CN106293995B - The data backup system and method for manufacturing execution system - Google Patents
The data backup system and method for manufacturing execution system Download PDFInfo
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Abstract
Present invention discloses a kind of data backup systems of manufacturing execution system, it include: backup database setup module, backup database is established according to the Production database of the manufacturing execution system, it is identical to the storage mode of the information of wafer batch with the Production database to the storage mode of the information of wafer batch in the backup database;Data relationship packet generation module, according to wafer batch Information Extracting Mechanism, the information that will meet the wafer batch in time limit imports the backup database;Data removing module, according to imported into wafer batch in the backup database as a result, deleting the information of the wafer batch imported in order in the Production database.Of the invention also discloses the data back up method of manufacturing execution system.The data backup system and method for manufacturing execution system provided by the invention can efficiently reduce the consuming cost of hardware resource, the human cost of database maintenance personnel and time cost.
Description
Technical field
The present invention relates to semiconductors manufactures to execute systems technology field, more particularly to a kind of data of manufacturing execution system
Standby system and method.
Background technique
The production for modernizing large scale integrated circuit is high-tech manufacturing process, because product category is various, manufacturing procedure
It is complicated, it is desirable that Semiconductor enterprises implement the management of more lean to production process, and manufacturing execution system (MES) mentions for user
The manufacturing industry environment of a fining has been supplied, Reducing Cost in Enterprises, the quality for the product that delivers goods on schedule, improves and raising service are helped
Quality.Therefore all semiconductor production enterprises are designed with production executive system (MES) to monitor and manage production scene.It can be with
Say that MES system is most important to the production of advanced fab.
MES system runs the data of goods with the lasting progress of production process to process flow and product, will be in database
Middle bulk deposition gets up, and in the prior art, the archiving method for the data that wafer batch (lot) generates in process flow is:
The Production database of MES system is quarterly backuped, the process flow data of expired lot are then deleted.Specifically, lot
After shipment, i.e., after the production status of lot shows as " shipped " three months, MES is automatically deleted all process flows of this lot
Data.In addition, at the beginning of the first month in IT engineer's each season, i.e., at the beginning of 1 month, at the beginning of 4 months, at the beginning of 7 months and at the beginning of 10 months, to a upper season
The MES Production database for spending the period carries out full backup, and stores into a backup database.
If the process flow data that user has demand to restore a certain lot are done processing (rework) again or are checked, IT
Engineer can first find the backup database in corresponding time and month, then restore this backup database, database recovery it
Afterwards, the data packet of the process flow of lot is therefrom obtained, then this data packet is input in Production database, notifies user
Lot is re-worked.
However, the increasingly complexity of lasting progress and production procedure with production process, Production database also can be increasingly
It is huge, Production database is quarterly backuped, needs very big hard drive space to support, which increase disappearing for hardware resource
Cost is consumed, while also increasing the human cost of database maintenance personnel.Also, restore backup database very time-consuming, from
User submits application to restore, and is restored in user hand to data, at least needs the period in a week, which increase users couple
The waiting time and downtime of lot process flow data affect the process that lot is re-worked.
Summary of the invention
The object of the present invention is to provide a kind of data backup system of manufacturing execution system and methods, can be effectively
Reduce consuming cost, the human cost and time cost of database maintenance personnel of hardware resource.
In order to solve the above technical problems, the present invention provides a kind of data backup system of manufacturing execution system, comprising:
Backup database setup module establishes backup database according to the Production database of the manufacturing execution system, institute
State in backup database in the storage mode of the information of wafer batch and the Production database to the information of wafer batch
Storage mode is identical;
Data relationship packet generation module will meet the letter of the wafer batch in time limit according to wafer batch Information Extracting Mechanism
Breath imports the backup database;
Data removing module, according to imported into wafer batch in the backup database as a result, in the creation data
The information of the wafer batch imported is deleted in library in order.
Optionally, in the data backup system of the manufacturing execution system, the data backup of the manufacturing execution system
System further include:
Module is keyed in, for keying in the serial number of a wafer batch to be checked;
Query engine is separately connected the key entry module and backup database, according to the wafer batch to be checked
Serial number finds the information of the wafer batch to be checked in the backup database.
Optionally, in the data backup system of the manufacturing execution system, the key entry module is manufacture execution
The one of system keys in interface.
Optionally, in the data backup system of the manufacturing execution system, the data backup of the manufacturing execution system
System further includes a recovery module, and the recovery module imports the information of wafer batch to be restored from the backup database
The Production database, and retain the information of corresponding wafer batch in the backup database.
Optionally, in the data backup system of the manufacturing execution system, the data backup of the manufacturing execution system
System further includes a sub- wafer batch judging unit, and whether the wafer batch that the sub- wafer batch judging unit judgement has imported
For sub- wafer batch, if the wafer batch imported is mother wafer batch, described in the data removing module is deleted
The information of the wafer batch imported in Production database;If the wafer batch imported is sub- wafer batch, and institute
The mother wafer batch of the wafer batch imported is stated in the Production database, then the data removing module is not deleted described
The information of the wafer batch imported in Production database;If the wafer batch imported is sub- wafer batch, and institute
It states there is no the mother wafer batch of the wafer batch imported in Production database, then the data removing module deletes institute
State the information of the wafer batch imported in Production database.
Optionally, in the data backup system of the manufacturing execution system, the data backup of the manufacturing execution system
System further includes a neutral gear piece batch judging unit, and whether the wafer batch that the neutral gear piece batch judging unit judgement has imported
For neutral gear piece batch, if the wafer batch imported is neutral gear piece batch, the data removing module does not delete institute
State the information of the wafer batch imported in Production database;If the wafer batch imported is not neutral gear piece batch,
Then the data removing module deletes the information of the wafer batch imported in the Production database.
Optionally, in the data backup system of the manufacturing execution system, the data backup of the manufacturing execution system
System further includes a recovery wafer batch judging unit, and the wafer batch judging unit that restores judges the wafer batch imported
Whether the Production database is reentered in specific time, if the wafer batch imported is in the specific time
The Production database is inside reentered, then the data removing module does not delete the wafer imported in the Production database
The information of batch;If the wafer batch imported does not reenter the Production database in the specific time,
Then the data removing module deletes the information of the wafer batch imported in the Production database.
Optionally, in the data backup system of the manufacturing execution system, institute is established according to the method for data base view
State wafer batch Information Extracting Mechanism.
Another side according to the present invention also provides a kind of data back up method of manufacturing execution system, comprising:
Backup database is established according to the Production database of the manufacturing execution system, to wafer in the backup database
The storage mode of the information of batch is identical to the storage mode of the information of wafer batch with the Production database;
According to wafer batch Information Extracting Mechanism, the information that will meet the wafer batch in time limit imports the Backup Data
Library;
According to imported into wafer batch in the backup database as a result, being deleted in order in the Production database
The information of the wafer batch imported.
Optionally, in the data back up method of the manufacturing execution system, the data backup of the manufacturing execution system
Method further include:
Key in the serial number of a wafer batch to be checked;
According to the serial number of the wafer batch to be checked, the crystalline substance to be checked is found in the backup database
The information of circle batch.
Optionally, in the data back up method of the manufacturing execution system, in a key entry of the manufacturing execution system
Key in the serial number of shown wafer batch to be checked in interface.
Optionally, in the data back up method of the manufacturing execution system, the data backup of the manufacturing execution system
Method further include: the information of wafer batch to be restored is imported into the Production database from the backup database, and is retained
The information of corresponding wafer batch in the backup database.
Optionally, in the data back up method of the manufacturing execution system, the basis imported into the Backup Data
Wafer batch as a result, the step of deleting the information of the wafer batch imported in order in Production database packet in library
It includes:
Judge whether the wafer batch imported is sub- batch, if the wafer batch imported is female batch,
The data removing module deletes the information of the wafer batch imported in the Production database;
If the wafer batch imported is sub- batch, and female batch of the wafer batch imported is described
In Production database, then the data removing module does not delete the information of the wafer batch imported in the Production database;
If the wafer batch imported is sub- batch, and imported there is no described in the Production database
Female batch of wafer batch, then the data removing module deletes the letter of the wafer batch imported in the Production database
Breath.
Optionally, in the data back up method of the manufacturing execution system, the basis imported into the Backup Data
Wafer batch as a result, the step of deleting the information of the wafer batch imported in order in Production database packet in library
It includes:
Judge whether the wafer batch imported is neutral gear piece batch, if the wafer batch imported is neutral gear piece
Batch, then the data removing module does not delete the information of the wafer batch imported in the Production database;
If the wafer batch imported is not neutral gear piece batch, the data removing module deletes the production
The information of the wafer batch imported in database.
Optionally, in the data back up method of the manufacturing execution system, the basis imported into the Backup Data
Wafer batch as a result, the step of deleting the information of the wafer batch imported in order in Production database packet in library
It includes:
Judge whether the wafer batch that has imported reenters the Production database in specific time, if it is described
The wafer batch of importing reenters the Production database in the specific time, then the data removing module is not deleted
The information of the wafer batch imported in the Production database;
If the wafer batch imported does not reenter the Production database, institute in the specific time
State the information that data removing module deletes the wafer batch imported in the Production database.
Optionally, in the data back up method of the manufacturing execution system, institute is established according to the method for data base view
State wafer batch Information Extracting Mechanism.
Compared with prior art, the data backup system and method for manufacturing execution system provided by the invention have following excellent
Point:
In the data backup system of manufacturing execution system provided by the invention, the data relationship packet generation module according to
Wafer batch Information Extracting Mechanism, the information that will meet the wafer batch in time limit import the backup database, and the data are deleted
Except module according to imported into wafer batch in the backup database as a result, being deleted in order in the Production database
The information of the wafer batch of importing avoids so that only saving the information of wafer batch (lot) in the backup database
Board PM (preventive maintenance) or OCAP (Out of Control Action Plan, exception are saved in the backup database
Control plan) etc. excessive record, to save memory space;Also, the data backup system moment of manufacturing execution system with
When automatically data are backed up, avoid IT engineer from manually backing up, save human resources.
Detailed description of the invention
Fig. 1 is the schematic diagram of the data backup system of manufacturing execution system in one embodiment of the invention;
Fig. 2 is the flow chart of the data back up method of manufacturing execution system in one embodiment of the invention.
Specific embodiment
It is carried out below in conjunction with data backup system and method for the schematic diagram to manufacturing execution system of the invention more detailed
Description, which show the preferred embodiment of the present invention, it should be appreciated that those skilled in the art can modify described herein
The present invention, and still realize advantageous effects of the invention.Therefore, following description should be understood as those skilled in the art
It is widely known, and be not intended as limitation of the present invention.
For clarity, not describing whole features of practical embodiments.In the following description, it is not described in detail well known function
And structure, because they can make the present invention chaotic due to unnecessary details.It will be understood that opening in any practical embodiments
In hair, it is necessary to make a large amount of implementation details to realize the specific objective of developer, such as according to related system or related business
Limitation, changes into another embodiment by one embodiment.Additionally, it should think that this development may be complicated and expend
Time, but to those skilled in the art it is only routine work.
The present invention is more specifically described by way of example referring to attached drawing in the following passage.It is wanted according to following explanation and right
Book is sought, advantages and features of the invention will become apparent from.
Core of the invention thought is, provides a kind of data backup system of manufacturing execution system, as shown in Figure 1, packet
Include: backup database setup module 110 establishes backup database according to the Production database DB1 of the Manufacturing Executive System MES
In DB2, the backup database DB2 in the storage mode of wafer batch lot and the Production database DB1 to wafer batch
The storage mode of lot is identical;Data relationship packet generation module 120 will meet the time limit according to wafer batch Information Extracting Mechanism
The information of wafer batch lot imports the backup database DB2;Data removing module 130, according to importeding into the Backup Data
DB2 wafer batch lot's as a result, deleting the wafer batch lot's imported in order in the Production database DB1 in library
Information.
The information that wafer batch (lot) is only saved in the backup database DB2 is avoided in the backup database DB2
Middle preservation board PM (preventive maintenance) or OCAP (Out of Control Action Plan, abnormal control plan) etc. are excessive
Record, to save memory space;Also, the data backup system moment of Manufacturing Executive System MES automatically logarithm at any time
According to being backed up, IT engineer is avoided manually to back up, saves human resources.
Further, in conjunction with the data backup system of above-mentioned manufacturing execution system, the present invention also provides a kind of manufacture execution
The data back up method of system, as shown in Figure 2, comprising:
Step S1 establishes backup database, the backup database according to the Production database of the manufacturing execution system
In it is identical to the storage mode of the information of wafer batch with the Production database to the storage mode of the information of wafer batch;
Step S2, according to wafer batch Information Extracting Mechanism, the information importing that will meet the wafer batch in time limit is described standby
Part database;
Step S3, according to imported into wafer batch in the backup database as a result, in the Production database by
Sequentially delete the information of the wafer batch imported.
Illustrate the data backup system and method for manufacturing execution system of the invention below in conjunction with specific embodiment.Such as figure
Shown in 1, the data backup system includes backup database setup module 110, data relationship packet generation module 120 and data
Removing module 130.
When the data backup system carries out data backup, progress step S1 first, the Backup Data lab setting mould
Block 110 establishes backup database DB2 according to the Production database DB1 of the Manufacturing Executive System MES, wherein the backup number
According in the DB2 of library in the storage mode of wafer batch lot information and the Production database DB1 to wafer batch lot information
Storage mode is identical.The i.e. described backup database DB2 and Production database DB1 has identical framework, table, index, major key, and will
The data of 14 allocation lists relevant to lot information synchronize this backup database DB2 in the Production database DB1,
In addition 11 inquiry views relevant with lot information are established in the backup database DB2, finally in the backup database
Permission control table is established in DB2, wherein the cell that the backup database DB2 is used to store data is empty.
Table | Data | Index | Data |
A | X1 | D | X2 |
B | Y1 | E | Y2 |
C | Z1 | F | Z2 |
Table 1
Table | Data | Index | Data |
A | D | ||
B | E | ||
C | F |
Table 2
For example, table 1 is the storage mode in the Production database DB1 to wafer batch lot information, the creation data
The tables of data of library DB1 include Table (table, the projects such as including A, B, C) and its Data (the specific data such as including X1, Y1, Z1),
Index (index, the projects such as including D, E, F) and its Data (the specific data such as including X2, Y2, Z2).Table 2 is the Backup Data
To the storage mode of wafer batch lot information in the DB2 of library, the tables of data of the backup database DB2 include Table (table, including
A, the projects such as B, C) and its Data (wherein specific data are sky), Index (index, the projects such as including D, E, F) and its Data (its
In specific data be sky).
Then step S2 is carried out, the data relationship packet generation module 120 will expire according to wafer batch Information Extracting Mechanism
The information of the wafer batch lot in sufficient time limit imports the backup database DB2.Preferably, the method according to data base view is built
Found the wafer batch Information Extracting Mechanism, the method for data base view be it will be understood by those skilled in the art that.
Specifically, engineer establishes a complete lot information extraction machine according to lot tables of data relationship in the Production database DB1
System, when inputting serial number (the lot ID) of wafer batch, the available total data set about lot, thus will be described
All data milli of the lot is free of errors imported into inside the backup database DB2 in Production database DB1.
Step S3 is carried out later, and the data removing module 130 is according to importeding into wafer lot in the backup database DB2
Secondary lot's as a result, deleting the wafer batch imported in order in the Production database DB1 using lot ID as input source
The information of lot.
Be input source according to lot ID preferably, in the step S3, further include, to the basic condition of each lot according to
It is secondary to be judged, as shown in Figure 1, the data backup system further includes lot basic condition judging unit 170, specifically, described
Lot basic condition judging unit 170 includes sub- batch judging unit 171, neutral gear piece batch judging unit 172, restores wafer lot
Secondary judging unit 173.Include step S31, step S32 and step S33 in step S3 in the data back up method:
The step S31 is carried out, the sub- batch judging unit 171 successively judges the wafer lot imported in step s 2
Whether secondary lot is sub- batch (sub- lot), if the wafer batch lot imported is female batch (female lot), the data
Removing module 130 deletes the information of the wafer batch lot imported in the Production database DB1;If institute in step s 2
Stating the wafer batch lot imported is sub- batch, and female lot of the wafer batch lot imported is in the creation data
In the DB1 of library (i.e. female lot of the sub- lot is in the Production database DB1), then the data removing module 130 does not delete institute
State the information of the wafer batch (the sub- lot) imported in Production database DB1;If the wafer batch lot imported
For sub- lot, and there is no female batch (i.e. mothers of the sub- lot of the wafer batch imported in the Production database DB1
Lot is not in the Production database DB1), then the data removing module 130 is deleted has led in the Production database DB1
The information of the wafer batch (the sub- lot) entered;
The step S32 is carried out, the neutral gear piece batch judging unit 172 successively judges the crystalline substance imported in step s 2
Whether circle batch lot is neutral gear piece batch (V lot), if the wafer batch lot imported is neutral gear piece batch (V
Lot), then the data removing module 130 does not delete the wafer batch (the V lot) imported in the Production database DB1
Information;If the wafer batch lot imported is not neutral gear piece batch (V lot), the data removing module 130
Delete the information of the wafer batch (the V lot) imported in the Production database DB1;
Carry out the step S33, it is described to restore what wafer batch judging unit 173 successively judged to have imported in step s 2
Whether wafer batch lot reenters (restore) described Production database DB1, the specific time root in specific time
It is configured according to concrete condition, it is not limited here.Such as the specific time can be 7 days, then judge the wafer imported
Whether batch lot did the operation of restore in 7 days.If the wafer batch lot imported is in the specific time
The Production database DB1 is inside reentered, then the data removing module 130 is not deleted in the Production database DB1
The lot;If the wafer batch lot imported does not reenter the Production database DB1 in the specific time,
Then the data removing module 130 deletes the lot in the Production database DB1.
Wherein, step S31, the sequencing of step S32 and step S33 is without limitation.
By step S1- step S3, by the lot information back-up in the Production database DB1 to the backup database
The information that wafer batch (lot) is only saved in DB2, the backup database DB2 avoids protecting in the backup database DB2
Deposit the excessive note such as board PM (preventive maintenance) or OCAP (Out of Control Action Plan, abnormal control plan)
Record, to save memory space;Also, the data backup system moment of Manufacturing Executive System MES at any time automatically to data into
Row backup, avoids IT engineer from manually backing up, and saves human resources.
In order to facilitate the information for the wafer batch lot that customer inquiries are deleted in the Production database DB1, preferably
, as shown in Figure 1, the data backup system further includes that key entry module 140 and query engine 150, the query engine 150 divide
The key entry module 140 and backup database DB2 are not connected.It further include step S4 in the data back up method, it is specific to wrap
Include step S41 and step S42:
Carry out step S41, the serial number (lot that client keys in one wafer batch to be checked of key entry in module described 140
ID), which is the wafer batch being deleted in the Production database DB1;
Carry out step S42, the query engine 150 according to the serial number (lot ID) of the wafer batch to be checked,
DB2 finds the information of the wafer batch to be checked in the backup database.
Preferably, described to key in the key entry interface that module 140 is the MES, it is established in the Manufacturing Executive System MES
Query result to facilitate client directly to inquire in MES system, and is shown the knot in MES system by the key entry interface
In fruit display interface.
The information for the wafer batch lot being deleted is restored to the life from the backup database DB2 for convenience
It produces in database D B1, preferably, as shown in Figure 1, the data backup system further includes a recovery module 160.In the data
In backup method, further includes step S5, specifically includes:
The recovery module 160 is by the information of wafer batch lot to be restored from described in backup database DB2 importing
Production database DB1, to facilitate wafer batch lot to be restored to be re-worked (rework);Meanwhile retaining the backup
The information of corresponding wafer batch lot in database D B2.Wherein, the wafer batch lot to be restored can be the step
The wafer batch lot found in S4.
By step S4, step S5, client can at any time as needed, oneself is searched in MES system, is avoided to IT
Engineer submits application, and client's data backup system through the invention and method can be searched rapidly and described in restoring
Lot information in backup database DB2 saves the time.
Also, in step S5, the recovery module 160 retains corresponding wafer batch lot in the backup database DB2
Information, but when the lot pours into the backup database DB2 again, then delete the last information poured into.It does so
After the Production database DB1 being returned to avoid the Lot data, if there is fortuitous event occurs, for example lot data are different
Often, user misoperation data, need to begin the beguine a restore lot data when, the lot in the backup database DB2
Source data has been lost.
In addition, the data backup system and method for the manufacturing execution system can also the information to board carry out backup and
Restore, this be it will be understood by those skilled in the art that, this will not be repeated here.
Obviously, various changes and modifications can be made to the invention without departing from essence of the invention by those skilled in the art
Mind and range.In this way, if these modifications and changes of the present invention belongs to the range of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to include these modifications and variations.
Claims (12)
1. a kind of data backup system of manufacturing execution system, comprising:
Backup database setup module establishes backup database according to the Production database of the manufacturing execution system, described standby
To the storage in the storage mode and the Production database of the information of wafer batch to the information of wafer batch in part database
Mode is identical;
Data relationship packet generation module leads the information for meeting the wafer batch in time limit according to wafer batch Information Extracting Mechanism
Enter the backup database;
Data removing module, according to imported into wafer batch in the backup database as a result, in the Production database
The information of the wafer batch imported is deleted in order;
Recovery module, described in the recovery module imports the information of wafer batch to be restored from the backup database again
Production database, and retain the information of corresponding wafer batch in the backup database, and production number ought be directed into again
When be directed into the backup database again according to the information of the wafer batch in library, then delete in the backup database
The information of the wafer batch once retained;
Restore wafer batch judging unit, judge the wafer batch that has imported whether in specific time by the backup database
The Production database is reentered, if the wafer batch imported reenters the life in the specific time
Database is produced, then the data removing module does not delete the information of the wafer batch imported in the Production database;If
The wafer batch imported does not reenter the Production database in the specific time, then the data delete mould
Block deletes the information of the wafer batch imported in the Production database.
2. the data backup system of manufacturing execution system as described in claim 1, which is characterized in that the manufacturing execution system
Data backup system further include:
Module is keyed in, for keying in the serial number of a wafer batch to be checked;
Query engine is separately connected the key entry module and backup database, according to the serial number of the wafer batch to be checked,
The information of the wafer batch to be checked is found in the backup database.
3. the data backup system of manufacturing execution system as claimed in claim 2, which is characterized in that the key entry module is institute
State manufacturing execution system one keys in interface.
4. the data backup system of the manufacturing execution system as described in any one of claims 1 to 3, which is characterized in that institute
The data backup system for stating manufacturing execution system further includes a sub- batch judging unit, and the sub- batch judging unit judgement has been led
Whether the wafer batch entered is sub- batch, if the wafer batch imported is female batch, the data removing module
Delete the information of the wafer batch imported in the Production database;If the wafer batch imported is sub- batch,
And female batch of the wafer batch imported in the Production database, then the data removing module is not deleted described
The information of the wafer batch imported in Production database;If the wafer batch imported is sub- batch, and the life
It produces there is no female batch of the wafer batch imported in database, then the data removing module deletes the production number
According to the information of the wafer batch imported in library.
5. the data backup system of the manufacturing execution system as described in any one of claims 1 to 3, which is characterized in that institute
The data backup system for stating manufacturing execution system further includes a neutral gear piece batch judging unit, the neutral gear piece batch judging unit
Judge whether the wafer batch imported is neutral gear piece batch, if the wafer batch imported is neutral gear piece batch,
The data removing module does not delete the information of the wafer batch imported in the Production database;It has been imported if described
Wafer batch is not neutral gear piece batch, then the data removing module deletes the wafer batch imported in the Production database
Information.
6. the data backup system of manufacturing execution system as described in claim 1, which is characterized in that according to data base view
Method establishes the wafer batch Information Extracting Mechanism.
7. a kind of data back up method of manufacturing execution system, comprising:
Backup database is established according to the Production database of the manufacturing execution system, to wafer batch in the backup database
Information storage mode it is identical to the storage mode of the information of wafer batch with the Production database;
According to wafer batch Information Extracting Mechanism, the information that will meet the wafer batch in time limit imports the backup database;
According to importeding into having led as a result, deleting in order in the Production database for wafer batch in the backup database
The information of the wafer batch entered;
And the data back up method of the manufacturing execution system further include: by the information of wafer batch to be restored from described
Backup database imports the Production database again, and retains the information of corresponding wafer batch in the backup database,
And when the information for the wafer batch being directed into Production database again is directed into again in the backup database, then
Delete the information of the last wafer batch retained in the backup database;
Wherein, the basis imported into wafer batch in the backup database as a result, by suitable in the Production database
Sequence delete imported wafer batch information the step of include:
Judge whether the wafer batch that has imported in specific time reenters the creation data by the backup database
Library, if the wafer batch imported reenters the Production database in the specific time, data are deleted
Module does not delete the information of the wafer batch imported in the Production database;
If the wafer batch imported does not reenter the life by the backup database in the specific time
Database is produced, then data removing module deletes the information of the wafer batch imported in the Production database.
8. the data back up method of manufacturing execution system as claimed in claim 7, which is characterized in that the manufacturing execution system
Data back up method further include:
Key in the serial number of a wafer batch to be checked;
According to the serial number of the wafer batch to be checked, the wafer lot to be checked is found in the backup database
Secondary information.
9. the data back up method of manufacturing execution system as claimed in claim 8, which is characterized in that execute system in the manufacture
The one of system keys in the serial number that shown wafer batch to be checked is keyed at interface.
10. the data back up method of the manufacturing execution system as described in any one of claim 7 to 9, which is characterized in that institute
It states according to importeding into having imported as a result, deleting in order in the Production database for wafer batch in the backup database
Wafer batch information the step of include:
Judge whether the wafer batch imported is sub- batch, it is described if the wafer batch imported is female batch
Data removing module deletes the information of the wafer batch imported in the Production database;
If the wafer batch imported is sub- batch, and female batch of the wafer batch imported is in the production
In database, then the data removing module does not delete the information of the wafer batch imported in the Production database;
If the wafer batch imported is sub- batch, and there is no the wafers imported in the Production database
Female batch of batch, then the data removing module deletes the information of the wafer batch imported in the Production database.
11. the data back up method of the manufacturing execution system as described in any one of claim 7 to 9, which is characterized in that institute
It states according to importeding into having imported as a result, deleting in order in the Production database for wafer batch in the backup database
Wafer batch information the step of include:
Judge whether the wafer batch imported is neutral gear piece batch, if the wafer batch imported is neutral gear piece batch
Secondary, then the data removing module does not delete the information of the wafer batch imported in the Production database;
If the wafer batch imported is not neutral gear piece batch, the data removing module deletes the creation data
The information of the wafer batch imported in library.
12. the data back up method of manufacturing execution system as claimed in claim 7, which is characterized in that according to data base view
Method establish the wafer batch Information Extracting Mechanism.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201510249796.9A CN106293995B (en) | 2015-05-15 | 2015-05-15 | The data backup system and method for manufacturing execution system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN107862031A (en) * | 2017-11-02 | 2018-03-30 | 东软集团股份有限公司 | Method for processing business, device and server |
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