CN106019670A - Display panel and manufacturing method thereof - Google Patents
Display panel and manufacturing method thereof Download PDFInfo
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- CN106019670A CN106019670A CN201610498253.5A CN201610498253A CN106019670A CN 106019670 A CN106019670 A CN 106019670A CN 201610498253 A CN201610498253 A CN 201610498253A CN 106019670 A CN106019670 A CN 106019670A
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- substrate
- groove
- shrinkage pool
- display floater
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13394—Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133357—Planarisation layers
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
The invention discloses a display panel and a manufacturing method thereof. The display panel comprises a first substrate, a second substrate opposite to the first substrate, and a space support arranged between the first substrate and the second substrate. The space support comprises a firt end away from the second substrate. The first substrate comprises a flattening layer. A groove is formed in the flattening layer and comprises a plurality of concave holes. The first end makes contact with the groove. The orthographic projection of the groove towards the first substrate covers the orthographic projection of the first end towards the first substrate. The flattening layer making contact with the space support on the first substrate is arranged to be of a groove structure comprising a plurality of concave holes, so that resistance formed when the space support slides to a pixel photic zone alignment layer is increased, and poor light leakage caused when the space support scratches the pixel photic zone alignment layer and poor color cast caused by sliding of the space support are improved.
Description
Technical field
The disclosure relates generally to Display Technique, is specifically related to lcd technology, particularly relates to show
Show panel and preparation method thereof.
Background technology
Display floater generally includes array base palte, color membrane substrates and is arranged on array base palte with color
Spacer between film substrate and liquid crystal layer.Figure 1A shows the signal of existing display floater
Property structure chart.As shown in Figure 1A, display floater 100 generally includes array base palte 101, color film
Substrate 102, the spacer 105 being arranged between array base palte 101 and color membrane substrates 102 with
And the liquid crystal layer 106 being arranged between array base palte 101 and color membrane substrates 102.Array base palte
101 include planarization layer 103, and the multiple mistakes being distributed in the row direction on planarization layer 103
Hole 104.Spacer 105 is generally arranged between two vias 104 adjacent on line direction.
Along with the raising of pixel resolution, between two the most adjacent vias 104
Distance is more and more nearer.Figure 1B shows putting down between two vias in high-resolution display panel
Smoothization layer and the schematic diagram of spacer being disposed thereon.As shown in Figure 1B, owing to being formed
The reason of the technique in hole, the most adjacent two via of high-resolution display panel it
Between planarization layer 103 be shaped like a cambered surface, spacer 105 is upper at array base palte
On the surface of similar cambered surface.When display floater is extruded by external force, due to spacer 105
Being bulge-structure at residing array base palte, spacer 105 is susceptible to slide.Spacer 105
If sliding to pixel transmittance district (not shown), the both alignment layers in pixel transmittance district can be scratched, make
Become light leak bad.
Further, since spacer 105 slides, can cause between array base palte and color membrane substrates
Liquid crystal layer in uneven thickness, causes colour cast bad.
Summary of the invention
In view of drawbacks described above of the prior art or deficiency, it is desirable to provide a kind of display floater and
Manufacture method, to solve at least part of technical problem described in background technology.
First aspect, this application provides a kind of display floater, and display floater includes first substrate
And the second substrate being oppositely arranged with first substrate, and it is arranged on first substrate and second substrate
Between spacer, spacer includes the first end away from second substrate；First substrate includes putting down
Smoothization layer, planarization layer is formed groove, and groove includes multiple shrinkage pool；First end and groove
Contact；Wherein, groove to first substrate is just covering the first end to the orthographic projection of first substrate
Projection.
Second aspect, this application provides a kind of display floater manufacture method, shown display floater
Manufacture method includes being formed on the first substrate planarization layer；Planarization layer is formed groove,
Groove includes multiple shrinkage pool；The second substrate relative with first substrate is formed spacer,
Spacer post is between first substrate and second substrate, and spacer includes first away from second substrate
End, the first end contacts with groove；Wherein, groove covers first to the orthographic projection of first substrate
Hold the orthographic projection to first substrate.
The scheme of the application, by setting on the planarization layer of the first substrate contacted with spacer
Put the groove including multiple shrinkage pool, add the resistance that spacer slides so that spacer is outside
It is not easy to slide into pixel transmittance district under power effect, thus improves and cause owing to spacer slides
Light leak bad and extruding colour cast bad.
Accompanying drawing explanation
The detailed description that non-limiting example is made made with reference to the following drawings by reading,
Other features, purpose and advantage will become more apparent upon:
Figure 1A shows the schematic diagram of existing display floater；
Figure 1B shows in high-resolution display panel the planarization layer between two vias and sets
Put the schematic diagram of spacer thereon；
Fig. 2 A shows the structural representation of the application display floater；
Fig. 2 B shows in the application display floater, a kind of structural representation of spacer；
Fig. 3 shows a kind of planarization on the first substrate contacted shown in Fig. 2 A with spacer
The enlarged diagram of layer；
Fig. 4 A shows that in the application display floater, first substrate is overlooked and spacer the first end exists
Perspective view on first substrate；
Fig. 4 B shows the enlarged diagram of Fig. 4 A further groove；
Fig. 5 shows in display floater shown in Fig. 2 A, the another kind of structural representation of spacer；
Fig. 6 shows that the another kind on the first substrate contacted with spacer shown in Fig. 2 A is smooth
Change the enlarged diagram of layer；
Fig. 7 shows the schematic flow sheet of the application one embodiment of display floater manufacture method.
Detailed description of the invention
With embodiment, the application is described in further detail below in conjunction with the accompanying drawings.It is appreciated that
, specific embodiment described herein is used only for explaining related invention, rather than to this
Bright restriction.It also should be noted that, for the ease of describe, accompanying drawing illustrate only with
The part that invention is relevant.
It should be noted that in the case of not conflicting, the embodiment in the application and embodiment
In feature can be mutually combined.Describe this below with reference to the accompanying drawings and in conjunction with the embodiments in detail
Application.
Refer to Fig. 2 A, Fig. 2 A and show the structural representation of the application display floater.Such as figure
Shown in 2A, display floater 200 includes first substrate 21, second substrate 22 and is arranged on first
Spacer P between substrate 21 and second substrate 22.
Fig. 2 B shows in the application display floater, a kind of structural representation of spacer.Between
Being shaped as of spacer post P is round table-like.Spacer includes the first end P1 and the second end P2.First end
P1 and the second end P2 is a circle, and the area of the first end P1 is less than the second end P2's
Area.Wherein, the second end P2 of spacer P is formed on second substrate；Spacer P is remote
Contact with first substrate from the first end P1 of second substrate.
As shown in Figure 2 A, first substrate 21 is provided with planarization layer 23.Spacer P
The first end away from second substrate 22 contacts with planarization layer 23.Fig. 3 shows Fig. 2 A
The enlarged diagram of the planarization layer on the shown first substrate contacted with spacer.Such as Fig. 3 institute
Show, be formed with groove on the planarization layer 23 of the first substrate of the first end in contact of spacer
24, the first end of spacer contacts with groove 24.Multiple shrinkage pool 25 it is formed with in groove 24,
Degree of depth m of shrinkage pool 25 can be such as the 10%～75% of planarization layer thickness.Shrinkage pool 25 to
The orthographic projection shape of first substrate can be such as tetragon, circle etc..That is groove
24 are formed by multiple shrinkage pools 25.Shrinkage pool 25 can increase rubbing between groove surfaces and spacer
Wiping power.Owing to forming the technique of shrinkage pool 25, the degree of depth of shrinkage pool 25 is the deepest, then shrinkage pool
25 is the biggest to the area of the projection of first substrate, and concrete can adjust according to the needs used
The degree of depth of shrinkage pool.The planarization layer of first substrate contacted with spacer is so set, can in case
Only scratch pixel transmittance district in the effect lower slider of external force to pixel transmittance district due to spacer
Both alignment layers and then the extruding light leak caused are bad.
Refer to Fig. 4 A, it illustrates first substrate in the application display floater and overlook and spacer
First end perspective view on the first substrate.
As shown in Figure 4 A, the first end of spacer projection P 1 ' on first substrate 21 is along figure
First direction distribution shown in 4A.It is to say, spacer on first substrate 21 along first
Directional spreding.When display floater is display panels, first direction and scan line extension side
To parallel.With the groove 24 in the planarization layer of the first end in contact of spacer to first substrate
The shape of the projection 24 ' of 21 can be such as polygon, circle etc..Groove 24 is to the first base
The orthographic projection 24 ' of plate 21 covers the spacer the first end away from second substrate to first substrate
Orthographic projection P1 '.It is to say, the first end of spacer is positioned at groove.Such that just exist
Under External Force Acting, spacer is also not easy to skid off groove, say, that between groove structure makes
Spacer post is not easy to slide into the pixel transmittance district of first substrate.The pixel decreasing first substrate is saturating
The both alignment layers that light district causes owing to spacer slides scratches, thus improves owing to both alignment layers scratches
And the light leak that causes is bad.
Fig. 4 B shows the enlarged diagram of Fig. 4 A further groove.As shown in Figure 4 B, groove 24
Including the region 253 between multiple shrinkage pools 25 and shrinkage pool.Shrinkage pool 25 is to the throwing of first substrate
The shape of shadow can be such as rectangle, rhombus, circle etc..Optional in some of the present embodiment
In implementation, shrinkage pool 25 includes the first shrinkage pool 251 and the second shrinkage pool 252.First shrinkage pool 251
For any one shrinkage pool 25 in multiple shrinkage pools 25, the second shrinkage pool 252 is and the first shrinkage pool 251
The shrinkage pool 25 that distance is minimum.The center O1 of the first shrinkage pool 251 and the center of the second shrinkage pool 252
Distance d between O2 meets following condition: 2um < d < 6um.Wherein, many in groove 24
The arrangement of individual shrinkage pool 25 can be the arrangement of rule, it is also possible to for irregular arrangement.At groove
Multiple shrinkage pools of middle setting make groove surfaces uneven, add between spacer and groove
Frictional force, increase spacer further and skid off the resistance of groove, thus further improve
The light leak caused owing to spacer slip causes both alignment layers to scratch is bad.
Fig. 5 shows in display floater shown in Fig. 2 A, the another kind of structural representation of spacer.
In some optional implementations of the present embodiment, as it is shown in figure 5, spacer P and the first base
First end P1 ' of plate contact includes multiple 3rd shrinkage pool P12.The shape of the 3rd shrinkage pool P12, big
Little and on the first end P1 ' distribution such as can be with the planarization layer concave of first substrate
The shape of the shrinkage pool in groove, size and be distributed identical.So, due to the first end tool of spacer
There is multiple 3rd shrinkage pool, increase the first end of spacer and the frictional force of groove further, from
And it is bad to further improve the light leak caused owing to spacer slip causes both alignment layers to scratch.
Please continue to refer to Fig. 6, it illustrates on the first substrate contacted with spacer shown in Fig. 2 A
The enlarged diagram of another kind of planarization layer.In the optional implementation of these some implemented,
As shown in Figure 6, the planarization layer 63 on the first substrate contacted with spacer is (with in Fig. 2 A
Planarization layer 23) in groove 64 include multilamellar platform 65.And every layer of platform 65 is to first
The area that the projection of substrate is covered differs.From bottom portion of groove upwards, every layer of platform 65 is to
The area covered of the projection of one substrate increases successively.It is to say, groove 64 is by difference
Layer platform 65 composition.Degree of depth m of groove can be such as the 10%～75% of planarization layer thickness.
First end of spacer can be with any one layer of contact with platform in groove 64.Groove is so set,
Owing to groove is made up of the platform of different layers, when one end of spacer is arranged on a certain layer platform
Time upper, due to the effect of the step of platform so that spacer is difficult to skid off this layer of platform.So,
There is the groove of multilamellar platform structure block the first end of spacer and skid off outside groove, improve
Owing to spacer slides, the light leak caused is bad and colour cast is bad.
In some optional implementations of the present embodiment, display floater can be LCD
Plate.First substrate can be such as array base palte, and second substrate can be such as color membrane substrates.
As shown in Figure 4 A, first substrate 21 is previously provided with multi-strip scanning line 201, pixel electricity
Pole 202 and the multiple vias 203 being distributed on planarization layer along scan line 201 bearing of trend.
In array base palte, also include thin film transistor (TFT) (being not drawn in figure), thin film transistor (TFT) include grid,
Drain/source.Wherein, grid electrically connects with scan line 201.Putting down on above-mentioned first substrate 21
Smoothization layer is arranged on thin film transistor (TFT), scan line 201.It is arranged on first substrate 21
The source/drain of pixel electrode 202 and thin film transistor (TFT) is by the via being distributed on planarization layer
203 connect.Groove in the above-mentioned first substrate 21 contacted with spacer such as can be arranged at
Between two vias 203 adjacent on scan line bearing of trend.Display panels also includes
The liquid crystal layer being arranged between array base palte and color membrane substrates.Groove knot on above-mentioned array base palte
The shrinkage pool structure of structure and spacer adds the frictional force between groove and spacer so that
Spacer post is not easy to slide in a groove.The most not only can reduce spacer and slide into pixel transmittance
District and scratch the bad incidence rate of light leak that alignment film causes, it is also possible to improve due to spacer slide
The colour cast that thickness of liquid crystal between the array base palte and the color membrane substrates that cause is uneven and causes is bad.
Please continue to refer to Fig. 7, it illustrates one embodiment of the application display floater manufacture method
Flow process 700.As it is shown in fig. 7, the application display floater manufacture method comprises the following steps:
Step 701, forms planarization layer on the first substrate.
In the present embodiment, planarization layer can be such as organic film.It is to say,
One layer of organic film with planarization effect is formed on one substrate.
Step 702, forms groove on planarization layer becomes, and groove includes multiple shrinkage pool.
In a step 702, the planarization layer formed on the first substrate is formed groove.At this
In the optional implementation of some of embodiment, it is possible to use half mask plate (Halftone) technique exists
Groove is formed on the planarization layer of above-mentioned first substrate.Specifically can pre-set on half mask plate
The exposure rate of the various location of respective slot forms groove.Use half mask plate at the first base
The groove formed on the planarization layer of plate such as can include multiple shrinkage pool.The shape of these shrinkage pools
Shape can be identical, it is also possible to different.Or use half mask plate at the planarization layer of first substrate
The groove of upper formation can include multilamellar platform, start the top to groove from bottom portion of groove
Platform, multilamellar platform increases successively to the area of the orthographic projection of first substrate.
In some optional implementations of the present embodiment, it is also possible to use and there is multiple through hole
Mask plate forms groove on the planarization layer of above-mentioned first substrate.Use and there is multiple through hole
The groove that mask plate is formed on the planarization layer of first substrate such as can include multiple shrinkage pool.
The shape of the through hole in above-mentioned mask plate can be such as one or more in polygon, circle.
The areal extent of above-mentioned through hole can be such as 2.25～4um2.Multiple through hole bags in mask version
Include the first through hole and the second through hole.Between center and the center of the second through hole of the first through hole away from
Meet from L: 2um < L < 6um, any one through hole during wherein the first through hole is multiple through hole,
Second through hole is the through hole minimum with the first through hole distance.
Owing to the size of above-mentioned through hole is less than the wavelength of the irradiation light of use in photoetching process
10 times, there is diffraction when a branch of irradiation light is irradiated to above-mentioned through hole.There is the light beam of diffraction
There is the center spot of maximum brightness on the first substrate, and be centrally located outside hot spot
Multiple light and dark rings of light (or part of the ring of light).So, corresponding to different through holes
The light and dark ring of light (or part of the ring of light) outside center spot includes the portion of overlap
Point, overlapping light and dark ring of light generation light superposition or counteracting.Corresponding to each through hole
Center spot forms a shrinkage pool, the center of shrinkage pool and through hole on the planarization layer of first substrate
Center corresponding.Also by the part of the light and dark ring of light superposition of multiple through hole diffraction simultaneously
Erode a part of planarization layer.Therefore, the table between any two shrinkage pool of the inside of groove
The height in face is also below the height on the planarization layer surface outside groove.
Step 703, forms spacer, spacer on the second substrate relative with first substrate
Including the first end away from second substrate, the first end contacts with groove.
In the present embodiment, can be by being coated with an interlayer spacer post material on second substrate, so
Rear use photoetching process forms spacer.It is formed with second substrate and the first substrate phase of spacer
To setting.So, spacer is between first substrate and second substrate.Spacer is away from
One end of two substrates is considered as the first end.First end of spacer and in step 702 the first of formation
Groove on substrate planarization layer contacts.Meanwhile, groove covers to the orthographic projection of first substrate
First end of spacer is to the orthographic projection of first substrate, it is, the first end of spacer is positioned at
In groove.
In some optional implementations of the present embodiment, above-mentioned display floater manufacture method is also wrapped
Include the mask plate the first end shape at spacer using half mask plate or use to have multiple through hole
Become multiple 3rd shrinkage pool.
In the present embodiment, above-mentioned display floater manufacture method such as may be used for making liquid crystal
Show panel.Then first substrate can be such as the array base palte for making display panels,
Second substrate can be such as the color membrane substrates for making display panels.At the present embodiment
Some optional implementations in, above-mentioned display floater manufacture method can also include: first
Before forming planarization layer on substrate, form pixel electrode, thin film transistor (TFT) on the first substrate
And scan line.Wherein, thin film transistor (TFT) includes grid, source/drain electrode.Scan line and grid
Such as can arrange with layer, and scan line electrically connects with grid.It is brilliant that planarization layer is arranged on thin film
On body pipe and scan line.It addition, above-mentioned display floater manufacture method is additionally may included in flat
Multiple via is formed along scan line bearing of trend on smoothization layer, so that pixel electrode and film crystal
The source/drain of pipe is connected by via.Concrete, can set on half mask plate forming groove
Put the opening of corresponding via to form via, or arrange on the mask plate with multiple through hole
The opening of corresponding via forms multiple via.It is to say, formed while forming groove
Via, forms groove in other words while forming via.It is positioned at the planarization layer of array base palte
On groove such as can be formed between two vias adjacent along scan line bearing of trend.
Above description is only the preferred embodiment of the application and the explanation to institute's application technology principle.
It will be appreciated by those skilled in the art that invention scope involved in the application, however it is not limited on
State the technical scheme of the particular combination of technical characteristic, also should contain without departing from invention simultaneously
In the case of design, carried out combination in any by above-mentioned technical characteristic or its equivalent feature and formed
Other technical scheme.Such as features described above has similar with (but not limited to) disclosed herein
The technical scheme that the technical characteristic of function is replaced mutually and formed.
Claims (11)
1. a display floater, it is characterised in that described display floater include first substrate and with
The second substrate that described first substrate is oppositely arranged, and it is arranged on described first substrate and described
Spacer between second substrate, described spacer includes the first end away from described second substrate；
Described first substrate includes planarization layer, and described planarization layer is formed groove, described
Groove includes multiple shrinkage pool；
Described first end contacts with described groove；
Wherein, described groove covers described first end to described to the orthographic projection of described first substrate
The orthographic projection of first substrate.
Display floater the most according to claim 1, it is characterised in that described shrinkage pool deep
Degree is the 10%～75% of described planarization layer thickness.
Display floater the most according to claim 1, it is characterised in that described shrinkage pool includes
First shrinkage pool and the second shrinkage pool, the center of the center of described first shrinkage pool and described second shrinkage pool it
Spacing d meets: 2um < d < 6um；
Wherein, described first shrinkage pool is any one shrinkage pool in the plurality of shrinkage pool, described
Two shrinkage pools are the shrinkage pool minimum with described first shrinkage pool distance.
Display floater the most according to claim 1, it is characterised in that described first end bag
Include multiple 3rd shrinkage pool.
5. according to the display floater described in claim 1-4 any one, it is characterised in that institute
Stating display floater is display panels；
Described first substrate is array base palte, and described second substrate is color membrane substrates；
Described first substrate includes multi-strip scanning line, and many along the distribution of scan line bearing of trend
Individual via, the pixel electrode being arranged on described first substrate leads to the source/drain of thin film transistor (TFT)
Cross described via to connect；
Described groove is located between two described vias adjacent on described scan line bearing of trend.
6. a display floater manufacture method, it is characterised in that described method includes:
Form planarization layer on the first substrate；
Forming groove on described planarization layer, described groove includes multiple shrinkage pool；
The second substrate relative with described first substrate is formed spacer, described spacer position
Between described first substrate and described second substrate, described spacer includes away from described second
First end of substrate, described first end contacts with described groove；
Wherein, described groove covers described first end to described to the orthographic projection of described first substrate
The orthographic projection of first substrate.
Display floater manufacture method the most according to claim 6, it is characterised in that described
Planarization layer is formed groove, including:
Half mask plate is used to form described groove on described planarization layer.
Display floater manufacture method the most according to claim 6, it is characterised in that described
Planarization layer is formed groove, also includes:
The mask plate with multiple through hole is used to form described groove on described planarization layer；
Wherein, the plurality of through hole be shaped as in polygon, circle one or more；
The center of described shrinkage pool is corresponding with the center of described through hole.
Display floater manufacture method the most according to claim 8, it is characterised in that described
Through hole includes the first through hole and the second through hole, the center of described first through hole and described second through hole
Center between distance L meet: 2um < L < 6um；
Wherein, described first through hole is any one through hole in the plurality of through hole, described
Two through holes are the through hole minimum with described first through hole distance.
10. according to the display floater manufacture method described in claim 7 or 8, it is characterised in that
Described display floater manufacture method also includes:
Use described half mask plate or there is the mask plate of multiple through hole described the described in using
One end forms multiple 3rd shrinkage pool.
11. display floater manufacture methods according to claim 6, it is characterised in that institute
State display floater manufacture method for making display panels；
Described first substrate is array base palte, and described second substrate is color membrane substrates；
Described display floater manufacture method also includes:
Before the described planarization layer of formation on the first substrate, described first substrate is formed
Pixel electrode, thin film transistor (TFT) and scan line, wherein, described thin film transistor (TFT) include grid,
Source/drain electrode, and described scan line electrically connects with described grid；
Described planarization layer is arranged on described thin film transistor (TFT) and described scan line, in institute
State and form multiple via along described scan line bearing of trend on planarization layer, described pixel electrode with
The source/drain of described thin film transistor (TFT) is connected by described via；
Described groove be formed at two described vias adjacent along described scan line bearing of trend it
Between.
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| CN201610498253.5A CN106019670B (en) | 2016-06-29 | 2016-06-29 | Display panel and preparation method thereof |
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| CN201610498253.5A CN106019670B (en) | 2016-06-29 | 2016-06-29 | Display panel and preparation method thereof |
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| CN106019670B CN106019670B (en) | 2019-07-12 |
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| WO2018205511A1 (en) * | 2017-05-12 | 2018-11-15 | Boe Technology Group Co., Ltd. | Display substrate, display apparatus, and method of fabricating display substrate |
| CN108873522A (en) * | 2018-06-29 | 2018-11-23 | 上海天马微电子有限公司 | Display panel, display device and manufacturing method of display panel |
| CN109950285A (en) * | 2019-03-28 | 2019-06-28 | 京东方科技集团股份有限公司 | A kind of array substrate and preparation method thereof, mask plate, display device |
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