CN106092074B - Single-chip grade diamond colour center spin gyroscope and preparation method - Google Patents
Single-chip grade diamond colour center spin gyroscope and preparation method Download PDFInfo
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- CN106092074B CN106092074B CN201610385284.XA CN201610385284A CN106092074B CN 106092074 B CN106092074 B CN 106092074B CN 201610385284 A CN201610385284 A CN 201610385284A CN 106092074 B CN106092074 B CN 106092074B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/58—Turn-sensitive devices without moving masses
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
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Abstract
The present invention provides a kind of single-chip grade diamond colour center spin gyroscope, is prepared for concentration greater than 10 using MPCVD magnetic, electric constrained procedure18cm‑1Nitrogen-doping diamond lattic structure, diamond colour center waveguiding structure is prepared for using micro-nano technology process, realize excitation and space total reflection high efficiency collection entirely in the waveguide of NV colour center structure, the chip for realizing microwave, the coplanar manufacture of radio-frequency antenna and field-generating coil in combination with electron beam process method integrates, and the detection of gyro signal high s/n ratio is carried out by timing control method, invent a kind of diamond colour center spin gyroscope of single chip level.
Description
Technical field
It is specifically a kind of based on the coplanar integrated core of diamond colour center waveguide the present invention relates to atomic spin gyroscope field
Chip level atomic spin gyroscope.
Background technique
Developing deeply, second generation laser and optical fibre gyro be not domestic and international for the first generation three floating nearly with electrostatic high accuracy gyroscope instrument 30
Last decade becomes Hot spots for development based on the atomic gyroscope technology of quantum mechanics, micro-nano technique, is based on without obvious progress, the third generation
The gyroscope of atom technology can reach the limit of Precise physical measurement, and have the potentiality of micromation, integrated development, be used
Property airmanship realize long endurance, high-precision, low-power consumption, miniaturization emphasis direction.Wherein, solid-state diamond colour center is former
Sub- gyro due to its is Miniaturized, can Planar integration, the advantages such as low in energy consumption become after gaseous state magnetic resonance gyroscope, intervening atom top
Novel high-precision atomic gyroscope research hotspot and the following inertial navigation device development emphasis after spiral shell.
Summary of the invention
The present invention is directed to solid-state diamond colour center atomic spin gyro sensitlzing effect, proposes a kind of based on film color cardiac wave
It leads, the coplanar integrated chip grade diamond colour center atom laser gyroscope of plane microwave and radio frequency microstrip antenna, flat magnetic field generation coil
Instrument.
The present invention is achieved by the following technical scheme:
A kind of single-chip grade diamond colour center spin gyroscope, including diamond substrate, the diamond substrate upper surface
Middle part processes diamond NV colour center waveguide, and the diamond substrate upper surface grows the diamond refractive index of one layer of covering waveguide
With layer；The diamond substrate upper surface is located at diamond NV colour center waveguide two sides and processes micro-strip antenna array respectively；The gold
Hard rock substrate back central part processes field-generating coil.
Preferably, encapsulation card slot is machined in the diamond substrate.
Preferably, diamond NV colour center waveguide both ends connect laser input mouth and fluorescence by end coupling mode respectively
Signal output photoelectric detects port；The micro-strip antenna array connects microwave, RF signal input end by end coupling mode
Mouthful.
The present invention has fabricated high concentration colour center waveguiding structure in diamond surface using micro-nano manufacturing process first,
By the coplanar integrated micro of compatible technology, radio-frequency antenna and field coil, chip grade diamond colour center atomic gyroscope, tool are developed
Preparation is as follows:
(1), portion forms NV colour center film layer on a diamond substrate；
(2), the upper and lower surface of diamond substrate is polished；
(3), one layer of silicon oxide masking film layer of surface epitaxial growth on a diamond substrate；
(4), using lithography and etching technology, diamond NV colour center waveguide picture structure is prepared in image conversion transfer；
(5), diamond body structure etching is carried out using dry etching technology, forms diamond NV in the middle part of diamond substrate
Colour center waveguide；
(6), silicon oxide masking film layer is removed, then one layer of diamond refractive index matching layers of epitaxial growth, is wrapped as total reflection
Layer；
(7), chip-scale Planar integration and manufacture
(71), using electron beam evaporation technique, the Ti/ of one layer of 800 ~ 850nm is prepared in the diamond substrate processed
Pt/Au, wherein Ti is about 50nm ~ 100nm with a thickness of 100nm ~ 200nm, Pt thickness, and Au is with a thickness of 300nm ~ 600nm；
(72), using IBE lithographic technique, micro-strip is etched respectively positioned at the two sides of diamond NV colour center waveguide on substrate
Antenna structure；
(73), a layer photoresist is got rid of on a diamond substrate, and heat protects the surface structure of substrate after drying；
(74), diamond substrate turns, and repeats step (71) in lower surface, etches magnetic using IBE lithographic technique
Field generates coil；
(75) all solidstate encapsulates entire chip level structure, by end coupling mode, at diamond NV colour center waveguide both ends
It encapsulates laser input mouth and fluorescence signal output photoelectric detects port, in input terminal encapsulation microwave, the radio frequency letter of microstrip antenna
Number input port.
In use, applying electric current to coil by constant-current source generates stabilizing magnetic field.
Gyro signal high s/n ratio read method is as follows:
1, the NV colour center in waveguide is initialized using 532nm laser；Apply the magnetic field 500Gauss simultaneously and realizes core
Spin polarization, makes excited level cross relaxation, on electron population to+1 state；
2, after initialization and nuclear spin polarization, magnetic field steps to 10Gauss, keeps electron-spin polarization, then applies and penetrates
Frequency pi/2 pulse, pulse frequency 5.1MHz, by freely developing for T time, T is less than nuclear spin lateral relaxation time, then again
Secondary application radio frequency pi/2 pulse, pulse frequency 5.1MHz occur spin phase relevant, generate electronics population again, make phase
Modulation becomes intensity modulated；
3, then apply pi/2 microwave pulse signal and laser field, by reading electron population information, obtain believing with reference to gyro
Number S1 then applies pi/2 radio-frequency pulse and microwave pulse signal, reads again gyro signal S2, obtains high noise by comparison
The gyro signal of ratio.
The present invention has rational design, is prepared for concentration greater than 10 using MPCVD magnetic, electric constrained procedure18cm-1Nitrogen mix
Miscellaneous diamond lattic structure is prepared for diamond colour center waveguiding structure using micro-nano technology process, realizes NV colour center structure
Excitation and space total reflection high efficiency are collected entirely in waveguide, realize microwave, radio-frequency antenna in combination with electron beam process method
Coplanar manufacture and the chip of field-generating coil integrate, and gyro signal height letter is carried out by timing control method
It makes an uproar than detection, reaches necessary requirement.
Detailed description of the invention
Fig. 1 shows chip grade diamond colour center atom laser gyroscope overall structures
Fig. 2 indicates diamond waveguide processing process
Fig. 3 indicates that a gyro signal detects timing
In figure: 1- diamond substrate, 2- diamond NV colour center waveguide, the 3- diamond substrate back side, 4- micro-strip antenna array,
5- laser input mouth, 6- fluorescence signal output photoelectric detect port, 7- microwave, RF signal input end mouth, and 8- encapsulates card slot,
9- field-generating coil (wire coil).
Specific embodiment
Specific embodiments of the present invention are described in detail with reference to the accompanying drawing.
A kind of single-chip grade diamond colour center spin gyroscope, it is micro- by the waveguide of flat-face colour center, plane microwave, radio frequency
Band antenna, the coplanar integrated composition of flat magnetic field coil.Specific structure includes diamond substrate 1, the diamond as shown in Figure 1:
1 upper surface middle part of substrate processes diamond NV colour center waveguide 2, and 1 upper surface of diamond substrate grows one layer of covering waveguide
Diamond refractive index matching layers；1 upper surface of diamond substrate is located at 2 two sides of diamond NV colour center waveguide and processes micro-strip respectively
Aerial array 4；3 central part of the diamond substrate back side processes field-generating coil 9.It is machined in the diamond substrate 1
Card slot 8 is encapsulated, all solidstate encapsulates entire chip level structure, and after encapsulation, 2 both ends of diamond NV colour center waveguide pass through end face coupling respectively
Conjunction mode connects laser input mouth 5 and fluorescence signal output photoelectric detection port 6；The micro-strip antenna array 4 passes through end face
Coupled modes connect microwave, RF signal input end mouth 7.
High concentration colour center waveguiding structure is fabricated in diamond surface using micro-nano manufacturing process first, by simultaneous
Hold the coplanar integrated micro of technique, radio-frequency antenna and field coil, develops chip grade diamond colour center atomic gyroscope, it is specific to prepare
Scheme is as follows:
1, the preparation of high concentration diamond colour center and activation
Concentration is carried out using prepared by microwave plasma chemical vapor deposition (MPCVD) technology and is higher than 1018cm-1Diamond.Using height
Purify N2Gas source (99.99%) and high inner wall clean cleanliness tracheae, and gas source enters accent and carries out micronic dust using 12500 mesh filter screens, only
Change gas.In ultrahigh vacuum (10-7Torr high-pressure microwave plasma CH is used under)4、H2、N2Three kinds of gases inspire C, N original
Son accurately manipulates C, N atomic ratio using magnetic, electric constrained procedure using atomic magnetic moment interaction effect, realizes that superelevation is equal
The concentration of even property is higher than 1018cm-1Nitrogen controllably manufacture.
NV colour center activating process: diamond irradiate within 5 hours using high energy 10MeV electron beam irradiation, is carried out in situ
Carbon in electronics and lattice collides, and generates vacancy.Under ultra-high vacuum environment, short annealing trend carbon is moved to surface
It is dynamic, distortion of lattice and residual stress are eliminated, then anneal under 850 DEG C of high temperature 2h under vacuum, migrates vacancy, and capture
Electronics forms NV colour center.
2, the waveguide of diamond colour center is processed
Using MEMS processing technology, the waveguide of low-loss diamond colour center and its waveguide surface index matching package knot are prepared
Structure is realized and is collected to NV colour center fluorescence signal high efficiency, as shown in Fig. 2, process flow is as follows:
1) MPCVD epitaxy technique and electron beam irradiation technology are used, high quality is formed on the substrate after the high-temperature anneal
NV colour center film layer (i.e. above-mentioned steps 1)；
2) diamond substrate upper and lower surface is polished using multiple polishing technology；
3) it is epitaxially grown on the substrate one layer of silicon oxide masking film layer 200nm；
4) lithography and etching technology is used, waveguide picture structure is prepared in image conversion transfer；
5) diamond body structure etching is carried out using dry etching technology, forms diamond colour center waveguiding structure, thickness 200
Micron, 200 microns of width；
6) silicon oxide masking film layer is removed, one layer of diamond refractive index matching layers 200nm of MPCVD epitaxial growth is then used,
As total reflection covering, realizes to limit to optical signal middle in waveguide and transmit, realization is collected to the high efficiency of output signal and enhancing
It reads.
3, chip-scale Planar integration and manufacture
The integrated processing of microwave, radio-frequency antenna and magnetic coil, specific steps are carried out in the diamond waveguide structure of processing
It is as follows:
1) electron beam evaporation technique is used, the Ti/Pt/ of one layer of 800 ~ 850nm is prepared in the diamond substrate processed
Au, wherein Ti is about 50nm ~ 100nm with a thickness of 100nm ~ 200nm, Pt thickness, and Au is with a thickness of 300nm ~ 600nm；
2) IBE lithographic technique is used, etches microstrip antenna array array structure, microstrip antenna is 250 microns long, wide and a height of 40
Micron；
3) one layer 2 microns of surface spin coating of photoresist, 80 degree of heat are dried 2 minutes on substrate, protect surface structure；
4) substrate is turned using fixture, following table is face-up, repeats step 1) on the surface, etches skill using IBE
Art prepares wire coil, controllably to apply magnetic field, completion magnetic field, microwave, radio frequency, the coplanar chip-scale of colour center waveguide are integrated；
5) entire chip level structure is encapsulated finally by encapsulation card slot all solidstate, it is defeated that laser is carried out by end coupling mode
Enter, microwave and radiofrequency signal end coupling input and fluorescence signal output read, by constant-current source give coil apply electric current produce
Raw stabilizing magnetic field.
Gyro signal high s/n ratio is read, and one time gyro signal detection timing is as shown in Figure 3.
1) the NV colour center in waveguide is initialized using 532nm laser；Apply 500Gauss magnetic on coil simultaneously
It realizes nuclear spin polarization, makes excited level cross relaxation, in electronic layout to+1 state；
2) with after nuclear spin polarization, magnetic field steps to 10Gauss for initialization, keeps electron-spin polarization, then applies and penetrate
Frequency pi/2 pulse, pulse frequency 5.1MHz, by freely developing for T time, T is less than nuclear spin lateral relaxation time, then again
Secondary application radio frequency pi/2 pulse, pulse frequency 5.1MHz occur spin phase relevant, generate electronics population again, make phase
Modulation becomes intensity modulated；
3) then apply pi/2 microwave pulse signal and laser field, by reading electron population information, obtain believing with reference to gyro
Number S1 then applies pi/2 radio-frequency pulse and microwave pulse signal, reads again gyro signal S2, obtains high noise by comparison
The gyro signal of ratio.
It should be noted last that the above examples are only used to illustrate the technical scheme of the present invention and are not limiting, although ginseng
It is described in detail according to the embodiment of the present invention, those skilled in the art should understand that, to technical solution of the present invention
It is modified or replaced equivalently, without departure from the spirit and scope of technical solution of the present invention, claim should all be covered
In protection scope.
Claims (7)
1. a kind of single-chip grade diamond colour center spin gyroscope, it is characterised in that: including diamond substrate (1), the Buddha's warrior attendant
Stone lining bottom (1) upper surface middle part processes the waveguide of diamond NV colour center (2), and diamond substrate (1) upper surface uses MPCVD method
One layer of diamond refractive index matching layers of epitaxial growth；Diamond substrate (1) upper surface is located at diamond NV colour center waveguide (2)
Two sides process micro-strip antenna array (4) respectively；The diamond substrate back side (3) central part processes field-generating coil (9)；
Diamond the waveguide of NV colour center (2) both ends connect laser input mouth (5) and fluorescence signal by end coupling mode respectively
Output photoelectric detects port (6)；The micro-strip antenna array (4) connects microwave by end coupling mode, radiofrequency signal inputs
Port (7).
2. single-chip grade diamond colour center spin gyroscope according to claim 1, it is characterised in that: the Buddha's warrior attendant stone lining
Encapsulation card slot (8) is machined on bottom (1).
3. single-chip grade diamond colour center spin gyroscope according to claim 1, it is characterised in that: the diamond NV
200 microns of 200 microns of thickness, the width of colour center waveguide (2).
4. single-chip grade diamond colour center spin gyroscope according to claim 1, it is characterised in that: the microstrip antenna
The specification of microstrip antenna in array (4) are as follows: it is 250 microns long, it is wide and 40 microns a height of.
5. single-chip grade diamond colour center spin gyroscope according to claim 1, it is characterised in that: the diamond folding
Penetrate rate matching thickness 200nm.
6. a kind of preparation method of single-chip grade diamond colour center spin gyroscope, characterized by the following steps:
(1), portion forms NV colour center film layer on a diamond substrate；
(2), the upper and lower surface of diamond substrate is polished；
(3), one layer of silicon oxide masking film layer of surface epitaxial growth on a diamond substrate；
(4), using lithography and etching technology, diamond NV colour center waveguide picture structure is prepared in image conversion transfer；
(5), diamond body structure etching is carried out using dry etching technology, forms diamond NV colour center in the middle part of diamond substrate
Waveguide；
(6), silicon oxide masking film layer is removed, then one layer of diamond refractive index matching layers of epitaxial growth, as total reflection covering；
(7), chip-scale Planar integration and manufacture
(71), using electron beam evaporation technique, the Ti/Pt/ of one layer of 800 ~ 850nm is prepared in the diamond substrate processed
Au, wherein Ti is with a thickness of 100nm ~ 200nm, and Pt is with a thickness of 50nm ~ 100nm, and Au is with a thickness of 300nm ~ 600nm；
(72), using IBE lithographic technique, microstrip antenna is etched respectively positioned at the two sides of diamond NV colour center waveguide on substrate
Structure；
(73), one layer photoresist of surface spin coating, heat protect the surface structure of substrate on a diamond substrate after drying；
(74), diamond substrate turns, and repeats step (71) in lower surface, etches magnetic field using IBE lithographic technique and produce
Raw coil；
(75) all solidstate encapsulates entire chip level structure, by end coupling mode, encapsulates at the colour center waveguide both ends diamond NV
Laser input mouth and fluorescence signal output photoelectric detect port, defeated in the input terminal encapsulation microwave of microstrip antenna, radiofrequency signal
Inbound port.
7. the preparation method of single-chip grade diamond colour center spin gyroscope according to claim 6, it is characterised in that: step
Suddenly (1) is specific as follows:
High concentration diamond colour center preparation process: it is higher than 10 using prepared by microwave plasma chemical vapor deposition technology preparation concentration18cm-1Buddha's warrior attendant
The stone heart；Use High Purity N2Gas source and high inner wall clean cleanliness tracheae, and gas source enters accent to be carried out using 12500 mesh filter screens
Micronic dust, purification gas；High-pressure microwave plasma CH is used under ultrahigh vacuum4、H2、N2Three kinds of gases, inspire C, N atom,
C, N atomic ratio are accurately manipulated, realizes superelevation uniformity using magnetic, electric constrained procedure using atomic magnetic moment interaction effect
Concentration be higher than 1018cm-1Nitrogen controllably manufacture high concentration diamond colour center；
NV colour center activating process: diamond substrate irradiate within 5 hours using high energy 10MeV electron beam irradiation, is carried out in situ
Carbon in electronics and lattice collides, and generates vacancy；Under ultra-high vacuum environment, short annealing drives carbon to move to surface
It is dynamic, distortion of lattice and residual stress are eliminated, then anneal under 850 DEG C of high temperature 2h under vacuum, migrates vacancy, and capture
Electronics forms NV colour center.
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107256047B (en) * | 2017-05-23 | 2019-01-04 | 中北大学 | Solid-state atomic spin sensor is without magnetic temperature control system |
| CN108061548B (en) * | 2017-11-16 | 2021-01-01 | 中北大学 | Integrated diamond NV fluorescence efficient excitation and collection system |
| CN108007450B (en) * | 2017-11-24 | 2020-06-09 | 西安空间无线电技术研究所 | Rotation information measuring method and device and quantum gyroscope |
| CN108759810B (en) * | 2018-07-23 | 2021-08-13 | 北京航空航天大学 | Inertial measurement device and method based on diamond NV color center under strong magnetic field |
| CN113049996B (en) * | 2021-03-09 | 2023-06-06 | 郑州大学 | Mixed microwave integrated circuit sensor based on diamond nitrogen vacancy color center |
| CN113483746B (en) * | 2021-07-29 | 2022-07-26 | 中国船舶重工集团公司第七0七研究所 | Gyro multidimensional noise suppression method |
| CN115198359A (en) * | 2022-07-21 | 2022-10-18 | 生命珍宝有限公司 | Method for cultivating hair carbon source into diamond by MPCVD device |
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| CN103743390A (en) * | 2013-12-31 | 2014-04-23 | 北京航空航天大学 | Gyroscope based on NV (Nitrogen-Vacancy)-center diamond-MEMS (Micro Electro Mechanical Systems) mixed structure and preparation method thereof |
| US20150090033A1 (en) * | 2012-04-13 | 2015-04-02 | The Regents Of The University Of California | Gyroscopes based on nitrogen-vacancy centers in diamond |
| CN105352489A (en) * | 2015-11-16 | 2016-02-24 | 北京航空航天大学 | Diamond nitrogen-vacancy (NV) center-based acceleration sensor |
| CN105444749A (en) * | 2015-11-07 | 2016-03-30 | 中北大学 | Bailey phase shift-based solid-state spinning resonant gyroscope of crowded NV colored core diamond |
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|---|---|---|---|---|
| CN1465097A (en) * | 2000-09-08 | 2003-12-31 | 英特尔公司 | Integrated core microelectronic package |
| US20150090033A1 (en) * | 2012-04-13 | 2015-04-02 | The Regents Of The University Of California | Gyroscopes based on nitrogen-vacancy centers in diamond |
| CN103743390A (en) * | 2013-12-31 | 2014-04-23 | 北京航空航天大学 | Gyroscope based on NV (Nitrogen-Vacancy)-center diamond-MEMS (Micro Electro Mechanical Systems) mixed structure and preparation method thereof |
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