CN106018497B - 一种半导体气体传感器低频温度调制检测方法 - Google Patents
一种半导体气体传感器低频温度调制检测方法 Download PDFInfo
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- CN106018497B CN106018497B CN201610562247.1A CN201610562247A CN106018497B CN 106018497 B CN106018497 B CN 106018497B CN 201610562247 A CN201610562247 A CN 201610562247A CN 106018497 B CN106018497 B CN 106018497B
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- sensor
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 36
- 238000001514 detection method Methods 0.000 title claims abstract description 29
- 238000000034 method Methods 0.000 title claims abstract description 28
- 238000010438 heat treatment Methods 0.000 claims abstract description 19
- 230000000737 periodic effect Effects 0.000 claims abstract description 4
- 230000000306 recurrent effect Effects 0.000 claims abstract description 4
- 238000005457 optimization Methods 0.000 claims description 6
- 230000005611 electricity Effects 0.000 claims 2
- 238000002620 method output Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
- G01N27/123—Circuits particularly adapted therefor, e.g. linearising circuits for controlling the temperature
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201610562247.1A CN106018497B (zh) | 2016-07-18 | 2016-07-18 | 一种半导体气体传感器低频温度调制检测方法 |
Applications Claiming Priority (1)
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CN201610562247.1A CN106018497B (zh) | 2016-07-18 | 2016-07-18 | 一种半导体气体传感器低频温度调制检测方法 |
Publications (2)
Publication Number | Publication Date |
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CN106018497A CN106018497A (zh) | 2016-10-12 |
CN106018497B true CN106018497B (zh) | 2019-02-19 |
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CN201610562247.1A Active CN106018497B (zh) | 2016-07-18 | 2016-07-18 | 一种半导体气体传感器低频温度调制检测方法 |
Country Status (1)
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CN (1) | CN106018497B (zh) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1141433A (zh) * | 1995-02-24 | 1997-01-29 | Lg电子株式会社 | 气体检测仪及其方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10361007A1 (de) * | 2003-08-28 | 2005-03-31 | Industrial Technology Research Institute | Gepulstes Gaskonzentrations-Messsystem und zugehöriges Verfahren |
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2016
- 2016-07-18 CN CN201610562247.1A patent/CN106018497B/zh active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1141433A (zh) * | 1995-02-24 | 1997-01-29 | Lg电子株式会社 | 气体检测仪及其方法 |
Non-Patent Citations (3)
Title |
---|
Gas-dependent response in the temperature transient of SnO2 gas sensors;Yukio Hiranaka et al.;《Sensors and actuators B》;19921231;第177-182页 |
气体传感器的温度调制技术研究进展;魏广芬 等;《传感器与微***》;20101231;第29卷(第5期);第1-4页,尤其是正文第2页第1栏第2段 |
陶瓷微热板气体传感器阵列及检测***研究;赵文杰;《万方学位论文》;20160129;第78-81页以及104-105页 |
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CN106018497A (zh) | 2016-10-12 |
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Effective date of registration: 20231211 Address after: 215200 Puxi Development Zone, Lili Town, Wujiang District, Suzhou City, Jiangsu Province Patentee after: Suzhou Chenlu Technology Industry Investment Management Co.,Ltd. Address before: No. 2226, 22nd Floor, No. 66 Cuilong Street, Longquan Street, Longquanyi District, Chengdu City, Sichuan Province, 610199 Patentee before: Sichuan Panyingda Technology Co.,Ltd. Effective date of registration: 20231211 Address after: No. 2226, 22nd Floor, No. 66 Cuilong Street, Longquan Street, Longquanyi District, Chengdu City, Sichuan Province, 610199 Patentee after: Sichuan Panyingda Technology Co.,Ltd. Address before: 150080 No. 52, Xuefu Road, Nangang District, Heilongjiang, Harbin Patentee before: HARBIN University OF SCIENCE AND TECHNOLOGY |
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