CN106230310A - High-precision micro electric rotating machine based on Piezoelectric Driving - Google Patents

High-precision micro electric rotating machine based on Piezoelectric Driving Download PDF

Info

Publication number
CN106230310A
CN106230310A CN201610680156.8A CN201610680156A CN106230310A CN 106230310 A CN106230310 A CN 106230310A CN 201610680156 A CN201610680156 A CN 201610680156A CN 106230310 A CN106230310 A CN 106230310A
Authority
CN
China
Prior art keywords
piezoelectric actuator
piezoelectric
rotating machine
electric rotating
displacement amplifying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610680156.8A
Other languages
Chinese (zh)
Inventor
张卫平
寻之宇
邹阳
周岁
魏志方
李帆
李一帆
陈畅
唐健
欧彬
刘朝阳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Jiaotong University
Original Assignee
Shanghai Jiaotong University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Jiaotong University filed Critical Shanghai Jiaotong University
Priority to CN201610680156.8A priority Critical patent/CN106230310A/en
Publication of CN106230310A publication Critical patent/CN106230310A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K7/00Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/10Structural association with clutches, brakes, gears, pulleys or mechanical starters
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12Constructional details
    • H02N2/123Mechanical transmission means, e.g. for gearing

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The present invention provides a kind of high-precision micro electric rotating machine based on Piezoelectric Driving, including motor housing, piezoelectric actuator, piezoelectric actuator fixture, transmission platform, displacement amplifying mechanism and output mechanism;Described piezoelectric actuator uses the voltage producing bidirectional force to drive piezoelectric bimorph as driver, under the effect of the signal of telecommunication, the micrometric displacement pumped by piezoelectric actuator by piezoelectric actuator fixture, transmission platform and displacement amplifying mechanism that pumps of described piezoelectric actuator is amplified, output mechanism constitutes slider-crank mechanism with the connection end of displacement amplifying mechanism, by output mechanism, linear motion is changed into rotary motion, it is achieved the function of electric rotating machine.Volume of the present invention is small, compact conformation, and precision is higher, fast response time, it is possible to bear stronger extraneous load.

Description

High-precision micro electric rotating machine based on Piezoelectric Driving
Technical field
The present invention relates to the device of a kind of micromachine technical field, in particular it relates to a kind of height based on Piezoelectric Driving Precision Miniature rotating motor.
Background technology
Micromachine market, the whole world is mainly distributed on audiovisual, office automation, electric motor car (containing automobile), household electrical appliances and air-conditioning etc. Field.With the raising of people's living standard, micromachine market is developing rapidly.Usual each family has micromachine Quantity can weigh the degree of a modernization of the country level, and its market demand quickly grows, contains huge market.
China's micromachine industry is created in phase late 1950s, from the beginning of for meeting national defence weapon equipment needs, Experienced by the stage of imitated, designed, designed and research and development, the most developing history in more than 40 years, formed product development, The complete industrial system that large-scale production and key components and parts, critical material, dedicated manufacturing equipment, test instrunment are supporting.According to Statistics, China's micromachine produces and supporting producer is more than 1000, and practitioner exceedes more than 100,000 people, total industrial output value 10000000000 yuan.Micromachine industry has become an indispensable basic product work in national economy and the modernization of national defense Industry.In brief, micromachine industry is labour-intensive and the new high-tech industry of technology-intensive type.At present, China is miniature Electromechanics trade comes in the global economy overall situation that Opportunity coexists with challenge, only reduces life further by technological innovation Produce cost and could capture bigger (international) market share in keen competition.
Through retrieval, the patent of invention of Publication No. CN103701359A, a kind of piezoelectricity based on piezoelectric pile of this disclosure of the invention The electric rotating machine of vibratory impulse, it includes annular rotor, Y type elastic stator, stacked piezoelectric heap and motor fixed pedestal, its In, described stacked piezoelectric heap is fixed on motor fixed pedestal, and Y type elastic stator is fixed on stacked piezoelectric heap, and Y type elasticity is fixed Sub-set is contained in annular rotor.
But, current micromachine precision is relatively low, and volume is bigger, it is difficult to meet the demand of some special occasions.
Summary of the invention
For defect of the prior art, it is an object of the invention to provide the rotation of a kind of high-precision micro based on Piezoelectric Driving Rotating motor, volume is small, compact conformation, and precision is higher, fast response time, it is possible to bear stronger extraneous load.
For realizing object above, the present invention provides a kind of high-precision micro electric rotating machine based on Piezoelectric Driving, including: electricity Machine shell, piezoelectric actuator, piezoelectric actuator fixture, transmission platform, displacement amplifying mechanism, and output mechanism;Wherein:
The bottom of described piezoelectric actuator is connected with described motor housing, the top of described piezoelectric actuator and described piezoelectricity One end of driver fixture connects, and the other end of described piezoelectric actuator fixture is connected with one end of described transmission platform, The other end of described transmission platform is connected fixing with the input of described displacement amplifying mechanism, the output of described displacement amplifying mechanism End is connected with described output mechanism, and described output mechanism is connected with described motor housing simultaneously;
The voltage driving piezoelectric bimorph of described piezoelectric actuator employing generation bidirectional force is as driver, at the signal of telecommunication Under effect, pumping by piezoelectric actuator fixture, transmission platform and displacement equations of described piezoelectric actuator The micrometric displacement that piezoelectric actuator is pumped by mechanism amplifies, and output mechanism constitutes song with the outfan of displacement amplifying mechanism Handle slide block mechanism, is changed into rotary motion by output mechanism by linear motion.
Preferably, the arranged on left and right sides of the bottom of described piezoelectric actuator is made up of two rectangular blocks, on described rectangular block It is provided with through hole and is attached fixing with described motor housing respectively by this through hole.
It is highly preferred that the top of described piezoelectric actuator is made up of continuous variable cross section rectangular cross section beam, rectangular cross section beam Top is isosceles trapezoid, and the top of described piezoelectric actuator is connected fixing with described piezoelectric actuator fixture.
Preferably, the inside of described piezoelectric actuator fixture has the trapezoidal top with the top of described piezoelectric actuator The hole slot agreed with mutually, piezoelectric actuator fixture is fixedly connected by the top of hole slot with piezoelectric actuator.
It is highly preferred that described piezoelectric actuator fixture is rectangle, this rectangle top is connected fixing with described transmission platform.
Preferably, described displacement amplifying mechanism includes two drive links, and said two drive link is put down with described transmission Platform and described motor housing form four-bar mechanism, thus to the microbit shift-in pumped produced by piezoelectric actuator Row amplifies.
It is highly preferred that described displacement amplifying mechanism comprises passive hinge arrangement further, described passive hinge arrangement is positioned at Junction between any two rod members of described four-bar mechanism, described passive torsion structure by inner rectangular block, outside rectangular block and Gap between inner rectangular block and outside rectangular block is constituted, and the gap between two rectangular blocks provides described as flexible hinge The degree of freedom that two drive links of displacement amplifying mechanism passively reverse.
It is highly preferred that described displacement amplifying mechanism, the most each parts all use multilayer material to be composited, described multilamellar material Material includes upper strata rigid material, middle flexible material and lower floor's rigid material.
Preferably, described output mechanism includes exporting connecting rod and output rocking bar, and described output mechanism is with described displacement equations Mechanism connects fixing, and described output mechanism together form slider-crank mechanism with the connection end of described displacement amplifying mechanism, By described output mechanism, linear motion is changed into rotary motion, thus realizes the function of electric rotating machine.
Compared with prior art, the present invention has a following beneficial effect:
The present invention, compared with existing Miniature rotating motor, uses the composite of multilayer build-up, the biography that lightweight, rigidity is big Motivation structure, the high accuracy type of drive of Piezoelectric Driving, thus have that volume is little, compact conformation, precision high, fast response time excellent Gesture, can obtain in complex environment and more be widely applied.
Accompanying drawing explanation
By the detailed description non-limiting example made with reference to the following drawings of reading, the further feature of the present invention, Purpose and advantage will become more apparent upon:
Fig. 1 is the integrally-built isometric drawing of one embodiment of the invention;
Fig. 2 is the schematic diagram of piezoelectric actuator structure in one embodiment of the invention;
Fig. 3 is the schematic diagram of piezoelectric actuator fixture in one embodiment of the invention;
Fig. 4 is the schematic diagram of the passive hinge arrangement of displacement amplifying mechanism in one embodiment of the invention;
Fig. 5 is the isometric drawing of displacement amplifying mechanism in one embodiment of the invention;
Fig. 6 is the shaft side figure such as just grade of output mechanism in one embodiment of the invention;
In figure: 1 is motor housing, 2 is piezoelectric actuator, and 3 is piezoelectric actuator fixture, and 4 is transmission platform, and 5 is position Moving enlarger, 6 is output mechanism, and 7 is the bottom of piezoelectric actuator, and 8 is the top of piezoelectric actuator, and 9,10 is rectangular block, 11 is hole slot, and 12 is upper strata rigid material, and 13 is flexible material, and 14 is lower floor's rigid material, and 15 is passive hinge arrangement, and 16 are Inner rectangular block, 17 is outside rectangular block, and 18 is passive hinge arrangement gap, and 19,20 is drive link, and 21 is output connecting rod, 22 is output rocking bar.
Detailed description of the invention
Below in conjunction with specific embodiment, the present invention is described in detail.Following example will assist in the technology of this area Personnel are further appreciated by the present invention, but limit the present invention the most in any form.It should be pointed out that, the ordinary skill to this area For personnel, without departing from the inventive concept of the premise, it is also possible to make some deformation and improvement.These broadly fall into the present invention Protection domain.
As it is shown in figure 1, a kind of high-precision micro electric rotating machine based on Piezoelectric Driving, including: a motor housing 1, one Individual piezoelectric actuator 2, a piezoelectric actuator fixture 3, a transmission platform 4, a displacement amplifying mechanism 5 and one defeated Go out mechanism 6;Wherein:
The bottom of described piezoelectric actuator 2 is connected with described motor housing 1;The top of described piezoelectric actuator 2 is with described One end of piezoelectric actuator fixture 3 connects, the other end of described piezoelectric actuator fixture 3 and the one of described transmission platform 4 End connects;The other end of described transmission platform 4 is connected with the input of described displacement amplifying mechanism 5;Described displacement amplifying mechanism 5 Outfan be connected with described output mechanism, described output mechanism 6 is connected with described motor housing simultaneously to be fixed.
Described piezoelectric actuator 2 use can produce bidirectional force voltage drive piezoelectric bimorph as driver, in telecommunications Number effect under, pumping by piezoelectric actuator fixture 3, transmission platform 4, displacement equations of piezoelectric actuator 2 The micrometric displacement that piezoelectric actuator 2 is pumped by mechanism 5 amplifies.
As in figure 2 it is shown, be described piezoelectric actuator structural representation;As one preferably, described piezoelectric actuator 2 includes: The bottom 7 of piezoelectric actuator and the top 8 of piezoelectric actuator;Wherein:
The arranged on left and right sides of the bottom 7 of described piezoelectric actuator is made up of two rectangular blocks 9,10, divides on rectangular block 9,10 It is not equipped with rectangular through-hole, and is attached fixing with motor housing 1 respectively by rectangular through-hole;
The top 8 of described piezoelectric actuator is made up of continuous variable cross section rectangular cross section beam, and the top of rectangular cross section beam is Waist is trapezoidal, and the top 8 of described piezoelectric actuator is connected fixing by the top of isosceles trapezoid with piezoelectric actuator fixture 3.
As it is shown on figure 3, be described piezoelectric actuator fixture schematic diagram;As one preferably, described piezoelectric actuator is fixed The top of part 3 is rectangle, and the rectangle top of piezoelectric actuator fixture 3 is connected fixing with transmission platform 4;
The inside of described piezoelectric actuator fixture 3 has hole slot 11, hole slot 11 and the piezoelectric actuator of piezoelectric actuator 2 The isosceles trapezoid top at top 8 agree with mutually, piezoelectric actuator fixture 3 is joined by the top 8 of hole slot 11 with piezoelectric actuator Close to connect and fix.
As it is shown in figure 5, be described displacement amplifying mechanism isometric drawing, as one preferably, described displacement amplifying mechanism 5 wraps Containing drive link 19,20, drive link 19,20 and transmission platform 4 and motor housing 1 form four-bar mechanism, transmission platform 4 with Displacement is transferred to one end of drive link 20 by drive link 19, by the annexation of drive link 20 and motor housing by position Move and amplify, thus the micrometric displacement pumped produced by piezoelectric actuator 2 is amplified, and by output mechanism 6 Output displacement is provided.
As shown in Figure 4, as more preferably scheme, described displacement amplifying mechanism 5 comprises passive hinge arrangement 15, institute further Stating the junction that passive hinge arrangement is positioned between any two rod members of described four-bar mechanism, described passive hinge arrangement 15 is by inner side square Shape block 16, gap between outside rectangular block 17, and inner rectangular block 16 and outside rectangular block 17, i.e. move hinge arrangement gap 18 are constituted;The degree of freedom that dynamic hinge arrangement gap 18 is passively reversed as flexible hinge offer wing.
As shown in Figure 4, for the passive hinge arrangement schematic diagram of described displacement amplifying mechanism, as more preferably scheme, described Displacement amplifying mechanism 5 total is composited by multilayer material, including one layer of upper strata rigid material 12, and one layer of centre soft Property material 13 and one layer of lower floor's rigid material 14.Two-layer rigid material 12,14 then carries as the support member of structure, flexible material 13 Supply the degree of freedom needed for reversing.
As shown in Figure 6, for described output mechanism isometric drawing, as one preferably, described output mechanism 6 includes that output is even Bar 21 and output rocking bar 22, wherein: described output connecting rod 21 is connected to a fixed with the end of displacement amplifying mechanism, and described output is shaken Bar 22 provides the rotary motion of output.
Described output mechanism 6 together form slider-crank mechanism with the connection end of displacement amplifying mechanism 5, by output Linear motion is changed into rotary motion by mechanism 6, thus realizes the function of electric rotating machine.
Above the specific embodiment of the present invention is described.It is to be appreciated that the invention is not limited in above-mentioned Particular implementation, those skilled in the art can make various deformation or amendment within the scope of the claims, this not shadow Ring the flesh and blood of the present invention.

Claims (9)

1. a high-precision micro electric rotating machine based on Piezoelectric Driving, it is characterised in that including: motor housing, Piezoelectric Driving Device, piezoelectric actuator fixture, transmission platform, displacement amplifying mechanism, and output mechanism;Wherein:
The bottom of described piezoelectric actuator is connected with described motor housing, the top of described piezoelectric actuator and described Piezoelectric Driving One end of device fixture connects, and the other end of described piezoelectric actuator fixture is connected with one end of described transmission platform, described The other end of transmission platform is connected fixing with the input of described displacement amplifying mechanism, the outfan of described displacement amplifying mechanism with Described output mechanism connects, and described output mechanism is connected with described motor housing simultaneously;
The voltage driving piezoelectric bimorph of described piezoelectric actuator employing generation bidirectional force is as driver, in the effect of the signal of telecommunication Under, pumping by piezoelectric actuator fixture, transmission platform and displacement amplifying mechanism of described piezoelectric actuator The micrometric displacement pumped by piezoelectric actuator amplifies, and output mechanism constitutes slide crank with the outfan of displacement amplifying mechanism Block mechanism, is changed into rotary motion by output mechanism by linear motion.
A kind of high-precision micro electric rotating machine based on Piezoelectric Driving the most according to claim 1, it is characterised in that described The arranged on left and right sides of the bottom of piezoelectric actuator is made up of two rectangular blocks, is provided with through hole and is led to by this on described rectangular block Hole is attached fixing with described motor housing respectively.
A kind of high-precision micro electric rotating machine based on Piezoelectric Driving the most according to claim 2, it is characterised in that described The top of piezoelectric actuator is made up of continuous variable cross section rectangular cross section beam, and the top of rectangular cross section beam is isosceles trapezoid, described pressure The top of electric drive is connected fixing with described piezoelectric actuator fixture.
A kind of high-precision micro electric rotating machine based on Piezoelectric Driving the most according to claim 3, it is characterised in that described The inside of piezoelectric actuator fixture has the hole slot that the trapezoidal top with the top of described piezoelectric actuator is agreed with mutually, and piezoelectricity drives Dynamic device fixture is fixedly connected by the top of hole slot with piezoelectric actuator.
A kind of high-precision micro electric rotating machine based on Piezoelectric Driving the most according to claim 4, it is characterised in that described Piezoelectric actuator fixture is rectangle, and this rectangle top is connected fixing with described transmission platform.
A kind of high-precision micro electric rotating machine based on Piezoelectric Driving the most according to claim 1, it is characterised in that described Displacement amplifying mechanism includes two drive links, and said two drive link is with described transmission platform and described motor housing shape Become four-bar mechanism, thus the micrometric displacement pumped produced by piezoelectric actuator is amplified.
A kind of high-precision micro electric rotating machine based on Piezoelectric Driving the most according to claim 6, it is characterised in that described Displacement amplifying mechanism comprises passive hinge arrangement further, and described passive hinge arrangement is positioned at any two rod members of described four-bar mechanism Between junction, described passive torsion structure is by inner rectangular block, outside rectangular block and inner rectangular block and outside rectangular block Between gap constitute, the gap between two rectangular blocks as flexible hinge provide described displacement amplifying mechanism two transmissions The degree of freedom that rod member passively reverses.
A kind of high-precision micro electric rotating machine based on Piezoelectric Driving the most according to claim 7, it is characterised in that described Displacement amplifying mechanism, the most each parts all use multilayer material to be composited, and described multilayer material includes upper strata rigid material, in Between flexible material and lower floor's rigid material.
9. according to a kind of based on Piezoelectric Driving the high-precision micro electric rotating machine described in any one of claim 1-8, its feature Being, described output mechanism includes exporting connecting rod and output rocking bar, and described output mechanism connects solid with described displacement amplifying mechanism Fixed, described output mechanism together form slider-crank mechanism with the connection end of described displacement amplifying mechanism, by described defeated Go out mechanism and linear motion is changed into rotary motion, thus realize the function of electric rotating machine.
CN201610680156.8A 2016-08-17 2016-08-17 High-precision micro electric rotating machine based on Piezoelectric Driving Pending CN106230310A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610680156.8A CN106230310A (en) 2016-08-17 2016-08-17 High-precision micro electric rotating machine based on Piezoelectric Driving

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610680156.8A CN106230310A (en) 2016-08-17 2016-08-17 High-precision micro electric rotating machine based on Piezoelectric Driving

Publications (1)

Publication Number Publication Date
CN106230310A true CN106230310A (en) 2016-12-14

Family

ID=57553755

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610680156.8A Pending CN106230310A (en) 2016-08-17 2016-08-17 High-precision micro electric rotating machine based on Piezoelectric Driving

Country Status (1)

Country Link
CN (1) CN106230310A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111585467A (en) * 2019-02-19 2020-08-25 阿自倍尔株式会社 Displacement amplifying device

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101934861A (en) * 2010-09-22 2011-01-05 上海交通大学 Piezoelectric biomimetic micro flapping flight device
CN102328744A (en) * 2011-08-05 2012-01-25 上海交通大学 Electromagnetically-driven flapping wing type micro aircraft based on flexible hinges
CN103274049A (en) * 2013-05-08 2013-09-04 上海交通大学 Electromagnetic drive insect-like flapping-wing micro air vehicle
CN103395493A (en) * 2013-07-19 2013-11-20 北京理工大学 Piezoelectric ceramic flapping-wing-type robot
CN103708033A (en) * 2013-12-23 2014-04-09 上海交通大学 Double piezoelectric actuators type micro flapping wing aircraft based on soft hinges
CN105691615A (en) * 2016-03-22 2016-06-22 吉林大学 Miniature flapping wing air vehicle with wings capable of performing active deformation and with multiple freedom degrees
CN106081104A (en) * 2016-07-20 2016-11-09 上海交通大学 A kind of insecticide yardstick Piezoelectric Driving flapping-wing MAV

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101934861A (en) * 2010-09-22 2011-01-05 上海交通大学 Piezoelectric biomimetic micro flapping flight device
CN102328744A (en) * 2011-08-05 2012-01-25 上海交通大学 Electromagnetically-driven flapping wing type micro aircraft based on flexible hinges
CN103274049A (en) * 2013-05-08 2013-09-04 上海交通大学 Electromagnetic drive insect-like flapping-wing micro air vehicle
CN103395493A (en) * 2013-07-19 2013-11-20 北京理工大学 Piezoelectric ceramic flapping-wing-type robot
CN103708033A (en) * 2013-12-23 2014-04-09 上海交通大学 Double piezoelectric actuators type micro flapping wing aircraft based on soft hinges
CN105691615A (en) * 2016-03-22 2016-06-22 吉林大学 Miniature flapping wing air vehicle with wings capable of performing active deformation and with multiple freedom degrees
CN106081104A (en) * 2016-07-20 2016-11-09 上海交通大学 A kind of insecticide yardstick Piezoelectric Driving flapping-wing MAV

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PENGCHENG CHI等: "Design,Fabrication and Analysis of Microrobotic Insect Wings and Thorax with different materials by MEMS Technology", 《ADVANCED MATERIALS RESEARCH》 *
谭小波等: "超微仿生扑翼飞行器压电双晶驱动器仿真与优化", 《上海交通大学学报》 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111585467A (en) * 2019-02-19 2020-08-25 阿自倍尔株式会社 Displacement amplifying device

Similar Documents

Publication Publication Date Title
CN201470595U (en) Four-degree-of-freedom series-parallel vibrating sieve
CN102009414B (en) Wrist device for three degree of freedom (TDOF) underactuated robot
CN102355103B (en) Electromagnetic-piezoelectric-mixed-driving-based three-degree-of-freedom spherical motor
CN101108481A (en) Parallel machine with restructurable configuration and scale
CN201600231U (en) Angular vibration test table based on flexible hinge mechanism
CN103846911B (en) A kind of high speed six-degree of freedom parallel manipulator
CN106160565A (en) High-precision micro linear electric motors based on Piezoelectric Driving
CN101214647A (en) Spherical surface two-freedom symmetrical parallel connection robot mechanism with redundancy drive
CN104467524A (en) Working method of plate type linear piezoelectric motor based on in-plane mode
CN105006990A (en) Planar ultrasonic motor driven based on H-shaped piezoelectric transducer structure and working mode thereof
CN102806557B (en) Single-degree-of-freedom three-dimensional movement mechanism
CN110281033A (en) A kind of multiaxis Rigid-flexible Coupled Motion platform
CN106230310A (en) High-precision micro electric rotating machine based on Piezoelectric Driving
CN103386682B (en) Output-parallel motion is rotated in a kind of two input one translations three
CN103410856A (en) Loopworm effect based all-round flexible bearing
CN101202519B (en) Ultrasound electric machine with two degrees of freedom
CN102355159B (en) Resonance-type linear ultrasonic motor and control method
CN201669702U (en) Five-degree-of-freedom parallel manipulator mechanism
CN105856198B (en) A kind of three branch's translational parallel connection mechanisms of centralization input
CN103350418B (en) High-speed five-freedom-degree parallel mechanical arm
CN102601787A (en) Parallel mechanism capable of spatially three-dimensionally traversing and one-dimensionally circularly rotating
CN203526034U (en) Vibrating screen mechanism with three-dimensional movement
CN109872767A (en) The submissive parallel micro-manipulator device of multi-source driving
CN102394024A (en) Rapid plane movement platform
CN1526483A (en) Completely flexible three-freedom miniature vibration exciter

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20161214