CN106289593A - The capacitive pressure transducer of vertical moving electrode - Google Patents
The capacitive pressure transducer of vertical moving electrode Download PDFInfo
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- CN106289593A CN106289593A CN201610896890.8A CN201610896890A CN106289593A CN 106289593 A CN106289593 A CN 106289593A CN 201610896890 A CN201610896890 A CN 201610896890A CN 106289593 A CN106289593 A CN 106289593A
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- electrode
- moving electrode
- capacitive pressure
- pressure transducer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
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- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
A kind of capacitive pressure transducer of vertical moving electrode, solve the moving electrode effect of weight of existing capacitive pressure transducer, produce non-linear greatly, the problems such as precision is low, including matching can, the fixed electrode fitted together with matching can, tubulose extraction electrode, moving electrode and impulse mouth, it is characterized in that: two described moving electrodes utilize the graded seal ring with cutting edge weld bond and tighten fixing with the clamping of public weld nest impulse mouth, together with being welded and fixed with the cutting edge weld bond on the matching can with interior collar extension of fixed electrode, and make the pressurized direction of displacement of two moving electrodes vertical with gravity direction, by lead-in wire, the tubulose extraction electrode of moving electrode is connected with each other, constitute the capacitive pressure transducer that the moving electrode that two capacitive pressure transducers stand is in parallel.Its reasonable in design, has the most effectively avoided moving electrode effect of weight, reduces non-linear, and allows gauge pressure measure and improve resolution and precision, and effective range also can be made significantly to extend to little micro-direction.
Description
Technical field
The present invention relates to a kind of capacitive pressure transducer, a kind of moving electrode allowing capacitance pressure transducer stands
, multiple capacitive pressure transducers that i.e. the pressurized direction of displacement of moving electrode is vertical with gravity direction or moving electrode stands are in parallel
The capacitive pressure transducer of vertical moving electrode.It can be widely applied to microelectronics, uranium enrichment etc. and needs high reliability, little micro-range
High-acruracy survey.
Background technology
The principle of existing capacitive pressure transducer, is mostly based on plane-parallel capacitor.Such capacitive pressure transducer
In advantage in terms of little micro-pressure measurement.Capacitive pressure transducer is provided with fixed electrode and moving electrode, after moving electrode pressurized, relatively
It is subjected to displacement in fixed electrode, makes electric capacity change relatively occur, after its processing and amplifying, corresponding to pressure, capacitive pressure transducer
There is output.Moving electrode typically makes of invar property thin film, can regard as periphery fixed, pressurized can move freely.Such as Fig. 4
Shown single capacitive pressure transducer, although moving electrode is the thinnest, but the pressure of moving electrode deadweight generation is whole or decomposable asymmetric choice net
When the pressure component gone out overlaps with gravity direction, sensor is produced a very large impact.If Fig. 4 is for the moving electrode 1 level used time, from
The maximum pressure value that Beijing South Maxpower Technology Co. Ltd produces is: moving electrode thickness is multiplied by the proportion of moving electrode material.With minimum range be 0～1.5kPa(do
Formula) as a example by capacitive pressure transducer, about thick 80 μm of moving electrode, the pressure that can produce is about 8Pa～10Pa to the maximum, and it is relative
Impact is 0.5%F.S～0.6%F.S to the maximum；For the capacitive pressure transducer that minimum range is 0～100Pa, moving electrode thickness is
About 50 μm, it is about 5Pa that gravity energy produces maximum pressure, and maximum effect has reached 5%F.S.Equally, it is exhausted for minimum range
Electric capacity absolute pressure transducer to pressure 15Pa, moving electrode is also 20 μ m-thick, also produces the pressure of 2Pa, and no matter this electric capacity is exhausted
Upwards the most downward to the moving electrode pressurized direction of displacement of pressure transducer, the non-linear of ± 2Pa is the biggest.This impact is leaned on
Electronic circuit correction is impossible.For the moving electrode effect of weight of existing capacitive pressure transducer, do not cause and set
Meter and the attention of user.For the capacitive pressure transducer of gauge pressure (relatively large air pressure), after installation, as moving electrode is horizontal
During state, necessarily leading to null drift, just with the potentiometer zeroising on circuit, basic no matter it affects.Also as a example by Fig. 4, electricity
When the range of appearance pressure transducer is 0～100Pa, the thickness of moving electrode 1 is that 50 μm can produce the non-linear of 5%F.S.Namely
Persuading electrode 1 pressurized direction of displacement is to move up and down, and when band collar extension and weld nest impulse mouth 18 are downward, applies malleation from impulse mouth
Power, the pressure direction that this pressure direction produces with moving electrode deadweight is contrary.The tension force of moving electrode is ignored with electrostatic field electrostatic force
Not-time, the pressure of 0～about 5Pa, owing to there is inertia, moving electrode is not subjected to displacement.Dead band it is referred to as in engineering, or
Say maximum distinguishable be 5Pa pressure above.If allowing impulse mouth upwards, when moving electrode is the level of state, this sensor is for 0
～during-5Pa measurement, the most uncertain.± 5Pa is irresistible non-linear.Mechanics from capacitive pressure transducer pressurized
Analysis concludes that if can allow moving electrode pressurized direction of displacement vertical with gravity direction (orthogonal) or moving electrode stand is multiple
During capacitive pressure transducer parallel connection, it is possible to all or greatly reduce moving electrode effect of weight.
Summary of the invention
It is an object of the invention to provide the capacitive pressure transducer of a kind of vertical moving electrode, solve existing capacitive pressure
The moving electrode effect of weight of sensor, produce non-linear greatly, the problems such as precision is low, its reasonable in design, the most effectively avoid
Moving electrode effect of weight, reduces non-linear, and allows gauge pressure measure and improve resolution and precision, also can make effective range
Significantly extend to little micro-direction.
The technical solution adopted in the present invention is: the capacitive pressure transducer of this vertical moving electrode includes matching can, with
Fixed electrode, tubulose extraction electrode, moving electrode and the impulse mouth that matching can fits together, is characterized in that: described in two
Moving electrode utilizes the graded seal ring with cutting edge weld bond and tightens fixing, with fixed electrode with the clamping of public weld nest impulse mouth
Cutting edge weld bond on matching can with interior collar extension is welded and fixed together, and allow the pressurized direction of displacement of two moving electrodes with
Gravity direction is vertical, is connected with each other by the tubulose extraction electrode of moving electrode by lead-in wire, constitutes two capacitive pressure transducers and stands
The capacitive pressure transducer that the moving electrode is in parallel.
It is fixed with the described with public weld nest impulse mouth of two pressurized direction of displacement moving electrodes vertical with gravity direction
Being assembled in the shielding case with bubble and scale, the end with public weld nest impulse mouth is had by corrugated tube extension connection
Use and impulse mouth is installed, be provided with levelling gear using to install on impulse mouth, make being subject to of moving electrode by adjusting bolt fine setting
Pressure direction of displacement is vertical with gravity direction.
Described moving electrode welds together under inert gas shielding with fixed electrode.
The described graded seal ring with cutting edge weld bond of clamping moving electrode with used with public weld nest impulse mouth
Material is all identical with the material of moving electrode.
The present invention has the advantage that and good effect is: owing to two moving electrodes of the present invention utilize with cutting edge weld bond
Graded seal ring with tighten fixing, and on the matching can with interior collar extension of fixed electrode with the clamping of public weld nest impulse mouth
Cutting edge weld bond is welded and fixed together, is to allow moving electrode found use, makes moving electrode pressurized direction of displacement vertical with gravity direction, institute
With its reasonable in design, effectively avoid moving electrode effect of weight.Particularly allow gauge pressure measure and improve resolution and precision, make
Measure for absolute pressure, also eliminate non-linear effects, improve precision.But, for range 0～below 200Pa electricity
Holding pressure transducer, during measurement, the relative capacity variable quantity of single capacitive pressure transducer as shown in Figure 4 is the least, in order to carry
The electric capacity relative variation of high sensor, allows two capacitive pressure transducer parallel connections, as it is shown in figure 1, not only allow moving electrode stand,
And, capacitance change is multiplied, and makes sensitivity be multiplied, for making the most single capacitive pressure transducer of range,
In the case of the range upper limit is constant, effective range also can be made significantly to extend to little micro-direction.Therefore, multiple capacitive pressure is allowed
The moving electrode of the capacitive pressure transducer of sensor parallel all stands, and can make beneficial effect superposition, give full play of capacitive pressure
The due function of sensor.
For range 0～below 200Pa capacitive pressure transducer, if only by Fig. 1, allow impulse mouth downwards or
The function upwards installed is the most imperfect, is assembled in the shielding case with bubble and scale, with public weld nest impulse
The end of mouth extends connection by corrugated tube has use to install impulse mouth, is provided with levelling gear using on installation impulse mouth,
The pressurized direction of displacement being made moving electrode by adjustment bolt fine setting is vertical with gravity direction, makes structure as shown in Figure 3, useful
Effect can be more preferably.
In sum, the present invention solves the moving electrode effect of weight of existing capacitive pressure transducer, produces non-linear
Greatly, the problem such as precision is low.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the invention will be further described.
Fig. 1 is a kind of structural representation that the capacitive pressure transducer by two same sizes of the present invention forms；
Fig. 2 is I structure for amplifying schematic diagram of Fig. 1；
Fig. 3 is that Fig. 1 is with shielding case and a kind of structural representation of levelling gear；
Fig. 4 is a kind of structural representation of single capacitive pressure transducer；
Fig. 5 is II structure for amplifying schematic diagram of Fig. 4.
Sequence number explanation in figure: 1 moving electrode, 2 conductive membrane layers, 3 insulating film layers, 4 sapphire insulators, 5 tubuloses draw electricity
Impulse mouth, 11 ripples are installed in pole, 6 matching cans, 7 brazing layers, 8 graded seal rings, the 9 public weld nest impulse mouths of band, 10 uses
Pipe, 12 supports, 13 adjustment bolts, 14 anti-return nuts, 15 shielding cases, 16 air-bubble levels, 17 lead-in wires, 18 band collar extension weld nest impulses
Mouthful.
Detailed description of the invention
The concrete structure of the present invention is described in detail according to Fig. 1～5.The capacitive pressure transducer of this vertical moving electrode includes
Join shell 6, the part such as fixed electrode, tubulose extraction electrode 5, moving electrode 1 and impulse mouth fitted together with matching can 6.Wherein
It is coated with conductive membrane layer 2 on the parabola of the sapphire insulator 4 of fixed electrode, conductive membrane layer 2 is coated with insulating film layer 3；
Fixed electrode plate by conductive membrane layer 2, insulating film layer 3, the sapphire insulator 4 of soldering matched seal, tubulose extraction electrode 5,
Join shell 6 to form.Two moving electrodes 1 utilize the graded seal ring 8 with cutting edge weld bond to clamp with public weld nest impulse mouth 9
Tighten fixing, be welded and fixed with the cutting edge weld bond on the matching can 6 with interior collar extension of fixed electrode together with, and allow two move
The pressurized direction of displacement of electrode 1 is vertical with gravity direction.For improving welding quality, above-mentioned moving electrode 1 is held tighten fixing after,
Weld together under inert gas shielding with fixed electrode.The graded seal ring 8 with cutting edge weld bond of clamping moving electrode 1 and band
The material having public weld nest impulse mouth 9 to be used is all identical with the material of moving electrode 1, is all to use same invar property corrosion-resistant
Nickel-base alloy (Inconel X-750) makes.By lead-in wire 17, the tubulose extraction electrode 5 of moving electrode 1 is connected with each other, constitutes two
The capacitive pressure transducer that the moving electrode 1 that individual capacitive pressure transducer stands is in parallel.
In order to ensure to such as 10-3The measurement of below Pa is accurately reliable, as shown in Fig. 3, will be fixed with two pressurized displacements
The moving electrode 1 that direction is vertical with gravity direction be assembled in the shielding with bubble and scale 16 with public weld nest impulse mouth 9
In shell 15, with public weld nest impulse mouth 9 end by corrugated tube 11 extend connection have use install impulse mouth 10, use
Install and be provided with levelling gear on impulse mouth 10, make pressurized direction of displacement and the gravity of moving electrode 1 by adjusting bolt 13 fine setting
Direction is vertical.
Levelling gear mainly by be arranged on support 12 with 90 degree distribution adjustment bolt 13, anti-return nut 14, ripples
Pipe 11, air-bubble level 16 etc. form.Concrete operation step is as follows: after using installation impulse mouth 10 to install downward or upward,
It is finely adjusted with four the adjustment bolts 13 being arranged on support 12, i.e. with adjustment bolt 13 two-by-two to rotation, withstands on the public weldering of band
On seat impulse mouth 9, first adjust what a direction, screw anti-return nut 14, then adjust another direction, make the pressurized displacement of moving electrode
Direction is vertical with gravity direction.From the air-bubble level 16(water being arranged on the shell plane relative with public weld nest impulse mouth 9
Leveling ruler is become reconciled has setting on multiple instruments equipment) determine whether to mix up, it is ensured that moving electrode stands.When impulse mouth is upwards installed,
An available small reflector observes the bubble situation of air-bubble level 16, is adjusted.
It is the structure of single capacitive pressure transducer shown in Fig. 4, band collar extension and weld nest impulse mouth 18 and moving electrode 1, transition
The material of welding ring 8 is identical, is all that the corrosion-resistant nickel-base alloy of invar property makes.On graded seal ring 8 therein, matching can 6
It is both provided with cutting edge weld bond, matching can 6 is provided with interior collar extension, be reserved expansion clearance, be also between evacuation air flue
Gap, in order to buffer swelling stress and welded stress.
Claims (4)
1. a capacitive pressure transducer for vertical moving electrode, including matching can, determines electricity with matching can fits together
Pole, tubulose extraction electrode, moving electrode and impulse mouth, it is characterised in that: two described moving electrodes utilize the mistake with cutting edge weld bond
Cross welding ring and tighten fixing, with the sword on the matching can with interior collar extension of fixed electrode with the clamping of public weld nest impulse mouth
Mouthful weld bond is welded and fixed together, and makes the pressurized direction of displacement of two moving electrodes vertical with gravity direction, and by lead-in wire, general moves
The tubulose extraction electrode of electrode is connected with each other, and constitutes the capacitive pressure that the moving electrode that two capacitive pressure transducers stand is in parallel
Sensor.
The capacitive pressure transducer of vertical moving electrode the most according to claim 1, it is characterised in that: it is fixed with two pressurizeds
The described of the moving electrode that direction of displacement is vertical with gravity direction is assembled in bubble and scale with public weld nest impulse mouth
Shielding case in, with public weld nest impulse mouth end by corrugated tube extend connection have use install impulse mouth, use
Install and be provided with levelling gear on impulse mouth, make by adjusting bolt fine setting the pressurized direction of displacement of moving electrode hang down with gravity direction
Directly.
The capacitive pressure transducer of vertical moving electrode the most according to claim 1, it is characterised in that: described moving electrode is with fixed
Electrode welds together under inert gas shielding.
The capacitive pressure transducer of vertical moving electrode the most according to claim 1, it is characterised in that: the band of clamping moving electrode
Have the described graded seal ring of cutting edge weld bond and the material used with public weld nest impulse mouth all with the material phase of moving electrode
With.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610896890.8A CN106289593A (en) | 2016-10-14 | 2016-10-14 | The capacitive pressure transducer of vertical moving electrode |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610896890.8A CN106289593A (en) | 2016-10-14 | 2016-10-14 | The capacitive pressure transducer of vertical moving electrode |
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| Publication Number | Publication Date |
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| CN106289593A true CN106289593A (en) | 2017-01-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610896890.8A Pending CN106289593A (en) | 2016-10-14 | 2016-10-14 | The capacitive pressure transducer of vertical moving electrode |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4572000A (en) * | 1983-12-09 | 1986-02-25 | Rosemount Inc. | Pressure sensor with a substantially flat overpressure stop for the measuring diaphragm |
| CN2136465Y (en) * | 1992-10-21 | 1993-06-16 | 清华大学 | Capacitive membrane pressure transducer with sputtering electrode |
| CN102288360A (en) * | 2010-06-18 | 2011-12-21 | 戴德仁 | Capacitance type vacuum pressure sensor |
| CN203037405U (en) * | 2012-12-17 | 2013-07-03 | 上海劲飞特殊钢科技有限公司 | Floated differential capacitance sensor |
| CN203259296U (en) * | 2013-05-13 | 2013-10-30 | 广州森纳士仪器有限公司 | Capacitance-type sensor with quick response, sensing apparatus with quick response and sensing system with quick response |
| CN105841875A (en) * | 2014-09-30 | 2016-08-10 | 罗斯蒙特公司 | Differential pressure sensor with high pressure capabilities |
| CN206161204U (en) * | 2016-10-14 | 2017-05-10 | 沈阳市传感技术研究所 | Capacitive pressure sensor of vertical dynamic electricity utmost point |
-
2016
- 2016-10-14 CN CN201610896890.8A patent/CN106289593A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4572000A (en) * | 1983-12-09 | 1986-02-25 | Rosemount Inc. | Pressure sensor with a substantially flat overpressure stop for the measuring diaphragm |
| CN2136465Y (en) * | 1992-10-21 | 1993-06-16 | 清华大学 | Capacitive membrane pressure transducer with sputtering electrode |
| CN102288360A (en) * | 2010-06-18 | 2011-12-21 | 戴德仁 | Capacitance type vacuum pressure sensor |
| CN203037405U (en) * | 2012-12-17 | 2013-07-03 | 上海劲飞特殊钢科技有限公司 | Floated differential capacitance sensor |
| CN203259296U (en) * | 2013-05-13 | 2013-10-30 | 广州森纳士仪器有限公司 | Capacitance-type sensor with quick response, sensing apparatus with quick response and sensing system with quick response |
| CN105841875A (en) * | 2014-09-30 | 2016-08-10 | 罗斯蒙特公司 | Differential pressure sensor with high pressure capabilities |
| CN206161204U (en) * | 2016-10-14 | 2017-05-10 | 沈阳市传感技术研究所 | Capacitive pressure sensor of vertical dynamic electricity utmost point |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB03 | Change of inventor or designer information |
Inventor after: Duan Xianghua Inventor after: Yu Nan Inventor after: Duan Lei Inventor after: Xu Meiqiang Inventor before: Duan Xianghua Inventor before: Yu Nan Inventor before: Duan Lei |
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| CB03 | Change of inventor or designer information | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170104 |
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| WD01 | Invention patent application deemed withdrawn after publication |