CN106248624A - Tandem whole-field optically laminated imaging device based on compensating interferometer instrument and method - Google Patents
Tandem whole-field optically laminated imaging device based on compensating interferometer instrument and method Download PDFInfo
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Abstract
The invention discloses a kind of tandem whole-field optically laminated imaging device based on compensating interferometer instrument and method.This device includes broadband halogen light source, kohler's illumination system, compensating interferometer instrument, the second Amici prism, detection interferometer, sample, imaging len and area array CCD；Method is: the light that broadband halogen light source sends enters compensating interferometer instrument through kohler's illumination system, the light that compensated interferometer two-arm reflects is divided into two-beam by the second Amici prism, the most a branch of entrance detection interferometer, a light part for entrance detection interferometer is reflected, another part passes detection interferometer to sample illumination；Meet via the reflection light of detection interferometer interfere as reference light, the rear orientation light of this reference light and sample, after this interference signal passes the second Amici prism, focus on area array CCD through imaging len.The present invention have easy to operate, resolution is high, image taking speed is fast, compact conformation, be easy to the feature of hand-held and interior peeping.
Description
Technical field
The present invention relates to whole-field optically coherent chromatographic technique field, a kind of tandem based on compensating interferometer instrument is complete
Field optical chromatography imaging device and method.
Background technology
Optical coherence tomography (OCT) is a kind of optical sectioning imaging technology fast-developing over nearly 20 years, passes through
Reference light and sample scattering interference of light reconstruct sample message, it is achieved the effect of optical section.Owing to OCT uses low-coherent light
Source, its resolution is higher, can reach micron level.OCT technology is compared traditional biomedical imaging technology and is had not damaged, spirit
Sensitivity is high, can the advantage such as realtime imaging, be widely used in the fields such as biomedical and material science.Based on existing OCT technology,
Having developed whole-field optically coherent tomography (FF-OCT), it uses low-coherence light source and the microcobjective of high NA, and Linnik interferes
Structure, area array CCD, it is not necessary to the two dimensional image of the most available transverse section of any transversal scanning, it is possible to achieve axial scan, rebuild
The 3-D view of sample, its laterally and axially resolution be all up submicron rank.
Along with going deep into of research, the miniaturization of system becomes focus trend.The double-arm structure ratio of Linnik interference structure
More complicated being unfavorable for miniaturization, light channel structure is preferably to select altogether.The interference structure more simple and stable of light path altogether, but both arms
Distance is relatively big, and when the system that light source bandwidth is bigger, both arms distance exceedes coherence length, causes interfering, and uses bandwidth
Less light source can cause again axial resolution poor.In order to ensure high axial resolution, on the premise of light source bandwidth is relatively big,
Propose and compensate light path with second interferometer, i.e. tandem FF-OCT system.
The laterally and axially resolution of existing tandem FF-OCT system is all by a definite limitation.In having studied typically
Centre wavelength is used to be about the SLD of 830nm or the xenon arc lamp of visible ray section as system source.Although centre wavelength is
The SLD light source of 830nm can be preferably to imaging in biological tissues, but its bandwidth (tens nm) is compared to thermal light source such as Halogen light
(bandwidth is generally hundreds of nm) is less, limits the axial resolution of system.Xenon arc lamp is compared thermal light source and is provided that preferably
Illumination and incident power, but its bandwidth is the least, and axial resolution is typically several to several μm ten.Detect interference simultaneously
The numerical aperture of instrument object lens is less, and lateral resolution is affected.In conjunction with the optical fiber image transmission beam that xenon arc lamp and numerical aperture are bigger
The laterally and axially resolution of micron level can be obtained, but the resolution of distance traditional F F-OCT system 1 micron level also has
Bigger gap.
Summary of the invention
It is an object of the invention to provide a kind of easy to operate, resolution is high, image taking speed is fast based on compensating interferometer instrument
Tandem whole-field optically laminated imaging device and method, compact conformation, be easy to hand-held or in peeping.
The technical solution realizing the object of the invention is: a kind of tandem whole-field optically based on compensating interferometer instrument chromatographs
Imaging device, including broadband halogen light source, kohler's illumination system, compensating interferometer instrument, the second Amici prism, detection interferometer, sample
Product, imaging len and area array CCD；The light that broadband halogen light source sends enters compensating interferometer instrument through kohler's illumination system, through mending
Repay the light that interferometer two-arm reflects and be divided into two-beam by the second Amici prism, the most a branch of enter detection interferometer, enter
A light part for detection interferometer is reflected, another part passes detection interferometer to sample illumination；Via detection interferometer
Reflection light meets interfere as reference light, the rear orientation light of this reference light and sample, and this interference signal passes second point
After light prism, focus on area array CCD through imaging len.
Further, described broadband halogen light source is the OSL1 high-intensity broadband halogen light source of Thorlabs, and power is
150W, centre wavelength is 600nm, carries a width of 300nm, and coherence length is 1.2 μm.
Further, described kohler's illumination system includes being sequentially arranged preposition condenser lens, aperture diaphragm, field stop,
Rearmounted condenser lens, the light beam that broadband halogen light source sends, after preposition condenser lens, images at aperture diaphragm for the first time, rearmounted poly-
Light microscopic is by the back focal plane of microcobjective in detection interferometer of light source image secondary imaging at this, and illumination zone is carried out by field stop
Control, it is achieved the Uniform Illumination of sample.
Further, described compensating interferometer instrument is based on Michelson formula structure, including the first Amici prism, the first reflection
Mirror, the second reflecting mirror, piezoelectric actuator, linear displacement platform, compensating interferometer instrument two-arm is placed identical reflecting mirror that is first and is reflected
Mirror, the second reflecting mirror, the second reflecting mirror is fixedly installed on linear displacement platform, and piezoelectric actuator is fixedly installed on the second reflecting mirror
Non-reflecting surface, linear displacement platform realizes regulation light path and axial scan, and piezoelectric actuator realizes phase-shifting interference measuring.
Further, described detection interferometer is based on Feisuo interference structure, including microcobjective, microscope slide；Microscope slide is made
For light splitting plane, the light of microscope slide reflection is as reference light, and the rear orientation light of sample is as sample light.
A kind of such as the formation method of described tandem whole-field optically laminated imaging device based on compensating interferometer instrument, including with
Lower step:
Step 1, the low-coherent light that broadband halogen light source is launched, after kohler's illumination system, enter compensating interferometer instrument,
Regulation compensating interferometer instrument makes the light of its two-arm produce interference；
Step 2, the light through compensating interferometer instrument enters detection interferometer, microcobjective in regulation sample to detection interferometer
At focal plane, it is achieved whole audience Uniform Illumination；
Step 3, to regulating compensating interferometer instrument after sample Uniform Illumination, makes detection interferometer two-arm signal interfere；
Step 4, enters area array CCD, thus obtains sample chromatography after the imaged lens of interference signal in detection interferometer
Figure.
Further, kohler's illumination system described in step 1 includes being sequentially arranged preposition condenser lens, aperture diaphragm, visual field
Diaphragm, rearmounted condenser lens, the light beam that broadband halogen light source sends, after preposition condenser lens, images at aperture diaphragm for the first time,
Rearmounted condenser lens is by the back focal plane of microcobjective in detection interferometer of light source image secondary imaging at this, and field stop is to illumination model
Enclose and be controlled, it is achieved the Uniform Illumination of sample.
Further, compensating interferometer instrument described in step 1 based on Michelson formula structure, including the first Amici prism, first
Reflecting mirror, the second reflecting mirror, piezoelectric actuator, linear displacement platform, compensating interferometer instrument two-arm places identical reflecting mirror that is first
Reflecting mirror, the second reflecting mirror, the second reflecting mirror is fixedly installed on linear displacement platform, and piezoelectric actuator is fixedly installed on the second reflection
The non-reflecting surface of mirror, linear displacement platform realizes regulation light path and axial scan, and piezoelectric actuator realizes phase-shifting interference measuring.
Further, described in step 2, detection interferometer is based on Feisuo interference structure, including microcobjective, microscope slide；Carry glass
Sheet is as light splitting plane, and the light of microscope slide reflection is as reference light, and the rear orientation light of sample is as sample light.
Compared with prior art, its remarkable advantage is the present invention: (1) have employed dual interferometer series-mode frame, and Feisuo is tied
The detection interferometer structure of structure is compact, and effect on environment is insensitive, reliable and stable；The compensating interferometer instrument operation of Michelson structure
Simply, easy to adjust, sample can be carried out axial scan by the linear displacement platform in system, reconstruct the graphics of sample
Picture, the axial resolution of system and lateral resolution are all up submicron rank；(2) microcobjective that have employed high NA loads
The detection interferometer design of slide: use the available higher lateral resolution of microcobjective of high NA, microscope slide conduct simultaneously
Light splitting plane and do not use special spectroscope that structure can be made the smallest and the most exquisite, sample only need to be placed on microscope slide and just can realize
Measure, the little most 3cm × 3cm × 10cm of volume；(3) hand-held is facilitated implementation: connect detection interferometer and system by optical fiber
Other parts, sample can be measured by detection interferometer with hand-held；The Feisuo structure of detection interferometer shakes unwise to external world
Sense, detection interferometer volume is little simultaneously, and simple in construction has the potentiality of further miniaturization.
Accompanying drawing explanation
Fig. 1 is the structural representation of present invention tandem based on compensating interferometer instrument whole-field optically laminated imaging device.
Fig. 2 is the optical path compensation signal of present invention tandem based on compensating interferometer instrument whole-field optically laminated imaging device
Figure.
Fig. 3 is the tomographic map of gained different depth in the embodiment of the present invention, and wherein (a) is the common aobvious of onion cells surface
Micro-image, (b)～(e) is followed successively by the tomographic map at below same position Bulbus Allii Cepae surface 10 μm, 20 μm, 30 μm, 40 μm.
Detailed description of the invention
The present invention proposes a kind of tandem whole audience light that can be used for hand-held or inner peeping type probe based on compensating interferometer instrument
Learn laminated imaging device and method.This imaging system is based on whole-field optically tomography: the light that wideband light source sends is strangled through section and shone
Enter compensating interferometer instrument after bright system, enter detection interferometer equal to sample from compensating interferometer instrument light out through Amici prism
Even illumination, detects reference light and rear orientation light compensating interferometer instrument before process of sample that in interferometer, reference arm produces
Interfering after optical path compensation, interference signal enters ccd detector by Amici prism, it is not necessary to transversal scanning is obtained with two
Dimension image.
As it is shown in figure 1, present invention tandem based on compensating interferometer instrument whole-field optically laminated imaging device, including broadband halogen
Element light source 1, kohler's illumination system, compensating interferometer instrument, the second Amici prism 11, detection interferometer, sample 14, imaging len 15 and
Area array CCD 16；The light that broadband halogen light source 1 sends enters compensating interferometer instrument, compensated interferometer two through kohler's illumination system
The light that arm reflects is divided into two-beam by the second Amici prism 11, and the most a branch of detection interferometer that enters, entrance detection is interfered
A light part for instrument is reflected, sample 14 is illuminated by another part through detection interferometer；Reflection light via detection interferometer
As reference light, the rear orientation light of this reference light and sample 14 meets and interferes, and this interference signal passes the second light splitting rib
After mirror 11, focus on area array CCD 16 through imaging len 15.
Preferably, described broadband halogen light source 1 is the OSL1 high-intensity broadband halogen light source of Thorlabs, and power is
150W, centre wavelength is 600nm, carries a width of 300nm, and coherence length is 1.2 μm.
Further, described kohler's illumination system includes being sequentially arranged preposition condenser lens 2, aperture diaphragm 3, field stop
4, rearmounted condenser lens 5, the light beam that broadband halogen light source 1 sends, after preposition condenser lens 2, images at aperture diaphragm 3 for the first time,
Rearmounted condenser lens 5, by the back focal plane of microcobjective in detection interferometer of light source image secondary imaging at this, is so irradiated to sample
On be Uniform Illumination light, biological tissue can be avoided to be burnt.Illumination zone is controlled by field stop 4, adjusts hot spot big
Little, it is achieved the Uniform Illumination of sample.
Further, described compensating interferometer instrument, based on Michelson formula structure, reflects including the first Amici prism 6, first
Mirror the 7, second reflecting mirror 8, piezoelectric actuator 9, linear displacement platform 10, compensating interferometer instrument two-arm places identical reflecting mirror that is first
Reflecting mirror the 7, second reflecting mirror 8, the second reflecting mirror 8 is fixedly installed on linear displacement platform 10, and piezoelectric actuator 9 is fixedly installed on
The non-reflecting surface of two-mirror 8, linear displacement platform 10 realizes regulation light path and axial scan, and piezoelectric actuator 9 realizes phase shift and does
Relate to measurement.By linear adjustment displacement platform 10, the light of compensating interferometer instrument two-arm interferes, as reference signal.With benchmark
The light of signal is divided into the two-beam of 50:50 by the second Amici prism 11, a branch of entrance detection interferometer, the most a branch of injects freedom
Space loss is fallen.
Further, described detection interferometer is based on Feisuo interference structure, including microcobjective 12, microscope slide 13；Carry glass
Sheet 13 is as light splitting plane, and the light of microscope slide 13 reflection is as reference light, and the rear orientation light of sample 14 is as sample light.Micro-
The amplification of object lens 12 is 20X, and numerical aperture is 0.4.Using microscope slide 13 as light splitting flat board, part light is through microscope slide 13
Reflection, part light realizes the Uniform Illumination to sample 14 through microscope slide 13.Using the reflection light via microscope slide 13 as reference
Light, the rear orientation light of sample 14 is as sample light.Both focus on area array CCD 16, finally by calculating by imaged lens 15
Machine processes the signal that area array CCD 16 receives.
In conjunction with the range difference that Fig. 2, D are detection interferometer two-arm, D1It is between first Amici prism the 6 to the first reflecting mirror 7
Distance, D2Being the distance between first Amici prism the 6 to the second reflecting mirror 8, detection interferometer two-arm range difference D is fixed and greater than light
Source coherence length, needs to be compensated light path by compensating interferometer instrument just can interfere.Linear adjustment displacement platform 10 compensates
Reference light and the light path of sample light, meet relation D=| D1-D2| time light path be compensated, detection interferometer two-arm signal occurs dry
Relate to, produce final signal to be detected.
Present invention also offers the imaging side of described tandem whole-field optically laminated imaging device based on compensating interferometer instrument
Method, comprises the following steps:
Step 1, the low-coherent light that broadband halogen light source 1 is launched, after kohler's illumination system, enter compensating interferometer instrument,
Regulation compensating interferometer instrument makes the light of its two-arm produce interference；
Step 2, the light through compensating interferometer instrument enters detection interferometer, micro-thing in regulation sample 14 to detection interferometer
Jing Jiaomianchu, it is achieved whole audience Uniform Illumination；
Step 3, to regulating compensating interferometer instrument after sample 14 Uniform Illumination, makes detection interferometer two-arm signal interfere；
Step 4, enters area array CCD 16 after the imaged lens of interference signal 15 in detection interferometer, thus obtains sample
Tomographic map.
Further, kohler's illumination system described in step 1 includes the preposition condenser lens 2 being sequentially arranged, aperture diaphragm 3, regards
Field diaphragm 4, rearmounted condenser lens 5, the light beam that broadband halogen light source 1 sends, after preposition condenser lens 2, images in aperture light for the first time
At door screen 3, rearmounted condenser lens 5 is by light source image secondary imaging at this back focal plane of microcobjective, field stop 4 in detection interferometer
Illumination zone is controlled, it is achieved the Uniform Illumination of sample.
Further, described in step 2, detection interferometer is based on Feisuo interference structure, including microcobjective 12, microscope slide 13；
Microscope slide 13 is as light splitting plane, and the light of microscope slide 13 reflection is as reference light, and the rear orientation light of sample 14 is as sample light.
Further, compensating interferometer instrument described in step 1 is based on Michelson formula structure, including the first Amici prism 6, first
Reflecting mirror the 7, second reflecting mirror 8, piezoelectric actuator 9, linear displacement platform 10, compensating interferometer instrument two-arm places identical reflecting mirror i.e.
First reflecting mirror the 7, second reflecting mirror 8, the second reflecting mirror 8 is fixedly installed on linear displacement platform 10, and piezoelectric actuator 9 is fixedly installed
In the non-reflecting surface of the second reflecting mirror 8, linear displacement platform 10 realizes regulation light path and axial scan, and piezoelectric actuator 9 realizes moving
Interference is measured.Step 1,3 regulation in can obtain altogether 3 groups of interference fringes, using the interference fringe of compensating interferometer instrument as
Reference position, by the linear displacement platform 10 interference fringe after available other the 2 groups compensation of both direction regulation, thus to sample
Product 14 carry out axial scan, reconstruct the 3-D view of sample 14, and axial resolution and the lateral resolution of system are all up
Submicron rank.
Embodiment 1
In the present embodiment, tandem whole-field optically laminated imaging device based on compensating interferometer instrument is used to carry out imaging, tool
Body regulating step includes:
Step 1, the light that broadband halogen light source 1 sends enters compensating interferometer instrument through kohler's illumination system, and regulation compensates dry
Linear displacement platform 10 in interferometer, makes two-arm signal in compensating interferometer instrument interfere, obtains first group of interference fringe, i.e. benchmark position
Put；
Step 2, the light through compensating interferometer instrument is divided into two bundles, the most a branch of entrance to detect interference by the first Amici prism 6
Instrument, sample 14 is placed in detection interferometer in microcobjective 12 focal plane on, it is achieved the Uniform Illumination of sample 14；
Step 3, the reference position in step 1 is as starting point, and in regulation compensating interferometer instrument, linear displacement platform 10, dry to detection
In interferometer, the optical path difference of two-arm compensates, and respectively can obtain the interferometer bar of one group of sample in the positive and negative both direction in reference position
Stricture of vagina, compensation principle such as Fig. 2；
Step 4, repeats step 3, with the interference fringe of reference position as starting point, finds other 2 groups of samples through overcompensation
Interference fringe also selects the position of one of which interference fringe for measuring position；
Step 5, the piezoelectric actuator 9 in compensating interferometer instrument applies modulated signal, carries out the phase place of light beam in system
Modulation, obtains a series of interference fringe image, is finally restored the tomographic map of sample by demodulation algorithm.
The tomographic map of the following different depth in Bulbus Allii Cepae surface obtained by this system is as shown in Figure 3: Fig. 3 (a) is that Bulbus Allii Cepae is thin
The common micro-image of cellular surface；Fig. 3 (b)～(e) are the tomographic maps at same position different depth, respectively on Bulbus Allii Cepae surface with
At lower 10 μm, 20 μm, 30 μm, 40 μm.
Claims (9)
1. a tandem whole-field optically laminated imaging device based on compensating interferometer instrument, it is characterised in that include broadband halogen
Light source (1), kohler's illumination system, compensating interferometer instrument, the second Amici prism (11), detection interferometer, sample (14), imaging len
And area array CCD (16) (15)；The light that broadband halogen light source (1) sends enters compensating interferometer instrument through kohler's illumination system, through mending
Repay the light that interferometer two-arm reflects and be divided into two-beam by the second Amici prism (11), the most a branch of enter detection interferometer,
A light part for entrance detection interferometer is reflected, another part passes detection interferometer to sample (14) illumination；Via detection
The reflection light of interferometer meets interfere as reference light, the rear orientation light of this reference light and sample (14), and this interference is believed
Number through after the second Amici prism (11), focus on area array CCD (16) through imaging len (15).
Tandem whole-field optically laminated imaging device based on compensating interferometer instrument the most according to claim 1, its feature exists
In, described broadband halogen light source (1) is the OSL1 high-intensity broadband halogen light source of Thorlabs, and power is 150W, middle cardiac wave
A length of 600nm, carries a width of 300nm, and coherence length is 1.2 μm.
Tandem whole-field optically laminated imaging device based on compensating interferometer instrument the most according to claim 1, its feature exists
The preposition condenser lens (2) that includes being sequentially arranged in, described kohler's illumination system, aperture diaphragm (3), field stop (4), rearmounted poly-
Light microscopic (5), the light beam that broadband halogen light source (1) sends, after preposition condenser lens (2), images in aperture diaphragm (3) place for the first time,
Rearmounted condenser lens (5) is by the back focal plane of microcobjective in detection interferometer of light source image secondary imaging at this, and field stop (4) is right
Illumination zone is controlled, it is achieved the Uniform Illumination of sample.
Tandem whole-field optically laminated imaging device based on compensating interferometer instrument the most according to claim 1, its feature exists
In, described compensating interferometer instrument based on Michelson formula structure, including the first Amici prism (6), the first reflecting mirror (7), second anti-
Penetrating mirror (8), piezoelectric actuator (9), linear displacement platform (10), compensating interferometer instrument two-arm is placed identical reflecting mirror that is first and is reflected
Mirror (7), the second reflecting mirror (8), the second reflecting mirror (8) is fixedly installed on linear displacement platform (10), and piezoelectric actuator (9) is fixing to be set
Being placed in the non-reflecting surface of the second reflecting mirror (8), linear displacement platform (10) realizes regulation light path and axial scan, piezoelectric actuator
(9) phase-shifting interference measuring is realized.
Tandem whole-field optically laminated imaging device based on compensating interferometer instrument the most according to claim 1, its feature exists
In, described detection interferometer is based on Feisuo interference structure, including microcobjective (12), microscope slide (13)；Microscope slide (13) conduct
Light splitting plane, the light that microscope slide (13) reflects is as reference light, and the rear orientation light of sample (14) is as sample light.
6. the imaging side of a tandem whole-field optically laminated imaging device based on compensating interferometer instrument as claimed in claim 1
Method, it is characterised in that comprise the following steps:
Step 1, the low-coherent light that broadband halogen light source (1) is launched, after kohler's illumination system, enter compensating interferometer instrument, adjust
Joint compensating interferometer instrument makes the light of its two-arm produce interference；
Step 2, the light through compensating interferometer instrument enters detection interferometer, microcobjective in regulation sample (14) to detection interferometer
At focal plane, it is achieved whole audience Uniform Illumination；
Step 3, to regulating compensating interferometer instrument after sample (14) Uniform Illumination, makes detection interferometer two-arm signal interfere；
Step 4, the imaged lens of the interference signal (15) in detection interferometer enters area array CCD (16) afterwards, thus obtains sample
Tomographic map.
Tandem whole-field optically chromatography imaging method based on compensating interferometer instrument the most according to claim 6, its feature exists
The preposition condenser lens (2) that includes being sequentially arranged in, kohler's illumination system described in step 1, aperture diaphragm (3), field stop (4),
Rearmounted condenser lens (5), the light beam that broadband halogen light source (1) sends, after preposition condenser lens (2), images in aperture diaphragm for the first time
(3) place, rearmounted condenser lens (5) is by light source image secondary imaging at this back focal plane of microcobjective, visual field light in detection interferometer
Illumination zone is controlled by door screen (4), it is achieved the Uniform Illumination of sample.
Tandem whole-field optically chromatography imaging method based on compensating interferometer instrument the most according to claim 6, its feature exists
In, compensating interferometer instrument described in step 1 based on Michelson formula structure, including the first Amici prism (6), the first reflecting mirror (7),
Two-mirror (8), piezoelectric actuator (9), linear displacement platform (10), compensating interferometer instrument two-arm places identical reflecting mirror that is first
Reflecting mirror (7), the second reflecting mirror (8), the second reflecting mirror (8) is fixedly installed on linear displacement platform (10), and piezoelectric actuator (9) is solid
Surely being arranged at the non-reflecting surface of the second reflecting mirror (8), linear displacement platform (10) realizes regulation light path and axial scan, piezoelectric actuated
Device (9) realizes phase-shifting interference measuring.
Tandem whole-field optically chromatography imaging method based on compensating interferometer instrument the most according to claim 6, its feature exists
In, described in step 2, detection interferometer is based on Feisuo interference structure, including microcobjective (12), microscope slide (13)；Microscope slide (13)
As light splitting plane, the light that microscope slide (13) reflects is as reference light, and the rear orientation light of sample (14) is as sample light.
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| CN110044848A (en) * | 2019-04-30 | 2019-07-23 | 中国科学院重庆绿色智能技术研究院 | A kind of weak coherence tomography system and method based on Fizeau principle of interference |
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| CN111829954B (en) * | 2020-09-09 | 2023-07-25 | 广东工业大学 | System and method for improving full-field sweep-frequency optical coherence tomography measurement range |
| CN114166113A (en) * | 2021-12-02 | 2022-03-11 | 中国航空工业集团公司北京长城计量测试技术研究所 | Automatic light beam deflection compensation device and laser interferometer |
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| WO2024000749A1 (en) * | 2022-06-30 | 2024-01-04 | 南京理工大学 | High-aspect-ratio micro-structured transmissive interference-microscopic nondestructive measurement apparatus and method |
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