12-02 | 索莱克赛尔公司 | 使用体晶片的单片岛型背接触背结太阳能电池 |
CN103538160A (zh) * | 2013-10-29 | 2014-01-29 | 苏州硅峰太阳能科技有限公司 | 一种硬脆材料多线切割方法及切割装置 |
CN105047764A (zh) * | 2015-09-01 | 2015-11-11 | 浙江晶科能源有限公司 | 一种硅片的制绒方法 |
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Publication number | Publication date |
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CN106298991A (zh) | 2017-01-04 |
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Effective date of registration: 20231011 Address after: 201400 Nanqiao Zhenjianghai Economic Park, Fengxian District, Shanghai Patentee after: GCL SYSTEM INTEGRATION TECHNOLOGY Co.,Ltd. Patentee after: GCL INTEGRATION TECHNOLOGY (SUZHOU) Co.,Ltd. Patentee after: Wuhu GCL Integrated New Energy Technology Co.,Ltd. Address before: 201406 Jianghai economic Park, South Bridge Town, Fengxian District, Shanghai Patentee before: GCL SYSTEM INTEGRATION TECHNOLOGY Co.,Ltd. Patentee before: GCL INTEGRATION TECHNOLOGY (SUZHOU) Co.,Ltd. Patentee before: SUZHOU GCL SYSTEM INTEGRATION TECHNOLOGY INDUSTRIAL APPLICATION RESEARCH INSTITUTE Co.,Ltd. Patentee before: ZHANGJIAGANG GCL INTEGRATION TECHNOLOGY Co.,Ltd. |