CN106098966B - A kind of film and its restorative procedure, display base plate and preparation method thereof - Google Patents
A kind of film and its restorative procedure, display base plate and preparation method thereof Download PDFInfo
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- CN106098966B CN106098966B CN201610500519.5A CN201610500519A CN106098966B CN 106098966 B CN106098966 B CN 106098966B CN 201610500519 A CN201610500519 A CN 201610500519A CN 106098966 B CN106098966 B CN 106098966B
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- repaired
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
The present invention relates to display technology field, discloses a kind of film and its restorative procedure, display base plate and preparation method thereof.The forming thin film heterogeneity, the restorative procedure include：An area to be repaired is determined first, the out-of-flatness region is set to fall completely within the area to be repaired, then the film in the area to be repaired is removed, the material for making the film is finally filled in the area to be repaired again, form restoring area, and the difference in height of the first surface of the film of the restoring area and the second surface of the film positioned at the neighboring area of restoring area periphery improves the homogeneity that forms a film, ensures the display quality of product in preset range.
Description
Technical field
The present invention relates to display technology field, more particularly to a kind of film and its restorative procedure, display base plate and its system
Make method.
Background technology
In the manufacturing process of display device, each production quality for showing film directly affects the display quality of final products.
, can be because the reason such as particle or material residual cause film forming scarce when utilizing nozzle to prepare display film by InkJet printing processes
Fall into.
In the prior art, for the film 1 with depression defect (in the dotted line frame in Fig. 1), can generally utilize nozzle into
Row repair, but the film volumetric of defect area is generally less than 5pL, and a diameter of 5um of nozzle, minimum inkjet volume exist
10pL or so, can cause bump defects after reparation, as shown in the dotted line frame in Fig. 2, be unable to reach reparation purpose so that film forming
Homogeneity is poor.If replacing the nozzle that diameter is less than 5um, make precision and be not easily accomplished, and easily occur blocking asks
Topic influences to produce production capacity so as to frequently result in the machine of delaying.
The content of the invention
The present invention provides a kind of film and its restorative procedure, display base plate and preparation method thereof, to provide a kind of film
Restorative procedure, ensures the homogeneity of film on display base plate.
In order to solve the above technical problems, providing a kind of restorative procedure of film in the embodiment of the present invention, the film is set
In a substrate, the film has out-of-flatness region, and the surface of the film in out-of-flatness region away from the substrate is not
Burnishing surface, the restorative procedure include：
Determine an area to be repaired, the out-of-flatness region is fallen completely within the area to be repaired；
Remove the film in the area to be repaired；
Filling makes the material of the film in the area to be repaired, forms restoring area, and the restoring area
Film first surface with positioned at restoring area periphery neighboring area film second surface difference in height pre-
If scope, the difference in height is the first surface and second surface in the distance on the direction of the second surface.
The step of a kind of production method of display base plate is also provided in the embodiment of the present invention, including forms packaging film, when
When the packaging film has out-of-flatness region, the packaging film is repaired using restorative procedure as described above.
A kind of film is also provided in the embodiment of the present invention, the film includes restoring area and outside the restoring area
The neighboring area enclosed, the restoring area are made using restorative procedure as described above.
A kind of display base plate, including packaging film are also provided in the embodiment of the present invention, the packaging film is using as above institute
The film stated.
The above-mentioned technical proposal of the present invention has the beneficial effect that：
In above-mentioned technical proposal, when forming thin film heterogeneity, it is first determined an area to be repaired, makes the uneven main plot
Domain is fallen completely within the area to be repaired, then removes the film in the area to be repaired, finally again described to be repaired
Filling makes the material of the film in multiple region, forms restoring area, and the first surface of the film of the restoring area and
Difference in height positioned at the second surface of the film of the neighboring area of restoring area periphery is homogeneous in preset range, raising film forming
Property, ensures the display quality of product.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is attached drawing needed in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, without having to pay creative labor, may be used also
To obtain other attached drawings according to these attached drawings.
Surface Fig. 1 shows film has the structure diagram of depression defect；
Fig. 2 represents the structure diagram after being repaired using reparation of the prior art to the depression defect in Fig. 1；
Fig. 3 represents the restorative procedure flow chart of film in the embodiment of the present invention；
Fig. 4-Fig. 6 represents the repair process figure to surface in the embodiment of the present invention with the film of depression defect；
Fig. 7-Fig. 9 represents the repair process figure to surface in the embodiment of the present invention with the film of bump defects；
Figure 10 represents to remove the procedure chart of the film of area to be repaired in the embodiment of the present invention；
Figure 11 represents to fill the procedure chart for the material for making film in area to be repaired in the embodiment of the present invention；
Figure 12 represents the structure diagram of display base plate in the embodiment of the present invention.
Embodiment
Below in conjunction with drawings and examples, the embodiment of the present invention is described in further detail.Following reality
Apply example to be used to illustrate the present invention, but be not limited to the scope of the present invention.
Embodiment one
In the preparation process of display device, it may appear that forming thin film homogeneity is poor, reduces the skill of the display quality of product
Art problem.
In order to solve the above-mentioned technical problem, a kind of restorative procedure of film is provided in the present embodiment, for being carried out to film
Repair, improve the homogeneity of film.The film is arranged in a substrate, and the film has out-of-flatness region, the injustice
Surface of the film in main plot domain away from the substrate is uneven whole face.As shown in figure 3, the restorative procedure includes：
Determine an area to be repaired, the out-of-flatness region is fallen completely within the area to be repaired；
Remove the film in the area to be repaired；
Filling makes the material of the film in the area to be repaired, forms restoring area, and the restoring area
Film first surface with positioned at restoring area periphery neighboring area film second surface difference in height pre-
If scope, the difference in height is the first surface and second surface in the distance on the direction of the second surface.
After being repaired by above-mentioned restorative procedure to film, the flatness of film surface can be effectively improved.Improve thin
The homogeneity of film, ensures the display quality of product.
It should be noted that unless specified or limited otherwise, the surface of film is surface of the film away from substrate in the present invention.Institute
It is that surface is depression (as shown in Figure 1) to state out-of-flatness region, and surface is raised (as shown in Figure 7), or both combination, pass through
The technical solution of invention can realize reparation.
With reference to shown in Fig. 4 and Fig. 7, film restorative procedure of the invention determines an area to be repaired 100 first, makes film 1
Out-of-flatness region fall completely within area to be repaired 100, the purpose of the step is to ensure subsequently to fill out in area to be repaired 100
When filling material, reparation purpose can be reached, i.e. in area to be repaired 100 packing material formed restoring area 101, its with
The difference in height on the surface of the film 1 of neighboring area within a preset range, is effectively improved the surface smoothness of film, with reference to Fig. 6 and
Shown in Fig. 9.Preferably, the thickness of the thickness of the film 1 of restoring area 101 and the film 1 positioned at the neighboring area of restoring area 101
Spend completely the same.Since the film of restoring area 101 and the neighboring area is made by same material, and same layer, therefore with together
One mark represents.
Wherein, area to be repaired 100 is definite related with the pad parameter of pad device in subsequent technique, and the filling is set
The material that the filling in area to be repaired 100 makes film 1 is ready for use on, forms restoring area 101 (with reference to shown in Fig. 5 and Fig. 6),
And the second table of the first surface of the film 1 of restoring area 101 and the film 1 positioned at the neighboring area of the periphery of restoring area 101
The difference in height in face is in preset range.Specially：The material volume that the pad device is filled within the unit interval, which is less than, repairs area
The volume of the film 1 in domain 101.
The pad device of the present embodiment is ink jet printing device, and using nozzle 3, ink-jet is beaten in area to be repaired 100
The material of the film is made in printing, restoring area 101 is formed, with reference to shown in Figure 11 and Fig. 6.Since ink jet printing device can be
Ink-jet printing material in setting regions, default patterning processes, simplifies manufacture craft.
Further, the volume of the film of the restoring area is set to be more than minimum spray of the nozzle within the unit interval
Black volume, effectively achievees the purpose that reparation.Because if the volume of the film of the restoring area is less than the nozzle in unit
Minimum inkjet volume in time, then, using the nozzle when area to be repaired canopy film printed material forms restoring area, institute
State the film of restoring area first surface be much higher than neighboring area surface second surface, formed raised, it is impossible to reach
To the purpose of reparation.
Before filling makes the material of the film in the area to be repaired, also need to remove in the area to be repaired
Film, to remove the surface of surface irregularity.Can specifically laser sintering process be used to remove in the area to be repaired
Film.Wherein, laser sintering process is the technology being sintered using laser as heat source to film, since the energy of laser is higher,
Many materials can be sintered.And laser beam collection neutralization penetration capacity is small, suitable for the sintering to small area, film.
Since the area of the area to be repaired is larger, in order to only be burnt to the making choice property of film of the area to be repaired
Knot, optionally, as shown in Figure 10, the step of removing the film in the area to be repaired using laser sintering process, includes：
There is provided one and block 2, there is window, the window and the position correspondence of area to be repaired 100, and institute on shutter 2
The projection of window on the substrate 10 is stated in the projection of the area to be repaired on the substrate 10；
Laser beam scans film 1 by the window, removes the film in area to be repaired 100.
Shutter 2 can stop that laser light sinters the film 1 in other regions.
In above-mentioned steps, the scanning range of laser is limited by shutter, so as to fulfill selective sintering, is controlled to surface
The removal of smooth film, shortens repair time, improves production capacity.Since the scope of sintering is more than the model of laser beam actual scanning
Enclose, it is therefore desirable to which the projection of the window on the substrate 10 is set in the projection of the area to be repaired on the substrate 10.
With reference to shown in Fig. 4-Fig. 6, Figure 10 and Figure 11, in a specific embodiment, to out-of-flatness region
The method that film is repaired includes：
Determine an area to be repaired 100, the out-of-flatness region is fallen completely within area to be repaired 100, such as Fig. 4 institutes
Show；
The film of area to be repaired 100 is removed using laser sintering process, with reference to shown in Fig. 5 and Figure 10；
Using nozzle 3, filling makes the material of the film in area to be repaired 100, forms restoring area 101, with reference to
Shown in Fig. 6 and Figure 11, and neighboring area of the first surface of the film 1 of restoring area 101 with being located at the periphery of restoring area 101
The difference in height of the second surface of film 1 in preset range, the difference in height for the first surface and second surface perpendicular to
Distance on the direction of the second surface.Preferably, the first surface of the film 1 of restoring area 101 is with being located at restoring area
The difference in height of second surface of the film 1 of the neighboring areas of 101 peripheries is zero, the thickness of the film 1 of restoring area 101 with it is described
The thickness of the film 1 of neighboring area is completely the same.
In above-mentioned embodiment, the volume of the film of restoring area 101 is set to be more than nozzle 3 within the unit interval
Minimum inkjet volume, so as to effectively achieve the purpose that reparation.Further, the window on one shutter 2 of laser beam transparent
The film of area to be repaired 100 is scanned, sinters the film in area to be repaired 100, region is sintered with effective control.
A kind of film 1 is also provided with reference to shown in Fig. 6 and Fig. 9, in the present embodiment, film 1 includes restoring area 101 and is located at
The neighboring area of the periphery of restoring area 101, restoring area 101 is made using above-mentioned restorative procedure, and obtained restoring area 101
Film 1 first surface and neighboring area film 1 second surface difference in height in preset range, be effectively improved film table
The flatness in face, improves the homogeneity of film, ensures the display quality of product.Wherein, the difference in height is the first surface
With second surface in the distance on the direction of the second surface.
Embodiment two
Based on same inventive concept, a kind of production method of display base plate is provided in the present embodiment, including form thinner package
The step of film, when the packaging film has out-of-flatness region, using the restorative procedure in embodiment one to the thinner package
Film is repaired, and improves the homogeneity of packaging film, is played the role of obstructing water oxygen, is protected the property of display base plate semiconductor-on-insulator device
Energy.
Wherein, the step of forming packaging film includes：
Organic packaging film is formed using InkJet printing processes；
Specifically, when the organic packages film has out-of-flatness region, using the restorative procedure pair in embodiment one
The organic packages film is repaired.
In above-mentioned steps, for organic packages film, usually it is made by InkJet printing processes, uneven surface easily occurs
The defects of whole, can be achieved to repair by the restorative procedure in embodiment one.Organic packages film can improve display base plate
Flexibility, suitable for flexible base board.
In actual application, the packaging film also needs to include inorganic encapsulated film, it primarily serves barrier water oxygen
Effect.In the present embodiment, formed packaging film the step of further include：
The first inorganic encapsulated film and the second inorganic encapsulated film are formed, the organic packages film is located at first nothing
Between machine packaging film and the second inorganic encapsulated film.
The first inorganic encapsulated film, the organic packages that the packaging film formed by above-mentioned steps includes sandwich structure are thin
Film and the second inorganic encapsulated film, double-deck inorganic encapsulated film can improve the effect of barrier water oxygen.The organic packages film
Between the first inorganic encapsulated film and the second inorganic encapsulated film, the thickness of every layer of inorganic encapsulated film can be thinned
Degree, increases the flexibility of inorganic encapsulated film, further improves the flexibility of substrate.
A kind of display base plate, including packaging film are also provided in the present embodiment, the packaging film is used in embodiment one
Film, including restoring area and use embodiment one positioned at the neighboring area of restoring area periphery, the restoring area
In restorative procedure be made, and the packaging film of the first surface of the packaging film of obtained restoring area and the neighboring area
Second surface difference in height in preset range, be effectively improved the flatness on packaging film surface, improve the homogeneous of packaging film
Property, ensures the display quality of product.Wherein, the difference in height is the first surface and second surface perpendicular to described second
Distance on the direction on surface.The surface of packaging film is the surface of the substrate 10 away from display base plate.
For flexible display substrates, as shown in figure 12, the packaging film includes the organic packages as made from organic material
Film 1；Specially organic packages film 1 ensure that the homogeneity of organic packages film 1 using the film in embodiment one.
In order to ensure the performance of the semiconductor devices 13 on display base plate, the packaging film is further included by inorganic material system
The inorganic encapsulated film obtained, for obstructing the water oxygen in environment.Optionally, the inorganic encapsulated film includes the first inorganic encapsulated
11 and second inorganic encapsulated film 12 of film, organic packages film 1 are located at the first inorganic encapsulated film 11 and the second inorganic encapsulated
Between film 12, further increase the flexibility of display base plate.
The display base plate can be liquid crystal display substrate, oled display substrate or other kinds of display base plate.
The above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, some improvement and replacement can also be made, these improve and replace
Also it should be regarded as protection scope of the present invention.
Claims (12)
1. a kind of restorative procedure of film, the film are arranged in a substrate, the film has an out-of-flatness region, it is described not
Surface of the film of flattened region away from the substrate is uneven whole face, it is characterised in that the film is the envelope of display base plate
Film is filled, when the packaging film has out-of-flatness region, the packaging film is repaired using the restorative procedure,
The restorative procedure includes：
Determine an area to be repaired, the out-of-flatness region is fallen completely within the area to be repaired；
Remove the film in the area to be repaired；
Filling makes the material of the film in the area to be repaired, forms restoring area, and the restoring area is thin
The difference in height of the second surface of the film of neighboring area of the first surface of film with being located at restoring area periphery is in default model
Enclose, the difference in height is the first surface and second surface in the distance on the direction of the second surface.
2. restorative procedure according to claim 1, it is characterised in that ink-jet is beaten in the area to be repaired using nozzle
The material of the film is made in printing, forms the restoring area.
3. restorative procedure according to claim 2, it is characterised in that the volume of the film of the restoring area is more than described
Minimum inkjet volume of the nozzle within the unit interval.
4. restorative procedure according to claim 1, it is characterised in that the area to be repaired is removed using laser sintering process
Film in domain.
5. restorative procedure according to claim 4, it is characterised in that the area to be repaired is removed using laser sintering process
The step of film in domain, includes：
One shutter is provided, there is window, the window and the position correspondence of the area to be repaired, and institute on the shutter
The projection of window on the substrate is stated in the projection of the area to be repaired on the substrate；
Laser beam scans the film by the window, removes the film in the area to be repaired.
6. restorative procedure according to claim 1, it is characterised in that the thickness of the film of the restoring area and the week
The consistency of thickness of the film of border region.
7. a kind of production method of display base plate, including the step of formation packaging film, it is characterised in that when the packaging film
During with out-of-flatness region, the packaging film is repaired using claim 1-6 any one of them restorative procedure.
8. production method according to claim 7, it is characterised in that the step of forming packaging film includes：
Organic packaging film is formed using InkJet printing processes；
Specifically, when the organic packages film has out-of-flatness region, using claim 1-6 any one of them reparations
Method repairs the organic packages film.
9. production method according to claim 8, it is characterised in that the step of forming packaging film further includes：
The first inorganic encapsulated film and the second inorganic encapsulated film are formed, the organic packages film is located at the described first inorganic envelope
Fill between film and the second inorganic encapsulated film.
10. a kind of film, it is characterised in that the film includes restoring area and positioned at the peripheral region of restoring area periphery
Domain, the restoring area are made using claim 1-6 any one of them restorative procedures.
11. a kind of display base plate, including packaging film, it is characterised in that the packaging film is using described in claim 10
Film.
12. display base plate according to claim 11, it is characterised in that the packaging film includes being made by organic material
Organic packages film；
Specially described organic packages film is using the film described in claim 10.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610500519.5A CN106098966B (en) | 2016-06-29 | 2016-06-29 | A kind of film and its restorative procedure, display base plate and preparation method thereof |
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| CN201610500519.5A CN106098966B (en) | 2016-06-29 | 2016-06-29 | A kind of film and its restorative procedure, display base plate and preparation method thereof |
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| CN106098966B true CN106098966B (en) | 2018-04-24 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI655800B (en) * | 2018-01-04 | 2019-04-01 | 帆宣系統科技股份有限公司 | Polyimide film repair method for organic light emitting diode |
| CN108520916A (en) * | 2018-05-21 | 2018-09-11 | 武汉华星光电半导体显示技术有限公司 | A kind of flexible base board and its bubble repair structure |
| CN111564557A (en) * | 2019-02-13 | 2020-08-21 | 上海和辉光电有限公司 | Flexible substrate, preparation method thereof, display panel and display device |
| US20220373830A1 (en) * | 2019-10-29 | 2022-11-24 | Samsung Display Co., Ltd. | Panel repairing device and panel repairing method |
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| US4960611A (en) * | 1987-09-30 | 1990-10-02 | Kansai Paint Company, Limited | Method of remedying coating |
| JP2012099328A (en) * | 2010-11-02 | 2012-05-24 | Panasonic Corp | Organic el display manufacturing method |
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| CN106098966A (en) | 2016-11-09 |
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