CN106248198A - Three axle intermediate frequency vibration standard devices - Google Patents
Three axle intermediate frequency vibration standard devices Download PDFInfo
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- CN106248198A CN106248198A CN201610681012.4A CN201610681012A CN106248198A CN 106248198 A CN106248198 A CN 106248198A CN 201610681012 A CN201610681012 A CN 201610681012A CN 106248198 A CN106248198 A CN 106248198A
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- 238000005259 measurement Methods 0.000 claims abstract description 21
- 230000001133 acceleration Effects 0.000 claims description 10
- 238000013481 data capture Methods 0.000 claims description 10
- 238000006073 displacement reaction Methods 0.000 claims description 9
- 230000033228 biological regulation Effects 0.000 claims description 8
- 230000002706 hydrostatic effect Effects 0.000 claims description 8
- 230000033001 locomotion Effects 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 7
- 238000004088 simulation Methods 0.000 claims description 4
- 238000010521 absorption reaction Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 3
- 238000002955 isolation Methods 0.000 claims description 3
- 239000000523 sample Substances 0.000 claims description 3
- 238000013480 data collection Methods 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 11
- 239000000203 mixture Substances 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000446 fuel Substances 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- 239000003921 oil Substances 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 206010010904 Convulsion Diseases 0.000 description 1
- 240000002853 Nelumbo nucifera Species 0.000 description 1
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 1
- 238000011000 absolute method Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000010724 circulating oil Substances 0.000 description 1
- 230000036461 convulsion Effects 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
- G01P21/02—Testing or calibrating of apparatus or devices covered by the preceding groups of speedometers
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- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The present invention provides a kind of three axle intermediate frequency vibration standard devices, three axle medium frequency standard vibration platforms, vibration control system and three axle vibration measurement with laser systems；Three axle medium frequency standard vibration platforms include base platform, X axis vibration platform, Y axis vibration platform, Z axis vibration platform, integrated vibration machine, work top and trapezoidal support seat；Vibration control system includes computer control system, six road vibration controllers, three shaft power amplifiers, three axial piezoelectric accelerometers, charge amplifier and automatic centring device；Three axle vibration measurement with laser systems include three axle laser vibration measurers, target body and three axle laser vibration measurer mounting brackets.Utilize the three axle intermediate frequency vibration standard devices that the present invention provides, three disposable synchro measures of axle sensitivity or the calibration of three axial piezoelectric accelerometers can be realized, ensure that three axial piezoelectric accelerometer measurement/align modes are consistent with its duty, improve sensitivity value accuracy and reliability.
Description
Technical field
The present invention relates to vibration measurement technical field, more specifically, relating to one can be to three axial piezoelectric accelerometer
Carry out three axle synchronous vibrations to measure or three axle intermediate frequency vibration standard devices of calibration.
Background technology
At present, national quality inspection and quarantine general bureau issues JJG233-2008 piezoelectric accelerometer vertification regulation, it is stipulated that
The calibration method of piezoelectric accelerometer sensitivity has relative method and absolute method, and the method is applicable to uniaxially piezoelectric accelerometer
Sensitivity calibrating/calibration.National measurement academy of science, defense-related science, technology and industry the first metrological testing technology research center and domestic
The vibration measurement standard that each measurement technology mechanism sets up, all uses single shaft standard vibration machine to carry out piezoelectricity as vibration machine and adds
The calibrating of velometer, calibrate or measure.Domestic not yet foundation has three axle intermediate frequency vibration standard devices.
Three axial piezoelectric accelerometers refer to have three signal output shafts, can axial acceleration orthogonal to X, Y, Z tri-
Carry out a kind of acceleration transducer of synchro measure.Generally support the use with multichannel suitable tune instrument (such as multichannel charge amplifier), main
The acceleration of vibration in three directions of synchro measure object to be used for, obtains the vector acceleration of object.
Because of domestic nothing three shaft vibration standard set-up, calibrating or the calibration of three axial piezoelectric accelerometers all can only references
JJG233-2008 piezoelectric accelerometer vertification regulation performs, i.e. single to tri-axial sensitivities of X, Y, Z, measure respectively,
Obtain tri-axial Sensitirity va1ues of X, Y, Z of three axial piezoelectric accelerometers, actually obtain sensitivity when single axle uses.
And during the measurement of three axis accelerometer actual vibration, be that multi-components synchronous vibration measures simultaneously, the vibration sensitivity of each axle
There is laterally impact.Because two kinds of measuring states are inconsistent, sensitivity at different frequencies is caused to produce bigger error.
Summary of the invention
In view of the above problems, it is an object of the invention to provide a kind of three axle intermediate frequency vibration standard devices, with solution three
The problem that axle piezoelectric accelerometer three shaft vibration sensitivity synchronous vibration calibration exists bigger error.
The present invention provides a kind of three axle intermediate frequency vibration standard devices, including: frequency marking in three axle medium frequency standard vibration platforms, three axles
The vibration control system of quasi-vibration table and three axle vibration measurement with laser systems of three axle medium frequency standard vibration platforms；Wherein, frequency marking in three axles
Quasi-vibration table include base platform, X axis vibration platform, Y axis vibration platform, Z axis vibration platform, integrated vibration machine, work top and
Trapezoidal support seat；Wherein, the bottom of Z axis vibration platform is fixed on base platform, and the vertical on top is by plane static pressure axle
Holding the integrated vibration machine of connection, the upper end of integrated vibration machine is fixing with work top to be connected；X axis vibration platform shakes with Y-axis
The right side that dynamic platform is horizontally placed at Z axis vibration platform respectively is half side and rear half side, the stage body of X axis vibration platform and the stage body two of Y axis vibration platform
The rotating shaft of side is separately fixed on trapezoidal support seat, and trapezoidal support seat is bolted with base platform；The platform of X axis vibration platform
Body, the stage body of Y axis vibration platform are put down with the X of integrated vibration machine, Y, Z-direction by connecting shaft respectively with the stage body of Z axis vibration platform
Face hydrostatic bearing links together, and the axial line of two connecting shafts is in same level；The moving-coil table top of X axis vibration platform, Y-axis
The moving-coil table top of vibration table and the moving-coil table top of Z axis vibration platform are respectively by ring flange and X, Y, the Z in integrated vibration machine
Connect to plane hydrostatic bearing；Vibration control system includes that computer control system, six road vibration controllers, three shaft power are amplified
Device, three axial piezoelectric accelerometers, charge amplifier and automatic centring device；Wherein, computer control system includes six ways
According to capture card；Six road vibration controllers include six tunnels closed loop control vibrating sensor with vibrational controller and three single shafts,
Six tunnels are connected with three shaft power amplifiers with vibrational controller Zhong tri-tunnel, six tunnels with Ling tri-tunnel in vibrational controller with
Three closed loop control vibrating sensors connect, and six tunnels are used for being converted to digital control vibration signal simulation with vibrational controller
Control output signal to export to three shaft power amplifiers；Three shaft power amplifiers are used for driving X axis vibration platform, Y axis vibration platform, Z
Shaft vibration platform produces X, Y, Z axis respectively to vibration；Three closed loop control vibrating sensors are arranged on the X, Y, Z axis side of work top
Upwards, logical with X, Y, Z input of vibrational controller for the vibration acceleration signal of work top being fed back to described six tunnels
Road, forms the vibration overall process closed loop control of three axle medium frequency standard vibration platforms；The quantity of automatic centring device is 3, solid respectively
Being scheduled on X axis vibration platform, Y axis vibration platform, the side of Z axis vibration platform outer surface, the sensor in each automatic centring device is
Non-contact eddy current sensor, the probe of three non-contact eddy current sensors be separately mounted to X axis vibration platform moving-coil side,
The moving-coil side of Y axis vibration platform and the moving-coil side of Z axis vibration platform, for detecting the moving-coil table top of X axis vibration platform, Y axis vibration
The moving-coil table top of platform and the center of the moving-coil table top of Z axis vibration platform, and it is arranged on subtracting bottom base platform by regulation
Shake feedback control and the regulation of the center signal of the air capacity of air bag, three non-contact eddy current sensor detections, keep Z
The moving-coil table top of shaft vibration platform is in center；Three axial piezoelectric accelerometers are arranged on work top, and put with electric charge
The input of big device connects, and the outfan of charge amplifier and six circuit-switched data capture card Zhong tri-tunnels connect；Three axle vibration measurement with laser
System includes three axle laser vibration measurers, target body and three axle laser vibration measurer mounting brackets；Wherein, three axle laser vibration measurers are by three
The laser vibration measurer composition in tri-directions of X, Y, Z；Three axle laser vibration measurer mounting brackets are rectangle rack structure, and it is fixedly mounted on
The surrounding of three axle intermediate frequency vibration standard platforms, the laser vibration measurer in tri-directions of X, Y, Z is separately mounted to three axle laser vibration measurer peaces
On dress support, target body is arranged on the center of work top.
Additionally, it is preferred that scheme be, in mounting bracket on the intermediate transverse girder of the side supports of X, Y-direction, to fix respectively
Adjustable support platform is installed, with laser vibration measurer and the vibration measurement with laser of Y-direction of X-direction on two adjustable support platforms
Instrument horizontally connects, and the centre position at the top of mounting bracket has two crossbeams, is provided with vibration measurement with laser on two crossbeams
Instrument mounting seat, for fixing the laser vibration measurer of Z-direction.
Furthermore it is preferred that scheme be to set between three axle laser vibration measurer mounting brackets and three axle intermediate frequency vibration standard platforms
It is equipped with the isolation of shockproof ditch.
Furthermore, preferred scheme is, laser vibration measurer is by laser head and drives controller to form, and laser head controls with driving
Being connected by private cable between device, in the outfan of driving controller and six circuit-switched data capture cards, Ling tri-tunnel connects, and drives
Controller, while powering for laser head, receives the photosignal of laser head output, obtains vibration displacement by signal demodulation
And speed, and real-time displacement and velocity voltage signal is provided to export to six circuit-switched data capture cards.
Utilize the three axle intermediate frequency vibration standard devices that the present invention provides, three axles of three axial piezoelectric accelerometers can be realized
The disposable synchro measure of sensitivity or calibration, it is ensured that three axial piezoelectric accelerometer measurement/align modes and its duty phase
Symbol, improves sensitivity value accuracy and reliability.
In order to realize above-mentioned and relevant purpose, one or more aspects of the present invention include will be explained in below and
The feature particularly pointed out in claim.Description below and accompanying drawing are described in detail some illustrative aspects of the present invention.
But, some modes in the various modes of the principle that only can use the present invention of these aspects instruction.Additionally, the present invention
It is intended to include all these aspect and their equivalent.
Accompanying drawing explanation
By with reference to below in conjunction with the explanation of accompanying drawing and the content of claims, and along with to the present invention more comprehensively
Understanding, other purpose of the present invention and result will be more apparent and should be readily appreciated that.In the accompanying drawings:
Fig. 1 is the front view of the three axle medium frequency standard vibration platforms according to the embodiment of the present invention；
Fig. 2 is the top view of the three axle medium frequency standard vibration platforms according to the embodiment of the present invention；
Fig. 3 is the fundamental diagram of the three axle intermediate frequency vibration standard devices according to the embodiment of the present invention；
Fig. 4 is the first visual angle building-block of logic of the three axle intermediate frequency vibration standard devices according to the embodiment of the present invention；
Fig. 5 is the second visual angle building-block of logic of the three axle intermediate frequency vibration standard devices according to the embodiment of the present invention；
Fig. 6 is the laser vibration measurer according to the embodiment of the present invention, three axle medium frequency standard vibration platforms, target body and mounting bracket
Position relationship structure chart.
Reference therein includes: base platform 1, X axis vibration platform 2, Y axis vibration platform 3, Z axis vibration platform 4, integrated shake
Dynamic generator 5, work top 6, trapezoidal support seat 7, plane hydrostatic bearing 8, computer control system 9, multi-Channel Data Acquisition Card
10, six tunnels with vibrational controller 11, three shaft power amplifier 12, automatic centring device 13, closed loop control vibrating sensor 14,
Shock-absorption air bag 15, the laser vibration measurer 16 of X-direction, the laser vibration measurer 17 of Y direction, the laser vibration measurer 18 of Z-direction,
The axial piezoelectric accelerometer 20 of target body 19, three, cooling blower 21, high pressure fuel source 22, charge amplifier 23, three axle laser vibration measurer
Mounting bracket 24, adjustable support platform 25, crossbeam 26, laser vibration measurer mounting seat 27.
Detailed description of the invention
In the following description, for purposes of illustration, in order to provide the comprehensive understanding to one or more embodiments, explain
Many details are stated.It may be evident, however, that these embodiments can also be realized in the case of not having these details.
In other example, for the ease of describing one or more embodiments, known structure and equipment illustrate in block form an.
The three axle intermediate frequency vibration standard devices that the present invention provides, including: three axle medium frequency standard vibration platforms, three axle medium frequency standard
The vibration control system of vibration table and three axle vibration measurement with laser systems of three axle medium frequency standard vibration platforms.The present invention is by frequency vibration in three axles
Dynamic standard set-up three parts respectively, respectively three axle medium frequency standard vibration platforms, vibration control system and three axle vibration measurement with laser systems
System.Separately below three parts are illustrated one by one.
One, three axle medium frequency standard vibration platform
As depicted in figs. 1 and 2, three axle medium frequency standard vibration platforms include base platform 1, X axis vibration platform 2, Y axis vibration platform 3,
Z axis vibration platform 4, integrated vibration machine 5, work top 6 and trapezoidal support seat 7；Wherein, the bottom of Z axis vibration platform 4 is fixed on
On base platform 1, and being placed in lower left side 1/4 region of base platform 1, the vertical on the top of Z axis vibration platform 4 is quiet by plane
Last item holds the 8 integrated vibration machines of connection 5, and the top of integrated vibration machine 5 is fixing with work top 6 to be connected；X axis vibration platform
2 to be horizontally placed at the right side of Z axis vibration platform 4 respectively half side and rear half side with Y axis vibration platform 3, the stage body of X axis vibration platform 2 and Y axis vibration
The rotating shaft of the stage body both sides of platform 3 is separately fixed on trapezoidal support seat 7, and trapezoidal support seat 7 is bolted on base platform 1
On；The stage body of X axis vibration platform 2, the stage body of Y axis vibration platform 3 are shaken with integrated by connecting shaft respectively with the stage body of Z axis vibration platform 4
The dynamic X-axis of generator 5, Y-axis, the plane hydrostatic bearing 8 in three directions of Z axis link together, at the axial line of two connecting shafts
In same level.
X axis vibration platform 2, Y axis vibration platform 3 and Z axis vibration platform 4 Special composition quadrature arrangement, X together with integrated generator 5
The moving-coil table top of the moving-coil table top of shaft vibration platform 2, the moving-coil table top of Y axis vibration platform 3 and Z axis vibration platform 4 passes through ring flange respectively
It is connected with the X-axis in integrated vibration machine 5, Y-axis, the plane hydrostatic bearing 8 in three directions of Z axis.When X axis vibration platform 2, Y-axis
When vibration table 3 and Z axis vibration platform 4 encourage, integrated vibration machine 5 all directions are promoted to produce non-interference plane motion,
Complex vibration is delivered to work top 6 be operated, it is achieved three directions vibrate simultaneously.The effect of integrated vibration machine 5
It is that three orthogonal vibration motions are carried out the mechanically decoupled motion making three direction of motion non-interference, has enough simultaneously
Axial rigidity, it is ensured that the transitivity of direction of primary motion.
The three axle the most supporting cooling blower of medium frequency standard vibration platform 21 and high pressure fuel sources 22, the effect of configuration cooling blower 21 is
Moving-coil table top for X axis vibration platform 2, Y axis vibration platform 3 and Z axis vibration platform 4 is lowered the temperature, it is provided that air convulsion, reaches purpose of freezing；
The effect of configuration high pressure fuel source 22 is to provide the high pressure oil film needed for integrated generator 5 and circulating oil path oil sources.
Two, vibration control system
With reference to Fig. 3-Fig. 5, vibration control system includes that computer control system 9, six road vibration controllers, three shaft power are put
Big device 12, the axial piezoelectric accelerometer 20 of automatic centring device 13, three and charge amplifier 23, wherein, computer control system 9
Including flowing six circuit-switched data capture cards 10, for gathering displacement and the velocity voltage signal of laser vibration measurer；Six road vibration controllers
Including six tunnels with vibrational controller 11 and the closed loop control vibrating sensor 14 of three single shafts, six tunnels are with vibrational controller 11
Zhong tri-tunnel is connected with three shaft power amplifiers 12, and six tunnels shake with three closed loop controls with Ling tri-tunnel in vibrational controller 11
Dynamic sensor 14 connects, and six tunnels control output letter with vibrational controller 11 for digital control vibration signal is converted to simulation
Number output to three shaft power amplifiers 12；Three shaft power amplifiers 12 are used for driving X axis vibration platform 2, Y axis vibration platform 3, Z axis to shake
Dynamic platform 4 produces X-axis, Y-axis, Z-axis direction vibration respectively；Closed loop control vibrating sensor 14 is arranged on the X, Y, Z axis side of work top 6
Upwards, for the vibration acceleration signal of work top being fed back to six tunnels X, Y, Z input channel with vibrational controller 11,
Form the vibration overall process closed loop control of three axle medium frequency standard vibration platforms, make vibration processes controlled, improve vibration control precision and
Degree of stability.
The quantity of automatic centring device 13 is 3, is separately fixed at X axis vibration platform 2, Y axis vibration platform 3, Z axis vibration platform 4
The side of outer surface, the sensor in each automatic centring device 13 is non-contact eddy current sensor, three noncontact electricity
The probe of eddy current sensor is separately mounted to the moving-coil side of X axis vibration platform 2, the moving-coil side of Y axis vibration platform 3 and Z axis vibration
The moving-coil side of platform 4, for detecting the moving-coil table top of X axis vibration platform 2, the moving-coil table top of Y axis vibration platform 3 and Z axis vibration platform 4
The center of moving-coil table top, and be arranged on the air capacity of shock-absorption air bag 15 bottom base platform 1 by regulation, each non-connect
The feedback control of the center signal of electric shock eddy current sensor detection and regulation, keep the moving-coil table top of Z axis vibration platform to be in
Center.
Three axial piezoelectric acceleration 20 meters are arranged on work top 6, and are connected with the input of charge amplifier 23, electricity
The outfan of lotus amplifier 23 and six circuit-switched data capture card 10 Zhong tri-tunnels connect.Three axial piezoelectric accelerations 20 are as being calibrated
Part, after the vibration signal of three axial piezoelectric accelerations 20 is amplified by charge amplifier 23, is transferred to six circuit-switched data capture cards 10.
Three, three axle vibration measurement with laser system
With continued reference to Fig. 3-Fig. 6, three axle vibration measurement with laser systems include three axle laser vibration measurers, target body 19 and three axle Laser Measuring
Vibration Meter install, 24；Wherein, three axle laser vibration measurers are by the laser vibration measurer 16 of X-direction, the laser vibration measurer of Y direction
17, the laser vibration measurer 18 of Z-direction forms；Three axle laser vibration measurer mounting brackets 24 are rectangle rack structure, its fixed installation
In the surrounding of three axle intermediate frequency vibration standard platforms, the laser vibration measurer 16 of X-direction, the laser vibration measurer 17 of Y direction, Z axis side
To laser vibration measurer 18 be separately mounted in three axle laser vibration measurer mounting brackets 24, target body 19 is arranged on work top 6
Center.
The laser vibration measurer 16 of X-direction, the laser vibration measurer 17 of Y direction, the laser vibration measurer 18 of Z-direction all have
Fine position function, can focus on registration etc. to laser optical path, irradiation facula position, size and flare and adjust.X-axis side
To laser vibration measurer 16, the laser vibration measurer 17 of Y direction, the laser vibration measurer 18 of Z-direction all use laser-Doppler
The measuring principle of (i.e. v (t)=k Δ f (t)) of being directly proportional between frequency displacement and speed of moving body measures light path design.Swash
The light that shaven head the sends prism that is split is divided into two-beam: reference light and object light, reference light addition of 40M's after Bragg box
Frequency displacement, object light through polarization splitting prism, λ/4 wave plate Measuring Object surface after return to polarization spectroscope 3, and reference light phase
Overlap and interfere, then reach photodetector surfaces.When object moves, along optical axis direction, the Doppler frequency shift producing △ f,
It is (40MHz ± △ f) that optical-electrical converter receives the frequency of photosignal；If object transfixion, then △ f is 0, now photoelectricity
The frequency of signal is 40MHz, be can determine whether the direction of motion of testee higher or lower than 40MHz by photosignal frequency.
Specifically, in three axle laser vibration measurer mounting brackets 24 on the intermediate transverse girder of the side supports of X, Y-direction, respectively
It is installed with adjustable support platform 25, two adjustable support platforms 25 and the laser vibration measurer 16 of X-direction and Y-axis side
To laser vibration measurer 17 horizontally connect, the laser vibration measurer 17 of the laser vibration measurer 16 of X-direction and Y direction can be entered
Row level and the inching of above-below direction, to ensure the target body on the laser work top 6 just to three axle intermediate frequency vibration standard platforms
X, Y reflecting surface center of 19 correspondences；The centre position at the top of three axle laser vibration measurer mounting brackets 24 has two horizontal strokes
Beam 26, is provided with laser vibration measurer mounting seat 27 on two crossbeams 26, for fixing the laser vibration measurer 18 of Z-direction,
To ensure the Z reflecting surface center of target body 19 correspondence on the laser work top 6 just to three axle intermediate frequency vibration standard platforms.Three
Axle laser vibration measurer mounting bracket is the rectangular box structure of aluminium alloy extrusions composition, it is simple to laser vibration measurer adjusts position.
The isolation of shockproof ditch it is provided with between three axle laser vibration measurer mounting brackets and three axle intermediate frequency vibration standard platforms, it is ensured that
The vibration of three axle intermediate frequency vibration standard platform work does not affect three laser vibration measurers (laser vibration measurer 16 of X-direction, Y-axis sides
To laser vibration measurer 17, the laser vibration measurer 18 of Z-direction) measurement of optical signal of laser optical path.
Three laser vibration measurers (laser vibration measurer 16 of X-direction, the laser vibration measurer 17 of Y direction, Z-direction
Laser vibration measurer 18) be made up of laser head and driver, laser head and drive controller composition, laser head with drive controller it
Between connected by private cable, drive Ling tri-tunnel in outfan and the six circuit-switched data capture cards 10 of controller to connect, drive and control
Device processed while powering for laser head, receive laser head output photosignal, by signal demodulation obtain vibration displacement and
Speed, and provide real-time displacement and velocity voltage signal to export to six circuit-switched data capture cards 10.
The operation principle of the three axle intermediate frequency vibrating devices that the present invention provides is that computer control system 9 exports numeral X, Y, Z
Shaft vibration digital controlled signal, is converted to simulation with vibrational controller 11 by digital control vibration signal through six tunnels and controls output
Signal, drives X axis vibration platform 2, Y axis vibration platform 3, Z axis vibration platform 4 to produce X, Y, Z axis respectively by three shaft power amplifiers 12
To vibration, three axial vibrations are passed to integrated vibration machine 5, integrated vibration machine 5 by middle employing plane static pressure axle 8
Stationary work-table face, upper end 6, formed three axles synchronize complex vibrations.Three closed loop control vibrating sensings that work top 6 is installed
The vibration signal of tri-components of X, Y, Z is fed back to six tunnels with vibrational controller 11, formation closed loop control by device 14.
The above, the only detailed description of the invention of the present invention, but protection scope of the present invention is not limited thereto, and any
Those familiar with the art, in the technical scope that the invention discloses, can readily occur in change or replace, should contain
Cover within protection scope of the present invention.Therefore, protection scope of the present invention should described be as the criterion with scope of the claims.
Claims (4)
1. an axle intermediate frequency vibration standard device, it is characterised in that including: in three axle medium frequency standard vibration platforms, described three axles
Frequently the vibration control system of standard vibration machine and three axle vibration measurement with laser systems of described three axle medium frequency standard vibration platforms；Wherein,
Described three axle medium frequency standard vibration platforms include base platform, X axis vibration platform, Y axis vibration platform, Z axis vibration platform, integrated vibration
Generator, work top and trapezoidal support seat；Wherein, the bottom of described Z axis vibration platform is fixed on described base platform, and pushes up
The vertical of end connects described integrated vibration machine, the upper end of described integrated vibration machine and institute by plane hydrostatic bearing
State the fixing connection of work top；Described X axis vibration platform and described Y axis vibration platform are horizontally placed at the right side of described Z axis vibration platform respectively
Half side and rear half side, the stage body of described X axis vibration platform is separately fixed at described with the rotating shaft of the stage body both sides of described Y axis vibration platform
On trapezoidal support seat, described trapezoidal support seat is bolted with described base platform；The stage body of described X axis vibration platform, institute
State the stage body of the stage body of Y axis vibration platform and described Z axis vibration platform respectively by the X of connecting shaft and described integrated vibration machine,
Y, Z-direction plane hydrostatic bearing link together, and the axial line of two connecting shafts is in same level；Described X axis vibration platform
The moving-coil table top of moving-coil table top, the moving-coil table top of described Y axis vibration platform and described Z axis vibration platform passes through ring flange respectively with described
X in integrated vibration machine, Y, Z-direction plane hydrostatic bearing connect；
Described vibration control system includes computer control system, six road vibration controllers, three shaft power amplifiers, three axially presses
Electricity accelerometer, charge amplifier and automatic centring device；Wherein, described computer control system includes six circuit-switched data collections
Card；Described six road vibration controllers include six tunnels closed loop control vibrating sensor with vibrational controller and three single shafts, institute
Stating six tunnels to be connected with described three shaft power amplifiers with vibrational controller Zhong tri-tunnel, described six tunnels are with in vibrational controller
Ling tri-tunnel is connected with three closed loop control vibrating sensors, and described six tunnels are used for digital control vibration with vibrational controller
Signal is converted to simulation control output signal and exports to described three shaft power amplifiers；Described three shaft power amplifiers are used for driving
Described X axis vibration platform, described Y axis vibration platform, described Z axis vibration platform produce X, Y, Z axis respectively to vibration；Three closed loop controls are shaken
Dynamic sensor is arranged on the X, Y, Z axis direction of described work top, for by the vibration acceleration signal of described work top
Feed back to described six tunnels X, Y, Z input channel with vibrational controller, form the vibration of described three axle medium frequency standard vibration platforms
Overall process closed loop control；The quantity of described automatic centring device is 3, is separately fixed at described X axis vibration platform, described Y-axis is shaken
Dynamic platform, the side of described Z axis vibration platform outer surface, the sensor in each automatic centring device is noncontact current vortex sensing
Device, the probe of three non-contact eddy current sensors is separately mounted to the moving-coil side of described X axis vibration platform, described Y axis vibration
The moving-coil side of platform and the moving-coil side of described Z axis vibration platform, for detecting the moving-coil table top of described X axis vibration platform, described Y-axis
The moving-coil table top of vibration table and the center of the moving-coil table top of described Z axis vibration platform, and it is arranged on described base by regulation
The feedback control of the center signal of the air capacity of the shock-absorption air bag of mesa base, three non-contact eddy current sensors detection
With regulation, the moving-coil table top of described Z axis vibration platform is kept to be in center；Described three axial piezoelectric accelerometers are arranged on institute
State on work top, and be connected with the input of described charge amplifier, the outfan of described charge amplifier and described six tunnels
Data collecting card Zhong tri-tunnel connects；
Described three axle vibration measurement with laser systems include three axle laser vibration measurers, target body and three axle laser vibration measurer mounting brackets；Wherein,
Three axle laser vibration measurers are made up of the laser vibration measurer in tri-directions of three X, Y, Z；Described three axle laser vibration measurer mounting brackets
For rectangle rack structure, it is fixedly mounted on the surrounding of described three axle intermediate frequency vibration standard platforms, the vibration measurement with laser in tri-directions of X, Y, Z
Instrument is separately mounted in described three axle laser vibration measurer mounting brackets, and described target body is arranged on the centre bit of described work top
Put.
Three axle intermediate frequency vibration standard devices the most as claimed in claim 1, it is characterised in that
In described mounting bracket on the intermediate transverse girder of the side supports of X, Y-direction, it is installed with adjustable support respectively and puts down
Platform, two adjustable support platforms horizontally connect with the laser vibration measurer of X-direction and the laser vibration measurer of Y-direction, described
The centre position at the top of mounting bracket has two crossbeams, is provided with laser vibration measurer mounting seat on two crossbeams, uses
Laser vibration measurer in fixing Z-direction.
Three axle intermediate frequency vibration standard devices the most as claimed in claim 1, it is characterised in that
The isolation of shockproof ditch it is provided with between described three axle laser vibration measurer mounting brackets and described three axle intermediate frequency vibration standard platforms.
Three axle intermediate frequency vibration standard devices the most as claimed in claim 1, it is characterised in that
Described laser vibration measurer is by laser head and drives controller to form, and passes through between described laser head and described driving controller
Private cable connect, the outfan of described driving controller is connected with Ling tri-tunnel in described six circuit-switched data capture cards, described in drive
Movement controller, while powering for described laser head, receives the photosignal of described laser head output, is obtained by signal demodulation
Obtain vibration displacement and speed, and provide real-time displacement and velocity voltage signal to export to described six circuit-switched data capture cards.
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| CN201610681012.4A CN106248198A (en) | 2016-08-18 | 2016-08-18 | Three axle intermediate frequency vibration standard devices |
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| CN201610681012.4A CN106248198A (en) | 2016-08-18 | 2016-08-18 | Three axle intermediate frequency vibration standard devices |
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| CN109783937A (en) * | 2019-01-15 | 2019-05-21 | *** | A kind of helicopter shooting vibration environment simple platform analogue system |
| CN110243462A (en) * | 2019-07-01 | 2019-09-17 | 四川瞭望工业自动化控制技术有限公司 | Transport vialog method for detecting vibration |
| CN111238631A (en) * | 2020-02-10 | 2020-06-05 | 天津大学 | Three-axis micro-vibration real-time online measurement system and method |
| CN111323117A (en) * | 2020-04-17 | 2020-06-23 | 杭州锐达数字技术有限公司 | Vibration sensor intermediate frequency calibration system capable of inhibiting transverse deflection |
| CN111928940A (en) * | 2020-09-07 | 2020-11-13 | 深圳市亚特尔科技有限公司 | Calibration method of three-axis vibration sensor |
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| RU2757971C2 (en) * | 2019-06-05 | 2021-10-25 | Федеральное государственное бюджетное образовательное учреждение высшего образования «Саратовский государственный технический университет имени Гагарина Ю.А.» | Low frequency stand for calibration and testing of accelerometers and seismic receivers |
| CN113932917A (en) * | 2021-11-16 | 2022-01-14 | 厦门乃尔电子有限公司 | Output signal control method of vibration sensor calibration system |
| CN115047215A (en) * | 2022-02-18 | 2022-09-13 | 太原理工大学 | Triaxial vibration acceleration signal coupling correction detection system and method |
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| CN112325808A (en) * | 2020-11-03 | 2021-02-05 | 北京石油化工学院 | Flatness real-time calibration compensation measurement method based on multiple PSDs |
| CN113932917B (en) * | 2021-11-16 | 2022-06-10 | 厦门乃尔电子有限公司 | Output signal control method of vibration sensor calibration system |
| CN113932917A (en) * | 2021-11-16 | 2022-01-14 | 厦门乃尔电子有限公司 | Output signal control method of vibration sensor calibration system |
| CN115047215A (en) * | 2022-02-18 | 2022-09-13 | 太原理工大学 | Triaxial vibration acceleration signal coupling correction detection system and method |
| CN115452127A (en) * | 2022-11-11 | 2022-12-09 | 日照市计量科学研究院 | Gear hobbing machine main shaft vibration laser testing device |
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