CN106169412B - Device is used in fluid processing - Google Patents
Device is used in fluid processing Download PDFInfo
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- CN106169412B CN106169412B CN201610333470.9A CN201610333470A CN106169412B CN 106169412 B CN106169412 B CN 106169412B CN 201610333470 A CN201610333470 A CN 201610333470A CN 106169412 B CN106169412 B CN 106169412B
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- fluid
- discharge space
- pipe
- processed
- process chamber
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/56—One or more circuit elements structurally associated with the lamp
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
- H01J61/366—Seals for leading-in conductors
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- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The present invention provides the fluid processing device that can obtain high security.Fluid processing includes process chamber with device, handles conductive fluid processed；The discharge space of strip forms pipe, is made of dielectric substance, is sealed with discharge gas, and be arranged by in such a way that the fluid processed of the processing indoor moveable contacts；Long strip electrode, the tube axial direction to form pipe along the discharge space configure in a manner of extending and form the inside of pipe in the discharge space；And driving power, it is powered, the power supply is for forming the inside of pipe in the discharge space, via the tube wall in the region that the fluid processed that the discharge space is formed in pipe is contacted, make to generate electric discharge between the long strip electrode and the fluid processed, which is characterized in that a terminal of the driving power is electrically connected with the long strip electrode, another terminal of the driving power is electrically connected with fluid processed, so that the fluid processed becomes earthing potential state.
Description
Technical field
The present invention relates to the fluid processing devices by being handled fluid irradiation light processed.In more detail
It says, is related to the fluid processing for carrying out sterilization treatment or TOC (organic matter) resolution process and uses device.
Background technique
All the time, it as the fluid processing device for being handled water or other fluid, develops and as follows using having
Device: by irradiating the light such as ultraviolet light to fluid processed, to carry out sterilization treatment or TOC (organic matter) resolution process
(for example, referring to patent document 1).
In patent document 1, one kind as fluid processing device, comprising: the treatment trough of bottomed tube has and is used for
The processing space that the fluid processed being made of water is handled；And discharge space forms unit, is set as in the processing
It is filled in slot in the state of fluid processed (water), becomes the state that at least part is immersed and contacted with fluid processed.
The discharge space is formed unit and is configured with following state: forming envelope in pipe in the discharge space for the strip being made of dielectric substance
The long strip electrode configured in a manner of entering has discharge gas, and the tube axial direction to form pipe along the discharge space extends passes through
The lid that is made of dielectric substance and be capped.
In the fluid processing device, the fluid processed in treatment trough is used as electrode (external electrode), to this
Fluid processed and long strip electrode supply alternating voltage, discharge and radiating light is (ultraviolet to be formed in pipe to generate in discharge space
Line), the fluid processed is handled by irradiating the light.
But in previous fluid processing device, become the electrode (external electrical that high voltage is in processing movement
Pole) it is exposed to external state, alternatively, even if also maintaining the state of radiating light in the case where being not necessarily to be handled, because
This intentionally gets higher safety.
Existing technical literature
Patent document
Patent document 1: Japanese Unexamined Patent Application Publication 2013-516730 bulletin
Summary of the invention
The present invention is completed according to situation as described above, it is intended that high security can be obtained by providing
Device is used in fluid processing.
Fluid processing of the invention is included with device
Process chamber handles conductive fluid processed；
The discharge space of strip forms pipe, is made of dielectric substance, is sealed with discharge gas, and with at the place
The mode of the fluid processed contact of reason indoor moveable is arranged；
Long strip electrode, the tube axial direction to form pipe along the discharge space configure in a manner of extending in the discharge space
Form the inside of pipe；And
Driving power is powered, and the power supply is for forming the inside of pipe in the discharge space, via electric discharge sky
Between form the tube wall in region that the fluid processed in pipe is contacted, make to generate between the long strip electrode and the fluid processed
Electric discharge,
The fluid processing device is characterized in that,
One terminal of the driving power is electrically connected with the long strip electrode,
Another terminal and fluid processed of the driving power are electrically connected so that the fluid processed becomes ground connection electricity
Position state.
Moreover, in fluid processing device of the invention,
The supply mouth for supplying fluid processed is provided in the process chamber；And discharge is handled in the chamber
Fluid processed outlet mouth,
At least one party in the supply mouth and the outlet mouth be provided with for make fluid processed with it is described
The connecting portion of another terminal electrical connection of driving power.
In fluid processing device of the invention, preferably, in the both sides of the supply mouth and the outlet mouth
It is provided with the connecting portion.
In fluid processing device of the invention, preferably, the connecting portion passes through by gold, platinum and their conjunction
At least one of group that gold is constituted and constitute.
In fluid processing device of the invention, preferably, the conductivity of the fluid processed be 40 μ S/cm with
On.
In fluid processing device of the invention, the inside of pipe is formed in discharge space, in the length being configured inside this
Between strip electrode and fluid processed in earthing potential state, the fluid institute processed in pipe is formed via the discharge space
The tube wall in the region of contact generates electric discharge, thus the radiating light and light is irradiated to the fluid processed.Therefore, it is acted in processing
In, the long strip electrode due to being configured at the inside that discharge space forms pipe is in high voltage, is formed and is managed in the discharge space
Outside be not present in high voltage electrode.In addition, in the inside of process chamber, fluid processed not with discharge space shape
In the case where contacting at pipe, electric discharge will not be generated in the inside that the discharge space forms pipe.
Therefore, fluid processing device according to the present invention, the electrode in high voltage will not expose in processing movement
To outside, in addition, when there is no fluids processed without being handled for the inside of process chamber, will not radiating light, therefore energy
Access high security.
Detailed description of the invention
Fig. 1 is the explanation cross-sectional view for showing an example of structure of fluid processing device of the invention.
Fig. 2 is the explanatory diagram for showing the discharge space formation unit for the fluid processing device for constituting Fig. 1.
Fig. 3 is an example for showing the structure of importing conduit and export conduit for the fluid processing device for constituting Fig. 1
Explanation cross-sectional view.
Fig. 4 is to form pipe with discharge space to show its for constituting the long strip electrode of fluid processing device of the invention together
The explanatory diagram of his example.
Specific embodiment
Hereinafter, embodiments of the present invention will be described.
Fig. 1 is the explanation cross-sectional view for showing an example of structure of fluid processing device of the invention, and Fig. 2 is to show structure
The explanatory diagram of unit is formed at the discharge space of the fluid processing device of Fig. 1.
Fluid processing device 10 is a device which to obtain light (ultraviolet light) using dielectric barrier discharge, by the light
It is irradiated to conductive fluid processed, to carry out photo-irradiation treatment to the fluid processed.
The process chamber that the fluid processing device 10 includes the circular tube shaped of strip forms pipe 11；To close the process chamber shape
Process chamber S being arranged at the mode of the both ends open of pipe 11, being divided approximately through columned cap member 16A, 16B.At this
The inside of process chamber S, to be formed along process chamber, the central axis (pipe axis) of pipe 11 extends and one end (the right end side in Fig. 1) is inserted
A logical cap member 16A and be projected into external state, be equipped with it is with the small outer diameter of the internal diameter for forming pipe 11 than process chamber,
The discharge space of the pole shape of strip forms unit 20.On a cap member 16A, in the diameter direction of cap member 16A center
Portion is formed with the through hole of the internal diameter with the outer diameter for being suitble to discharge space to form unit 20.In addition, in another cap member 16B
On, it is formed in the central portion of medial surface (left side in Fig. 1) with the interior of the outer diameter for being suitble to discharge space to form unit 20
The recess portion 17 of diameter, the another side (left end side in Fig. 1) for becoming discharge space formation unit 20 touch the interior of the recess portion 17
The state of circumferential surface.These cap members 16A, 16B Seal treatment room forms pipe 11, and has and protect discharge space formation unit 20
The positioning held in desired allocation position keeps function.As a result, in the inside of process chamber S, discharge space forms unit 20 and passes through
Cap member 16A, 16B and be supported fixation, the discharge space formed unit 20 and process chamber formed between pipe 11 be formed with by
The circular space for the treatment of fluid flowing (hereinafter also referred to as " fluid circulation space ").That is, discharge space forms 20 quilt of unit
It is configured to contact with the fluid processed flowed at the inside of process chamber S (fluid circulation space).
In addition, being provided with the confession carried out for making to generate electric discharge in discharge space formation unit 20 in the outside of process chamber S
The driving power 19 of electricity.
In the example of the figure, in the inside of process chamber S, process chamber form pipe 11 and discharge space formed unit 20 it
Between cap member 16A, 16B near position be respectively arranged with O ring 18A, 18B, to form the close construction of liquid of process chamber S.
In process chamber S, the material of pipe 11 is formed as process chamber, it can be from for fluid processed and light (ultraviolet light)
Deng patience viewpoint, enumerate the high metal of quartz glass, corrosion resistance and the high resin etc. of UV resistant performance.
In addition, cap member 16A, 16B are made of the high material of corrosion resistance and UV resistant performance.
In the example of the figure, process chamber forms pipe 11 and is made of quartz glass, and cap member 16A, 16B are by polytetrafluoroethylene (PTFE)
It constitutes.
Discharge space forms unit 20 and is made of the quartz glass as dielectric substance with translucency, at one end
(right end in Fig. 1 and Fig. 2) is formed with sealing 21A, and the other end (left end in Fig. 1 and Fig. 2) is closed, in this is airtight
There is the discharge space for the substantially circular tube shaped for being formed with discharge space to form pipe 21 in portion.The discharge space forms pipe 21 in process chamber
The inside of S extends along the central axis that the process chamber forms pipe 11 and is configured, so that discharge space forms pipe 21 and is located at process chamber
It is formed on the central axis (pipe axis) of pipe 11, i.e. discharge space forms the central axis of pipe 21 and the central axis of process chamber formation pipe 11
(pipe axis) is consistent.
In addition, being sealed with discharge gas in the inside that discharge space forms pipe 21, and for example, by being made of tungsten or molybdenum
Metal bar 25 constitute long strip electrode along the discharge space formed pipe 21 central axis extend and configure so that be located at discharge
Space forms on the central axis (pipe axis) of pipe 21, is i.e. consistent with the central axis (pipe axis) of discharge space formation pipe 21.
Also, the inside of pipe 21 is formed in discharge space, by constituting the metal bar 25 of long strip electrode across electric discharge sky
Between formed pipe 21 tube wall it is opposite with fluid circulation space whole region formation discharge space.That is, discharge space forms unit
20 will utilize at the inside of process chamber S (fluid circulation space) with the fluid processed that discharge space forms the state that pipe 21 contacts
It is formed via discharge space processed in pipe 21 between the fluid processed and long strip electrode for electrode (external electrode)
The tube wall in the region of fluid contact generates dielectric barrier discharge, thus radiating light (ultraviolet light).
Herein, discharge space forms overall length (the luminous length of discharge space formation unit 20 of the discharge space in unit 20
Degree) it is, for example, 100mm~500mm.
About the metal bar 25 for constituting long strip electrode, it is empty that one end (right end in Fig. 1) of the metal bar 25 extends to electric discharge
Between formed pipe 21 sealing 21A, be electrically connected with the metal foil 27 being made of molybdenum or molybdenum alloy being embedded in sealing 21A
It connects.In addition, be electrically connected in metal foil 27 one end (right end in Fig. 1) from sealing 21A is prominent outward and extend, by
The outside lead stick 28 that molybdenum or molybdenum alloy are constituted, the outside lead stick 28 one with driving electrodes 19 via connecting component 29
Terminal electrical connection.
In the example of the figure, on the other end (left end in Fig. 2) of metal bar 25 for constituting long strip electrode, integrally
Continuously it is provided with the support portion 31 by constituting with 25 continuous annulus 31A and straight part 31B of the metal bar.The support portion 31
It is configured as, becomes annulus 31A in the inner surface for forming pipe 21 than the inside O ring 18B (right side in Fig. 1) and discharge space
Contact or close state.That is, the annulus 31A of support portion 31 is configured as, become the pipe that pipe 21 is formed across discharge space
The wall state opposite with the fluid processed of inside (fluid circulation space) of process chamber S.The support portion 31 has strip electricity
The positioning that pole (metal bar 25) is maintained at the desired allocation position in discharge space keeps function, and in fluid processing dress
It sets when 10 driving starts and is also functioned as auxiliary electrode (when electric discharge starting).In particular, being provided with support portion 31
When, when the driving of fluid processing device 10 starts, support portion 31 becomes so-called auxiliary electrode, firstly, in support portion 31
Surrounding generates electric discharge, and later, the discharge space in the discharge space that discharge space forms pipe 21 forms the central axis of pipe 21
Electric discharge is generated in the whole region in direction.
As the discharge gas for the inside for being sealing into discharge space formation pipe 21, rare gas can be used, in particular,
Xenon (Xe), argon gas (Ar), Krypton (Kr) and their mixed gas can be used.
In addition, enclosing fluorine gas (F in the inside that discharge space forms pipe 21 as needed2), chlorine (Cl2), iodine gas (I2) with
And bromine gas (Br2) etc. halogen gas.
Herein, discharge gas and halogen gas enclosed as needed that discharge space forms the inside of pipe 21 are sealing into
Type, it is different with usage of device 10 etc. according to fluid processing, put as needed in fluid processing in device 10
The more appropriate selection of wavelength for the light (ultraviolet light) penetrated.
In addition, getter 33 can also be arranged in the inside that discharge space forms pipe 21 shown in Fig. 1 and Fig. 2.
As long as getter 33 can be absorbed by the effect etc. of light (ultraviolet light) from electric discharge at least in discharge space
Space forms the substance of the oxygen of the generations such as pipe 21, as the material of getter 33, such as can enumerate zirconium (Zr)-aluminium
(Al) alloy, zirconium (Zr)-iron (Fe) alloy, zirconium (Zr)-aluminium (Al)-iron (Fe) alloy etc..
Another side part (Fig. 1 in the example of the figure, in inside of the getter 33 by forming pipe 21 than discharge space
In left end side section), the annulus 31A of specifically support portion 31 metal block or metal deposition film on the outside are more set
It constitutes.
In addition, being formed in pipe 21 in discharge space, the entire of discharge space at least can also be surrounded in its inner surface
Region, setting, which contains, will receive as exciting light from the light that the excimers generated by dielectric barrier discharge are released to put
Penetrate the luminescent coating of the fluorophor of ultraviolet light.
Luminescent coating is arranged in inner surface by forming pipe 21 in discharge space, so as to will be from passing through dielectric barrier
The light for the ratio shorter wavelength that the excimers that electric discharge generates are released is converted to the light of long wavelength.
It, preferably will be from the excimers generated by dielectric barrier discharge as the fluorophor for constituting luminescent coating
The light of releasing receives to be fluorophor of the exciting light to radiate wavelength 300nm ultraviolet light below.
As the concrete example of fluorophor, such as praseodymium activating phosphatase lanthanum is able to use (near excitation radiation wavelength 230nm
Region light), neodymium activating phosphatase lanthanum (light for passing through the region near excitation radiation wavelength 184nm), neodymium activating phosphatase yttrium it is (logical
It is too drastic provide the long 190nm of ejected wave near light) and praseodymium activation yttrium aluminium boron acid salt (by excitation radiation wavelength 250nm near
Light) etc..
In luminescent coating, when discharge space forms pipe 21 and is made of quartz glass, fluorophor and quartz glass it is viscous
Knot property is small, therefore in order to obtain forming the high-adhesion of pipe 21, it is preferable to use bonding agent for discharge space in luminescent coating.
As bonding agent, such as soft glass powder and hard glass powder etc. can be enumerated.
It is formed in pipe 11 in process chamber, is formed in the another side (left end side in Fig. 1) that the process chamber forms pipe 11
Fluid introducing port 12A processed is connected with the central axis that pipe 11 is formed with process chamber in the fluid introducing port 12A processed
The importing conduit 13 that ground extends.The supply mouth of process chamber S is made of the fluid introducing port 12A and importing conduit 13 processed
Portion.In addition, fluid export mouth 12B processed is formed in the one end (the right end side in Fig. 1) that process chamber forms pipe 11, at this
Fluid export mouth 12B processed, which is connected with, forms the central axis of pipe 11 with process chamber and to extending with importing conduit 13
The export conduit 14 that contrary direction extends.Place is constituted by the fluid export mouth 12B and export conduit 14 processed
Manage the outlet mouth of room S.
It is provided with as a result, in process chamber S and supplies the supply mouth of fluid processed；And handled in process chamber S
The outlet mouth of fluid discharge processed.
In addition, the another side and one that process chamber forms pipe 11 is arranged in supply mouth and outlet mouth in process chamber S
End side, thus from fluid introducing port 12A processed import fluid processed reach fluid export mouth 12B processed until light
It is elongated to irradiate flow path length.That is, the light irradiation time for fluid processed is elongated.Therefore, in fluid processing in device 10
Obtain high photo-irradiation treatment effect (in particular, sterilization effect and discomposing effect etc.).
As shown in figures 1 and 3, importing with conduit 13 by the glass portion 13A, 13C for the circular tube shaped being made up of quartz glass,
14A, 14C constitute, importing with conduit 14 by with internal diameter identical with the internal diameter of the glass portion 13A, 13C, 14A, 14C, by
Conductive part 13B, the 14B for the circular tube shaped that conductive material is constituted are constituted.In the respective of importing conduit 13 and importing conduit 14
In, glass portion 13A, 13C, 14A, 14C and conductive part 13B, 14B are connected in liquid-tight manner.
Also, the ground side, i.e. of driving power 19 is electrically connected with via connecting component 38,39 on conductive part 13B, 14B
Another terminal.Another terminal of the driving power 19 is the ground connection side terminal of the driving power 19.Pass through conductive part as a result,
13B, 14B constitute the company for being electrically connected the fluid processed of inside of process chamber S with another terminal of driving power 19
Socket part position becomes the fluid processed of the inside of process chamber S via the connecting portion (conductive part 13B, 14B) and driving power 19
Ground side connection state (earthing potential state).
In the example of the figure, importing between two glass portions 13A, 13C, has with the conductive part 13B in conduit 13
There is the outer diameter bigger than these glass portions 13A, 13C.In conductive part 13B, the outer peripheral surface of connecting component 38 and conductive part 13B
Electrical connection.
In addition, export with the conductive part 14B in conduit 14 between two glass portions 14A, 14C, have than these glass
Glass portion 14A, 14C big outer diameter.In conductive part 14B, connecting component 39 is electrically connected with the outer peripheral surface of conductive part 14C.
Although conductive part 13B, 14B are constructed from a material that be electrically conducting, but according to the viewpoint of electric erosion resistance, preferably from by gold,
At least one selected in the group that platinum and their alloy are constituted.
Moreover, in conductive part 13B, 14B, when considering cost (fee of material), the preferred inner circumferential in conductive part 13B, 14B
Face is formed with any one plated film in golden plated film, platinum plated film and gold-platinum alloy plated film.
In process chamber S, usage of the flow of fluid processed according to fluid processing device 10, fluid processed
Type and the wavelength etc. of the light radiated and it is different, for example, 2L/ hours.
Fluid processed, which passes through to become, forms the state that pipe 21 contacts with discharge space in the inside of process chamber S to utilize
For electrode (external electrode), it is therefore desirable to it is conductive, in particular, conductivity is preferably 40 μ S/cm or more.
When the conductivity of fluid processed is too small, electric discharge will not be generated in the inside that discharge space forms pipe 21, is existed
The problem of photo-irradiation treatment cannot being carried out to fluid irradiation light processed.
As the concrete example of fluid processed, such as water can be enumerated etc..
As driving power 19, high-frequency ac power can be used for example.
When as driving power 19 using high-frequency ac power, about the power supply item from the driving power 19
Part, in order to maintain stable electric discharge, preferably frequency is 50kHz or more and voltage (peak-to-peak value) is 2500V or more.
An example of the specification of fluid processing device 10 as this structure, discharge space form the luminous length of unit 20
Degree is 150mm, and the outer diameter of discharge space formation pipe 21 is 16mm and internal diameter is 14mm, constitutes the outer of the metal bar 25 of long strip electrode
Diameter is 0.8mm.In addition, the overall length of process chamber S is 200mm, process chamber forms the internal diameter of pipe 11 as 21mm and thickness is about 2mm,
The inner peripheral surface of conductive part 13B, 14B of importing conduit 13 and export conduit 14 are made of gold-platinum alloy (plated film).
In addition, forming the inside of pipe 21 in discharge space, xenon is sealed with the pressure of 40kPa as discharge gas, from
Driving power 19 to long strip electrode and touch discharge space formed pipe 21 state fluid processed between, with voltage (peak-
Peak value) be 3000V condition be fed with AC power.
In the fluid processing in device 10, driving power 19 is turned on, via supply mouth to process chamber S's
Inside is fed with fluid processed (in particular, such as tap water (conductivity is 40 μ S/cm)), and fluid processed becomes and puts
The state of electric space forming unit 20 (discharge space forms pipe 21) contact, puts to be formed in unit 20 to generate in discharge space
Electricity and radiating light (ultraviolet light).
When illustrating, the electric power from driving power 19 is fed into the metal bar 25 for constituting long strip electrode, and
The stream processed in the internal flow of process chamber S is supplied to via conductive part 13B, 14B for constituting supply mouth and outlet mouth
Body.Also, it is formed in unit 20 in discharge space, the region contacted via the fluid processed that discharge space is formed in pipe 21
Tube wall, (discharge space) generates dielectric barrier discharge and is excited quasi- point to be formed between long strip electrode and fluid processed
Son, the light (ultraviolet light) released from the excimers form pipe 21 through discharge space and radiate.Herein, in discharge space shape
At in unit 20, dielectric barrier discharge is uniform on the direction that long strip electrode extends (left and right directions in Fig. 1), and with length
Be formed as centered on strip electrode radial.
Thus from discharge space formed unit 20 radiate light, be irradiated to process chamber S internal flow it is processed
Fluid and carry out photo-irradiation treatment.Also, the fluid processed of photo-irradiation treatment is carried out in the inside of process chamber S, via structure
The outside of process chamber S is discharged at the fluid export mouth 12B and export conduit 14 processed of outlet mouth.
Moreover, generating electric discharge as the inside for making discharge space form pipe 21 in device 10 in fluid processing
One of a pair of electrodes, using fluid processed, even therefore driving power 19 in an ON state, do not have in fluid processed
Have in the case where being contacted with discharge space formation pipe 21, electric discharge will not be generated.Moreover, a pair of without being arranged by special-purpose member
One in electrode, therefore manufacturing process's (assembling working hour) and manufacturing cost can be reduced.In addition, be not in by setting by
External electrode that special-purpose member is constituted and the disadvantage that generates, specifically there is no contacted by external electrode with fluid processed
Cause and the problems such as the generation of the galvanic corrosion of external electrode and nitrogen oxidation gas that generate.
In addition, the ground side of conductive part 13B, 14B and driving power 19 connects, therefore supplied electric power from driving power 19
Fluid processed becomes earthing potential state.Therefore, in processing movement, it is configured at the length that discharge space forms the inside of pipe 21
Strip electrode becomes high voltage, therefore the electrode as high voltage is not present in the outside that the discharge space forms pipe 21.
Therefore, according to fluid processing device 10, the electrode for becoming high voltage in processing movement will not be exposed to outside,
Also, when become the inside of process chamber S fluid processed formed with discharge space the state that contacts of pipe 21 and be not necessarily into
Row processing when, due to will not radiating light, high security can be obtained.
In addition, the both sides of supply mouth and outlet mouth in process chamber S are arranged in fluid processing in device 10
There is the connecting portion (conductive part 13B, 14B) for fluid processed to be electrically connected with driving power 19.Therefore, without in order to make
Discharge space forms unit 20 and generates electric discharge and need high voltage, can obtain more excellent electric discharge beginning property.
In addition, in fluid processing in device 10, by the group that is made of gold, platinum and their alloy at least
A kind of composition connecting portion (conductive part 13B, 14B), so that the connecting portion has electric erosion resistance.Therefore, it can prevent even
Galvanic corrosion is generated on the contact surface with fluid processed in socket part position.As a result, it is possible to the illumination of high reliablity is carried out during length
Penetrate processing.
This fluid processing is for example carried out with device 10 at the decomposition (TOC decomposition) comprising organic matter in water
It manages or is suitably used for eliminating comprising so-called sterilization treatment of bacterium etc. in water.
Herein, in order to carry out decomposition (TOC decompositions) processing comprising organic matter in water and in use, fluid processing
There is the light of 170~200nm of wavelength of central wavelength with the preferred radiation of device 10 on wavelength 190nm, or for eliminating
In use, fluid processing is radiated with device 10 is preferred in wavelength 250nm in the so-called sterilization treatment of bacterium and fungi in water
The light of upper 220~290nm of wavelength with central wavelength.
In the present invention, it is not limited to above-mentioned embodiment, various changes can be implemented.
For example, the viewpoint based on electric discharge startability, supply of the fluid processing with device preferably as shown in Figure 1 in the process chamber
Oral area and outlet mouth both sides are arranged connecting portion, but can also the either side only in supply mouth and outlet mouth set
Set connecting portion.Only when the either side of supply mouth and outlet mouth is provided with connecting portion, in the inside of process chamber
In, discharge space formation unit is preferably arranged close to the oral area of connecting portion (in particular, supply mouth or outlet
Portion) it configures.
In addition, fluid processing with device be also possible to the inside of process chamber configure multiple discharge spaces form units and
At.
As long as long strip electrode is formed the inside of pipe in discharge space and is prolonged with the tube axial direction for forming pipe along the discharge space
The mode stretched configures, then can have arbitrary shape.As the concrete example of long strip electrode, in addition to the metal bar construction by Fig. 2
Other than stick electrode, as shown in figure 4, the coiled type electrode etc. that metal wire rod is formed with coiled type winding can be enumerated.
Herein, the case where being made of to long strip electrode coiled type electrode using Fig. 4 is illustrated.
Fig. 4 is to form pipe with discharge space to show its for constituting the long strip electrode of fluid processing device of the invention together
The explanatory diagram of his example.
The discharge space of Fig. 4 forms unit 40 in addition to long strip electrode is made of coiled type electrode 42 and support portion 46
Other than shape is different, there is structure identical with the discharge space of Fig. 2 formation unit 20.Unit 40 is formed in the discharge space
In, discharge space forms pipe 21, metal foil 27, outside lead stick 28 and getter 33, is formed with the discharge space for constituting Fig. 2
It is identical that the discharge space of unit 20 forms pipe 21, metal foil 27, outside lead stick 28 and getter 33.
It is formed in unit 40 in discharge space, long strip electrode is formed by such as tungsten wire material or molybdenum wire material with coiled type winding
Coiled type electrode (hereinafter also referred to as " coil case ".) 42 compositions.
The central axis that the coil case 42 is configured as being formed pipe 21 along the discharge space extends, so that in discharge space shape
At the inside of pipe 21, coil case 42 is located at the central axis (line that discharge space forms the central axis (pipe axis) of pipe 21, i.e. coil case 42
Enclose axis) central axis (pipe axis) of pipe 21 is formed unanimously with discharge space.
Also, in coil case 42, it is connected in one end (right end in Fig. 4) of the coil case 42 and is made of molybdenum or tungsten
Prolong to the sealing 21A that discharge space forms pipe 21 one end (right end in Fig. 4) of inner lead stick 44, the inner lead stick 44
It stretches, is connect with the metal foil 27 being embedded in sealing 21A.Herein, the coil case for constituting long strip electrode can not also pass through
Inner lead stick and directly connect with metal foil.In addition, being connected with one end (right end in Fig. 4) in metal foil 27 from sealing
The outside lead stick 28 that 21A is prominent outward and extends.
In addition, support portion 46 is by the other end (left end in Fig. 4) continuous ring with the coil case 42 for constituting long strip electrode
Shape portion 46A and coiled type portion 46B is constituted, and is integrally continuously disposed in the other end of coil case 42.The support portion 46 is configured
To become contact or forming the state of the inner surface of pipe 21 close to discharge space.That is, the annulus 46A of support portion 46 is configured to,
It is opposite with the fluid processed of inside (fluid circulation space) of process chamber as the tube wall for forming pipe 21 across discharge space
State.The support portion 46 has the positioning for the desired allocation position being maintained at long strip electrode (coil case 42) in discharge space
Function is kept, and also plays function as auxiliary electrode (when electric discharge starting) when fluid processing uses the driving of device to start
Energy.
In addition, getter can be set in the inside that discharge space forms pipe as shown in Figure 1, Figure 2 and shown in Fig. 4, it can also be with
It is not provided with getter.In addition, support portion can be set as shown in Figure 1, Figure 2 and shown in Fig. 4, it can also be not provided with support portion, still
In the small situation of the diameter of long strip electrode or especially long situation is inferior, is preferably provided with support portion.
[embodiment]
(embodiment 1)
According to Fig. 1, fluid processing has been made in order to carry out decomposition (TOC decomposition) processing comprising organic matter in water
With device (hereinafter also referred to as " liquid handling device (1) ".).
Made liquid handling has following specifications with device (1).
Discharge space forms the length of illumination of unit (20): 150mm
Discharge space forms pipe (21)；Material: quartz glass, outer diameter: 16mm, internal diameter: 14mm
Constitute the metal bar (25) of long strip electrode；Material: molybdenum, outer diameter: 0.8mm
Discharge gas；Type: xenon (Xe) encloses pressure: 40kPa
The overall length of process chamber (S): 200mm
Process chamber forms pipe (11)；Material: quartz glass, internal diameter: 21mm, thickness: about 2mm
Cap member (16A, 16B)；Material: polytetrafluoroethylene (PTFE)
Driving power (19)；Type: high-frequency ac power, voltage (peak-to-peak value): 3000V
It imports and uses conduit (13)；The material of glass portion (13A, 13C): quartz glass, the material of conductive part (13B) inner peripheral surface
Matter: gold-platinum alloy (plated film)
Conduit (14) are used in export；The material of glass portion (14A, 14C): quartz glass, the material of conductive part (14B) inner peripheral surface
Matter: gold-platinum alloy (plated film)
For liquid handling with device (1), become when from supply mouth with the flow of the fluid processed in process chamber (S)
The supply conditions of 2L/h form list from discharge space when supplying the tap water that conductivity is 40 μ S/cm and TOC concentration is 50ppb
First (20) radiating light, the illumination are mapped to the tap water in the internal flow of process chamber (S).Illumination is mapped to process chamber (S) as a result,
Inside is when the TOC concentration of the tap water to the outside for dischargeing process chamber (S) by outlet mouth has carried out measurement
25ppb。
In addition, being 2000V when having carried out measurement to starting voltage.
In addition, discharge space, which forms unit (20), becomes radiating light when the supply for starting the tap water from supply mouth
State after, when having ceased the supply of the tap water from supply mouth, from process chamber (S) be discharged all tap water it
Unit (20) radiating light is not formed from discharge space afterwards.
(embodiment 2)
Remaining all identical liquid handling other than making the export in embodiment 1 not have conductive part with conduit is made
With device (hereinafter also referred to as " liquid handling device (2) ".).
For liquid handling with device (2), when similarly to Example 1 from supply mouth with processed in process chamber (S)
The flow of fluid becomes the supply conditions of 2L/h, when supplying the tap water that conductivity is 40 μ S/cm and TOC concentration is 50ppb, from
Discharge space forms unit (20) radiating light, which is irradiated to the tap water in the internal flow of process chamber (S).Thus illumination
Be mapped to the inside of process chamber (S), when the tap water to the outside for dischargeing process chamber (S) via outlet mouth TOC concentration into
Gone measurement when for 25ppb.
In addition, being 2100V when having carried out measurement to starting voltage.
In addition, discharge space, which forms unit (20), becomes radiating light when the supply for starting the tap water from supply mouth
State after, when having ceased the supply of the tap water from supply mouth, from process chamber (S) be discharged all tap water it
Unit (20) radiating light is not formed from discharge space afterwards.
From the result of above embodiment 1 and embodiment 2 it has been confirmed that fluid processing device according to the present invention, energy
It is enough that photo-irradiation treatment is carried out to fluid processed, and exist in the inside of process chamber and form the state that pipe contacts with discharge space
Fluid processed when radiating light, the inside of process chamber is there is no fluid processed and without will not radiating light when being handled.
In addition, being arranged by the both sides in supply mouth and outlet mouth for being fluidly connected to driving power for processed
Connecting portion, so as to drop low start voltage, thus, it is possible to obtain outstanding electric discharge startability.
Label declaration
Device is used in the processing of 10 fluids
11 process chambers form pipe
12A fluid introducing port processed
12B fluid export mouth processed
Conduit is used in 13 importings
13A, 13C glass portion
13B conductive part
Conduit is used in 14 export
14A, 14C glass portion
14B conductive part
16A, 16B cap member
17 recess portions
18A, 18B O ring
19 driving powers
20 discharge spaces form unit
21 discharge spaces form pipe
21A sealing
25 metal bars
27 metal foils
28 outside lead sticks
29 connecting components
31 support portions
31A annulus
31B straight part
33 getters
38,39 connecting component
40 discharge spaces form unit
42 coiled type electrodes (coil case)
44 inner lead sticks
46 support portions
46A annulus
46B coiled type portion
S process chamber.
Claims (4)
1. a kind of fluid processing device, comprising:
Process chamber handles conductive fluid processed；
The discharge space of strip forms pipe, is made of dielectric substance, is sealed with discharge gas, and with in the process chamber
The mode of the fluid processed contact of interior flowing is arranged；
Long strip electrode, the tube axial direction to form pipe along the discharge space configure in a manner of extending in the discharge space shape
At the inside of pipe；And
Driving power is powered, and the power supply is for forming the inside of pipe in the discharge space, via the discharge space
The tube wall in the region that the fluid processed formed in pipe is contacted, makes to generate between the long strip electrode and the fluid processed and put
Electricity,
The fluid processing device is characterized in that,
One terminal of the driving power is electrically connected with the long strip electrode,
Another terminal and fluid processed of the driving power are electrically connected so that the fluid processed becomes earthing potential shape
State,
The supply mouth for supplying fluid processed is provided in the process chamber；And the quilt that discharge is handled in the chamber
The outlet mouth for the treatment of fluid,
At least one party in the supply mouth and the outlet mouth is provided with for making fluid processed and the driving
The connecting portion of another terminal electrical connection of power supply.
2. fluid processing device according to claim 1, which is characterized in that
The both sides of the supply mouth and the outlet mouth are provided with the connecting portion.
3. fluid processing device according to claim 1 or 2, which is characterized in that
The connecting portion is made up of at least one of the group being made of gold, platinum and their alloy.
4. fluid processing device according to claim 2, which is characterized in that
The conductivity of the fluid processed is 40 μ S/cm or more.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015102689A JP6432442B2 (en) | 2015-05-20 | 2015-05-20 | Fluid processing equipment |
| JP2015-102689 | 2015-05-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106169412A CN106169412A (en) | 2016-11-30 |
| CN106169412B true CN106169412B (en) | 2019-07-09 |
Family
ID=57358996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610333470.9A Expired - Fee Related CN106169412B (en) | 2015-05-20 | 2016-05-19 | Device is used in fluid processing |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP6432442B2 (en) |
| CN (1) | CN106169412B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5194740A (en) * | 1991-04-15 | 1993-03-16 | Asea Brown Boveri Ltd. | Irradiation device |
| US5834784A (en) * | 1997-05-02 | 1998-11-10 | Triton Thalassic Technologies, Inc. | Lamp for generating high power ultraviolet radiation |
| WO2011080679A2 (en) * | 2010-01-04 | 2011-07-07 | Koninklijke Philips Electronics N.V. | Dielectric barrier discharge lamp |
| CN103025665A (en) * | 2010-07-26 | 2013-04-03 | 皇家飞利浦电子股份有限公司 | Device for subjecting a fluid to a disinfecting treatment by exposing the fluid to ultraviolet light |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2820368B2 (en) * | 1994-03-31 | 1998-11-05 | エナジーサポート株式会社 | Heat sterilization unit in hot water circulation treatment equipment |
| WO1999062104A1 (en) * | 1998-05-26 | 1999-12-02 | Triton Thalassic Technologies, Inc. | Lamp for generating high power ultraviolet radiation |
| WO2006116828A1 (en) * | 2005-04-29 | 2006-11-09 | Vlaamse Instelling Voor Technologisch Onderzoek | Apparatus and method for purification and disinfection of liquid, solid or gaseous substances |
| JP5445966B2 (en) * | 2010-06-30 | 2014-03-19 | 国立大学法人名古屋大学 | Water treatment method and water treatment apparatus |
| JP2013118072A (en) * | 2011-12-02 | 2013-06-13 | Ushio Inc | Ultraviolet discharge lamp |
-
2015
- 2015-05-20 JP JP2015102689A patent/JP6432442B2/en not_active Expired - Fee Related
-
2016
- 2016-05-19 CN CN201610333470.9A patent/CN106169412B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5194740A (en) * | 1991-04-15 | 1993-03-16 | Asea Brown Boveri Ltd. | Irradiation device |
| US5834784A (en) * | 1997-05-02 | 1998-11-10 | Triton Thalassic Technologies, Inc. | Lamp for generating high power ultraviolet radiation |
| WO2011080679A2 (en) * | 2010-01-04 | 2011-07-07 | Koninklijke Philips Electronics N.V. | Dielectric barrier discharge lamp |
| CN103025665A (en) * | 2010-07-26 | 2013-04-03 | 皇家飞利浦电子股份有限公司 | Device for subjecting a fluid to a disinfecting treatment by exposing the fluid to ultraviolet light |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106169412A (en) | 2016-11-30 |
| JP6432442B2 (en) | 2018-12-05 |
| JP2016215119A (en) | 2016-12-22 |
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Granted publication date: 20190709 Termination date: 20210519 |