CN106271063A - A kind of method and device of the double cavity of induced with laser - Google Patents
A kind of method and device of the double cavity of induced with laser Download PDFInfo
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- CN106271063A CN106271063A CN201610765719.3A CN201610765719A CN106271063A CN 106271063 A CN106271063 A CN 106271063A CN 201610765719 A CN201610765719 A CN 201610765719A CN 106271063 A CN106271063 A CN 106271063A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/146—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
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- Optics & Photonics (AREA)
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Abstract
The present invention discloses the method and device of the double cavity of a kind of induced with laser.When bombardment with laser beams is in liquid medium, at laser focusing and material surface to be processed produces cavity simultaneously, therefore the strong shock wave superposition that the induction strong shock wave of the cavity in liquid medium and material surface cavity to be processed induction produce, repeatedly or simultaneously act on material surface to be processed, improve the characteristics such as material surface intensity, having the advantages such as impact pressure is high, material oxidation degree is low, therefore apparatus and method based on the double cavity of a kind of induced with laser are with a wide range of applications.
Description
Technical field
The invention belongs to laser technology field, particularly relate to the method and device of the double cavity of a kind of induced with laser.
Background technology
Induced with laser cavity process technology be utilize cavitation oscillation and the shock wave produced of crumbling and fall in surface of the work, with
The features such as in air, laser processing technology compares, and has material oxidation degree low, and heat effect impact is little.Induced with laser is empty at present
Bubble technology mainly comprises induced with laser liquid medium generation cavity and is processed and the material to be processed in laser focusing liquid medium
Material surface is processed.The former has that controllability is good, location positioning is accurate and the advantage such as impact pressure is high;The latter is situated between by liquid
The advantages such as matter attachment surface plasma extends, and has processing effect good, and efficiency is high.
The complexity interacted with liquid medium due to laser, is difficult to thorough Study of Laser induction cavity technology.If
Two kinds of induced with laser cavity technology can be comprehensively utilized, produce double cavity, the shock wave of stackable pair of cavity induction, processing effect times
Increase.
Summary of the invention
It is an object of the invention to provide the method and device of the double cavity of a kind of induced with laser for the problems referred to above.Work as laser beam
Radiate in liquid medium, at laser focusing and material surface to be processed produces cavity, the therefore cavity in liquid medium simultaneously
The strong shock wave superposition that induction strong shock wave and material surface cavity to be processed induction produce, repeatedly or simultaneously act on and treat
Rapidoprint surface, improves the characteristics such as material surface intensity, has the advantages such as impact pressure is high, material oxidation degree is low, therefore
Apparatus and method based on the double cavity of a kind of induced with laser are with a wide range of applications.
The present invention is to realize above-mentioned technical purpose by techniques below means.
A kind of method of the double cavity of induced with laser, it is characterised in that: material to be processed soaks and is fixed in liquid medium, swashs
Light acts perpendicularly to liquid medium and material surface to be processed, and meets:
J=J0+J1+ K H+Q and H > R0+R1
Double cavity is produced at laser focusing point and material surface to be processed;
Wherein: J is laser energy, J0It is the breakdown threshold of liquid medium, J1For the breakdown threshold of material surface to be processed, K
For laser unit length loss factor in liquid medium, Q is laser energy degree more than needed, and H is that laser focusing point is to material to be processed
The distance on material surface, R0It is J for laser energy0The cavity radius that produces in liquid medium of laser action, R1For laser energy
For J1The radius of cavity that produces in material surface to be processed of laser action.
Preferably, described Q value is 0-200mJ/cm2。
Preferably, described material to be processed is the one in aluminum, copper, ferrum, zinc or titanium alloy.
Preferably, the one during described liquid medium is water, silicone oil or electrolyte solution.
The device of the double cavity of a kind of induced with laser, including laser control panel, laser instrument, reflecting mirror, laser beam expanding system
System, described laser beam expanding system includes laser beam expander and condenser lens, it is characterised in that: described laser control panel is with sharp
Light device is connected, and controls the output of laser device laser;The light beam that described laser instrument sends reflexes to laser beam expanding through reflecting mirror
On device;It is at H that the output beam of laser beam expander is focused on distance above material surface to be processed by described condenser lens;Described
Material to be processed soaks and is fixed in the container holding liquid medium;By laser control panel, laser energy parameter is set
For:
J=J0+J1+ K H+Q, regulates described container position and meets H > R0+R1;
Wherein: J is laser energy parameter, J0It is the breakdown threshold of liquid medium, J1Threshold is punctured for material surface to be processed
Value, K is laser unit length loss factor in liquid medium, and Q is laser energy degree more than needed, and H is that laser focusing point is to be added
The distance of work material surface, R0It is J for laser energy0The cavity radius that produces in liquid medium of laser action, R1For laser
Energy is J1The radius of cavity that produces in material surface to be processed of laser action.
Preferably, this device also includes that computer, described computer are connected with described laser control panel.
Preferably, this device also includes three-dimensional mobile platform and three-dimensional mobile platform control panel, and described container is as three
On dimension mobile platform, described three-dimensional mobile platform control panel is connected with described computer and described three-dimensional mobile platform respectively.
Preferably, this device also includes expanding focusing system control panel, described in expand focusing system control panel respectively
With described computer and described laser beam expanding system.
Preferably, described material to be processed is titanium alloy, and described liquid medium is aqueous medium, wherein J=150mJ, H=
10mm。
Owing to processing operation is carried out in liquid medium, the method and device of the double cavity of a kind of induced with laser has and following has
Benefit effect:
1. Compound Machining is effective: the double cavitys in liquid medium are expanding and in compression process, the strong shock wave of generation
Both superpositions, repeatedly or simultaneously act on material surface to be processed, it is achieved the Compound Machining of material.It is double empty due to produce
Bubble, shock strength is strong, acts on great efforts, and the pattern modification etc. treating rapidoprint surface has positive role.
The regulation of 2.H value can produce more significantly double cavity: the compound of material to be processed that be produced as of double cavitys adds
Work provides condition.Obtaining suitable H-number by regulation, can produce more significantly double cavity, shock strength is higher, for
The material to be processed that some hardness are high, still has well processed effect.
3. reduce material oxidation degree: owing to processing operation is carried out in liquid medium, oxygen content is low, the course of processing
In, occur that large area material oxidation to be processed probability is little, reduce the degree of oxidation of material.
4. heat effect is little.The good heat conduction effect of liquid medium, the heat that laser produces with material effects is quickly exported, and treats
Rapidoprint surface heat reduces rapidly.
Accompanying drawing explanation
Fig. 1 is the double cavity installation drawing of a kind of induced with laser of the present invention;
Fig. 2 (a) and Fig. 2 (b) is existing induced with laser list cavity mode schematic diagram;
Fig. 3 is double cavity producing method schematic diagrams in liquid medium;
Fig. 4 is laser focusing cavitation pitting shock wave detection figure;
Fig. 5 is material surface cavity shock wave detection figure to be processed;
Fig. 6 is double cavity detection pulse train figures in liquid medium;
Fig. 7 is single cavity detection pulse train figure in liquid medium;
Fig. 8 is material surface list cavity to be processed detection pulse train figure in liquid medium.
In figure: 1-computer;2-laser control panel;3-laser instrument;4-reflecting mirror;5-expands focusing system;51-swashs
Light beam expander;52-condenser lens;6-glass container;7-liquid medium;8-material to be processed;9-three-dimensional mobile platform;10-tri-
Dimension mobile platform control panel;11-expands focusing system control panel;12-material surface to be processed cavity;13-laser focusing
Cavitation pitting.
Detailed description of the invention
Below in conjunction with the accompanying drawings and specific embodiment the present invention is further illustrated, but protection scope of the present invention is also
It is not limited to this.
Below with reference to embodiment, technical solution of the present invention is further described.
It is illustrated in figure 1 the installation drawing of the double cavity of a kind of induced with laser of the present invention, including computer 1, laser instrument control
Panel 2 processed, laser instrument 3, reflecting mirror 4, expand focusing system 5, laser beam expander 51, condenser lens 52, glass container 6, liquid
Medium 7, material to be processed 8, three-dimensional mobile platform 9, three-dimensional mobile platform control panel 10 and expand focusing system control panel
11.Described computer 1 connecting laser control panel 2, three-dimensional mobile platform control panel 10 and expand focusing system chain of command
Plate 11, directly to laser control panel 2, three-dimensional mobile platform control panel 10 and the tune expanding focusing system control panel 11
Control, controls the laser output of laser instrument 3, the light beam moving and expanding focusing system 5 of three-dimensional mobile platform 9 three-dimensional indirectly
Expand and focus on.Described laser control panel 2 is connected with computer 1 and laser instrument 3 respectively, controls laser instrument 3 laser
Output.Described laser instrument 3 is positioned at the high order end of light path, and the light beam that laser instrument 3 sends reflexes to expand focusing system through reflecting mirror 4
On system 5.The described focusing system 5 that expands comprises laser beam expander 51 and condenser lens 52, and reflection light beam is successively through laser beam expanding
Device 51 and condenser lens 52, radiate in liquid medium 7, and now the spot size of light beam becomes big, is beneficial to produce spherical cavity.Institute
State glass container 6 and fill with liquid medium 7, be placed in three-dimensional mobile platform 9 fixing.Described material to be processed 8 is placed in glass container 6
Interior fixing.Described three-dimensional mobile platform 9 is connected with three-dimensional mobile platform control panel 10, it is achieved glass container 6 three-dimensional
Mobile.Described three-dimensional mobile platform control panel 10 is connected with computer 1 and three-dimensional mobile platform 9 respectively, is used for controlling three-dimensional
The three-dimensional of mobile platform 9 moves.Described expand focusing system control panel 11 respectively with computer 1 and expand focusing system 5 phase
Even, for controlling the shape of cavity.
The method of the double cavity of a kind of induced with laser of the present invention, is to be placed in three-dimensional mobile platform 9 by glass container 6 admittedly
Fixed, material 8 to be processed is put into glass container 6 and is fixed, and injects in liquid medium 7 to glass container 6, and laser is through expanding focusing
Time after system 5 through liquid medium 7 to material 8 surface to be processed, the suitable H-number chosen via above-mentioned steps and laser parameter
J, can produce cavity, i.e. induced with laser double empty at material 8 surface H to be processed with region, material 8 surface to be processed simultaneously
Bubble, the strong shock wave two that then the induction strong shock wave of the cavity in liquid medium 7 and the induction of material to be processed 8 surface cavitation produce
Person's superposition, repeatedly or simultaneously act on material 8 surface to be processed, it is achieved the processing of material surface to be processed.
The shock wave that the double cavity of induced with laser produces is much stronger than single cavity.It is illustrated in figure 2 existing induced with laser list cavity
Mode schematic diagram, has two kinds, and one is that the material to be processed 8 as shown in Fig. 2 (a) is horizontally placed in glass container 6, and two is such as figure
Material to be processed 8 shown in 2 (b) is vertically placed in glass container 6, fits tightly in the left wall of glass container 6.Both sides
Formula all can produce single cavity, utilizes single cavitation oscillation and the strong shock wave produced of crumbling and fall, it is achieved the laser of material surface to be processed
Processing.
It is illustrated in figure 3 in liquid medium double cavity schematic diagram.When choosing suitable laser energy density, liquid medium 7
Breakdown at focal point, produce material surface cavity 12 to be processed and laser focusing cavitation pitting 13, the thump that two cavitys produce
Ripple superposition, repeatedly or simultaneously act on material 8 surface to be processed, has the features such as impact pressure is high, material oxidation degree is low.
As shown in Figure 4 and Figure 5, respectively laser focusing cavitation pitting shock wave detection figure and with material surface cavity to be processed
Shock wave detection figure.Due to the visual field limitation of high-frequency detection light beam, the shock wave of two positions can only be separately detected, the most instead
The shock wave mirroring the double cavity of induced with laser can produce high high forces, it is achieved the impact processing of the double cavity of induced with laser.
The double cavity laser processing of one of the present invention, specifically includes following steps:
1) putting equipment: put according to installation drawing, connection equipment, and after glass container 6 is placed in three-dimensional mobile platform 9
Fixing;
2) fixing material to be processed: material 8 to be processed is put into glass container 6 and fixes.
3) regulation H-number: H-number refers to the distance on laser focusing point extremely material effects surface to be processed.Moved by regulation three-dimensional
Moving platform 9 realizes different H values.Notice that H-number somewhat takes greatly, H > R should be met0+R1, R0It is J for laser energy0Laser
Act on the cavity radius produced in liquid medium, R1It is J for laser energy1Laser action produce in material surface to be processed
The radius of cavity;
4) liquid medium is injected: use measuring cup to be slowly injected in liquid medium 7 to glass container 6, it is to avoid liquid internal is empty
Bubble produces, and liquid level is positioned at glass container 6 topmost;
5) laser parameter is set: laser energy parameter J is set, makes J=J0+J1+ K H+Q, J0It is the laser of liquid medium 7
Breakdown threshold, J1For the laser breakdown threshold value of material surface to be processed, K is laser unit length loss system in liquid medium 7
Number, Q is laser energy degree more than needed, is obtained by limited number of time experiment, and general value is 0-200mJ/cm2;
6) double cavity is produced: according to the parameter value of above-mentioned setting, open laser instrument, input parameter value.Laser beam focus liquid
After body medium 7, radiate in material surface to be processed, produce double cavity simultaneously.The strong shock wave superposition that double cavitys produce simultaneously or
It is iteratively operating on material surface to be processed.
Embodiment 1
Implementing the laser instrument of processing, λ=1064nm, pulsewidth is 10ns, and laser repetition rate is 1Hz.
Choosing titanium alloy as material to be processed, liquid medium is aqueous medium.
Glass container is placed in three-dimensional mobile platform and fixes.Material horizontal to be processed is positioned in glass container also
Fixing.Regulating H-number by three-dimensional mobile platform, taking H=10mm is the experiment experience value producing double cavity.Measuring cup is used slowly to note
Entering liquid medium in glass container, it is to avoid liquid internal cavity produces, liquid level is positioned at glass container topmost, makes aqueous medium fill
Full whole glass container.
Regulation expands focusing system, and experiment records the breakdown threshold J of aqueous medium0=68mJ, the laser breakdown threshold of titanium alloy
Value is for 55mJ, and consulting reference materials and understanding the iraser attenuation quotient of 1064nm is 0.8-0.9/m, and therefore the loss in water is
8-9mJ, the angle value conventional more than needed that experiment records is 18mJ, according to J=J0+J1+ K H+Q, arranges laser energy J=150mJ.
According to the parameter value of above-mentioned setting, open laser instrument, input parameter value.Use high-speed camera Phantom
V2511 detects cavitation oscillation sequence chart, as Fig. 6 is double cavity detection pulse train figures in liquid medium, due at laser focusing
Point and material surface to be processed puncture simultaneously, produce the plasma sending white light, plasma pair simultaneously in the region punctured
Outer high speed expands, liquid medium 7 near continued compression, produces shock wave and double cavitation phenomena.In initial cavity bubble, pressure is high
In the liquid medium 7 of surrounding, under pressure difference effect, cavity expands outwardly change greatly.When cavity radius reaches maximum, by the external world
Under pressure and surface tension constraint, cavity starts to be compressed.When being compressed to minimum, steep intrinsic pressure powerful in surrounding liquid medium 7
Static pressure, cavity start bounce-back, and so forth.Reciprocal time is the most, is lost the biggest, until bubble collapse.
Embodiment 2
Taking laser energy value is 80mJ, slightly larger than the threshold value of laser breakdown aqueous medium, it is considered to laser is situated between at device and liquid
The loss of transmission in matter, other parameters arrange identical with embodiment with device, detect single cavitation oscillation in liquid medium
Sequence chart such as Fig. 7.Now laser energy is only capable of and punctures liquid medium, when beam transmission to material surface to be processed, examines
Consider the Absorption to liquid medium 7 and the breakdown threshold of material surface to be processed, have not been able at material surface to be processed produce
Raw cavity, therefore form single cavity.
Embodiment 3
Regulate H-number by three-dimensional mobile platform, take H=0mm.Laser energy is set to 60mJ, other parameters and embodiment 1
Identical.Detect list cavitation oscillation sequence such as Fig. 8 at material surface to be processed.Now laser focusing point is at material list to be processed
Face, energy is big and exceedes the breakdown threshold of material surface to be processed, and other each point energy is less and is not enough to puncture liquid medium,
So only forming cavity at material surface to be processed.Because the barrier effect of material surface to be processed, the cavity of formation is semicircle
Shape rather than circle.
It is to be understood that, although this specification describes according to each embodiment, but the most each embodiment only comprises one
Individual independent technical scheme, this narrating mode of description is only that for clarity sake those skilled in the art should will say
Bright book can also form those skilled in the art permissible through appropriately combined as an entirety, the technical scheme in each embodiment
Other embodiments understood.
The a series of detailed description of those listed above is only for illustrating of the possible embodiments of the present invention,
They also are not used to limit the scope of the invention, all Equivalent embodiments made without departing from skill of the present invention spirit or change
Should be included within the scope of the present invention.
Claims (9)
1. the method for the double cavity of induced with laser, it is characterised in that: material to be processed soaks and is fixed in liquid medium, laser
Act perpendicularly to liquid medium and material surface to be processed, and meet:
J=J0+J1+ K H+Q and H > R0+R1
Double cavity is produced at laser focusing point and material surface to be processed;
Wherein: J is laser energy, J0It is the breakdown threshold of liquid medium, J1For the breakdown threshold of material surface to be processed, K is sharp
Light is unit length loss factor in liquid medium, and Q is laser energy degree more than needed, and H is that laser focusing point is to material list to be processed
The distance in face, R0It is J for laser energy0The cavity radius that produces in liquid medium of laser action, R1It is J for laser energy1
The radius of cavity that produces in material surface to be processed of laser action.
The method of the double cavity of a kind of induced with laser the most according to claim 1, it is characterised in that: described Q value is 0-
200mJ/cm2。
The method of the double cavity of a kind of induced with laser the most according to claim 1, it is characterised in that: described material to be processed is
One in aluminum, copper, ferrum, zinc or titanium alloy.
The method of the double cavity of a kind of induced with laser the most according to claim 1, it is characterised in that: described liquid medium is
One in water, silicone oil or electrolyte solution.
The device of the double cavity of a kind of induced with laser the most according to claim 1, including laser control panel, laser instrument,
Reflecting mirror, laser beam expanding system, described laser beam expanding system includes laser beam expander and condenser lens, it is characterised in that: described
Laser control panel is connected with laser instrument, controls the output of laser device laser;The light beam that described laser instrument sends is through anti-
Penetrate mirror to reflex on laser beam expander;The output beam of laser beam expander is focused on material surface to be processed by described condenser lens
Top distance is at H;Described material to be processed soaks and is fixed in the container holding liquid medium;By laser control panel
Arranging laser energy parameter is J=J0+J1+ K H+Q, regulates described container position and meets H > R0+R1;
Wherein: J is laser energy parameter, J0It is the breakdown threshold of liquid medium, J1For the breakdown threshold of material surface to be processed, K
For laser unit length loss factor in liquid medium, Q is laser energy degree more than needed, and H is that laser focusing point is to material to be processed
The distance on material surface, R0It is J for laser energy0The cavity radius that produces in liquid medium of laser action, R1For laser energy
For J1The radius of cavity that produces in material surface to be processed of laser action.
The device of the double cavity of a kind of induced with laser the most according to claim 5, it is characterised in that: also include computer, institute
State computer to be connected with described laser control panel.
The device of the double cavity of a kind of induced with laser the most according to claim 6, it is characterised in that: also include three-dimensional mobile flat
Platform and three-dimensional mobile platform control panel, described container as in three-dimensional mobile platform, described three-dimensional mobile platform control panel
It is connected with described computer and described three-dimensional mobile platform respectively.
The device of the double cavity of a kind of induced with laser the most according to claim 6, it is characterised in that: also include expanding focusing system
System control panel, described in expand focusing system control panel respectively with described computer and described laser beam expanding system.
The device of the double cavity of a kind of induced with laser the most according to claim 6, it is characterised in that: described material to be processed is
Titanium alloy, described liquid medium is aqueous medium, wherein J=150mJ, H=10mm.
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CN201610765719.3A CN106271063B (en) | 2016-08-30 | 2016-08-30 | A kind of method and device of the double vacuoles of induced with laser |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107363796A (en) * | 2017-08-29 | 2017-11-21 | 江苏大学 | A kind of antarafacial multi-laser beam induces the device of more vacuoles |
CN107585756A (en) * | 2017-07-31 | 2018-01-16 | 江苏大学 | Carbon material prepares the apparatus and method of graphene in laser-impact liquid medium |
CN107984086A (en) * | 2017-11-28 | 2018-05-04 | 江苏大学 | A kind of method based on induced with laser bubble collapse water jet manufacture ultra micro group hole |
CN108557805A (en) * | 2017-07-31 | 2018-09-21 | 江苏大学 | A kind of laser liquid phase irradiation method prepares the device of graphene |
CN108817673A (en) * | 2018-06-12 | 2018-11-16 | 江苏大学 | A kind of laser-induced cavitation surface pretreatment device and method |
CN110640301A (en) * | 2019-08-26 | 2020-01-03 | 江苏大学 | Device and method for laser-induced large-area cavitation forming |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011516914A (en) * | 2008-04-03 | 2011-05-26 | カール ゼイス エスエムエス リミテッド | Method for forming, capturing and manipulating bubbles in a liquid |
CN103418912A (en) * | 2013-05-16 | 2013-12-04 | 广东工业大学 | Machining device and machining method for enhancing sapphire laser back wet etching rate |
CN104383621A (en) * | 2014-11-04 | 2015-03-04 | 广东工业大学 | Laser-induced double-chamber micropump and fluid micropump drive method thereof |
CN104907713A (en) * | 2015-06-03 | 2015-09-16 | 江苏大学 | Device and method for preparing spherical cavitation bubble |
CN105215553A (en) * | 2015-09-18 | 2016-01-06 | 广东工业大学 | A kind of fine structure induced with laser method for implantation based on suspension target and device |
-
2016
- 2016-08-30 CN CN201610765719.3A patent/CN106271063B/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011516914A (en) * | 2008-04-03 | 2011-05-26 | カール ゼイス エスエムエス リミテッド | Method for forming, capturing and manipulating bubbles in a liquid |
CN103418912A (en) * | 2013-05-16 | 2013-12-04 | 广东工业大学 | Machining device and machining method for enhancing sapphire laser back wet etching rate |
CN104383621A (en) * | 2014-11-04 | 2015-03-04 | 广东工业大学 | Laser-induced double-chamber micropump and fluid micropump drive method thereof |
CN104907713A (en) * | 2015-06-03 | 2015-09-16 | 江苏大学 | Device and method for preparing spherical cavitation bubble |
CN105215553A (en) * | 2015-09-18 | 2016-01-06 | 广东工业大学 | A kind of fine structure induced with laser method for implantation based on suspension target and device |
Cited By (8)
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---|---|---|---|---|
CN107585756A (en) * | 2017-07-31 | 2018-01-16 | 江苏大学 | Carbon material prepares the apparatus and method of graphene in laser-impact liquid medium |
CN108557805A (en) * | 2017-07-31 | 2018-09-21 | 江苏大学 | A kind of laser liquid phase irradiation method prepares the device of graphene |
CN107363796A (en) * | 2017-08-29 | 2017-11-21 | 江苏大学 | A kind of antarafacial multi-laser beam induces the device of more vacuoles |
CN107984086A (en) * | 2017-11-28 | 2018-05-04 | 江苏大学 | A kind of method based on induced with laser bubble collapse water jet manufacture ultra micro group hole |
CN108817673A (en) * | 2018-06-12 | 2018-11-16 | 江苏大学 | A kind of laser-induced cavitation surface pretreatment device and method |
CN110640301A (en) * | 2019-08-26 | 2020-01-03 | 江苏大学 | Device and method for laser-induced large-area cavitation forming |
CN114425665A (en) * | 2022-02-14 | 2022-05-03 | 上海赛卡精密机械有限公司 | Water-guided laser system and double-layer material cutting method |
CN114425665B (en) * | 2022-02-14 | 2023-11-10 | 上海赛卡精密机械有限公司 | Water-guided laser system and double-layer material cutting method |
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