CN106128989A - A kind of rewinder of the reviewing that misplaces between silicon chip film magazine - Google Patents
A kind of rewinder of the reviewing that misplaces between silicon chip film magazine Download PDFInfo
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- CN106128989A CN106128989A CN201610716935.9A CN201610716935A CN106128989A CN 106128989 A CN106128989 A CN 106128989A CN 201610716935 A CN201610716935 A CN 201610716935A CN 106128989 A CN106128989 A CN 106128989A
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- film magazine
- reviewing
- silicon chip
- falsework
- passage
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Packaging Frangible Articles (AREA)
- Silicon Compounds (AREA)
- Separation By Low-Temperature Treatments (AREA)
Abstract
A kind of rewinder of the reviewing that misplaces between silicon chip film magazine, including pedestal and falsework, reviewing passage it is provided with on falsework, the both sides of reviewing passage are respectively arranged with left film magazine fixed station and right film magazine lifting platform, respectively two groups of equidistant position actuators II are provided with upper stop piece and lower stop piece above and below reviewing passage, to adjust upper stop piece by two groups of equidistant position actuators II and lower stop piece blocks the position of reviewing passage, and then regulate on right film magazine lifting platform silicon chip in film magazine and allow the serial number range poured on left film magazine fixed station in film magazine by reviewing passage.The silicon chip of arbitrarily ordinal position interior in one film magazine, dislocation can be poured into any ordinal position in another film magazine, solve the risk that manually time of falling silicon chip generation abrades, scratches by the present invention.
Description
Technical field
The present invention relates to monocrystalline silicon piece production field, falling of a kind of reviewing that misplaces between silicon chip film magazine
Sheet device.
Background technology
Monocrystalline silicon buffing sheet is the basic material of IC industry, in monocrystalline silicon buffing sheet and follow-up production process thereof,
Ask silicon wafer polishing face can not produce any scratch, scuffing, even require that the back side can not produce any scratch, scuffing.And in reality
In the production process of border, it is often necessary to by a piece of or a part of silicon chip extracting in a film magazine, put in another film magazine, and take out position
Putting with to put into position inconsistent in the sequence number of film magazine, this is accomplished by manually taking out blocks of for silicon chip in film magazine, more a piece of
Sheet is put in another film magazine.Because in film magazine, silicon chip spacing is close, the spacing of two panels silicon chip is less than 5mm, during manual manipulation silicon chip slightly
Rock, the silicon chip causing just picking and placeing is encountered adjacent silicon chip, produce front or the back side scratches, scratch, make silicon chip scrap.Special
It is not as the increase of silicon chip diameter, increases to 150mm, 200mm or even 300mm from 100mm, silicon chip weight and pick and place stroke and increase
Adding, the risk journey geometry encountering adjacent silicon chip when picking and placeing silicon chip increases again, even if skilled employee, the most unavoidable there will be
Error, results in scratch, scratches and make silicon chip scrap.
Summary of the invention
Easily because encountering adjacent silicon chip and resulting in scratch, scratch and make silicon during for solving prior art picks and places silicon chip
The problem that sheet is scrapped, the invention provides the rewinder of a kind of reviewing that misplaces between silicon chip film magazine, can be by interior in a film magazine
The arbitrarily silicon chip of ordinal position, dislocation is poured any ordinal position in another film magazine into, is solved the manually time of falling silicon chip generation and wipe
Wound, the risk scratched.
The present invention solves that the technical scheme that above-mentioned technical problem is used is: a kind of reviewing that misplaces between silicon chip film magazine
Rewinder, including pedestal and falsework, the middle part of falsework one side is provided with left film magazine fixed station, and left film magazine fixed station
One end away from falsework is connected with the side of pedestal by hinge, so that falsework can rotate relative to pedestal, left
Film magazine fixed station and falsework junction are provided with the fin I of fixing film magazine, corresponding with left film magazine fixed station on plate-like piece
Position offers the reviewing passage that square through hole passes through for silicon chip with formation, and the lateral symmetry of reviewing passage is provided with one equidistantly
Position control is to form one group of equidistant position actuator I, and the sliding block of two equidistant position actuators right with respectively
The both sides of box lifting platform are fixed, and right film magazine lifting platform is provided with the fin II of fixing film magazine, two equidistant position actuators
Upper pushing block is connected with push-pull bar respectively, to be driven the sliding block of equidistant position actuator to slide by push-pull bar, and then adjusts
The position of right film magazine lifting platform；Respectively by two groups of equidistant position actuators above and below reviewing passage on described falsework
II is provided with upper stop piece and lower stop piece, to adjust upper stop piece by two groups of equidistant position actuators II and lower stop piece blocks reviewing and leads to
The position in road, and then regulate on right film magazine lifting platform silicon chip in film magazine and allow to pour left film magazine fixed station upper slice into by reviewing passage
Serial number range in box；
Described equidistant position actuator I and equidistant position actuator II are two symmetrically arranged equidistant position actuator structures
Becoming, equidistant position actuator includes the base plate with strip chute and the regulating block being slidably arranged in chute, at the two of chute
The spacing that sidewall symmetry is provided with between multiple bayonet socket, and adjacent two bayonet sockets is equal to silicon chip film magazine slot pitch, described regulating block bag
Including sliding block, locking spring leaf and the upper pushing block being slidably arranged in chute, wherein, sliding block is a plate-like piece, its both sides
Upper and lower be respectively arranged with between narrow incline and wide incline, and narrow incline and wide incline and form the cunning blocking chute wall
Road, the upper surface of sliding block is provided with the rectangular recess of strip, and the lateral symmetry of rectangular recess is provided with breach, so that being close to square
The locking spring leaf that connected in star inwall is arranged forms two dops protruded from slideway card card inlet after breach；Described
The bottom of upper pushing block arranges the strip card article being positioned at rectangular recess, and the bottom of upper pushing block both sides is set by connecting lateral plate
Being equipped with portion's extending level clamp wherein, horizontal clamp slides and is fastened in slideway, and the lateral symmetry at upper pushing block is provided with
Tapered opening, the two side of tapered opening is the domatic of inclination, and the spacing of two side the most gradually expands, to form appearance
Receive and extrude dop and disengage it from the cavity of bayonet socket.
Described bayonet socket is rectangular channel, and the arc that bottom land is depression.
On described base plate, the both sides of strip chute are also symmetrically arranged with graduation mark.
Described falsework is a plate-like piece, and the upper end of falsework and bottom are respectively arranged with reviewing handrail I and reviewing is held up
Hands II, wherein, reviewing handrail I is arranged along the extended line direction of falsework, and reviewing handrail II is perpendicular to the side of falsework, and with
Right film magazine lifting platform homonymy is arranged.
Described pedestal includes boss and is arranged on the horizonal base plate of boss one side bottom, and the bottom of falsework is provided with level
Plate, and left film magazine fixed station is hinged by hinge away from the side of horizonal base plate with boss away from one end of falsework, so that work
Make frame vertical time, left film magazine fixed station and horizontal plate lay respectively on boss and horizonal base plate.
The both sides of described right film magazine lifting platform are provided with two vertical rods, and fin II is arranged on the top and the bottom of two vertical rods.
In the present invention, left film magazine fixed station, right film magazine lifting platform all by two upper and lower fins I and fin II is placed,
Fixing film magazine, makes the film magazine when falsework tilts be not fall off.
In the present invention, for installing two equidistant position actuators of right film magazine lifting platform, its sliding block has along long part,
To connect the side of fixing right film magazine lifting platform, and upper pushing block is connected to the both sides of same handle, pushes away, pulls handle, can realize
The synchronization lifting of two equidistant position actuator regulating blocks, and then drive the lifting of right film magazine lifting platform.Each equidistant position regulates
The chute upper latch notch spacing of device is silicon chip film magazine slot pitch, by adjusting the length of each equidistant position actuator and being arranged on falsework
On position, the most left film magazine of right film magazine can be made after lifting dislocation, to be film magazine groove accurately relative every time, upper and lower baffle plate can be made every
After secondary movement, the edge of baffle plate keeps off the position in the middle of two adjacent film magazine grooves just.
During actual reviewing, pour in left film magazine as a example by the 20th to 24, lift right film magazine for the 5th to 9 in by right film magazine
Lifting platform so that it is on right film magazine the 5th groove be directed at the left upper left film magazine of film magazine fixed station the 20th groove, then lift overhead gage, will
Left film magazine 24 groove above section is blocked (i.e. correspondence blocks right film magazine the 10th to 25 groove), lifts lower baffle plate, by left film magazine the 20th groove
Hereinafter blocking (i.e. correspondence blocks right film magazine the 1st to 4 groove), then make falsework be tilted to the left, silicon chip will under gravity certainly
Move and slip into left film magazine from right film magazine, complete the work of dislocation reviewing.
Beneficial effect: the present invention, by arranging reviewing passage on falsework, then arranges fixing in reviewing passage side
Left film magazine fixed station, for fixing silicon chip film magazine to be poured into, reviewing passage opposite side arranges liftable right film magazine lifting platform,
And reviewing passage provided above and below can the upper stop piece of up-down adjustment and lower stop piece, by regulation upper stop piece and lower block
Sheet blocks the position of reviewing passage, thus the silicon chip regulated on right film magazine lifting platform in silicon chip film magazine pours a left side into by reviewing passage
In film magazine on film magazine fixed station, because of can by any one for right film magazine groove or the continuous silicon chip in multiple-grooved, pour into left film magazine one groove or
Continuously in multiple-grooved, period is not required to pick and place silicon chip by hands slices, can be prevented effectively from silicon chip and scratch, abrades.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the front view of Fig. 1；
Fig. 3 is the explosive view of Fig. 1；
Fig. 4 is the top view of equidistant position actuator；
Fig. 5 is the structural representation of regulating block in equidistant position actuator；
Fig. 6 is the structural representation of upper pushing block in equidistant position actuator；
Reference: 1, pedestal, 101, boss, 102, horizonal base plate, 2, falsework, 201, upper stop piece, 202, lower stop piece, 203,
Reviewing handrail I, 204, reviewing handrail II, 205, horizontal plate, 3, left film magazine fixed station, 301, fin I, 4, reviewing passage, 401,
Equidistant position actuator I, 402, equidistant position actuator II, 5, right film magazine lifting platform, 501, fin II, 502, push-pull bar,
503, vertical rod, 6, chute, 601, bayonet socket, 602, graduation mark, 7, sliding block, 701, narrow incline, 702, wide incline, 703, slideway,
704, rectangular recess, 8, locking spring leaf, 801, dop, 9, upper pushing block, 901, strip card article, 902, connecting lateral plate, 903,
Horizontal clamp, 904, tapered opening, 905, domatic.
Detailed description of the invention
As it can be seen, the rewinder of a kind of reviewing that misplaces between silicon chip film magazine, including pedestal 1 and falsework 2, falsework
The middle part of 2 one side is provided with left film magazine fixed station 3, and left film magazine fixed station 3 away from one end of falsework 2 by hinge and base
The side of seat 1 connects, so that falsework 2 can rotate relative to pedestal 1, and left film magazine fixed station 3 and falsework 2 junction
Be provided with the fin I 301 of fixing film magazine, position corresponding with left film magazine fixed station 3 on plate-like piece offer square through hole with
Forming the reviewing passage 4 passed through for silicon chip, the lateral symmetry of reviewing passage 4 is provided with an equidistant position actuator to form one
Group equidistant position actuator I 401, and the sliding block of two equidistant position actuators respectively with the both sides of a right film magazine lifting platform 5
Fixing, right film magazine lifting platform 5 is provided with the fin II 501 of fixing film magazine, the upper pushing block of two equidistant position actuators divides
It is not connected with push-pull bar 502, to be driven by push-pull bar 502 sliding block of equidistant position actuator to slide, and then adjusts right
The position of box lifting platform 5；Respectively by two groups of equidistant position actuators above and below reviewing passage 4 on described falsework 2
II 402 are provided with upper stop piece 201 and lower stop piece 202, to adjust upper stop piece 201 He by two groups of equidistant position actuators II 402
Lower stop piece 202 blocks the position of reviewing passage 4, and then regulates on right film magazine lifting platform 5 silicon chip in film magazine and allow to be led to by reviewing
The serial number range on left film magazine fixed station 3 in film magazine is poured in road 4 into；
Described equidistant position actuator I 401 and equidistant position actuator II 402 are two symmetrically arranged equidistant positions and adjust
Joint device is constituted, and equidistant position actuator includes the base plate with strip chute 6 and the regulating block being slidably arranged in chute 6,
The spacing that the two side of chute 6 is symmetrically arranged with between multiple bayonet socket 601, and adjacent two bayonet sockets 601 is equal to silicon chip film magazine groove
Away from, described regulating block includes sliding block 7, locking spring leaf 8 and the upper pushing block 9 being slidably arranged in chute 6, wherein, glides
Block 7 is a plate-like piece, and the upper and lower of its both sides is respectively arranged with narrow incline 701 and wide incline 702, and narrow incline 701 He
Forming the slideway 703 blocking chute 6 sidewall between wide incline 702, the upper surface of sliding block 7 is provided with the rectangular recess of strip
704, the lateral symmetry of rectangular recess 704 is provided with breach, so that being close to the locking spring leaf 8 that rectangular recess 704 inwall is arranged
Two dops 801 protruded from slideway 703 card card inlet 601 are formed after breach；The bottom of described upper pushing block 9 sets
Setting in the strip card article 901 in rectangular recess 704, and the bottom of upper pushing block 9 both sides arranges oriented by connecting lateral plate 902
Extending level clamp 903 in the middle part of it, horizontal clamp 903 slides and is fastened in slideway 703, and the lateral symmetry at upper pushing block 9 sets
Being equipped with tapered opening 904, the two side of tapered opening 904 is domatic 905 tilted, and the spacing of two side is the most gradually
Expand, disengage it from the cavity of bayonet socket 601 to be formed to accommodate and extrude dop 801.
It is more than the basic embodiment of the present invention, can be improved further, optimize and limit on the basis of above:
As, described bayonet socket 601 is rectangular channel, and the arc that bottom land is depression；
And for example, on described base plate, the both sides of strip chute 6 are also symmetrically arranged with graduation mark 602, thus be clearly seen slip away from
From；
For another example, described falsework 2 is a plate-like piece, and the upper end of falsework 2 and bottom are respectively arranged with reviewing handrail I 203 He
Reviewing handrail II 204, wherein, reviewing handrail I 203 is arranged along the extended line direction of falsework 2, and reviewing handrail II 204 is perpendicular to
The side of falsework 2, and arrange with right film magazine lifting platform 5 homonymy, by pulling the two reviewing handrail, falsework 2 can be made to incline
Tiltedly, in making right film magazine, silicon chip relies on gravity to pour left film magazine into；
For another example, described pedestal 1 includes boss 101 and is arranged on the horizonal base plate 102 of boss 101 1 side bottom, the end of falsework 2
Portion is provided with horizontal plate 205, and left film magazine fixed station 3 away from one end of falsework 2 with boss 101 away from horizonal base plate 102
Side is hinged by hinge, and during so that falsework 2 is vertical, left film magazine fixed station 3 and horizontal plate 205 lay respectively at boss 101 He
On horizonal base plate 102；
Finally, the both sides of described right film magazine lifting platform 5 are provided with two vertical rods 504, and fin II 501 is arranged on two vertical rods 504
Top and the bottom.
Technical scheme cited by the present invention and embodiment non-limiting, with the technical scheme cited by the present invention and
Embodiment equivalent or effect same approach are all in the range of the present invention is protected.
Claims (6)
1. the rewinder of the reviewing that misplaces between silicon chip film magazine, it is characterised in that: include pedestal (1) and falsework (2), work
The middle part making frame (2) one side is provided with left film magazine fixed station (3), and left film magazine fixed station (3) is away from one end of falsework (2)
Being connected by the side of hinge with pedestal (1), so that falsework (2) can rotate relative to pedestal (1), left film magazine is fixed
Platform (3) and falsework (2) junction are provided with the fin I (301) of fixing film magazine, with left film magazine fixed station (3) on plate-like piece
Corresponding position offers the reviewing passage (4) that square through hole passes through for silicon chip with formation, and the lateral symmetry of reviewing passage (4) sets
It is equipped with an equidistant position actuator to be formed under one group of equidistant position actuator I (401), and two equidistant position actuators
Slide block both sides with a right film magazine lifting platform (5) respectively are fixed, and right film magazine lifting platform (5) is provided with the fin II of fixing film magazine
(501), the upper pushing block of two equidistant position actuators is connected with push-pull bar (502) respectively, to be driven by push-pull bar (502)
The sliding block of equidistant position actuator slides, and then adjusts the position of right film magazine lifting platform (5)；The upper reviewing of described falsework (2)
Respectively two groups of equidistant position actuators II (402) are provided with upper stop piece (201) and lower stop piece above and below passage (4)
(202), to block reviewing passage by two groups of equidistant position actuators II (402) adjustment upper stop piece (201) and lower stop piece (202)
(4) position, and then regulating silicon chip in the upper film magazine of right film magazine lifting platform (5), to allow to pour left film magazine into by reviewing passage (4) solid
Determine the serial number range in the upper film magazine of platform (3)；
Described equidistant position actuator I (401) and equidistant position actuator II (402) are two symmetrically arranged equidistant positions
Putting actuator to constitute, equidistant position actuator includes the base plate with strip chute (6) and the tune being slidably arranged in chute (6)
Locking nub, is symmetrically arranged with the spacing etc. between multiple bayonet socket (601), and adjacent two bayonet sockets (601) in the two side of chute (6)
In silicon chip film magazine slot pitch, sliding block (7) that described regulating block includes being slidably arranged in chute (6), locking spring leaf (8) and upper
Pushing block (9), wherein, sliding block (7) is a plate-like piece, the upper and lower of its both sides be respectively arranged with narrow incline (701) and
Form, between wide incline (702), and narrow incline (701) and wide incline (702), the slideway (703) blocking chute (6) sidewall, glide
The upper surface of block (7) is provided with the rectangular recess (704) of strip, and the lateral symmetry of rectangular recess (704) is provided with breach, so that
It is close to locking spring leaf (8) that rectangular recess (704) inwall arranges and protrudes from slideway (703) and block through forming two after breach
Dop (801) in card inlet (601)；The bottom of described upper pushing block (9) arranges the Strip-like clip being positioned at rectangular recess (704)
Bar (901), and the bottom of upper pushing block (9) both sides is provided with portion's extending level clamp wherein by connecting lateral plate (902)
(903), horizontal clamp (903) slides and is fastened in slideway (703), and the lateral symmetry at upper pushing block (9) is provided with taper and opens
Mouth (904), the two side of tapered opening (904) is domatic (905) tilted, and the spacing of two side the most gradually expands
Greatly, the cavity of bayonet socket (601) is disengaged it to be formed to accommodate and extrude dop (801).
The rewinder of a kind of reviewing that misplaces between silicon chip film magazine the most according to claim 1, it is characterised in that: described card
Mouth (601) is rectangular channel, and the arc that bottom land is depression.
The rewinder of a kind of reviewing that misplaces between silicon chip film magazine the most according to claim 1, it is characterised in that: the described end
On plate, the both sides of strip chute (6) are also symmetrically arranged with graduation mark (602).
The rewinder of a kind of reviewing that misplaces between silicon chip film magazine the most according to claim 1, it is characterised in that: described work
Making frame (2) is a plate-like piece, and the upper end of falsework (2) and bottom are respectively arranged with reviewing handrail I (203) and reviewing handrail II
(204), wherein, reviewing handrail I (203) is arranged along the extended line direction of falsework (2), and reviewing handrail II (204) is perpendicular to work
Make the side of frame (2), and arrange with right film magazine lifting platform (5) homonymy.
The rewinder of a kind of reviewing that misplaces between silicon chip film magazine the most according to claim 1, it is characterised in that: described base
Seat (1) includes boss (101) and is arranged on the horizonal base plate (102) of boss (101) side bottom, and the bottom of falsework (2) sets
Be equipped with horizontal plate (205), and left film magazine fixed station (3) away from one end of falsework (2) with boss (101) away from horizonal base plate
(102) side is hinged by hinge, and during so that falsework (2) is vertical, left film magazine fixed station (3) and horizontal plate (205) are respectively
It is positioned on boss (101) and horizonal base plate (102).
The rewinder of a kind of reviewing that misplaces between silicon chip film magazine the most according to claim 1, it is characterised in that: the described right side
The both sides of film magazine lifting platform (5) are provided with two vertical rods (503), and fin II (501) is arranged on the upper and lower of two vertical rods (503)
Portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610716935.9A CN106128989B (en) | 2016-08-25 | 2016-08-25 | A rewinding ware that is used for dislocation between silicon chip spool box to rewind |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610716935.9A CN106128989B (en) | 2016-08-25 | 2016-08-25 | A rewinding ware that is used for dislocation between silicon chip spool box to rewind |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106128989A true CN106128989A (en) | 2016-11-16 |
| CN106128989B CN106128989B (en) | 2022-11-11 |
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ID=57274268
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610716935.9A Active CN106128989B (en) | 2016-08-25 | 2016-08-25 | A rewinding ware that is used for dislocation between silicon chip spool box to rewind |
Country Status (1)
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| CN (1) | CN106128989B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106442547A (en) * | 2016-11-22 | 2017-02-22 | 苏州爱彼光电材料有限公司 | Automatic sapphire piece clamping device |
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| CN102969262A (en) * | 2012-12-07 | 2013-03-13 | 上海集成电路研发中心有限公司 | Silicon wafer back-winding device |
| KR20150105696A (en) * | 2014-03-10 | 2015-09-18 | 주식회사 엘지실트론 | Wafer transfer device |
| CN104934504A (en) * | 2015-07-03 | 2015-09-23 | 陈�光 | Silicon wafer rewinding mechanism |
| CN204732385U (en) * | 2015-07-03 | 2015-10-28 | 陈�光 | A kind of silicon chip rewinding device |
| CN204885118U (en) * | 2015-08-14 | 2015-12-16 | 麦斯克电子材料有限公司 | A frock for inciting somebody to action silicon chip is forward or reverse reviewing between spool box |
| CN205984928U (en) * | 2016-08-25 | 2017-02-22 | 麦斯克电子材料有限公司 | A rewinder that is used for misplacing between silicon chip spool box and rewinds |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106442547A (en) * | 2016-11-22 | 2017-02-22 | 苏州爱彼光电材料有限公司 | Automatic sapphire piece clamping device |
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