CN106290487A - A kind of semiconductor gas sensor temperature compensation - Google Patents
A kind of semiconductor gas sensor temperature compensation Download PDFInfo
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- CN106290487A CN106290487A CN201610695562.1A CN201610695562A CN106290487A CN 106290487 A CN106290487 A CN 106290487A CN 201610695562 A CN201610695562 A CN 201610695562A CN 106290487 A CN106290487 A CN 106290487A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
- G01N27/123—Circuits particularly adapted therefor, e.g. linearising circuits for controlling the temperature
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Abstract
This case is a kind of semiconductor gas sensor temperature compensation, comprises the following steps: step 1): select a gas sensor to test in multiple gas sensors by industrial computer；Step 2): control multiple sensor test air saddle and be supplied to the gas concentration value needed for multiple gas sensor test；Step 3): change the gas concentration value needed for multiple gas sensor tests by gas concentration controller；Step 4): controlling high-low temperature chamber by industrial computer is the temperature environment that multiple gas sensor changes needed for temperature-compensating；Step 5): change the gas concentration value needed for multiple gas sensor test；Step 6): send all primary datas to industrial computer；Step 7): increase on electric bridge and compensate resistance, formed and compensate resistor network；Step 8): repetition step one is to eight, until the most having formed compensation resistor network in all passages.The semiconductor gas sensor temperature compensation of this case is simple and practical, flexible, easy to spread.
Description
Technical field
The present invention relates to sensor testing method, particularly relate to a kind of semiconductor gas sensor temperature compensation.
Background technology
Gas sensor is relatively big by external action, and especially test is that external temperature is relatively big on the impact of its test result, because of
This, domestic sensor producer be the most mostly employing experience penalty method to carry out the temperature-compensating of gas sensor, i.e. in institute
Have on the product of same batch and add same compensation resistance, re-test after compensation, the most repeatedly revise resistance value according to drift value, so
Temperature compensation efficiency low, and the compensation precision of this semiconductor gas sensor temperature compensation also can not get ensure.
Summary of the invention
For overcoming the deficiencies in the prior art, it is an object of the invention to provide a kind of semiconductor gas sensor temperature-compensating
Method, to realize the mass of gas sensor, high precision temperature compensation.
For achieving the above object, the present invention is achieved through the following technical solutions:
A kind of semiconductor gas sensor temperature compensation, comprises the following steps:
Step 1): control multichannel bridge test module by industrial computer and select a gas to pass in multiple gas sensors
Sensor is tested, and controlling high-low temperature chamber by industrial computer provides the temperature needed for temperature-compensating for the plurality of gas sensor
Environment；
Step 2): control multiple sensor test air saddle by gas concentration controller and be supplied to the plurality of gas biography
Gas concentration value needed for sensor test, then passes through the gas sensing that programmable power supply selects to multichannel bridge test module
Device provides reference voltage, then passes through at the beginning of the electric bridge that circuit tester gathers the gas sensor that multichannel bridge test module selects
Beginning data；
Step 3): control described multiple sensor test air saddle by gas concentration controller and change the plurality of gas
Gas concentration value needed for sensor test, then gather, by circuit tester, the gas sensor that multichannel bridge test module selects
The primary data of electric bridge；
Step 4): controlling high-low temperature chamber by industrial computer is the temperature that the plurality of gas sensor changes needed for temperature-compensating
Degree environment, then it is supplied to the plurality of gas sensing by gas concentration controller control described multiple sensor test air saddle
Gas concentration value needed for device test, then passes through the gas sensor of circuit tester collection multichannel bridge test module selection
The primary data of electric bridge；
Step 5): control described multiple sensor test air saddle by gas concentration controller and change the plurality of gas
Gas concentration value needed for sensor test, then gather, by circuit tester, the gas sensor that multichannel bridge test module selects
The primary data of electric bridge；
Step 6): by circuit tester to all primary datas are sent industrial computer, then by industrial computer according to described initially
Data draw offset data, form the compensation resistor network of the electric bridge of described gas sensor；
Step 7): increase on electric bridge and compensate resistance, formed and compensate resistor network；
Step 8): repetition step one is to step 8, until the most having formed the gas sensing in this passage in all passages
The compensation resistor network of the electric bridge of device.
Preferably, described semiconductor gas sensor temperature compensation, wherein, in described step one, temperature is mended
Repaying required temperature environment is 20 DEG C.
Preferably, described semiconductor gas sensor temperature compensation, wherein, in described step 2, test institute
The gas concentration value needed is zero.
Preferably, described semiconductor gas sensor temperature compensation, wherein, in described step 3, test institute
The gas concentration value needed is full scale gas concentration value.
Preferably, described semiconductor gas sensor temperature compensation, wherein, in described step 4, temperature is mended
Repaying required temperature environment is 60 DEG C.
Preferably, described semiconductor gas sensor temperature compensation, wherein, in described step 4, test institute
The gas concentration value needed is zero.
Preferably, described semiconductor gas sensor temperature compensation, wherein, in described step 5, test institute
The gas concentration value needed is full scale gas concentration value.
Preferably, described semiconductor gas sensor temperature compensation, wherein, described electric bridge includes the first electricity
Resistance, the second resistance, the 3rd resistance and the 4th resistance, described first resistance and described second resistant series, described 3rd resistance with
Described 4th resistant series, the first resistance after described series connection and the second resistance and the 3rd resistance after described series connection and the 4th electricity
Resistance parallel connection.
Preferably, described semiconductor gas sensor temperature compensation, wherein, described compensation resistor network includes
Brachium pontis compensating unit and Bridge circuit compensation unit, described brachium pontis compensating unit is for being decreased or increased in electric bridge the electricity in certain brachium pontis
Resistance resistance, described Bridge circuit compensation unit is for being decreased or increased the resistance of whole electric bridge.
Preferably, described semiconductor gas sensor temperature compensation, wherein, high-low temperature chamber is by for changing
The heater composition of affiliated semiconductor gas sensor gas sensitive temperature, described heater automatically adjusts according to ambient temperature and adds
Thermal power.
Compared with prior art, the method have the advantages that (1) compensates system by described pressure sensor temperature
System and temperature compensation thereof, it is possible to achieve the temperature-compensating of pressure transducer in batches, be respectively directed to each sensor not
Carry out under synthermal testing and calculate the resistance of resistance in its electric bridge, accurately calculated by industrial computer according to the mathematical model compensated
Compensation resistor network required for every sensor, and select resistance welding to formation compensation in electric bridge according to the data calculated
Resistor network, the precision temperature completing every sensor compensates；(2) on the other hand, when semiconductor gas sensor works, when
During variation of ambient temperature, by changing the heater power of semiconductor gas sensor, the gas sensitive of sensor is made to be operated in
The state of temperature constant, so that semiconductor gas sensor is not affected by ambient temperature, works more stable, and precision is more
High.The semiconductor gas sensor temperature compensation of this case make this sensor have easy to use, highly sensitive, precision is high
Advantage, the method has advantage simple and practical, flexible, easy to spread.
Accompanying drawing explanation
The semiconductor gas sensor temperature compensation flow chart that Fig. 1 provides for the embodiment of the present invention；
The structure compensating system in the semiconductor gas sensor temperature compensation that Fig. 2 provides for the embodiment of the present invention is shown
It is intended to；
Electric bridge before temperature-compensating in the semiconductor gas sensor temperature compensation that Fig. 3 provides for the embodiment of the present invention
Structure chart；
Electric bridge after temperature-compensating in the semiconductor gas sensor temperature compensation that Fig. 4 provides for the embodiment of the present invention
Structure chart.
In figure, 1: multiple sensor test pressure seat；2: semiconductor gas sensor；3: high-low temperature chamber；4: Stress control
Instrument；5: pneumatic circuit；6: multichannel bridge test module；7: programmable power supply；8: circuit tester；9: industrial computer；G1: the first electricity
Resistance；G2: the second resistance；G3: the three resistance；G4: the four resistance；R1: the first compensates resistance；R2: the second compensates resistance；R3: the
Three compensate resistance；R4: the four compensates resistance；R5: the five compensates resistance；R6: the six compensates resistance；R7: the seven compensates resistance；Vi
+: reference voltage positive pole；Vi-: reference voltage negative pole；Vo+: output voltage positive pole；Vo-: output voltage negative pole.
Detailed description of the invention
The present invention is described in further detail below in conjunction with the accompanying drawings, to make those skilled in the art with reference to description literary composition
Word can be implemented according to this.
A kind of semiconductor gas sensor temperature compensation, refers to attached Fig. 1 and 2, comprises the following steps:
Step 1): control multichannel bridge test module by industrial computer and select a gas to pass in multiple gas sensors
Sensor is tested, and controlling high-low temperature chamber by industrial computer provides the temperature ring needed for temperature-compensating for multiple gas sensors
Border；
Step 2): control multiple sensor test air saddle by gas concentration controller and be supplied to multiple gas sensor
Gas concentration value needed for test, then passes through the gas sensor that programmable power supply selects to multichannel bridge test module and carries
For reference voltage, then pass through the initial number that circuit tester gathers the electric bridge of the gas sensor that multichannel bridge test module selects
According to；
Step 3): control described multiple sensor test air saddle by gas concentration controller and change the plurality of gas
Gas concentration value needed for sensor test, then gather, by circuit tester, the gas sensor that multichannel bridge test module selects
The primary data of electric bridge；
Step 4): controlling high-low temperature chamber by industrial computer is the temperature ring that multiple gas sensor changes needed for temperature-compensating
Border, then needed for controlling multiple sensor test by gas concentration controller air saddle is supplied to multiple gas sensor test
Gas concentration value, then passes through the initial number that circuit tester gathers the electric bridge of the gas sensor that multichannel bridge test module selects
According to；
Step 5): control multiple sensor test air saddle by gas concentration controller and change the survey of multiple gas sensors
Gas concentration value needed for examination, then gathered the electric bridge of the gas sensor that multichannel bridge test module selects by circuit tester
Primary data；
Step 6): by circuit tester to all primary datas are sent industrial computer, then by industrial computer according to primary data
Draw offset data, form the compensation resistor network of the electric bridge of gas sensor；
Step 7): increase on electric bridge and compensate resistance, formed and compensate resistor network；
Step 8): repetition step one is to step 8, until the most having formed the gas sensing in this passage in all passages
The compensation resistor network of the electric bridge of device, the structure chart of the electric bridge that temperature-compensating is forward and backward refers to accompanying drawing 3 and 4.
Further, in step one, the temperature environment needed for temperature-compensating is 20 DEG C.
Further, in step 2, the gas concentration value needed for test is zero.
Further, in step 3, the gas concentration value needed for test is full scale gas concentration value.
Further, in step 4, the temperature environment needed for temperature-compensating is 60 DEG C.
Further, in step 4, the gas concentration value needed for test is zero.
Further, in step 5, the gas concentration value needed for test is full scale gas concentration value.
Further, electric bridge includes the first resistance, the second resistance, the 3rd resistance and the 4th resistance, the first resistance and second
Resistant series, the 3rd resistance and the 4th resistant series, the first resistance after series connection and the second resistance and the 3rd after described series connection
Resistance and the 4th resistor coupled in parallel.
Further, compensating resistor network and include brachium pontis compensating unit and Bridge circuit compensation unit, brachium pontis compensating unit is used for
Resistance in certain brachium pontis is decreased or increased in electric bridge, and Bridge circuit compensation unit is for being decreased or increased the resistance of whole electric bridge
Resistance.
By described temperature compensation system for pressure sensors and temperature compensation thereof, it is possible to achieve pressure transducer in batches
Temperature-compensating, be respectively directed to each sensor and carry out at different temperatures testing and calculate the resistance of resistance in its electric bridge,
The compensation resistor network required for every sensor is accurately calculated by industrial computer according to the mathematical model compensated, and according to calculating
The data gone out are selected resistance welding and are formed compensation resistor network in electric bridge, and the precision temperature completing every sensor compensates.
Further, high-low temperature chamber is by the heater for changing affiliated semiconductor gas sensor gas sensitive temperature
Composition, described heater automatically adjusts heating power according to ambient temperature.When semiconductor gas sensor works, when environment temperature
During degree change, by changing the heater power of semiconductor gas sensor, the gas sensitive of sensor is made to be operated in temperature permanent
Fixed state, so that semiconductor gas sensor is not affected by ambient temperature, works more stable, and precision is higher.This case
Semiconductor gas sensor temperature compensation make this sensor have advantage easy to use, highly sensitive, that precision is high,
The method has advantage simple and practical, flexible, easy to spread.
Although embodiment of the present invention are disclosed as above, but it is not restricted in description and embodiment listed
Using, it can be applied to various applicable the field of the invention completely, for those skilled in the art, and can be easily
Realizing other amendment, therefore under the general concept limited without departing substantially from claim and equivalency range, the present invention does not limit
In specific details with shown here as the legend with description.
Claims (10)
1. a semiconductor gas sensor temperature compensation, it is characterised in that comprise the following steps:
Step 1): control multichannel bridge test module by industrial computer in multiple gas sensors, select a gas sensor
Testing, controlling high-low temperature chamber by industrial computer provides the temperature ring needed for temperature-compensating for the plurality of gas sensor
Border；
Step 2): control multiple sensor test air saddle by gas concentration controller and be supplied to the plurality of gas sensor
Gas concentration value needed for test, then passes through the gas sensor that programmable power supply selects to multichannel bridge test module and carries
For reference voltage, then pass through the initial number that circuit tester gathers the electric bridge of the gas sensor that multichannel bridge test module selects
According to；
Step 3): control described multiple sensor test air saddle by gas concentration controller and change the plurality of gas sensing
Gas concentration value needed for device test, then the electricity of the gas sensor that multichannel bridge test module selects is gathered by circuit tester
The primary data of bridge；
Step 4): controlling high-low temperature chamber by industrial computer is the temperature ring that the plurality of gas sensor changes needed for temperature-compensating
Border, then it is supplied to the survey of the plurality of gas sensor by gas concentration controller control described multiple sensor test air saddle
Gas concentration value needed for examination, then passes through circuit tester and gathers the electric bridge of the gas sensor that multichannel bridge test module selects
Primary data；
Step 5): control described multiple sensor test air saddle by gas concentration controller and change the plurality of gas sensing
Gas concentration value needed for device test, then the electricity of the gas sensor that multichannel bridge test module selects is gathered by circuit tester
The primary data of bridge；
Step 6): by circuit tester to all primary datas are sent industrial computer, then by industrial computer according to described primary data
Draw offset data, form the compensation resistor network of the electric bridge of described gas sensor；
Step 7): increase on electric bridge and compensate resistance, formed and compensate resistor network；
Step 8): repetition step one to step 8, until the gas sensor the most formed in all passages in this passage
The compensation resistor network of electric bridge.
Semiconductor gas sensor temperature compensation the most according to claim 1, it is characterised in that described step one
In, the temperature environment needed for temperature-compensating is 20 DEG C.
Semiconductor gas sensor temperature compensation the most according to claim 1, it is characterised in that described step 2
In, the gas concentration value needed for test is zero.
Semiconductor gas sensor temperature compensation the most according to claim 1, it is characterised in that described step 3
In, the gas concentration value needed for test is full scale gas concentration value.
Semiconductor gas sensor temperature compensation the most according to claim 1, it is characterised in that described step 4
In, the temperature environment needed for temperature-compensating is 60 DEG C.
Semiconductor gas sensor temperature compensation the most according to claim 1, it is characterised in that described step 4
In, the gas concentration value needed for test is zero.
Semiconductor gas sensor temperature compensation the most according to claim 1, it is characterised in that described step 5
In, the gas concentration value needed for test is full scale gas concentration value.
Semiconductor gas sensor temperature compensation the most according to claim 1, it is characterised in that described electric bridge includes
First resistance, the second resistance, the 3rd resistance and the 4th resistance, described first resistance and described second resistant series, the described 3rd
Resistance and described 4th resistant series, the first resistance after described series connection and the second resistance and the 3rd resistance after described series connection and
4th resistor coupled in parallel.
Semiconductor gas sensor temperature compensation the most according to claim 1, it is characterised in that described compensation resistance
Network includes that brachium pontis compensating unit and Bridge circuit compensation unit, described brachium pontis compensating unit are used for being decreased or increased certain bridge in electric bridge
Resistance in arm, described Bridge circuit compensation unit is for being decreased or increased the resistance of whole electric bridge.
Semiconductor gas sensor temperature compensation the most according to claim 1, it is characterised in that high-low temperature chamber is
Being made up of the heater being used for changing affiliated semiconductor gas sensor gas sensitive temperature, described heater is according to ambient temperature
Automatically heating power is adjusted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201610695562.1A CN106290487A (en) | 2016-08-18 | 2016-08-18 | A kind of semiconductor gas sensor temperature compensation |
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| CN201610695562.1A CN106290487A (en) | 2016-08-18 | 2016-08-18 | A kind of semiconductor gas sensor temperature compensation |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5740640A (en) * | 1980-08-22 | 1982-03-06 | Hajime Kano | Temperature compensating method in humidity measuring device |
| WO2003016877A1 (en) * | 2001-07-26 | 2003-02-27 | Avista Laboratories, Inc. | Method of compensating a mos gas sensor, method of manufacturing a mos gas sensor, mos gas sensor, and fuel cell system |
| CN101975804A (en) * | 2010-08-20 | 2011-02-16 | 郑州炜盛电子科技有限公司 | Semiconductor gas sensor and temperature compensation method |
| CN102297882A (en) * | 2011-05-18 | 2011-12-28 | 海南大学 | Temperature compensation circuit for semiconductor ozone sensor and compensation method thereof |
| CN102680518A (en) * | 2012-05-31 | 2012-09-19 | 河南汉威电子股份有限公司 | Compensation type gas sensor and humiture compensation method thereof |
| CN103048085A (en) * | 2011-10-13 | 2013-04-17 | 江苏恩泰传感器有限公司 | Temperature compensation system of pressure sensor and temperature compensation method thereof |
| CN103597330A (en) * | 2011-05-31 | 2014-02-19 | 独立行政法人科学技术振兴机构 | Method for temperature compensation in sensor, computation program for method for temperature compensation, computation processing device, and sensor |
-
2016
- 2016-08-18 CN CN201610695562.1A patent/CN106290487A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5740640A (en) * | 1980-08-22 | 1982-03-06 | Hajime Kano | Temperature compensating method in humidity measuring device |
| WO2003016877A1 (en) * | 2001-07-26 | 2003-02-27 | Avista Laboratories, Inc. | Method of compensating a mos gas sensor, method of manufacturing a mos gas sensor, mos gas sensor, and fuel cell system |
| CN101975804A (en) * | 2010-08-20 | 2011-02-16 | 郑州炜盛电子科技有限公司 | Semiconductor gas sensor and temperature compensation method |
| CN102297882A (en) * | 2011-05-18 | 2011-12-28 | 海南大学 | Temperature compensation circuit for semiconductor ozone sensor and compensation method thereof |
| CN103597330A (en) * | 2011-05-31 | 2014-02-19 | 独立行政法人科学技术振兴机构 | Method for temperature compensation in sensor, computation program for method for temperature compensation, computation processing device, and sensor |
| CN103048085A (en) * | 2011-10-13 | 2013-04-17 | 江苏恩泰传感器有限公司 | Temperature compensation system of pressure sensor and temperature compensation method thereof |
| CN102680518A (en) * | 2012-05-31 | 2012-09-19 | 河南汉威电子股份有限公司 | Compensation type gas sensor and humiture compensation method thereof |
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Application publication date: 20170104 |