CN106112192B - One kind welds empty restraining device and its method of work - Google Patents
One kind welds empty restraining device and its method of work Download PDFInfo
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- CN106112192B CN106112192B CN201610590565.9A CN201610590565A CN106112192B CN 106112192 B CN106112192 B CN 106112192B CN 201610590565 A CN201610590565 A CN 201610590565A CN 106112192 B CN106112192 B CN 106112192B
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- drying
- warehouse
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- empty
- stepper motor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/08—Auxiliary devices therefor
- B23K3/085—Cooling, heat sink or heat shielding means
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- Mechanical Engineering (AREA)
- Drying Of Solid Materials (AREA)
Abstract
One kind welds empty restraining device and its method of work.It is related to a kind of chip manufacture field, more particularly to a kind of device and its method of work for suppressing to weld cavity in chip process.Provide a kind of welding cavity restraining device simple in construction, cost is low, operating procedure is simple and the empty inhibition of welding is good and its method of work.The protection bin center, which is provided with, is available for the circular hole that the axle of stepper motor passes through, and the axle of the stepper motor through circular hole and is fixed on the lower surface of protection bin；Electric calorifie installation is respectively equipped with four warehouse for drying, for heating, drying storehouse, each warehouse for drying is welded on the bottom of the warehouse for drying by rotary shaft and the axis connection of the stepper motor, the rotary shaft respectively.The present invention has simple in construction, is easy to production and security performance is high, cost is low, operating procedure is simple and welds the advantages of empty inhibition is good.
Description
Technical field
The present invention relates to a kind of chip manufacture field, more particularly to a kind of dress for suppressing to weld cavity in chip process
Put and its method of work.
Background technology
When carrying out die bottom surface welding using slicken solder, for the chip of different fabs offer, weldering will often find that
Connect cavity and larger difference be present, under identical encapsulation technology, the chip of part fab, it, which welds cavity, can exceed industry
Interior empty proportion requirement is abnormal so as to cause welding quality to occur.The main reason in welding cavity is chip transportation process
The moisture of middle back side absorption；Second, it is necessary to give cutter to cool by water, in cutting process because of dicing tape and adhesive die attachment not
Jail, back metal Rotating fields are sparse, and steam is entered from chip sides infiltration.
An application for a patent for invention disclosed in State Intellectual Property Office 2012-5-16（Application number：201080025868.7
Title：The heat treatment method of silicon wafer and silicon wafer）, there is provided the cavity blemish for suppressing to be present in wafer bulk portion adds as equipment
The silicon wafer of the generating source of pollution sources or sliding in work, and can be when carrying out RTP in the chip table for forming equipment active region
Face nearby reduces the heat treatment method of the silicon wafers of crystal defect such as COP.By being carried out in the silicon wafer to being prepared using CZ methods
During RTP, reach the internal pressure in gas and space in the space 20a of supply the 1st and in the 2nd space 20b, maximum temperature reached T1 etc.
To the heat treatment method of the silicon wafer of defined value, there is provided following silicon wafer：Wafer surface portion 1 is the nothing in the absence of cavity blemish
Defect area, wafer bulk portion 2 more deeper than wafer surface portion 1 is made up of the polyhedron using octahedron as basic configuration, above-mentioned
Polyhedral corner is curved, and the cavity blemish 4 that inner wall oxide film is removed be present.But this method realizes that condition is severe
Carve, it is complicated, it is not suitable for large-scale production.
The content of the invention
The present invention is directed to problem above, there is provided one kind is simple in construction, cost is low, operating procedure is simple and the suppression of welding cavity
The good welding cavity restraining device of effect processed and its method of work.
The technical scheme is that：One kind welds empty restraining device, including circular protection bin, stepper motor and four
Individual warehouse for drying；The protection bin center, which is provided with, is available for the circular hole that the axle of stepper motor passes through, and the axle of the stepper motor passes through circle
Hole is simultaneously fixed on the lower surface of protection bin；
Electric calorifie installation is respectively equipped with four warehouse for drying, for heating, drying storehouse, each warehouse for drying leads to respectively
The axis connection of rotary shaft and the stepper motor is crossed, the rotary shaft is welded on the bottom of the warehouse for drying.
The warehouse for drying includes upper lid and body, and the inwall of the body is provided with the boss perpendicular to inwall, described
The bottom of body is provided with the storage tank for being used for placing hydraulic means, and hydraulic means axial plane is placed and secured in storage tank upwards, institute
Hydraulic means is stated to move up and down in storage tank；
The mounting table horizontal when protrusion is fixed with the axle of the hydraulic means, the mounting table plane is welded downwards
It is connected on the axle of the hydraulic means, is moved up and down with hydraulic means；
The upper lid is placed in the top of the warehouse for drying, and the edge of the upper lid is provided with downward projection, the projection
Contacted with the boss；
The body is provided with heating cabinet, and electric calorifie installation is provided with the heating cabinet.
The body is provided with slide rail, and the slide rail is provided with lifting motor, and the lifting motor passes through shape at a right angle
Transmission mechanism connects with the top cap；
The bottom of the body is provided with a pair of fans.
The empty restraining device of welding includes control device, and the control device includes handheld device and processor, institute
State handheld device and be provided with start button and stop button, the start button and stop button respectively with the processor phase
Even；
The processor includes control chip and controller, the controller respectively with stepper motor, hydraulic means, lifting
Motor, electric calorifie installation connect respectively.
The lower surface of the upper lid is provided with cushion pad.
The bottom surface of the protection bin is provided with four supporting legs, and each supporting leg is provided with Anti-slip cover.
A kind of method of work for welding empty restraining device, by taking a warehouse for drying as an example, works as follows：
1）Staff places chip on mounting table, and the blue film edge of chip is placed on boss and presses start button；
2）Stepper motor acts, warehouse for drying rotation, while lifting motor drives to cover and moved downward, and pushes down blue film edge；
3）Mounting table rises, and stretches blue film；
4）Electric calorifie installation starts, and dries chip；
5）Risen on upper lid, again up, upper lid extrudes chip to mounting table with mounting table；
6）Starting fan, cool down chip；
7）Warehouse for drying is rotated to initial position, is taken out chip, is finished.
Warehouse for drying is driven to be rotated in protection bin using stepper motor in the present invention, staff's protection bin can be received on side
Chip is taken and places, it is convenient and swift, improve operating efficiency and mitigate work load.Caused using heating cabinet heating chip in chip
Steam is reduced the welding cavity that steam is formed in chip, lifts chip quality by thermal evaporation.The rotary shaft is welded on described
The bottom of warehouse for drying, it ensure that the bonding strength of rotary shaft and warehouse for drying, the service life of lifting device.Set on the inwall of body
There is the boss perpendicular to inwall, on boss, projection is convex by acting on for lifting motor at the edge of indigo plant film when placing chip
Platform is engaged the edge that blue film is fixed during blue film is stretched.The upper surface of mounting table is convex surface, can preferably be stretched
Blue film, steam diverging efficiency is improved, so as to further strengthen the effect for suppressing cavity.Electric calorifie installation is provided with heating cabinet.Electric heating
Device is not close to body, heats blue film by the air driven for heating heating cabinet, makes warehouse for drying temperature Relative distribution uniform, avoid
Damage of the localized hyperthermia to blue film and chip, rate of reducing the number of rejects and seconds, reduces cost.Set stop button can also be in handheld device
Arresting stop operating is forced when generation emergency, improves security.The bottom of body is provided with a pair of fans.Terminate in heating
After chip is cooled as early as possible, avoid chip hot soak condition, ensure chip quality.Cause warehouse for drying in heating process
Interior hot-air convection, promote uniformity of temperature profile in warehouse for drying, avoid localized hyperthermia from damaging chip.The present invention has structure in a word
Simply, it is easy to production and security performance is high, cost is low, operating procedure is simple and welds the advantages of empty inhibition is good.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention,
Fig. 2 is Fig. 1 top view,
Fig. 3 is warehouse for drying structural representation of the present invention,
Fig. 4 is mplifying structure schematic diagram at A in Fig. 3；
1 is protection bin in figure, and 2 be stepper motor, and 21 be rotary shaft,
3 be warehouse for drying, and 31 be upper lid, and 311 be projection, and 312 be transmission mechanism, and 313 be lifting motor, and 314 be cushion pad,
32 be body, and 321 be boss, and 322 be storage tank, and 323 be hydraulic means, and 324 be mounting table, and 325 be heating cabinet, and 326 be sliding
Rail, 327 be electric calorifie installation, and 328 be fan,
4 be supporting leg, and 41 be Anti-slip cover, and 5 be chip, and 6 be blue film.
Embodiment
The present invention as Figure 1-4, includes protection bin 1, stepper motor 2 and four warehouse for drying 3 of circle；The protection bin
1 center, which is provided with, is available for the circular hole that the axle of stepper motor 2 passes through, and the axle of the stepper motor 2 through circular hole and is fixed on protection bin 1
Lower surface on；Warehouse for drying is driven to be rotated in protection bin 2 using stepper motor 1, staff's protection bin 1 can be collected on side
With placement chip 5（Chip refers to have already passed through plated film and cutting technique, but the chip that the back side is remained adhered on blue film）, it is convenient
Fast, improve operating efficiency and mitigate work load.Because the isolation of protection bin, security performance are high.
Electric calorifie installation is respectively equipped with four warehouse for drying 3, for heating, drying storehouse 3, causes crystalline substance so as to heat chip
Steam in piece is reduced the welding cavity that steam is formed in chip 5, lifts chip quality by thermal evaporation.Each drying
Storehouse is welded on the bottom of the warehouse for drying 3 by rotary shaft 21 and the axis connection of the stepper motor 2, the rotary shaft 21 respectively
Portion, it ensure that the bonding strength of rotary shaft 21 and warehouse for drying 3, the service life of lifting device.
The warehouse for drying 3 includes upper lid 31 and body 32, and the inwall of the body 32 is provided with the boss perpendicular to inwall
321, when placing chip, the edge of indigo plant film is easy to upper lid 31 to fix and stretches blue film on boss 321.The bottom of the body is set
There is the storage tank 322 for placing hydraulic means 323, the axial plane of hydraulic means 323 is placed and secured in storage tank 322 upwards,
The hydraulic means 323 moves up and down in storage tank 322, for stretching the blue film 6 fixed so that blue film 6 and chip 5
It is partially separated, lifts water evaporation efficiency, improves the efficiency that device suppresses cavity.
The mounting table 324 horizontal when protrusion, the mounting table 324 are fixed with the axle of the hydraulic means 323
Plane is welded on downwards on the axle of the hydraulic means 323, is moved up and down with hydraulic means 323；The outer rim of mounting table 324 is put down
It is sliding, the damage in use to chip and blue film is avoided, improves yield rate.The upper surface of mounting table is convex surface, Neng Gougeng
Good stretching indigo plant film, steam diverging efficiency is improved, so as to further strengthen the effect for suppressing cavity.
The upper lid 31 is placed in the top of the warehouse for drying 3, and the edge of the upper lid 31 is provided with downward projection 311,
The projection 311 contacts with the boss 321；Projection 311 is engaged in stretching indigo plant by the boss 321 that acts on of lifting motor
The edge of blue film is fixed during film, avoids blue film in the device course of work with rising with mounting table.
The body 32 is provided with heating cabinet 325, and electric calorifie installation 327 is provided with the heating cabinet 325.Electric calorifie installation 327
It is not close to body 32, chip 5 is heated by the air driven for heating heating cabinet 325, makes the temperature Relative distribution of warehouse for drying 3 uniform,
Damage of the localized hyperthermia to blue film and chip is avoided, rate of reducing the number of rejects and seconds, reduces cost.
The body 32 is provided with slide rail 326, and the slide rail 326 is provided with lifting motor 313, the lifting motor 313
It is connected by the transmission mechanism 312 of shape at a right angle with the upper lid 31；Lifting motor 313 moves up and down on slide rail 326, leads to
Cross transmission mechanism 312 to be driven, lid 31 lifts in drive, it is not necessary to it is artificial to carry out handling operation, mitigate work load, improve production
Efficiency.
The bottom of the body 32 is provided with a pair of fans 328.Chip is cooled as early as possible after heating terminates, avoid chip from growing
Phase is in the condition of high temperature, ensures chip quality.Fan 328 causes hot-air convection in warehouse for drying 3 in heating process, promotes to dry
Uniformity of temperature profile in dry storehouse 3, avoids localized hyperthermia from damaging chip.
The empty restraining device of welding includes control device, and the control device includes handheld device and processor, institute
State handheld device and be provided with start button and stop button, the start button and stop button respectively with the processor phase
Even；Handheld device is automatically controlled after sending startup order to processor by processor, when needing to collect or place chip
Stop button is then pressed, it is artificial to place.Stop button can also force arresting stop to operate when emergency occurs, and improve
Security.
The processor includes control chip and controller, the controller respectively with stepper motor, hydraulic means, lifting
Motor, electric calorifie installation connect respectively, and control chip sends control instruction to controller, controls the action of various pieces, reach certainly
The purpose of dynamic operation, reduces working strength, improves production efficiency.
The lower surface of the upper lid 31 is provided with cushion pad 314.Cushion pad 314 avoids projection from directly being contacted with blue film,
Stretching can avoid damaging blue film in blue membrane process, improve yield rate.
The bottom surface of the protection bin 1 is provided with four supporting legs 4, and each supporting leg 4 is provided with Anti-slip cover 41.Due to filling
Centrifugal force can be produced by putting in the course of work, so being arranged Anti-slip cover 41 on supporting leg 4, increase and the frictional force on ground, avoid filling
Put and shift in the course of the work, improve the security of device.
A kind of method of work for welding empty restraining device, welds empty restraining device and is made up of four warehouse for drying, by step
Stepper motor driving rotates, and staff only needs to carry out collecting placement operation in situ when in use, in stepping electricity
One warehouse for drying of chip can just complete the drying operation to a chip during machine rotation is turned around, so as to realize stream
Line type is dried, and improves production efficiency, mitigates staff's burden.Below by taking a warehouse for drying as an example, work as follows：
1）Staff places chip on mounting table, and the blue film edge of chip is placed on boss and presses start button,
Device starts to act；
2）Stepper motor acts, and warehouse for drying starts to rotate, while lifting motor drives to cover and moved downward, and pushes down blue film side
Edge.
3）Mounting table rises, and stretches blue film；During blue film stretching, because projection pushes down the edge of blue film, blue film meeting
It is stretched with the rise of mounting table, simultaneously because the outer rim of mounting table is into convex surface, so making while blue film is stretched
Obtain chip to be partially separated with blue film, so as to improve the speed of the steam loss in heating process, improve production efficiency.
4）Electric calorifie installation starts, and dries chip, removes chip caused steam in cutting process, reduces welding cavity
Produce.
5）Risen on upper lid, again up, upper lid extrudes chip to mounting table with mounting table；So that chip pastes with blue film again
Close, be easy to take out the chip after heating.
6）Starting fan, cool down chip；Chip is avoided to be chronically at hot environment, reduction in the numbers of seconds.
7）Warehouse for drying is rotated to initial position, is taken out chip, is finished.
Claims (6)
1. one kind welds empty restraining device, it is characterised in that includes protection bin, stepper motor and four warehouse for drying of circle；
The protection bin center, which is provided with, is available for the circular hole that the axle of stepper motor passes through, and the axle of the stepper motor through circular hole and is fixed on
On the lower surface of protection bin；
Electric calorifie installation is respectively equipped with four warehouse for drying, for heating, drying storehouse, each warehouse for drying passes through rotation respectively
Rotating shaft and the axis connection of the stepper motor, the rotary shaft are welded on the bottom of the warehouse for drying；
The warehouse for drying includes upper lid and body, and the inwall of the body is provided with the boss perpendicular to inwall, the body
Bottom is provided with the storage tank for being used for placing hydraulic means, and hydraulic means axial plane is placed and secured in storage tank upwards, the liquid
Pressure device moves up and down in storage tank；
The mounting table horizontal when protrusion is fixed with the axle of the hydraulic means, the mounting table plane is welded on downwards
On the axle of the hydraulic means, moved up and down with hydraulic means；
The upper lid is placed in the top of the warehouse for drying, and the edge of the upper lid is provided with downward projection, the projection and institute
State boss contact；
The body is provided with heating cabinet, and electric calorifie installation is provided with the heating cabinet.
A kind of 2. empty restraining device of welding according to claim 1, it is characterised in that the body is provided with slide rail,
The slide rail is provided with lifting motor, and the lifting motor is connect by the transmission mechanism of shape at a right angle with the top cap；
The bottom of the body is provided with a pair of fans.
A kind of 3. empty restraining device of welding according to claim 2, it is characterised in that the empty restraining device of welding
Including control device, the control device includes handheld device and processor, and the handheld device is provided with start button and stopped
Only button, the start button and stop button are connected with the processor respectively；
The processor includes control chip and controller, and the controller is electric with stepper motor, hydraulic means, lifting respectively
Mechanical, electrical thermal connects respectively.
4. one kind according to claim 1,2 or 3 welds empty restraining device, it is characterised in that the following table of the upper lid
Face is provided with cushion pad.
5. a kind of empty restraining device of welding according to claim 4, it is characterised in that set on the bottom surface of the protection bin
There are four supporting legs, each supporting leg is provided with Anti-slip cover.
6. a kind of a kind of method of work of welding cavity restraining device described in claim 3, by taking a warehouse for drying as an example, it is special
Sign is, works as follows：
1）Staff places chip on mounting table, and the blue film edge of chip is placed on boss and presses start button；
2）Stepper motor acts, warehouse for drying rotation, while lifting motor drives to cover and moved downward, and pushes down blue film edge；
3）Mounting table rises, and stretches blue film；
4）Electric calorifie installation starts, and dries chip；
5）Risen on upper lid, again up, upper lid extrudes chip to mounting table with mounting table；
6）Starting fan, cool down chip；
7）Warehouse for drying is rotated to initial position, is taken out chip, is finished.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201610590565.9A CN106112192B (en) | 2016-07-25 | 2016-07-25 | One kind welds empty restraining device and its method of work |
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|---|---|---|---|
| CN201610590565.9A CN106112192B (en) | 2016-07-25 | 2016-07-25 | One kind welds empty restraining device and its method of work |
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| CN106112192B true CN106112192B (en) | 2018-04-03 |
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| CN108161159A (en) * | 2018-01-03 | 2018-06-15 | 佛山杰致信息科技有限公司 | A kind of electronic component quick welding device |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1909182A (en) * | 2005-08-05 | 2007-02-07 | 中微半导体设备(上海)有限公司 | Semiconductor technology processing system and method |
| TWM312766U (en) * | 2006-11-07 | 2007-05-21 | Hiwin Tech Corp | Improved structure of wafer heater |
| CN101399160A (en) * | 2007-09-26 | 2009-04-01 | 盛美半导体设备（上海）有限公司 | Heat treatment method and device for semiconductor workpieces |
| CN102437071A (en) * | 2010-09-29 | 2012-05-02 | 东京毅力科创株式会社 | Vertical heat treatment apparatus |
| CN103579054A (en) * | 2012-08-09 | 2014-02-12 | 大日本网屏制造株式会社 | Substrate processing apparatus and substrate processing method |
| CN203631511U (en) * | 2013-12-26 | 2014-06-04 | 潍坊达而高电子技术有限公司 | Wafer drying device |
| CN104051308A (en) * | 2014-06-27 | 2014-09-17 | 广东先导半导体材料有限公司 | Chip stripping device and system and device for controlling chip stripping |
| CN205817038U (en) * | 2016-07-25 | 2016-12-21 | 扬州扬杰电子科技股份有限公司 | Welding cavity restraining device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61119040A (en) * | 1984-11-15 | 1986-06-06 | Tokyo Denshi Kagaku Kabushiki | Vacuum processor |
| JP2006173462A (en) * | 2004-12-17 | 2006-06-29 | Disco Abrasive Syst Ltd | Wafer processor |
-
2016
- 2016-07-25 CN CN201610590565.9A patent/CN106112192B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1909182A (en) * | 2005-08-05 | 2007-02-07 | 中微半导体设备(上海)有限公司 | Semiconductor technology processing system and method |
| TWM312766U (en) * | 2006-11-07 | 2007-05-21 | Hiwin Tech Corp | Improved structure of wafer heater |
| CN101399160A (en) * | 2007-09-26 | 2009-04-01 | 盛美半导体设备（上海）有限公司 | Heat treatment method and device for semiconductor workpieces |
| CN102437071A (en) * | 2010-09-29 | 2012-05-02 | 东京毅力科创株式会社 | Vertical heat treatment apparatus |
| CN103579054A (en) * | 2012-08-09 | 2014-02-12 | 大日本网屏制造株式会社 | Substrate processing apparatus and substrate processing method |
| CN203631511U (en) * | 2013-12-26 | 2014-06-04 | 潍坊达而高电子技术有限公司 | Wafer drying device |
| CN104051308A (en) * | 2014-06-27 | 2014-09-17 | 广东先导半导体材料有限公司 | Chip stripping device and system and device for controlling chip stripping |
| CN205817038U (en) * | 2016-07-25 | 2016-12-21 | 扬州扬杰电子科技股份有限公司 | Welding cavity restraining device |
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| CN106112192A (en) | 2016-11-16 |
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