CN106229393A - A kind of light emitting diode and preparation method thereof - Google Patents

A kind of light emitting diode and preparation method thereof Download PDF

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Publication number
CN106229393A
CN106229393A CN201610821481.1A CN201610821481A CN106229393A CN 106229393 A CN106229393 A CN 106229393A CN 201610821481 A CN201610821481 A CN 201610821481A CN 106229393 A CN106229393 A CN 106229393A
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China
Prior art keywords
light emitting
layer
emitting diode
oxide
electron transfer
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CN201610821481.1A
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Chinese (zh)
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钱磊
杨行
杨一行
曹蔚然
向超宇
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TCL Corp
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TCL Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005Processes
    • H01L33/0083Processes for devices with an active region comprising only II-VI compounds
    • H01L33/0087Processes for devices with an active region comprising only II-VI compounds with a substrate not being a II-VI compound
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/26Materials of the light emitting region
    • H01L33/28Materials of the light emitting region containing only elements of Group II and Group VI of the Periodic Table

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

Open a kind of light emitting diode of the present invention and preparation method thereof, it includes step: depositions of bottom electrode on substrate;Then deposition of hole transport layer on hearth electrode;Then on hole transmission layer, deposit quantum dot light emitting layer;The last electron transfer layer that deposits on quantum dot light emitting layer, and it is deposited with top electrode on electron transfer layer, form light emitting diode;Wherein, the material of described hole transmission layer and/or described electron transfer layer is the inorganic nanometer oxide of doping.The present invention, by being doped inorganic nanometer oxide, utilizes surface segregation technology, reduces its surface energy, is passivated its surface defect, thus improves stability and the luminous efficiency of QLED device.Meanwhile, utilize inorganic nanometer oxide to prepare electronics and hole transmission layer simultaneously, the device architecture of organic cavity transmission layer before comparing, there is stability and the high feature of luminous efficiency, be also more suited for low cost large-scale typographical display technology.

Description

A kind of light emitting diode and preparation method thereof
Technical field
The present invention relates to light emitting diode field, particularly relate to a kind of light emitting diode and preparation method thereof.
Background technology
Inorganic metal nano-oxide is widely used in organic electro-optic device as electrons transmission material in recent years In, including Organic Light Emitting Diode, organic/perovskite photovoltaic device etc..Compared to organic material, inorganic metal nano-oxide Solwution method not only can be used to prepare, and there is higher carrier mobility, simultaneously higher to the resistance of water oxygen, greatly Improve the stability of device, paved the road of commercial applications.
Quantum dot is high due to its luminous efficiency, and glow color is controlled, and excitation advantages of higher, shows skill the next generation Art has huge application potential.Except in lcd technology as down-conversion luminescent material improve display performance it Outward, light emitting diode with quantum dots (QLED), as a kind of new Display Technique, has from main light emission, can the feature such as frivolous flexibility, Just paid close attention to by people.
Nano zine oxide is electron transport material commonly used in QLED device, and its conduction level is conducive to electronics from the moon Pole is to the injection of quantum dot, and its deeper valence-band level can play the effect effectively stopping hole.But nano zine oxide Photoelectric properties and its particle size have the biggest relation, along with the minimizing of particle size, its film property improves, but simultaneously by In the case of small size, specific surface area is very big, and therefore surface defect has the strongest quenching effect to electron hole pair, thus Cause the device efficiency of QLED and the problem that stability is the most relatively low.
Therefore, prior art has yet to be improved and developed.
Summary of the invention
In view of above-mentioned the deficiencies in the prior art, it is an object of the invention to provide a kind of light emitting diode and preparation side thereof Method, it is intended to solve the device efficiency of existing QLED and the problem that stability is the most relatively low.
Technical scheme is as follows:
A kind of preparation method of light emitting diode, wherein, including step:
A, on substrate depositions of bottom electrode;
B, then deposition of hole transport layer on hearth electrode;
C, then deposition quantum dot light emitting layer on hole transmission layer;
D, the last electron transfer layer that deposits on quantum dot light emitting layer, and it is deposited with top electrode on electron transfer layer, form luminescence Diode;
Wherein, the material of described hole transmission layer and/or described electron transfer layer is the inorganic nanometer oxide of doping.
The preparation method of described light emitting diode, wherein, in the inorganic nanometer oxide of doping, described inorganic nano oxygen Compound is the one in zinc oxide, titanium oxide, nickel oxide, molybdenum oxide.
The preparation method of described light emitting diode, wherein, in the inorganic nanometer oxide of doping, described doped chemical is One in aluminum, magnesium, manganese, indium, gallium.
The preparation method of described light emitting diode, wherein, in the inorganic nanometer oxide of doping, doped chemical quality accounts for Gross mass percentage ratio is 0.01 ~ 15%.
A kind of light emitting diode, wherein, uses the preparation method of arbitrary described light emitting diode to be prepared from, institute State light emitting diode include the most successively substrate, hearth electrode, hole transmission layer, quantum dot light emitting layer, electron transfer layer and Top electrode;Wherein, the material of described hole transmission layer and/or described electron transfer layer is the inorganic nanometer oxide of doping.
Described light emitting diode, wherein, described substrate is glass substrate.
Described light emitting diode, wherein, the material of described hearth electrode be transparent conductive metal oxide ITO, FTO or AZO。
Described light emitting diode, wherein, the material of described quantum dot light emitting layer is CdSe/ZnS, CdSe/CdZn, SeS/ The nucleocapsid structure semi-conducting materials such as ZnS, the 4-6 group semi-conducting material such as PbSe, PbS, the 3-5 race material such as InP, GaP and The 1-3-6 race semi-conducting materials such as CuInS, CuGaS and their nucleocapsid structure semi-conducting material.
Described light emitting diode, wherein, the material of described top electrode is Al or Ag, Au.
Beneficial effect: the present invention uses the inorganic nanometer oxide of doping as described hole transmission layer and/or described electricity The material of sub-transport layer, the inorganic nanometer oxide surface of doping can reduction be remarkably improved the stability of device, and surface The passivation of defect significantly reduces the quenching effect to electron hole pair, improves the luminous efficiency of device.
Accompanying drawing explanation
Fig. 1 is the flow chart of the preparation method preferred embodiment of a kind of light emitting diode of the present invention.
Fig. 2 is the structural representation of the inorganic nano zinc oxide of a kind of doping of the present invention.
Fig. 3 is the structural representation of the present invention a kind of light emitting diode preferred embodiment.
Detailed description of the invention
The present invention provides a kind of light emitting diode and preparation method thereof, for making the purpose of the present invention, technical scheme and effect Clearer, clear and definite, the present invention is described in more detail below.Only should be appreciated that specific embodiment described herein In order to explain the present invention, it is not intended to limit the present invention.
Inorganic nanometer oxide is widely used in organic electro-optic device as electrons transmission material in recent years. But inorganic nanometer oxide, along with the minimizing of particle size, surface defect increases, and surface can increase, in this case Result in the strong quencher effect of electron hole pair in the unstability of its material and device, thus have impact on the life-span of device And efficiency.In order to solve the problems referred to above, the present invention is by being doped inorganic nanometer oxide, thus obtains surface energy and table The inorganic nanometer oxide of the doping that planar defect is the lowest, then uses the inorganic nanometer oxide of doping as electrons Transmission material, thus improve efficiency and the life-span of device.
Specifically, the stream of the preparation method preferred embodiment of a kind of light emitting diode that Fig. 1, Fig. 1 are the present invention is referred to Cheng Tu, as it can be seen, wherein, including step:
S100, on substrate depositions of bottom electrode;
In step S100, described substrate can be but be not limited to glass substrate, and the material of described hearth electrode can be but be not limited to The transparent conductive oxide electrodes such as transparent conductive oxide electrode, such as ITO, FTO or AZO.
S200, then deposition of hole transport layer on hearth electrode;
S300, then deposition quantum dot light emitting layer on hole transmission layer;
In step S300, the material of quantum dot light emitting layer of the present invention can be CdSe/ZnS, CdSe/CdZn, SeS/ZnS etc. Nucleocapsid structure semi-conducting material, the 4-6 group semi-conducting material such as PbSe, PbS, the 3-5 race material such as InP, GaP and CuInS, The 1-3-6 race semi-conducting materials such as CuGaS and their nucleocapsid structure semi-conducting material.
S400, the last electron transfer layer that deposits on quantum dot light emitting layer, and it is deposited with top electrode on electron transfer layer, shape Become light emitting diode.Preferably, the material of described top electrode can be but be not limited to Al, Ag or Au.
Wherein, the material of described hole transmission layer and/or the material of described electron transfer layer are the inorganic nano oxygen of doping Compound.In other words, the material of hole transmission layer of the present invention and the material of described electron transfer layer is all or wherein it One is the inorganic nanometer oxide of doping.The present invention, by being doped inorganic nanometer oxide, utilizes surface segregation technology, Reduce its surface energy, be passivated its surface defect.Then the inorganic nanometer oxide utilizing doping is prepared electron transfer layer/hole and is passed Defeated layer, reaches improve its stability and reduce the purpose of electron hole pair quenching effect, thus improves stablizing of QLED device Property and luminous efficiency.
Specifically, in the inorganic nanometer oxide of doping, inorganic nanometer oxide of the present invention can be zinc oxide, oxygen Change the one in titanium, nickel oxide, molybdenum oxide etc..Doped chemical can be aluminum, magnesium, manganese, the one in indium, gallium etc..Preferably, mix In miscellaneous inorganic nanometer oxide, it is 0.01 ~ 15%(such as 2%, 5% or 10% that doped chemical quality accounts for gross mass percentage ratio).
It is described in detail as a example by the electron transport material of QLED device using nano zine oxide below.
Nano zine oxide is electron transport material conventional in QLED device, has mobility high, the advantages such as light transmission is good, But owing to its particle size only has 3-5 nanometer, having the biggest specific surface, therefore one side surface defect concentration is relatively Height, relatively strong to luminous cancellation at the interface of luminescent layer and electron transfer layer, the high surface energy that on the other hand small size causes also makes Obtain the less stable of nano zinc oxide material, it is impossible to obtain long-life device, especially in blue light QLED device.Existing In technology, the processing method of high annealing is generally used to reduce its surface defect or on electron transfer layer and the boundary of luminescent layer Face is inserted one layer of barrier layer and is reduced the cancellation to electron hole pair.Both approaches has its limitation, high temperature process one to be Adding cost, two is the performance that may destroy other functional layers, three be frivolous application advantage flexible with QLED technology not It is consistent;The method adding barrier layer then increases the complexity of device architecture, yield may be caused to reduce, cost increase.
The advantages such as nano zine oxide is electron transport material conventional in QLED device, has mobility high, light transmission number, But owing to its particle size only has 3-5 nanometer, having the biggest specific surface, therefore one side surface defect concentration is relatively Height, relatively strong to luminous cancellation at the interface of luminescent layer and electron transfer layer, the high surface energy that on the other hand small size causes also makes Obtain the less stable of nano zinc oxide material, it is impossible to obtain long-life device, especially in blue light QLED device.In order to Overcome the surface defect utilizing nano zine oxide to exist when preparing QLED device electronic transport layer more and electron hole pair cancellation The problem that effect is stronger, the technique that the present invention is adulterated by employing, nano zine oxide is carried out the doping of debita spissitudo, such as Magnesium, aluminum, manganese, indium, gallium etc., by surface segregation effect, it is passivated surface defect, has been significantly reduced surface energy, has been similar to shape Become a nucleocapsid structure (as shown in Figure 2).Such a processing method of the present invention be make nano zine oxide surface lack Fall into and greatly reduce, not only reduce surface energy, improve the stability of material, and be passivated surface defect, decrease sending out The quenching effects of electron hole pair in photosphere.Compared with the conventional method, the present invention just solves surface defect and table from material The problem of face energy, in the case of not increasing device architecture and complicated process of preparation, can be effectively improved the efficiency of QLED device And the life-span.
It should be noted that, the invention is not restricted to prepare above-mentioned each functional layer by deposition process, also by spin coating or beat The methods such as print prepare above-mentioned each functional layer.
Based on said method, the present invention provides a kind of light emitting diode, and it uses arbitrary described light emitting diode Preparation method be prepared from, described light emitting diode includes substrate, hearth electrode, hole transmission layer, quantum the most successively Point luminescent layer, electron transfer layer and top electrode;Wherein, the material of described hole transmission layer and/or described electron transfer layer is to mix Miscellaneous inorganic nanometer oxide.The present invention uses the inorganic nanometer oxide of doping as hole transmission layer and/or electric transmission LED device prepared by the material of layer, and the device architecture of organic cavity transmission layer before comparing has stability and luminescence The feature that efficiency is high, is also more suited for low cost large-scale typographical display technology.
Fig. 3 is the structural representation of a kind of light emitting diode preferred embodiment of the present invention, as it is shown on figure 3, light-emitting diodes Pipe includes substrate 1, hearth electrode 2, hole transmission layer 3, quantum dot light emitting layer 4, electron transfer layer 5 and top electrode the most successively 6, wherein, the material of described hole transmission layer and/or described electron transfer layer is the inorganic nanometer oxide of doping.Make with existing Different with the transmission material in hole as electronics with general organic material, the present invention uses the inorganic nanometer oxide conduct of doping The transmission material in electronics and hole, has mobility higher, and stability is more preferable, is also more suited for low cost and prints aobvious on a large scale Show technology.Certainly the invention is not restricted to above-mentioned each functional layer, the present invention also can introduce electron injecting layer, electronics in the device structure The internal carrier of the functional layer balancing devices such as barrier layer, hole blocking layer, exciton confining layers, to improve device performance.
In sum, a kind of light emitting diode that the present invention provides and preparation method thereof, the present invention is by inorganic nano Oxide is doped, and utilizes surface segregation technology, reduces its surface energy, is passivated its surface defect, thus improves QLED device Stability and luminous efficiency.Meanwhile, utilize inorganic nanometer oxide to prepare electronics and hole transmission layer simultaneously, compare and have before The device architecture of machine hole transmission layer, has stability and the high feature of luminous efficiency, is also more suited for low cost large-scale Typographical display technology.
It should be appreciated that the application of the present invention is not limited to above-mentioned citing, for those of ordinary skills, can To be improved according to the above description or to convert, all these modifications and variations all should belong to the guarantor of claims of the present invention Protect scope.

Claims (9)

1. the preparation method of a light emitting diode, it is characterised in that include step:
A, on substrate depositions of bottom electrode;
B, then deposition of hole transport layer on hearth electrode;
C, then deposition quantum dot light emitting layer on hole transmission layer;
D, the last electron transfer layer that deposits on quantum dot light emitting layer, and it is deposited with top electrode on electron transfer layer, form luminescence Diode;
Wherein, the material of described hole transmission layer and/or described electron transfer layer is the inorganic nanometer oxide of doping.
The preparation method of light emitting diode the most according to claim 1, it is characterised in that the inorganic nanometer oxide of doping In, described inorganic nanometer oxide is the one in zinc oxide, titanium oxide, nickel oxide, molybdenum oxide.
The preparation method of light emitting diode the most according to claim 1, it is characterised in that the inorganic nanometer oxide of doping In, described doped chemical is the one in aluminum, magnesium, manganese, indium, gallium.
The preparation method of light emitting diode the most according to claim 1, it is characterised in that the inorganic nanometer oxide of doping In, it is 0.01 ~ 15% that doped chemical quality accounts for gross mass percentage ratio.
5. a light emitting diode, it is characterised in that the preparation side of employing light emitting diode as described in claim 1 ~ 4 is arbitrary Method is prepared from, described light emitting diode include the most successively substrate, hearth electrode, hole transmission layer, quantum dot light emitting layer, Electron transfer layer and top electrode;
Wherein, the material of described hole transmission layer and/or described electron transfer layer is the inorganic nanometer oxide of doping.
Light emitting diode the most according to claim 5, it is characterised in that described substrate is glass substrate.
Light emitting diode the most according to claim 5, it is characterised in that the material of described hearth electrode is transparent conductive metal Oxide ITO, FTO or AZO.
Light emitting diode the most according to claim 5, it is characterised in that the material of described quantum dot light emitting layer is CdSe/ ZnS, CdSe/CdZn or SeS/ZnS.
Light emitting diode the most according to claim 5, it is characterised in that the material of described top electrode is Al, Ag or Au.
CN201610821481.1A 2016-09-14 2016-09-14 A kind of light emitting diode and preparation method thereof Pending CN106229393A (en)

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CN109970356A (en) * 2017-12-28 2019-07-05 Tcl集团股份有限公司 Nano zinc oxide material and preparation method thereof, luminescent device
CN109994621A (en) * 2017-12-29 2019-07-09 Tcl集团股份有限公司 Laminated film and its preparation method and application
CN112687820A (en) * 2020-12-29 2021-04-20 广东聚华印刷显示技术有限公司 QLED device, preparation method of QLED device and display device
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CN113130631A (en) * 2019-12-30 2021-07-16 Tcl集团股份有限公司 Heterojunction nano material, preparation method thereof, thin film and quantum dot light-emitting diode
WO2022143568A1 (en) * 2020-12-30 2022-07-07 Tcl科技集团股份有限公司 Composite electron transport material and preparation method therefor, and light-emitting diode

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Cited By (10)

* Cited by examiner, † Cited by third party
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WO2019001026A1 (en) * 2017-06-28 2019-01-03 Tcl集团股份有限公司 Preparation method for metal oxide nanoparticle film and electrical component
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CN109970356A (en) * 2017-12-28 2019-07-05 Tcl集团股份有限公司 Nano zinc oxide material and preparation method thereof, luminescent device
CN109970356B (en) * 2017-12-28 2020-09-25 Tcl科技集团股份有限公司 Zinc oxide nano material, preparation method thereof and luminescent device
CN109994621A (en) * 2017-12-29 2019-07-09 Tcl集团股份有限公司 Laminated film and its preparation method and application
CN113054143A (en) * 2019-12-27 2021-06-29 Tcl集团股份有限公司 Nano material, preparation method thereof and quantum dot light-emitting diode
CN113130631A (en) * 2019-12-30 2021-07-16 Tcl集团股份有限公司 Heterojunction nano material, preparation method thereof, thin film and quantum dot light-emitting diode
CN112687820A (en) * 2020-12-29 2021-04-20 广东聚华印刷显示技术有限公司 QLED device, preparation method of QLED device and display device
WO2022143568A1 (en) * 2020-12-30 2022-07-07 Tcl科技集团股份有限公司 Composite electron transport material and preparation method therefor, and light-emitting diode

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Application publication date: 20161214