CN106128719A - Transformator and manufacture method thereof - Google Patents
Transformator and manufacture method thereof Download PDFInfo
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- CN106128719A CN106128719A CN201610567285.6A CN201610567285A CN106128719A CN 106128719 A CN106128719 A CN 106128719A CN 201610567285 A CN201610567285 A CN 201610567285A CN 106128719 A CN106128719 A CN 106128719A
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- spiral coil
- spiral
- coil
- transformator
- winding
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/32—Insulating of coils, windings, or parts thereof
- H01F27/324—Insulation between coil and core, between different winding sections, around the coil; Other insulation structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/12—Insulating of windings
- H01F41/125—Other insulating structures; Insulating between coil and core, between different winding sections, around the coil
Abstract
Transformator and manufacture method thereof that the present invention provides include the first spiral coil, the second spiral coil, substrate and insulation division.The surface of substrate can offer spiral groove, and the first spiral coil can be positioned in spiral groove, and the second spiral coil can be arranged in insulation division.It is filled with insulant between first spiral coil and the second spiral coil.Owing to the first spiral coil is positioned in spiral groove, therefore the degree of depth of spiral groove can be deepened thus increase the sectional area of the first spiral coil, thus reduce resistance.Compared with existing transformator, it is possible to reduce the power attenuation of electric current bigger side winding in transformator, and the problem that the resistance of the number of turns and coil improving existing transformator is difficult to take into account.
Description
Technical field
The present invention relates to electrical equipment field, in particular to a kind of transformator and manufacture method thereof.
Background technology
At present, the application that miniature transformer carries out signal transmission under the conditions of isolation is increasingly wider, but uses miniature change
Depressor carries out power transmission still significant technical difficulty.
The main winding of existing miniature transformer and auxiliary winding coil are usually located at the surface of substrate, two-layer coil by
Insulant realizes electric isolution.Needing the electric current flowing through coil relatively big in power transmission process, prior art is typically by increasing
Add the mode of coil width to reduce the resistance of coil.But for same chip area, increasing coil width can be able to not keep away
The number of turns reducing coil exempted from and inductance value.Therefore, it is difficult to accomplish taking into account of the number of turns of coil and the resistance of coil.Prior
It is that, in most Switching Power Supplies, the main winding flowing through transformator is different with the size of current of auxiliary winding.Such as at common full-bridge
Or in push-pull circuit, owing to there is magnetizing current, the electric current of main limit winding is significantly higher than vice-side winding.Prior art is difficult
With the actual distribution condition according to electric current, main winding and auxiliary winding is carried out independent optimization.
Summary of the invention
In view of this, the invention provides a kind of transformator and manufacture method thereof, compared with existing transformator, it is possible to change
The kind number of turns of existing coil and the resistance of coil are difficult to the problem taken into account, simultaneously can be to the resistance of the winding of big electric current side
Carry out independent optimization.
For achieving the above object, the present invention provides following technical scheme:
A kind of transformator, including substrate, insulation division, the first winding and the second winding, the end of described first winding with
And second the end of winding be all connected with external circuit, it is recessed that the first surface of described substrate offers at least one spiral type
Groove, described first winding includes at least one first spiral coil, and the quantity of at least one spiral groove described is with described
The quantity of at least one the first spiral coil is identical, at least one first spiral coil described and at least one spiral described
Connected in star matches, and the first spiral coil is correspondingly arranged in described spiral groove, and described second winding includes at least one
Individual second spiral coil, at least one second spiral coil described may be contained within described insulation division, described first winding
And being filled with insulant between described second winding, described insulation division is positioned at the first surface of described substrate.
Preferably, in above-mentioned transformator, described it is provided with between at least one the first spiral coil and described substrate
Insulating barrier.
This insulating barrier can be silicon oxide, specifically can prepare by the way of thermal oxide or deposition.This insulating barrier is also
Can be aluminium oxide, can be prepared by modes such as depositions.This insulating barrier can be for silicon nitride, can be by modes such as depositions
Preparation.
Preferably, in above-mentioned transformator, described first winding also includes the first path and alternate path, described first
Path and alternate path may be contained within described insulation division, one end of described first path and at least one first spiral described
One end of shape coil is connected, and the other end of described first path is connected with described external circuit, one end of described alternate path
It is connected with the other end of at least one the first spiral coil described, the other end of described alternate path and described external circuit
Connect.
First spiral coil can be connected with external circuit by the first path and alternate path.
Concrete, above-mentioned transformator also includes the first bonding region and the second bonding region not covered by insulation division.First leads to
Road can be first coupled to the first bonding region, and external circuit can also be connected to the first bonding region.Alternate path may be coupled to
Two bonding regions, external circuit can also be connected to the second bonding region.I.e. external circuit can pass through the first bonding region and second
Bonding region and the first path and alternate path connect, and then are connected with the first spiral coil.
Optionally, in above-mentioned transformator, described first winding also includes at least one the 3rd spiral coil, described extremely
Few 3rd spiral coil is arranged in described insulation division, and the quantity of at least one the 3rd spiral coil described is with described
The quantity of at least one the first spiral coil is identical, close 3rd crepe cord of at least one the 3rd spiral coil described
The one end at the center of circle and the one end pair at the center near the first spiral coil of at least one the first spiral coil described
Should connect, the one end at the center away from described first spiral coil of at least one the first spiral coil described and described
One end away from the center of described 3rd spiral coil of at least one the 3rd spiral coil is all connected with external circuit.
3rd spiral coil by paracentral one end can with the first spiral coil by paracentral one end phase
Connecting, deep one end of the first spiral coil and deep one end of the 3rd spiral coil can be distinguished
It is connected with external circuit, so that the first spiral coil and the energising of the 3rd spiral coil.
Preferably, in above-mentioned transformator, described insulation division also includes third bond district and fourth bond district, described at least
The one end at the center away from described first spiral coil of one the first spiral coil is connected with described third bond district, institute
State the one end at the center away from described 3rd spiral coil of at least one the 3rd spiral coil and described fourth bond district
Connecting, described third bond district and fourth bond district are all connected with external circuit.
Specifically, deep one end of the first spiral coil can be connected with third bond district, the 3rd spiral
Deep one end of shape coil can be connected with fourth bond district.External circuit can be with third bond district and the 4th
Bonding region is connected, and then is connected with the first spiral coil and the 3rd spiral coil.
Concrete, in above-mentioned transformator, the section of the wire of described first spiral coil and the 3rd spiral coil
The section of wire be rectangle or be approximately rectangle, the thickness of the rectangular section of the wire of described first spiral coil is more than
The thickness of the rectangular section of the wire of the 3rd spiral coil；Preferably, the rectangle of the wire of described first spiral coil cuts open
The width in face is less than or equal to the width of the rectangular section of the wire of the 3rd spiral coil.
Owing to the first spiral coil can be positioned in spiral groove, it is possible to by the square of the first spiral coil
The thickness of shape section is set greater than the thickness of the rectangular section of the 3rd spiral coil.
Owing to the 3rd spiral coil is arranged at the surface of insulating barrier, thickness direction is inconvenient to further expand, therefore permissible
The rectangular section of the 3rd spiral coil is extended to reduce the resistance of the 3rd spiral coil on width.
Concrete, in above-mentioned transformator, the 5th and the 6th key is passed through at the two ends of the second spiral coil that the second winding comprises
Close district to be connected with external circuit.
The embodiment of the present invention additionally provides a kind of manufacture method manufacturing above-mentioned transformator, and this manufacture method includes: at lining
The first surface at the end forms spiral groove by etching；The first insulating barrier is formed on the surface of described spiral groove；With gold
Belong to material and fill described spiral groove；The metal material of described first surface is removed to form the first spiral type by planarization
Coil；Insulation division is formed at described first surface.
Alternatively, in above-mentioned method, form insulation division at described first surface, specifically may include that described first
Surface forms the second insulating barrier, and the position corresponding at the two ends with described spiral groove of described second insulating barrier is respectively
Form the first opening and the second opening；The first separate metal area and the second metal area is formed at described second insulating barrier,
Described first metal area contacts with described first opening, and described second metal area contacts with described second opening；Described
First metal area and the second metal area form the 3rd insulating barrier；Spiral metal level is formed at described 3rd insulating barrier；?
The surface of described spiral metal level forms the 4th insulating barrier, and described 4th insulating barrier with described spiral gold
The position that the two ends of genus layer are corresponding forms the 3rd opening and the 4th opening respectively.
Alternatively, in above-mentioned method, form insulation division at described first surface, specifically may include that described first
Surface forms the second insulating barrier, and forms the 5th in one end of the inner side with described spiral groove of described second insulating barrier
Opening；Spiral helicine the first metal layer, the inner side of described spiral helicine the first metal layer is formed above described second insulating barrier
One end contact with described 5th opening；The 3rd insulating barrier is formed above described the first metal layer；Insulate the described 3rd
Spiral second metal level is formed above Ceng；The 4th insulating barrier is formed above described second metal level, and described
Position corresponding to the two ends with described spiral second metal level of the 4th insulating barrier forms the 6th opening and the 7th respectively and opens
Mouthful.
Transformator and manufacture method thereof that the present invention provides include the first spiral coil, the second spiral coil, substrate
And insulation division.The surface of substrate can offer spiral groove, and the first spiral coil can be positioned over spiral groove
In, the second spiral coil can be arranged at inside insulation division.Fill between first spiral coil and the second spiral coil
There is insulant.Owing to the first spiral coil is positioned in spiral groove, thus can deepen the degree of depth of spiral groove from
And increase the sectional area of the first spiral coil, thus reduce resistance, optimize in Switching Power Supply the bigger side of transformer current around
The power attenuation of group.Compared with existing transformator, also improve the problem that the resistance of the number of turns and coil is difficult to take into account.
Accompanying drawing explanation
For the clearer explanation embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
In having technology to describe, the required accompanying drawing used is briefly described, it should be apparent that, the accompanying drawing in describing below is only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, it is also possible to
Other accompanying drawing is obtained according to these accompanying drawings.
Fig. 1 is the part-structure schematic diagram of the transformator that first embodiment of the invention provides；
Fig. 2 is the part-structure schematic diagram of the transformator that first embodiment of the invention provides；
Fig. 3 is the part-structure schematic diagram of the transformator that second embodiment of the invention provides；
Fig. 4 is the part-structure schematic diagram of the transformator that second embodiment of the invention provides；
Fig. 5 is the part-structure schematic diagram of the transformator that the embodiment of the present invention provides；
Fig. 6 is the part-structure schematic diagram of the transformator that the embodiment of the present invention provides；
Fig. 7 is the application scenarios schematic diagram of the transformator that the embodiment of the present invention provides；
Fig. 8 is the another kind of application scenarios schematic diagram of the transformator that the embodiment of the present invention provides；
Fig. 9 is the flow chart of the manufacture method of the transformator that the embodiment of the present invention provides；
Figure 10 is the flow chart of a kind of method of the manufacture insulation division shown in Fig. 9 that the embodiment of the present invention provides；
Figure 11 is the flow chart of the another kind of method of the manufacture insulation division shown in Fig. 9 that the embodiment of the present invention provides；
Figure 12 a is the oscillogram of the electric current of a kind of possible load-side of the transformator that the embodiment of the present invention provides；
Figure 12 b is the oscillogram of the electric current of a kind of possible mains side of the transformator that the embodiment of the present invention provides；
Figure 12 c is a kind of possible application circuit figure of transformator that the embodiment of the present invention provides；
Figure 12 d is the oscillogram of the voltage of a kind of possible mains side of the transformator of embodiment of the present invention provider；
Figure 13 a to Figure 13 i be a kind of preferred embodiment of the present invention each process flow steps of transformer manufacturing method in point
Do not manufacture the structural representation of each ingredient of described transformator.
Wherein, reference is summarized as follows:
Transformator 100；Substrate 110；Spiral groove 111；Insulating barrier 112；First surface 113；
Insulation division 120；First bonding region 121；Second bonding region 122；Third bond district 123；Fourth bond district 124；The
Five bonding regions 125；6th bonding region 126；
First winding 130；First spiral coil 131；First path 132；Alternate path 133；3rd spiral coil
134；
Second winding 140；Second spiral coil 141；Ground floor coil 521；Second layer coil 522；
External circuit 210；First chip 220；Second chip 230；
First insulating barrier 310；Second insulating barrier 320；First opening 321；Second opening 322；First metal area 330；The
Two metal areas 340；3rd insulating barrier 350；Spiral metal level 360；4th insulating barrier 370；3rd opening 371；4th opens
Mouth 372.
Detailed description of the invention
Below in conjunction with accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Ground describes, it is clear that described embodiment is only a part of embodiment of the present invention rather than whole embodiments.The most right
The detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of claimed invention, but
It is merely representative of the selected embodiment of the present invention.Based on embodiments of the invention, those skilled in the art are not making creativeness
The every other embodiment obtained on the premise of work, broadly falls into the scope of protection of the invention.
First embodiment
Details refer to the transformator 100 that Fig. 1, Fig. 1 show that first embodiment of the invention provides, including substrate 110, absolutely
Edge the 120, first winding 130 and the second winding 140.First winding 130 is arranged at substrate 110 and insulation division 120 is internal, the
Two windings 140 are arranged at the inside of insulation division 120, and substrate 110 is fixing with insulation division 120 to be connected.
The first spiral coil 131 shown in Fig. 1 and the second spiral coil 141 are the profile of coil sections.Fig. 2
The first spiral coil 131 of illustrating and the schematic diagram that the second spiral coil 141 is complete coil.First winding 130 has
Body can include first spiral coil 131 and the first path 132 being connected with this first spiral coil and
Two paths 133, details refer to Fig. 1 and Fig. 2.First path 132 is independent with alternate path 133 phase, this first spiral coil
One end of the inner side (i.e. near center) of 131 is connected with the first path 132, the outside of the first spiral coil 131 (i.e. away from
Center) one end be connected with alternate path 133.
The first surface 113 of substrate 110 can offer a spiral groove 111, the groove of this spiral groove 111
Direction can be vertical with the first surface 113 of substrate 110.First spiral coil 131 is arranged in spiral groove 111, the
Insulating barrier 112 can be provided with between one spiral coil 131 and substrate 110.Insulating barrier 112 be specifically as follows silicon dioxide,
The insulant such as aluminium oxide, silicon nitride.If the resistivity of substrate 110 is sufficiently high, this insulating barrier 112 can not be used.
Second winding 140 specifically can include second spiral coil 141.This second spiral coil 141 is longitudinally
It is stacked in the top of above-mentioned first helical coil 131.Layer of metal can be used to form the second spiral coil, also
Above-mentioned helical coil can be formed by one or more layers metal.Second spiral coil 141 and the first spiral coil 131
Between be filled with insulant.This insulant can be one or more layers silicon dioxide, silicon nitride, aluminium oxide, polyimides,
And benzocyclobutene etc. has the material of high isolation ability.
The inside of insulation division 120 can be provided with second above-mentioned spiral coil the 141, first path 132 and second
Path 133.First path 132 is arranged at the first spiral coil 131 and the second spiral coil 141 with alternate path 133
Between, details refer to Fig. 1.Insulation division 120 can also include the first bonding region 121 and the second bonding region 122, and details please be joined
See Fig. 7.The other end and first bonding region 121 of the first path 132 are connected, the other end of alternate path 133 and the second bonding
District 122 is connected.Second winding is connected with external circuit chip 230 with the 6th bonding region 126 district also by the 5th bonding region 125
Connect.
Wire bonding (Wire Bonding) is to use lametta, utilizes heat, pressure, ultrasonic energy for making metal draw
Line and the tight seam of substrate pads, it is achieved the electric interconnection between chip and substrate and the information mutual communication of chip chamber.In preferable control
Under the conditions of, electronics can be occurred between lead-in wire and substrate to share or the phase counterdiffusion of atom, so that realizing atomic weight between two kinds of metals
Bonding in level.
The effect of wire bonding is to introduce and derive electrical connection, the first above-mentioned bonding region 121, second from core parts
Bonding region 122 just serves the effect that the signal of telecommunication introduces or derives the first spiral coil 131.In addition to wire bonding,
Soldered ball can also be used to be connected with external circuit by bonding region with the mode of flip-chip.
The operation principle of the transformator 100 that first embodiment of the invention provides is:
The first spiral coil 131 that first winding 130 comprises passes through the first path 132 and alternate path 133 with outer
Portion's circuit 210 connects, and details refer to Fig. 7, specifically can be connected to the first chip 220.The second spiral shell that second winding 140 comprises
Rotation shape coil 141 can also be connected with the second chip 230.Owing to the first spiral coil 131 is positioned over spiral groove 111
In, therefore the thickness of the section of the first spiral coil 131 can be consistent with the degree of depth of spiral groove 111, details refer to figure
1, such that it is able to reduce the resistance of the first spiral coil 131.Owing to the first spiral coil 131 is only at the thickness direction of section
Extend, do not extend on the width of rectangular section, therefore the wire circle of the first spiral coil 131 is not affected by impact.Fig. 8
It is the another kind of form that is connected with external circuit of transformator 100, will the electric elements of portion of external circuit and transformator 100
First winding 130 manufactures on the same substrate.And the second winding 140 is still through the 5th bonding region 125 and the 6th bonding region 126
It is connected with external circuit 210.
The thickness of existing spiral coil is typically not greater than 5 microns, and the first spiral shell that first embodiment of the invention provides
The thickness of the rectangular section of rotation shape coil 131 can extend to 10 microns to 300 microns, therefore the electricity of the first spiral coil 131
Resistance resistance can be the sixtieth resistance resistance to existing spiral coil of the resistance of existing spiral coil
/ 2nd of value, advantageously reduce the power attenuation of coil.In Switching Power Supply, the first spiral coil 131 is used to turn on
Bigger electric current (winding current of such as mains side), and it is (the most negative to use the second spiral coil 141 to turn on less electric current
Carry the winding current of side), it is possible to achieve the independent optimization to transformator main winding and auxiliary winding power consumption.
It is appreciated that the first spiral coil 131 and the 3rd spiral coil 134 can be rectangular coil line, it is also possible to
For the helix of the shapes such as oval, hexagon or octagon, it is limitation of the present invention that the shape of coil should not be construed.
Second embodiment
Details refer to the transformator 100 that Fig. 3, Fig. 3 show that second embodiment of the invention provides, the second embodiment and the
The difference of one embodiment is:
First winding 130 of the second embodiment does not includes the first path connecting the first spiral coil 131 interior side port
132, and include the 3rd spiral coil 134.3rd spiral coil 134 is arranged in insulation division 120, and is positioned at the first spiral shell
Between rotation shape coil 131 and the second spiral coil 141.One end of the inner side of the 3rd spiral coil 134 and the first spiral
One end of the inner side of shape coil 131 is connected, and the other end of the 3rd spiral coil 134 is connected with external circuit 210, details
Refer to Fig. 4.Insulation division 120 can also include third bond district 123 and fourth bond district 124, and details refer to Fig. 8.The
The one end in the center of circle away from the first spiral coil 131 of one spiral coil 131 can be connected with third bond district 123,
One end away from the 3rd spiral coil 134 of 3rd spiral coil 134 can be connected with fourth bond district 124, and the
Three bonding regions 123 and fourth bond district 124 can be connected with external circuit 210 respectively, and external circuit 210 herein is permissible
It is to be arranged at the electrical equipment of same chip with transformator 100.
The operation principle of the transformator 100 that second embodiment of the invention provides is: the transformator 100 that the second embodiment provides
It is to utilize the 3rd spiral coil 134 to replace alternate path 133 to be connected with external circuit 210.In i.e. second embodiment, the first spiral shell
Rotation deep one end of shape coil 131 can be connected with the first path 132, and the first spiral coil 131 is by paracentral
One end can be connected by paracentral one end with the 3rd spiral coil 134.The other end of the first path 132 and the 3rd spiral shell
Rotation deep one end of shape coil 134 is connected with external circuit 210 respectively.Owing to the first spiral coil 131 is positioned over
In spiral groove 111, therefore the thickness of the section of the first spiral coil 131 can be consistent with the degree of depth of spiral groove 111,
Details refer to Fig. 3, such that it is able to reduce the resistance of the first spiral coil 131, are suitable for the big electric current side of transformator 100
Winding.Owing to the first spiral coil 131 only extends, not at the width of rectangular section at the thickness direction of rectangular section
Upper extension, therefore the wire circle of the first spiral coil 131 is not affected by impact.Meanwhile, the first spiral coil 131 and the second spiral shell
There is magnetic couplings before rotation shape coil 141, can be used to adjust the inductance value of the first winding 130.Such as, the first crepe cord
Circle 131 from being counter-clockwise helical (vertical view) by paracentral one end to deep one end, and the second spiral coil 141 from
It is clock wise spirals (vertical view) by paracentral one end to deep one end.So first spiral coil 131 and second
The magnetic field that spiral coil 141 produces is the most superimposed, total inductance (Lt) it is the first spiral coil inductance (L1), the second spiral type
Coil inductance (L2), and the first spiral coil and the summation of the second spiral coil mutual inductance (M):
Lt=L1+L2+2*M
And the all-in resistance (R of coilt) it is only two coil resistance (R1、R2) sum:
Rt=R1+R2
So under conditions of coil forward couples (M > 0), using two-layer spiral coil can improve the first winding
Inductive resistance ratio (Lt/Rt)。
The first winding 130 and the second winding 140 described in embodiment 1 and 2 can be formed by organizing spiral coil more.
Such as in Fig. 5, the second winding 140 comprises two-layer spiral coil, ground floor coil 521 and second layer coil 522.
As shown in Figure 6, the quantity of the 131 of the first spiral coil can be two, two the first spiral coils 131
Inner side all can be connected with external circuit by the first path 132, and the outside of two the first spiral coils 131 all can be passed through
Alternate path more than 133 external circuit connects.The quantity of the second spiral coil 141 can also be two.
Should be appreciated that the particular number of the first spiral coil 131 and the second spiral coil 141 should not be construed
It it is limitation of the present invention.
First embodiment uses the first path 132 and alternate path 133 by two ports of the first spiral coil 131 even
Receive the bonding region of the first surface 113 being positioned at substrate 110.Accordingly, the first spiral coil 131 in the second embodiment leans on
Paracentral port is connected to be positioned at the bonding region of the first surface 113 of substrate 110 also by the second spiral coil 141.Cause
This, in the first embodiment and the second embodiment, the bonding region of the first winding 130 all may be located at the first surface of substrate 110
113.In this application, the bonding region of the second winding 140 also is located at the first surface 113 of substrate 110.So, the institute of transformator
Some bonding regions are all located at the same side of substrate 110, it is only necessary to chip carries out wire bonding or flip-chip weldering from one side
Connecing, this technical characterstic advantageously reduces the packaging cost of transformator chip.
Details refer to Fig. 9, Fig. 9 and show the manufacture method of above-mentioned transformator 100, comprise the steps that S11 is to step
S15:
Step S11, the first surface at substrate 110 forms spiral groove 111.
Specifically can be formed for placing the first spiral coil by techniques such as etchings (such as deep reaction ion etching)
The spiral groove 111 of 131, details refer to Figure 13 a.
Step S12, forms the first insulating barrier 310 on the surface of described spiral groove 111.
The techniques such as chemical reaction (such as thermal oxide) or deposition can be passed through and form first on the surface of spiral groove 111
Insulating barrier 310, details refer to Figure 13 b.
Step S13, fills described spiral groove 111 with metal material.
Specifically can be to use after sputtering seed layer in the way of plating filler metal material, details in spiral groove 111
Refer to Figure 13 c.
Step S14, removes the metal material of described first surface 113 to form the first spiral coil by planarization
131。
Planarization refers specifically to be planarized by chemical method and (or) physical method, such as, removed by chemical reagent
The metal material that first surface 113 overflows in addition to filler metal, or by the way of physics polishes, remove first surface 113
Metal material, details refer to Figure 13 d.
Step S15, forms insulation division 120 at described first surface 113.
The inside of insulation division 120 can be provided with second spiral coil the 141, first path 132 and alternate path
133；The second spiral coil 141 and the 3rd spiral coil 134, specifically manufacturing of insulation division 120 can also be provided with
Journey according in insulation division 120 concrete structure determine.
Details refer to Figure 10, Figure 10 and show a kind of manufacture method of insulation division 120, specifically include following steps S201
To step S205:
Step S201, forms the second insulating barrier 320 at described first surface 113, and at described second insulating barrier 320
The position corresponding with the two ends of described spiral groove 111 forms the first opening 321 and the second opening 322 respectively.
Second insulating barrier 320 is formed at first surface 113 with the technique such as spin coating or deposition, the first opening 321 and second
Opening 322 can be formed by the way of etching or photoetching development, and details refer to Figure 13 e.
Step S202, forms the first separate metal area by modes such as deposition of metal, graphical and etchings
330 and second metal area 340, described first metal area 330 contacts with described first opening 321, described second metal area 340
Contact with described second opening 322.
It is appreciated that the first above-mentioned metal area 330 and the second metal area 340 specifically can refer to that the present invention first implements
The first path 132 in example and alternate path 133.
Step S203, forms the 3rd insulating barrier 350 in described first metal area 330 and the second metal area 340.
The 3rd insulating barrier 350 can be formed by the technique such as spin coating or deposition, and by the way of etching or photoetching development
It is graphical, expose bonding region.Details refer to Figure 13 g.
Step S204, forms spiral metal level 360 on described 3rd insulating barrier 350.
Spiral metal level 360 is formed at the 3rd insulating barrier 350 by modes such as deposition of metal, graphical, etchings,
Details refer to Figure 13 h.The second spiral coil that described spiral metal level 360 is specifically as follows in the embodiment of the present invention
141。
Step S205, forms the 4th insulating barrier 370 above described spiral metal level 360, and described the
The position that the two ends with described spiral metal level 360 of four insulating barriers 370 are corresponding forms the 3rd opening 371 and the 4th respectively
Opening 372, as the 5th bonding region 125 and the 6th bonding region 126.
The 4th insulating barrier 370 can be formed by the technique such as spin coating or deposition.The 3rd can be formed by the way of etching
Opening 371 and the 4th opening 372, details refer to Figure 13 i.
Details refer to Figure 11, Figure 11 and show the another kind of manufacture method of insulation division 120, specifically include following steps
S301 is to step S305:
Step S301, forms the second insulating barrier 320 at described first surface 113, and at described second insulating barrier 320
The 5th opening is formed with one end of the inner side of described spiral groove 111.
The generation type of the second insulating barrier 320 and the 5th opening can with the second insulating barrier 320 shown in Figure 10 and
First opening 321 is identical to the generation type of the 4th opening 372, does not repeats at this.5th opening can corresponding and step
The second opening 322 in rapid S201.
Step S302, forms spiral helicine the first metal layer, described spiral helicine first gold medal at described second insulating barrier 320
The one end of the inner side belonging to layer contacts with described 5th opening.
Can form this first metal layer by modes such as deposition of metal, graphical, etchings, this first metal layer is concrete
It can be the 3rd spiral coil 134 in second embodiment of the invention.
Step S303, forms the 3rd insulating barrier 350 at described the first metal layer.
The 3rd insulating barrier 350 can be formed by the technique such as spin coating or deposition.
Step S304, forms spiral second metal level at described 3rd insulating barrier 350.
The second spiral coil 141 that described spiral second metal level is specifically as follows in the embodiment of the present invention.
Step S305, forms the 4th insulating barrier 370 on the surface of described second metal level, and at described 4th insulating barrier
Position corresponding to the two ends with described spiral second metal level of 370 forms the 6th opening and the 7th opening respectively.
The 4th insulating barrier 370 can be formed by the technique such as spin coating or deposition.The 6th can be formed by the way of etching
Opening and the 7th opening.The 6th above-mentioned opening and the 7th opening can correspond to the 3rd opening 371 in step S205
And the 4th opening 372.
Step S301 to step S305 except the first metal area 330 will be formed and the second metal area 340 replaces with formation
Outside spiral helicine the first metal layer, other processing steps are similar to step S205 to step S201, do not repeat at this.
Details refer to the waveform of electric current that Figure 12, Figure 12 a shows the load-side of transformator 100, and Figure 12 b shows change
The waveform of the electric current of the mains side of depressor 100.Figure 12 c shows insulating power supply based on H electrical bridge.At power end, pass through H electrical bridge
It is V by voltageCDC source to be converted into voltage be+VCWith-VCSquare wave as the input voltage vin on the main limit of transformator 100,
Details refer to Figure 12 d.The square-wave voltage that the load end sensing of transformator 100 produces is by all wave rectification being made up of D1-D4
Electric bridge produces DC current I on load RR.Flow through the electric current I of the load-side of transformator 100sIt is at+IRWith-IRBetween side
Ripple, due to need when transformator 100 works the magnetic field of a change to produce induced voltage, therefore the electric current of the mains side of transformator
IpWaveform and IsWaveform different, IpWaveform at IsWaveform on the basis of superposition peak-to-peak value (peak-ideally
to-peak value)IM, IMBe waveform be the magnetizing current of triangular wave.Therefore, the peak value of the electric current of the mains side of transformator 100
Increase to IR+IM/ 2, more than the peak value of the electric current of transformator 100 load-side.
In miniature transformer, owing to device area is little, coil resistance is bigger than the coil resistance of discrete device.Therefore, exist
Transformator flows the power attenuation produced in the coil of super-high-current side and becomes the key factor of transformer efficiency.
The transformator 100 that the embodiment of the present invention provides is compared with existing transformator, it is possible to improve the circle of existing coil
The problem that the resistance of number and coil is difficult to take into account.
For making the purpose of the embodiment of the present invention, technical scheme and advantage clearer, above in conjunction with in the embodiment of the present invention
Accompanying drawing, carried out clearly and completely describing to the technical scheme in the embodiment of the present invention, it is clear that described embodiment is
The a part of embodiment of the present invention rather than whole embodiments.Generally implement with the present invention illustrated described in accompanying drawing herein
The assembly of example can be arranged with various different configurations and design.
Therefore, the detailed description of the above embodiments of the invention to providing in the accompanying drawings is not intended to limit claimed
The scope of the present invention, but be merely representative of the selected embodiment of the present invention.Based on the embodiment in the present invention, this area is common
The every other embodiment that technical staff is obtained under not making creative work premise, broadly falls into the model of present invention protection
Enclose.
It should also be noted that similar label and letter represent similar terms, therefore, the most a certain Xiang Yi in following accompanying drawing
Individual accompanying drawing is defined, then need not it be defined further and explains in accompanying drawing subsequently.
In describing the invention, it should be noted that term " " center ", " on ", D score, "left", "right", " vertically ",
Orientation or the position relationship of the instruction such as " level ", " interior ", " outward " are based on orientation shown in the drawings or position relationship, or should
The orientation usually put during the use of invention product or position relationship, be for only for ease of the description present invention and simplify description, and not
It is to indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and operation, the most not
It is understood that as limitation of the present invention.Describe additionally, term " first ", " second ", " the 3rd " etc. are only used for distinguishing, and can not manage
Solve as instruction or hint relative importance.
In describing the invention, in addition it is also necessary to explanation, unless otherwise clearly defined and limited, term " arrange ",
" install ", " being connected ", " connection " should be interpreted broadly, and connect for example, it may be fixing, it is also possible to be to removably connect, or one
Body ground connects；Can be to be mechanically connected, it is also possible to be electrical connection；Can be to be joined directly together, it is also possible to indirect by intermediary
It is connected, can be the connection of two element internals.For the ordinary skill in the art, can be with in concrete condition understanding
State term concrete meaning in the present invention.
Claims (10)
1. a transformator, it is characterised in that include substrate, insulation division, the first winding and the second winding, described first winding
End and the end of the second winding be all connected with external circuit,
The first surface of described substrate offers at least one spiral groove, and described first winding includes at least one first spiral shell
Rotation shape coil, the quantity of at least one spiral groove described is identical with the quantity of at least one the first spiral coil described,
At least one first spiral coil described matches with at least one spiral groove described, and the first spiral coil correspondence sets
It is placed in described spiral groove,
Described second winding includes that at least one second spiral coil, at least one second spiral coil described may be contained within
In described insulation division, being filled with insulant between described first winding and described second winding, described insulation division is positioned at described
The first surface of substrate.
Transformator the most according to claim 1, it is characterised in that: at least one first spiral coil described and described lining
Insulating barrier it is provided with at the end.
Transformator the most according to claim 1, it is characterised in that: described first winding also includes the first path and second
Path, described first path and alternate path may be contained within described insulation division, one end of described first path with described extremely
One end of few first spiral coil is connected, and the other end of described first path is connected with described external circuit, described
One end of alternate path is connected with the other end of at least one the first spiral coil described, the other end of described alternate path
It is connected with described external circuit.
Transformator the most according to claim 3, it is characterised in that: described insulation division also includes the first bonding region and the second key
Closing district, the other end of described first path is connected with described first bonding region, the other end of described alternate path and described second
Bonding region connects, and described first bonding region and the second bonding region are all connected with external circuit.
Transformator the most according to claim 1, it is characterised in that: described first winding also includes at least one the 3rd spiral
Shape coil, at least one the 3rd spiral coil described is arranged in described insulation division, at least one the 3rd crepe cord described
The quantity of circle is identical with the quantity of at least one the first spiral coil described, leaning on of at least one the 3rd spiral coil described
The one end at the center of nearly 3rd spiral coil and close first spiral coil of at least one the first spiral coil described
One end correspondence at center connect, the center away from described first spiral coil of at least one the first spiral coil described
One end and at least one the 3rd spiral coil described the center away from described 3rd spiral coil one end all with
External circuit connects.
Transformator the most according to claim 5, it is characterised in that: described insulation division also includes third bond district and the 4th key
Close district, the one end and the described 3rd at the center away from described first spiral coil of at least one the first spiral coil described
Bonding region connects, the one end at the center away from described 3rd spiral coil of at least one the 3rd spiral coil described and institute
Stating fourth bond district to connect, described third bond district and fourth bond district are all connected with external circuit.
Transformator the most according to claim 5, it is characterised in that: the thickness of the wire of described first spiral coil is more than
The thickness of the wire of the 3rd spiral coil.
Transformator the most according to claim 1, it is characterised in that: at least one second spiral coil described by one layer or
Multiple layer metal forms, and the two ends of at least one the second spiral coil described connect the 5th bonding region and the 6th bonding region respectively,
Described 5th bonding region and the 6th bonding region are all connected with external circuit.
Transformator the most according to claim 1, it is characterised in that: at least one first spiral coil described includes two
First spiral coil, at least one second spiral coil described includes two the second spiral coils.
10. one kind manufactures such as the manufacture method of claim 1 to 9 any one transformator, it is characterised in that described method includes:
First surface at substrate forms spiral groove；
The first insulating barrier is formed on the surface of described spiral groove；
Described spiral groove is filled with metal material；
The metal material of described first surface is removed to form the first spiral coil by planarization；
Insulation division is formed at described first surface.
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| CN201610567285.6A CN106128719B (en) | 2016-07-18 | 2016-07-18 | Transformer and its manufacture method |
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| CN201610567285.6A CN106128719B (en) | 2016-07-18 | 2016-07-18 | Transformer and its manufacture method |
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| CN107104120A (en) * | 2017-05-24 | 2017-08-29 | 成都线易科技有限责任公司 | Magnetic induction device and manufacture method |
| CN107123505B (en) * | 2017-05-24 | 2019-02-26 | 成都线易科技有限责任公司 | Magnetic induction device and manufacturing method |
| CN110349737A (en) * | 2018-04-02 | 2019-10-18 | 三星电机株式会社 | The method of coil block and manufacture coil block |
| CN110391072A (en) * | 2018-04-19 | 2019-10-29 | 三星电机株式会社 | Coil block and its manufacturing method |
| CN112466593A (en) * | 2019-09-06 | 2021-03-09 | 马勒国际有限公司 | Flat coil carrier |
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| CN1798474A (en) * | 2004-12-30 | 2006-07-05 | 三星电机株式会社 | Printed circuit board having three-dimensional spiral inductor and method of fabricating same |
| CN102969304A (en) * | 2012-11-21 | 2013-03-13 | 电子科技大学 | Three-dimension integrated miniature transformer |
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| CN1798474A (en) * | 2004-12-30 | 2006-07-05 | 三星电机株式会社 | Printed circuit board having three-dimensional spiral inductor and method of fabricating same |
| US9001031B2 (en) * | 2012-07-30 | 2015-04-07 | Qualcomm Mems Technologies, Inc. | Complex passive design with special via implementation |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107104120A (en) * | 2017-05-24 | 2017-08-29 | 成都线易科技有限责任公司 | Magnetic induction device and manufacture method |
| CN107123505B (en) * | 2017-05-24 | 2019-02-26 | 成都线易科技有限责任公司 | Magnetic induction device and manufacturing method |
| CN110349737A (en) * | 2018-04-02 | 2019-10-18 | 三星电机株式会社 | The method of coil block and manufacture coil block |
| CN110391072A (en) * | 2018-04-19 | 2019-10-29 | 三星电机株式会社 | Coil block and its manufacturing method |
| CN110391072B (en) * | 2018-04-19 | 2021-10-08 | 三星电机株式会社 | Coil assembly and method of manufacturing the same |
| US11501915B2 (en) | 2018-04-19 | 2022-11-15 | Samsung Electro-Mechanics Co., Ltd. | Coil component and method of manufacturing the same |
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| CN112466593B (en) * | 2019-09-06 | 2022-09-20 | 马勒国际有限公司 | Flat coil carrier |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106128719B (en) | 2018-03-02 |
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