CN106092374A - Multi-point temp element is heated detection method - Google Patents
Multi-point temp element is heated detection method Download PDFInfo
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- CN106092374A CN106092374A CN201510216678.8A CN201510216678A CN106092374A CN 106092374 A CN106092374 A CN 106092374A CN 201510216678 A CN201510216678 A CN 201510216678A CN 106092374 A CN106092374 A CN 106092374A
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Abstract
A kind of multi-point temp is heated detection method, comprising: has a normal temperature element and multiple dut temperature element, is electrically connected with detection device with normal temperature element and multiple dut temperature element, sets up data on detection device.Set up data to finish, detection the set up data of device computing the data storing computing, normal temperature element and multiple dut temperature element are put in heating furnace and heat.The test temperature that the actual temperature measuring normal temperature element and multiple dut temperature elements measure reaches detection device, carry out error analysis, if it is determined that error amount is in setting range, it is qualified to judge, if it is determined that error amount is not in setting range, judge defective, and record data and make calibration curve and report, whether normal to analyze in data judge heating furnace the sensing temperature element installed.
Description
Technical field
The present invention relates to one to heat bearing calibration, particularly relate to a kind of be installed in order to detect inside heating furnace
Temperature sensor element whether normal or damage.
Background technology
All possess the heating furnace (or constant temperature oven) having, this heating furnace at present in semiconductor factory, chemical plant
It is the heater utilizing in temperature controller control heating furnace, make heater can enter the article in heating furnace
Row heats.
With the heating-up temperature of induction heater whether general inside heating furnace all has a temperature sensor element,
There is the temperature reaching required.After heating furnace uses a period of time, the temperature sensor element in stove will certainly be sent out
The facts that is raw aging or that damage, causes cannot sensing accurately when the heating-up temperature within induction heater,
Now just temperature sensor element must be pulled down and detect, whether problematic to detect sensing element.
Owing to heating furnace because the place using is different, and can have different heating-up temperatures, therefore detect unit
When detection, the heating furnace of different heating temperature just must be prepared (in such as normal temperature is reality measurement heating furnace
Time measuring temperature, when 25% be measuring temperature be 125 DEG C, when 50% be measuring temperature be 250 DEG C,
When 75% be measuring temperature be 375 DEG C, when 100% be measuring temperature be 500 DEG C).When detection,
Carry out detection of heating by temperature sensor element being pulled down to be placed in different heating furnaces, consequently, it is possible to inspection
Measurement equipment cost of investment is too high, and the man-hour and the operation that are spent during detecting are also more.
Content of the invention
Therefore, the main object of the present invention, is to solve tradition disappearance, it is to avoid disappearance exists, and the present invention is only
Utilize a normal temperature element and multiple dut temperature element arrangements in specific distance, and put in one
In heating furnace (or constant temperature oven), enter to carry out the sensing detection of different temperatures, to reduce detection equipment cost,
Detection process is made to be more prone to simplify, it is possible to decrease the man-hour being spent during detection and operation.
It is another object of the present invention to normal temperature element and multiple dut temperature element can oneself detect,
Judge to detect whether correctly.
In order to achieve the above object, the present invention provides a kind of multi-point temp to heat detection method, in order to detect heating
Whether the temperature sensor element that furnace interior is installed is normal, comprising: have a normal temperature element and multiple quilt
Testing temperature element, then have a detection device, this detection device and this normal temperature element and those are by thermometric
After degree element is electrically connected with, setting up data in this detection device.Then, setting up after data finish, should
Data Data after computing after computing finishes, and is stored by the set up data of computing of detection device, then
Put into normal temperature element and those dut temperature elements in heating furnace.Finally, at heating furnace in heating
During, the actual temperature that this normal temperature element is measured and those dut temperature elements are measured
Test temperature reaches in this detection device, is carried out actual temperature by this detection device and divides with the error testing temperature
Analysis, if it is determined that error amount is in setting range, it is qualified to decide that, if it is determined that error amount is not in setting range,
Just defective in judgement, and whether just to analyze in data judge heating furnace the sensing temperature element installed
Often.
In one embodiment of this invention, this normal temperature element and those dut temperature elements are when arrangement,
Centered on normal temperature element, those dut temperature elements, should to be located on this normal temperature element periphery
Having a specific distance between dut temperature element and this normal temperature element a bit, this specific distance is 5cm；
This normal temperature element and those dut temperature elements are strip or irregular sensing temperature element (TE.
In one embodiment of this invention, when this detection device sets up data, this detection device shows sets up number
According to picture, this each field set up in data include a customer name field, an engineering name field, one
File name field, a numbering select field, a data entry field, a type field, a design temperature
Field, an admissible error field, current actual value (normal temperature) field, a current test value, one miss at present
Difference, a line key, one archive key, a single setting key, whole setting keys, one field selection key and
One confirms to update key；Aforesaid data entry field has further included a number field, a label field and
One sequence number field.
In one embodiment of this invention, after data are set up, when pressing this single setting key, can be single
Row field shows numbering, label, sequence number, actual temperature, test can be shown in same row when detection
Temperature, error and result of determination；
In one embodiment of this invention, after data are set up, when pressing this whole setting key, can be each
Row field shows numbering, label, sequence number, actual temperature, test can be shown in same row when detection
Temperature, error and result of determination.
In one embodiment of this invention, further include analyze judge after, with detection device records data or by
By visual record data, and show acceptance or rejection on the display screen of detection device.
In one embodiment of this invention, further include and drawing correction graph according to record data, and show
On this display screen.
In one embodiment of this invention, further include and reach this printing in record analysis data and correction graph
On machine, printer is printed off record analysis data and correction graph makes form.
In one embodiment of this invention, further include and be this normal temperature element and those dut temperature elements
Between oneself detection, this normal temperature element measure temperature data respectively measure with those dut temperature elements
The temperature data surveyed, not in setting range, i.e. represents normal temperature element fault or damage.
In one embodiment of this invention, this detection device includes: an arithmetic element, one operation interface, one
Storage element, a display screen and an output interface.This arithmetic element and this normal temperature element and those are tested
Temperature element (TE is electrically connected with, in order to the set up data of computing and this normal temperature element and those dut temperature units
The actual temperature that part is measured and test temperature, and analyze the error amount of actual temperature and test temperature, and
Judge temperature element (TE acceptance or rejection according to error amount, and record data, draw further according to record data and make
Correction graph.This operation interface is made up of multiple buttons, and is electrically connected with this arithmetic element, with this
Multiple key-press inputs are detected the data of heating furnace, and reach computing in this arithmetic element.This storage element
It is electrically connected with this arithmetic element, to store the various record analysis data after the computing of arithmetic element institute.This shows
Show that curtain is electrically connected with this arithmetic element, set up data display, correction data table and calibration curve in order to show
Figure.This output interface is electrically connected with this arithmetic element, and this output interface is electrically connected with outside printer,
Record analysis data and the correction graph of analyzed for this arithmetic element acceptance or rejection are reached printer
On, make report to print off this record analysis data and curve map.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as to the present invention's
Limit.
Brief description
Fig. 1, the multi-point temp of the present invention is heated detection method schematic flow sheet；
Fig. 2, the normal temperature element of the present invention and multiple dut temperature element arrangements schematic diagrames；
Fig. 3, the detection device of the present invention, normal temperature element, dut temperature element connect with heating furnace configuration
Connect schematic diagram；
Fig. 4, the present invention sets up data display schematic diagram；
Fig. 5, the calibration curve schematic diagram of the present invention；
Fig. 6, the temperature element (TE test/checking list schematic diagram of the present invention.
Wherein, reference
Normal temperature element 1
Dut temperature element 2a～2h
Detection device 3
Arithmetic element 31
Operation interface 32
Storage element 33
Display screen 34
Output interface 35
Set up data display 36
Customer name field 361
Engineering name field 362
File name field 363
Numbering selects field 364
Data entry field 365
Number field 3651
Label field 3652
Sequence number field 3653
Type field 366
Design temperature field 367
Admissible error field 368
Current actual value field 369
Current test value 360
Current error amount 3601
Line key 3602
Achieve key 3603
Single setting key 3604
Whole setting keys 3605
Field selects key 3606
Confirm to update key 3607
Heating furnace 4
Temperature controller 41
Heater 42
Report 5
Set up data 51
Correction data 52
Calibration curve Figure 53
Tester 54
Proofer 55
Date 56
Measuring unit 57
Detailed description of the invention
The technical content and a detailed description hereby for the present invention, coordinate brief description as follows now:
Referring to Fig. 1 and Fig. 2, the multi-point temp of the present invention is heated detection method flow process and normal temperature element
With multiple dut temperature element arrangements schematic diagrames.As shown in the figure: the multi-point temp of the present invention is heated detection method,
Whether just to judge the temperature sensor element of inside heating furnace at detection heating furnace (or constant temperature oven) warm-up mode
Often or damage, and analyze heating furnace whether acceptance or rejection, and data record can be analyzed, and
It is drawn as correction graph and makes report, to analyze in data judge heating furnace the sensing temperature element installed
Whether normal.
First, step 100, has a normal temperature element 1 and multiple dut temperature element 2a～2h,
During arrangement, centered on normal temperature element 1, those dut temperature elements 2a～2h is to be located on this standard
Temperature element (TE 1 periphery, those dut temperature elements 2a～there is between 2h and this normal temperature element 1 spy
Determining deviation d, this specific distance is 5cm, to avoid the temperature between those dut temperature elements 2a～2h to do
Disturb.And, the normal temperature element 1 of the present invention is through whole nation certification foundation (Taiwan Accreditation
Foundation, TAF) certification.In detail in this figure, this normal temperature unit 1 and those dut temperature elements 2a～2h
For strip or irregular sensing temperature element (TE.
Step 102, then have a detection device, when setting up data, this detection device (not shown)
Can show on display screen and set up data display, this each field set up on data display includes a customer name
Field, an engineering name field, a file name field, one numbering select field, a data entry field,
One type field, a design temperature field, an admissible error field, current actual value (normal temperature) field,
One current test value, a current error amount, a line key, an archive key, a single setting key, one whole
Setting key, a field select key and to confirm to update key.Further include one in aforesaid data entry field
Number field, a label field and a sequence number field.After data are set up, when pressing this single setting key,
Numbering, label, sequence number can be shown in single row field, actual temperature can be shown in same row when detection
Degree, test temperature, error and judged result.And, after data are set up, when pressing this whole setting key,
Numbering, label, sequence number can be shown in each row field, actual temperature can be shown in same row when detection
Degree, test temperature, error and judged result.Also, in measuring temperature scope at normal temperature, the 25%th, the 50%th,
75% and 100%, such as, when temperature is set in 500 DEG C, in normal temperature measures heating furnace for reality, the time measures
Testing temperature, when 25% be measuring temperature be 125 DEG C, when 50% be measuring temperature be 250 DEG C, 75%
When be measuring temperature be 375 DEG C, when 100% be measuring temperature be 500 DEG C.
Step 104, computing sets up data, is setting up after data finish, the arithmetic element root of this detection device
Start computing according to the data being inputted.In detail in this figure, this arithmetic element is microprocessor.
Step 106, after arithmetic element computing finishes, and it is single that the Data Data after computing is stored in storage
In Yuan.In detail in this figure, this storage element is memory body.
Normal temperature element 1 and those dut temperature elements 2a～2h are put in heating furnace (figure by step 108
In do not show) in the middle of, and by this normal temperature element 1 and multiple dut temperature element 2a～2h and detection device
It is electrically connected with.
Step 110, is placed at above-mentioned normal temperature element 1 and those dut temperature elements 2a～2h
After heating furnace, this heating furnace begins to warm up.
Step 112, in heating process, actual temperature that this normal temperature element 1 is measured and those
The test temperature that dut temperature element 2a～2h is measured reaches in this detection device, is entered by this detection device
Row actual temperature and the error analysis of test temperature, if it is determined that error amount (%) is in setting range, just sentencing
Determine " qualified " described in result field, if it is determined that error amount (%) is not in setting range, just judging knot
Really " defective " described in field.
Step 114, after analyzing judgement, uses visual record by detection device records data or by part survey person
Data, and show acceptance or rejection on the display screen of detection device.
Step 116, is drawing correction graph according to record analysis data, and is being shown on this display screen.
Step 118, makes report, reaches on this printer in above-mentioned record data and correction graph, by
Printer prints off record analysis data and correction graph.
Further, oneself can be carried out between this normal temperature element 1 and those dut temperature elements 2a～2h
Detection, the temperature data measuring when normal temperature element 1 respectively measures with those dut temperature elements 2a～2h
Temperature data, not in setting range, i.e. represents normal temperature element 1 fault or damage, such as when standard temperature
The temperature data 100 DEG C that degree element 1 measures, the temperature data that those dut temperature elements 2a～2h respectively measures
Normal temperature element 1 fault or damage can be represented when being 50 DEG C.
Refer to Fig. 3, the detection device of the present invention and normal temperature element, dut temperature element and heating furnace
Configuration connects circuit box schematic diagram.As shown in the figure: this detection device 3 includes: an arithmetic element is the 31st,
One operation interface the 32nd a, storage element the 33rd, a display screen 34 and an output interface 35.
This arithmetic element 31, electrically connects with this normal temperature element 1 and those dut temperature elements 2a～2h
Connect, measured with those dut temperature elements 2a～2h in order to the set up data of computing and this normal temperature element 1
The actual temperature measuring and test temperature, and analyze the error amount of actual temperature and test temperature, and according to by mistake
Difference judges temperature element (TE acceptance or rejection, and record analysis data, draws system further according to record analysis data
Become correction graph, make correction graph further according to record analysis data and picture and make report.
This operation interface 32, is made up of multiple buttons, and is electrically connected with this arithmetic element 31, with this
Multiple key-press inputs are detected the data of heating furnace, and reach computing in this arithmetic element 31.
This storage element 33, is electrically connected with this arithmetic element 31, to store 31 computings of arithmetic element
After various record analysis data.In detail in this figure, this storage element 33 is memory body.
This display screen 34, is electrically connected with this arithmetic element 31, sets up data display, correction in order to show
Tables of data and correction graph.
This output interface 35, is electrically connected with this arithmetic element 31, and this output interface 35 and outside beat
Print machine (not shown) is electrically connected with, and this arithmetic element 31 can be analyzed the note of deciliter acceptance or rejection
Data are analyzed in record and correction graph reaches on printer, make report to print off this analysis data and curve map
Accuse.In detail in this figure, this output interface is connector (USB) or is wirelessly transferred module.
Refer to Fig. 3～Fig. 5, the detection device of the present invention and normal temperature element, dut temperature element and add
The configuration of hot stove connects and sets up data display and calibration curve schematic diagram, refers in the lump shown in Fig. 2 simultaneously.
As shown in the figure: the present invention carry out heating furnace 4 measure when, first by this normal temperature element 1 and those are tested
It is internal that temperature element (TE 2a～2h is positioned over this heating furnace 4, and by this normal temperature element 1 and those are by thermometric
Degree element 2a～2h is electrically connected with the arithmetic element 31 of detection device 3, when measuring, and detection dress
Putting and showing on the display screen 34 of 3 and set up data display 36, this sets up each field on data display 36
Include a customer name field the 361st, an engineering name field the 362nd a, file name field the 363rd,
Numbering selects field the 364th a, data entry field the 365th a, type field the 366th, a design temperature field
367th, an admissible error field the 368th, current actual value (normal temperature) field the 369th, a current test value is the 360th,
One current error amount the 3601st, a line key the 3602nd, archive key the 3603rd, a single setting key the 3604th,
Whole setting keys the 3605th, field selects key 3606 and to confirm to update key 3607.Defeated in aforesaid data
Enter field 365 has further included a number field the 3651st, a label field 3652 and a sequence number field 3653.
A correction data table (as shown in the table) is had more setting up, aforementioned set up data and measurement point below data
The data of analysis are all automatically recorded in this correction data table and (the present invention is directed to following correction data table and do single row
Explanation of field).
After setting up data, it is 33.333 DEG C that normal temperature element 1 measures normal temperature, this dut temperature element
The test temperature that 2a measures is 33.335 DEG C, and after device 3 computing, error amount is 0.002 after testing.At normal temperature
Measurement finishes and followed by measures 25% temperature range, and now the temperature controller 41 of heating furnace 4 is to heater
(heater) 42 driving, when making this heater 42 be heated up to 125, this normal temperature element 1 measures normal temperature and is
249.333 DEG C, the test temperature that this dut temperature element 2a measures is 249.335 DEG C, device 3 after testing
After computing, error amount is 0.002.The rest may be inferred finish the measurement of different temperatures after, and judge that surveying error amount exists
It it is determined that qualified in setting range, and is shown in result of determination field, do not setting if it is determined that survey error amount
It it is determined that defective in the range of Ding, and is shown in result of determination field.After measurement completes, this detection
Device 1 can be drawn according to record data and make correction graph.
Correction data table:
Refer to Fig. 6, the temperature element (TE test/checking list schematic diagram of the present invention.As shown in the figure: work as the present invention
Heating furnace detection correction detection after, tester or principal can by the transmission of this data on printer,
Printing off this temperature element (TE test/checking list via printer becomes report 5.In detail in this figure, this temperature unit
Part test/checking list content includes at least and sets up data the 51st a, correction data the 52nd a, correction graph
53rd, a tester the 54th a, proofer the 55th, a date 56 and a measuring unit 57.
Certainly, the present invention also can have other various embodiments, in the feelings without departing substantially from present invention spirit and essence thereof
Under condition, those of ordinary skill in the art work as and can make various corresponding change and deformation according to the present invention, but
These change accordingly and deform the protection domain that all should belong to appended claims of the invention.
Claims (10)
1. multi-point temp is heated a detection method, in order to detect the temperature sensor unit that inside heating furnace is installed
Whether part is normal, it is characterised in that include:
A) a normal temperature element and multiple dut temperature element, are had；
B) a detection device, is had again, this detection device and this normal temperature element and those dut temperatures unit
After part is electrically connected with, setting up data in this detection device；
C), setting up after data finish, the set up data of computing of this detection device；
D), after computing finishes, and the Data Data after computing is stored；
E), put into normal temperature element and those dut temperature elements in heating furnace；
F), after above-mentioned normal temperature element and those dut temperature elements are placed on heating furnace, this adds
Hot stove begins to warm up；
G), in heating process, actual temperature and those dut temperatures that this normal temperature element is measured
The test temperature that element is measured reaches in this detection device, is carried out actual temperature and survey by this detection device
The error analysis of examination temperature, if error in judgement value is in setting range, it is qualified to decide that, if it is determined that error amount
Not in setting range, just defective in judgement, to analyze in data judge heating furnace the sensing installed
Whether temperature element is normal.
2. multi-point temp according to claim 1 is heated detection method, it is characterised in that in step
This normal temperature element of a and those dut temperature elements are when arrangement, centered on normal temperature element,
Those dut temperature elements are to be located on this normal temperature element periphery, those dut temperature elements and this standard
Having a specific distance between temperature element (TE, this specific distance is 5cm；This normal temperature is first and those are tested
Temperature element (TE is strip or irregular sensing temperature element (TE.
3. multi-point temp according to claim 2 is heated detection method, it is characterised in that in step
When the detection device of b sets up data, this detection device shows sets up data display, and it is each that this sets up in data
Field includes a customer name field, an engineering name field, a file name field, a numbering selection
Field, a data entry field, a type field, a design temperature field, an admissible error field, one
Current actual value (normal temperature) field, a current test value, a current error amount, a line key, one achieve key,
One single setting key, whole setting keys, a field select key and to confirm to update key；In aforesaid data
Input field has further included a number field, a label field and a sequence number field.
4. multi-point temp according to claim 3 is heated detection method, it is characterised in that in data
After foundation, when pressing this single setting key, numbering, label, sequence number can be shown in single row field,
Actual temperature, test temperature, error and result of determination can be shown in same row during detection.
5. multi-point temp according to claim 4 is heated detection method, it is characterised in that in data
After foundation, when pressing this whole setting key, numbering, label, sequence number can be shown in each row field,
Actual temperature, test temperature, error and result of determination can be shown in same row during detection.
6. multi-point temp according to claim 5 is heated detection method, it is characterised in that in step
Further include step h after g, after analyzing judgement, record number with detection device records data or by with visual
According to, and show acceptance or rejection on the display screen of detection device.
7. multi-point temp according to claim 6 is heated detection method, it is characterised in that in step
Further include i in steps after h and drawing correction graph according to record data, and be shown on this display screen.
8. multi-point temp according to claim 6 is heated detection method, it is characterised in that in step
Further include j in steps after i and reach on this printer in record analysis data and correction graph, by printer
Print record analysis data and correction graph makes form.
9. multi-point temp according to claim 8 is heated detection method, it is characterised in that in step
Oneself's inspection that k in steps is between this normal temperature element and those dut temperature elements is further included after j
Survey, the temperature data that the temperature data in the measurement of this normal temperature element respectively measures with those dut temperature elements
Not in setting range, i.e. represent normal temperature element fault or damage.
10. multi-point temp according to claim 9 is heated detection method, it is characterised in that in step
The detection device of b includes:
One arithmetic element, is electrically connected with this normal temperature element and those dut temperature elements, in order to computing
Actual temperature that set up data and this normal temperature element and those dut temperature elements are measured and survey
Examination temperature, and analyze the error amount of actual temperature and test temperature, and judge that temperature element (TE closes according to error amount
Acceptance or rejection, and record data, draw further according to record data and make correction graph；
One operation interface, is made up of multiple buttons, and is electrically connected with this arithmetic element, presses with the plurality of
The data of the detected heating furnace of key input, and reach computing in this arithmetic element；
One storage element, is electrically connected with this arithmetic element, to store the various notes after the computing of arithmetic element institute
Data are analyzed in record；
One display screen, is electrically connected with this arithmetic element, sets up data display, correction data table in order to show
And correction graph；And
One output interface, is electrically connected with this arithmetic element, and this output interface electrically connects with outside printer
Connect, record analysis data and the correction graph of analyzed for this arithmetic element acceptance or rejection are reached printing
On machine, print this record analysis data and curve map makes report.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112629707A (en) * | 2020-11-10 | 2021-04-09 | 贵州航宇科技发展股份有限公司 | Heating furnace system precision testing method |
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| CN104089718A (en) * | 2014-07-25 | 2014-10-08 | 上海华力微电子有限公司 | Constant temperature test system and temperature monitoring method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112629707A (en) * | 2020-11-10 | 2021-04-09 | 贵州航宇科技发展股份有限公司 | Heating furnace system precision testing method |
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Application publication date: 20161109 |