CN106054287A - Optical device structure unit of visible light wave band transform and optical device - Google Patents
Optical device structure unit of visible light wave band transform and optical device Download PDFInfo
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- CN106054287A CN106054287A CN201610628539.0A CN201610628539A CN106054287A CN 106054287 A CN106054287 A CN 106054287A CN 201610628539 A CN201610628539 A CN 201610628539A CN 106054287 A CN106054287 A CN 106054287A
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
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- G02B5/3083—Birefringent or phase retarding elements
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Abstract
The present invention provides an optical device structure unit of visible light wave band transform and an optical device. The optical device structure unit of visible light wave band transform comprises an antenna formed by a TiO2 material, a silver mirror, and a silicon dioxide substrate, wherein an antenna structure is at a top layer, the silver mirror is in the middle, and a silicon dioxide substrate material is at the bottom, the width size a of the antenna is between 160nm and 180nm, the length size b of the antenna is between the 240nm and 370nm, the lengths and widths of the silver mirror and the silicon dioxide substrate are the same and are recorded as P, a period P=430+/-10nm, the thickness t1 of the antenna structure is 240+/-5nm, and the solver layer thickness t2 of the silver mirror is 300+/-20nm. According to the optical device, a TiO2 nano antenna is used as the basic structure unit, a metasurface sub unit perfectly realizes beam abnormal reflection at the wavelength of 632nm, and the formed optical device has a high abnormal reflection conversion efficiency.
Description
Technical field
The invention belongs to integrated optics technique field, particularly relate to the optic structure list of a kind of visible light wave range conversion
Unit and optics.
Background technology
Traditional optical element such as plane mirror, prism, lens etc., and diffraction structure such as grating etc. is all to pass through propagation path
The accumulation of upper continuous phase changes the direction of propagation of wave beam, and the distance that ripple is propagated in optical element is typically much deeper than wavelength.
When on electromagnetic wave incident to the separating surface of two media, echo and transmitted wave observe classical reflection law and the law of refraction
(Snell's law, Snell ' s Law).The research of Meta Materials especially LHM shows, utilizes LHM also can make incidence
Ripple generation abnormal reflection, but it still follows the classical law of refraction, is only the introduction of the concept of negative index.By contrast, super
Surface is by the structure of deep sub-wavelength thickness, it is possible to realizes freely controlling reflected beam and refracted beam, no longer observes
Classical catadioptric law, significantly reduces thickness and the volume of optics.
Super structure surface is the Meta Materials technology of two dimension, and three-dimensional Meta Materials has been extended to two-dimensional structure, by two dimension
The array arrangement of small electric scattering object or cavity obtains a kind of novel Meta Materials in substrate material surface or medium interface.Utilize
The phase place of electromagnetic wave is regulated and controled by super structure surface, can prepare transform optics device in the plane.
The preiodic type fine structure material being made up of medium, metal has two big features: one is abundant interface, and two is the cycle
Property.Owing to interface is enriched, this structure can support various electromagnetic mode, and (all kinds of bulk-mode and interface model, such as wave guide mode
Formula and surface plasmon mode)；Owing to having periodically, this structure can produce strong anisotropy, and have
Excite and modulate the ability of various electromagnetic mode.Therefore electromagnetic wave has in this kind of material and varies considerably with in general material
Propagation property: extraordinary transmission, reflect, absorb, refraction effect etc., the research of this material is had the physical significance of novelty
With good application prospect.
At optical communication field, super surface can be used to design work in the photoswitch of optical communicating waveband, spatial light modulator
And Wavelength-division multiplexer/demultiplexer etc..But, most abnormal folding/reflect super surface texture only at non-visible light wave band
Change.Such as the abnormal reflection of visible light wave range to be realized, higher to material requirements, its needs possesses can at visible light wave range
The absorption loss ignored and there is higher refractive index.This material must be that optics is smooth, has than in the material
The surface roughness that the wavelength of light is much smaller, high surface roughness causes unnecessary light scattering, can bring obvious light loss
Consumption.In order to reduce roughness to greatest extent, material must be unbodied or single crystallization, because the crystal boundary of polycrystalline material
Roughness and light scattering can be increased.
In contemporary optics, it is achieved the control completely propagating light is mesh previous important research direction.In order to realize this
The control of sample, needs to create the device that should have 0 to 2 π phase-modulations with realize controlling light amplitude.At traditional optical components and parts
In such as birefringent wave plate and spherical lens, the light beam for different polarization states or different spaces needs a significant propagation distance
To obtain out of phase accumulation, therefore prepare the material that this kind of traditional devices needs are thicker, but such device is difficult to embed
To integrated optics system.One of solution of integration problem is to use reflection and transmission antenna array.This method initially quilt
For microwave frequency and millimeter-wave frequency, single or several ultrathin antenna layer is used to realize electromagnetic wave amplitude and the control of phase place
System.Change along with position changes the geometric parameter of antenna simultaneously, and these antenna array can spatially realize light phase
Control.Recently, similar material, realize same effect in optical frequency section, this material is referred to as super structure surface.Super structure
Surface utilizes asymmetrical electric dipole resonance mechanism polarization direction to be perpendicular to the scattered light phase place in incident light polarization direction in fact
Show the control completely of 0 to 2 π.As in transmissive arrays, along with the geometric parameter of position change resonant antenna can be in Asia
Any control to light wave wave surface is realized in the thin layer that wavelength is thick.This kind of super structure surface has been presented and has been applied to abnormal folding
Penetrate, 1/4th and 1/2nd wave plates, lens and the control of orbital angular momentum.
The constituent material on super structure surface is mainly metal material at present.The plasmon mechanism being made up of metal material
The shortcoming on super structure surface is that this kind of metal structure is generally of metal ohmic loss and the weak coupling between incidence wave and echo
Closing effect, the efficiency on the most this kind of super structure surface is the lowest.Multilamellar or the big super structure surface of thickness can be utilized to realize electric resonance
With the superposition of magnetic resonance, and then increase super structure surface work efficiency, but while all increases of these methods prepare answering of material
Diamicton degree and volume.In other a kind of scheme, it is possible to use metal antenna array and a mirror surface are thin at sub-wavelength
Introduce multiple reflections in film and realize high efficiency abnormal reflection and linear transfer conversion.Although this kind of scheme avoids answering of preparation
Diamicton degree, but owing to the ohmic loss of metal still limits the work efficiency on the super structure surface that this metal is constituted.
Summary of the invention
For above technical problem, the invention discloses optic structure unit and the light of a kind of visible light wave range conversion
Learn device, achieve light beam abnormal reflection at visible light wave range, and there is higher abnormal reflection conversion efficiency.
To this, the technical solution used in the present invention is:
The optic structure unit of a kind of visible light wave range conversion, it includes TiO2Material composition antenna, silver mirror and
Silicon dioxide substrate, wherein top layer is antenna structure, and middle one layer is silver mirror, and bottom is silicon dioxide base material, Qi Zhongtian
The width dimensions a=160nm to 180nm of line, the length dimension b=240nm to 370nm of antenna, silver mirror and silicon dioxide substrate
Length and width equal, be designated as P, cycle P=430 ± 10nm, antenna structure thickness t1=240 ± 5nm, described silver mirror silver layer
Thickness t2=300 ± 20nm.
In this technical scheme, it is thick that amorphous titanium dioxide has the surface more much smaller than the wavelength of light in the material
Rugosity, titanium dioxide almost without absorption loss, can produce sufficiently high folding when wavelength is more than 350nm under the effect of high light
Penetrate rate.
The invention also discloses the optics of a kind of visible light wave range conversion, it includes visible light wave range as above
The optic structure unit of conversion, the antenna of described optical device unit is period profile in y-axis, from side to opposite side
Distribution sequence number is followed successively by 1,2,3,4,5,6,7,8,9,10, and the geometric parameter of corresponding antenna number is: parameter a=of antenna 1
180 ± 2nm, b=370 ± 2nm；Parameter a=170 of antenna 2 ± 2nm, b=350 ± 2nm；Parameter a=160 of antenna 3 ±
2nm, b=335 ± 2nm；Parameter a=160 of antenna 4 ± 2nm, b=278 ± 2nm；Parameter a=160 of antenna 5 ± 2nm, b=
240±2nm；Antenna 6 turns clockwise 90 ° relative to antenna 1；Antenna 7 turns clockwise 90 ° relative to antenna 2；Antenna 8 phase
90 ° are turned clockwise for antenna 3；Antenna 9 turns clockwise 90 ° relative to antenna 4；Antenna 10 is clockwise relative to antenna 5
Half-twist.
The preparation method of the optics of above-mentioned visible light wave range conversion, comprises the following steps:
The first step is to utilize electron beam evaporation methods to cover one layer of silverskin on silicon oxide substrates, then on silverskin surface
Upper continuation electron beam evaporation plating covers packed layer titanium dioxide；
Second step is spin coating photoresist on titanium dioxide film, then completes the etching of photoresist with electron beam lithography
And development；
3rd step is the etching using reactive ion beam etching technique to realize titanium dioxide film；
4th step is to obtain final nano titanium oxide antenna through stripping process.
The invention has the beneficial effects as follows:
First, the optics of the visible light wave range conversion of the present invention achieves abnormal reflection at visible light wave range, and it is adopted
With simple nano titania antenna as basic structural unit, super structure surface subunit is that at 632nm, perfection is real at wavelength
Show light beam abnormal reflection.
Second, the optics of the visible light wave range conversion of the present invention is from the point of view of the parameter of structure, and the thickness of Meta Materials can
To reach 600nm rank, high for micro-nano photonic device utilizability.
3rd, select TiO2As the material of resonant antenna, by physical size and the material parameter of appropriate design device,
Change along with position changes the geometric parameter of antenna simultaneously, and these antenna array can spatially realize the control to light phase
System so that have higher abnormal reflection conversion efficiency at operation wavelength 632nm, reflection conversion efficiency is up to 69%.
Accompanying drawing explanation
Fig. 1 is the schematic three dimensional views of present configuration unit；
Fig. 2 is the top view of present configuration unit；
Fig. 3 is the side view of present configuration unit；
Fig. 4 is TiO2Periodic structure distribution schematic three dimensional views；
Fig. 5 is TiO2Periodic structure distribution two-dimensional representation；
Fig. 6 is abnormal reflection Electric Field Distribution schematic diagram.
Detailed description of the invention
Below in conjunction with the accompanying drawings, the preferably embodiment of the present invention is described in further detail.
For existing transform optics device deficiency on service band, in order to the exception realized at visible light wave range is anti-
Penetrating, use the super structure surface of titanium dioxide periodic structure, this super structure surface not adding dielectric layer is capable of comparing metal
Adding dielectric layer as the more preferable experiment effect of super surfacing, it goes masking step to make knot after reactive ion beam etching (RIBE) in an experiment
Structure is more complete.The design service band is at visible light wave range, but this design can extend to other wave-length coverage.Set at this
In meter, using titanium dioxide as the material of dielectric resonator antenna, the optical property of the refractive index that titanium dioxide is higher is utilized to make to receive
Rice optical antenna has the phase performance of regulation and control scattered light.The electrolyte Meta Materials resonant antenna being made up of high-index material because of
The response of electric dipole and magnetic dipole can be supported for Michaelis resonance.
Utilize nano titania antenna can the phase place of any point on geometrical plane be changed to be designed, by changing
The size of certain dimension becoming nano-antenna can make to produce Phase delay along the polarized light of this dimension, thus realizes certain
Phase gradient.Rational choice TiO2The size of basic structural unit, achieves the covering of 2 π phase places, instead in a super cell
Penetrate light wave front distortion little, there is at operation wavelength 632nm higher abnormal reflection conversion efficiency, up to 69%.
Specific embodiments is as follows: this structural representation as shown in Figure 1: super structure surface material structure unit includes TiO2My god
Line, silver mirror and silicon dioxide substrate, wherein top layer is TiO2Antenna structure, middle one layer is silver mirror, and bottom is base material.
This nanocomposite optical antenna structure is TiO2Material, selects TiO at this2As the material of resonant antenna, because titanium dioxide
Titanium is the least in the loss of visible light wave range.Wherein preparing the difficulty of part, to be how to prepare loss smaller
Structure, and the resonant antenna structure that preparation defect is less, because titanium dioxide antenna geometries parameter is to control scattered wave
The factor of phase place and amplitude, so the integrated degree of titanium dioxide antenna is the biggest to its performance impact.Prepare in the world at present
The method of titanium dioxide film has electron beam evaporation plating, and the material purity so obtained is higher, and surface ratio is more smooth, and loss ratio is relatively
Little.The geometrical pattern preparing titanium dioxide antenna is then obtained photoresist mask plate by electron-beam exposure system, then utilizes reaction
Ion beam etching silicon fiml.
The geometry designs of construction unit as shown in Figure 2 and Figure 3, wherein the width dimensions a=180 of silicon dioxide antenna ±
2nm, the length dimension b=370 ± 2nm of silicon dioxide antenna, the length and width of silver mirror and silicon dioxide substrate is equal, is designated as
P, cycle P=430 ± 10nm, titanium dioxide antenna structure thickness t1=240 ± 5nm, silver thickness t3=300 ± 20nm.
The structure design such as Fig. 4 of visible light wave range transform optics device, shown in Fig. 5, the geometric parameters of corresponding antenna number
Number is: parameter a=180 of antenna 1 ± 2nm, b=370 ± 2nm；Parameter a=170 of antenna 2 ± 2nm, b=350 ± 2nm；My god
Parameter a=160 of line 3 ± 2nm, b=335 ± 2nm；Parameter a=160 of antenna 4 ± 2nm, b=278 ± 2nm；The ginseng of antenna 5
Number a=160 ± 2nm, b=240 ± 2nm；Antenna 6 turns clockwise 90 ° relative to antenna 1；Antenna 7 is relative to antenna 2 up time
Pin half-twist；Antenna 8 turns clockwise 90 ° relative to antenna 3；Antenna 9 turns clockwise 90 ° relative to antenna 4；Antenna 10
90 ° are turned clockwise relative to antenna 5.
Find through experiment, above-mentioned visible light wave range transform optics device wavelength be at 632nm perfection to achieve light beam different
Abnormal reflections.The abnormal reflection Electric Field Distribution schematic diagram of above-mentioned visible light wave range transform optics device as shown in Figure 6, for vertically entering
Penetrating light, refraction light and reflection light are no longer the directions along normal, but with find angled outgoing.At formulaSubstitute into corresponding numerical value P=430nm and λ0=632nm obtains the angle of reflection of abnormal reflection and is=10.6 °.By
Fig. 6 can measure the abnormal reflection angle of numerical computations and be=9.5 °, and this has faint deviation with desirable angle angle value, but deviation is very
Little.The reason causing faint deviation possible be antenna phase step each other be not constant for constant and there is not error
's.
Structure preparation flow: the first step is to utilize electron beam evaporation methods to cover one layer of silverskin on silicon oxide substrates,
Then on silverskin surface, continuation electron beam evaporation plating covers packed layer titanium dioxide film.Second step is to revolve on titanium dioxide film
Resist coating, then completes etching and the development of photoresist with electron beam lithography.3rd step is to use reactive ion beam to carve
Erosion technology realizes the etching to titanium dioxide film.4th step is to obtain final nano titanium oxide antenna through stripping process.
Above content is to combine concrete preferred implementation further description made for the present invention, it is impossible to assert
Being embodied as of the present invention is confined to these explanations.For general technical staff of the technical field of the invention,
On the premise of present inventive concept, it is also possible to make some simple deduction or replace, all should be considered as belonging to the present invention's
Protection domain.
Claims (3)
1. the optic structure unit of a visible light wave range conversion, it is characterised in that: it includes TiO2The sky of material composition
Line, silver mirror and silicon dioxide substrate, wherein top layer is antenna structure, and middle one layer is silver mirror, and bottom is silicon-dioxide-substrate ground
Material, the wherein width dimensions a=160nm to 180nm of antenna, the length dimension b=240nm to 370nm of antenna, silver mirror and titanium dioxide
The length and width of silicon base is equal, is designated as P, cycle P=430 ± 10nm, antenna structure thickness t1=240 ± 5nm, described silver
Mirror silver thickness t2=300±20nm。
2. the optics of a visible light wave range conversion, it is characterised in that: it includes visible light wave as claimed in claim 1
The optic structure unit of Duan Bianhuan, the antenna of described optical device unit is period profile in y-axis, from side to another
Side distribution sequence number is followed successively by 1,2,3,4,5,6,7,8,9,10, and the geometric parameter of corresponding antenna number is: parameter a=of antenna 1
180 ± 2nm, b=370 ± 2nm；Parameter a=170 of antenna 2 ± 2nm, b=350 ± 2nm；Parameter a=160 of antenna 3 ± 2nm, b
=335±2nm；Parameter a=160 of antenna 4 ± 2nm, b=278 ± 2nm；Parameter a=160 of antenna 5 ± 2nm, b=240 ± 2nm；
Antenna 6 turns clockwise 90 ° relative to antenna 1；Antenna 7 turns clockwise 90 ° relative to antenna 2；Antenna 8 is relative to sky
Line 3 turns clockwise 90 °；Antenna 9 turns clockwise 90 ° relative to antenna 4；Antenna 10 turns clockwise relative to antenna 5
90°。
3. the preparation method of the optics of the visible light wave range conversion described in claim 2, it is characterised in that include following step
Rapid:
The first step is to utilize electron beam evaporation methods to cover one layer of silverskin on silicon oxide substrates, then continues on silverskin surface
Continuous with electron beam evaporation plating covering packed layer titanium dioxide；
Second step is spin coating photoresist on titanium dioxide film, then completes the etching of photoresist with electron beam lithography and shows
Shadow；
3rd step is the etching using reactive ion beam etching technique to realize titanium dioxide film；
4th step is to obtain final nano titanium oxide antenna through stripping process.
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| CN106405731A (en) * | 2016-12-12 | 2017-02-15 | 武汉邮电科学研究院 | Metal microstructure based arrayed waveguide grating and realization method thereof |
| CN108490509A (en) * | 2018-04-08 | 2018-09-04 | 武汉大学 | The super surfacing of dielectric geometric phase of low depth-to-width ratio and its structural optimization method |
| CN108535881A (en) * | 2018-04-20 | 2018-09-14 | 哈尔滨工业大学深圳研究生院 | Perovskite antenna and preparation method thereof with super surface |
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| CN108538858B (en) * | 2018-04-20 | 2020-12-18 | 哈尔滨工业大学深圳研究生院 | Display method of semiconductor |
| CN109143567A (en) * | 2018-10-18 | 2019-01-04 | 南方科技大学 | The reflective super structure surface primary mirror of one kind, auxiliary mirror and telescopic system |
| CN109597160A (en) * | 2019-01-02 | 2019-04-09 | 山东大学 | A kind of demultiplexing device and its working method based on the super structure surface of V-arrangement optical antenna |
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| CN110007451B (en) * | 2019-04-08 | 2022-04-01 | 哈尔滨工业大学（深圳） | Super-surface microscope, preparation method thereof and optical path measuring system |
| CN111221197A (en) * | 2019-11-05 | 2020-06-02 | 武汉邮电科学研究院有限公司 | Super-surface silicon-based liquid crystal composite spatial light modulator |
| CN111221197B (en) * | 2019-11-05 | 2022-12-27 | 武汉邮电科学研究院有限公司 | Super-surface silicon-based liquid crystal composite spatial light modulator |
| CN112213800A (en) * | 2020-11-04 | 2021-01-12 | 中航华东光电有限公司 | Phase control type light deflection device based on micro-nano structure |
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