CN106199090A - Probe card using coaxial needle - Google Patents
Probe card using coaxial needle Download PDFInfo
- Publication number
- CN106199090A CN106199090A CN201511022324.6A CN201511022324A CN106199090A CN 106199090 A CN106199090 A CN 106199090A CN 201511022324 A CN201511022324 A CN 201511022324A CN 106199090 A CN106199090 A CN 106199090A
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- Prior art keywords
- conductor
- probe
- signal
- circuit board
- perforation
- Prior art date
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- 239000000523 sample Substances 0.000 title claims abstract description 147
- 239000004020 conductor Substances 0.000 claims abstract description 141
- 239000012212 insulator Substances 0.000 claims abstract description 20
- 239000000758 substrate Substances 0.000 claims description 13
- 230000002093 peripheral effect Effects 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000010079 rubber tapping Methods 0.000 claims description 4
- 230000000694 effects Effects 0.000 abstract description 7
- 230000000149 penetrating effect Effects 0.000 abstract 1
- 230000005611 electricity Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000005452 bending Methods 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The present invention relates to a probe card using a coaxial pin, which includes: the circuit board is provided with a top surface, a bottom surface and a through hole penetrating through the top surface and the bottom surface; the fixing seat is positioned below the bottom surface of the circuit board; the electric connector is arranged on the top surface of the circuit board and is provided with a signal conductor and a grounding conductor which are mutually insulated; the signal probe comprises a needle core, an insulator arranged on the periphery of the needle core and a conductor arranged on the periphery of the insulator, the signal probe is fixed on the fixed seat and penetrates through the through hole of the circuit board, and the needle core and the conductor are respectively and electrically connected with a signal conductor and a grounding conductor of the electric connector; and the grounding probe is fixed on the fixed seat, and the grounding probe is electrically connected with the conductor of the signal probe at the fixed seat. Therefore, the signal probe has better impedance matching and interference shielding effects, and is convenient to install and carry out jumper wire processing.
Description
Technical field
The present invention relates to a kind of probe card, especially with regard to a kind of probe card using coaxial needles.
Background technology
TaiWan, China patent publication No. is a kind of probe card 10 of offer in the patent of 201428300, as it is shown in figure 1,
This probe card 10 includes overlapping circuit board 11, intermediate plate 12 and a substrate 13, is arranged on substrate
Fixing seat 14 bottom 13, and multiple probe 15 being fixed on fixing seat 14, each probe 15 has to be worn
It is located at circuit board 11, intermediate plate 12, substrate 13 and the needle body 151, self-retaining seat 14 end on fixing seat 14
The syringe needle 152 that face protrudes out, and a backshank 153 protruded out from circuit board 11 end face, backshank 153 in
Bending and electrically connecting with a signal contact 112 and a ground contact 114 of circuit board 11 end face.
Each probe 15 uses coaxial needles, i.e. each probe 15 includes a conductive nook closing member 154 and and is located at pin
The electric conductor 155 of core 154 periphery, and because being provided with an insulator between nook closing member 154 and electric conductor 155 (in figure not
Show) and mutually insulated, nook closing member 154 and electric conductor 155 are electrically connected with signal contact 112 and ground contact 114 respectively
Connect.Therefore, electric conductor 155 can produce impedance matching and the effect of shielding interference, therefore probe card to nook closing member 154
10 can be applicable in high-frequency test.
But, the insulator of each probe 15 and electric conductor 155 uncoated nook closing member 154 are with signal contact 112 even
The part that connects and make this partial denudation outside, cause probe 15 impedance matching discontinuous and shielding interference effect being also subject to
Affect to some.Owing to the performance requirement of probe card gets over frequencyization, though foregoing probes card may conform to present stage industry
Demand, but still there is the space of improvement.The additionally, respectively backshank 153 of this probe 15 is in bending, and electric conductor
155 need to be electrically connected with ground contact 114 by an external wire 16, and such structure makes probe 15 install
More inconvenience, and also inconvenience carries out wire jumper process and (i.e. connects at nook closing member 154 or signal contact 112 and set wire and make pin
Core 154 electrically connects with other contacts of circuit board 11 end face).
Summary of the invention
For the problems referred to above, present invention is primarily targeted at a kind of probe card using coaxial needles of offer, its probe
Have preferably impedance matching and shielding interference effect, and install and wire jumper process on the easiest.
For achieving the above object, the present invention takes techniques below scheme: a kind of probe card using coaxial needles, it is special
Levy and be to include: a circuit board, there is an end face, a bottom surface, and one runs through described end face and described bottom surface
Perforation；One fixes seat, is positioned at the subjacent of described circuit board；One electric connector, is arranged on described circuit board
End face and there is a signal conductor and an earth conductor of mutually insulated；One signal probe, including a nook closing member, one sets
Putting the insulator in described nook closing member periphery, and one is arranged on the electric conductor that described insulator is peripheral, described signal is visited
Pin is fixed on described fixing seat and is located in the perforation of described circuit board, and described nook closing member and described electric conductor are respectively
Electrically connect with signal conductor and the earth conductor of described electric connector；And a grounded probe, it is fixed on described fixing
On seat, and described grounded probe electrically connects with the electric conductor of described signal probe at described fixing seat.
Therefore, signal probe can not protrude out the end face of circuit board, and by the signal conductor of electric connector and
Earth conductor allows nook closing member receive signal and allow electric conductor ground connection respectively, and insulator and the electric conductor of such signal probe can
Extending to nook closing member end, and then be more completely coated with nook closing member, therefore signal probe has preferably impedance matching and screen
Cover interference effect.And, signal probe does not have bending backshank and is not required to weld on circuit boards, the most relatively holds
Easily install.Additionally, by electric connector, signal probe can be more convenient for carrying out wire jumper process on the end face of circuit board.
It is preferred that the earth conductor of described electric connector to be positioned at described signal conductor peripheral, described circuit board described
Perforation has a upper shed being positioned at described end face, and described signal conductor is positioned at described upper shed, described nook closing member and institute
State signal conductor contact with each other and electrically connect.
More preferably, the signal conductor of described electric connector has a spliced eye, and the nook closing member of described signal probe inserts institute
State in spliced eye.Therefore, signal probe can arrange the most firm, and nook closing member is with signal conductor because of contact area relatively
Can more reliably electrically connect greatly.
It is preferred that the signal conductor of described electric connector has what a central part and extended from described central part
Extension, it is peripheral that described extension and described earth conductor are positioned at described central part, described signal conductor and described letter
It is arranged on described electric conductor the electric conductor mutually insulated of number probe, and the extension of described signal conductor is with described
Nook closing member contacts with each other and electrically connects.
It is positioned at described end face it is preferred that described circuit board has one and is positioned at the ground contact that described upper shed is peripheral,
The earth conductor of described electric connector is fixed at described ground contact, and the electric conductor of described signal probe connects with described
Ground contacts electrically connects.
It is preferred that described ground contact also extends in described perforation, the electric conductor of described signal probe is positioned at described
Part in perforation is positioned at the part of described perforation and contacts with each other and electrically connect with described ground contact.Therefore, letter
The electric conductor of number probe is not required to the inside cabling by circuit board or external wire, can be with electricity as long as being located in perforation
The earth conductor of adapter electrically connects, and electric conductor can more reliably be electrically connected because contact area is relatively big with earth conductor
Connect.
It is preferred that described circuit board has a ground contact being positioned at described end face, the ground connection of described electric connector is led
Body is fixed at described ground contact, and the electric conductor of described signal probe electrically connects with described ground contact.
It is preferred that the electric conductor of described signal probe contacts with the earth conductor of described electric connector and electrically connects.
It is preferred that described nook closing member have the lengthwise section in a perforation being located in described circuit board, one connect described vertical
Long section and be fixed on the tilting section on described fixing seat, an and emergence goes out the section of tapping of described fixing seat, described absolutely
Edge body and described electric conductor at least extend to the end of described lengthwise section from described tilting section.
It is preferred that the perforation of described circuit board is a plated-through-hole, and the electric conductor of described signal probe is by described
Plated-through-hole electrically connects with the earth conductor of described electric connector.
It is preferred that also set up an intermediate plate and a substrate between the bottom surface of described circuit board and described fixing seat, described
Signal probe is located on described intermediate plate and described substrate, and described probe card have always wear described circuit board,
Described intermediate plate and the perforation of described substrate, be provided with an optical lens in described perforation.
Accompanying drawing explanation
Fig. 1 is the probe card cross-sectional schematic of use coaxial needles of the prior art；
Fig. 2 is the cross-sectional schematic of the probe card of the use coaxial needles that the present invention the first preferred embodiment is provided；
Fig. 3 is enlarged drawing at A in Fig. 2；
Fig. 4 with Fig. 3 is similar, and except for the difference that the nook closing member of a signal probe of probe card inserts the grafting of an electric connector
Hole；
Fig. 5 with Fig. 2 is similar, and except for the difference that electric connector is also by two joints and a coaxial line and another electric connector
Connect；
Fig. 6 is the cross-sectional schematic of the probe card of the use coaxial needles that the present invention the second preferred embodiment is provided；
Fig. 7 is bowing of an electric connector of the probe card of the use coaxial needles that the present invention the second preferred embodiment is provided
View；
Fig. 8 is facing upward of an electric connector of the probe card of the use coaxial needles that the present invention the second preferred embodiment is provided
View；
Fig. 9 with Fig. 6 is similar, except for the difference that the direct contact electric connector of electric conductor of a signal probe of probe card
Earth conductor；
Figure 10 is the cross-sectional schematic of the probe card of the use coaxial needles that the present invention the 3rd preferred embodiment is provided.
Detailed description of the invention
In following example and accompanying drawing, identical accompanying drawing number represents that same or similar element or its structure are special
Levy.Secondly, when relating to an element and being arranged on another element, represent that aforementioned components is set directly at this another yuan
On part, or aforementioned components is arranged on this another element indirectly, i.e. be additionally provided with between two elements one or
Other elements multiple.And relate to an element " directly " when being arranged on another element, represent and there is no between two elements
Any other element is set.Additionally, each accompanying drawing is only used for schematically showing the mutual relation of each element, can not table
Show full-size(d) and the spatial relationship of each element.With embodiment, the present invention is carried out detailed retouching below in conjunction with the accompanying drawings
State.
As shown in FIG. 1 to 3, the probe card 20 of the use coaxial needles that the present invention the first preferred embodiment is provided is wrapped
Include the fixing seat 40, that a circuit board 30, is positioned at below the bottom surface 31 of circuit board 30 and be arranged on circuit board 30
Electric connector 50 on one end face 32, and one be fixed on the signal probe 60 on circuit board 30 and fixing seat 40.
It practice, in various embodiments of the present invention, circuit board 30 and fixing seat 40 (but being not limited) ringwise,
And probe card 20 has multiple signal probe 60, these signal probes 60 are probably and set around circuit board 30 center
Put, or use demand to have different arrangement modes according to difference, each signal probe 60 is equipped with an electricity
Adapter 50, only display circuit board 30 and a part for fixing seat 40 in the accompanying drawing of the present invention, and only display one letter
Number probe 60 and an electric connector 50, in order to be further illustrated.Additionally, fixing seat 40 is not limited to the most solid
It is scheduled on the bottom surface 31 of circuit board 30, it is possible to use fixing seat 14 as shown in Figure 1, i.e. across other plate bodys
Indirectly it is fixed on the bottom surface 31 of circuit board 30, such as, state as shown in Figure 10.Furthermore, probe card
20 also include at least one grounded probe 94 (as shown in Figure 10), are used for making these signal probe 60 ground connection (this portions
Divide and will be explained below).
Circuit board 30 has multiple perforation 34 running through end face 32 and bottom surface 31, only shows one of them in figure,
Perforation 34 is for being located in wherein for signal probe 60.In the present embodiment, perforation 34 is provided with conduction for hole wall
Plated-through-hole (the plating through hole of layer；It is called for short PTH), it is used for making signal probe 60 ground connection (this portion
Divide and will be explained below), in other words, the conductive layer in perforation 34 is a ground contact 36, ground contact
36 extend to bore a hole in 34 from end face 32 and also extend to bottom surface 31.More particularly, perforation 34 has respectively
Being positioned at upper shed 342 and a under shed 344 of end face 32 and bottom surface 31, ground contact 36 has one and is positioned at top
Face 32 and be positioned at the upper connecting portion 362, of upper shed 342 periphery and be positioned at bottom surface 31 and be positioned at outside under shed 344
The lower connecting portion 364 enclosed, and one be positioned at perforation 34 and connect the extension of upper and lower connecting portion 362,364
366。
Electric connector 50 has an insulating base 52, and is fixed on insulating base 52 central authorities and the signal conductor in column
54, and one be fixed on earth conductor 56 on insulating base 52 and ringwise, earth conductor 56 is positioned at signal conductor
54 is peripheral, and signal conductor 54 does not contacts with earth conductor 56 and is separated into mutually insulated by insulating base 52.
Electric connector 50 is fixed on the end face 32 of circuit board 30, and earth conductor 56 is fixed on the upper connection of ground contact 36
Portion 362, signal conductor 54 is positioned at upper shed 342 central authorities.
Signal probe 60 uses coaxial needles, and it includes a nook closing member 61, being made up of conductive material (such as copper)
It is located at the insulator 62 of nook closing member 61 periphery, and an electric conductor 63 being located at insulator 62 periphery.In this enforcement
In example, there is between nook closing member 61 and insulator 62 gap 64, can (but not between nook closing member 61 and insulator 62
It is limited to) it is provided with at least one support collar (not shown), to maintain this gap 64；Additionally, nook closing member 61 outer surface
Also (but not limited to) can be provided with an insulated sleeve (not shown).Or, insulator 62 also can be directly arranged in pin
Core 61 outer surface, i.e. can gapless 64 between nook closing member 61 and insulator 62.Or, signal probe 60 also can be adopted
With the coaxial needles of other forms, such as TaiWan, China patent number be provided in the patent of I279548 various with
Axonometer.
As in figure 2 it is shown, nook closing member 61 has lengthwise section 612, tilting section 614 and the section of tapping being sequentially connected with
616, wherein, lengthwise section 612 extends with the form on substantial orthogonality circuit board 30 surface and wears with its end segments
It is located in the perforation 34 of circuit board 30, and insulator 62 and electric conductor 63 extend to lengthwise section from tilting section 614
612 ends, have an angle theta, furthermore, are greater than 90 degree between tilting section 614 and lengthwise section 612
Angle.Specifically, signal probe 60 is fixed on fixing seat 40, wherein close to the part of the section of tapping 616
The end segments 65 (as shown in Figure 3) that one signal probe 60 comprises lengthwise section 612 end is located in circuit board
In the perforation 34 of 30, electric conductor 63 is positioned at the part of perforation 34 and is positioned at perforation 34 with ground contact 36
Partly (i.e. extension 366) contacts with each other and electrically connects, and therefore electric conductor 63 passes through ground contact 36 and is electrically connected
The earth conductor 56 connecing device 50 electrically connects, and nook closing member 61 is directly connected on the signal conductor 54 of electric connector 50
And electrically connect with signal conductor 54.
Signal probe 60 grounded probe 94 ground connection, as shown in Figure 10, grounded probe 94 includes a nook closing member 942,
And the insulator 944 being located at nook closing member 942 periphery, grounded probe 94 is located on circuit board 30, nook closing member 942
One end electrically connect with a ground contact 37 of circuit board 30 end face, nook closing member 942 is fixed close to the position of the other end
On fixing seat 40, it is necessary to explanation, the nook closing member design of grounded probe, it is also possible to be the nook closing member of grounded probe
One end electrically connect with conductive layer 42, and be fixed on fixing seat 40.Lead additionally, be provided with one in fixing seat 40
Electric layer 42, the nook closing member 942 of grounded probe 94 and the electric conductor 63 of signal probe 60 all contact with conductive layer 42 and
It is electrically connected to each other.It is electrically connected to each other due to the ground contact 36,37 of circuit board 30 or passes through test machine (in figure not
Show) it is electrically connected to each other, conductive layer 42 makes again the nook closing member 942 of grounded probe 94 and the electric conductor of signal probe 60
63 are electrically connected to each other, therefore, the ground contact of circuit board 30 36,37, the earth conductor 56 of electric connector 50,
Conductive layer 42 in the electric conductor 63 of signal probe 60, fixing seat 40 and nook closing member 942 structure of grounded probe 94
Become primary Ioops, when test machine (not shown) provides earthing potential to circuit board 30 wherein a ground contact or electricity
The earth conductor 56 of adapter 50, can make nook closing member 942 and the electric conductor of signal probe 60 of grounded probe 94
63 receive earthing potential.Conductive layer 42 can the electric conductor 63 of multiple signal probes 60 of linking probe card 20, make
Aforesaid loop includes the electric conductor 63 of these signal probes 60, therefore, the quantity of grounded probe 94 be not required to
The quantity of signal probe 60 is identical, and can arrange ground connection according to the arrangement mode of the signal probe 60 of probe card 20
Probe 94, such as the annular array mode in the present embodiment, probe card 20 can only have a grounded probe 94, and pass through
The conductive layer 42 of annular connects the nook closing member 942 of grounded probe 94 and the electric conductor 63 of all signal probes 60.Its
Secondary, it is necessary to explanation, the nook closing member 942 of grounded probe 94 electrically connects with the ground contact 37 of circuit board 30
Mode, is not limited with the structure disclosed herein, such as, can be electrically connected by wire or other suitable methods.
Therefore, signal probe 60 (but not limited to) can the most not protrude out the end face 32 of circuit board 30, if logical
Crossing the signal conductor 54 of electric connector 50 allows nook closing member 61 receive signal, and allows electric conductor 63 by earth conductor 56
Ground connection.Relative to the probe 15 shown in Fig. 1, due to the insulator 62 of signal probe 60 of the present invention and lead
Electricity body 63 (but not limited to) can extend to nook closing member 61 end, and then can more completely be coated with nook closing member 61, therefore believes
Number probe 60 has preferably impedance matching and shielding interference effect.
As shown in Figure 4, the signal conductor 54 of electric connector 50 can be provided with a spliced eye 542, visit for signal
The nook closing member 61 of pin 60 inserts in spliced eye 542, the most not only can arrange the most firm by signal probe 60,
And nook closing member 61 can more reliably electrically connect more greatly because of contact area with signal conductor 54.And, though nook closing member 61
So some protrudes out the end face 32 of circuit board 30 and is not coated with by insulator 62 and electric conductor 63, but this portion
Point power connector 50 is coated with, and therefore signal probe 60 still can produce good impedance matching and shielding interference effect.
Except aforesaid advantage, the signal probe 60 of the probe card 20 of the present invention does not have bending backshank and is not required to
It is welded on circuit board 30, the most easier to mount.Additionally, by electric connector 50, signal probe 60 can be more
It is easy to carry out wire jumper process on the end face 32 of circuit board 30；For example, as it is shown in figure 5, circuit board 30
End face 32 on can be provided with another electric connector 50 ', two electric connectors 50,50 ' connect a joint 72 respectively,
And two joint 72 connected by a coaxial line 74, signal probe 60 is by two electric connector 50,50 ', two joints
72 and coaxial line 74 and electric connector 50 ' electrically connect by exposing circuit or circuit board 30 internal wiring further
Another contact (not shown) electrical connection.So, it is arranged on and exposes circuit above circuit board 30 end face 32
Laying and the laying of circuit board 30 internal wiring will be more flexible.
As shown in Figure 6 to 8, the present invention the second preferred embodiment essentially consists in the difference of the first preferred embodiment
Electric connector 80 and the relative position with signal probe 60 thereof, it practice, the electric connector 80 of the present embodiment
Structure is similar with the electric connector 50 of the first preferred embodiment, except for the difference that the signal conductor 81 of electric connector 80
Having central part 812 and the extension 814 extended from central part 812, central part 812 is one to set
At the cylinder of insulating base 82 central authorities, extension 814 is peripheral with earth conductor 84 centrally located portion 812, and ground connection is led
Body 84 has a substantially ring bodies 842 in annular and be positioned at the short circuit point 844 bottom ring bodies 842
And two long contacts 846.It is arranged on electric conductor electric conductor 63 mutually insulated of signal conductor 81 and signal probe 60
On 63, and the extension 814 of signal conductor 81 contacts with each other with nook closing member 61 and electrically connects.More particularly, letter
The central part 812 of number conductor 81 is fixed on the upper connecting portion 362 of ground contact 36, and central part 812 and upper company
Connect portion 362 mutually insulated, such as, an insulating barrier (not shown) is set between central part 812 and upper connecting portion 362；
A part for the extension 814 of signal conductor 81 is positioned on electric conductor 63, and extension 814 and electric conductor 63
Also mutually insulated, the most aforesaid insulating barrier also extends on electric conductor 63, additionally, two length of earth conductor 84
Contact 846 is also secured at the upper connecting portion 362 of ground contact 36 and electrically connects with electric conductor 63.Therefore, signal
As long as probe 60 is located in perforation 34, electric conductor 63 can be by ground contact 36 and earth conductor 84 electricity
Connect, and nook closing member 61 can be connected to the extension 814 of signal conductor 81 and electrically connect with signal conductor 81.
It is noted that the earth conductor 56 of the electric conductor 63 of signal probe 60 and electric connector 50 (or electricity
The earth conductor 84 of adapter 80) it is not limited to be electrically connected to each other by the ground contact 36 being positioned at perforation 34,
That is, perforation 34 is not limited to hole wall and is provided with the plated-through-hole of conductive layer.For example, the electric conductor of signal probe 60
63 can by the inside cablings of circuit board 30 or on end face 32 earth conductor of external wire and electric connector 50
56 (or earth conductor 84 of electric connector 80) electrically connects.Or, as it is shown in figure 9, Fig. 9 with Fig. 6 is similar,
The most not there is ground contact 36, the electric conductor 63 mutually insulated ground of signal conductor 81 and signal probe 60
It is arranged on electric conductor 63, and electric conductor 63 top can be directly contacted with the earth conductor 84 of electric connector 80
Two long contacts 846 (as shown in Figure 7, Figure 8) and then electrically connect with earth conductor 84.In the same manner, signal probe
Electric conductor 63 top of 60 can be directly contacted with the earth conductor 56 of electric connector 50 as in the first embodiment shown,
And directly electrically connect with earth conductor 56 rather than as it is shown on figure 3, by ground contact 36 indirectly with connect
Earthed conductor 56 electrically connects.
It is can also be applied to Image Sensor or other light such as such as CIS (CMOS image sensor)
The probe card of electric device test, such as, the spy that the present invention the 3rd preferred embodiment as shown in Figure 10 is provided
Pin card, circuit board 30 bottom surface of probe card also sets up intermediate plate 91 and a substrate 92, arranges bottom substrate 92
Having and the aforementioned similar fixing seat 40 with fixed signal probe 60, in other words, fixing seat 40 is across substrate 92
With the bottom surface that intermediate plate 91 is arranged on circuit board 30 indirectly.Probe card has always wears circuit board 30, intermediate plate
91 and the perforation 93 of substrate 92, it is arranged in perforation 93 for an optical lens (not shown).Therefore,
Probe card is when carrying out tested object surveying, and light can be radiated on tested object through this optical lens, and then survey
The signal that amount tested object receives light source is the most problematic.
The various embodiments described above are merely to illustrate the present invention, the structure of each parts, size, arrange position and shape is all
Can be varied from, on the basis of technical solution of the present invention, all according to the principle of the invention, individual part be carried out
Improvement and equivalents, the most should not get rid of outside protection scope of the present invention.
Claims (11)
1. the probe card using coaxial needles, it is characterised in that including:
One circuit board, has an end face, a bottom surface, and a perforation running through described end face and described bottom surface；
One fixes seat, is positioned at the subjacent of described circuit board；
One electric connector, the end face being arranged on described circuit board and a signal conductor and a ground connection with mutually insulated are led
Body；
One signal probe, including a nook closing member, one is arranged on the insulator that described nook closing member is peripheral, and one be arranged on described
The electric conductor that insulator is peripheral, described signal probe is fixed on described fixing seat and is located in the perforation of described circuit board
In, described nook closing member and described electric conductor electrically connect with signal conductor and the earth conductor of described electric connector respectively；
One grounded probe, is fixed on described fixing seat, and described grounded probe and described signal at described fixing seat
The electric conductor electrical connection of probe.
2. the probe card using coaxial needles as claimed in claim 1, it is characterised in that: the ground connection of described electric connector
It is peripheral that conductor is positioned at described signal conductor, and the described perforation of described circuit board has a upper shed being positioned at described end face,
Described signal conductor is positioned at described upper shed, and described nook closing member contacts with each other with described signal conductor and electrically connects.
3. the probe card using coaxial needles as claimed in claim 2, it is characterised in that: the signal of described electric connector
Conductor has a spliced eye, and the nook closing member of described signal probe inserts in described spliced eye.
4. the probe card using coaxial needles as claimed in claim 1, it is characterised in that: the signal of described electric connector
Conductor has a central part and an extension extended from described central part, described extension and described earth conductor
It is positioned at described central part peripheral, is arranged on described the electric conductor mutually insulated of described signal conductor and described signal probe
On electric conductor, and the extension of described signal conductor contacts with each other with described nook closing member and electrically connects.
5. the probe card of the use coaxial needles as described in any one of claim 2 to 4, it is characterised in that: described circuit
Plate has one and is positioned at described end face and is positioned at the ground contact that described upper shed is peripheral, the earth conductor of described electric connector
Being fixed at described ground contact, the electric conductor of described signal probe electrically connects with described ground contact.
6. the probe card using coaxial needles as claimed in claim 5, it is characterised in that: described ground contact also extends
To described perforation, the electric conductor of described signal probe is positioned at the part of described perforation and is positioned at institute with described ground contact
State the part in perforation contact with each other and electrically connect.
7. the probe card using coaxial needles as claimed in claim 1, it is characterised in that: described circuit board has one
In the ground contact of described end face, the earth conductor of described electric connector is fixed at described ground contact, described signal
The electric conductor of probe electrically connects with described ground contact.
8. the probe card using coaxial needles as claimed in claim 1, it is characterised in that: the conduction of described signal probe
Body contacts with the earth conductor of described electric connector and electrically connects.
9. the probe card using coaxial needles as claimed in claim 1, it is characterised in that: described nook closing member has one and wears
Lengthwise section in the perforation of described circuit board, one connect described lengthwise section and be fixed on the tilting section on described fixing seat,
And one emergence go out the section of tapping of described fixing seat, described insulator and described electric conductor at least extend from described tilting section
End to described lengthwise section.
10. the probe card using coaxial needles as claimed in claim 1, it is characterised in that: the perforation of described circuit board
It is a plated-through-hole, and the electric conductor of described signal probe is the earth conductor by described plated-through-hole Yu described electric connector
Electrical connection.
11. probe card using coaxial needles as claimed in claim 1, it is characterised in that: the bottom surface of described circuit board
And also setting up an intermediate plate and a substrate between described fixing seat, described signal probe is located in described intermediate plate and described
On substrate, and described probe card has and always wears described circuit board, described intermediate plate and the perforation of described substrate, described
An optical lens it is provided with in perforation.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW104117490A TWI541512B (en) | 2015-05-29 | 2015-05-29 | Use a probe card with a coaxial pin |
| TW104117490 | 2015-05-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106199090A true CN106199090A (en) | 2016-12-07 |
| CN106199090B CN106199090B (en) | 2019-04-09 |
Family
ID=56997079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201511022324.6A Expired - Fee Related CN106199090B (en) | 2015-05-29 | 2015-12-30 | Probe card using coaxial needle |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN106199090B (en) |
| TW (1) | TWI541512B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108022848A (en) * | 2016-11-01 | 2018-05-11 | 稳懋半导体股份有限公司 | Improvement type coaxial probe structure |
| CN108872651A (en) * | 2017-05-08 | 2018-11-23 | 旺矽科技股份有限公司 | Probe card |
| CN109581005A (en) * | 2017-09-29 | 2019-04-05 | 中华精测科技股份有限公司 | Probe assembly and its space conversion interface plate |
| CN109581003A (en) * | 2017-09-29 | 2019-04-05 | 中华精测科技股份有限公司 | Probe assembly and its capacitor probe |
| CN109752573A (en) * | 2017-11-03 | 2019-05-14 | 中华精测科技股份有限公司 | Probe assembly and its tenon joint type capacitance probe |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI575247B (en) * | 2016-10-06 | 2017-03-21 | 國立臺灣大學 | Image compensation system and method thereof |
| KR102044753B1 (en) | 2018-05-25 | 2019-11-15 | 리노공업주식회사 | A test device |
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| CN201522509U (en) * | 2009-09-17 | 2010-07-07 | 美博科技(苏州)有限公司 | High-frequency short arm probe card |
| CN102401845A (en) * | 2010-09-14 | 2012-04-04 | 旺矽科技股份有限公司 | High frequency cantilever type probe clamp |
| KR20130064402A (en) * | 2011-12-08 | 2013-06-18 | 주식회사 유니멤스 | Cis probe card |
| CN103543304A (en) * | 2012-07-13 | 2014-01-29 | 旺矽科技股份有限公司 | High-frequency probe card |
| CN104345186A (en) * | 2013-07-23 | 2015-02-11 | 旺矽科技股份有限公司 | High-frequency probe card for detecting photoelectric element |
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- 2015-05-29 TW TW104117490A patent/TWI541512B/en not_active IP Right Cessation
- 2015-12-30 CN CN201511022324.6A patent/CN106199090B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201522509U (en) * | 2009-09-17 | 2010-07-07 | 美博科技(苏州)有限公司 | High-frequency short arm probe card |
| CN102401845A (en) * | 2010-09-14 | 2012-04-04 | 旺矽科技股份有限公司 | High frequency cantilever type probe clamp |
| KR20130064402A (en) * | 2011-12-08 | 2013-06-18 | 주식회사 유니멤스 | Cis probe card |
| CN103543304A (en) * | 2012-07-13 | 2014-01-29 | 旺矽科技股份有限公司 | High-frequency probe card |
| CN104345186A (en) * | 2013-07-23 | 2015-02-11 | 旺矽科技股份有限公司 | High-frequency probe card for detecting photoelectric element |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108022848A (en) * | 2016-11-01 | 2018-05-11 | 稳懋半导体股份有限公司 | Improvement type coaxial probe structure |
| CN108022848B (en) * | 2016-11-01 | 2020-10-27 | 稳懋半导体股份有限公司 | Improved coaxial probe structure |
| CN108872651A (en) * | 2017-05-08 | 2018-11-23 | 旺矽科技股份有限公司 | Probe card |
| CN109581005A (en) * | 2017-09-29 | 2019-04-05 | 中华精测科技股份有限公司 | Probe assembly and its space conversion interface plate |
| CN109581003A (en) * | 2017-09-29 | 2019-04-05 | 中华精测科技股份有限公司 | Probe assembly and its capacitor probe |
| CN109752573A (en) * | 2017-11-03 | 2019-05-14 | 中华精测科技股份有限公司 | Probe assembly and its tenon joint type capacitance probe |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106199090B (en) | 2019-04-09 |
| TW201641940A (en) | 2016-12-01 |
| TWI541512B (en) | 2016-07-11 |
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