CN106222626A - A kind of high efficiency enter sheet and air extractor - Google Patents
A kind of high efficiency enter sheet and air extractor Download PDFInfo
- Publication number
- CN106222626A CN106222626A CN201610806264.5A CN201610806264A CN106222626A CN 106222626 A CN106222626 A CN 106222626A CN 201610806264 A CN201610806264 A CN 201610806264A CN 106222626 A CN106222626 A CN 106222626A
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- China
- Prior art keywords
- transition chamber
- transfer station
- vacuum transition
- vacuum
- high efficiency
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
nullThe invention discloses a kind of high efficiency enter sheet and air extractor，Including one for the transfer station of conveying work pieces，It is provided with vacuum transition chamber in described transfer station，Described vacuum transition chamber is arranged on the direction of transfer of transfer station，A family of power and influence it is movably set with at the charging aperture of described vacuum transition chamber，The centre position of described transfer station is provided with the opposite type sensor of more than a group，So when substrate from air transfer station to vacuum transition chamber traveling process，When substrate arrives centre position，The sensor sensing newly increased is to signal message，Control system obtains this signal message and feeds back to vacuum transition chamber and carry out following concurrent activity，Vacuum pump extraction valve is closed rapidly，Vent valve is opened simultaneously，Start vacuum breaker and deliver a signal to the family of power and influence，After broken sky completes, the family of power and influence opens immediately，Substrate enters at a high speed vacuum transition chamber，The most greatly save substrate and enter into the time of vacuum transition chamber from transfer station，Improve into sheet efficiency.
Description
Technical field
The present invention relates to thin-film solar cells and manufacture field, more particularly, it relates to a kind of high efficiency enter
Sheet and air extractor.
Background technology
At present, horizontal vacuum magnetron sputtering apparatus, import department's substrate is sent to vacuum transition chamber from atmospheric environment transfer station
Basic process be that it is to use two sensors location that substrate is sent to the typical process of vacuum transition chamber from atmospheric environment
(one group is that substrate stops level sensor, and another group is family of power and influence's obstacle avoidance sensor, and family of power and influence's obstacle avoidance sensor is positioned at valve position,
And stop level sensor against family of power and influence's obstacle avoidance sensor), after substrate arrives stopping level sensor stopping under controlled conditions, control
System processed obtains signal, and the extraction valve that vacuum pump is connected with vacuum is closed, and chamber vent valve (being again air valve) is opened, and reaches
Atmospheric environment, now between vacuum transition chamber and air transfer station, pressure reaches balance, air transfer station and vacuum transition chamber it
Between the isolation family of power and influence open, through strict distance acceleration and deceleration computational methods, substrate accelerates into vacuum transition chamber, slows down and arrives
Vacuum transition chamber stops level sensor, and substrate stops completely, and now the isolation family of power and influence closes, and vent valve cuts out, vacuum pump extraction valve
Opening, start evacuation, vacuum reaches to specify after requiring, carries out next step action.In this canonical process, still have some deficits,
The time that substrate enters into vacuum transition chamber from air transfer station is longer.It addition, for the convenience overhauling maintenance, vacuum transition
The design of room there is no filling in kind between drive, adds spatial volume, and weak point adds the rate of air sucked in required of vacuum pump,
I.e. add the pumpdown time of vacuum pump, still have some deficits when wanting seeking time short for slice.
Summary of the invention
In order to solve the problems referred to above, it is an object of the invention to provide a kind of high efficiency enter sheet and air extractor.
The present invention solves its technical problem and the technical scheme is that a kind of high efficiency enter sheet and air extractor,
Including one for the transfer station of conveying work pieces, described transfer station being provided with vacuum transition chamber, described vacuum transition chamber is arranged on
On the direction of transfer of transfer station, at the charging aperture of described vacuum transition chamber, it is movably set with a family of power and influence, the centre of described transfer station
Position is provided with the opposite type sensor of more than a group.
As the improvement of technique scheme, described transfer station is provided with the roller group for conveying work pieces, described rolling
It is indoor that wheels extend to vacuum transition, is provided with implant between the roller group that described vacuum transition is indoor.
As the further improvement of technique scheme, described implant is steel.
Further, described steel are set to solid square shape.
Further, the periphery of described vacuum transition chamber is provided with vacuum pump, and described vacuum pump passes through pipeline and vacuum transition
The inner chamber of room is connected.
Further, described pipeline is provided with for controlling the extraction valve switched of bleeding.
Further, described vacuum transition chamber is connected by pipeline more than one vent valve.
Further, described vacuum transition chamber connects a vacuum meter.
Beneficial effects of the present invention: owing to being provided with the opposite type sensor of more than a group in the centre position of transfer station, this
Sample when substrate from air transfer station to vacuum transition chamber traveling process, when substrate arrives centre position, the sensing newly increased
Device senses that signal message, control system obtain this signal message and feed back to vacuum transition chamber and carry out following concurrent activity,
Vacuum pump extraction valve is closed rapidly, and vent valve is opened simultaneously, starts vacuum breaker and also delivers a signal to the family of power and influence, broken sky complete after the family of power and influence
Instant unlatching, substrate enters at a high speed vacuum transition chamber, the most greatly saves substrate and enter into vacuum transition chamber from transfer station
Time, improve the efficiency into sheet.
Accompanying drawing explanation
The present invention is further detailed explanation with detailed description of the invention below in conjunction with the accompanying drawings.
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the structural representation that implant of the present invention is filled between roller group.
Detailed description of the invention
With reference to Fig. 1, a kind of high efficiency enter sheet and air extractor, first include one for the transfer station 1 of conveying work pieces, should
It is provided with vacuum transition chamber 2 in transfer station 1, and vacuum transition chamber 2 is arranged on the direction of transfer of transfer station 1, at vacuum transition
It is movably set with a family of power and influence 3 at the charging aperture of room 2, then is provided with the correlation sensing of more than a group in the centre position of transfer station 1
Device 4, the present invention is preferably set to one group the group number of sensor 4, and certain present invention does not limit the group number of sensor 4, it is possible to
To be set to two groups, as long as realizing with identical technological means, and identical technique effect can be reached, broadly falling into the present invention's
Within protection domain, owing to being provided with one group of opposite type sensor 4 in the centre position of transfer station, the most greatly save substrate
Enter into the time of vacuum transition chamber from transfer station, improve into sheet efficiency.
With reference to Fig. 1～Fig. 2, being provided with the roller group for conveying work pieces in transfer station 1, this roller group extends to vacuum
In transition chamber 2, then be provided with implant 9 between the roller group in vacuum transition chamber 2, this implant 9 be solid square steel and
Easy to assemble, which reduce vacuum chamber volume, thus shorten the time bled, improve production efficiency, fully met and carried
The requirement of high equipment capacity.
With reference to Fig. 1, the periphery of vacuum transition chamber 2 being provided with vacuum pump 5, this vacuum pump 5 is by pipeline and vacuum transition
The inner chamber of room 2 is connected, and is provided with for controlling the extraction valve 6 switched of bleeding on pipeline, then at vacuum transition chamber 2 by pipe
Road connect have more than one vent valve 7, the present invention is preferably set to two the number of vent valve 7, and respectively with pipeline
Being connected in the two side of vacuum transition chamber 2 mutually, certain present invention does not limit the number of vent valve 7, as long as with identical technology hands
Duan Shixian, and identical technique effect can be reached, within broadly falling into protection scope of the present invention, so pass from air when substrate
Sending platform in vacuum transition chamber traveling process, when substrate arrives centre position, the sensor 4 newly increased senses that signal disappears
Breath, control system obtains this signal message and feeds back to vacuum transition chamber 2 and carry out following concurrent activity, vacuum pump 5 extraction valve 6
Closing rapidly, vent valve 7 is opened simultaneously, starts vacuum breaker and delivers a signal to the family of power and influence 3, and after vacuum breaker completes, the family of power and influence 3 opens immediately
Opening, substrate enters at a high speed vacuum transition chamber 2.
With reference to Fig. 1, connecting and have a vacuum meter 8 on vacuum transition chamber 2, this vacuum meter 8 is used for detecting whether vacuum reaches
The requirement specified.
Preferably enforcement to the present invention is illustrated above, and certainly, the present invention can also use and above-mentioned enforcement
The form that mode is different, those of ordinary skill in the art are in the conversion of the equivalent made on the premise of spirit of the present invention
Or change accordingly, all should belong in protection scope of the present invention.
Claims (8)
1. one kind high efficiency enter sheet and air extractor, it is characterised in that: include one for the transfer station (1) of conveying work pieces, institute
Stating and be provided with vacuum transition chamber (2) in transfer station (1), described vacuum transition chamber (2) is arranged on the direction of transfer of transfer station (1)
On, it being movably set with a family of power and influence (3) at the charging aperture of described vacuum transition chamber (2), the centre position of described transfer station (1) is arranged
There is the opposite type sensor (4) of more than a group.
One the most according to claim 1 high efficiency enter sheet and air extractor, it is characterised in that: described transfer station (1)
On be provided with the roller group for conveying work pieces, in described roller group extends to vacuum transition chamber (2), described vacuum transition chamber
(2) implant (9) it is provided with between the roller group in.
One the most according to claim 2 high efficiency enter sheet and air extractor, it is characterised in that: described implant (9)
For steel.
One the most according to claim 3 high efficiency enter sheet and air extractor, it is characterised in that: described steel are set to
Solid square shape.
One the most according to claim 1 high efficiency enter sheet and air extractor, it is characterised in that: described vacuum transition chamber
(2) periphery is provided with vacuum pump (5), and described vacuum pump (5) is connected by the inner chamber of pipeline with vacuum transition chamber (2).
One the most according to claim 5 high efficiency enter sheet and air extractor, it is characterised in that: on described pipeline arrange
Have for controlling the extraction valve (6) switched of bleeding.
One the most according to claim 1 high efficiency enter sheet and air extractor, it is characterised in that: described vacuum transition chamber
(2) there is more than one vent valve (7) by pipeline connection.
One the most according to claim 1 high efficiency enter sheet and air extractor, it is characterised in that: described vacuum transition chamber
(2) connection has a vacuum meter (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610806264.5A CN106222626A (en) | 2016-09-06 | 2016-09-06 | A kind of high efficiency enter sheet and air extractor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610806264.5A CN106222626A (en) | 2016-09-06 | 2016-09-06 | A kind of high efficiency enter sheet and air extractor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106222626A true CN106222626A (en) | 2016-12-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610806264.5A Pending CN106222626A (en) | 2016-09-06 | 2016-09-06 | A kind of high efficiency enter sheet and air extractor |
Country Status (1)
| Country | Link |
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| CN (1) | CN106222626A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107814195A (en) * | 2017-11-28 | 2018-03-20 | 安徽工程大学 | A kind of full-automatic polytypic feeder of plastic drum lid |
| CN113754302A (en) * | 2020-10-27 | 2021-12-07 | 湖南旗滨节能玻璃有限公司 | Glass coating conveying system and method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0322424A (en) * | 1989-06-19 | 1991-01-30 | Nec Kyushu Ltd | Load-lock chamber |
| US20050011443A1 (en) * | 2003-07-17 | 2005-01-20 | Noriyuki Matsukaze | Organic thin film manufacturing method and manufacturing apparatus |
| CN101985737A (en) * | 2010-12-07 | 2011-03-16 | 魏海波 | Vacuum magnetron sputtering coating production line system of continuous solar energy collector chip |
| CN102560408A (en) * | 2012-01-20 | 2012-07-11 | 纳峰真空镀膜（上海）有限公司 | Continuous vacuum coating device |
| CN103233879A (en) * | 2013-04-24 | 2013-08-07 | 江苏宇天港玻新材料有限公司 | Double-cavity conversion chamber air pumping system of continuous vacuum production line |
| CN103290363A (en) * | 2012-02-24 | 2013-09-11 | 国家纳米科学中心 | Integrated device for preparing organic film device on flexible substrate |
| US20150303083A1 (en) * | 2012-11-14 | 2015-10-22 | Tokyo Electron Limited | Substrate processing device and substrate transfer method |
| CN206052145U (en) * | 2016-09-06 | 2017-03-29 | 中山瑞科新能源有限公司 | Piece and air extractor are entered in a kind of optimization |
-
2016
- 2016-09-06 CN CN201610806264.5A patent/CN106222626A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0322424A (en) * | 1989-06-19 | 1991-01-30 | Nec Kyushu Ltd | Load-lock chamber |
| US20050011443A1 (en) * | 2003-07-17 | 2005-01-20 | Noriyuki Matsukaze | Organic thin film manufacturing method and manufacturing apparatus |
| CN101985737A (en) * | 2010-12-07 | 2011-03-16 | 魏海波 | Vacuum magnetron sputtering coating production line system of continuous solar energy collector chip |
| CN102560408A (en) * | 2012-01-20 | 2012-07-11 | 纳峰真空镀膜（上海）有限公司 | Continuous vacuum coating device |
| CN103290363A (en) * | 2012-02-24 | 2013-09-11 | 国家纳米科学中心 | Integrated device for preparing organic film device on flexible substrate |
| US20150303083A1 (en) * | 2012-11-14 | 2015-10-22 | Tokyo Electron Limited | Substrate processing device and substrate transfer method |
| CN103233879A (en) * | 2013-04-24 | 2013-08-07 | 江苏宇天港玻新材料有限公司 | Double-cavity conversion chamber air pumping system of continuous vacuum production line |
| CN206052145U (en) * | 2016-09-06 | 2017-03-29 | 中山瑞科新能源有限公司 | Piece and air extractor are entered in a kind of optimization |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107814195A (en) * | 2017-11-28 | 2018-03-20 | 安徽工程大学 | A kind of full-automatic polytypic feeder of plastic drum lid |
| CN113754302A (en) * | 2020-10-27 | 2021-12-07 | 湖南旗滨节能玻璃有限公司 | Glass coating conveying system and method |
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Application publication date: 20161214 |