CN106241732A - The method that substrate surface is micro-fluidic - Google Patents
The method that substrate surface is micro-fluidic Download PDFInfo
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- CN106241732A CN106241732A CN201610752689.2A CN201610752689A CN106241732A CN 106241732 A CN106241732 A CN 106241732A CN 201610752689 A CN201610752689 A CN 201610752689A CN 106241732 A CN106241732 A CN 106241732A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
Abstract
The invention discloses a kind of method that substrate surface is micro-fluidic, it includes substrate is carried out moditied processing, the pre-pattern of liquid flowing is made at substrate surface, utilize hydrophobe principle, solvent is made to flow along pattern, the method heated by electricity, control solvent directed flow, in the conveying of solvent dopant dye molecular orientation and dilution, this method provide the another kind of approach of microflow control technique.Liquid selective can be realized by hydrophobe picture on surface to flow, liquid flow velocity speed can be controlled by controlling the different of hydrophobe picture on surface live width, surface can be realized micro-fluidic, moreover it is possible to by surface miniflow orientation control conveying organic functional molecular by the heating of electricity constituency.Instant invention overcomes the rigors of traditional manufacturing technique, breach again the bottleneck of conventional surface microflow control technique development, and relatively low with the requirement of environment to instrument.
Description
Technical field
The present invention relates to the preparation method of a kind of micro structural component, particularly relate to a kind of method that surface is micro-fluidic, should
Preparing technical field for micro structural component.
Background technology
Microflow control technique refers to by manufacturing the technology that microchannel processes or manipulates minute fluid in base, and surface
Micro-fluidic referring to, by processing surface, base, realizes microflow control technique on surface, base.
In recent years, the function of assay laboratory is transferred in portable analytical equipment by micro-total analysis system to greatest extent
Or on chip, saved research cost greatly, improve the accuracy of experimental analysis, and realize the individualized of analysis system and
Domestic, are referred to as the microflow control technique of " chip lab ", with fastest developing speed in being, have most a field of Research Prospects.Table
Face micro-fluidic with its 1. system be highly miniaturized, integrated;2. reagent consumption is little;3. high-throughput isolation, detection, and choosing
Selecting property is good;4. speed is analyzed fast;5. the feature of low cost, causes the extensive concern of scholars, and being widely used in
, material, biology, pharmaceutical analysis, area of medical diagnostics.
The manufacture method of its main flow mainly has traditional microfluidic method and the micro-fluidic method of conventional surface.Traditional microfluidic method is main
Including photoetching around note method, mechanical processing method, pressure sintering, method of molding, etching method etc..But traditional preparation method has some to make
Standby upper shortcomings and limitations, and be difficult to avoid that 1) design of MCA and manufacture；2) driving of micro/nano-scale fluid
With control；3) the loaded down with trivial details step such as the integrated and encapsulation of micro-fluidic device and system, hinders the universal of micro-fluidic chip significantly
And popularization.Such as: mechanical processing method is based on precision optical machinery or laser-engraving technique, at hard material such as silicon chip, glass, Ya Ke
The Surface Machining such as power plate go out the method for groove and obtain micro channels, and the channel seal that the method obtains is more difficult, channel wall
Roughness be difficult to control to, passage printing opacity life can also susceptible.The micro-fluidic method of conventional surface is mainly by the parent of substrate surface
Hydrophobic difference realize liquid selectivity flowing, its method a little, abandoned pipeline in loaded down with trivial details traditional microfluidic technology
Manufacture method, detection method is more convenient, becomes the technology being expected to most replace traditional method.But its method also has significantly
Defect, topmost problem is exactly the accurate control being difficult to traditional method to liquid, thus becomes the development of the method
Bottleneck.
Summary of the invention
In order to solve prior art problem, it is an object of the invention to the deficiency overcoming prior art to exist, it is provided that a kind of
The method that substrate surface is micro-fluidic, can realize liquid selective by hydrophobe picture on surface and flow, can be by controlling close and distant water meter
The different of face pattern line-width control liquid flow velocity speed, can realize surface by the heating of electricity constituency micro-fluidic, moreover it is possible to logical
Cross surface miniflow orientation control conveying organic functional molecular.The micro-fluidic method of substrate surface of the present invention includes modifying substrate
Process, make the pre-pattern of liquid flowing at substrate surface, utilize hydrophobe principle, make solvent flow along pattern, pass through electricity
The method of heating, controls solvent directed flow, in the conveying of solvent dopant dye molecular orientation and dilution, present approach provides
The another kind of approach of microflow control technique.
Creating purpose for reaching foregoing invention, the present invention uses following technical proposals:
A kind of method that substrate surface is micro-fluidic, comprises the steps:
A. choose substrate, use lyophobic dust or hydroaropic substance as dressing agent, substrate surface is carried out at modification
Reason, is formed on the surface of the substrate and modifies top layer, prepare hydrophobic substrate or hydrophilic base；
B. in the substrate that described step a moditied processing is crossed, pre-pattern is being introduced；
C. to shifting the fluent material of set amount on the suprabasil pre-pattern that described step a modified processes, base is utilized
The surface of the pre-pattern at the end is different with the hydrophobe character on other surfaces of substrate, makes fluent material only along suprabasil pre-
The lines bearing of trend of pattern flows, and forms fluent material miniflow, by controlling suprabasil pre-figure in described step a
Case line width variation and the variations in temperature of fluent material, control flow velocity and the miniflow district of fluent material formation of fluent material miniflow
The size of region pattern.The present invention realizes solvent flow speed by the change of pattern line-width and the difference of substrate surface temperatures
Controlling, the valve of customer service traditional microfluidic technology is installed and in conventional surface microflow control technique flow velocity is unmanageable asks
Topic.
As currently preferred technical scheme, in described step c, by controlling the material temperature of suprabasil pre-pattern
Degree change controls the variations in temperature of fluent material, forms fluent material miniflow.
As a kind of further preferred technical scheme of the present invention, in described step c, utilize the side that electricity heats
Method, by electricity constituency, makes the entirety of suprabasil pre-pattern or local be connected with external circuit, is formed and outreach Circuits System,
Outreaching Circuits System by control and be applied to the electric current of suprabasil pre-pattern, entirety or local to suprabasil pre-pattern are entered
Row heating, is changed by the bulk temperature controlling suprabasil pre-pattern or local temperature changes, control to flow through suprabasil
The overall region of pre-pattern or the variations in temperature of the fluent material miniflow of regional area, and then set the stream of fluent material miniflow
Dynamic orbital path, makes fluent material miniflow be oriented flowing only along suprabasil pre-pattern.The present invention utilizes electricity control
Realize the method that surface is micro-fluidic, by using hydrophobe substrate, it is achieved the constituency flowing of micro-fluidic solvent, just overcome biography
System microflow control technique uses microchannel to control the drawback of liquid；Heated by electricity constituency, it is achieved patterned substrate surface
Variations in temperature, thus control the directed flow of solvent, overcomes that conventional surface microflow control technique flow direction is out of contior asks
Topic.
As the technical scheme that the another kind of the present invention is further preferred, in described step c, by controlling base reservoir temperature
Change controls the material temperature change of suprabasil pre-pattern.
As the further preferred technical scheme of such scheme of the present invention, drive fluent material miniflow along suprabasil
When the lines bearing of trend of pre-pattern flows, described fluent material is by the dispersant system of organic functional molecule material that adulterates
The dispersion liquid become, or the solution being made up of the solvent of organic functional molecule material that adulterates, wherein, organic functional molecular material
With solvent as carrier fluid, by the fluent material miniflow driving effect on the surface of suprabasil pre-pattern, make fluent material micro-
Stream carries organic functional molecular material, is oriented conveying along suprabasil pre-pattern.The present invention can realize utilizing surface
Micro-fluidic conveying organic functional molecular.
Above-mentioned organic functional molecular material preferably employs NPB or Alq3Material.
Above-mentioned substrate preferably employs in semiconductor material slices, sheet glass, potsherd, organic material sheet and composite material sheet
Any one material piece or the substrate of the above-mentioned material through chemical modification.
Above-mentioned substrate preferably employs any one material in silicon, silicon oxide, silicate, aluminium oxide and organic material or appoints
The composite of meaning different materials is made.
Above-mentioned dressing agent preferably employs chlorosilane, silicon fluoride or HMDS.
When pre-pattern is prepared in substrate, preferably visited by beamwriter lithography, optical lithography, soft lithographic, mask or scanning
Pin microscope photoetching method, prepares the adsorption zone of pre-pattern material in substrate.
When preparing pre-pattern in substrate, the adsorption zone of pre-pattern material is preferably conducive to organic material by deposition in substrate
The material of material deposition is formed.
When pre-pattern is prepared in substrate, selected use be conducive to organic material deposition material preferably employ titanium,
Gold, silver have any one material in the material of different surfaces energy or the most several composites with other relative to substrate.
Drive fluent material along the lines bearing of trend of suprabasil pre-pattern flow time, it is preferred to use liquid
Material is wax candle or 2-ethoxy pyridine material.
The present invention compared with prior art, has and the most obviously highlights substantive distinguishing features and remarkable advantage:
Surface the most of the present invention microfluidic methods occurs, at substrate surface, to overcome experiment bar harsh in traditional microfluidic technology
Part, accurate experimental apparatus requirement, be difficult to solvent in the surface microflow control technique overcome and flow to unmanageable problem；
2. the present invention can be in terms of experimental situation, it is achieved that the surface in atmospheric environment is micro-fluidic；
3. the present invention does not wants special pushing means in terms of power, and the computer heating control just with electric current flows with static, logical
Cross and simple must regulate and control size of current and change live width and can realize the flow speed control of liquid；
4. the present invention need not special pipeline tools in terms of experimental apparatus, just with ripe patterning techniques
Realize the making of chip；
5. the present invention is in context of detection, and liquid need not flow in special pipeline, makes detection and application more they tend to conveniently；
5. instant invention overcomes the rigors of traditional manufacturing technique, breach again the bottle of conventional surface microflow control technique development
Neck, and relatively low with the requirement of environment to instrument.
Accompanying drawing explanation
Fig. 1 be the embodiment of the present invention one under uniform heated condition, wax candle is at hydrophobe substrate surface, under different live widths
The image of flowing.
Fig. 2 is the embodiment of the present invention two image of wax candle flowing when hydrophobe surface is uniformly heated.
Fig. 3 is the embodiment of the present invention three wax candle flow image when hydrophobe surface use current selective heating.
Fig. 4 is the image of the embodiment of the present invention four electric current heating orientation conveying organic dye molecule.
Fig. 5 is the image of the embodiment of the present invention five electricity consumption stream heated transportation difference organic dye molecule respectively.
Fig. 6 is the circuit luminescent image of the embodiment of the present invention five electricity consumption stream heated transportation difference organic dye molecule respectively.
Detailed description of the invention
Details are as follows for the preferred embodiments of the present invention:
Embodiment one:
In the present embodiment, see Fig. 1, a kind of method that substrate surface is micro-fluidic, comprise the steps:
A. choose silicon chip and as dressing agent, substrate surface is carried out moditied processing, specifically as substrate, employing lyophobic dust
For: first by silicon chip chloroform, acetone, ethanol, water supersound process 10min, then nitrogen dries up standby；Preparation chloroform: positive second
The mol ratio of alkane is the mixed solution 40ml of 3:7, adds OTS 10ul, obtains dressing agent after stirring, by above-mentioned process
The most standby silicon chip substrate is put in dressing agent, stands 5-7 hour in fume hood, after silicon chip is taken out from dressing agent,
The most respectively with chloroform, acetone, alcohol flushing silicon chip, use nitrogen to dry up silicon chip, then at 80 DEG C, toast silicon chip 10 minutes,
Silicon chip surface is formed and modifies top layer, prepare hydrophobic substrate；
B. in the substrate that described step a moditied processing is crossed, the pre-pattern being made up of series of parallel lines is being introduced, specifically
For: in described step a, photoetching will be carried out by gained hydrophobic substrate, hydrophobic substrate will be prepared the absorption of pre-pattern material
District, then vacuum vapor deposition thickness is the Ti of 2-3nm and thickness is the Au of 12nm, prepares gold pattern；
C. the golden pattern made in described step b is heated uniformly to 100 DEG C on warm table, when the temperature of gold pattern
After Wen Ding, adding hard paraffin in one end of gold pattern, after paraffin melting, owing to hydrophobe is different, vasoliniment i.e. can be certainly
Dynamic along the flowing of gold thread pattern, see Fig. 1.To shifting stone on the suprabasil pre-pattern that described step a modified processes
Wax, the surface utilizing golden pattern on hydrophobic substrate is different with the hydrophobe character on other surfaces of hydrophobic substrate, makes paraffin
Liquid flows only along the lines bearing of trend of the golden pattern on hydrophobic substrate, forms liquid paraffin miniflow, passes through
In described step a, control the golden pattern line-width change on hydrophobic substrate and the variations in temperature of liquid paraffin, control liquid
The size of the microfluidic region pattern that the flow velocity of paraffin miniflow and liquid paraffin are formed.
The present embodiment is using photoetching to combine vacuum vapor deposition gold evaporation, obtains the golden pattern of different live width width, then
Uniformly heating on warm table, add hard paraffin under different live widths, wax candle i.e. flows along predetermined direction after melting.Line
When width is wider, flowing velocity is fast, and when live width is narrower, flowing velocity is slow, sees Fig. 1.The present embodiment can apply to of method
The preparing technical field of the chip devices such as, material, biology, pharmaceutical analysis, medical diagnosis.
Embodiment two:
The present embodiment is essentially identical with embodiment one, is particular in that:
In the present embodiment, see Fig. 2, a kind of method that substrate surface is micro-fluidic, comprise the steps:
A. choose glass and as dressing agent, substrate surface is carried out moditied processing, specifically as substrate, employing lyophobic dust
For: first by glass chloroform, acetone, ethanol, water supersound process 10min, then nitrogen dries up standby；Preparation chloroform: positive second
The mol ratio of alkane is the mixed solution 40ml of 3:7, adds OTS 10ul, obtains dressing agent after stirring, by above-mentioned process
The most standby substrate of glass is put in dressing agent, stands 5-7 hour in fume hood, after glass is taken out from dressing agent,
The most respectively with chloroform, acetone, alcohol flushing glass, use nitrogen to dry up glass, then at 80 DEG C, toast silicon chip 10 minutes,
Formed on the glass surface and modify top layer, prepare hydrophobic substrate；
B. in the substrate that described step a moditied processing is crossed, the pre-pattern with width branch of the same race is being introduced, particularly as follows:
In described step a, photoetching will be carried out by gained hydrophobic substrate, hydrophobic substrate be prepared the adsorption zone of pre-pattern material, so
Final vacuum vapour deposition thickness is the Ti of 2-3nm and thickness is the Au of 12nm, prepares gold pattern；
C. the golden pattern made in described step b is heated uniformly to 100 DEG C on warm table, when the temperature of gold pattern
After Wen Ding, add hard paraffin in one end of gold pattern, after paraffin melting, i.e. can be automatically along each branch line of gold thread pattern
Bar flows, and sees Fig. 2.To shifting paraffin on the suprabasil pre-pattern that described step a modified processes, utilize hydrophobicity
The surface of suprabasil gold pattern is different with the hydrophobe character on other surfaces of hydrophobic substrate, makes vasoliniment only along dredging
The lines bearing of trend of aqueous suprabasil gold pattern flows, and forms liquid paraffin miniflow, by controlling in described step a
Golden pattern line-width change on hydrophobic substrate processed and the variations in temperature of liquid paraffin, control liquid paraffin miniflow flow velocity and
The size of the microfluidic region pattern that liquid paraffin is formed.
The present embodiment is using photoetching to combine vacuum vapor deposition gold evaporation, obtains the gold figure with width branch of the same race
Case, more uniformly heat on warm table, under different live widths, adding hard paraffin, wax candle i.e. flows along predetermined direction after melting
Dynamic, see Fig. 2.The present embodiment method can apply to carry out the chip devices such as chemistry, material, biology, pharmaceutical analysis, medical diagnosis
The preparing technical field of part.
Embodiment three:
The present embodiment is substantially the same as in the previous example, and is particular in that:
In the present embodiment, see Fig. 3, a kind of method that substrate surface is micro-fluidic, comprise the steps:
A. this step is identical with embodiment two；
B. this step is identical with embodiment two；
C. utilize the method that electricity heats, select electric current to control mode of heating, by electricity constituency, make on hydrophobic substrate
The local of gold pattern is connected with external circuit, is formed and outreaches Circuits System, outreaches Circuits System by control and be applied to hydrophobicity
The electric current of suprabasil gold pattern, heats the local of the golden pattern on hydrophobic substrate, the hydrophobicity base not being energized
Other regions of golden pattern at the end are not the most energized heating and temperature is relatively low, by controlling the golden pattern on hydrophobic substrate
Local temperature change, the temperature controlling to flow through the fluent material miniflow of the regional area of the golden pattern on hydrophobic substrate becomes
Change, and then set the flow track path of fluent material miniflow, make fluent material miniflow only along the gold on hydrophobic substrate
Pattern is oriented flowing.The golden pattern local made in described step b is heated, when the temperature stabilization of gold pattern
After, add hard paraffin in one end of gold pattern, after paraffin melting, i.e. can be automatically along the selected branch lines of gold thread pattern
Flowing, sees Fig. 3.To shifting paraffin on the suprabasil pre-pattern that described step a modified processes, utilize hydrophobicity base
The surface of the golden pattern at the end is different with the hydrophobe character on other surfaces of hydrophobic substrate, makes vasoliniment only along hydrophobic
Property suprabasil gold pattern lines bearing of trend flow, formed liquid paraffin miniflow, by described step a control
Golden pattern line-width change on hydrophobic substrate and the variations in temperature of liquid paraffin, control flow velocity and the liquid of liquid paraffin miniflow
The size of the microfluidic region pattern that paraffin body is formed.
The present embodiment the most just can melt due to paraffin, as long as so regulating size of current, paraffin melting
After i.e. can along energising region flowing.Thus arrive the purpose of oriented control liquid flowing, electric current is used on hydrophobe surface
Wax candle flow image during selectivity heating, sees Fig. 3.The present embodiment selects glass to carry out aforesaid operations as substrate, produces
The circuit gold thread pattern that hydrophobe is different, connects circuit, utilizes D.C. regulated power supply to choose suitable current, carry out electricity constituency and add
Heat.One end is dripped and is put wax candle, and wax candle i.e. can be along the gold thread circuit flowing of energising after melting.The present embodiment is controlled by simple electricity
The method realizing surface microflow control technique, after substrate is carried out moditied processing, makes the pre-figure of liquid flowing at substrate surface
Case, utilizes hydrophobe principle, makes solvent flow along pattern, and the method heated by electricity controls solvent directed flow, at solvent
The conveying of dopant dye molecular orientation and dilution, this method provide the another kind of approach of microflow control technique.The present embodiment method can
To be applied to carry out the preparing technical field of the chip devices such as chemistry, material, biology, pharmaceutical analysis, medical diagnosis.
Embodiment four:
The present embodiment is substantially the same as in the previous example, and is particular in that:
In the present embodiment, see Fig. 4, a kind of method that substrate surface is micro-fluidic, comprise the steps:
A. this step is identical with embodiment two；
B. this step is identical with embodiment two；
C. wax candle is heated to 100 DEG C dissolve after add after dye molecule NPB, the most ultrasonic to dissolving, the coldest
But standby to solid state；Then utilize the method that electricity heats, select electric current to control mode of heating, selected by electricity constituency
Article one, circuit, makes the local of the golden pattern on hydrophobic substrate be connected with external circuit, is formed and outreaches Circuits System, steady with direct current
Voltage source heats, and is outreached the electric current of the golden pattern that Circuits System is applied on hydrophobic substrate by control, to hydrophobic substrate
On the local of golden pattern heat, other regions of the golden pattern on the hydrophobic substrate not being energized are not the most energized
Heating and temperature is relatively low, changed by the local temperature controlling the golden pattern on hydrophobic substrate, control to flow through hydrophobicity base
The variations in temperature of the fluent material miniflow of the regional area of the golden pattern at the end, and then set the flowing rail of fluent material miniflow
Path, makes fluent material miniflow be oriented flowing only along the golden pattern on hydrophobic substrate.Make in described step b
The golden pattern local performed is heated, when, after the temperature stabilization of gold pattern, adding containing dye molecule in one end of gold pattern
Solid candle, after paraffin melting, i.e. can see Fig. 4 automatically along the selected branch lines flowing of gold thread pattern.To process
On the suprabasil pre-pattern that described step a modified processes, the transfer solid candle containing dye molecule, utilizes hydrophobicity base
The surface of the golden pattern at the end is different with the hydrophobe character on other surfaces of hydrophobic substrate, makes the candle liquid containing dye molecule
Body flows only along the lines bearing of trend of the golden pattern on hydrophobic substrate, forms the candle liquid containing dye molecule
Body miniflow, by controlling the golden pattern line-width change on hydrophobic substrate and the wax candle containing dye molecule in described step a
The variations in temperature of liquid, controls the flow velocity of the wax candle liquid miniflow containing dye molecule and contains the wax candle liquid of dye molecule
The size of the microfluidic region pattern formed.
The present embodiment the most just can melt due to wax candle, as long as so regulating size of current, and paraffin candleization
After i.e. can along energising region flowing.Thus arrive the purpose of oriented control liquid flowing, it is achieved by wax candle as solvent
Orientation conveying organic dye molecule, chip structure device example ultraviolet excitation prepared by the present embodiment, i.e. can be sent out
One circuit of light, sees Fig. 4.The present embodiment, by wax candle heating and melting on warm table, adds the little molecule of organic functions while hot,
And carry out in a heated state ultrasonic making functional molecular be dissolved in wax candle, then utilize electricity heating orientation conveying by step c
Organic functional molecular.The present embodiment method can apply to carry out the chips such as chemistry, material, biology, pharmaceutical analysis, medical diagnosis
The preparing technical field of device.
Embodiment five:
The present embodiment is substantially the same as in the previous example, and is particular in that:
In the present embodiment, see Fig. 5 and Fig. 6, a kind of method that substrate surface is micro-fluidic, comprise the steps:
A. this step is identical with embodiment two；
B. in the substrate that described step a moditied processing is crossed, the pre-pattern of three branches with width of the same race, tool are being introduced
Body is: will carry out photoetching by gained hydrophobic substrate in described step a, and prepare the absorption of pre-pattern material on hydrophobic substrate
District, then vacuum vapor deposition thickness is the Ti of 2-3nm and thickness is the Au of 12nm, prepares gold pattern；
C. wax candle is heated to 100 DEG C dissolve after be separately added into dye molecule NPB and green Alq3After, at heated condition respectively
Under ultrasonic to dissolve, be cooled to solid state the most respectively standby, simultaneously use red candle as the third material, this enforcement
Example have employed different dye molecules compared with embodiment four；Then utilize the method that electricity heats, select electric current to control heating
Mode, selects a circuit by electricity constituency, makes three branches of the golden pattern on hydrophobic substrate all connect with external circuit
Connect, formed and outreach Circuits System, heat with D.C. regulated power supply, outreach Circuits System by control and be applied on hydrophobic substrate
The electric current of golden pattern, the golden pattern on hydrophobic substrate is heated, by controlling the golden pattern temperature on hydrophobic substrate
Degree change, controls to flow through the variations in temperature of the fluent material miniflow of three branches of the golden pattern on hydrophobic substrate, and then
Set the flow track path of fluent material miniflow, make fluent material miniflow carry out only along the golden pattern on hydrophobic substrate
Directed flow.Utilize electricity heating that the golden pattern difference circuit made in described step b is heated, when gold pattern
After temperature stabilization, contain the wax candle of dye molecule NPB respectively along conveying, containing dye molecule Alq3Wax candle and red candle
These three wax candle, makes these three wax candle liquid automatically along the selected branch lines flowing of gold thread pattern, sees Fig. 5.To process
Three branch's transfers on the suprabasil pre-pattern that described step a modified processes respectively contain the solid candle of dye molecule,
The surface utilizing golden pattern on hydrophobic substrate is different with the hydrophobe character on other surfaces of hydrophobic substrate, makes each candle liquid
The body only corresponding lines bearing of trend along the golden pattern on hydrophobic substrate flows, and forms each wax candle liquid miniflow,
By controlling the golden pattern line-width change on hydrophobic substrate and the variations in temperature of each wax candle liquid in described step a, control
Make the flow velocity of each wax candle liquid miniflow and the size of the microfluidic region pattern of each candle liquid body formation.
The chip structure device example ultraviolet excitation prepared by the present embodiment, i.e. can get three and sends out different colours light
Circuit, see Fig. 6.
Above in conjunction with accompanying drawing, the embodiment of the present invention is illustrated, but the invention is not restricted to above-described embodiment, it is also possible to
The purpose of the innovation and creation according to the present invention makes multiple change, under all spirit according to technical solution of the present invention and principle
The change made, modify, substitute, combine or simplify, all should be the substitute mode of equivalence, as long as meeting the goal of the invention of the present invention,
Without departing from know-why and the inventive concept of the micro-fluidic method of substrate surface of the present invention, broadly fall into the protection model of the present invention
Enclose.
Claims (13)
1. the method that a substrate surface is micro-fluidic, it is characterised in that comprise the steps:
A. choose substrate, use lyophobic dust or hydroaropic substance as dressing agent, substrate surface is carried out at modification
Reason, is formed on the surface of the substrate and modifies top layer, prepare hydrophobic substrate or hydrophilic base；
B. in the substrate that described step a moditied processing is crossed, pre-pattern is being introduced；
C. to shifting the fluent material of set amount on the suprabasil pre-pattern that described step a modified processes, base is utilized
The surface of the pre-pattern at the end is different with the hydrophobe character on other surfaces of substrate, makes fluent material only along suprabasil pre-
The lines bearing of trend of pattern flows, and forms fluent material miniflow, by controlling suprabasil pre-figure in described step a
Case line width variation and the variations in temperature of fluent material, control flow velocity and the miniflow district of fluent material formation of fluent material miniflow
The size of region pattern.
The method that the most according to claim 1, substrate surface is micro-fluidic, it is characterised in that: in described step c, by controlling
The material temperature change of suprabasil pre-pattern controls the variations in temperature of fluent material, forms fluent material miniflow.
The method that the most according to claim 2, substrate surface is micro-fluidic, it is characterised in that: in described step c, utilize electricity
The method of heating, by electricity constituency, makes the entirety of suprabasil pre-pattern or local be connected with external circuit, is formed and outreach electricity
Road system, outreaches Circuits System by control and is applied to the electric current of suprabasil pre-pattern, the entirety to suprabasil pre-pattern
Or locally heat, changed by the bulk temperature controlling suprabasil pre-pattern or local temperature changes, control to flow through
The overall region of suprabasil pre-pattern or the variations in temperature of the fluent material miniflow of regional area, and then set fluent material
The flow track path of miniflow, makes fluent material miniflow be oriented flowing only along suprabasil pre-pattern.
The method that the most according to claim 2, substrate surface is micro-fluidic, it is characterised in that: in described step c, by controlling
Base reservoir temperature change controls the material temperature change of suprabasil pre-pattern.
5. according to the method that substrate surface described in any one in Claims 1 to 4 is micro-fluidic, it is characterised in that: in described step
In rapid c, drive fluent material miniflow along the lines bearing of trend of suprabasil pre-pattern flow time, described fluent material
The dispersion liquid being made up of the dispersant of organic functional molecule material that adulterates, or by the molten of organic functional molecule material of adulterating
The solution that agent is made, wherein, organic functional molecular material is with solvent as carrier fluid, on the surface by suprabasil pre-pattern
Fluent material miniflow driving effect, makes fluent material miniflow carry organic functional molecular material, along suprabasil pre-pattern
It is oriented conveying.
The method that the most according to claim 5, substrate surface is micro-fluidic, it is characterised in that: in described step c, organic functions
Molecular material uses NPB or Alq3Material.
7. according to the method that substrate surface described in any one in Claims 1 to 4 is micro-fluidic, it is characterised in that: in described step
In rapid a, substrate uses any one material in semiconductor material slices, sheet glass, potsherd, organic material sheet and composite material sheet
Tablet or the substrate of the above-mentioned material through chemical modification.
8. according to the method that substrate surface described in any one in Claims 1 to 4 is micro-fluidic, it is characterised in that: in described step
In rapid a, substrate uses any one material in silicon, silicon oxide, silicate, aluminium oxide and organic material or any different materials
Composite make.
9. according to the method that substrate surface described in any one in Claims 1 to 4 is micro-fluidic, it is characterised in that: in described step
In rapid a, dressing agent uses chlorosilane, silicon fluoride or HMDS.
10. according to the method that substrate surface described in any one in Claims 1 to 4 is micro-fluidic, it is characterised in that: in described step
In rapid b, when pre-pattern is prepared in substrate, micro-by beamwriter lithography, optical lithography, soft lithographic, mask or scanning probe
Mirror photoetching method, prepares the adsorption zone of pre-pattern material in substrate.
11. methods that substrate surface is micro-fluidic according to claim 10, it is characterised in that: in described step b, in substrate
Upper when preparing pre-pattern, the adsorption zone of pre-pattern material is conducive to the material of organic material deposition to be formed by deposition in substrate.
12. according to the micro-fluidic method of substrate surface described in claim 11, it is characterised in that: in described step b, in substrate
Upper when preparing pre-pattern, the material being conducive to organic material deposition of selected use is titanium, gold, silver and other are relative to substrate
There are any one material in the material of different surfaces energy or the most several composites.
13. according to the micro-fluidic method of substrate surface described in any one in Claims 1 to 4, it is characterised in that: in described step
In rapid c, drive fluent material along the lines bearing of trend of suprabasil pre-pattern flow time, the fluent material of employing is
Wax candle or 2-ethoxy pyridine material.
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