CN106097316A - The substrate position identifying processing method of laser scribing means image identification system - Google Patents
The substrate position identifying processing method of laser scribing means image identification system Download PDFInfo
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Abstract
The present invention relates to a kind of substrate position identifying processing method of laser scribing means image identification system, the method comprises the steps: that the entire image to gathering carries out binary conversion treatment；Image Mark point is done rim detection, obtains the level of spider, vertical centre dotted line；Mark dot center line is detected, central point on the dotted line of spider center is transformed into the sinusoidal line of rectangular coordinate system parameter space, by straight line ask for be converted into asking for of intersection point pole coordinate parameter between sinusoidal line, obtain the pole coordinate parameter of spider horizontal line and vertical line；Pole coordinate parameter according to spider horizontal line and spider vertical line obtains the polar coordinate of spider intersection point.Accuracy of identification of the present invention is high, good reliability, and being applicable to laser scribing (line) machine or laser cutting machine etc. needs the equipment of image recognition processing.
Description
Technical field
The invention belongs to technical field of image processing, the substrate position relating to a kind of laser scribing means image identification system is known
Other processing method.
Background technology
In order to improve workpiece quality, reducing process time, reduce processing cost, laser technology produces therewith and is subject to extensively
Pay close attention to, be progressively applied to the fields such as manufacture, surface process and materials processing.Laser scribing means is that passive device resistance substrate is made
In special equipment.The image identification system of this equipment, for automatically determining the position of dicing substrate, makes exit positions and substrate
Position is fully aligned.Due to equipment scribing positional precision the most a height of ± 3 μm, less demanding in ± 2 μ to the accuracy of identification of Mark point
, due to multiformity and the unstability of scribing process, often there are multiple noise spot and the feelings of two Mark points in visual field in m
Condition, therefore the recognition methods of traditional template matching can not meet the scribing requirement of reality.
Summary of the invention
The technical problem to be solved in the present invention is to provide the substrate position identification of a kind of laser scribing means image identification system
Processing method, the method accuracy of identification is high, identification certainty is good.
In order to solve above-mentioned technical problem, the substrate position identifying processing of the laser scribing means image identification system of the present invention
Method comprises the steps:
Step one, image binaryzation process:
The view picture figure gathered is done gray count, obtains its gray average and using this gray average as binary-state threshold；
When the gray value of pixel is more than this binary-state threshold in image, it is set as 1, is otherwise 0, obtains binary image；Two-value
Change in image be 0 pixel be " stain "；
Step 2, image Mark point is done rim detection:
Described Mark point is spider graph；In selected image-region, respectively both horizontally and vertically from surrounding
Carrying out gray value detection to field of view center, the vertical coordinate of " stain " in the often row pixel finding above-below direction is averaged,
Obtain the horizontal centre dotted line of spider；The abscissa of " stain " in each column pixel finding left and right directions is averaged,
Obtain the vertical centre dotted line of spider；
Step 3: Mark dot center line detection:
1) for spider horizontal centre dotted line, any point is taken on image as the initial point of rectangular coordinate system；Set up one
Two dimension accumulator array (Ay [ρ1,θ1], Ay [ρ2,θ2] ... Ay [ρi,θi]…Ay[ρn,θn])；θiIn the angular range set
Value；
2) Ay [ρ is initializedi,θi]=0；Point on the dotted line of center is mapped in polar coordinate system parameter space, obtains correspondence
Sinusoidal line；
For any point J on the dotted line of center, by its rectangular coordinate (xj, yj) substitute into formula (1), calculate θ1, θ2...
θi... θnThe most corresponding ρ value, i.e. ρj1, ρj2..., ρji, ρjn, obtain this central point and be mapped in polar coordinate system parameter space
Sinusoidal line；
ρji=xjcosθi+yjsinθi (1)
Often obtain a central point and be mapped to sinusoidal line in polar coordinate system parameter space, it is judged that this sinusoidal line with obtain before
Sinusoidal line whether have intersection point；For any point J, if sinusoidal line corresponding to this point has intersection points B with the sinusoidal line obtained before0
(ρjo,θo), then by the array element Ay [ρ in corresponding two-dimentional accumulator arrayo,θo] add 1；The like, until obtaining center
The sinusoidal line being mapped to a little on dotted line in polar coordinate system parameter space and the intersection point of these sinusoidal line, finally give two dimension tired
Add device array (Ay [ρ1,θ1], Ay [ρ2,θ2] ... Ay [ρi,θi]…Ay[ρn,θn]) voting result；In two dimension accumulator array
Finding the array element of maximum in voting result, the intersection point that this array element is corresponding is central point horizontal polar coordinate ginseng
Number；
Use the method as calculating central point horizontal line pole coordinate parameter, obtain the polar coordinate ginseng of central point vertical line
Number；
Step 4, pole coordinate parameter according to spider horizontal line and spider vertical line obtain the pole of spider intersection point and sit
Mark.
In described step 2, after entire image edge is removed 20 pixels, take mid portion as selected image
Region.
In described step 3, θiThe angular range set is as [85 °, 95 °].Can need between set angle according to available accuracy
Every, take equiangularly spaced or the most equiangularly spaced.In two dimension accumulator array of the present invention, take equiangularly spaced, adjacent
Array element θiAngle interval take 0.1 °.
Further, present invention additionally comprises the step gathering spectral discrimination, this step is as follows:
If the discrete pixel that the binary image intermediate value that step one obtains is 0 and the value of surrounding pixel point is 1 is for " to make an uproar
Point "；Judge in binary image, whether " noise " number exceedes the noise amount threshold of setting, be to judge current image date
Mistake, does not identifies；Otherwise carry out step 2；The noise amount threshold wherein set is more than or equal to 1% and less than or equal to 3%.
Further, present invention additionally comprises identification point coordinate determination step；This step is as follows:
The spider intersection point obtained for step 3, in about 30 × 30 pixel coverages, if binary image
Intermediate value is that the pixel quantity of 1 is more than the 20% of total pixel quantity, then it is assumed that be wrong identification image, otherwise it is assumed that step 3
In the rectangular coordinate of spider intersection point that obtains correct.
Beneficial effects of the present invention:
When image Mark point is done rim detection by the present invention, in selected image-region, carry out gray value detection, thus
The horizontal centre dotted line obtained and vertical centre dotted line, it is possible to rejection image marginal interference, improve spider identification accuracy；?
In the line detection of Mark dot center, the central point on the dotted line of spider center is transformed into the sine of rectangular coordinate system parameter space
Line, by straight line ask for be converted into asking for of intersection point pole coordinate parameter between sinusoidal line, accuracy of identification is high, good reliability；For
Image has the situation of bigger noise jamming, by the ratio shared by " noise " as judgment basis, it is possible to effectively judge side by side
Except error image, it is ensured that without the problem of misrecognition.Present invention can be suitably applied to laser scribing (line) needs such as machine or laser cutting machine
The equipment of image recognition processing.
Accompanying drawing explanation
With detailed description of the invention, the present invention is described in further detail below in conjunction with the accompanying drawings.
Fig. 1 is image identification system hardware block diagram.
Fig. 2 is the substrate position identifying processing method flow diagram of the laser scribing means image identification system of the present invention.
Fig. 3 is the process image to be identified containing Mark point that CCD camera Real-time Collection arrives.
Fig. 4 is finely to detect through edge, the pixel coordinate distribution situation figure drawn.
Fig. 5 is the parameter list diagram of rectangular coordinate system parameter space straight line in hough conversion.
Fig. 6 is the expression figure that in hough conversion, center dotted line is mapped to polar coordinate system parameter space.
Fig. 7 be identified after, the center position coordinates of Mark point is done the image judged.
Detailed description of the invention
The image identification system of the present invention is as follows:
As it is shown in figure 1, industrial computer 1 controls slide holder 4 moves the position making substrate motion to CCD camera 3, and make on substrate
Mark point enter CCD camera 3 visual field in；Industrial computer 1 obtains the signal that puts in place from linear electric motors XY platform, industry control simultaneously
Machine 1 triggers CCD camera 3 and gathers piece image, as shown in Figure 3.Via image pick-up card 2, view data is transferred to industrial computer 1
In, it is handled as follows after obtaining view data by industrial computer 1, as shown in Figure 2:
Step one, collection spectral discrimination:
Image owing to gathering is formed by cutting ceramic by laser substrate, by technique and environmental effect in cutting process,
Cause fraction substrate to have dust to be attached on substrate and Mark point, image recognition is produced noise jamming, therefore is identifying image
Before " noise " number in image is judged.In piece image, view picture figure is done gray count, obtain its gray scale equal
Value, as binary-state threshold.When the gray value at image midpoint is more than this binary-state threshold, it is set as 1, is otherwise 0, obtains two
Value image, its intermediate value be the pixel of 0 be " stain "." noise " is in binary image, and value is 0 and surrounding pixel point
Value is discrete " stain " of 1.
When " noise " number exceedes the noise amount threshold of setting in piece image, then judge that current image date is wrong
By mistake, do not identify.The noise amount threshold set is as 1%, 2% or 3%.
Determine view data correct after, it is handled as follows:
Step 2, image Mark point is done rim detection:
Mark dot image owing to gathering is affected by light-source brightness, substrate scribing process, for the reliability identified, is dividing
Taking middle 620 × 460 pixels in the range of 640 × 480 pixels of resolution, rejection image marginal interference is identified.
Mark point is spider graph.The binary image obtaining step one detects, the often row pixel finding above-below direction
In the vertical coordinate of " stain " average, the abscissa of " stain " in each column pixel finding left and right directions is averaged
Value, obtains the center dotted line of spider.As shown in Figure 4, discrete in image stain is " noise " and spider detected
Edge pixel point, the middle dotted line in spider edge pixel point is the spider center dotted line obtained.
Step 3, the line detection of Mark dot center:
1) the spider center dotted line owing to obtaining in step 2 is a series of level of approximation line and the discrete point of vertical line,
So extracting the key that rectilinear coordinates equation is the present invention from these discrete points accurately.Horizontal line has 620 discrete points,
Vertical line has 460 discrete points, if cannot ensure the precision of recognizer with simple fitting a straight line, therefore takes hough to become
Change and straight line is detected.The principle of this conversion is: through step 2) each some correspondence in the spider center dotted line that obtains
The straight line in rectangular coordinate system parameter space, as it is shown in figure 5, the straight line of rectangular coordinate system parameter space is corresponding
A point in image.In original image straight a little, their slope and intercept are identical, so they are directly
Angle coordinate system parameter space corresponds to same point.So each spot projection on the dotted line of spider center to rectangular coordinate system is joined
After under number space, the accumulation point under rectangular coordinate system parameter space is just corresponding straight line that central point is linked to be.Due to horizontal line ten
The equation of word fork is x=c, and the slope of straight line is infinitely great.The equation of y=kx+b form cannot represent.So in the present invention
In the hough conversion of application, parametric polar equation ρ=xcos θ+ysin θ is used to represent.(ρ, θ) represents under rectangular coordinate system
Straight line.Wherein ρ is this straight line distance to initial point, and θ is the vertical line angle with X-axis of this straight line, and span is
[0°,180°].As shown in Figure 6.Under polar coordinate representation, in the dotted line of spider center, the point transformation of conllinear is to polar coordinate system parameter
Behind space, all intersecting at a bit at parameter space, (ρ, the θ) that now obtain is the pole coordinate parameter of required straight line.Sit in pole
Under mark represents, it is sinusoidal line that the point in image is mapped to polar coordinate system parameter space.Now, the straight line side that image midpoint forms is asked
Journey translates into the coordinate found intersection.
2) in the present invention, the horizontal computation processing method of spider is: set up a two-dimentional accumulator array (Ay [ρ1,
θ1], Ay [ρ2,θ2] ... Ay [ρi,θi]…Ay[ρn,θn]).Zero can take any point on image (with in level in Fig. 4
A little as initial point bottom heart dotted line).ρ1、ρ2、……ρi、……ρnSpan be [0,460]；Due to calculate it is
Horizontal vertical coordinate, for the fast reliability judged, only judges at valid interval, therefore θi(i=1,2 ..., n)
Span be [85 °, 95 °], as shown in Figure 4.θiCan value or unequal interval value at equal intervals.It is spaced the least detection essence
Spend the highest, θ in the present inventioniValue at equal intervals, θiWith θi-1Angle be spaced apart 0.1 °.
3) Ay [ρ is initializedi,θi]=0.Point on the dotted line of center is mapped in polar coordinate system parameter space, obtains correspondence
Sinusoidal line.For any point J on the dotted line of center, by its rectangular coordinate (xj, yj) substitute into formula (1), calculate θ1, θ2...
θi... θnThe most corresponding ρ value, i.e. ρj1, ρj2..., ρji, ρjn, obtain this central point and be mapped in polar coordinate system parameter space
Sinusoidal line；
ρji=xjcosθi+yjsinθi (1)
Specific as follows:
As shown in Figure 6, first by the coordinate (x of first discrete central point on horizontal centre dotted line1, y1) substitute into formula
(1) first pole coordinate parameter (ρ corresponding to discrete central point, is calculated11, θ1), (ρ12, θ2) ..., (ρ1i, θi)……(ρ1n,
θn), obtain Article 1 sinusoidal line A1；Again by the coordinate (x of second discrete central point2, y2) substitute into formula (1), calculate second
Pole coordinate parameter (the ρ that individual discrete central point is corresponding21, θ1), (ρ22, θ2) ..., (ρ2i, θi)……(ρ2n, θn), obtain second
Sinusoidal line A2；By that analogy, by being mapped to a little in polar coordinate system parameter space on the dotted line of center, the sine of correspondence is obtained
Line A3, A4, A5, A6...AN, 3 < N < 620.As shown in Figure 6, A2 Yu A1 intersects at B1 point, it is assumed that the polar coordinate that B1 point is corresponding are
(ρ21,θ1) (or (ρ11,θ1), ρ21=ρ11), then by array element Ay [ρ1,θ1] add 1, Ay [ρ during owing to initializing1,θ1]=
0, so now Ay [ρ1,θ1]=1.A3 Yu A1, A2 intersect at B1 point simultaneously, then by Ay [ρ1,θ1] add 1 again, i.e. Ay [ρ1,θ1]=
2；A4 Yu A1, A2, A3 intersect at B2, B4, B6 point respectively, it is assumed that the polar coordinate that B2, B4, B6 are corresponding are respectively (ρ42,θ2)、(ρ43,
θ3)、(ρ46,θ6), then by Ay [ρ2,θ2]、Ay[ρ3,θ3]、Ay[ρ6,θ6] add 1 respectively.By that analogy, until all discrete in
The sinusoidal line that heart point maps calculates and terminates, and obtains two dimension accumulator array voting result；Maximum is found in this voting result
Array element, the pole coordinate parameter that this array element is corresponding, it is the horizontal polar coordinate of central point, straight in its correspondence image
Central point quantity on the horizontal line that line comprises is most.As a example by shown in Fig. 6, totally 7 sinusoidal line are at θiIn span respectively
Intersecting, intersection point is respectively B1, B2, B3...B6, the corresponding array element Ay [ρ finally obtained1,θ1]=2, Ay [ρ2,θ2]=1,
Ay[ρ3,θ3]=1, Ay [ρ4,θ4]=1, Ay [ρ5,θ5]=1, Ay [ρ6,θ6]=4；Due to Ay [ρ6,θ6] maximum, so the pole of B6
Coordinate (ρ66,θ6) it is the horizontal polar coordinate of required spider.In like manner, the polar coordinate of spider vertical line, wherein θ i can be obtained
Span can be [-5 °, 5 °].Spider is obtained finally according to the horizontal polar coordinate of spider vertical line and spider
The rectangular coordinate of intersection point.
4) identification point coordinate judges: owing to the substrate of laser scribing machine equipment cutting is relatively costly, the image recognition of mistake
Directly affect the positional precision of cutting, cause the substrate of cutting can not meet required precision and scrap, thus the most right
The coordinate of identification point judges.As it is shown in fig. 7, the width of usual spider center dotted line is 20 pixel values, therefore at cross
Do gray scale in 30 pixel value range in fork XY direction, center to judge.Ideally, the some two-value in gray scale judges district
Change process after, value be the some number of 0 be 800 pixel values, be that the some number of 1 is 100 pixel values, it is contemplated that the shadow of " noise "
Ring, if after binary conversion treatment value be 1 pixel be more than total pixel number 20%, be wrong identification image.When being judged to
During the image of error in data and wrong identification, industrial computer sends the process instruction being judged to error image, and the motion of slide glass platform will
Reject bin put into by substrate, otherwise carries out scribing work.
Claims (5)
1. the substrate position identifying processing method of a laser scribing means image identification system, it is characterised in that include walking as follows
Rapid:
Step one, image binaryzation process:
The view picture figure gathered is done gray count, obtains its gray average and using this gray average as binary-state threshold；Work as figure
When the gray value of pixel is more than this binary-state threshold in Xiang, it is set as 1, is otherwise 0, obtains binary image；Binary picture
In Xiang be 0 pixel be " stain "；
Step 2, image Mark point is done rim detection:
Described Mark point is spider graph；In selected image-region, both horizontally and vertically regarding from four circumferences respectively
Center, field carries out gray value detection, and the vertical coordinate of " stain " in the often row pixel finding above-below direction is averaged, and obtains
The horizontal centre dotted line of spider；The abscissa of " stain " in each column pixel finding left and right directions is averaged, and obtains
The vertical centre dotted line of spider；
Step 3: Mark dot center line detection:
1) for spider horizontal centre dotted line, any point is taken on image as the initial point of rectangular coordinate system；Set up a two dimension
Accumulator array (Ay [ρ1,θ1], Ay [ρ2,θ2] ... Ay [ρi,θi]…Ay[ρn,θn])；θiValue in the angular range set；
2) Ay [ρ is initializedi,θi]=0；Point on the dotted line of center is mapped in polar coordinate system parameter space, is just obtaining correspondence
The string of a musical instrument；
For any point J on the dotted line of center, by its rectangular coordinate (xj, yj) substitute into formula (1), calculate θ1, θ2... θi... θn
The most corresponding ρ value, i.e. ρj1, ρj2..., ρji, ρjn, obtain the sine that this central point is mapped in polar coordinate system parameter space
Line；
ρji=xjcosθi+yjsinθi (1)
Often obtain a central point and be mapped to sinusoidal line in polar coordinate system parameter space, it is judged that this sinusoidal line with just obtain before
Whether the string of a musical instrument has intersection point；For any point J, if sinusoidal line corresponding to this point has intersection points B 0 (ρ with the sinusoidal line obtained beforejo,
θo), then by the array element Ay [ρ in corresponding two-dimentional accumulator arrayo,θo] add 1；The like, until obtaining center dotted line
The upper sinusoidal line being mapped to a little in polar coordinate system parameter space and the intersection point of these sinusoidal line, finally give two dimension accumulator
Array (Ay [ρ1,θ1], Ay [ρ2,θ2] ... Ay [ρi,θi]…Ay[ρn,θn]) voting result；In two dimension accumulator array voting
Finding the array element of maximum in result, the intersection point that this array element is corresponding is the horizontal pole coordinate parameter of central point；
Use the method as calculating central point horizontal line pole coordinate parameter, obtain the pole coordinate parameter of central point vertical line；
Step 4, pole coordinate parameter according to spider horizontal line and spider vertical line obtain the polar coordinate of spider intersection point.
The substrate position identifying processing method of laser scribing means image identification system the most according to claim 1, its feature
It is in described step 2, after entire image edge is removed 20 pixels, takes mid portion as selected image-region.
The substrate position identifying processing method of laser scribing means image identification system the most according to claim 1 and 2, it is special
Levy and be in described step 3, θiThe angular range set is as [85 °, 95 °].
The substrate position identifying processing method of laser scribing means image identification system the most according to claim 1, its feature
Being the step also including gathering spectral discrimination, this step is as follows:
If the discrete pixel that the binary image intermediate value that step one obtains is 0 and the value of surrounding pixel point is 1 is " noise "；
Judge in binary image, whether " noise " number exceedes the noise amount threshold of setting, be then to judge that current image date is wrong
By mistake, do not identify；Otherwise carry out step 2；The noise amount threshold wherein set is more than or equal to 1% and less than or equal to 3%.
5., according to the substrate position identifying processing method of the laser scribing means image identification system described in claim 1 or 4, it is special
Levy and be also to include identification point coordinate determination step；This step is as follows:
The spider intersection point obtained for step 3, in about 30 × 30 pixel coverages, if binary image intermediate value
Be 1 pixel quantity more than the 20% of total pixel quantity, then it is assumed that be wrong identification image, otherwise it is assumed that in step 3
The rectangular coordinate of the spider intersection point arrived is correct.
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| CN112505055A (en) * | 2021-02-03 | 2021-03-16 | 苏州维嘉科技股份有限公司 | Method and device for detecting copper leakage of circuit board |
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| CN115031633A (en) * | 2022-08-11 | 2022-09-09 | 长春光华微电子设备工程中心有限公司 | On-board detection system of laser scribing machine and detection method thereof |
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| CN108398946B (en) * | 2018-01-25 | 2021-12-21 | 成都图灵时代科技有限公司 | Intelligent tracking accurate positioning device and method |
| CN109345550A (en) * | 2018-08-07 | 2019-02-15 | 信利光电股份有限公司 | The grasping means of hot spot angle point, device and the readable storage medium storing program for executing of structure light image |
| CN109961067A (en) * | 2019-03-19 | 2019-07-02 | 上海望友信息科技有限公司 | Choosing method, system, computer storage medium and the equipment of optical reference point |
| CN112614094A (en) * | 2020-12-15 | 2021-04-06 | 郑州金惠计算机***工程有限公司 | Insulator string abnormity positioning and identifying method based on sequence state coding |
| CN112614094B (en) * | 2020-12-15 | 2023-04-18 | 郑州金惠计算机***工程有限公司 | Insulator string abnormity positioning and identifying method based on sequence state coding |
| CN112505055A (en) * | 2021-02-03 | 2021-03-16 | 苏州维嘉科技股份有限公司 | Method and device for detecting copper leakage of circuit board |
| CN114627141A (en) * | 2022-05-16 | 2022-06-14 | 沈阳和研科技有限公司 | Cutting path center detection method and system |
| CN114627141B (en) * | 2022-05-16 | 2022-07-22 | 沈阳和研科技有限公司 | Cutting path center detection method and system |
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