CN106239371B - Trimmer gas handling system and polishing machine - Google Patents
Trimmer gas handling system and polishing machine Download PDFInfo
- Publication number
- CN106239371B CN106239371B CN201610855025.9A CN201610855025A CN106239371B CN 106239371 B CN106239371 B CN 106239371B CN 201610855025 A CN201610855025 A CN 201610855025A CN 106239371 B CN106239371 B CN 106239371B
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- Prior art keywords
- control valve
- trimmer
- main pipe
- pipe rail
- compressed air
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- 238000005498 polishing Methods 0.000 title claims abstract description 19
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000012856 packing Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/12—Dressing tools; Holders therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M35/00—Combustion-air cleaners, air intakes, intake silencers, or induction systems specially adapted for, or arranged on, internal-combustion engines
- F02M35/10—Air intakes; Induction systems
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- General Engineering & Computer Science (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a kind of trimmer gas handling system and polishing machine, trimmer gas handling system includes：Vacuum source；Vacuum line, the vacuum line are connected with the vacuum source；Compressed air source；Compressed air line, the compressed air line are connected with the compressed air source；Trimmer, the trimmer are formed with load chamber, and the load chamber is selectively connected with the vacuum line, the compressed air line and air.By rationally controlling the on off operating mode between trimmer and vacuum source, compressed air source and air source, the state of the load chamber in trimmer can be changed, and in the initial state, air source can feed air into LOADED CAVITY room, it is reduced with the service life so as to avoid loading breakage caused by chamber is shunk for a long time, and can be to avoid the consumption energy.
Description
Technical field
The present invention relates to polissoir technical field more particularly to a kind of trimmer gas handling system and there is the trimmer
The polishing machine of gas handling system.
Background technology
In chemically mechanical polishing, with the progress of polishing process, the physics and chemical property of polishing pad can change,
Polishing speed and quality of finish is caused to reduce.Therefore, finishing appropriate, trimmer must be carried out to polishing pad in polishing process
Polishing pad can be modified, polishing effect can be improved in this way, improve the service life of polishing pad, reduce polishing cost.
But trimmer is in the initial state, is disengaged with polishing pad using negative pressure by head is modified, loads chamber in trimmer at this time
Chamber flexible piece is loaded in contraction state, trimmer can reduce service life in stress for a long time；And it needs
Negative pressure is constantly provided, therefore there is still a need for the consumption energy in the initial state.Moreover, trimmer in the case where detecting inspecting state, carries out
Air-leakage test usually requires manually to cut off the blocking ventilation of import tracheae, realizes pressure holding function, is not easy to operate.
Invention content
The present invention is directed to solve at least some of the technical problems in related technologies.For this purpose, the present invention carries
Go out a kind of trimmer gas handling system, which can feed air when loading chamber and being in original state, from
And the service life caused by can for a long time being shunk to avoid LOADED CAVITY room is reduced, and can be to avoid the consumption energy.
The present invention further proposes a kind of polishing machine.
Trimmer gas handling system according to the present invention, including：Vacuum source；Vacuum line, the vacuum line with it is described true
Empty source is connected；Compressed air source；Compressed air line, the compressed air line are connected with the compressed air source；Trimmer,
The trimmer is formed with load chamber, the load chamber selectively with the vacuum line, the compressed air line
It is connected with air.
Trimmer gas handling system according to the present invention, by rationally controlling trimmer and vacuum source, compressed air source and big
On off operating mode between air source, thus it is possible to vary the state of the load chamber in trimmer, and also in the initial state, air source can
To feed air into LOADED CAVITY room, breakage and service life so as to avoid load chamber are reduced, and can be to avoid consumption
The energy.
In addition, trimmer gas handling system according to the present invention can also have following additional technical feature：
In some examples of the present invention, the trimmer gas handling system further includes：First control valve, the second control valve,
Third control valve and main pipe rail, the main pipe rail are connected between first control valve and the trimmer, first control
The main pipe rail is selectively connected by valve processed with the vacuum line and the compressed air line, and second control valve is set
It sets on the main pipe rail and connects with first control valve and selectively by the main pipe rail and first control valve
It is connected with the air, the third control valve selectively main pipe rail described in break-make.
In some examples of the present invention, first control valve and second control valve are two-position three-way valve, described
Third control valve is two-way valve.
In some examples of the present invention, the trimmer gas handling system further includes：First control valve, the second control valve,
Third control valve and main pipe rail, the main pipe rail are connected between first control valve and the trimmer, first control
The main pipe rail is selectively connected by valve processed with the vacuum line and the compressed air line, second control valve with
The main pipe rail is connected and in parallel with first control valve and selectively main pipe rail described in break-make and the air, and described
Three control valves selectively main pipe rail described in break-make.
In some examples of the present invention, first control valve is two-position three-way valve and second control valve and described
Third control valve is respectively two-way valve.
In some examples of the present invention, the trimmer gas handling system further includes：First control valve, the second control valve,
Third control valve and main pipe rail, first control valve is arranged on the vacuum line and selectively vacuum tube described in break-make
Road, second control valve setting is in the compressed air line and selectively compressed air line described in break-make, and described the
Three control valves are connected with the main pipe rail and and selectively break-make in parallel with first control valve and second control valve
The air and the main pipe rail.
In some examples of the present invention, first control valve, second control valve and the third control valve point
It Wei not two-way valve.
In some examples of the present invention, pressure reducing valve and filter are provided on the vacuum line, the pressure reducing valve leans on
The nearly vacuum source, the compressed air hose road are provided with pressure reducing valve.
In some examples of the present invention, the trimmer gas handling system further includes：Pressure sensor, the pressure sensing
Device is used to detect the pressure of the load chamber.
According to polishing machine of the present invention, including above-mentioned trimmer gas handling system.
The polishing machine is identical as the advantageous effect of trimmer gas handling system, and this will not be detailed here.
Description of the drawings
Fig. 1 is the structural schematic diagram of trimmer gas handling system according to a first embodiment of the present invention；
Fig. 2 is the structural schematic diagram of trimmer gas handling system according to a second embodiment of the present invention；
Fig. 3 is the structural schematic diagram of trimmer gas handling system according to a third embodiment of the present invention.
Reference numeral：
Trimmer gas handling system 100；
Vacuum line 10；The pressure reducing valve 11 of vacuum line；Filter 12；
Compressed air line 20；The pressure reducing valve 21 of compressed air line；
Trimmer 30；Modify head 31；Load chamber 32；
First control valve 40；Second control valve 50；Third control valve 60；Main pipe rail 70；Pressure sensor 80.
Specific implementation mode
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings.Below with reference to
The embodiment of attached drawing description is exemplary, it is intended to for explaining the present invention, and is not considered as limiting the invention.
Below with reference to the accompanying drawings trimmer gas handling system 100 according to the ... of the embodiment of the present invention is described in detail, the trimmer air inlet
System 100 can be applied on polishing machine.
Trimmer gas handling system 100 according to the ... of the embodiment of the present invention may include：Vacuum source, vacuum line 10, compression are empty
Air source, compressed air line 20, trimmer 30, pressure sensor 80, main pipe rail 70, the first control valve 40, the second control valve 50
With third control valve 60.
As shown in Figure 1-Figure 3, vacuum line 10 is connected with vacuum source, and compressed air line 20 is connected with compressed air source,
Wherein, vacuum source can be the equipment for accommodating the container of vacuum or generating vacuum, and compressed air source can be that generation compression is empty
The equipment of gas or the container for accommodating compressed air.Preferably, it as shown in 1 figure-Fig. 3, is also provided on vacuum line 10
Pressure reducing valve 11 and filter 12, pressure reducing valve 11 are arranged close to vacuum source.That is, entering in vacuum line 10 from vacuum source
The decompression that vacuum can first pass through pressure reducing valve 11 flows to filter 12 later, and filter 12 refilters the gas of sucking.Such as 1 figure-
Shown in Fig. 3, pressure reducing valve 21 can also be provided on compressed air line 20.
As shown in Figure 1-Figure 3, trimmer 30 be formed with load chamber 32, load chamber 32 selectively with vacuum line 10
It is connected with air with compressed air line 20, that is to say, that vacuum source can be fed by vacuum line 10 to load chamber 32
Vacuum, compressed air source can feed compressed air by compressed air line 20 to load chamber 32, and air source can be to adding
It carries chamber 32 and feeds air, air source can directly be ambient atmosphere environment, be exported alternatively, air source can be corresponding air
Equipment.
It will later for the connection structure between trimmer 30 and vacuum line 10, compressed air line 20 and air source
Content in combine multiple embodiments be described in detail.
According to the first advantageous embodiment of the invention, as shown in Figure 1, main pipe rail 70 is connected to the first control valve 40 and finishing
Between device 30, main pipe rail 70 is selectively connected by the first control valve 40 with vacuum line 10 and compressed air line 20, and second
Control valve 50 is arranged on main pipe rail 70, and the second control valve 50 is connected with the first control valve 40, and the second control valve 50
Selectively main pipe rail 70 is connected with the first control valve 40 and air, the selectively break-make main pipe rail 70 of third control valve 60.
It should be noted that above-mentioned main pipe rail 70 is connected with the first control valve 40 refers to that the first control valve 40 is in
Connected state, vacuum or compressed gas enter main pipe rail 70, and the second control valve 50 is in connection main pipe rail 70 and first and controls
When 40 state of valve, vacuum or compressed gas can by the second control valve 50, if third control valve 60 is in connected state,
Vacuum or compressed gas can enter in load chamber 32 in this way.That is, vacuum or compressed gas add in flow direction
When carrying chamber 32, the control by the first control valve 40, the second control valve 50 and third control valve 60 is needed, if one of them
It is off, vacuum or compressed gas can not flow to load chamber 32.
Air needs during flow direction loads chamber 32 by the second control valve 50 and third control valve 60, when second
Control valve 50 is in connection air and 70 state of main pipe rail and third control valve 60 is in when being connected to 70 state of main pipe rail, and air can
Chamber 32 is loaded with flow direction.When one in the second control valve 50 and third control valve 60 is off, the equal nothing of air
Method flows to load chamber 32.
The control main pipe rail 70 of third control valve 60 break-make of itself, when third control valve 60 is off, load
Chamber 32 can enter closed packing state.
Wherein, as shown in Figure 1, the first control valve 40 and the second control valve 50 can be respectively two-position three-way valve, third control
Valve 60 processed can be two-way valve.By the way that the type of the first control valve 40, the second control valve 50 and third control valve 60 is rationally arranged,
Trimmer gas handling system 100 can be made simple in structure, control logic is simple.
Second preferred embodiment according to the present invention, as shown in Fig. 2, main pipe rail 70 is connected to the first control valve 40 and finishing
Between device 30, main pipe rail 70 is selectively connected by the first control valve 40 with vacuum line 10 and compressed air line 20, and second
Control valve 50 is connected with main pipe rail 70, and the second control valve 50 is in parallel with the first control valve 40, and the second control valve 50 selects
Selecting property ground break-make main pipe rail 70 and air, the selectively break-make main pipe rail 70 of third control valve 60.It, can in conjunction with shown in Fig. 1 and Fig. 2
To find out that trimmer gas handling system 100 shown in Fig. 2 is second with 100 main distinction of trimmer gas handling system shown in FIG. 1
The arrangement of control valve 50, in fig. 2, the second control valve 50 directly control the break-make between air source and main pipe rail 70, do not join
With the break-make between the first control valve 40 and main pipe rail 70, but the first control valve 40 and LOADED CAVITY are controlled by third control valve 60
Break-make between room 32, certainly, third control valve 60 also control the second control valve 50 and load the break-make between chamber 32.By
This, the first control valve 40 can be two-position three-way valve, and the second control valve 50 and third control valve 60 are respectively two-way valve.This
Sample can make trimmer gas handling system 100 simple in structure, and control logic is simpler.
Third preferred embodiment according to the present invention, as shown in figure 3, the first control valve 40 is arranged on vacuum line 10 simultaneously
Selectively break-make vacuum line 10, the setting of the second control valve 50 is in compressed air line 20 and selectively break-make compressed air
Pipeline 20, third control valve 60 are connected with main pipe rail 70, and third control valve 60 and the first control valve 40 and the second control valve
50 is in parallel, and third control valve 60 selectively break-make air and main pipe rail 70.That is, being provided on vacuum line 10
The on-off valve of oneself is provided with the on-off valve of oneself on compressed air line 20, is also equipped between air source and main pipe rail 70
The on-off valve of oneself can make 100 structure of trimmer gas handling system simpler in this way, and control logic is simpler.Wherein,
First control valve 40, the second control valve 50 and third control valve 60 can be respectively two-way valve.
As shown in Figure 1-Figure 3, pressure sensor 80 can be used for detecting the pressure of load chamber 32.Thus, it is possible to according to
The testing result of pressure sensor 80 may determine that the sealing effect of load chamber 32, and may determine that added by load chamber 32
Whether the pressure value of load is as the pressure value of setting.
The state for loading chamber 32 is described in detail by taking trimmer gas handling system 100 shown in FIG. 1 as an example below.
As shown in Figure 1, trimmer 30 may include finishing head 31, modifies and be formed with load chamber 32 at head 31.Modify head
Load chamber 32 in 31 can have there are three air inlet, and three air inlets enter for vacuum, compressed gas and air respectively, institute
To load at least corresponding following three states of chamber 32：With compressed air communicating state, with vacuum communicating state and with big gas phase
Logical state.Certainly, by controlling the break-make of the first control valve 40, the second control valve 50 and third control valve 60, chamber 32 is loaded
There can also be closed packing state.
When load chamber 32 is in original state, load chamber 32 is communicated with air, and the second control valve 50 is connected to air
With main pipe rail 70, third control valve 60 is in connected state.It can be in this way to avoid LOADED CAVITY room 32 prolonged contraction-like
State, breakage and service life so as to avoid finishing head 31 are reduced, and can be to avoid the consumption energy.
Then, third control valve 60 disconnects, and LOADED CAVITY room 32 can be allow to be switched to from original state so closed
Packing state, pressure sensor 80 can detect the pressure value in load chamber 32, and the leakproofness with judgement load chamber 32 is
It is no good.
First control valve 40 can control the break-make between vacuum line 10 and main pipe rail 70, and can control compression sky
Break-make between air pipe 20 and main pipe rail 70, when the first control valve 40 is connected to vacuum line 10 and the second control valve 50 and
When third control valve 60 does not influence the vacuum flow between vacuum line 10 and main pipe rail 70, vacuum enters load chamber 32
It is interior.When the first control valve 40 is connected to compressed air line 20 and the second control valve 50 and third control valve 60 do not influence to compress
When compressed air between air pipe line 20 and main pipe rail 70 flows, compressed air enters in load chamber 32.Above-mentioned
Two control valves 50 do not influence vacuum with third control valve 60 or compressed gas flow refers to that the second control valve 50 is connected to first
Control valve 40 and main pipe rail 70, third control valve 60 are in connected state.First control valve 40 can also be by 10 He of vacuum line
Compressed air line 20 simultaneously switches off.
The state of load chamber 32 in Fig. 2 and trimmer gas handling system 100 shown in Fig. 3 and trimmer shown in FIG. 1
The state of the load chamber 32 of gas handling system 100 is identical, and difference essentially consists in the difference of the on off operating mode of multiple control valves, ability
The technical staff in domain can be understood by compares figure 2 and Fig. 3 obtains the corresponding multiple control valves of load 32 different conditions of chamber
On off operating mode, this will not be detailed here.
Trimmer gas handling system 100 according to the ... of the embodiment of the present invention, by rationally controlling trimmer 30 and vacuum source, compression
On off operating mode between air-source and air source, thus it is possible to vary the state of the load chamber 32 in trimmer 30, and initial
When state, air source can feed air into load chamber 32, and the breakage and service life so as to avoid load chamber 32 subtract
It is few, and can be to avoid the consumption energy.
Polishing machine according to the ... of the embodiment of the present invention includes the trimmer gas handling system 100 of above-described embodiment.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means specific features, structure, material or spy described in conjunction with this embodiment or example
Point is included at least one embodiment or example of the invention.In the present specification, schematic expression of the above terms are not
It must be directed to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be in office
It can be combined in any suitable manner in one or more embodiments or example.In addition, without conflicting with each other, the skill of this field
Art personnel can tie the feature of different embodiments or examples described in this specification and different embodiments or examples
It closes and combines.
Although the embodiments of the present invention has been shown and described above, it is to be understood that above-described embodiment is example
Property, it is not considered as limiting the invention, those skilled in the art within the scope of the invention can be to above-mentioned
Embodiment is changed, changes, replacing and modification.
Claims (9)
1. a kind of trimmer gas handling system, which is characterized in that including：
Vacuum source；
Vacuum line, the vacuum line are connected with the vacuum source；
Compressed air source；
Compressed air line, the compressed air line are connected with the compressed air source；
Trimmer, the trimmer are formed with load chamber, the load chamber selectively with the vacuum line, the pressure
Contracting air pipe line is connected with air, pressure reducing valve and filter is provided on the vacuum line, the pressure reducing valve is close to described true
Empty source, the compressed air hose road are provided with pressure reducing valve, and the trimmer includes finishing head, and the finishing head is formed with load
Chamber, it is described finishing head in load chamber have three air inlets, three air inlets respectively for vacuum, compressed gas and
Air enters, wherein when the load chamber is in original state, the load chamber is communicated with air.
2. trimmer gas handling system according to claim 1, which is characterized in that further include：First control valve, the second control
Valve, third control valve and main pipe rail, the main pipe rail are connected between first control valve and the trimmer, and described first
The main pipe rail is selectively connected by control valve with the vacuum line and the compressed air line, second control valve
It is arranged on the main pipe rail and connects with first control valve and selectively control the main pipe rail and described first
Valve is connected with the air, the third control valve selectively main pipe rail described in break-make.
3. trimmer gas handling system according to claim 2, which is characterized in that first control valve and second control
Valve processed is two-position three-way valve, and the third control valve is two-way valve.
4. trimmer gas handling system according to claim 1, which is characterized in that further include：First control valve, the second control
Valve, third control valve and main pipe rail, the main pipe rail are connected between first control valve and the trimmer, and described first
The main pipe rail is selectively connected by control valve with the vacuum line and the compressed air line, second control valve
It is connected with the main pipe rail and and selectively break-make described in main pipe rail and the air in parallel with first control valve, it is described
Third control valve selectively main pipe rail described in break-make.
5. trimmer gas handling system according to claim 4, which is characterized in that first control valve is two-position three-way valve
And second control valve and the third control valve are respectively two-way valve.
6. trimmer gas handling system according to claim 1, which is characterized in that further include：First control valve, the second control
Valve, third control valve and main pipe rail, the first control valve setting are on the vacuum line and selectively true described in break-make
Blank pipe road, second control valve setting is in the compressed air line and selectively compressed air line described in break-make, institute
Third control valve is stated with the main pipe rail to be connected and in parallel with first control valve and second control valve and selectively
Air described in break-make and the main pipe rail.
7. trimmer gas handling system according to claim 6, which is characterized in that first control valve, second control
Valve processed and the third control valve are respectively two-way valve.
8. trimmer gas handling system according to claim 1, which is characterized in that further include：Pressure sensor, the pressure
Sensor is used to detect the pressure of the load chamber.
9. a kind of polishing machine, which is characterized in that include the trimmer gas handling system according to any one of claim 1-8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610855025.9A CN106239371B (en) | 2016-09-26 | 2016-09-26 | Trimmer gas handling system and polishing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610855025.9A CN106239371B (en) | 2016-09-26 | 2016-09-26 | Trimmer gas handling system and polishing machine |
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| Publication Number | Publication Date |
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| CN106239371A CN106239371A (en) | 2016-12-21 |
| CN106239371B true CN106239371B (en) | 2018-10-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610855025.9A Active CN106239371B (en) | 2016-09-26 | 2016-09-26 | Trimmer gas handling system and polishing machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US20220372997A1 (en) * | 2021-05-24 | 2022-11-24 | Festo Se & Co. Kg | Fluid control system |
| CN114083426B (en) * | 2021-11-26 | 2023-03-28 | 北京晶亦精微科技股份有限公司 | Pressure control device, polishing head device and chemical mechanical polishing equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102225534B (en) * | 2011-04-19 | 2015-06-24 | 清华大学 | Pneumatic control loop for controlling finisher and finishing apparatus |
| CN102205522B (en) * | 2011-05-24 | 2013-01-30 | 清华大学 | Gas path positive pressure system used for chemico-mechanical polishing and chemico-mechanical polishing equipment |
| CN103531512A (en) * | 2012-07-05 | 2014-01-22 | 上海宏力半导体制造有限公司 | Vacuum generating device of wafer chuck |
| CN104108380B (en) * | 2013-04-16 | 2016-01-27 | 珠海三德艺电子有限公司 | Multifunctional inflating device and control method thereof |
| DE102014010956B4 (en) * | 2014-06-25 | 2023-06-15 | Zf Cv Systems Hannover Gmbh | Compressed air supply system, pneumatic system and method for operating a compressed air supply system |
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Address after: 300350, Tianjin City, Jinnan District Science and Technology Park, Hai Hing Road, No. 9, building No. 8 Co-patentee after: TSINGHUA University Patentee after: Huahaiqingke Co.,Ltd. Address before: 300350, Tianjin City, Jinnan District Science and Technology Park, Hai Hing Road, No. 9, building No. 8 Co-patentee before: TSINGHUA University Patentee before: TSINGHUA University |
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