CN106249059B - Image synchronization display system and method based on on-chip antenna feed - Google Patents
Image synchronization display system and method based on on-chip antenna feed Download PDFInfo
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- CN106249059B CN106249059B CN201610709311.4A CN201610709311A CN106249059B CN 106249059 B CN106249059 B CN 106249059B CN 201610709311 A CN201610709311 A CN 201610709311A CN 106249059 B CN106249059 B CN 106249059B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/08—Measuring electromagnetic field characteristics
- G01R29/10—Radiation diagrams of antennas
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Abstract
The invention discloses a kind of image synchronization display system and method based on on-chip antenna feed, including operation room and darkroom, control rack is equipped in the operation room；Microscopy device is equipped in the darkroom, micro-image and standing-wave ratio test curve for showing on-chip antenna feed；Microscopy device side is set there are one probe station, the probe station is equipped with probe base, probe base side is set there are two horizon bar, and a horizon bar is equipped with prevention at radio-frequency port, and the prevention at radio-frequency port is connected by radio-frequency cable and the instrument system basic module of control rack；The other end of another horizon bar is equipped with on-chip antenna, and the on-chip antenna is equipped with probe, and the probe is connect with prevention at radio-frequency port.The present invention realize operator can intuitively observe the actual detection position of probe, while can also be judged by test curve auxiliary operation person probe prick whether in place, avoid damage probe, reduce testing cost.
Description
Technical field
The present invention relates to on-chip antenna feeding technique field, especially a kind of image synchronization based on on-chip antenna feed is aobvious
Show system and method.
Background technology
In recent years, with the development of high frequency technique and antenna technology, the upper frequency limit of antenna is higher and higher, corresponding size
It is smaller and smaller, and gradually develop towards micromation direction, feeding classification is also converted to micro-strip transmission by conventional coaxial, waveguide mode
Line form, distributing point are also very small.During piece mo(u)ld top half antenna measurement, need to use probe feed, since distributing point is non-
It is often small, it has been difficult to differentiate using traditional binocular microscope due to millimeter wave probe tip smaller especially in millimeter wave frequency band
Going out between probe and measured piece and whether well to contact, probe pushes safety travel substantially all in several microns~tens micron ranges,
Only naked eyes is leaned on to differentiate probe displacement, it is difficult to ensure that the multiple needle points of probe are well contacted with measured piece simultaneously,
It easily causes operating personnel's maloperation and damages probe, and probe is expensive, and research and development can be greatly increased to the damage of probe
And the cost of production, reduce exploitation and production efficiency.
Currently, domestic someone builds simple on-chip antenna using standard probe platform tests system, as shown in Figure 1, in standard
Calibration is carried out on probe station can test antenna impedance index, and using reception antenna, movement can carry out antenna direction on arcuate frame
Figure test.But carrying out the premise that antenna index accurately measures well is fed between probe and on-chip antenna.Binocular is utilized in Fig. 1
Microscope is observed, and can determine whether good accessible foundation between probe and antenna without other.By reception antenna half
It is moved on circular type frame track, on-chip antenna upper half-space can be obtained using test software and vector network analyzer, and some polarizes
The directional diagram of section, at this point, operating personnel when being fed by microscope, can not observe due between probe and antenna
Contact and generated on vector network analyzer test curve variation.
In order to realize that the performance test of on-chip antenna, someone have carried out Curve guide impeller to standard probe platform, and it is aobvious to binocular
Micro mirror is replaced, and test system schema as shown in Figure 2 is formd.In actual test, in order to ensure good test
Environment is usually placed on on-chip antenna in microwave dark room environment, and test equipment equipment is placed on operation room.But probe station,
Microscope and its display cannot be placed on outside darkroom due to practical situations.Operator is correctly opening Antenna testing system
Afterwards, instrument parameter to be tested is needed by computer installation, then adjusts monotubular electron microscope, by observing display, made
Microscope is focused to on-chip antenna.By adjusting probe station XYZ axis, so that probe is moved to on-chip antenna feed top, adjust and visit
Needle platform Z axis makes probe slowly be fed close to on-chip antenna, when finding that probe is consistent with feed clarity, by slowly adjusting Z
Axis probe observes the whether slight forward slip of probe tip simultaneously, as shown in Fig. 3-1, Fig. 3-2, Fig. 4-1 Fig. 4-2, such as generates cunning
It is dynamic, then stop probe station pressing action, operating personnel, which can arrive before and after outdoor observation vector network analyzer S parameter curve is fed, is
No variation, such as changes and curve multiple scanning test data is stablized, then it is believed that being fed just between probe and on-chip antenna
Often, next step on-chip antenna testing performance index can be carried out.
In the way of being fed between standard probe platform progress probe and on-chip antenna, due to the use of binocular microscope, behaviour
Make personnel and adjusting probe station using microscope and when probe, is only capable of judging whether are probe and on-chip antenna with the vision of oneself
Good contact, in microwave frequency band, since probe size is relatively large, probe tip is relatively long, and operator is when feeding
It is easier to find the relative displacement after probe and on-chip antenna feed.However as the raising of frequency, probe and antenna feed
Electrical interface is smaller and smaller, and especially in millimeter wave frequency band, millimeter wave probe tip only has several micron-scales, probe tip with
Displacement stroke forward slip as shown in Fig. 3-1, Fig. 3-2, Fig. 4-1 Fig. 4-2 after on-chip antenna contact, by the tens of microwave frequency band
Micron becomes several microns, only leans on operating personnel by micro- sem observation, has been difficult to judge between probe and on-chip antenna
Whether well contact, it is easy to make probe overvoltage and damage, and the probe price of millimeter wave frequency band relative to microwave frequency band significantly
It improves, so this feeding classification makes, antenna measurement becomes complicated, inefficient and testing cost increases.
The visual field of operating personnel is although increased by improved probe feed mode, but operating personnel are visiting
When needle is fed, it is unable to variation of the Synchronous to instrument and equipment test curve while observing electron microscope display, so
Also mainly judge whether probe well feeds with the misalignment for observing probe tip by display.It is of course also possible to increase
Operating personnel carry out division of labor observation, i.e. an operating personnel by electron microscope display judge probe, and whether contact chip goes up to the sky
Line simultaneously generates displacement, and whether another operating personnel's optical viewer equipment test curve changes, and such case undoubtedly increases
Manpower, and there are problems that cooperation, once linking up the normality that goes wrong and can not confirm probe feed, cause operation
Contradiction between personnel, the problems such as causing testing efficiency low.
Invention content
The purpose of the present invention is to overcome above-mentioned the deficiencies in the prior art, provide a kind of image fed based on on-chip antenna
Synchronous display system and method, by using the function of remote desktop, on the computer that electron microscope shows running software
The simultaneous display for realizing the standing-wave ratio curve of instrument system test, makes operating personnel pass through microscopy device i.e. observable probe
Fed with tested antenna, but can optical viewer system testing simultaneously standing-wave ratio curve real-time change, by physical property and
The dual judgement of electrical property improves the success rate fed between probe and on-chip antenna.
To achieve the above object, the present invention uses following technical proposals：
Based on the image synchronization display system of on-chip antenna feed, including operation room and darkroom, set in the operation room
There is control rack；Microscopy device is equipped in the darkroom, micro-image and standing wave for showing on-chip antenna feed
Compare test curve；The microscopy device side is set there are one probe station, and the probe station is equipped with probe base, probe base
Side is set there are two horizon bar, and a horizon bar is equipped with prevention at radio-frequency port, and the prevention at radio-frequency port passes through radio-frequency cable and control machine
The instrument system basic module of cabinet connects, the standing-wave ratio curve for the display instrument system testing on remote desktop；Another
The other end of horizon bar is equipped with on-chip antenna, and the on-chip antenna is equipped with probe, and the probe is connect with prevention at radio-frequency port.
It is equipped with instrument system basic module in the control rack, includes microwave vector network analysis in the basic module
Instrument, millimeter wave control machine etc. carry out S parameter test millimeter wave and extend necessary underlying instrument；The instrument system basic module
Lower section be equipped with main control computer and display, be equipped with turntable controller below main control computer and display.
The probe base is equipped with XYZ axis, for adjusting probe.
Vertical bar there are one being set on the probe station, a horizon bar is installed on vertical bar top, in the other end of horizon bar
Equipped with microscope, the microscope is connect with microscopy screen.
The darkroom bottom is equipped with spiral arm turntable, and the spiral arm turntable is connect by circuit with turntable controller.
The spiral arm turntable is equipped with receiving module, and one end of the receiving module connect with reception antenna, the other end and
The instrument system basic module of control rack connects.
A kind of working method of the image synchronization display system based on on-chip antenna feed, includes the following steps：
Step 1 connects each device：Microscopy device is connect with microscope, probe is connect with on-chip antenna, is penetrated
The instrument system basic module and on-chip antenna of frequency port and control rack connect, the instrument system of receiving module and control rack
Basic module connects, and spiral arm turntable is connect with turntable controller；
Step 2 adjusts probe base and microscope focus according to the image of microscope shown on microscopy device；
Step 3 adjusts probe location according to the position between the probe and on-chip antenna shown on microscopy device；
Step 4 feeds point contact situation according to the probe and on-chip antenna shown on microscope, is shown on remote desktop
Instrument system test standing-wave ratio curve variation, adjust probe base Z axis；
Step 5：The probe variation shown according to standing-wave ratio test curve and microscopy device, confirms probe and on piece
Feed condition between antenna realizes that on-chip antenna is fed if standing-wave ratio test curve is constant.
In the step 2, adjusting probe base makes on-chip antenna be moved to display image center region, and it is burnt to adjust microscope
It is clearly indicated in image center away from tested antenna is made；
In the step 3, probe base X-axis and Y-axis are adjusted, so that probe is moved to on-chip antenna feed top, adjusts probe
Seat Z axis makes probe slowly close to probe feed point, slowly adjusts Z axis and slowly pushes probe.
In the step 4, standing-wave ratio curve horizontal axis frequency, the longitudinal axis is standing wave ratio.
The beneficial effects of the invention are as follows：
1. position relationship and the standing wave test between probe and on-chip antenna can be observed simultaneously by an operating personnel
The variation of curve can fast implement the feed to on-chip antenna using the two variations, improve feed efficiency；
2. the variation by test curve can determine whether the contact condition between probe and on-chip antenna, it is ensured that the standard of distributing point
True property；
3. improving the accuracy and efficiency of probe feed through the invention, operating personnel is avoided to cause to visit because of error in judgement
The damage of needle, reduces testing cost.
Description of the drawings
Fig. 1 is existing on-chip antenna test system structure schematic diagram；
Fig. 2 is modified on-chip antenna test system structure schematic diagram；
Fig. 3-1,3-2 are probe feed pre-structure schematic diagrames；
Fig. 4-1,4-2 are structural schematic diagrams after probe feed；
Fig. 5 is the image synchronization display system architectures schematic diagram provided by the invention fed based on on-chip antenna；
Fig. 6 is schematic diagram before probe and on-chip antenna feed provided by the invention；
Fig. 7 is schematic diagram after probe and on-chip antenna feed provided by the invention；
Fig. 8 is the flow chart of work methods of the image synchronization display system provided by the invention fed based on on-chip antenna；
Wherein, 1. microscopy device, 2. microscopes, 3. probes, 4. on-chip antennas, 5. probe bases, 6. prevention at radio-frequency port, 7.
Reception antenna, 8. probe stations, 9. receiving modules, 10. spiral arm turntables.
Specific implementation mode
Present invention will be further explained below with reference to the attached drawings and examples.
As shown in figure 5, the image synchronization display system based on on-chip antenna feed, including operation room and darkroom, it is described
Control rack is equipped in operation room；Microscopy device 1 is equipped in the darkroom, for showing the micro- of on-chip antenna feed
Image and standing-wave ratio test curve；The microscopy device side is set there are one probe station 8, and the probe station 8 is equipped with
Probe base 5,5 side of probe base are set there are two horizon bar, and a horizon bar is equipped with prevention at radio-frequency port 6, and the prevention at radio-frequency port 6 passes through
Radio-frequency cable and the instrument system basic module of control rack connect, on remote desktop display instrument system testing stay
Bobbi curve；The other end of another horizon bar is equipped with on-chip antenna 4, and the on-chip antenna is equipped with probe 3, the probe 3
It is connect with prevention at radio-frequency port 6.
It is equipped with instrument system basic module in the control rack, includes microwave vector network analysis in the basic module
Instrument, millimeter wave control machine etc. carry out S parameter test millimeter wave and extend necessary underlying instrument；The instrument system basic module
Lower section be equipped with main control computer and display, be equipped with turntable controller below main control computer and display.
The probe base 5 is equipped with XYZ axis, for adjusting probe.
Vertical bar there are one being set on the probe station, a horizon bar is installed on vertical bar top, in the other end of horizon bar
Equipped with microscope 2, the microscope 2 is connect with microscopy screen 1.
The darkroom bottom is equipped with spiral arm turntable 10, and the spiral arm turntable 10 is connect with turntable controller.
The spiral arm turntable is equipped with receiving module 9, and one end of the receiving module 9 is connect with reception antenna 7, the other end
It is connect with instrument system basic module.
As shown in Figure 6 to 8, a kind of working method of the image synchronization display system based on on-chip antenna feed, including
Following steps：
Step 1 connects each device：Microscopy device is connect with microscope, probe is connect with on-chip antenna, is penetrated
The instrument system basic module and on-chip antenna of frequency port and control rack connect, the instrument system of receiving module and control rack
Basic module connects, and spiral arm turntable is connect with turntable controller；
Step 2 adjusts probe base and microscope focus according to the image of microscope shown on microscopy device；
Step 3 adjusts probe location according to the position between the probe and on-chip antenna shown on microscopy device；
Step 4 feeds point contact situation according to the probe and on-chip antenna shown on microscope, is shown on remote desktop
Instrument system test standing-wave ratio curve variation, adjust probe base Z axis；
Step 5：The probe variation shown according to standing-wave ratio test curve and microscopy device, confirms probe and on piece
Feed condition between antenna realizes that on-chip antenna is fed if standing-wave ratio test curve is constant.
In the step 2, adjusting probe base makes tested antenna be moved to display image center region, and it is burnt to adjust microscope
It is clearly indicated in image center away from tested antenna is made；
In the step 3, probe base X-axis and Y-axis are adjusted, so that probe is moved to on-chip antenna feed top, adjusts probe
Seat Z axis makes probe slowly close to probe feed point, slowly adjusts Z axis and slowly pushes probe.
In the step 4, standing-wave ratio curve horizontal axis frequency, the longitudinal axis is standing wave ratio.
The present invention utilizes Remote desk process function, in the case where test equipment equipment distance is tested antenna farther out,
The real-time change of instrument test curve can be observed on the display of short distance, it is only necessary to which an operating personnel can both grasp
The variation for making to observe probe and instrument curve while probe station, has saved time and space, has improved the effect of probe feed
Rate and accuracy rate effectively prevent the damage of probe, reduce testing cost.
Above-mentioned, although the foregoing specific embodiments of the present invention is described with reference to the accompanying drawings, not protects model to the present invention
The limitation enclosed, those skilled in the art should understand that, based on the technical solutions of the present invention, those skilled in the art are not
Need to make the creative labor the various modifications or changes that can be made still within protection scope of the present invention.
Claims (9)
1. it is a kind of based on on-chip antenna feed image synchronization display system working method, it is described based on on-chip antenna feed
Image synchronization display system includes operation room and darkroom, and control rack is equipped in the operation room；It is equipped in the darkroom
Microscopy device, micro-image and standing-wave ratio test curve for showing on-chip antenna feed；The microscopy
Device side is set there are one probe station, and the probe station is equipped with probe base, and probe base side sets that there are two horizon bar, a levels
Bar is equipped with prevention at radio-frequency port, and the prevention at radio-frequency port is connect by radio-frequency cable with the instrument system basic module in control rack,
Standing-wave ratio curve for the display instrument system testing on remote desktop；The other end of another horizon bar goes up to the sky equipped with piece
Line, the on-chip antenna are equipped with probe, and the probe is connect with prevention at radio-frequency port；This approach includes the following steps：
Step 1 connects each device：Microscopy device is connect with microscope, probe is connect with on-chip antenna, radio-frequency head
Mouthful in control rack instrument system basic module and on-chip antenna connect, the instrument system base of receiving module and control rack
This component connects, and spiral arm turntable is connect with turntable controller；
Step 2 adjusts probe base and microscope focus according to the image of microscope shown on microscopy device；
Step 3 adjusts probe location according to the position between the probe and on-chip antenna shown on microscopy device；
Step 4 feeds point contact situation, the instrument shown on remote desktop according to the probe and on-chip antenna shown on microscope
The variation of the standing-wave ratio curve of device system testing adjusts probe base Z axis；
Step 5：The probe variation shown according to standing-wave ratio test curve and microscopy device, confirms probe and on-chip antenna
Between feed condition, if standing-wave ratio test curve is constant, realize on-chip antenna feed.
2. the working method of the image synchronization display system as described in claim 1 based on on-chip antenna feed, characterized in that
It is equipped with instrument system basic module in the control rack, includes microwave vector network analyzer, millimeter in the basic module
Wave control machine carries out S parameter test millimeter wave and extends necessary underlying instrument；It is set below the instrument system basic module
There are main control computer and display, turntable controller is equipped with below main control computer and display.
3. the working method of the image synchronization display system as described in claim 1 based on on-chip antenna feed, characterized in that
The probe base is equipped with XYZ axis, for adjusting probe.
4. the working method of the image synchronization display system as described in claim 1 based on on-chip antenna feed, characterized in that
It is set on the probe station there are one vertical bar, a horizon bar is installed on vertical bar top, is equipped in the other end of horizon bar micro-
Mirror, the microscope are connect with microscopy device.
5. the working method of the image synchronization display system as described in claim 1 based on on-chip antenna feed, characterized in that
The darkroom bottom is equipped with spiral arm turntable, and the spiral arm turntable is connect with turntable controller.
6. the working method of the image synchronization display system as claimed in claim 5 based on on-chip antenna feed, characterized in that
The spiral arm turntable is equipped with receiving module, and one end of the receiving module is connect with reception antenna, the other end and control rack
Instrument system basic module connection.
7. the working method of the image synchronization display system as described in claim 1 based on on-chip antenna feed, characterized in that
In the step 2, adjusting probe base makes on-chip antenna be moved to display image center region, and adjusting microscope focus makes to be tested
Antenna is clearly indicated in image center.
8. the working method of the image synchronization display system as described in claim 1 based on on-chip antenna feed, characterized in that
In the step 3, probe base X-axis and Y-axis are adjusted, so that probe is moved to on-chip antenna feed top, adjusts probe base Z axis, make
Probe slowly adjusts Z axis and slowly pushes probe slowly close to probe feed point.
9. the working method of the image synchronization display system as described in claim 1 based on on-chip antenna feed, characterized in that
In the step 4, standing-wave ratio curve horizontal axis frequency, the longitudinal axis is standing wave ratio.
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107015070B (en) * | 2017-05-27 | 2023-12-26 | 中山米微科技有限公司 | On-chip antenna test probe station |
| TWI703332B (en) * | 2019-08-29 | 2020-09-01 | 飛斯特科技實業有限公司 | Method and measuring mechanism for measuring antenna in antenna system by way of back-point pin |
| TWI804309B (en) * | 2022-05-11 | 2023-06-01 | 量崴科技股份有限公司 | Antenna test system |
| CN116953297B (en) * | 2023-07-26 | 2024-02-20 | 中国计量科学研究院 | Antenna back feed measuring device on millimeter wave plate |
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