CN106141895B - A kind of gravity pressurization polisher lapper integrated with automation pressurization - Google Patents

A kind of gravity pressurization polisher lapper integrated with automation pressurization Download PDF

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Publication number
CN106141895B
CN106141895B CN201610571274.5A CN201610571274A CN106141895B CN 106141895 B CN106141895 B CN 106141895B CN 201610571274 A CN201610571274 A CN 201610571274A CN 106141895 B CN106141895 B CN 106141895B
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China
Prior art keywords
pressurization
fixed
motor
grinding
polishing
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CN201610571274.5A
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Chinese (zh)
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CN106141895A (en
Inventor
张学斌
赵闯
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SHENYANG KEJING AUTOMATIC EQUIPMENT CO Ltd
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SHENYANG KEJING AUTOMATIC EQUIPMENT CO Ltd
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/005Control means for lapping machines or devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/27Work carriers
    • B24B37/30Work carriers for single side lapping of plane surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/34Accessories
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B51/00Arrangements for automatic control of a series of individual steps in grinding a workpiece

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Abstract

A kind of gravity pressurization polisher lapper integrated with automation pressurization, is related to a kind of polisher lapper, the polishing machine includes pressure grinding and polishing head, base body, and pressure grinding and polishing head passes through column(22)It is connected with base body, pressure grinding and polishing head includes spindle drive on backing board, pressurization transmission mechanism, sample fixed mechanism, top fixed seat(8);Base body includes bottom plate(26), lower main axis transmission mechanism, swing mechanism;Backing board(1)It is the matrix of whole pressure grinding and polishing head, other parts are each attached to above;Power motor(2)Power pack is fixed on described backing board(1)On, wire harness is connected with PLC;Power motor(2)Pass through power motor fixed plate(3)Installed in backing board(1)On, motor output end driving bevel gear(4)With driven bevel pinion(5)Into 90 jiaos of engagements, present device is applied to metal material, inorganic non-metallic material, high-molecular organic material, the grinding and polishing of composite.

Description

A kind of gravity pressurization polisher lapper integrated with automation pressurization
Technical field
The present invention relates to a kind of polisher lapper, is ground more particularly to a kind of pressurization of gravity with what automation pressurization integrated Grinding and polishing ray machine.
Background technology
In terms of polisher lapper is mainly used in investigation of materials processing and material processing, but different materials have it is different Characteristic, the requirement when it is ground polishing to pressure are also not quite similar.Thus existing polisher lapper or for certain The grinding and polishing of one material sample uses, such as silicon carbide wafer polisher lapper, optical mirror slip polishing machine;Or for a certain The grinding and polishing of classification material sample uses, such as metallographic specimen polisher lapper, ceramic grinding polishing machine.Except scope of application mistake Outside single, the shortcomings that sample mainly can not be controlled accurately using hand-held grinding and polishing, grinding and polishing pressure also be present, from And cause that grinding and polishing face type is uneven, grinding and polishing is less efficient, yield rate is not high, while certain operational hazards be present Property.Therefore, it is necessary to a kind of pressure grinding throwing that can be suitably used for multiple types material grinding and polishing and grinding and polishing pressure controllable precise Ray machine.
The content of the invention
It is an object of the invention to provide the polisher lapper that a kind of pressurization of gravity is integrated with automation pressurization, the present invention Controlled using PLC, it is quick with reference to touch display screen safe operation, and accurate, moulding pressure controllable precise is controlled, the grinding and polishing time, Grinding and polishing disk revolution, sample tray revolution and its direction of rotation can adjust, and grinding and polishing disk revolution uses increment type regulative mode, be integrated with weight Power is pressurizeed and automation pressurization two ways, suitable for metal material, inorganic non-metallic material, high-molecular organic material, multiple The grinding and polishing of condensation material.
The purpose of the present invention is achieved through the following technical solutions:
A kind of gravity pressurization polisher lapper integrated with automation pressurization, the polishing machine include pressure grinding and polishing head, Base body, pressure grinding and polishing head are connected by column and base body, and pressure grinding and polishing head includes spindle drive on backing board Mechanism, pressurization transmission mechanism, sample fixed mechanism, top fixed seat;Base body includes bottom plate, lower main axis transmission mechanism, pendulum Motivation structure;Backing board is the matrix of whole pressure grinding and polishing head, and other parts are each attached to above;Power motor power pack is fixed On described backing board, wire harness is connected with PLC;Power motor is arranged on backing board by power motor fixed plate On, motor output end driving bevel gear is engaged with driven bevel pinion into 90 jiaos, and driven bevel pinion is fixed with female splined shaft, outer flower Inside female splined shaft, female splined shaft is fixed on backing board key axle sleeve by spindle drum;Motor output end connection pressurize actively Roller gear, active roller gear are engaged with driven cylindrical gear, and driven cylindrical gear is connected with screw mandrel, and screw mandrel is with being fixed on shifting Screw on dynamic seat is engaged to form pair in rotary moving, and guide pillar welds together with Mobile base, and guide pillar is with being arranged on positioning riser On the contact of microswitch sensing chip, pressure sensor on sensor fixation plate pushes away with driven cylindrical gear top The pressure of power bearing touch sensing pressurization;Male splined shaft bottom is connected with rapid fixture, and sample tray passes through neck and rapid card Tool is fixed;Spindle motor output end is connected with electrical machine belt pulley, and electrical machine belt pulley is connected by triangular belt I with speed change body belt wheel I, speed change Body belt wheel II is connected by triangular belt II with the belt wheel III on revolving body, and pallet is fixed on the upper end of revolving body, grinding and polishing Disk is linked together by alignment pin and pallet;Motor is fixed with motor cabinet, motor output end setting-up eccentricity wheel, eccentric wheel Side and the swing rod side linear contact being fixed on arm shaft, arm shaft are arranged on swing arm support by bearing, swing arm machine Seat is fixed with housing, and lock sleeve is fixed on arm shaft, and support I and support II are arranged on lock sleeve, and roller is fixed on support I With the front end of support II, it is tangent with roller to repair disk ring lateral wall, and gravity sample tray is placed in repairing disk ring, lower surface and grinding and polishing disk Contact, the power pack and control board of motor are fixed on bottom plate, are connected by wire harness with PLC.
A kind of described gravity pressurization polisher lapper integrated with automation pressurization, the upper spindle drive bag Include power motor, driving bevel gear, driven bevel pinion, female splined shaft, male splined shaft, spindle drum.
A kind of described gravity pressurization polisher lapper integrated with automation pressurization, the pressurization transmission mechanism include Pressurization motor, active roller gear, driven Cylinder Gear, screw mandrel, Mobile base, screw, guide pillar, positioning riser, microswitch, biography Sensor fixed plate, pressure sensor.
A kind of described gravity pressurization polisher lapper integrated with automation pressurization, the sample fixed mechanism include Rapid fixture, sample tray.
A kind of described gravity pressurization polisher lapper integrated with automation pressurization, the lower main axis transmission mechanism bag Include spindle motor, electrical machine belt pulley, triangular belt I, speed change body belt wheel I, speed change body belt wheel II, triangular belt II, belt wheel III, revolving body, Pallet, grinding and polishing disk, alignment pin.
A kind of described gravity pressurization polisher lapper integrated with automation pressurization, the swing mechanism include driving Motor, motor cabinet, eccentric wheel, arm shaft, swing rod, bearing, swing arm support, housing, lock sleeve, support I, support II, roller, repair Disk ring, gravity sample tray.
Advantages of the present invention is with effect:
The grinding that the present invention is applied to metal material, inorganic non-metallic material, high-molecular organic material, composite is thrown Light;It is integrated with gravity pressurization and automation pressurization two ways;Controlled using PLC, be fast with reference to touch display screen, safe operation Victory, and control accurate;Controllable precise in automation moulding pressure certain limit;Grinding and polishing time, grinding and polishing disk revolution, sample tray turn The settable regulation of number and its direction of rotation;Grinding and polishing disk revolution uses increment type regulative mode, and sample tray revolution uses step-less adjustment Mode.
Brief description of the drawings
Fig. 1 is spindle drive schematic diagram on pressure grinding and polishing head of the present invention;
Fig. 2 is pressure grinding and polishing head pressing mechanism schematic diagram of the present invention;
Fig. 3 is base housing construction schematic diagram of the present invention;
Fig. 4 is oscillating arm mechanisms schematic diagram of the present invention.
Embodiment
The present invention is described in detail for illustrated embodiment below in conjunction with the accompanying drawings.
As illustrated, the polisher lapper that a kind of gravity pressurization of the present invention and automation pressurization integrate includes:Upper main shaft Transmission mechanism:Power motor 2 by power motor fixed plate 3 be arranged on backing board 1 on, motor output end driving bevel gear 4 with Driven bevel pinion 5 is fixed into 90 jiaos of engagements, driven bevel pinion 5 with female splined shaft 6, and male splined shaft 7 is enclosed on inside female splined shaft 6, Female splined shaft 6 is fixed on backing board 1 by spindle drum 8.
Pressurize transmission mechanism:The output end of motor 9 of pressurizeing connection active roller gear 10, active roller gear 10 and driven circle Stud wheel 11 is engaged, and driven cylindrical gear 11 is connected with screw mandrel 12, and screw mandrel 12 matches with the screw 14 being fixed on Mobile base 13 Conjunction forms pair in rotary moving, and guide pillar 15 welds together with Mobile base 13, guide pillar 15 and the fine motion on positioning riser 16 The touching of 17 sensing chips is switched, so as to realize the positioning up and down of the movement of male splined shaft 7, the pressure on sensor fixation plate 18 The pressure that sensor 19 and the contact induction of thrust bearing 20 on the top of driven cylindrical gear 11 pressurize.
Sample fixed mechanism:The lower end of male splined shaft 7 is connected with rapid fixture 24, and sample tray 25 passes through neck and rapid fixture 24 fix.
Top fixed seat 21, pressure grinding and polishing head are connected by fixed seat 21 and the column 22 on base body.
Lower main axis transmission mechanism:The output end of spindle motor 27 is connected with electrical machine belt pulley 28, and electrical machine belt pulley 28 passes through triangular belt I 29 are connected with speed change body belt wheel I30, and speed change body belt wheel II 31 passes through triangular belt II 32 and the belt wheel III on revolving body 34 33 connections, pallet 35 are fixed on the upper end of revolving body 34, and grinding and polishing disk 36 is linked together by alignment pin 37 and pallet 35.
Swing mechanism:Motor 38 is fixed with motor cabinet 39, motor output end setting-up eccentricity wheel 40, eccentric wheel side with The side linear contact of swing rod 42 being fixed on arm shaft 41, arm shaft 41 are arranged on swing arm support 44 by bearing 43, pendulum Arm support 44 is fixed with housing 23, and lock sleeve 45 is fixed on arm shaft 41, and support I46 and support II47 are arranged on lock sleeve 45 On, roller 48 is fixed on support I46 and support II47 front end, repaiies the lateral wall of disk ring 49 and roller 48 is tangent, gravity sample tray 50 place in repairing disk ring 49, and lower surface contacts with grinding and polishing disk 36.
Use process:The sample of polishing to be ground is bonded on gravity sample tray 50 and sample tray 25.Gravity compression molding Under formula, by the corresponding grinding and polishing disk revolution of set-up of control system, swing arm speed, the grinding and polishing of sample then can be carried out.Under Surface is loaded with the repairing disk ring 49 of gravity sample tray 50 of sample with the collective effect of roller 48, being produced with the grinding and polishing disk 36 of rotation Speed difference;Meanwhile support I46 carries out reciprocally swinging, the roller 48 in support front end using the center of arm shaft 41 as oscillation center Under effect, repair disk ring 49 and carry out reciprocally swinging jointly with gravity sample tray 50, so as to realize the grinding and polishing of sample.Grinding and polishing During, the pressure that sample is subject to is uniformly constant, and in grinding and polishing disk radial reciprocating-oscillation, it is ensured that the uniformity of grinding and polishing And efficiency.
Under automation pattern of pressure, turned by set-up of control system corresponding grinding and polishing time, grinding and polishing disk revolution, sample tray Number and its direction of rotation, Self-pressurizing agri pressure, it then can carry out the grinding and polishing of sample.Power motor 2 passes through active umbrella tooth 90 jiaos of engagement of wheel 4 and driven bevel pinion 5, rotates female splined shaft 6, so as to realize the load sample being fixed on male splined shaft 7 The rotation of disk 25;Meanwhile engagement of the motor 9 by active roller gear 10 and driven cylindrical gear 11 of pressurizeing, revolve screw mandrel 12 Turn, then the screw 14 being fixed on Mobile base 13 is moved down, and the sample on sample tray 25 is pressurizeed so as to realize, and driven circle The thrust bearing 20 on the top of stud wheel 11 contacts with pressure sensor 19, so as to accurately control Self-pressurizing agri pressure.Because load sample Speed difference be present between disk and grinding and polishing disk, so as to realize the grinding and polishing of sample.During grinding and polishing, the pressure that sample is subject to is equal It is even constant, it is ensured that the uniformity and efficiency of grinding and polishing.

Claims (6)

1. a kind of gravity pressurization polisher lapper integrated with automation pressurization, it is characterised in that the polishing machine includes pressure Power grinding and polishing head, base body, pressure grinding and polishing head pass through column(22)It is connected with base body, pressure grinding and polishing head includes collet Spindle drive, pressurization transmission mechanism, sample fixed mechanism, top fixed seat on plate(8);Base body includes bottom plate (26), lower main axis transmission mechanism, swing mechanism;Backing board(1)It is the matrix of whole pressure grinding and polishing head, other parts are fixed Above;Power motor(2)Power pack is fixed on described backing board(1)On, wire harness is connected with PLC;Power motor (2)Pass through power motor fixed plate(3)Installed in backing board(1)On, motor output end driving bevel gear(4)With driven bevel pinion (5)Into 90 jiaos of engagements, driven bevel pinion(5)With female splined shaft(6)It is fixed, male splined shaft(7)It is enclosed on female splined shaft(6)Inside, Female splined shaft(6)Pass through spindle drum(8)It is fixed on backing board(1)On;Pressurize motor(9)Output end connects active roller gear (10), active roller gear(10)With driven cylindrical gear(11)Engagement, driven cylindrical gear(11)With screw mandrel(12)Connection, silk Bar(12)With being fixed on Mobile base(13)On screw(14)It is engaged to form pair in rotary moving, guide pillar(15)With Mobile base(13) Weld together, guide pillar(15)With installed in positioning riser(16)On microswitch(17)Sensing chip contacts, installed in sensing Device fixed plate(18)On pressure sensor(19)With driven cylindrical gear(11)The thrust bearing on top(20)Contact induction adds The pressure of pressure;Male splined shaft(7)Bottom and rapid fixture(24)Connection, sample tray(25)Pass through neck and rapid fixture(24) It is fixed;Spindle motor(27)Output end and electrical machine belt pulley(28)Connection, electrical machine belt pulley(28)Pass through triangular belt I(29)With speed change body Belt wheel I(30)Connection, speed change body belt wheel II(31)Pass through triangular belt II(32)With installed in revolving body(34)On belt wheel III (33)Connection, pallet(35)It is fixed on revolving body(34)Upper end, grinding and polishing disk(36)Pass through alignment pin(37)With pallet(35)Even It is connected together;Motor(38)With motor cabinet(39)It is fixed, motor output end setting-up eccentricity wheel(40), eccentric wheel side is with consolidating It is scheduled on arm shaft(41)On swing rod(42)Side linear contact, arm shaft(41)Pass through bearing(43)Installed in swing arm support (44)On, swing arm support(44)With housing(23)It is fixed, lock sleeve(45)It is fixed on arm shaft(41)On, support I(46)And branch Frame II(47)Installed in lock sleeve(45)On, roller(48)It is fixed on support I(46)With support II(47)Front end, repair disk ring (49)Lateral wall and roller(48)It is tangent, gravity sample tray(50)Place repairing disk ring(49)It is interior, lower surface and grinding and polishing disk(36) Contact, motor(38)Power pack and control board be fixed on bottom plate(36)On, connected by wire harness and PLC Connect.
2. a kind of gravity pressurization according to claim 1 polisher lapper integrated with automation pressurization, its feature exist In the upper spindle drive includes power motor(2), driving bevel gear(4), driven bevel pinion(5), female splined shaft(6)、 Male splined shaft(7), spindle drum(8).
3. a kind of gravity pressurization according to claim 1 polisher lapper integrated with automation pressurization, its feature exist In the pressurization transmission mechanism includes pressurization motor(9), active roller gear(10), driven cylindrical gear(11), screw mandrel (12), Mobile base(13), screw(14), guide pillar(15), positioning riser(16), microswitch(17), sensor fixation plate (18), pressure sensor(19).
4. a kind of gravity pressurization according to claim 1 polisher lapper integrated with automation pressurization, its feature exist In the sample fixed mechanism includes rapid fixture(24), sample tray(25).
5. a kind of gravity pressurization according to claim 1 polisher lapper integrated with automation pressurization, its feature exist In the lower main axis transmission mechanism includes spindle motor(27), electrical machine belt pulley(28), triangular belt I(29), speed change body belt wheel I (30), speed change body belt wheel II(31), triangular belt II(32), belt wheel III(33), revolving body(34), pallet(35), grinding and polishing disk(36)、 Alignment pin(37).
6. a kind of gravity pressurization according to claim 1 polisher lapper integrated with automation pressurization, its feature exist In the swing mechanism includes motor(38), motor cabinet(39), eccentric wheel(40), arm shaft(41), swing rod(42), axle Hold(43), swing arm support(44), housing(23), lock sleeve(45), support I(46), support II(47), roller(48), repair disk ring (49), gravity sample tray(50).
CN201610571274.5A 2016-07-20 2016-07-20 A kind of gravity pressurization polisher lapper integrated with automation pressurization Active CN106141895B (en)

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CN108267353B (en) * 2018-03-31 2024-04-30 张斌 Device for longitudinally polishing material test sample
CN108535070A (en) * 2018-05-10 2018-09-14 江苏大学 A kind of laser boring micropore section and inner wall quality analysis sample preparation device and method

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RU2056267C1 (en) * 1992-01-09 1996-03-20 Предприятие "Станкин" Device for flat finishing
CN2865998Y (en) * 2005-08-19 2007-02-07 北京英讯通光电科技有限公司 Double-oscillating grinder
CN102229093B (en) * 2011-07-01 2013-09-18 中国电子科技集团公司第四十五研究所 Lifting and pressing mechanism applied to wafer polishing equipment
CN103522166B (en) * 2013-07-26 2016-06-22 浙江工业大学 A kind of based on the partially auxobaric cylindrical component Excircle machining method of upper dish
CN205928231U (en) * 2016-07-20 2017-02-08 沈阳科晶自动化设备有限公司 Dead -weight loading and automatic machine pressurization integrated grinding -and -polishing machine

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